The automatic focusing device of laser cofocal scanner
Technical field
The Electro-Optical Sensor Set field that the automatic focusing device of laser cofocal scanner belongs to is biological, medical treatment, scientific instrument are used.
Background technology:
Laser cofocal scanner is compared with simple microscope, has higher resolution, is widely used in biology, life, medical treatment and the scientific instrument.Existing focusing technology and device, they are researched and developed at different technical fields, can not be applicable to laser cofocal scanner fully.As the patent No. is ZL98229444.1, the Chinese utility model patent of " focus control of lithography machine of submicron " by name discloses a kind of litho machine focus control, it is characterized by: the imaging of mark is through being carved object, little object lens, behind the catoptron, be divided into two-way by spectroscope, one road catoptric imaging is in the four-quadrant receiver, another Reuter penetrates through imagery of cylindrical mirror in ccd image sensor, two-way output defocus signal and target amount of bias are sent into single-chip microcomputer, the control piezoelectric ceramics promotes flexible hinge, drive quilt and carve the motion that object is made big displacement or micrometric displacement, reach the target position of focal plane.It does not detect and uses reflected light path, is not suitable in the laser cofocal scanner.
Goal of the invention
The object of the present invention is to provide a kind of automatic focusing device of laser cofocal scanner.
The invention is characterized in: the automatic focusing device of laser cofocal scanner, contain confocal light path and focusing light path, focusing control circuit and focus adjusting mechanism is characterized in that:
Described confocal light path and focusing light path contain successively by laser instrument 1, first pin hole 2, lens 3, two input paths with dichroic beamsplitter (4,5), object lens 6 and sample 8 formations at optical axis angle at 45, wherein laser instrument 1 is near first pin hole 2, first pin hole 2 is positioned on the front focal plane of lens 3, and sample 8 is placed on the back focal plane of object lens 6;
Along what the light path from sample laser light reflected and the fluorescence institute approach that inspires set gradually be: described object lens 6, described dichroic beamsplitter 5, lens 3, pin hole 2 and photomultiplier 10, wherein said photomultiplier 10 and second pin hole 2 are near placement, described second pin hole 2 is positioned on the back focal plane of lens 3, and this road is confocal light path;
Along what another light path from sample laser light reflected and the fluorescence institute approach that inspires set gradually be: described object lens 6, described two dichroic beamsplitters 5,4, astigmatic lens 11 and four-quadrant photo detector 12, wherein said four-quadrant photo detector 12 is placed on the back focal plane of astigmatic lens 11, and this road is reflective focusing light path;
Focusing control circuit is made of following each several part: four-quadrant photo detector 12 produces the output of four road electric signal, the amplifying circuit 13 that input end is connected with four road electrical signals of described four-quadrant photo detector 12, the filtering circuit 14 that input end links to each other with above-mentioned amplifying circuit 13 output terminals, the analog to digital conversion circuit 15 that input end links to each other with above-mentioned filtering circuit (14) output terminal, the digital signal processor 16 that input end links to each other with above-mentioned analog to digital conversion circuit 15 output terminals, the photoelectric isolation module circuit 18 that input end links to each other with above-mentioned digital signal processor 16 output terminals, the D/A converting circuit 19 that input end links to each other with above-mentioned photoelectric isolation module circuit 18 output terminals, the motor-driven power amplification circuit 20 that input end links to each other with above-mentioned D/A converting circuit 19 output terminals, the actuating motor 21 that input end links to each other with above-mentioned motor-driven power amplification circuit 20 output terminals, and the computing machine 17 that links to each other with above-mentioned digital signal processor 16 output terminals of input interface;
Focus adjusting mechanism is the leading screw-nut type mechanical focusing mechanism of joining with the actuating motor output shaft.
Feature of the present invention also is:
Described confocal light path and focusing light path contain successively by laser instrument 1, first pin hole 2, lens 3, two input paths with dichroic beamsplitter (4,5), object lens 6 and sample 8 formations at optical axis angle at 45, wherein laser instrument 1 is near first pin hole 2, first pin hole 2 is positioned on the front focal plane of lens 3, and sample 8 is placed on the back focal plane of object lens 6;
Along what the light path from sample 8 laser light reflected and the fluorescence institute approach that inspires set gradually be: described object lens 6, described dichroic beamsplitter 5, lens 3, pin hole 2 and photomultiplier 10, wherein said photomultiplier and second pin hole 2 are near placement, described second pin hole 2 is positioned on the back focal plane of lens 3, and this road is confocal light path;
Along what the light path from the laser of sample transmission and the fluorescence institute approach that inspires set gradually be: object lens 6, catoptron 4 and astigmatic lens 11, with four-quadrant photo detector 12, wherein said four-quadrant photo detector 12 is placed on the back focal plane of astigmatic lens 11, and this road is a transmission-type focusing light path;
Focusing control circuit is made of following each several part: four-quadrant photo detector 12 produces the output of four road electric signal, the amplifying circuit 13 that input end is connected with four road electrical signals of described four-quadrant photo detector 12, the filtering circuit 14 that input end links to each other with above-mentioned amplifying circuit 13 output terminals, the analog to digital conversion circuit 15 that input end links to each other with above-mentioned filtering circuit (14) output terminal, the digital signal processor 16 that input end links to each other with above-mentioned analog to digital conversion circuit 15 output terminals, the photoelectric isolation module circuit 18 that input end links to each other with above-mentioned digital signal processor 16 output terminals, the D/A converting circuit 19 that input end links to each other with above-mentioned photoelectric isolation module circuit 18 output terminals, the motor-driven power amplification circuit 20 that input end links to each other with above-mentioned D/A converting circuit 19 output terminals, the actuating motor 21 that input end links to each other with above-mentioned motor-driven power amplification circuit 20 output terminals, and the computing machine 17 that links to each other with above-mentioned digital signal processor 16 output terminals of input interface;
Focus adjusting mechanism is the leading screw-nut type mechanical focusing mechanism of joining with the actuating motor output shaft.
Its feature also is: actuating motor 21 is fixed on motor mounting plate 26 1 ends in the described mechanical focusing mechanism, the other end of described motor mounting plate 26 is fixed on mounting plate 24 tops, described actuating motor 21 is fixedlyed connected with leading screw 22 by shaft joint 30, described leading screw 22 links to each other with feed screw nut 29 with leading screw support 23 simultaneously, described leading screw support 23 other ends are fixed on the described mounting plate 24, described feed screw nut 29 is fixed on removable bottom 27 1 ends, the other end of described removable bottom 27 overlaps 7 fixed lenss 6 by object lens, described removable bottom 27 is fixedlyed connected with movable guiding rail 28, described movable guiding rail 28 links to each other with fixing slide block 25, have photoelectric sensor 31 on the described fixedly slide block 25, described fixedly slide block 25 other ends are fixed to described mounting plate 24 bottoms.Described actuating motor drives described leading screw by described shaft joint and rotates, described feed screw nut is moved up and down along described leading screw, be with described animal mirror cover and object lens to move up and down, arrive the target focal plane position that requires, finish the purpose of focusing up to sample along the optical axis direction.Photoelectric sensor plays location, spacing effect, avoids camera lens and sample to collide mutually.
Use proof: it has reached intended purposes.
Description of drawings
Fig. 1 and Fig. 2: the index path of two of optical system device embodiment in the laser cofocal scanner.
Fig. 3: the circuit theory block scheme of focusing control circuit.
Fig. 4: the mechanical principle block diagram of leading screw-nut type focus adjusting mechanism.
Embodiment:
Ask for an interview Fig. 1.Laser instrument 1 is near pin hole 2, pin hole 2 is placed on the front focal plane of lens 3, laser projects lens 3 through pin hole 2 and becomes directional light, through with the object lens 6 of optical axis angle at 45 dichroic beamsplitter 4, dichroic beamsplitter 5, large-numerical aperture vertically focal imaging to sample 8, object lens 6 are fixed on the object lens cover 7, sample 8 is placed on the specimen holder 9, excited sample 8 is sent fluorescence, scattering also takes place at this in laser simultaneously, form two-way light: reflected light and transmitted light, each road light all are made up of laser and the fluorescence that inspires.
In reflected light path, reflected light becomes directional light through object lens 6, behind the arrival dichroic beamsplitter 5, is formed reflected light and transmitted light by beam split once more.In reflected light path, reflected light is the fluorescence that ejects from sample, is reflexed on the lens 3 by dichroic beamsplitter 5, and focal imaging is to the preceding pin hole 2 of photomultiplier, and the photomultiplier tube 10 that is nestled up pin hole 2 detects the only confocal light path in this road; In transmitted light path, transmitted light is a laser light reflected from the sample, through dichroic beamsplitter 5, projects on the dichroic beamsplitter 4, and once more by beam split, wherein reflected light is reflected on the astigmatic lens 11, converges on the four-quadrant photo detector 12.Suitably select the focusing parameter of the both direction of astigmatic lens 11, can obtain certain focusing range and certain focusing accuracy.
In transmitted light path, transmitted light is through sample.
Goodbye Fig. 2.Laser instrument 1 is near pin hole 2, pin hole 2 is placed on the front focal plane of lens 3, laser projects lens 3 through pin hole 2 and becomes directional light, pass through that vertically focal imaging is to sample 8 with the object lens 6 of optical axis angle at 45 dichroic beamsplitter 5 and large-numerical aperture, object lens 6 are fixed on the object lens cover 7 again, and sample 8 is placed on the specimen holder 9, excited sample 8 is sent fluorescence, laser also at this scattering takes place simultaneously, forms two-way light: reflected light and transmitted light, each road light all are made up of laser and the fluorescence that inspires.In transmitted light path, transmitted light is through object lens 6 and catoptron 4, arrive astigmatic lens 11 at last and image on the four-quadrant photo detector 12, the focusing parameter when the both direction of selecting astigmatic lens 11 can obtain certain focusing range and certain focusing accuracy.
Goodbye Fig. 3.A branch of light that four-quadrant photo detector 12 will converge on it divides four regionally detectings, obtain the output of four road electric signal, enter digital signal processor 16 and computing machine 17 through amplifier 13, wave filter 14 and analog to digital converter 15, calculate and store the out of focus information of sample spot.According to this out of focus information, send the automatic focusing order by digital signal processor 16 or computing machine 17, remove to drive actuating motor 21 by photoelectric isolation module 18, digital to analog converter 19 and motor-driven power amplification circuit 20, drive focus adjusting mechanism and focus.
In Fig. 4, on one end of the actuating motor 21 fixed electrical machinery installing plates 26 in the focusing mechanical mechanism, the other end of described motor mounting plate 32 is fixed on the top of mounting plate 24, described actuating motor 21 is fixedlyed connected with leading screw 22 by shaft joint 30, described leading screw 22 links to each other with feed screw nut 29 with leading screw support 23 simultaneously, described leading screw support 23 other ends are fixed to the middle part of described mounting plate 24, described feed screw nut 29 is fixed on the end of removable bottom 27, the other end of described removable bottom 27 is by object lens fixed cover 7 fixed lenss 6, fixedly connected with movable guiding rail 28 in the middle part of described removable bottom 27, described movable guiding rail 28 links to each other with fixing slide block 25, have photoelectric sensor 31 on the described fixedly slide block 25, the other end of described fixedly slide block 25 is fixed to described mounting plate 24 bottoms.Motor 21 drives leading screw 22 rotations by shaft joint 30 like this, thereby feed screw nut 29 is moved up and down along leading screw 22, drive object lens cover 7 and object lens 6 and move up and down, arrive the object lens 6 back focal plane positions that require, finish focusing up to sample 8 along the optical axis direction.Photoelectric sensor 31 plays location, spacing effect, avoids camera lens 6 and sample 8 to collide mutually.
It can with the mode test sample of automatic focusing, have the advantage that focusing range is big, precision is high.