CN117630063A - Off-line type nano-scale open tube X-ray 3D detection equipment - Google Patents
Off-line type nano-scale open tube X-ray 3D detection equipment Download PDFInfo
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- CN117630063A CN117630063A CN202311660586.XA CN202311660586A CN117630063A CN 117630063 A CN117630063 A CN 117630063A CN 202311660586 A CN202311660586 A CN 202311660586A CN 117630063 A CN117630063 A CN 117630063A
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- 238000001514 detection method Methods 0.000 title claims abstract description 67
- 238000009434 installation Methods 0.000 claims abstract description 10
- 230000005855 radiation Effects 0.000 claims abstract description 10
- 229920000049 Carbon (fiber) Polymers 0.000 claims description 8
- 239000004917 carbon fiber Substances 0.000 claims description 8
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 8
- 230000000694 effects Effects 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000002071 nanotube Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 5
- 238000002591 computed tomography Methods 0.000 description 3
- 210000003813 thumb Anatomy 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/309—Accessories, mechanical or electrical features support of sample holder
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- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention relates to the technical field of X-ray detection, in particular to an off-line nanoscale open tube X-ray 3D detection device, which comprises: a lead house; a radiation source assembly comprising an X-ray source disposed in a lead room; the detection desktop assembly comprises an installation upright post arranged in a lead room, a first xyz driving mechanism is arranged on the installation upright post, a desktop base plate is arranged at the output end of the first xyz driving mechanism, a modularized desktop for bearing or clamping an inspected object is arranged on the desktop base plate through a quick-dismantling structure, and the modularized desktop is positioned above the X-ray source; the flat panel detection assembly comprises a mounting frame arranged in a lead room, a second xyz driving mechanism is arranged on the mounting frame, a turntable is arranged at the output end of the second xyz driving mechanism, a flat panel detector is arranged on the turntable, and the flat panel detector is located above the modularized desktop. The detection equipment can meet the detection requirements on the detected objects on the modularized desktop, and can realize single-seed multifunctional detection, regardless of plane CT or cone beam CT.
Description
Technical Field
The invention relates to the technical field of X-ray detection, in particular to an off-line nanoscale open tube X-ray 3D detection device.
Background
Along with development of technology and age progress, informatization and intelligence are mature, the influence of electronic products on life is more and more important, and the requirements on quality of the electronic products are also higher and higher. The X-ray detection is a nondestructive and efficient product detection mode, and compared with the traditional 2D X-ray detection, the 3D-CT detection can be used for finding out internal defects of products more clearly and intuitively.
The existing X-ray detection equipment is mainly divided into: 2D detection class, 2.5D detection class, online 2D detection class, online CT class, online 2.5D detection class, etc., but these equipment function singleization, in view of the current industry to the quality requirement upgrading, to X-ray nondestructive test requirement is higher and higher, single functional model can't satisfy all demands of customer, especially nanometer off-line open tube X-ray detection equipment, very rarely in domestic market.
Disclosure of Invention
Based on the problems, the invention aims to provide an off-line nanoscale open tube X-ray 3D detection device, which realizes single-model multifunctional detection and meets the detection requirements of different products.
In order to achieve the above purpose, the invention adopts the following technical scheme:
an off-line nanoscale open tube X-ray 3D detection apparatus, comprising:
a lead house;
a radiation source assembly comprising an X-ray source disposed in a lead room;
the detection desktop assembly comprises an installation upright post arranged in a lead room, a first xyz driving mechanism is arranged on the installation upright post, a desktop base plate is arranged at the output end of the first xyz driving mechanism, a modularized desktop for bearing or clamping an inspected object is arranged on the desktop base plate through a quick-dismantling structure, and the modularized desktop is positioned above the X-ray source;
the flat panel detection assembly comprises a mounting frame arranged in a lead room, a second xyz driving mechanism is arranged on the mounting frame, a turntable is arranged at the output end of the second xyz driving mechanism, a flat panel detector is arranged on the turntable, and the flat panel detector is located above the modularized desktop.
Optionally, the modularization desktop includes the desktop mounting panel, and quick detach structure is including setting up the quick installation bush on the desktop backing plate and setting up the quick locker on the desktop mounting panel, quick locker and quick installation bush cooperation in order to realize the quick assembly disassembly of modularization desktop.
Optionally, the modularization desktop is used for cooperating plane CT and detects the use, is provided with the carbon fiber board of placing the examination thing on the desktop mounting panel, and quick locker is located the outside of carbon fiber board.
Optionally, the modularization desktop is used for cooperating the CT detection of awl bundle and uses, is provided with the cavity that supplies the examination thing to overturn on the desktop mounting panel, and quick locker is located the outside of cavity, is provided with the clamping jaw mechanism of centre gripping and drive examination thing on the side of cavity.
Optionally, the quick locker adopts a thumb turning locker, the thumb turning locker comprises a knob and a bolt linked with the knob, and when the bolt is inserted into the quick mounting bushing and is driven by the knob to rotate towards the locking direction, the modularized desktop assembly is locked with the desktop backing plate; when the bolt is driven by the knob to rotate towards the unlocking direction and is separated from the quick installation bushing, the modularized desktop assembly is separated from the desktop backing plate.
Optionally, the first xyz driving mechanism includes the z-direction guide rail that sets up on the installation stand, and the z-direction guide rail erects and is equipped with first fly leaf on the upper bracket of z-direction guide rail, is provided with y-direction guide rail on the first fly leaf, and y-direction guide rail erects and is equipped with the second fly leaf on the upper bracket of y-direction guide rail, is provided with x-direction guide rail on the second fly leaf, and the desktop mat frame is located on the x-direction guide rail.
Optionally, the second xyz actuating mechanism is including setting up the x axle straight line module on the mounting bracket, and the output of x axle straight line module is provided with first slide, is provided with the straight line module of y axle on the first slide, and the output of the straight line module of y axle is provided with the second slide, is provided with the z axis rail on the second slide, and the third fly leaf is erect on the z axis rail, and the revolving stage rotationally sets up on the third fly leaf.
Optionally, a sensor for defining the rotation angle of the turntable is provided on the third movable plate.
Optionally, the lead door is set up on the lead room, the ray source subassembly still includes X axis rail, and X axis rail sets up in the bottom of lead room and arranges towards the lead door, and X axis rail erects L shape support, and the X ray source installs on L shape support up for the X ray source can pass through lead door business turn over lead room.
Optionally, a pull handle and a rail clamp for locking the x-axis rail are provided on the L-shaped bracket.
In summary, compared with the prior art, the off-line nanoscale open tube X-ray 3D detection device has the beneficial effects that through the detection desktop assembly capable of moving along three axes and the plane detection assembly, the translation and rotation of the modularized desktop and the plane detector are realized, so that the detected objects on the modularized desktop can meet the detection requirements in both plane CT and cone beam CT, and single-machine multifunctional detection is realized.
Drawings
FIG. 1 is a structural outline view of an off-line nanoscale open tube X-ray 3D detection device provided by an embodiment of the present invention;
fig. 2 is a schematic diagram illustrating an internal structure of an offline nano-scale open tube X-ray 3D detection device according to an embodiment of the present invention;
FIG. 3 is a schematic diagram II of an internal structure of an offline nano-scale open tube X-ray 3D detection device according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a radiation source assembly in an off-line nanoscale open tube X-ray 3D detection device according to an embodiment of the present invention;
FIG. 5 is a schematic view of the test desktop assembly of FIG. 2;
FIG. 6 is a schematic view of the test desktop assembly of FIG. 3;
fig. 7 is a schematic structural diagram of a second movable plate for detecting a desktop assembly in an offline nano-scale open tube X-ray 3D detection apparatus according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a flat panel detection component in an offline nano-scale open tube X-ray 3D detection device according to an embodiment of the present invention;
fig. 9 is an enlarged view at a in fig. 8.
In the figure:
1. a lead house; 11. a lead door;
2. a radiation source assembly; 21. an X-ray source; 22. an x-axis rail; 23. an L-shaped bracket; 24. a handle; 25. a rail clamp;
3. detecting a desktop assembly; 31. installing an upright post; 32. a first xyz drive mechanism; 321. a z-direction guide rail; 322. a first movable plate; 323. a y-direction guide rail; 324. a second movable plate; 325. an x-direction guide rail; 33. a tabletop pad; 34. a desktop mounting plate; 35. rapidly installing a bushing; 36. a quick locker; 37. a carbon fiber plate; 38. a cavity; 39. a jaw mechanism;
4. a flat panel detection assembly; 41. a mounting frame; 42. a second xyz drive mechanism; 421. an x-axis linear module; 422. a first slider; 423. a y-axis linear module; 424. a second slider; 425. a z-axis rail; 426. a third movable plate; 43. a turntable; 44. a flat panel detector; 45. an inductor.
Detailed Description
In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clear, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to fall within the scope of the invention.
Referring to fig. 1 to 9, the present preferred embodiment provides an off-line nano-scale open tube X-ray 3D detection apparatus, which includes a lead room 1, a radiation source assembly 2, a detection tabletop assembly 3 and a flat panel detection assembly 4.
The lead room 1 is used for isolating radiation, and a lead door 11 is arranged on the lead room 1 and used for feeding and discharging objects to be detected and maintaining equipment.
Referring to fig. 4 in detail, the radiation source assembly 2 includes an X-ray source 21 and an X-axis rail 22 disposed in the lead chamber 1, the X-axis rail 22 is disposed at the bottom of the lead chamber 1 and is arranged towards the lead door 11, an L-shaped bracket 23 is disposed on the X-axis rail 22, and the X-ray source 21 is installed on the L-shaped bracket 23 upwards, so that the X-ray source 21 can enter and exit the lead chamber 1 through the lead door 11.
Further, a handle 24 and a guide rail clamp 25 for locking the x-axis rail 22 are arranged on the L-shaped bracket 23, and the radiation source assembly 2 is pulled out of the lead room 1 through the handle 24 and the linear guide rail assembly, so that the maintenance is convenient; the L-shaped bracket 23 and the X-axis rail 22 are fixed by the guide rail clamp 25, so that the positioning is convenient, and the vibration of the X-ray source 21 can be prevented.
Referring to fig. 2, 3 and 5 to 7 in detail, the detecting desktop assembly 3 includes a mounting upright 31 disposed in the lead room 1, a first xyz driving mechanism 32 is disposed on the mounting upright 31, a desktop pad 33 is disposed at an output end of the first xyz driving mechanism 32, and a modularized desktop for carrying or clamping a detected object is mounted on the desktop pad 33 through a quick-dismantling structure, and is located above the X-ray source 21.
Specifically, to adjust the relative position of the object to be inspected with respect to the X-ray source 21, the first xyz driving mechanism 32 includes a z-guide rail 321 provided on the mounting upright 31, a first movable plate 322 is mounted on the z-guide rail 321, a y-guide rail 323 is provided on the first movable plate 322, a second movable plate 324 is mounted on the y-guide rail 323, an X-guide rail 325 is provided on the second movable plate 324, a tabletop pad 33 is mounted on the X-guide rail 325, and each movable plate is driven by a servo motor and a screw nut pair, so that the object to be inspected is detected in all directions, and different magnifications can be realized.
The modularized desktop can be quickly installed and detached so as to replace different types of desktops and meet different detection requirements. Specifically, the modular desktop includes a desktop mounting plate 34, and the quick-release structure includes a quick-mount bushing 35 disposed on the desktop backing plate 33 and a quick-lock 36 disposed on the desktop mounting plate 34, where the quick-lock 36 cooperates with the quick-mount bushing 35 to achieve quick-release of the modular desktop.
Preferably, the quick locker 36 is a thumb-turning locker, and the thumb-turning locker comprises a knob and a bolt linked with the knob, and when the bolt is inserted into the quick mounting bushing 35 and is driven by the knob to rotate in a locking direction (ON gear), the modularized desktop is locked with the desktop backing plate 33; when the latch is rotated by the knob in the unlocking direction (OFF gear) and out of the quick mount bushing 35, the modular desktop is separated from the desktop spacer 33. The structure of the quick lock 36 is not limited thereto, and locks that perform similar functions are applicable.
Referring to fig. 5 in detail, when the modularized tabletop is used in combination with planar CT detection, the required tabletop mounting plate 34 is provided with a carbon fiber plate 37 for placing a detected object, the quick locking device 36 is located on the outer side of the carbon fiber plate 37, the modularized tabletop is replaced by a tabletop special for planar CT only by unlocking the quick locking device 36 and the quick mounting bushing 35, and then the quick locking device 36 is locked, and the detected object is placed on the carbon fiber plate 37 to perform planar CT scanning.
Referring to fig. 6 in detail, when the modularized tabletop is used in conjunction with cone beam CT detection, a cavity 38 for turning over a detected object is provided on the tabletop mounting plate 34, a quick locking device 36 is located at the outer side of the cavity 38, a clamping jaw mechanism 39 for clamping and driving the detected object is provided on the side surface of the cavity 38, the modularized tabletop is replaced by a tabletop special for cone beam CT by only unlocking the quick locking device 36 and the quick mounting bushing 35, then the quick locking device 36 is locked, the detected object is clamped and fixed by the clamping jaw mechanism 39 to perform cone beam CT scanning, and the cone beam CT can perform spiral scanning.
Further, the jaw mechanism 39 may be an electric jaw, a chuck jaw, a pneumatic jaw, or the like, in which one side is an electric jaw and the other side is a chuck jaw, and the object to be inspected can be simultaneously clamped by the electric jaw and the chuck jaw.
Referring to fig. 8 and 9 in detail, the flat panel detection assembly 4 includes a mounting frame 41 disposed in the lead room 1, a second xyz driving mechanism 42 is disposed on the mounting frame 41, a turntable 43 is disposed at an output end of the second xyz driving mechanism 42, a flat panel detector 44 is disposed on the turntable 43, and the flat panel detector 44 is located above the modularized desktop.
According to different imaging requirements, the flat panel detector 44 needs to have the capabilities of translation and angle adjustment, specifically, the second xyz driving mechanism 42 comprises an x-axis linear module 421 arranged on the mounting frame 41, a first sliding seat 422 is arranged at the output end of the x-axis linear module 421, a y-axis linear module 423 is arranged on the first sliding seat 422, a second sliding seat 424 is arranged at the output end of the y-axis linear module 423, a z-axis rail 425 is arranged on the second sliding seat 424, a third movable plate 426 is arranged on the z-axis rail 425 in an erected mode, the turntable 43 is rotatably arranged on the third movable plate 426, the third movable plate 426 can also be driven by a servo motor and a screw nut pair, and the turntable 43 is independently driven to rotate by the motor, so that the flat panel detector 44 moves in the xyz direction, and the turntable 43 drives the flat panel detector 44 to rotate.
Further, the third movable plate 426 is provided with a sensor 45 for limiting the rotation angle of the turntable 43, so that the turntable 43 drives the flat panel detector 44 to rotate within a normal angle range, preferably ±70°.
In summary, the offline nano open tube X-ray 3D detection device can cope with the detection functions of 2D plane, 2.5D inclination and 3D CT scanning reconstruction, and particularly realizes the translation and rotation of the modularized desktop and the flat panel detector 44 through the detection desktop assembly 3 and the flat panel detector assembly 4 capable of three-axis movement, so that the detected object on the modularized desktop can meet the detection requirements no matter plane CT or cone beam CT, and single-seed multifunctional detection is realized.
The above embodiments merely illustrate the basic principles and features of the present invention, and the present invention is not limited to the above embodiments, but can be variously changed and modified without departing from the spirit and scope of the present invention, which is within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. Offline open-nanotube X-ray 3D detection device, characterized by comprising:
a lead house (1);
a radiation source assembly (2) comprising an X-ray source (21) arranged in the lead chamber (1);
the detection desktop assembly (3) comprises an installation upright post (31) arranged in the lead room (1), a first xyz driving mechanism (32) is arranged on the installation upright post (31), a desktop base plate (33) is arranged at the output end of the first xyz driving mechanism (32), a modularized desktop for bearing or clamping a detected object is arranged on the desktop base plate (33) through a quick-dismantling structure, and the modularized desktop is positioned above the X-ray source (21);
the flat panel detection assembly (4) comprises a mounting frame (41) arranged in the lead room (1), a second xyz driving mechanism (42) is arranged on the mounting frame (41), a rotary table (43) is arranged at the output end of the second xyz driving mechanism (42), a flat panel detector (44) is arranged on the rotary table (43), and the flat panel detector (44) is located above the modularized tabletop.
2. The off-line nanoscale open tube X-ray 3D detection device of claim 1, wherein the modular desktop comprises a desktop mounting plate (34), the quick release structure comprises a quick mount bushing (35) disposed on the desktop pad (33) and a quick locker (36) disposed on the desktop mounting plate (34), the quick locker (36) cooperating with the quick mount bushing (35) to effect quick disassembly of the modular desktop.
3. The off-line nanoscale open tube X-ray 3D detection device according to claim 2, wherein the modular tabletop is used for planar CT detection, a carbon fiber plate (37) for placing an object to be detected is arranged on the tabletop mounting plate (34), and the rapid locker (36) is located on the outer side of the carbon fiber plate (37).
4. The off-line nanoscale open tube X-ray 3D detection device according to claim 2, wherein the modular tabletop is used for cone beam CT detection, a cavity (38) for turning over a detected object is arranged on the tabletop mounting plate (34), the rapid locker (36) is located at the outer side of the cavity (38), and a clamping jaw mechanism (39) for clamping and driving the detected object is arranged on the side face of the cavity (38).
5. The off-line nano-scale open tube X-ray 3D detection apparatus according to claim 2, wherein the quick locker (36) employs a thumb-turn locker comprising a knob and a latch coupled to the knob, the modular desktop assembly being locked with the desktop mat (33) when the latch is inserted into the quick-mount bushing (35) and rotated in a locking direction by the knob drive; when the latch is driven by the knob to rotate in an unlocking direction and is disengaged from the quick mount bushing (35), the modular desktop assembly is separated from the desktop spacer (33).
6. The offline nano-scale open tube X-ray 3D detection device according to claim 1, wherein the first xyz driving mechanism (32) comprises a z-direction guide rail (321) arranged on the mounting upright (31), a first movable plate (322) is arranged on the z-direction guide rail (321), a y-direction guide rail (323) is arranged on the first movable plate (322), a second movable plate (324) is arranged on the y-direction guide rail (323), an X-direction guide rail (325) is arranged on the second movable plate (324), and the desktop pad (33) is arranged on the X-direction guide rail (325).
7. The offline open-nanotube X-ray 3D detection device according to claim 1, wherein the second xyz driving mechanism (42) comprises an X-axis linear module (421) arranged on the mounting frame (41), a first sliding seat (422) is arranged at an output end of the X-axis linear module (421), a y-axis linear module (423) is arranged on the first sliding seat (422), a second sliding seat (424) is arranged at an output end of the y-axis linear module (423), a z-axis rail (425) is arranged on the second sliding seat (424), a third movable plate (426) is arranged on the z-axis rail (425), and the turntable (43) is rotatably arranged on the third movable plate (426).
8. The off-line nanoscale open tube X-ray 3D detection apparatus of claim 7 wherein the third movable plate (426) is provided with a sensor (45) defining the angle of rotation of the turntable (43).
9. The off-line nanoscale open tube X-ray 3D detection device of claim 1, wherein a lead door (11) is provided on the lead room (1), the radiation source assembly (2) further comprises an X-axis rail (22), the X-axis rail (22) is arranged at the bottom of the lead room (1) and faces the lead door (11), an L-shaped support (23) is arranged on the X-axis rail (22), and the X-ray source (21) is upwards mounted on the L-shaped support (23) so that the X-ray source (21) can enter and exit the lead room (1) through the lead door (11).
10. The off-line nanoscale open tube X-ray 3D detection device according to claim 9, characterized in that a pull handle (24) and a rail clamp (25) for locking the X-axis rail (22) are provided on the L-shaped support (23).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311660586.XA CN117630063A (en) | 2023-12-05 | 2023-12-05 | Off-line type nano-scale open tube X-ray 3D detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202311660586.XA CN117630063A (en) | 2023-12-05 | 2023-12-05 | Off-line type nano-scale open tube X-ray 3D detection equipment |
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