CN117626444A - Diffusion furnace control method - Google Patents
Diffusion furnace control method Download PDFInfo
- Publication number
- CN117626444A CN117626444A CN202311520249.0A CN202311520249A CN117626444A CN 117626444 A CN117626444 A CN 117626444A CN 202311520249 A CN202311520249 A CN 202311520249A CN 117626444 A CN117626444 A CN 117626444A
- Authority
- CN
- China
- Prior art keywords
- heating
- furnace body
- furnace
- temperature
- controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 48
- 238000000034 method Methods 0.000 title claims abstract description 45
- 238000010438 heat treatment Methods 0.000 claims abstract description 281
- 238000001514 detection method Methods 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000013021 overheating Methods 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
Abstract
The invention discloses a control method of a diffusion furnace, which comprises a furnace body and a heating device for heating the furnace body, wherein the control method comprises the following steps: controlling the heating device to heat the furnace body; when the actual temperature of the furnace body gradually rises to a corresponding preset temperature threshold, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold, wherein the preset temperature threshold is inversely related to the heating power. The technical scheme can solve the problem that the production efficiency of the solar cell and the performance of the solar cell cannot be considered when the diffusion furnace in the related technology performs the diffusion process.
Description
Technical Field
The invention relates to the technical field of diffusion furnace equipment, in particular to a control method of a diffusion furnace.
Background
In single crystal silicon solar cell fabrication, the solar cell needs to be formed by a phosphorus diffusion process to form a P-N junction. However, the phosphorus diffusion process generally requires a relatively high temperature, and the diffusion apparatus for manufacturing the solar cell sheet in the related art heats the diffusion furnace by means of a heating device in a constant temperature heating manner. If the heating power of the heating device is set higher, the overheating phenomenon of the diffusion furnace is easily caused when the diffusion furnace is heated, so that the performance of the solar cell is affected; if the heating power is low, the heating rate of the heating device to the diffusion furnace is affected, so that the production efficiency of the solar cell is affected. Therefore, the diffusion furnace in the related art cannot achieve both the production efficiency of the solar cell and the performance of the solar cell in performing the diffusion process.
Disclosure of Invention
The invention discloses a control method of a diffusion furnace, which aims to solve the problem that the production efficiency of a solar cell and the performance of the solar cell cannot be considered when the diffusion furnace in the related technology performs a diffusion process.
In order to solve the technical problems, the invention is realized as follows:
the application discloses a control method of diffusion furnace, diffusion furnace includes furnace body and is used for to the heating device of furnace body heating, control method includes:
controlling the heating device to heat the furnace body;
when the actual temperature of the furnace body gradually rises to a corresponding preset temperature threshold, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold, wherein the preset temperature threshold is inversely related to the heating power.
The technical scheme adopted by the invention can achieve the following technical effects:
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the control method for the diffusion furnace controls the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold value, and the preset temperature threshold value is inversely related to the heating power, so that the heating device can heat the furnace body with larger heating power when the heating device just begins to heat the furnace body, and the heating rate of the heating device to the furnace body is improved; when the temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the heating power of the heating device can be gradually reduced, so that when the temperature of the furnace body gradually rises to a temperature value required to reach a diffusion process, the heating device heats the furnace body with smaller heating power, and when the temperature of the furnace body reaches the temperature value required to reach the diffusion process, the heating device stops heating, so that the phenomenon that the furnace body is overheated due to overlarge heating device power when the temperature of the furnace body is required to reach the temperature value required to reach the diffusion process can be avoided, the performance of the solar cell can be further prevented from being influenced due to overheating of the furnace body, and the production efficiency of the solar cell and the performance of the solar cell can be considered.
Drawings
Fig. 1 is a flowchart of a control method of a diffusion furnace according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a diffusion furnace according to an embodiment of the present invention, wherein a in the drawing represents a heating element, b in the drawing represents a furnace body, b1 in the drawing represents a furnace mouth, and b2 in the drawing represents a furnace tail.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the technical solutions of the present invention will be clearly and completely described below with reference to specific embodiments of the present invention and corresponding drawings. It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The technical scheme disclosed by each embodiment of the invention is described in detail below with reference to the accompanying drawings.
Referring to fig. 2, an embodiment of the present invention discloses a control method of a diffusion furnace, and the disclosed diffusion furnace may be used for performing a diffusion process on a solar cell during a process for manufacturing the solar cell. The diffusion process mainly comprises the process steps of temperature rising, oxidization, pre-deposition, redistribution, oxidization, gettering and the like, and the diffusion furnace is required to be at a higher temperature in the process of temperature rising, oxidization, pre-deposition, redistribution, oxidization and the like, so that the heating of the diffusion furnace is critical to the diffusion process.
The disclosed diffusion furnace comprises a furnace body and a heating device for heating the furnace body, wherein the heating device can be an electric heating wire, an infrared heating device, an electromagnetic heating device and the like, and the type of the heating device is not particularly limited in the embodiment of the application.
The control method of the diffusion furnace disclosed by the embodiment of the application comprises the following steps:
s101, controlling the heating device to heat the furnace body.
When the heating device starts heating the furnace body, the heating power of the heating device may be the maximum heating power, that is, the maximum heating power within the rated power range of the heating device.
S102, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold value.
Wherein the preset temperature threshold is inversely related to the heating power.
It should be noted that, in the embodiment of the present application, a plurality of preset temperature thresholds with sequentially increasing temperatures are provided, and the largest one of the plurality of preset temperature thresholds may be the temperature value that needs to be reached by the furnace body when the diffusion process is performed. The heating power of the heating device has a one-to-one correspondence with a plurality of preset temperature thresholds, and the preset temperature thresholds are inversely related to the heating power, namely, the larger the preset temperature threshold is, the smaller the heating power of the corresponding heating device is. For example, the plurality of preset temperature thresholds may include 850 ℃, 900 ℃, 950 ℃, 1000 ℃, and then the heating power of the heating device corresponding to the preset temperature threshold of 850 ℃ may be 200W, the heating power of the heating device corresponding to the preset temperature threshold of 900 ℃ may be 150W, the heating power of the heating device corresponding to the preset temperature threshold of 950 ℃ may be 110W, and the heating power of the heating device corresponding to the preset temperature threshold of 1000 ℃ may be 80W. The above is merely a specific example of the preset temperature threshold value and the heating power of the heating device, and does not constitute a limitation on the preset temperature threshold value and the heating power of the heating device.
When the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the control method for the diffusion furnace controls the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold value, and the preset temperature threshold value is inversely related to the heating power, so that the heating device can heat the furnace body with larger heating power when the heating device just begins to heat the furnace body, and the heating rate of the heating device to the furnace body is improved; when the temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the heating power of the heating device can be gradually reduced, so that when the temperature of the furnace body gradually rises to a temperature value required to reach a diffusion process, the heating device heats the furnace body with smaller heating power, and when the temperature of the furnace body reaches the temperature value required to reach the diffusion process, the heating device stops heating, so that the phenomenon that the furnace body is overheated due to overlarge heating device power when the temperature of the furnace body is required to reach the temperature value required to reach the diffusion process can be avoided, the performance of the solar cell can be further prevented from being influenced due to overheating of the furnace body, and the production efficiency of the solar cell and the performance of the solar cell can be considered.
The control of the heating power of the heating device may be directly controlling the heating power of the heating device, for example, when the heating device includes a heating wire, the value of the current flowing through the heating wire may be directly controlled to control the magnitude of the heating power.
In another embodiment, the heating device may include a plurality of heating elements, wherein controlling the heating device to heat the furnace body, that is, S101 may include:
and A1, controlling all heating elements to heat the furnace body.
The control of all the heating elements to heat the furnace body means that all the heating elements are controlled to heat the furnace body when the heating device just starts to heat the furnace body.
When the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold, that is, S102 may include:
and A2, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, controlling the number of heating elements for heating the furnace body to be reduced to the number corresponding to the preset temperature threshold, so that the heating power of the heating device is reduced to the heating power corresponding to the preset temperature threshold, wherein the number of heating elements for heating the furnace body is inversely related to the preset temperature threshold.
For example, the plurality of preset temperature thresholds may include 850 ℃, 900 ℃, 950 ℃, 1000 ℃, and then the number of heating elements corresponding to the preset temperature threshold of 850 ℃ may be 5, and the heating power of the heating device may be 200W; the number of heating elements corresponding to the preset temperature threshold of 900 ℃ can be 4, at this time, the heating power of the heating device can be 150W, the number of heating elements corresponding to the preset temperature threshold of 950 ℃ can be 3, at this time, the heating power of the heating device can be 110W, the number of heating elements corresponding to the preset temperature threshold of 1000 ℃ can be 2, at this time, the heating power of the heating device can be 80W.
According to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, the number of heating elements for heating the furnace body is controlled to be reduced to the number corresponding to the preset temperature threshold, so that the heating power of the heating device is controlled by controlling the number of the heating elements for heating the furnace body, and the heating power of each heating element is relatively accurate, so that the heating power of the heating device is controlled more accurately.
In order to make the heating device heat the furnace body more uniformly, optionally, a plurality of heating elements can be arranged at intervals in sequence from the furnace mouth of the furnace body to the furnace tail of the furnace body. In the disclosed control method, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, controlling the number of heating elements for heating the furnace body to be reduced to the number corresponding to the preset temperature threshold value may include:
and B1, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, controlling the plurality of heating elements to symmetrically and sequentially stop heating of the heating elements from the outermost side in the direction from the furnace mouth to the furnace tail, so that the number of the heating elements for heating the furnace body is reduced to the number corresponding to the preset temperature threshold value.
According to the control method disclosed by the embodiment of the application, the plurality of heating elements are sequentially arranged at intervals along the furnace mouth of the furnace body to the furnace tail of the furnace body, so that when the heating device just begins to heat the furnace body, the plurality of heating elements heat the furnace body at the same time, and the heating device heats the furnace body relatively uniformly; when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the heating of the heating elements is stopped from the outermost side in a symmetrical mode in the direction from the furnace mouth to the furnace tail by controlling the heating elements, so that the temperature of each region in the furnace body can be relatively uniform when the number of the heating elements in a heating state gradually decreases.
Because the temperature of the furnace mouth of the furnace body and the furnace tail of the furnace body are dissipated relatively fast in the middle area of the furnace body, the temperature distribution difference in the furnace body is large easily, and in order to relieve the problem of the large temperature distribution difference in the furnace body, optionally, a plurality of heating elements can be sequentially distributed at intervals from the furnace mouth of the furnace body to the furnace tail of the furnace body, wherein the heating power of the heating element at the furnace mouth and the heating power of the heating element at the furnace tail can be larger than the heating power of the heating element between the furnace mouth position and the furnace tail position.
According to the control method, the heating elements are sequentially arranged at intervals along the furnace mouth of the furnace body to the furnace tail of the furnace body, and the heating power of the heating elements at the furnace mouth and the heating power of the heating elements at the furnace tail are both larger than those of the heating elements between the furnace mouth position and the furnace tail position, so that the heating elements at the furnace mouth and the furnace tail can compensate heat dissipation of the furnace mouth and the furnace tail region, and the temperature distribution in the furnace body is relatively uniform.
Optionally, the control method disclosed in the embodiment of the present application may further include: and step C1, when the actual temperature of the furnace body rises to the target temperature, controlling all heating elements to stop heating.
The target temperature is the temperature value that the furnace body disclosed in the above embodiment needs to reach when performing the diffusion process,
according to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body rises to the target temperature, all heating pieces are controlled to stop heating, so that the temperature of the furnace body is prevented from being overheated.
Further, after controlling all the heating elements to stop heating when the actual temperature of the furnace body rises to the target temperature, the disclosed control method may further include:
and D1, controlling one heating element in the plurality of heating elements to heat the furnace body when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature.
It should be noted that the first difference may be set according to actual requirements, for example, the first difference may be 30 ℃, 50 ℃, and the like.
And D2, after the actual temperature of the furnace body is risen to the target temperature again, controlling the heating element to stop heating.
According to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature, one heating element of the plurality of heating elements is controlled to heat the furnace body, so that the temperature control purpose of the furnace body is achieved.
In order to avoid overheating of the furnace by the heating element when the actual temperature of the furnace falls below the target temperature by the first difference, optionally, controlling the heating of the furnace by one of the plurality of heating elements when the actual temperature of the furnace falls below the target temperature by the first difference may include:
and E1, when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature, controlling one heating element with the minimum heating power in the plurality of heating elements to heat the furnace body.
According to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature, one heating element with the minimum heating power in the plurality of heating elements is controlled to heat the furnace body, so that the situation that the heating element heats the furnace body when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature is avoided.
An optional embodiment, a plurality of heating elements can be arranged along the furnace mouth of the furnace body to the furnace tail of the furnace body at intervals in sequence, and the diffusion furnace can further comprise a plurality of temperature detection elements, wherein the plurality of temperature detection elements can be used for detecting the local temperature of the local area of the furnace body, and the plurality of local areas detected by the plurality of temperature detection elements are in one-to-one correspondence with the plurality of heating elements, namely the positions of the plurality of heating elements for heating the furnace body are in one-to-one correspondence with the plurality of local areas detected by the plurality of temperature detection elements.
When the actual temperature of the furnace body rises to the target temperature, after all the heating pieces are controlled to stop heating, the disclosed control method can further comprise:
and F1, controlling a plurality of temperature detection pieces to detect the local temperature of the local area corresponding to the temperature detection pieces.
It should be noted that the temperature detecting member may be an infrared temperature detecting member, a contact temperature detecting member, or the like, and the embodiment of the present application does not limit a specific form of the temperature detecting member.
And F2, when the local temperature of any local area is reduced to be lower than the first difference value of the target temperature, controlling the heating element corresponding to the local area with the local temperature reduced to be lower than the first difference value of the target temperature to heat.
Specifically, when the temperature of any one of the plurality of local areas detected by the plurality of temperature detecting elements is reduced to be lower than the target temperature by a first difference, the heating element corresponding to the local area of which the temperature of the plurality of local areas is reduced to be lower than the target temperature by the first difference is controlled to heat, so that the actual temperature of the local area of which the temperature is reduced to be lower than the target temperature is returned to the target temperature, and heating is stopped after the actual temperature is returned to the target temperature.
According to the control method disclosed by the embodiment of the application, the temperatures of the plurality of local areas of the furnace body are detected by the plurality of temperature detection pieces, so that when the local temperature of any local area is reduced to be lower than the first difference value of the target temperature, the plurality of heating pieces can control the local temperature to be reduced to be lower than the heating piece corresponding to the local area of the first difference value of the target temperature, and the accurate temperature control of the local area of the furnace body is realized.
Optionally, the diffusion furnace may further include an alarm device, and when the actual temperature of the furnace body rises to the target temperature, after all the heating elements are controlled to stop heating, the control method may further include:
and G1, when the actual temperature of the furnace body continuously rises to be higher than the target temperature by a second difference value, controlling an alarm to alarm.
It should be noted that the second difference may be set according to the requirement, for example, the second difference may be 50 ℃, 80 ℃, or the like.
According to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body continuously rises to be higher than the second difference value of the target temperature, the alarm is controlled to give an alarm so as to prompt a user to intervene in time or start corresponding protection measures, and therefore the situation that the performance of the solar cell is influenced due to the fact that the temperature of the furnace body is too high is avoided.
In order to further avoid the influence of the excessive temperature of the furnace body on the performance of the solar cell, optionally, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, controlling the number of heating elements for heating the furnace body to be reduced to the number corresponding to the preset temperature threshold may include:
and step H1, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, preferentially stopping heating of a heating element with larger heating power in the plurality of heating elements in a heating state, so that the number of heating elements for heating the furnace body is reduced to the number corresponding to the preset temperature threshold value.
According to the control method disclosed by the embodiment of the application, when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the heating of the heating element with larger heating power in the plurality of heating elements in the heating state is stopped preferentially, so that when the temperature of the furnace body gradually rises to the target temperature, the heating element with smaller power is used for heating the furnace body, and the performance of the solar cell is prevented from being influenced due to the fact that the temperature of the furnace body is too high.
The foregoing embodiments of the present invention mainly describe differences between the embodiments, and as long as there is no contradiction between different optimization features of the embodiments, the embodiments may be combined to form a better embodiment, and in view of brevity of line text, no further description is provided herein.
The embodiments of the present invention have been described above with reference to the accompanying drawings, but the present invention is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those having ordinary skill in the art without departing from the spirit of the present invention and the scope of the claims, which are to be protected by the present invention.
Claims (10)
1. A control method of a diffusion furnace, characterized in that the diffusion furnace includes a furnace body and a heating device for heating the furnace body, the control method comprising:
controlling the heating device to heat the furnace body;
when the actual temperature of the furnace body gradually rises to a corresponding preset temperature threshold, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold, wherein the preset temperature threshold is inversely related to the heating power.
2. The control method according to claim 1, wherein the heating device includes a plurality of heating elements, the controlling the heating device to heat the furnace body includes:
controlling all the heating elements to heat the furnace body;
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, controlling the heating power of the heating device to be reduced to the heating power corresponding to the preset temperature threshold, including:
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold, controlling the number of heating elements for heating the furnace body to be reduced to the number corresponding to the preset temperature threshold, so that the heating power of the heating device is reduced to the heating power corresponding to the preset temperature threshold, wherein the number of heating elements for heating the furnace body is inversely related to the preset temperature threshold.
3. The control method according to claim 2, wherein the plurality of heating elements are sequentially arranged at intervals along the furnace mouth of the furnace body to the furnace tail of the furnace body;
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, controlling the number of heating elements for heating the furnace body to be reduced to the number corresponding to the preset temperature threshold value, including:
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the plurality of heating elements are controlled to symmetrically and sequentially stop heating of the heating elements from the outermost side along the direction from the furnace mouth to the furnace tail, so that the number of the heating elements for heating the furnace body is reduced to the number corresponding to the preset temperature threshold value.
4. The control method according to claim 2, wherein the plurality of heating elements are arranged at intervals in order from the furnace mouth of the furnace body to the furnace tail of the furnace body, wherein the heating power of the heating elements at the furnace mouth and the heating power of the heating elements at the furnace tail are both greater than the heating power of the heating elements located between the furnace mouth position and the furnace tail position.
5. The control method according to claim 2, characterized in that the control method further comprises: and when the actual temperature of the furnace body rises to the target temperature, controlling all the heating pieces to stop heating.
6. The control method according to claim 5, wherein after controlling all the heating elements to stop heating when the actual temperature of the furnace body rises to a target temperature, the control method further comprises:
controlling one of the heating elements to heat the furnace body when the actual temperature of the furnace body is reduced to be lower than the target temperature by a first difference value;
and after the actual temperature of the furnace body is risen to the target temperature again, controlling the heating piece to stop heating.
7. The control method according to claim 6, wherein the controlling one of the plurality of heating members to heat the furnace body when the actual temperature of the furnace body falls below the target temperature by a first difference value includes:
and when the actual temperature of the furnace body is reduced to be lower than the first difference value of the target temperature, controlling one heating element with the smallest heating power in the plurality of heating elements to heat the furnace body.
8. The control method according to claim 5, wherein the plurality of heating elements are sequentially arranged at intervals along the furnace mouth of the furnace body to the furnace tail of the furnace body, the diffusion furnace further comprises a plurality of temperature detection elements for detecting local temperatures of local areas of the furnace body, and the plurality of local areas detected by the plurality of temperature detection elements are in one-to-one correspondence with the plurality of heating elements;
when the actual temperature of the furnace body rises to the target temperature, after all the heating pieces are controlled to stop heating, the control method further comprises the following steps:
controlling the plurality of temperature detecting pieces to detect the local temperature of the local area corresponding to the plurality of temperature detecting pieces;
and when the local temperature of any local area is reduced to be lower than the first difference value of the target temperature, controlling the heating piece corresponding to the local area with the local temperature reduced to be lower than the first difference value of the target temperature to heat.
9. The control method according to claim 5, wherein the diffusion furnace further comprises an alarm device, and the control method further comprises, after controlling all the heating elements to stop heating when the actual temperature of the furnace body rises to a target temperature:
and when the actual temperature of the furnace body continuously rises to be higher than the target temperature by a second difference value, controlling the alarm to alarm.
10. The control method according to claim 2, wherein controlling the number of the heating elements that heat the furnace body to a number corresponding to the preset temperature threshold when the actual temperature of the furnace body rises to the corresponding preset temperature threshold includes:
when the actual temperature of the furnace body gradually rises to the corresponding preset temperature threshold value, the heating of the heating element with the larger heating power in the heating state is preferentially stopped, so that the number of the heating elements for heating the furnace body is reduced to the number corresponding to the preset temperature threshold value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311520249.0A CN117626444A (en) | 2023-11-15 | 2023-11-15 | Diffusion furnace control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311520249.0A CN117626444A (en) | 2023-11-15 | 2023-11-15 | Diffusion furnace control method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117626444A true CN117626444A (en) | 2024-03-01 |
Family
ID=90020828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311520249.0A Pending CN117626444A (en) | 2023-11-15 | 2023-11-15 | Diffusion furnace control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117626444A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4711989A (en) * | 1986-05-19 | 1987-12-08 | Thermco Systems, Inc. | Diffusion furnace multizone temperature control |
| CN103726033A (en) * | 2012-10-10 | 2014-04-16 | 无锡尚德太阳能电力有限公司 | Method for controlling plasma enhanced chemical vapor deposition heater body temperature |
| CN107388592A (en) * | 2017-08-23 | 2017-11-24 | 成都宇俊盛科技有限公司 | A kind of electric heating leads to boiler and its dynamic temp.-control method |
| CN111560606A (en) * | 2020-05-21 | 2020-08-21 | 北京北方华创微电子装备有限公司 | Heating furnace body control method in semiconductor heat treatment equipment, heating furnace body and equipment |
| CN114520162A (en) * | 2020-11-19 | 2022-05-20 | 中国科学院微电子研究所 | Diffusion equipment and heating control method thereof |
| CN218723170U (en) * | 2022-10-20 | 2023-03-24 | 浙江求是半导体设备有限公司 | Tube furnace process heating device |
| CN219824435U (en) * | 2023-01-19 | 2023-10-13 | 西安隆基乐叶光伏科技有限公司 | Diffusion furnace |
-
2023
- 2023-11-15 CN CN202311520249.0A patent/CN117626444A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4711989A (en) * | 1986-05-19 | 1987-12-08 | Thermco Systems, Inc. | Diffusion furnace multizone temperature control |
| CN103726033A (en) * | 2012-10-10 | 2014-04-16 | 无锡尚德太阳能电力有限公司 | Method for controlling plasma enhanced chemical vapor deposition heater body temperature |
| CN107388592A (en) * | 2017-08-23 | 2017-11-24 | 成都宇俊盛科技有限公司 | A kind of electric heating leads to boiler and its dynamic temp.-control method |
| CN111560606A (en) * | 2020-05-21 | 2020-08-21 | 北京北方华创微电子装备有限公司 | Heating furnace body control method in semiconductor heat treatment equipment, heating furnace body and equipment |
| CN114520162A (en) * | 2020-11-19 | 2022-05-20 | 中国科学院微电子研究所 | Diffusion equipment and heating control method thereof |
| CN218723170U (en) * | 2022-10-20 | 2023-03-24 | 浙江求是半导体设备有限公司 | Tube furnace process heating device |
| CN219824435U (en) * | 2023-01-19 | 2023-10-13 | 西安隆基乐叶光伏科技有限公司 | Diffusion furnace |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103699152B (en) | A kind of power device excess temperature protection method based on temperature curve slop control | |
| CN112151904B (en) | Control method and controller for battery thermal management, battery thermal management system and vehicle | |
| EP3343690B1 (en) | Heating control method and heating control device for battery structure, and battery system | |
| US11505098B2 (en) | Temperature control method, device and system for vehicle seat heating | |
| CN110767958B (en) | Method for controlling temperature difference by heating power battery | |
| CN104578295A (en) | Vehicle power battery low-temperature charging and heating system and method | |
| CN110843577B (en) | Intelligent charging pile power control method and device suitable for high altitude | |
| CN107275688A (en) | A kind of method and terminal of the control terminal of control terminal | |
| CN110994077A (en) | Uniform temperature heating method for power battery pack and storage medium | |
| CN111560606B (en) | Heating furnace body control method in semiconductor heat treatment equipment, heating furnace body and equipment | |
| CN111030259B (en) | Lithium battery charging method and device based on temperature | |
| CN117626444A (en) | Diffusion furnace control method | |
| EP2880752B1 (en) | Overload limitation in peak power operation | |
| KR20230172440A (en) | Method and apparatus for controlling temperature of battery pack | |
| CN106788358A (en) | IGBT method for excessive heating protection, device and electric equipment | |
| TWI697150B (en) | Controlling method and device of fuel cell system with multiple stack towers | |
| CN111473491A (en) | Continuously adjustable heat exchange quantity adjusting method and device and semiconductor air conditioner | |
| CN110360978B (en) | Cable sectional area calculation method based on direct current load distribution | |
| JP4217092B2 (en) | Air conditioner demand control device | |
| US7705637B2 (en) | Semiconductor switch and method for operating a semiconductor switch | |
| CN109189116A (en) | The temperature holding meanss and method of IC chip | |
| CN204478850U (en) | A kind of industrial furnace control system | |
| US11812522B2 (en) | Heating device and method for detecting failure of heating device | |
| CN104483995B (en) | A kind of method adjusting transformator live load | |
| CN109298729B (en) | Hot-spot temperature distribution-based fan grouping method for cooling system of oil-immersed power transformer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |