CN117589833B - Self-powered low-humidity sensor and preparation method thereof - Google Patents

Self-powered low-humidity sensor and preparation method thereof Download PDF

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CN117589833B
CN117589833B CN202410071406.2A CN202410071406A CN117589833B CN 117589833 B CN117589833 B CN 117589833B CN 202410071406 A CN202410071406 A CN 202410071406A CN 117589833 B CN117589833 B CN 117589833B
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CN117589833A (en
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吴可
焦明之
刘海顺
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China University of Mining and Technology CUMT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/126Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers

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Abstract

The invention relates to the technical field of humidity sensing, and particularly discloses a self-powered low-humidity sensor and a preparation method thereof, wherein the sensor comprises a substrate and electrodes connected to two sides of the substrate, a humidity sensing film is arranged in a region between the electrodes on the two sides of the substrate, and the humidity sensing film is a metal organic frame material loaded by inorganic salt; the preparation method comprises the following steps: preparing an aqueous dispersion of an inorganic salt-loaded metal organic framework material; and (3) sticking electrodes on two sides of the substrate, coating the aqueous dispersion of the inorganic salt loaded metal organic frame material on the substrate in a region between the electrodes on the two sides, and vacuum drying to obtain the self-powered low-humidity sensor. The self-powered low-humidity sensor prepared by the invention has strong hydrophilicity, strong ion dissociation capability and primary battery reaction, so that the sensor element realizes self-powered low-humidity sensing, does not need to be powered by an external power supply, has high sensitivity and high stability on low humidity, and can meet the detection requirements of static low humidity and dynamic low humidity.

Description

Self-powered low-humidity sensor and preparation method thereof
Technical Field
The invention belongs to the technical field of humidity sensing, and particularly relates to a self-powered low-humidity sensor and a preparation method thereof.
Background
The low humidity environment has wide application in the fields of semiconductor manufacturing, power transmission, aerospace and the like. Therefore, the method has important application significance for accurately detecting low humidity. Currently, low humidity detection techniques mainly include spectroscopy, chromatography, and low humidity sensors. However, spectroscopy and chromatography have the disadvantages of high cost, complex operation and inability to detect in real time, and thus have limited use scenarios. The low humidity sensor mainly includes a resistive type, a capacitive type, an impedance type, a mass type, and an optical type.
There are few reports related to low humidity sensors at present, wherein the impedance type low humidity sensor can realize low humidity sensing, but needs an external power supply to supply power, and has poor sensitivity and response/recovery time, so that the detection requirements of static low humidity and dynamic low humidity cannot be met at the same time.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a self-powered low-humidity sensor made of inorganic salt loaded metal-organic framework material, which can simultaneously meet the requirements of high-sensitivity static and dynamic low-humidity detection and does not need external power supply.
Specifically, the first aspect of the invention provides a self-powered low-humidity sensor, which comprises a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is arranged in a region between the electrodes on two sides of the substrate, and the humidity sensing film is an inorganic salt loaded metal-organic frame material.
As a further explanation of the invention, the electrodes are two of aluminum tape, copper tape, zinc tape, gold tape and silver tape, the distance between the electrodes at two sides is 0.1-1 mm, and the electrode area is 0.5-2 cm 2 The method comprises the steps of carrying out a first treatment on the surface of the The substrate is one of glass, PET and paper.
As a further explanation of the present invention, the inorganic salt is one of lithium bromide, lithium chloride and sodium chloride; the metal organic framework is one of MOF-801, MOF-303 and UiO-66.
The second aspect of the present invention provides a method for preparing the self-powered low humidity sensor, which comprises the following steps:
preparing an aqueous dispersion of an inorganic salt-loaded metal organic framework material;
and (3) sticking electrodes on two sides of a substrate, coating the aqueous dispersion of the inorganic salt loaded metal organic framework material on the substrate in a region between the electrodes on the two sides, and vacuum drying to obtain the self-powered low-humidity sensor.
As a further explanation of the present invention, the concentration of the aqueous dispersion of the inorganic salt-supported metal organic framework material is 10 to 100 mg/mL.
As a further illustration of the present invention, the preparation process of the inorganic salt-loaded metal organic framework material comprises:
dispersing the metal organic frame material in an ethanol solution of inorganic salt, and stirring until the material is dried after ultrasonic treatment.
As a further explanation of the invention, the concentration of the ethanol solution of the inorganic salt is 2-200 mg/mL, the mass of the metal organic frame material is 48-200 mg, the volume of the ethanol solution of the inorganic salt is 1-2 mL, and the mass fraction of the inorganic salt to the metal organic frame material loaded by the inorganic salt is 4-50 wt%.
As a further explanation of the present invention, the aqueous dispersion of the inorganic salt-supported metal organic frame material is coated on the substrate by a dropping method, and the dropping amount of the aqueous dispersion of the inorganic salt-supported metal organic frame material is 2 to 20 μl.
Compared with the prior art, the invention has the following beneficial technical effects:
the self-powered low-humidity sensor based on the inorganic salt loaded metal organic framework material provided by the invention has strong hydrophilicity, strong ion dissociation capability and primary cell reaction, so that the sensor element realizes self-powered low-humidity sensing, does not need an external power supply, has high sensitivity and high stability on low humidity, and can meet the detection requirements of static low humidity and dynamic low humidity.
Drawings
FIG. 1 is an XRD pattern of an inorganic salt-loaded metal-organic framework material according to example 1 of the present invention;
FIG. 2 is a graph of thermal weight loss of inorganic salt loaded metal organic framework material in example 1 of the present invention;
FIG. 3 is a top view of the self-powered low humidity sensor of embodiments 1-4 of the present invention;
FIG. 4 is a front view of the self-powered low humidity sensor of embodiments 1-4 of the present invention;
FIG. 5 is a graph showing the continuous voltage response of the self-powered low humidity sensor of example 1 of the present invention under dynamic low humidity;
FIG. 6 is a graph showing the cyclic response of the self-powered low humidity sensor of example 1 of the present invention at low humidity;
FIG. 7 is a response/recovery curve at 23% RH for the self-powered low humidity sensor of example 1 of the present invention;
FIG. 8 is a voltage response curve of the self-powered low humidity sensor of example 1 of the present invention at a static low humidity of 1 h;
fig. 9 shows the output voltage and current of the self-powered low humidity sensor of example 1 under different loads.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
As shown in fig. 3 and 4, the present embodiment provides a self-powered low humidity sensor, which includes a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is disposed in a region between the electrodes on two sides of the substrate, and the humidity sensing film is an inorganic salt loaded metal-organic frame material.
Wherein the electrodes on both sides are specifically copper tape and zinc tape, the distance between the electrodes on both sides is 1 mm, and the electrode area is 1 cm 2 The method comprises the steps of carrying out a first treatment on the surface of the The substrate is glass, the inorganic salt is lithium bromide, and the metal organic framework is MOF-801.
The preparation method of the self-powered low-humidity sensor comprises the following steps of:
step 1: synthesizing MOF-801 by a solvothermal method;
step 2: preparing 10 mg/mL of lithium bromide ethanol solution;
step 3: uniformly dispersing MOF-801 of 80 mg in a lithium bromide ethanol solution of 2 mL, carrying out ultrasonic treatment for 20 minutes, and stirring at room temperature until the solution is dried to obtain a lithium bromide-loaded metal organic framework material, wherein the structure and the components of the obtained material are shown in figures 1 and 2;
step 4: preparing 100 mg/mL of lithium bromide supported MOF-801 aqueous dispersion;
step 5: copper glue is adhered on the left side and the right side of the glass substrateThe distance between the electrodes of the tape and the zinc tape is 1 mm, and the electrode area is 1 cm 2 And transferring 10 mu L of dispersed liquid drops to gaps between the electrodes, and vacuum drying to obtain the self-powered low-humidity sensor element.
In this example, since the lithium bromide-supported MOF-801 is highly hydrophilic, the material can adsorb water molecules in a low humidity environment, wherein lithium bromide can dissociate into anions (Br ) And cations (Li) + ) The water molecules dissociate into hydrogen ions (H + ) And hydroxide ion (OH) ). The anions and cations can directionally move towards the electrodes at the two sides, and primary cell reaction occurs on the electrodes, so that voltage is generated between the electrodes at the two sides of the sensor, and self-power supply is realized. By changing the humidity, the adsorption quantity of water molecules of the material can be changed, the concentration of the reactive ions in the sensor is changed, the output voltage is changed, and the low-humidity sensing is realized.
The present embodiment defines the sensitivity of the sensor as s= (V) x -V 0 ) X, where V 0 Output voltage of sensor at 0% RH (% RH, relative humidity), V x The output voltage of the sensor is x% RH (x: 0-23); the response/recovery time is the time taken for the sensor's voltage signal to reach 90% change.
Figure 5 shows a continuous voltage response curve of the sensor at dynamic low humidity. The output voltage of the sensor is different at different humidities, wherein when the humidity increases, the output voltage increases, and when the humidity decreases to 0% RH, the output voltage of the sensor also decreases to 0 mV. In the humidity range of 0-23% RH, the sensitivity S of the sensor is 26.52 mV/% RH; indicating that it can be applied to self-powered dynamic low humidity detection.
Fig. 6 shows the cycling response curve of the sensor at low humidity. In 1600 s, the humidity is switched between 0% RH and 23% RH for a plurality of times, the output voltage of the sensor is changed along with the change, and the Relative Standard Deviation (RSD) is 0.095%; indicating that it has good low humidity sensing cycle stability.
Fig. 7 shows the response/recovery curve of the sensor at low humidity. When humidity is switched from 0% RH to 23% RH, the output voltage of the sensor reaches equilibrium after 64 s, and when humidity is switched from 23% RH to 0% RH, the output voltage of the sensor decreases to equilibrium after 104 s; indicating that it has better self-powered low humidity sensing performance.
Referring to fig. 5 to fig. 7, it can be seen that the self-powered low humidity sensor provided in the embodiment continuously has voltage output under dynamic low humidity, which indicates that the self-powered low humidity sensor has the capability of dynamic low humidity detection; indicating that it has better self-powered low humidity sensing performance.
Fig. 8 shows a voltage response curve of the sensor at 1 h at static low humidity. Within 1 h, the output voltage of the sensor is stable, and the voltage value is reduced by 6.56%; the self-powered static low-humidity detection device can be used for outputting voltage which can be stabilized for a long time under static low-humidity and can be applied to self-powered static low-humidity detection.
Fig. 9 shows the output voltage and current of the sensor under different loads. When the load resistance is increased at 23% RH, the output voltage is increased, the output current is reduced, the optimal load resistance is 1-M omega, and the maximum output power is 0.41 mu W/cm 2 The method comprises the steps of carrying out a first treatment on the surface of the Indicating that it can output energy externally without the need for an external power supply.
Example 2
As shown in fig. 3 and 4, the present embodiment provides a self-powered low humidity sensor, which includes a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is disposed in a region between the electrodes on two sides of the substrate, and the humidity sensing film is an inorganic salt loaded metal-organic frame material.
Wherein the two side electrodes are specifically aluminum tape and silver tape, the distance between the two side electrodes is 0.1 mm, and the electrode area is 0.5 cm 2 The method comprises the steps of carrying out a first treatment on the surface of the The substrate is paper, the inorganic salt is lithium chloride, and the metal organic framework is MOF-303.
The preparation method of the self-powered low-humidity sensor comprises the following steps of:
step 1: synthesizing MOF-303 by a solvothermal method;
step 2: preparing a lithium chloride ethanol solution with the concentration of 2 mg/mL;
step 3: uniformly dispersing the MOF-303 of 48 mg in a lithium chloride ethanol solution of 1 mL, performing ultrasonic treatment for 20 minutes, and stirring at room temperature until the MOF-303 is dried to obtain a lithium chloride loaded MOF-303;
step 4: preparing 10 mg/mL of lithium chloride loaded MOF-303 aqueous dispersion;
step 5: aluminum tape and silver tape were attached to the left and right sides of the paper substrate with a distance between the electrodes of 0.1. 0.1 mm and an electrode area of 0.5. 0.5 cm 2 2 mu L of dispersed liquid drops are removed at the gaps between the electrodes, and after vacuum drying, the self-powered low-humidity sensor element is obtained.
Example 3
As shown in fig. 3 and 4, the present embodiment provides a self-powered low humidity sensor, which includes a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is disposed in a region between the electrodes on two sides of the substrate, and the humidity sensing film is an inorganic salt loaded metal-organic frame material.
Wherein the electrodes on both sides are specifically gold tape and zinc tape, the distance between the electrodes on both sides is 0.5 mm, and the electrode area is 1.5 cm 2 The method comprises the steps of carrying out a first treatment on the surface of the The substrate is PET, and the inorganic salt is sodium chloride; the metal organic framework is UiO-66.
The preparation method of the self-powered low-humidity sensor comprises the following steps of:
step 1: synthesizing UiO-66 by a solvothermal method;
step 2: preparing 50 mg/mL sodium chloride ethanol solution;
step 3: uniformly dispersing the UiO-66 of 150 mg in a sodium chloride ethanol solution of 1.5 mL, performing ultrasonic treatment for 20 minutes, and stirring at room temperature until the mixture is dried to obtain the product; sodium chloride loaded UiO-66;
step 4: preparing 50 mg/mL inorganic salt loaded aqueous dispersion of UiO-66;
step 5: gold tape and zinc tape were adhered to the left and right sides of the PET substrate with a distance between the electrodes of 0.5. 0.5 mm and an electrode area of 1.5. 1.5 cm 2 And 5 mu L of dispersed liquid drops are removed at the gaps between the electrodes, and after vacuum drying, the self-powered low-humidity sensor element is obtained.
Example 4
As shown in fig. 3 and 4, the present embodiment provides a self-powered low humidity sensor, which includes a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is disposed in a region between the electrodes on two sides of the substrate, and the humidity sensing film is an inorganic salt loaded metal-organic frame material.
Wherein the electrodes on both sides are specifically copper tape and zinc tape, the distance between the electrodes on both sides is 1 mm, and the electrode area is 2 cm 2 The method comprises the steps of carrying out a first treatment on the surface of the The substrate is glass, the inorganic salt is lithium bromide, and the metal organic framework is MOF-801.
The preparation method of the self-powered low-humidity sensor comprises the following steps of:
step 1: synthesizing MOF-801 by a solvothermal method;
step 2: preparing 200 mg/mL lithium bromide ethanol solution;
step 3: uniformly dispersing the MOF-801 of 200 mg in a lithium bromide ethanol solution of 1 mL, performing ultrasonic treatment for 20 minutes, and stirring at room temperature until the MOF-801 is dried to obtain a lithium bromide loaded MOF-801;
step 4: preparing 70 mg/mL of lithium bromide supported MOF-801 aqueous dispersion;
step 5: copper tape and zinc tape were attached to the left and right sides of the glass substrate with a distance between the electrodes of 1 mm and an electrode area of 2 cm 2 And transferring 20 mu L of dispersed liquid drops to gaps between the electrodes, and vacuum drying to obtain the self-powered low-humidity sensor element.
The inorganic salt in the embodiment of the invention has strong hydrophilicity and dissociation capability, and can be dissolved in ethanol; the metal organic framework material has strong hydrophilicity, high porosity and high stability; the inorganic salt loaded metal organic framework material prepared by the method has strong hydrophilicity, high stability and high ion concentration, and can be applied to self-powered low-humidity sensing.
The preparation method of the self-powered low-humidity sensor based on the inorganic salt loaded metal-organic framework material is simple, low in cost and capable of being prepared in batches, and the performance of the self-powered low-humidity sensor can be regulated and controlled by adjusting the proportion of the materials.
The self-powered low-humidity sensor based on the inorganic salt loaded metal organic framework material provided by the embodiment of the invention has strong hydrophilicity, strong ion dissociation capability and primary cell reaction, so that the sensor element realizes self-powered low-humidity sensing, does not need an external power supply, has high sensitivity and high stability on low humidity, and meets the detection requirements of static low humidity and dynamic low humidity.
According to the embodiment of the invention, the self-powered low-humidity sensor based on the inorganic salt loaded metal organic framework material does not consume the material of the humidity sensing film in the sensing process, so that the stability and the service life of the element low-humidity sensing are improved.
It should be noted that in this document, terms such as "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The self-powered low-humidity sensor is characterized by comprising a substrate and electrodes connected to two sides of the substrate, wherein a humidity sensing film is arranged in a region between the electrodes on two sides of the substrate, and the humidity sensing film is a metal organic framework material loaded by inorganic salt; the electrodes on the two sides are specifically one of a copper adhesive tape and a zinc adhesive tape, an aluminum adhesive tape and a silver adhesive tape, or a gold adhesive tape and a zinc adhesive tape; the substrate is one of glass, PET and paper;
the preparation method of the power supply low humidity sensor comprises the following steps:
preparing an aqueous dispersion of an inorganic salt-loaded metal organic framework material;
pasting electrodes on two sides of a substrate, coating aqueous dispersion of inorganic salt loaded metal organic frame materials on the substrate in a region between the electrodes on two sides, and vacuum drying to obtain a self-powered low-humidity sensor;
the preparation process of the inorganic salt loaded metal organic framework material comprises the following steps: dispersing a metal organic framework material in an ethanol solution of inorganic salt, and stirring until the mixture is dried after ultrasonic treatment; the inorganic salt accounts for 4-50wt% of the inorganic salt loaded metal organic frame material; the metal organic framework is one of MOF-801, MOF-303 and UiO-66.
2. The self-powered low humidity sensor according to claim 1, wherein the inorganic salt is one of lithium bromide, lithium chloride, sodium chloride.
3. The self-powered low humidity sensor according to claim 1 wherein the concentration of the aqueous dispersion of inorganic salt-loaded metal organic framework material is 10-100 mg/mL.
4. The self-powered low humidity sensor according to claim 1 wherein the concentration of the ethanol solution of the inorganic salt is 2-200 mg/mL, the mass of the metal organic frame material is 48-200 mg, and the volume of the ethanol solution of the inorganic salt is 1-2 mL.
5. The self-powered low humidity sensor according to claim 1 wherein the aqueous dispersion of inorganic salt-loaded metal organic framework material is applied to the substrate by a drop coating method, the drop coating amount of the aqueous dispersion of inorganic salt-loaded metal organic framework material being 2 to 20 μl.
6. The self-powered low humidity sensor according to claim 1 wherein the distance between the electrodes on both sides is 0.1-1 mm and the electrode area is 0.5-2 cm 2
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