CN117488246A - Multi-sublayer circulating anti-erosion anti-corrosion coating and preparation method and application thereof - Google Patents
Multi-sublayer circulating anti-erosion anti-corrosion coating and preparation method and application thereof Download PDFInfo
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- CN117488246A CN117488246A CN202311426889.5A CN202311426889A CN117488246A CN 117488246 A CN117488246 A CN 117488246A CN 202311426889 A CN202311426889 A CN 202311426889A CN 117488246 A CN117488246 A CN 117488246A
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- 238000000576 coating method Methods 0.000 title claims abstract description 111
- 239000011248 coating agent Substances 0.000 title claims abstract description 101
- 238000005260 corrosion Methods 0.000 title claims abstract description 38
- 238000002360 preparation method Methods 0.000 title abstract description 29
- 230000007704 transition Effects 0.000 claims abstract description 54
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 32
- 239000000956 alloy Substances 0.000 claims abstract description 32
- 235000012054 meals Nutrition 0.000 claims abstract description 32
- 230000003628 erosive effect Effects 0.000 claims abstract description 24
- 238000001914 filtration Methods 0.000 claims abstract description 24
- 230000007797 corrosion Effects 0.000 claims abstract description 20
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 4
- 229910052720 vanadium Inorganic materials 0.000 claims abstract description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 67
- 238000000151 deposition Methods 0.000 claims description 51
- 239000000758 substrate Substances 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 39
- 229910052757 nitrogen Inorganic materials 0.000 claims description 30
- 230000008569 process Effects 0.000 claims description 30
- 238000001771 vacuum deposition Methods 0.000 claims description 23
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 22
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 18
- 239000011159 matrix material Substances 0.000 claims description 16
- 229910052786 argon Inorganic materials 0.000 claims description 10
- 125000004122 cyclic group Chemical group 0.000 claims description 10
- 238000000992 sputter etching Methods 0.000 claims description 10
- 238000001035 drying Methods 0.000 claims description 6
- 238000000227 grinding Methods 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- 229910000905 alloy phase Inorganic materials 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 238000013461 design Methods 0.000 claims description 2
- 239000007888 film coating Substances 0.000 claims description 2
- 238000009501 film coating Methods 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000010935 stainless steel Substances 0.000 claims description 2
- 229910001220 stainless steel Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 143
- 229910010037 TiAlN Inorganic materials 0.000 description 16
- 239000004576 sand Substances 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 14
- 229910010038 TiAl Inorganic materials 0.000 description 11
- 229910007880 ZrAl Inorganic materials 0.000 description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 7
- 239000000428 dust Substances 0.000 description 7
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000009471 action Effects 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 150000003839 salts Chemical class 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 239000003595 mist Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000005524 ceramic coating Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- -1 transition metal nitride Chemical class 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a multi-sublayer circulating anti-erosion anti-corrosion coating and a preparation method and application thereof, and belongs to the technical field of coating materials. The invention adopts a magnetic filtration cathode vacuum arc coating system to realize the preparation of a multi-sublayer circulating high-performance anti-erosion anti-corrosion coating, and the coating is sequentially laminated with MeAl-MeAlN from inside to outside 1‑x A MeAlN gradient bonding layer and at least 1 group of multi-sublayer structure target layers consisting of a MeAlN transition layer, a MeAl alloy soft layer, a MeAlN transition layer and a MeAlSiN high-hardness layer, wherein Me can take any element of Ti, cr, zr, hf, nb, V, mo, ta. The invention can realize the compromise of high hardness, low stress, strong corrosion resistance and erosion resistance, thereby obviously improving the anti-impact and corrosion resistance of the material and providing technical support for realizing the high-performance and long-service life of the aero-engine compressor blade.
Description
Technical Field
The invention belongs to the technical field of coating materials, and particularly relates to a multi-sublayer circulating anti-erosion anti-corrosion coating, a preparation method and application thereof.
Background
When the aircraft is in service in sand dust or coastal areas, sand particles, dust, salt mist and the like in the air are sucked into the aeroengine under the action of high-speed airflow. In fact, once the engine sucks the sand dust, the sand dust can erode and abrade the compressor blade, and corrosive liquids such as salt mist can accelerate the sand dust erosion process, and meanwhile, the sand dust erosion can accelerate the salt mist erosion process, so that the compressor blade is continuously eroded by the sand dust erosion process, the engine performance is damaged in terms of structure and aerodynamics, and even the engine is disabled in severe cases.
The protective coating is an effective way for solving the problems of sand erosion and salt spray corrosion of the compressor blade. In the early stages of research, binary transition metal nitride ceramic coatings (TiN, crN, zrN, hfN, etc.) were of great interest. However, binary ceramic coatings generally have a typical columnar grain structure, on the one hand, corrosive media can penetrate into the interior of the coating through columnar grain gaps to accelerate the corrosion rate, and on the other hand, columnar grains are prone to fracture under the high-speed impact of sand grains.
In order to improve the coating performance, students at home and abroad develop a coating system from a binary coating to a multi-element composite coating through doping alloy elements. The MeAlSiN coating has a nanocrystalline/amorphous special microstructure, the hardness can reach 40GPa, and the compact structure can effectively prevent corrosive medium from penetrating into the coating, so that the MeAlSiN coating has a wide application prospect in the field of erosion resistance and corrosion resistance. However, the compact tissue structure makes the MeAlSiN coating have larger internal stress, so that cracks are easy to initiate under the action of impact load, and the excessive internal stress also reduces the film base binding force and restricts the engineering application of the coating.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a multi-sublayer circulating anti-erosion anti-corrosion coating, and a preparation method and application thereof, so as to solve the technical problems that the internal stress of the coating in the prior art is large, cracks are easy to initiate under the action of impact load, and the binding force with a film base is low.
In order to achieve the above purpose, the invention is realized by adopting the following technical scheme:
the invention discloses a multi-sublayer circulating anti-erosion anti-corrosion coating, which is a composite coating formed by a gradient bonding layer and at least one group of multi-sublayer structure target layers;
wherein the gradient bonding layer sequentially comprises a MeAl alloy phase and a subsaturated MeAlN phase from inside to outside (1-x) The phase and the nitrogen saturated MeAlN phase are formed, wherein x is more than 0 and less than 1, and the content of N element in the gradient bonding layer is gradually increased from 0 along the thickness direction of deposition;
the multi-sublayer structure target layer is sequentially laminated with a MeAlN transition layer, a MeAl alloy soft layer, a MeAlN transition layer and a MeAlSiN high-hardness layer from inside to outside; me selects any one metal element of Ti, cr, zr, hf, nb, V, mo and Ta.
Preferably, the total thickness of the multi-sub-layer cyclic high performance erosion resistant corrosion coating is 10 μm to 100.0 μm, with a gradient tie layer thickness of 0.5 μm to 5.0 μm.
Preferably, in the multi-sublayer structure target layer, the layer thickness modulation ratio among the mean transition layer, the MeAl alloy soft layer and the meaalsin high-hardness layer is 1: (0.2-2): (1-10), the modulation period is 0.2-10.0 μm.
The invention also discloses a preparation method of the multi-sublayer circulating anti-erosion anti-corrosion coating, which comprises the following steps:
1) Argon ion etching is carried out on the surface of the matrix, and a gradient bonding layer is deposited on the surface of the etched matrix;
2) Depositing a MeAlN transition layer on the surface of the gradient bonding layer, depositing a MeAl alloy soft layer on the surface of the MeAlN transition layer, depositing a MeAlN transition layer on the surface of the MeAl alloy soft layer, and depositing a MeAlSiN high-hardness layer on the surface of the MeAlN transition layer;
3) And repeating the operation of the step 2) until the design requirement of the target layer group number of the multi-layer structure is met, and obtaining the multi-layer circulating high-performance anti-erosion anti-corrosion coating.
Preferably, the substrate is selected from a titanium alloy, an aluminum alloy, a nickel-based alloy or a stainless steel substrate; the substrate is subjected to sample grinding, polishing, ultrasonic cleaning and drying treatment in sequence before the argon ion etching.
Preferably, in step 1), the specific process of argon ion etching is as follows: before etching, the vacuum degree in the film coating cavity is less than 5 multiplied by 10 - 3 Pa, the rotating speed of the sample table is 5-10 rpm, the substrate bias voltage is-500 to-800V, the etching current is 0.6-1.4A, the duty ratio is 40-60%, and the etching time is 1200-1800 s;
in the step 1), a magnetic filtration cathode vacuum arc coating system is adopted to deposit a gradient bonding layer on the surface of the etched substrate, and the specific technological parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is linearly increased from 0sccm to 20-200 sccm.
Preferably, in the step 2), a MeAlN transition layer is deposited on the surface of the gradient bonding layer, and the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm;
depositing a MeAl alloy soft layer on the surface of the MeAlN transition layer, wherein the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow rate of nitrogen introduced into the vacuum coating cavity is 0sccm;
depositing a MeAlN transition layer on the surface of the MeAl alloy soft layer, wherein the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm;
and depositing a MeAlSiN high-hardness layer on the surface of the MeAlN transition layer, wherein the rotating speed of a sample stage is 5-10 rpm, the substrate bias voltage is-50 to-200V, the arcing current of the MeAlSi cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm.
Preferably, the MeAl cathode target contains 30-60% of Me and 40-70% of Al.
Preferably, the MeAlSi cathode target contains 25-45% of Me, 35-65% of Al and 10-20% of Si.
The invention also discloses application of the multi-sublayer circulating erosion-resistant anticorrosive coating in preparation of the compressor blade.
Compared with the prior art, the invention has the following beneficial effects:
the invention discloses a multi-sublayer circulating anti-erosion anti-corrosion coating, which is sequentially laminated with MeAl-MeAlN from inside to outside 1-x A gradient bonding layer of MeAlN and at least one group of multi-sublayer structure target layers consisting of a MeAlN transition layer, a MeAl alloy soft layer, a MeAlN transition layer and a MeAlSiN high-hardness layer, wherein Me is any element in Ti, cr, zr, hf, nb, V, mo, ta. The components and physical and chemical characteristics of the gradient bonding layer are graded and gradually changed, so that the substrate and the target layer can be better connected, and the bonding force of the coating can be improved; the MeAlSiN layer has a nanocrystalline/amorphous compact tissue structure and high hardness mechanical properties, and can effectively resist corrosion and sand low-angle abrasion; the MeAl alloy soft layer can release the internal stress of the coating, improve the toughness of the coating and absorb the high-speed impact kinetic energy of sand particles; the MeAlN is used as a transition layer between the MeAlSiN high-hardness layer and the MeAl alloy soft layer, can coordinate deformation, reduces interlayer stress concentration and reduces interlayer cracking; in addition, a large number of layer interfaces in the multi-sublayer circulating structure can deflect cracks, delay the expansion rate of the cracks along the depth direction, and effectively block penetration of corrosive media so as to further realize the purposes of high-performance erosion resistance and corrosion resistance.
The invention has the specific advantages (also the invention is characterized in that:
firstly, the MeAlSiN layer has a nanocrystalline/amorphous compact tissue structure and high hardness mechanical properties, and can effectively resist corrosion and sand low-angle abrasion; the MeAl metal layer is softer, so that the internal stress of the coating can be reduced, the impact kinetic energy of sand particles can be absorbed, and the capability of the coating for resisting the high-angle impact of the sand particles can be improved; however, the MeAlSiN high hard layer and the MeAl soft layer have overlarge physical property difference, and interlayer cracking is easy to occur under the action of sand impact. The MeAlN transition layer is introduced, so that the deformation can be coordinated, the internal stress of the coating is reduced, the interlayer cracking caused by the mismatch of the deformation of the layer interface is reduced, and the number of the layer interfaces is greatly increased under the condition of the same cycle number. The large number of layer interfaces not only can deflect the crack propagation direction, but also can delay the propagation rate of cracks along the depth direction, and can improve the erosion resistance of the coating; can also effectively prevent corrosive medium from penetrating so as to further improve the corrosion resistance of the coating.
Secondly, unlike the traditional pure metal bonding layer, the gradient bonding layer is designed between the substrate and the target coating by regulating and controlling the nitrogen element content in the thickness direction of deposition, and sequentially comprises a MeAl alloy phase, a sub-saturated MeAlN (1-x) phase and a nitrogen saturated MeAlN phase from inside to outside.
Drawings
FIG. 1 is a schematic diagram of a multi-sub-layer cyclic erosion-resistant corrosion-resistant coating structure disclosed by the invention;
FIG. 2 is a graph showing the residual stress comparison results of the coatings of examples 1 to 3 and comparative example 1 according to the present invention;
FIG. 3 is a graph showing the comparison of scratch morphology of the coatings of example 1 and comparative example 1 of the present invention;
FIG. 4 is a graph showing the comparison of erosion resistance of the coatings of example 1 and comparative example 1 of the present invention;
FIG. 5 is a graph showing the comparison of the corrosion resistance of the coatings of example 1 and comparative example 1 of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the attached drawing figures:
the structure of a multi-layer cyclic erosion-resistant corrosion-resistant coating according to the present invention will be briefly described with reference to fig. 1. Referring to FIG. 1, the coating disclosed by the invention is sequentially laminated with MeAl-MeAlN from inside to outside 1-x A graded mean bonding layer (graded color layer in the figure), wherein 0 < x < 1, and at least 1 group of multi-sublayer structure target layers consisting of a mean transition layer (blue layer in the figure), a MeAl alloy soft layer (light blue layer in the figure), a mean transition layer (blue layer in the figure), and a meaalsin high hard layer (dark blue layer in the figure).
Example 1
A preparation method of a TC4 titanium alloy surface TiAlSiN/TiAlN/TiAl/TiAlN multi-sub-layer circulating high-performance anti-erosion anti-corrosion coating comprises the following steps:
(1) Surface treatment of titanium alloy substrate
Grinding and polishing the surface of the titanium alloy matrix until the roughness is lower than 0.1 mu m; then, sequentially adopting acetone and absolute ethanol solution to ultrasonically clean for 15min, and drying the surface of the matrix by using dry nitrogen.
(2) Argon ion etching
Mounting the cleaned titanium alloy substrate on a fixture of a magnetic filtration cathode vacuum arc coating system, and vacuumizing to be lower than 3 multiplied by 10 -3 And when Pa, setting the bias voltage to be-800V, etching the substrate with the etching current of 1.0A, the duty ratio of 50%, and the etching duration of 30min.
(3) Gradient tie layer preparation
Depositing TiAl-TiAlN on the etched surface of the titanium alloy matrix by adopting a magnetic filtering cathode vacuum arc coating system 1-x -a TiAlN gradient tie layer. The specific process parameters are as follows: the rotation speed of the sample table is 6rpm, the substrate bias voltage is-120V, the TiAl cathode target arcing current is 100A, the nitrogen flow rate fed into the vacuum coating cavity is linearly increased from 0sccm to 100sccm according to the function relation of y=2.5 t (0.ltoreq.t.ltoreq.40), and the deposition time of the bonding layer is 40min.
(4) Preparation of TiAlN transition layer on surface of gradient bonding layer
The magnetic filtering cathode vacuum arc coating system is adopted to coat TiAl-TiAlN 1-x And depositing a TiAlN transition layer on the surface of the TiAlN gradient bonding layer. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the base body bias voltage is kept to be-120V, the arcing current of the TiAl cathode target is kept to be 100A, the flow rate of nitrogen introduced into the vacuum coating cavity is kept to be 100sccm, and the deposition time is kept to be 20min.
(5) Preparation of TiAl alloy soft layer on surface of TiAlN transition layer
And depositing a TiAl alloy soft layer on the surface of the TiAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the base body bias voltage is-120V, the arcing current of the TiAl cathode target is 100A, the nitrogen gas inlet switch is closed, and the deposition time is 20min.
(6) Preparation of TiAlN transition layer on surface of TiAl alloy soft layer
And depositing a TiAlN transition layer on the surface of the TiAl alloy soft layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: maintaining the rotation speed of the sample table at 6rpm, the substrate bias voltage at-120V, the TiAl cathode target arcing current at 100A, opening a nitrogen gas inlet switch, and enabling the nitrogen gas flow rate in the vacuum coating cavity to be 100sccm, wherein the deposition time is 20min.
(7) Preparation of TiAlSiN high-hardness layer on surface of TiAlN transition layer
And depositing a TiAlSiN high-hardness layer on the surface of the TiAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: maintaining the rotation speed of the sample table at 6rpm, biasing the substrate at-120V, introducing nitrogen into the vacuum coating cavity at 100sccm, cutting off the arcing current of the TiAl cathode target, setting the arcing current of the TiAlSi cathode target at 120A, and depositing for 60min.
Sequentially and circularly executing the steps (4) - (7) for 3 times to obtain the TiAlSiN/TiAlN/TiAl/TiAlN multi-sub-layer circular high-performance anti-erosion anti-corrosion coating with the total thickness of about 20 mu m.
Example 2
A preparation method of a TC4 titanium alloy surface CrAlSiN/CrAlN/CrAl/CrAlN multi-sub-layer circulating high-performance anti-erosion anti-corrosion coating comprises the following steps:
(1) Surface treatment of titanium alloy substrate
Grinding and polishing the surface of the titanium alloy matrix until the roughness is lower than 0.1 mu m; then, sequentially adopting acetone and absolute ethanol solution to ultrasonically clean for 15min, and drying the surface of the matrix by using dry nitrogen.
(2) Argon ion etching
Mounting the cleaned titanium alloy substrate on a fixture of a magnetic filtration cathode vacuum arc coating system, and vacuumizing to be lower than 3 multiplied by 10 -3 And when Pa, setting the bias voltage to be-800V, etching the substrate with the etching current of 1.0A, the duty ratio of 50%, and the etching duration of 30min.
(3) Gradient tie layer preparation
Depositing CrAl-CrAlN on the etched surface of the titanium alloy matrix by adopting a magnetic filtering cathode vacuum arc coating system 1-x -a CrAlN gradient tie layer. The specific process parameters are as follows: the rotation speed of the sample table is 6rpm, the substrate bias voltage is-120V, the arc striking current of the CrAl cathode target is 110A, the flow of nitrogen introduced into the vacuum coating cavity is linearly increased from 0sccm to 100sccm according to the function relation of y=2.5 t (0.ltoreq.t.ltoreq.40), and the deposition time of the bonding layer is long40min。
(4) Preparation of CrAlN transition layer on surface of gradient bonding layer
Adopts a magnetic filtration cathode vacuum arc coating system, and is characterized in that CrAl-CrAlN is adopted 1-x And depositing a CrAlN transition layer on the surface of the CrAlN gradient bonding layer. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the base body bias voltage is kept to be-120V, the arc striking current of the CrAl cathode target is kept to be 110A, the flow rate of nitrogen introduced into the vacuum coating cavity is kept to be 100sccm, and the deposition time is kept to be 20min.
(5) Preparation of CrAl alloy soft layer on surface of CrAlN transition layer
And depositing a CrAl alloy soft layer on the surface of the CrAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample stage is kept to be 6rpm, the base body bias voltage is-120V, the arc striking current of the CrAl cathode target is 110A, the nitrogen gas inlet switch is closed, and the deposition time is 20min.
(6) Preparation of CrAlN transition layer on surface of CrAl alloy soft layer
And depositing a CrAlN transition layer on the surface of the CrAl alloy soft layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: maintaining the rotation speed of the sample stage at 6rpm, the substrate bias voltage at-120V, the arc striking current of the CrAl cathode target at 110A, opening a nitrogen inlet switch, and enabling the flow of nitrogen introduced into the vacuum coating cavity to be 100sccm, wherein the deposition time is 20min.
(7) Preparation of CrAlSiN high-hardness layer on surface of CrAlN transition layer
And depositing a CrAlSiN high-hardness layer on the surface of the CrAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: maintaining the rotation speed of the sample table at 6rpm, biasing the substrate at-120V, introducing nitrogen into the vacuum coating cavity at 100sccm, cutting off the arc starting current of the CrAl cathode target, setting the arc starting current of the CrAlSi cathode target at 120A, and depositing for 60min.
And (3) sequentially and circularly executing the steps (4) - (7), wherein the execution times are 3 times, and the CrAlSiN/CrAlN/CrAl/CrAlN multi-sub-layer circular high-performance anti-erosion anti-corrosion coating with the total thickness of about 20 mu m is obtained.
Example 3
A preparation method of a TC4 titanium alloy surface ZrAlSiN/ZrAlN/ZrAl/ZrAlN multi-sub-layer circulating high-performance anti-erosion anticorrosive coating comprises the following steps:
(1) Surface treatment of titanium alloy substrate
Grinding and polishing the surface of the titanium alloy matrix until the roughness is lower than 0.1 mu m; then, sequentially adopting acetone and absolute ethanol solution to ultrasonically clean for 15min, and drying the surface of the matrix by using dry nitrogen.
(2) Argon ion etching
Mounting the cleaned titanium alloy substrate on a fixture of a magnetic filtration cathode vacuum arc coating system, and vacuumizing to be lower than 3 multiplied by 10 -3 And when Pa, setting the bias voltage to be-800V, etching the substrate with the etching current of 1.0A, the duty ratio of 50%, and the etching duration of 30min.
(3) Gradient tie layer preparation
Depositing ZrAl-ZrAlN on the etched surface of the titanium alloy matrix by adopting a magnetic filtering cathode vacuum arc coating system 1-x -a ZrAlN gradient bonding layer. The specific process parameters are as follows: the rotation speed of the sample table is 6rpm, the substrate bias voltage is-120V, the ZrAl cathode target arcing current is 110A, the nitrogen flow rate fed into the vacuum coating cavity is linearly increased from 0sccm to 100sccm according to the function relation of y=2.5 t (0.ltoreq.t.ltoreq.40), and the deposition time of the bonding layer is 40min.
(4) Preparation of ZrAlN transition layer on surface of gradient bonding layer
Adopts a magnetic filtration cathode vacuum arc coating system to coat ZrAl-ZrAlN 1-x And depositing a ZrAlN transition layer on the surface of the ZrAlN gradient bonding layer. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the substrate bias voltage is kept to be-120V, the ZrAl cathode target arcing current is kept to be 100A, the flow of nitrogen introduced into the vacuum coating cavity is kept to be 100sccm, and the deposition time is kept to be 20min.
(5) Preparation of ZrAl alloy soft layer on surface of ZrAlN transition layer
And depositing a ZrAl alloy soft layer on the surface of the ZrAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample stage is kept to be 6rpm, the substrate bias voltage is-120V, the ZrAl cathode target arcing current is 100A, the nitrogen gas inlet switch is closed, and the deposition time is 20min.
(6) Preparation of ZrAlN transition layer on surface of ZrAl alloy soft layer
And depositing a ZrAlN transition layer on the surface of the ZrAl alloy soft layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the substrate bias voltage is-120V, the ZrAl cathode target arcing current is 100A, a nitrogen gas inlet switch is turned on, the nitrogen gas flow rate in the vacuum coating cavity is 100sccm, and the deposition time is 20min.
(7) Preparation of ZrAlSiN high-hardness layer on surface of ZrAlN transition layer
And depositing a ZrAlSiN high-hardness layer on the surface of the ZrAlN transition layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample table is kept to be 6rpm, the substrate bias voltage is-120V, the flow of nitrogen introduced into the vacuum coating cavity is 100sccm, the ZrAl cathode target arcing current is cut off, and the ZrAlSi cathode target arcing current is set to be 120A, so that the deposition time is 60min.
And (3) sequentially and circularly executing the steps (4) - (7), wherein the execution times are 3 times, and the ZrAlSiN/ZrAlN/ZrAl/ZrAlN multi-sub-layer circular high-performance anti-erosion anti-corrosion coating with the total thickness of about 20 mu m is obtained.
Comparative example 1
A preparation method of a TiAlSiN coating on the surface of a TC4 titanium alloy comprises the following steps:
(1) Surface treatment of titanium alloy substrate
Grinding and polishing the surface of the titanium alloy matrix until the roughness is lower than 0.1 mu m; then, sequentially adopting acetone and absolute ethanol solution to ultrasonically clean for 15min, and drying the surface of the matrix by using dry nitrogen.
(2) Argon ion etching
Mounting the cleaned titanium alloy substrate on a fixture of a magnetic filtration cathode vacuum arc coating system, and vacuumizing to be lower than 3 multiplied by 10 -3 And when Pa, setting the bias voltage to be-800V, etching the substrate with the etching current of 1.0A, the duty ratio of 50%, and the etching duration of 30min.
(3) TiAlSi bonding layer preparation
And depositing a TiAlSi bonding layer on the etched surface of the titanium alloy matrix by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: the rotation speed of the sample table is 6rpm, the substrate bias voltage is-120V, the striking current of the TiAlSi cathode target is 100A, and the deposition time of the bonding layer is 40min.
(4) TiAlSiN coating preparation
And depositing a TiAlSiN coating on the surface of the bonding layer by adopting a magnetic filtration cathode vacuum arc coating system. The specific process parameters are as follows: maintaining the rotation speed of the sample table at 6rpm, the substrate bias voltage at-120V, the TiAlSi cathode target arcing current at 100A, and introducing nitrogen into the vacuum coating cavity, wherein the flow is maintained at 100sccm, and the deposition time is 360min. A tiaalsin coating having a total thickness of about 20 μm was obtained.
Fig. 2 shows a comparison of the residual stresses of the example and comparative example coatings, which shows a significant reduction in residual stresses of the three example coatings compared to the comparative example coatings. Further, FIG. 3 shows a scratch profile comparison of the coatings of example 1 and comparative example 1. The results of the same scratch method and test parameters show that the coating of the embodiment 1 has no obvious brittle flaking phenomenon near the scratch track, and the coating of the comparative embodiment 1 has large-area flaking near the scratch track, which shows that the multi-sublayer circulating structure disclosed by the invention can obviously improve the toughness difference problem of the TiAlSiN coating caused by overlarge internal stress. In addition, the scratch test result shows that the Lc3 binding force of the coating of the example 1 is obviously better than that of the coating of the comparative example 1, and the gradient bonding layer disclosed by the invention can effectively improve the film-based binding strength of the hard coating.
FIG. 4 shows the damage profile of the coatings of example 1 and comparative example 1 after 20min of sand washout, respectively. The results show that the coating surface of example 1 underwent slight erosion damage, which was manifested as small areas of coating flaking; however, the coating in the erosion zone of the coating of comparative example 1 had been substantially completely exfoliated and the large area substrate had been severely eroded, indicating that the multi-layered cyclic structure coating of the present disclosure has excellent erosion resistance.
FIG. 5 shows the I of the coatings of example 1 and comparative example 1 corr And (5) comparing. The results show that comparative example 1 shows I using the same etching solution and test parameters corr 18.1X10 times -7 A/cm 2 Example 1 coating I corr 4.37X10 -7 A/cm 2 75.9% lower, indicating the practice of the inventionExample 1 has significantly more excellent corrosion resistance.
In summary, the coating disclosed by the invention is sequentially laminated with MeAl-MeAlN from inside to outside 1-x The gradient bonding layer and the multi-sublayer circulating structure effectively improve the internal stress and the strength and toughness matching property of the MeAlSiN coating, so that the bonding force and the erosion resistance and corrosion resistance of the coating are obviously improved.
The above is only for illustrating the technical idea of the present invention, and the protection scope of the present invention is not limited by this, and any modification made on the basis of the technical scheme according to the technical idea of the present invention falls within the protection scope of the claims of the present invention.
Claims (10)
1. The multi-sublayer circulating anti-erosion anti-corrosion coating is characterized by being a composite coating consisting of a gradient bonding layer and at least one group of multi-sublayer structure target layers;
wherein the gradient bonding layer sequentially comprises a MeAl alloy phase and a subsaturated MeAlN phase from inside to outside (1-x) The phase and the nitrogen saturated MeAlN phase are formed, wherein x is more than 0 and less than 1, and the content of N element in the gradient bonding layer is gradually increased from 0 along the thickness direction of deposition;
the multi-sublayer structure target layer is sequentially laminated with a MeAlN transition layer, a MeAl alloy soft layer, a MeAlN transition layer and a MeAlSiN high-hardness layer from inside to outside; me selects any one metal element of Ti, cr, zr, hf, nb, V, mo and Ta.
2. The multi-sub-layer cyclic erosion and corrosion coating of claim 1 wherein the multi-sub-layer cyclic high performance erosion and corrosion coating has a total thickness of 10 μm to 100.0 μm and wherein the gradient tie layer has a thickness of 0.5 μm to 5.0 μm.
3. The multi-sub-layer cyclic erosion resistant corrosion protection coating of claim 1, wherein the multi-sub-layer structure target layer has a layer thickness modulation ratio of 1 between the mean transition layer, the MeAl alloy soft layer, and the MeAlSiN high hard layer: (0.2-2): (1-10), the modulation period is 0.2-10.0 μm.
4. A method for preparing a multi-layer cyclic erosion-resistant corrosion-resistant coating as claimed in any one of claims 1 to 3, characterized by comprising the steps of:
1) Argon ion etching is carried out on the surface of the matrix, and a gradient bonding layer is deposited on the surface of the etched matrix;
2) Depositing a MeAlN transition layer on the surface of the gradient bonding layer, depositing a MeAl alloy soft layer on the surface of the MeAlN transition layer, depositing a MeAlN transition layer on the surface of the MeAl alloy soft layer, and depositing a MeAlSiN high-hardness layer on the surface of the MeAlN transition layer;
3) And repeating the operation of the step 2) until the design requirement of the target layer group number of the multi-layer structure is met, and obtaining the multi-layer circulating anti-erosion anti-corrosion coating.
5. The method of producing a multi-layered cyclic erosion resistant corrosion protection coating according to claim 4, wherein the substrate is selected from a titanium alloy, an aluminum alloy, a nickel-based alloy, or a stainless steel substrate; the substrate is subjected to sample grinding, polishing, ultrasonic cleaning and drying treatment in sequence before the argon ion etching.
6. The method for preparing the multi-sublayer circulating anti-erosion anticorrosive coating according to claim 4, wherein in step 1), the specific process of argon ion etching is as follows: before etching, the vacuum degree in the film coating cavity is less than 5 multiplied by 10 -3 Pa, the rotating speed of the sample table is 5-10 rpm, the substrate bias voltage is-500 to-800V, the etching current is 0.6-1.4A, the duty ratio is 40-60%, and the etching time is 1200-1800 s.
7. The method for preparing the multi-sublayer circulating anti-erosion anti-corrosion coating according to claim 4, wherein in the step 1), a gradient bonding layer is deposited on the surface of the etched substrate by adopting a magnetic filtration cathode vacuum arc coating system, and the specific technological parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is linearly increased from 0sccm to 20-200 sccm.
8. The method for preparing the multi-sublayer circulating anti-erosion anticorrosive coating according to claim 4, wherein in step 2), a MeAlN transition layer is deposited on the surface of the gradient bonding layer, and the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm;
depositing a MeAl alloy soft layer on the surface of the MeAlN transition layer, wherein the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow rate of nitrogen introduced into the vacuum coating cavity is 0sccm;
depositing a MeAlN transition layer on the surface of the MeAl alloy soft layer, wherein the specific process parameters are as follows: the rotating speed of the sample table is 5-10 rpm, the base bias voltage is-50 to-200V, the arc striking current of the MeAl cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm;
and depositing a MeAlSiN high-hardness layer on the surface of the MeAlN transition layer, wherein the rotating speed of a sample stage is 5-10 rpm, the substrate bias voltage is-50 to-200V, the arcing current of the MeAlSi cathode target is 80-150A, and the flow of nitrogen introduced into the vacuum coating cavity is 20-200 sccm.
9. The method for preparing the multi-layer circulating anti-erosion coating according to claim 8, wherein the atomic percentage of Me in the MeAl cathode target is 30% -60% and the atomic percentage of Al is 40% -70%; the atomic percentage of Me in the MeAlSi cathode target is 25% -45%, the atomic percentage of Al is 35% -65%, and the atomic percentage of Si is 10% -20%.
10. Use of a multi-layer cyclic erosion protection coating according to any one of claims 1 to 3 for the manufacture of a compressor blade.
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