CN117486224A - Silicon oxide production equipment and condensation collection method - Google Patents
Silicon oxide production equipment and condensation collection method Download PDFInfo
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- CN117486224A CN117486224A CN202311831071.1A CN202311831071A CN117486224A CN 117486224 A CN117486224 A CN 117486224A CN 202311831071 A CN202311831071 A CN 202311831071A CN 117486224 A CN117486224 A CN 117486224A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 90
- 229910052814 silicon oxide Inorganic materials 0.000 title claims abstract description 33
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 28
- 230000005494 condensation Effects 0.000 title claims abstract description 27
- 238000009833 condensation Methods 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 14
- 239000007788 liquid Substances 0.000 claims abstract description 148
- 239000000110 cooling liquid Substances 0.000 claims abstract description 43
- 230000007704 transition Effects 0.000 claims abstract description 11
- 238000010438 heat treatment Methods 0.000 claims abstract description 9
- 239000002994 raw material Substances 0.000 claims abstract description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 29
- 230000001105 regulatory effect Effects 0.000 claims description 25
- 238000005057 refrigeration Methods 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 4
- 230000003247 decreasing effect Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 abstract description 37
- 238000012546 transfer Methods 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 description 35
- 238000001816 cooling Methods 0.000 description 16
- 239000007787 solid Substances 0.000 description 8
- 239000002826 coolant Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 7
- 230000009471 action Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 239000011553 magnetic fluid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003750 conditioning effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 206010029216 Nervousness Diseases 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000007323 disproportionation reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
- C01B33/18—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof
- C01B33/181—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process
- C01B33/182—Preparation of finely divided silica neither in sol nor in gel form; After-treatment thereof by a dry process by reduction of a siliceous material, e.g. with a carbonaceous reducing agent and subsequent oxidation of the silicon monoxide formed
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The invention relates to a silicon oxide production device and a condensation collection method. The silicon oxide production equipment comprises a high-temperature chamber, a transition chamber and a low-temperature chamber which are sequentially communicated, wherein a heating assembly is arranged in the high-temperature chamber and used for heating raw materials to generate silicon oxide steam, and a liquid circulation assembly is arranged in the low-temperature chamber; the liquid circulation assembly comprises a liquid inlet pipe, a collecting piece and a liquid outlet pipe which are sequentially communicated, so that the collecting piece is internally provided with a continuous circulation cooling liquid, and the collecting piece is positioned in the low-temperature chamber and is used for condensing and collecting silicon oxide; the cold energy transfer is realized by the way of cooling liquid circulation in the liquid circulation assembly, the condensation deposition state in the low-temperature chamber can be judged in real time according to the temperature of the output cooling liquid, so that various parameters of the liquid circulation assembly are adjusted in real time, the cold energy provided by the liquid circulation assembly is controlled in a proper range, and the silicon oxide production equipment always maintains higher deposition efficiency.
Description
Technical Field
The invention relates to the technical field related to silicon oxide production equipment, in particular to silicon oxide production equipment and a condensation collection method.
Background
The main method for producing the silicon oxide in China is a vapor deposition method, simple substance silicon and silicon dioxide are mixed in a nearly same molar ratio and then ground into micron-sized powder, the micron-sized powder is heated to a temperature above 1000 ℃ in a vacuum environment for disproportionation reaction, the silicon oxide is formed to overflow in a vapor form, and the silicon oxide is brought to a place with a lower temperature under the action of pressure diffusion and condensed into silicon oxide solid.
In the process of condensing the silica vapor to form the silica solid, along with the deposition of the silica solid at the cold matrix, the cold matrix is coated with a silica solid layer which is gradually thickened along with the deposition, and the contact area between the cold matrix and the silica vapor (namely the outer surface area of the silica solid layer) is increased, so that the cold quantity required by condensation is increased; if the cold quantity of the cold matrix is kept unchanged all the time, the requirement of condensation deposition can not be met along with the deposition, so that the deposition efficiency is affected;
because the cold matrix is positioned in the equipment, the traditional silicon oxide production equipment cannot sense the deposition amount of the silicon oxide on the cold matrix in real time in the production process, so that the cold amount of the cold matrix cannot be controlled in a proper range, and the deposition efficiency is affected.
Disclosure of Invention
Based on this, it is necessary to provide a silicon oxide production apparatus and a condensation collection method capable of ensuring deposition efficiency during deposition, aiming at the problem that the deposition efficiency is affected by the product layer deposited on the cold substrate as deposition proceeds.
The application firstly provides a silicon oxide production device, which comprises a high-temperature chamber, a transition chamber and a low-temperature chamber which are sequentially communicated, wherein a heating component is arranged in the high-temperature chamber and used for heating raw materials to generate silicon oxide steam, and the low-temperature chamber is provided with a liquid circulation component;
the liquid circulation assembly comprises a liquid inlet pipe, a collecting piece and a liquid outlet pipe which are sequentially communicated, and the collecting piece is positioned in the low-temperature chamber;
and a cooling liquid conveying pipeline is further arranged outside the low-temperature chamber and is respectively communicated with the liquid inlet pipe and the liquid outlet pipe so as to dynamically convey cooling liquid into the collecting piece.
In one embodiment, the low temperature chamber is further provided with a temperature detector and a conditioning assembly; the adjusting component is communicated with the liquid inlet end of the liquid inlet pipe so as to change the liquid quantity and/or the liquid temperature of the cooling liquid in the liquid circulation component; the temperature detector is communicated with the liquid outlet end of the liquid outlet pipe so as to detect the liquid outlet temperature of the cooling liquid, and is electrically connected with the adjusting component so as to adjust the operation efficiency of the adjusting component according to the detected liquid outlet temperature.
In one embodiment, the regulating assembly comprises a flow regulating valve and/or a refrigeration unit; the flow regulating valve is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the flow regulating valve so as to regulate the flow rate of the flow regulating valve according to the detected liquid outlet temperature; the refrigerating unit is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the refrigerating unit so as to adjust the refrigerating efficiency of the refrigerating unit according to the detected liquid outlet temperature.
In one embodiment, the collecting member is barrel-shaped, and the collecting member is provided with a circulation cavity which is also barrel-shaped, and the liquid inlet pipe, the circulation cavity and the liquid outlet pipe are sequentially communicated.
In one embodiment, the fluid circulation assembly further comprises an inner tube and an outer tube, the outer tube comprising an outer main tube and an outer branch tube; the inner pipe and the outer main pipe are concentrically arranged along the central axis of the collecting piece, and both the inner pipe and the outer main pipe extend to the position of the inner bottom wall of the collecting piece after penetrating through the opening of the collecting piece, wherein the end part of the inner pipe is communicated with the circulating cavity at the position of the inner bottom wall, the inner pipe and the outer pipe are mutually fixed, at least one of the inner pipe and the outer pipe is fixed with the collecting piece, one end of the outer branch pipe is fixed and communicated with the outer main pipe, and the other end of the outer branch pipe is fixed and communicated with the position of the top of the collecting piece; one of the inner tube and the outer tube is the liquid inlet tube, and the other is the liquid outlet tube.
In one embodiment, the end of the outer main pipe is fixed with the inner bottom wall of the collecting member, and the end of the outer main pipe is also rotatably connected with the inner pipe to block the circulation chambers at the positions of the outer main pipe and the inner bottom wall.
In one embodiment, the collecting member is further provided with a concave cavity, the concave cavity is communicated with the circulating cavity and is located at one side of the circulating cavity away from the opening of the collecting member, and the inner tube penetrates through the circulating cavity and is inserted into the concave cavity.
In one embodiment, the outer tube comprises a plurality of outer branch tubes, each outer branch tube is arranged along the radial direction of the collecting piece, and the outer branch tubes are uniformly distributed along the circumferential direction of the collecting piece.
In one embodiment, the inner tube is the liquid inlet tube, and the outer tube is the liquid outlet tube.
A second aspect of the present application provides a condensation collection method for the above-mentioned silicon oxide production apparatus, comprising the steps of:
a. starting a cooling liquid conveying pipeline, driving cooling liquid to flow along a liquid circulation assembly by power, and condensing and collecting product steam on the outer wall of a collecting piece;
b. the temperature detector detects the liquid outlet temperature of the liquid outlet end of the liquid outlet pipe, if the liquid outlet temperature is higher than a preset temperature t1, the operation efficiency of the adjusting component is increased, and if the liquid outlet temperature is lower than a preset temperature t2, the operation efficiency of the adjusting component is decreased;
c. and c, repeatedly executing the step b until the condensation collection is finished, and closing the cooling liquid conveying pipeline.
According to the silicon oxide production equipment, cold energy transmission is achieved through the cooling liquid circulation mode in the liquid circulation assembly, the condensation deposition state in the low-temperature chamber can be judged in real time according to the temperature of the output cooling liquid, various parameters of the liquid circulation assembly are adjusted in real time, the cold energy provided by the liquid circulation assembly is controlled in a proper range, and therefore the silicon oxide production equipment always maintains a high deposition efficiency flow regulating valve.
Drawings
FIG. 1 is a schematic view of a structure of a silica production apparatus of the present application;
FIG. 2 is an enlarged schematic view of the fluid circulation assembly of FIG. 1;
FIG. 3 is an enlarged schematic view of FIG. 2A;
fig. 4 is a schematic overall flow diagram of the condensation collection method of the present application.
Reference numerals: 10. a liquid circulation assembly; 11. an inner tube; 111. a rotary connection part; 12. a collection member; 121. a circulation chamber; 122. a recessed cavity; 13. an outer tube; 131. an outer main pipe; 132. an outer branch pipe; 100. a high temperature chamber; 200. a transition chamber; 300. a low temperature chamber; 310. a low temperature furnace body; 320. low Wen Lugai; 330. magnetic fluid seals.
Detailed Description
In order that the above objects, features and advantages of the invention will be readily understood, a more particular description of the invention will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
Referring to fig. 1, 2 and 3, the present application firstly provides a silica production apparatus, which includes a high temperature chamber 100, a transition chamber 200 and a low temperature chamber 300, which are sequentially connected, wherein a heating component is disposed in the high temperature chamber 100 for heating raw materials to generate silica vapor, and the low temperature chamber 300 is provided with a liquid circulation component 10; the liquid circulation assembly 10 comprises a liquid inlet pipe, a collecting piece 12 and a liquid outlet pipe which are sequentially communicated, wherein the collecting piece 12 is positioned in the low-temperature chamber 300; the low-temperature chamber 300 is also provided with a coolant delivery line, which is respectively connected to the liquid inlet pipe and the liquid outlet pipe to power-deliver the coolant into the collecting member 12.
Specifically, the heating element in the high temperature chamber 100 heats the raw material to generate the silica vapor, and the silica vapor enters the low temperature chamber 300 through the transition chamber 200, and completes the cold energy transfer at the collecting member 12 through the heat exchange, so that the silica vapor is condensed and deposited on the outer surface of the collecting member 12.
In the application, cold energy transmission is realized by a cooling liquid circulation mode in the liquid circulation assembly, the invisible silicon oxide deposition condition in the low-temperature chamber 300 can be converted into output temperature information of cooling liquid, the output temperature information can be directly measured and obtained by a temperature detector and other modes, and it can be understood that the thicker the silicon oxide deposition is, the higher the output temperature of the cooling liquid is, and vice versa;
therefore, the condensation deposition state in the low-temperature chamber can be judged in real time according to the temperature of the output cooling liquid, so that various parameters of the liquid circulation assembly can be adjusted in real time, the cooling capacity provided by the liquid circulation assembly is controlled in a proper range, and the silicon oxide production equipment always maintains higher deposition efficiency.
Specifically, in some embodiments, the cryogenic chamber 300 is further provided with a temperature detector (not shown) and a conditioning assembly (not shown); the adjusting component is communicated with the liquid inlet end of the liquid inlet pipe so as to change the liquid amount and/or the liquid temperature of the cooling liquid in the liquid circulation component 10; the liquid outlet end of temperature detector and drain pipe communicates to detect the play liquid temperature of coolant liquid, and temperature detector is connected with the regulation subassembly electricity, in order to adjust the operating efficiency of regulation subassembly according to the play liquid temperature that detects.
The temperature detector is arranged at the liquid outlet end of the liquid outlet pipe so as to detect the temperature of the cooling liquid when the cooling liquid flows out, and the liquid temperature is compared with the preset temperature, so long as the temperature of the cooling liquid at the liquid outlet end is in the preset temperature range, the cooling capacity provided by the current liquid circulation assembly 10 can meet the current condensation requirement;
as the deposition proceeds, the volume of the collecting element 12 wrapped with the silica fixing layer increases, the contact surface between the silica vapor and the silica solid layer increases, the deposition efficiency increases, and similarly, the cooling capacity required by the deposition increases, and the temperature of the liquid outlet end cooling liquid increases until the temperature of the liquid outlet end cooling liquid exceeds the preset temperature, which means that the cooling capacity provided by the liquid circulation assembly 10 cannot meet the condensation requirement at the moment;
at this time, the operation efficiency of the adjusting assembly is adjusted through the electrical connection between the temperature detector and the adjusting assembly, so as to increase the liquid amount of the cooling liquid and/or reduce the liquid temperature of the cooling liquid, increase the cooling capacity provided by the liquid circulation assembly 10, ensure that the cooling capacity can always meet the deposition requirement, and thus always obtain the maximum deposition efficiency;
the process is repeated, so that the cold energy waste can be avoided as much as possible on the premise of ensuring the deposition efficiency, the deposition efficiency of the condensation collection structure is increased, and the running cost is reduced.
Specifically, the adjusting component comprises a flow adjusting valve and/or a refrigerating unit; the flow regulating valve is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the flow regulating valve so as to regulate the flow of the flow regulating valve according to the detected liquid outlet temperature; the refrigerating unit is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the refrigerating unit so as to adjust the refrigerating efficiency of the refrigerating unit according to the detected liquid outlet temperature.
Taking the refrigeration unit as an example, when the cooling capacity provided by the liquid circulation assembly 10 cannot meet the condensation requirement, the refrigeration efficiency is increased by controlling the refrigeration unit through the electric connection between the temperature detector and the refrigeration unit, so as to reduce the temperature of the cooling liquid, increase the cooling capacity provided by the liquid circulation assembly 10, ensure that the cooling capacity can always meet the deposition requirement, and further always obtain the maximum deposition efficiency.
Alternatively, when it is determined that the cooling capacity provided by the liquid circulation assembly 10 cannot meet the condensation deposition requirement, the cooling capacity provided may be increased by other means, so long as the cooling capacity provided can be increased.
Referring to fig. 3, in some embodiments, the collecting member 12 is barrel-shaped, and the collecting member 12 has a circulation chamber 121 therein, and the liquid inlet pipe, the circulation chamber 121 and the liquid outlet pipe are sequentially connected.
The yield of the condensation deposition of the silicon oxide is highest when the collecting member 12 is in a barrel shape through calculation, simulation and test verification. Of course, the collecting member 12 may have other structures, which are not further limited herein.
Referring to fig. 3, in some embodiments, the fluid circulation assembly 10 further includes an inner tube 11 and an outer tube 13, the outer tube 13 including an outer main tube 131 and an outer branch tube 132; the inner tube 11 and the outer main tube 131 are concentrically arranged along the central axis of the collecting member 12, and both extend to the inner bottom wall position of the collecting member 12 after passing through the opening of the collecting member 12, wherein the end part of the inner tube 11 is communicated with the circulation cavity 121 at the inner bottom wall position, the inner tube 11 and the outer tube 13 are mutually fixed, at least one of them is fixed with the collecting member 12, one end of the outer branch tube 132 is fixed with the outer main tube 131 and communicated, and the other end is fixed with the top position of the collecting member 12 and communicated with the circulation cavity 121; one of the inner tube 11 and the outer tube 13 is a liquid inlet tube, and the other is a liquid outlet tube.
So set up to make the one end inflow circulation chamber 121 in the circulation chamber 121 top or the bottom of coolant liquid, and flow out circulation chamber 121 from the other end, in order to guarantee that the coolant liquid can flow through whole circulation chamber 121, guarantee that the cold volume that the coolant liquid carried can fully transmit to collecting member 12, increase heat exchange efficiency, increase the condensation deposition efficiency of silica vapor.
It should be noted that the silica vapor generated in the high temperature chamber 100, after passing through the transition chamber 200, preferentially contacts and deposits on the side of the collecting member 12 near the transition chamber 200, so that a large amount of silica solids are deposited on the side of the collecting member 12 near the transition chamber 200, while relatively less silica solids are deposited on the other side, i.e., the deposition is uneven, affecting the deposition efficiency.
In some embodiments, the condensation collection structure further comprises a drive assembly capable of driving the liquid circulation assembly 10 to rotate about the central axis of the outer tube 13. In this application, with inner tube 11 and the outer tube 13 of concentric setting as feed liquor pipe and drain pipe, when guaranteeing through the pivoted mode of drive liquid circulation subassembly 10 that deposit evenly on collecting member 12, the position of feed liquor pipe feed liquor end and drain pipe drain end can not change, can not influence liquid circulation subassembly 10 and accomplish the feed liquor, go out normally.
Referring to fig. 3, in some embodiments, the end of the outer main pipe 131 is fixed to the inner bottom wall of the collecting member 12, and the end of the outer main pipe 131 is also rotated with the inner pipe 11 to block the circulation chamber 121 at the positions of the outer main pipe 131 and the inner bottom wall; the circulation chambers 121 at the outer main pipe 131 and the inner bottom wall are blocked, so that the flow direction of the liquid path in the liquid circulation assembly 10 can be optimized, and turbulence can be prevented.
Taking liquid inlet of the inner pipe 11 and liquid outlet of the outer pipe 13 as examples, cooling liquid enters the circulation cavity 121 through the inner pipe 11, enters the outer branch pipe 132 along the circulation cavity 121 and then flows out of the circulation assembly 10 through the outer main pipe 131, in the process, if the bottom end of the outer main pipe 131 is located at the separation of the circulation cavity 121, part of the cooling liquid entering the outer main pipe 131 through the outer branch pipe 132 can flow downwards along the outer main pipe 131 under the action of dead weight, and part of the cooling liquid entering the circulation cavity 121 through the inner pipe 11 can flow upwards along the outer main pipe 131 under the driving of the flow regulating valve, so that turbulence occurs in the outer main pipe 131 and the cold energy conveying efficiency is influenced; in this application, the cooling fluid can be placed to flow up the outer main pipe 131 by the rotational connection between the end of the outer main pipe 131 and the inner pipe 11, thereby avoiding the turbulence situation described above.
In some embodiments, the inner tube 11 has two rotation connecting parts 111 rotatably connected to the outer main tube 131, wherein one rotation connecting part 111 corresponds to the end part of the outer main tube 131 and is used for blocking the outer main tube 131 and the circulation cavity 121 at the position of the inner bottom wall, and the other rotation connecting part 111 is positioned at the side of the connection position of the outer main tube 131 and the outer branch tube 132, which is close to the bottom of the collecting piece 12, and is used for preventing the cooling liquid entering the outer main tube 131 through the outer branch tube 132 from flowing downwards along the outer main tube 131 under the action of dead weight and affecting the liquid outlet amount; in addition, the rotation connection portion 111 also has the effect of supporting the inner tube 11, preventing the inner tube 11 from shaking inside the outer tube 13.
Referring to fig. 3, in some embodiments, a concave cavity 122 is further formed in the collecting member 12, the concave cavity 122 is communicated with the circulation cavity 121 and is located at a side of the circulation cavity 121 away from the opening of the collecting member 12, and the inner tube 11 penetrates through the circulation cavity 121 and is inserted into the concave cavity 122.
Referring to fig. 3, in some embodiments, the outer tube 13 includes a plurality of outer branch tubes 132, each outer branch tube 132 is disposed along a radial direction of the collecting member 12, and the outer branch tubes 132 are uniformly distributed along a circumferential direction of the collecting member 12; so that the coolant in the circulation chamber 121 can be uniformly circulated back into the outer main pipe 131 through the respective outer branch pipes 132.
In some embodiments, outer tube 13 includes two outer branches 132.
Referring to fig. 3, in some embodiments, the inner tube 11 is a liquid inlet tube, and the outer tube 13 is a liquid outlet tube.
Typically, the silica vapor will preferentially contact and deposit on the side of collection member 12 adjacent transition chamber 200 after passing through transition chamber 200; the inner tube 11 is a liquid inlet tube, the outer tube 13 is a liquid outlet tube, that is, the cooling liquid gradually flows upwards from the bottom of the circulation cavity 121, the temperature of the bottom of the collecting member 12 is lower than that of the side surface, so that the silicon oxide vapor is subjected to heat exchange deposition with the side surface of the collecting member 12, and then subjected to heat exchange deposition with the bottom surface of the collecting member 12 with lower temperature, and gradient condensation deposition is realized through the temperature difference between the side surface and the bottom surface of the collecting member 12, so that the deposition rate can be effectively increased, and the yield of the silicon oxide is increased.
Of course, the inner tube 11 may be used as a liquid outlet tube, and the outer tube 13 may be used as a liquid inlet tube, which is not further limited herein.
Referring to fig. 4, a second aspect of the present application provides a condensation collection method for the above-mentioned silicon oxide production equipment, comprising the steps of:
s100, starting a cooling liquid conveying pipeline, enabling power to drive cooling liquid to flow along a liquid circulation assembly, and condensing and collecting product steam on the outer wall of a collecting piece;
s200, detecting the liquid outlet temperature of a liquid outlet end of a liquid outlet pipe by a temperature detector, if the liquid outlet temperature is higher than a preset temperature t1, adjusting the operation efficiency of the adjusting component, and if the liquid outlet temperature is lower than a preset temperature t2, adjusting the operation efficiency of the adjusting component;
s300, repeatedly executing the step S200 until condensation and collection are finished, and closing the cooling liquid conveying pipeline.
In some embodiments, where the regulating assembly includes a flow regulating valve and a refrigeration unit, step S200 includes the steps of:
s210, detecting the liquid outlet temperature of the liquid outlet end of the liquid outlet pipe by a temperature detector, if the liquid outlet temperature is higher than a preset temperature t1, executing a step S220, and if the liquid outlet temperature is lower than a preset temperature t2, executing a step S230;
s220, judging whether the through flow of the flow regulating valve is maximum, if so, increasing the refrigerating efficiency of the refrigerating unit, and if not, increasing the through flow of the flow regulating valve;
s230, judging whether the refrigerating efficiency of the refrigerating unit is minimum, if so, regulating down the flow of the flow regulating valve, and if not, regulating down the refrigerating efficiency of the refrigerating unit.
Firstly, increasing the cooling capacity by controlling a flow regulating valve to increase the flow, and then, increasing the cooling capacity by controlling a refrigerating unit to reduce the temperature of the cooling liquid; it can be appreciated that the way of increasing the cooling capacity by increasing the flow rate through the flow regulating valve is much less than the way of increasing the cooling capacity by decreasing the cooling liquid temperature through the refrigeration unit, and therefore, the operation cost of the condensation collection method of the present application can be further reduced by such a configuration.
Referring to fig. 1 and 4, in some embodiments, the low temperature chamber 300 further includes a magnetic fluid seal 330 extending through and secured to the low temperature furnace cover 320; the magnetic fluid sealing member 330 can increase the sealing effect between the outer tube 13 and the low-temperature furnace cover 320, and prevent the leakage of the silicon oxide vapor in the low-temperature chamber 300 through the gap between the outer tube 13 and the low-temperature furnace cover 320 while ensuring the normal rotation of the outer tube 13.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (10)
1. The silicon oxide production equipment is characterized by comprising a high-temperature chamber (100), a transition chamber (200) and a low-temperature chamber (300) which are sequentially communicated, wherein a heating assembly is arranged in the high-temperature chamber (100) and used for heating raw materials to generate silicon oxide steam, and the low-temperature chamber (300) is provided with a liquid circulation assembly (10);
the liquid circulation assembly (10) comprises a liquid inlet pipe, a collecting piece (12) and a liquid outlet pipe which are sequentially communicated, and the collecting piece (12) is positioned in the greenhouse (300);
and a cooling liquid conveying pipeline is further arranged outside the low-temperature chamber (300), and the cooling liquid conveying pipeline is respectively communicated with the liquid inlet pipe and the liquid outlet pipe so as to dynamically convey cooling liquid into the collecting piece (12).
2. The silica production apparatus according to claim 1, wherein the low temperature chamber (300) is further provided with a temperature detector and a regulating assembly;
the adjusting component is communicated with the liquid inlet end of the liquid inlet pipe so as to change the liquid amount and/or the liquid temperature of the cooling liquid in the liquid circulation component (10);
the temperature detector is communicated with the liquid outlet end of the liquid outlet pipe so as to detect the liquid outlet temperature of the cooling liquid, and is electrically connected with the adjusting component so as to adjust the operation efficiency of the adjusting component according to the detected liquid outlet temperature.
3. The silica production apparatus according to claim 2, wherein the regulating assembly comprises a flow regulating valve and/or a refrigeration unit;
the flow regulating valve is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the flow regulating valve so as to regulate the flow rate of the flow regulating valve according to the detected liquid outlet temperature;
the refrigerating unit is communicated with the liquid inlet end of the liquid inlet pipe, and the temperature detector is electrically connected with the refrigerating unit so as to adjust the refrigerating efficiency of the refrigerating unit according to the detected liquid outlet temperature.
4. The silica production apparatus according to claim 1, wherein the collecting member (12) is barrel-shaped, and the collecting member (12) has a circulation chamber (121) inside which the collecting member is also barrel-shaped, and the liquid inlet pipe, the circulation chamber (121), and the liquid outlet pipe are sequentially communicated.
5. The silica production apparatus according to claim 4, wherein the liquid circulation assembly (10) further comprises an inner pipe (11) and an outer pipe (13), the outer pipe (13) comprising an outer main pipe (131) and an outer branch pipe (132);
the inner tube (11) and the outer main tube (131) are concentrically arranged along the central axis of the collecting piece (12), and both extend to the inner bottom wall position of the collecting piece (12) after passing through the opening of the collecting piece (12),
the end part of the inner pipe (11) is communicated with the circulation cavity (121) at the position of the inner bottom wall, the inner pipe (11) and the outer pipe (13) are mutually fixed, at least one of the inner pipe and the outer pipe is fixed with the collecting piece (12), one end of the outer branch pipe (132) is fixed with and communicated with the outer main pipe (131), and the other end of the outer branch pipe is fixed with the top part of the collecting piece (12) and communicated with the circulation cavity (121);
one of the inner tube (11) and the outer tube (13) is the liquid inlet tube, and the other is the liquid outlet tube.
6. The apparatus for producing silicon oxide according to claim 5, wherein an end of the outer main tube (131) is fixed to an inner bottom wall of the collecting member (12), and an end of the outer main tube (131) is further rotatably connected to the inner tube (11) to block the circulation chamber (121) at the position of the inner bottom wall and the outer main tube (131).
7. The silica production apparatus according to claim 5, wherein a concave cavity (122) is further provided in the collecting member (12), the concave cavity (122) is communicated with the circulation cavity (121) and is located at a side of the circulation cavity (121) away from the opening of the collecting member (12), and the inner tube (11) penetrates through the circulation cavity (121) and is inserted into the concave cavity (122).
8. The silica production apparatus according to claim 5, wherein the outer tube (13) includes a plurality of the outer branch tubes (132), each of the outer branch tubes (132) is disposed in a radial direction of the collecting member (12), and each of the outer branch tubes (132) is uniformly distributed in a circumferential direction of the collecting member (12).
9. The silica production apparatus according to any one of claims 6 to 8, wherein the inner tube (11) is the liquid inlet tube and the outer tube (13) is the liquid outlet tube.
10. A condensation collection method for the silica production apparatus as claimed in claim 2 or claim 3, comprising the steps of:
a. starting a cooling liquid conveying pipeline, driving cooling liquid to flow along a liquid circulation assembly by power, and condensing and collecting product steam on the outer wall of a collecting piece;
b. the temperature detector detects the liquid outlet temperature of the liquid outlet end of the liquid outlet pipe, if the liquid outlet temperature is higher than a preset temperature t1, the operation efficiency of the adjusting component is increased, and if the liquid outlet temperature is lower than a preset temperature t2, the operation efficiency of the adjusting component is decreased;
c. and c, repeatedly executing the step b until the condensation collection is finished, and closing the cooling liquid conveying pipeline.
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| CN202311831071.1A CN117486224A (en) | 2023-12-28 | 2023-12-28 | Silicon oxide production equipment and condensation collection method |
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