CN117465081A - High-absorbance composite membrane and application thereof in laser-induced transfer - Google Patents
High-absorbance composite membrane and application thereof in laser-induced transfer Download PDFInfo
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- CN117465081A CN117465081A CN202311326673.1A CN202311326673A CN117465081A CN 117465081 A CN117465081 A CN 117465081A CN 202311326673 A CN202311326673 A CN 202311326673A CN 117465081 A CN117465081 A CN 117465081A
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- 238000012546 transfer Methods 0.000 title claims abstract description 163
- 239000002131 composite material Substances 0.000 title claims abstract description 86
- 238000002835 absorbance Methods 0.000 title claims abstract description 84
- 239000012528 membrane Substances 0.000 title claims abstract description 63
- 229910052751 metal Inorganic materials 0.000 claims abstract description 75
- 239000002184 metal Substances 0.000 claims abstract description 75
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 238000003475 lamination Methods 0.000 claims abstract description 3
- 239000000463 material Substances 0.000 claims description 8
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 229910001512 metal fluoride Inorganic materials 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 4
- 150000004706 metal oxides Chemical class 0.000 claims description 4
- 229910052976 metal sulfide Inorganic materials 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000005383 fluoride glass Substances 0.000 claims description 3
- 229910052914 metal silicate Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000005368 silicate glass Substances 0.000 claims description 3
- 239000005361 soda-lime glass Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 82
- 230000000052 comparative effect Effects 0.000 description 41
- 238000010586 diagram Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- 238000010521 absorption reaction Methods 0.000 description 9
- YLZOPXRUQYQQID-UHFFFAOYSA-N 3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)-1-[4-[2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidin-5-yl]piperazin-1-yl]propan-1-one Chemical compound N1N=NC=2CN(CCC=21)CCC(=O)N1CCN(CC1)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F YLZOPXRUQYQQID-UHFFFAOYSA-N 0.000 description 8
- 239000010409 thin film Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 235000008733 Citrus aurantifolia Nutrition 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 235000011941 Tilia x europaea Nutrition 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000004571 lime Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/023—Optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/418—Refractive
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
Abstract
The invention discloses a high-absorbance composite membrane and application thereof in laser-induced transfer, wherein the high-absorbance composite membrane comprises a transparent substrate, a dielectric layer and a transfer metal layer which are sequentially laminated from top to bottom; the absorbance of the transparent substrate to the transfer laser is not higher than 20%, and the absorbance of the medium layer to the transfer laser is not higher than 10%; the medium layer at least comprises two medium films, and the refractive index of each medium film to the transfer laser is different; the refractive index of the transparent substrate is lower than that of a dielectric film attached to the inner surface of the transparent substrate; and in the dielectric layer, the lamination sequence of the dielectric films is staggered from top to bottom according to the first high and then low refractive index. The high-absorbance composite membrane provided by the scheme has extremely high light absorptivity for transfer laser, and can improve the metal transfer amount in laser-induced transfer on the premise of ensuring extremely high purity of a metal structure formed by deposition.
Description
Technical Field
The invention relates to the technical field of laser-induced transfer, in particular to a high-absorbance composite membrane and application thereof in laser-induced transfer.
Background
The laser-induced transfer technology is a laser precision processing technology which irradiates a metal film attached to a transparent substrate by using pulse laser, enables laser energy of the pulse laser to be absorbed by the metal film and then converted into heat, so that a local metal film area is deformed, finally forms jet liquid drops under the comprehensive actions of vaporization pressure, surface tension and the like, leaves the surface of the metal film, and deposits the jet liquid drops on a receptor substrate to form a two-dimensional or three-dimensional metal structure.
At present, the molding efficiency of the laser-induced transfer technology is extremely low, and the reason is generally that: first, this technique generally requires the use of short pulse width laser pulses, in combination with nano-or only a few microns thick metal films, which makes the lateral thermal diffusion after the pulse action insignificant, even if the metal film of the laser pulse action zone is totally melted through in the depth direction, the volume of the single ejected droplet formed is only on the order of a fly. The single transferred droplet volume as measured in the paper Supersonic lasers-induced jetting of aluminum micro-droples experiment was about 30 femtoliters. Second, when a thin film of metal such as gold, silver, copper, aluminum or the like is used as a transfer object, the above metal has a high reflectivity to a pulse laser commonly used in a laser induced transfer technique, such as a reflectivity of up to 97.7%,98.2%,95.9% and 95.6% to a laser beam having a wavelength of 1064nm, which is most widely used in industry, respectively. The extremely high reflectivity is combined with Gaussian distribution of laser energy on a plane, so that only laser energy with smaller area in the range of the central area of a laser spot can be absorbed by the metal film, the area of the metal film which is actually transferred is extremely small, and the metal transfer amount is extremely limited.
In order to enhance the amount of metal transfer in the laser induced transfer technique, some studies have used a layer of a strongly light absorbing material as an intermediate layer and placed between a transparent substrate and a metal thin film to enhance the absorption of laser energy and enhance the amount of laser transfer, as in paper Laser induced forward transfer aluminum layers: process investigation by time resolved imaging, an aryltriazine polymer is used as an intermediate layer and placed between a transparent substrate and a metal aluminum film to strongly absorb laser energy. However, the intermediate layer in the prior study can be melted and transferred by pulse laser, so that the purity of a metal structure formed by deposition is lower, the quality of laser-induced transfer is affected, and the technical popularization of the intermediate layer is limited.
Disclosure of Invention
The invention aims to provide a high-absorbance composite membrane which has extremely high light absorptivity for transfer laser and can improve the metal transfer amount in laser-induced transfer on the premise of ensuring extremely high purity of a metal structure formed by deposition so as to overcome the defects in the prior art.
Another object of the present invention is to provide an application of the above-mentioned high-absorbance composite membrane in laser-induced transfer, which can greatly improve the molding efficiency in the laser-induced transfer technique, and simultaneously ensure that the deposited metal structure has extremely high purity.
To achieve the purpose, the invention adopts the following technical scheme:
a high-absorbance composite membrane comprises a transparent substrate, a dielectric layer and a transfer metal layer which are sequentially stacked from top to bottom; the outer surface of the transparent substrate is used for directly contacting the transfer laser, the absorbance of the transparent substrate to the transfer laser is not higher than 20%, and the absorbance of the medium layer to the transfer laser is not higher than 10%;
the medium layer at least comprises two medium films, and the refractive index of each medium film to the transfer laser is different;
the refractive index of the transparent substrate is lower than that of a dielectric film attached to the inner surface of the transparent substrate; and in the dielectric layer, the lamination sequence of the dielectric films is staggered from top to bottom according to the first high and then low refractive index.
Preferably, the material of the dielectric film includes any one of metal oxide, metal nitride, metal fluoride, metal sulfide and silicate.
Preferably, the transfer metal layer 3 includes at least one metal film.
Preferably, the material of the metal thin film includes any one of a metal and an alloy.
Preferably, the transparent substrate includes any one of fluoride glass, quartz glass, sapphire glass, lime sodium glass, and silicate glass.
The application of the high-absorbance composite membrane in laser-induced transfer uses the high-absorbance composite membrane to enable transfer laser to act on the outer surface of the transparent substrate and deposit on a receptor substrate to form a two-dimensional or three-dimensional metal structure, and the absorbance of the high-absorbance composite membrane to the transfer laser is greater than or equal to 80%.
Preferably, the wavelength of the transfer laser is 0.3 to 1.1 μm.
The technical scheme provided by the embodiment of the application can comprise the following beneficial effects:
the high-absorbance composite membrane provided by the technical scheme realizes the reduction of the total reflectivity of the composite membrane by utilizing the interference anti-reflection effect of the multilayer dielectric films. Meanwhile, in the scheme, the absorbance of the transparent substrate and the medium layer to the transfer laser is lower, and the absorbance of the transfer metal layer to the transfer laser is higher, so that the energy of the transfer laser is mainly absorbed by the transfer metal layer, the melting of the medium film is greatly prevented, the high energy utilization rate in the laser transfer is realized, the forming efficiency of the laser-induced transfer technology is greatly improved, and the high purity of the transfer formed metal structure is ensured.
Drawings
FIG. 1 is a schematic illustration of a high absorbance composite membrane according to the invention.
FIG. 2 is an interference schematic diagram of a high absorbance composite membrane according to the invention.
FIG. 3 is a graph of the absorbance of a transfer laser light versus wavelength of 532nm for a high absorbance composite membrane in example 1 of the invention.
FIG. 4 is a graph of the absorbance of a transfer laser at 532nm wavelength versus a high absorbance composite membrane in example 2 of the invention.
FIG. 5 is a graph of the absorbance of a transfer laser light versus wavelength of 355nm for a high absorbance composite membrane in example 3 of the invention.
FIG. 6 is a graph of the absorbance of a transfer laser at 532nm wavelength versus a high absorbance composite membrane in example 4 of the invention.
FIG. 7 is a graph of total reflectance of a high absorbance composite membrane versus a transferred laser at a wavelength of 532nm in example 5 of the invention.
FIG. 8 is a graph showing the light absorptivity of a conventional transfer metal film sheet of comparative example 1 of the present invention with respect to a transfer laser having a wavelength of 532 nm.
Fig. 9 is a schematic view of transfer droplets and single lines obtained after incidence of transfer laser light of the high absorbance composite membrane of example 1 and the conventional transfer metal membrane of comparative example 1 of the invention.
FIG. 10 is a graph showing the light absorptivity of the composite film sheet of comparative example 2-1 of the present invention to a transfer laser having a wavelength of 532 nm.
FIG. 11 is a graph showing the light absorptivity of the composite film sheet of comparative example 2-2 of the present invention with respect to the transfer laser light having a wavelength of 532 nm.
FIG. 12 is a graph showing the light absorptivity of the composite film sheet of comparative examples 2 to 3 of the present invention with respect to the transfer laser light having a wavelength of 532 nm.
FIG. 13 is a schematic diagram of transfer droplets obtained after incidence of transfer laser light by the composite films of example 4, comparative example 2-1, comparative example 2-2 and comparative example 2-3 of the present invention.
Wherein: transparent substrate 1, dielectric layer 2, upper dielectric film 201, middle dielectric film 202, lower dielectric film 203, and transfer metal layer 3.
Detailed Description
The technical scheme of the invention is further described by the following specific embodiments.
The technical scheme provides a high-absorbance composite membrane which comprises a transparent substrate 1, a dielectric layer 2 and a transfer metal layer 3 which are sequentially stacked from top to bottom; the outer surface of the transparent substrate 1 is used for directly contacting with transfer laser, the absorbance of the transfer laser by the transparent substrate 1 is not higher than 20%, and the absorbance of the transfer laser by the medium layer 2 is not higher than 10%;
the medium layer 2 at least comprises two layers of medium films, and the refractive index of each layer of medium film to the transfer laser is different;
the refractive index of the transparent substrate 1 is lower than that of a dielectric thin film attached to the inner surface of the transparent substrate 1; in the dielectric layer 2, the stacking sequence of the dielectric films is staggered from top to bottom according to the order of the refractive indexes.
In order to improve the metal transfer amount in laser-induced transfer, the technical scheme provides a high-absorbance composite membrane with extremely high light absorptivity for transfer laser, which comprises a transparent substrate 1, a medium layer 2 and a transfer metal layer 3 which are sequentially stacked; the dielectric layers 2 are formed by compositing dielectric films with different refractive indexes and staggered arrangement from top to bottom according to the first high refractive index and then low refractive index, and are matched with the transparent substrate 1, so that transfer laser is interfered by the transparent substrate 1 and multiple layers of dielectric films before reaching the transfer metal layer 3, and the transfer laser originally reflected by the transfer metal layer 3 is continuously and again absorbed by the transfer metal layer 3, and therefore the light absorptivity (namely the light absorptivity) of the composite film to the transfer laser in the scheme is greatly improved.
In fig. 1, when the dielectric layer 2 includes three dielectric films (an upper dielectric film 201, a middle dielectric film 202, and a lower dielectric film 203, respectively), the "the order of stacking the dielectric films in the dielectric layer 2 is staggered from top to bottom, which means that the refractive index of the upper dielectric film 201 is higher than the refractive index of the middle dielectric film 202, the refractive index of the lower dielectric film 202 is higher than the refractive index of the middle dielectric film 202, and the refractive indexes of the upper dielectric film 201 and the lower dielectric film 202 are not related. If the dielectric layer 2 includes multiple dielectric films, the method is analogized according to the distribution rule, and will not be repeated here.
Taking the case that the dielectric layer 2 comprises two dielectric films as an example, the refractive index of the dielectric film attached to the inner surface of the transparent substrate 1 is higher than that of the dielectric film attached to the inner surface of the transfer metal layer 3, so that before the transfer laser reaches the transfer metal layer 3, a staggered irradiation structure with the refractive index being low, high and low is formed, and an interference schematic diagram thereof is shown in fig. 2:
transfer laser L 1 Is divided into reflected light R after being incident from the outer surface of the transparent substrate 1 1 And transmitted light T 1 ；
Transmitted light T 1 After reaching the inner surface of the transparent substrate 1, the light is refracted and reflected by the dielectric film attached to the inner surface of the transparent substrate 1 to form transmitted light T 2 And reflected light R 21 The method comprises the steps of carrying out a first treatment on the surface of the Reflected light R 21 Then the air is taken in through the transparent substrate 1 to form reflected light R 2 ；
Transmitted light T 2 Is refracted and reflected to form transmitted light T 3 And reflected light R 32 The method comprises the steps of carrying out a first treatment on the surface of the Reflected light R 32 The reflected light R is formed by the dielectric film attached to the inner surface of the transparent substrate 1 after entering the transparent substrate 1 31 Then passes through the transparent substrate 1 and enters the air to form reflected light R 3 ；
And transmit light T 3 After reflection, reflected light R is formed 422 The method comprises the steps of carrying out a first treatment on the surface of the Then, reflected light R 422 Into a dielectric film attached to the inner surface of the transparent substrate 1 to form reflected light R 421 Then, the reflected light R 421 Enters the transparent substrate 1 to form reflected light R 41 Finally, reflected light R 41 Forming reflected light R through the transparent substrate 1 into the air 4 ；
Finally, the transmitted light T 3 Into the transfer metal layer 3.
The reflected light R 1 、R 2 、R 3 And R is 4 The total reflectance is the total reflectance of the high-absorbance composite film, where the light absorptivity refers to the ratio of the energy of the transfer laser light absorbed by the composite film to the energy of the transfer laser light incident from the transparent substrate, and the light reflectance refers to the ratio of the total energy of the transfer laser light reflected by the composite film to the energy of the transfer laser light incident from the transparent substrate.
The high-absorbance composite membrane provided by the technical scheme ensures that reflected light R 1 、R 2 、R 3 And R is 4 The light interference phenomenon occurs under the transparent substrate 1, the dielectric layer 2 compounded by the two dielectric films and the transfer metal layer 3, and the high-absorbance composite membrane can be obtained through experimental detection, so that the reduction of the light reflectivity is realized. Meanwhile, in the scheme, the absorbance of the transparent substrate 1 and the medium layer 2 to the transfer laser is lower, and the absorbance of the transfer metal layer 3 to the transfer laser is higher, so that the energy of the transfer laser is mainly absorbed by the transfer metal layer 3, the melting of the medium film is greatly prevented, the high energy utilization rate in the laser transfer is realized, the forming efficiency of the laser-induced transfer technology is greatly improved, and the high purity of the transfer formed metal structure is ensured.
Further, the material of the dielectric thin film includes any one of metal oxide, metal nitride, metal fluoride, metal sulfide and silicate.
In a preferred embodiment of the present disclosure, the dielectric film is made of any one of a metal oxide, a metal nitride, a metal fluoride, a metal sulfide, and a silicate, which further reduces the possibility of melting the dielectric film, and makes the purity of the metal structure formed by transfer higher.
Further, the transfer metal layer 3 includes at least one metal film.
Further, the material of the metal thin film includes any one of a metal and an alloy.
Furthermore, due to the interference anti-reflection effect of the multi-layer dielectric film in the composite film, more kinds of metals can participate in the processing process of laser-induced transfer, and the technical popularization of the composite film is facilitated.
Further, the transparent substrate 1 includes any one of fluoride glass, quartz glass, sapphire glass, soda lime glass, and silicate glass.
The application of the high-absorbance composite membrane in laser-induced transfer uses the high-absorbance composite membrane to enable transfer laser to act on the outer surface of the transparent substrate 1 and deposit on a receptor substrate to form a two-dimensional or three-dimensional metal structure, wherein the absorbance of the high-absorbance composite membrane to the transfer laser is greater than or equal to 80%.
The scheme also provides application of the high-absorbance composite membrane in laser-induced transfer, which can greatly improve the forming efficiency in the laser-induced transfer technology and ensure that a metal structure formed by deposition has extremely high purity. Further, the absorbance of the high-absorbance composite membrane for transferring laser is up to 80%, so that the high-energy utilization rate in laser-induced transfer is realized.
Further, the wavelength of the transfer laser is 0.3 to 1.1 μm.
Example 1
A high absorbance composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm was perpendicular to the outer surface of the transparent substrate of example 1, as shown in fig. 3, that is, the absorbance of the composite film sheet of example 1 to the transfer laser light having a wavelength of 532nm was 90%.
Example 2
A high absorbance composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm was perpendicularly incident on the outer surface of the transparent substrate of example 2, as shown in fig. 4, i.e., the absorbance of the composite film sheet of example 2 to the transfer laser light having a wavelength of 532nm was 95%. And it is known from examples 1 and 2 that the composition and thickness of the dielectric layer in the composite membrane may vary depending on the thickness of the transfer metal layer.
Example 3
A high absorbance composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 355nm was perpendicularly incident on the outer surface of the transparent substrate of example 3, as shown in fig. 5, i.e., the absorbance of the composite film sheet of example 3 to the transfer laser light having a wavelength of 355nm was 95%. And it is known from examples 1 and 3 that the composition and thickness of the dielectric layer in the composite film may be changed according to the wavelength of the transfer laser and the material of the transparent substrate.
Example 4
A high absorbance composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm was perpendicularly incident on the outer surface of the transparent substrate of example 4, as shown in fig. 6, that is, the absorbance of the composite film sheet of example 4 to the transfer laser light having a wavelength of 532nm was 89%. And it is known from examples 1 and 4 that the composition and thickness of the dielectric layer in the composite membrane may be changed according to the material of the transfer metal layer.
Example 5
A high absorbance composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the total reflectance curve of the transfer laser light having a wavelength of 532nm perpendicularly incident on the outer surface of the transparent substrate of example 5 is shown in fig. 7, i.e., the total reflectance of the composite film sheet of example 5 with respect to the transfer laser light having a wavelength of 532nm is only 8%, and the absorbance of the composite film sheet of example 5 with respect to the transfer laser light having a wavelength of 532nm is extremely high.
Comparative example 1
A conventional transfer metal film has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm, which is perpendicularly incident on the outer surface of the transparent substrate of comparative example 1, is shown in fig. 8, that is, the conventional transfer metal film sheet of comparative example 1 has an absorbance of only 44% to the transfer laser light having a wavelength of 532 nm.
Further, the high absorbance composite film of example 1 and the conventional transfer metal film of comparative example 1 were applied to laser precision processing based on the laser-induced forward transfer principle, respectively, in which a transfer laser having a center wavelength of 532nm, a pulse width of 1.5ns, a pulse energy of 1 μj, and a transfer laser focused to a spot having a diameter of about 26 μm was used.
FIG. 9 is a schematic view showing the transfer droplets and single lines obtained after incidence of the transfer laser for the high absorbance composite membrane of example 1 and the conventional transfer metal membrane of comparative example 1; wherein, fig. 9 (a) is a schematic diagram of transfer droplets obtained by transferring the high absorbance composite membrane of example 1 after laser incidence, and fig. 9 (b) is a schematic diagram of transfer droplets obtained by transferring the conventional transfer metal membrane of comparative example 1 after laser incidence; fig. 9 (c) is a schematic diagram of a single line obtained by transferring the high absorbance composite membrane of example 1 after laser incidence, and fig. 9 (d) is a schematic diagram of a single line obtained by transferring the conventional transfer metal membrane of comparative example 1 after laser incidence.
As can be seen from fig. 9, the high absorbance composite film of example 1 obtained larger transfer droplets than the conventional transfer metal film of comparative example 1 after the incidence of the transfer laser, and the high absorbance composite film of example 1 obtained a single line width larger than that of the conventional transfer metal film of comparative example 1.
Comparative example 2-1
A composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm perpendicularly incident on the outer surface of the transparent substrate of comparative example 2-1 is shown in FIG. 10, i.e., the composite film sheet of comparative example 2-1 has an absorbance of only 40% with respect to the transfer laser light having a wavelength of 532 nm.
Comparative examples 2 to 2
A composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm was perpendicularly incident on the outer surface of the transparent substrate of comparative example 2-2 as shown in FIG. 11, i.e., the composite film sheet of comparative example 2-2 had an absorbance of only 68% for the transfer laser light having a wavelength of 532 nm.
Comparative examples 2 to 3
A composite membrane has a hierarchical structure as shown in the following table from top to bottom:
the absorption curve of the transfer laser light having a wavelength of 532nm was perpendicularly incident on the outer surface of the transparent substrate of comparative examples 2 to 3 as shown in FIG. 12, i.e., the composite films of comparative examples 2 to 3 had an absorbance of only 55% for the transfer laser light having a wavelength of 532 nm.
As can be seen from example 4, comparative example 2-1, comparative example 2-2 and comparative example 2-3, since the refractive index distribution of each of the dielectric thin films in the dielectric layers in the composite films of comparative example 2-1, comparative example 2-2 and comparative example 2-3 does not satisfy the distribution rule of the present technical scheme, the absorbance of the above comparative example for the transferred laser light having a wavelength of 532nm is low.
Further, the high absorbance composite film of example 4 and the composite films of comparative examples 2-1, 2-2 and 2-3 were applied to laser precision processing based on the principle of laser-induced forward transfer, respectively, in which a transfer laser having a center wavelength of 532nm, a pulse width of 1.5ns, a pulse energy of 1 μj and a transfer laser focused to a spot having a diameter of about 26 μm was used.
FIG. 13 is a schematic diagram showing transfer droplets obtained after incidence of transfer laser light by the composite films of example 4, comparative example 2-1, comparative example 2-2 and comparative example 2-3; wherein, fig. 13 (a) is a schematic diagram of transfer droplets obtained by transferring the high absorbance composite membrane of example 4 after laser incidence, fig. 13 (b) is a schematic diagram of transfer droplets obtained by transferring the composite membrane of comparative example 2-1 after laser incidence, fig. 13 (c) is a schematic diagram of transfer droplets obtained by transferring the composite membrane of comparative example 2-2 after laser incidence, and fig. 13 (d) is a schematic diagram of transfer droplets obtained by transferring the composite membrane of comparative example 2-3 after laser incidence.
As can be seen from fig. 13, the high absorbance composite membrane of example 4 obtained larger transfer droplets than the composite membranes of comparative examples 2-1, 2-2 and 2-3 after incidence of the transfer laser.
The technical principle of the present invention is described above in connection with the specific embodiments. The description is made for the purpose of illustrating the general principles of the invention and should not be taken in any way as limiting the scope of the invention. Other embodiments of the invention will be apparent to those skilled in the art from consideration of this specification without undue burden.
Claims (7)
1. A high absorbance composite membrane, characterized by: the device comprises a transparent substrate, a medium layer and a transfer metal layer which are sequentially stacked from top to bottom; the outer surface of the transparent substrate is used for directly contacting the transfer laser, the absorbance of the transparent substrate to the transfer laser is not higher than 20%, and the absorbance of the medium layer to the transfer laser is not higher than 10%;
the medium layer at least comprises two medium films, and the refractive index of each medium film to the transfer laser is different;
the refractive index of the transparent substrate is lower than that of a dielectric film attached to the inner surface of the transparent substrate; and in the dielectric layer, the lamination sequence of the dielectric films is staggered from top to bottom according to the first high and then low refractive index.
2. A high absorbance composite membrane according to claim 1 wherein: the material of the dielectric film comprises any one of metal oxide, metal nitride, metal fluoride, metal sulfide and silicate.
3. A high absorbance composite membrane according to claim 1 wherein: the transfer metal layer 3 comprises at least one metal film.
4. A high absorbance composite membrane according to claim 3 wherein: the material of the metal film comprises any one of metal and alloy.
5. A high absorbance composite membrane according to claim 1 wherein: the transparent substrate includes any one of fluoride glass, quartz glass, sapphire glass, soda lime glass, and silicate glass.
6. An application of a high-absorbance composite membrane in laser-induced transfer, which is characterized in that: the high-absorbance composite membrane according to any one of claims 1 to 5, wherein a transfer laser is applied to the outer surface of the transparent substrate and a two-dimensional or three-dimensional metal structure is deposited on a receptor substrate, and the absorbance of the transfer laser by the high-absorbance composite membrane is 80% or more.
7. The use of a high absorbance composite membrane according to claim 6 wherein: the wavelength of the transfer laser is 0.3-1.1 mu m.
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