CN117460142B - Multimodal field negative hydrogen ion source extraction structure - Google Patents
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- CN117460142B CN117460142B CN202311238303.2A CN202311238303A CN117460142B CN 117460142 B CN117460142 B CN 117460142B CN 202311238303 A CN202311238303 A CN 202311238303A CN 117460142 B CN117460142 B CN 117460142B
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- 238000000605 extraction Methods 0.000 title claims abstract description 50
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 title claims abstract description 24
- 239000001257 hydrogen Substances 0.000 claims abstract description 56
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 56
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 44
- 238000001816 cooling Methods 0.000 claims abstract description 43
- 239000007789 gas Substances 0.000 claims abstract description 38
- 150000002500 ions Chemical class 0.000 claims abstract description 35
- -1 hydrogen ions Chemical class 0.000 claims abstract description 9
- 238000009413 insulation Methods 0.000 claims abstract description 9
- 230000009286 beneficial effect Effects 0.000 claims abstract description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 39
- 239000000498 cooling water Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 10
- 238000004544 sputter deposition Methods 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 210000002381 plasma Anatomy 0.000 description 57
- 238000013461 design Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 238000001914 filtration Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000005281 excited state Effects 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000006872 improvement Effects 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000002661 proton therapy Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H13/00—Magnetic resonance accelerators; Cyclotrons
- H05H13/005—Cyclotrons
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61N—ELECTROTHERAPY; MAGNETOTHERAPY; RADIATION THERAPY; ULTRASOUND THERAPY
- A61N5/00—Radiation therapy
- A61N5/10—X-ray therapy; Gamma-ray therapy; Particle-irradiation therapy
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
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Abstract
The invention provides a multimodal field negative hydrogen ion source extraction structure which is arranged in an extraction area of ion source electrons and negative hydrogen ions; the extraction structure is sequentially provided with: the plasma electrode, the suction electrode, the ground electrode and the insulation device are arranged at the outlet of the discharge chamber; the gas channel is also arranged on the extraction structure, and is used for the gas inlet mode of the ion source to adopt a permeation mode between the plasma electrode and the discharge chamber, and the gas inlet mode enables hydrogen to diffuse from the extraction port to the filament direction, thereby being beneficial to improving the yield of negative hydrogen; the plasma electrode and the suction electrode adopt an indirect cooling mode, and an insulating device between the suction electrode and the ground electrode protects the plasma electrode and the suction electrode through a first check ring and a second check ring; according to the invention, the extraction structure of the multi-peak field negative hydrogen ion source is optimized by changing the air inlet mode, the electrode cooling mode, the insulating device protection mode and the like, so that the yield of negative hydrogen is improved, and the quality of beam current injected into the accelerator is further improved.
Description
Technical Field
The invention belongs to the technical field of proton therapy cyclotrons, and particularly relates to a multimodal field negative hydrogen ion source extraction structure.
Background
The extraction system of the ion source is the most direct factor influencing the beam quality, compact plasma generated by the ion source can form ion beam with high brightness and high stability only through a proper extraction system, and therefore, the selection and the optimal design of the extraction system are very important.
The conventional multi-modal field negative hydrogen ion source design suffers from the following problems:
First, loss in the middle of the gas results in low yields. In the prior art, a special gas circuit is designed at the top of an ion source to lead working gas into a discharge chamber from top to bottom, slow electrons which are beneficial to the yield of negative hydrogen plasma are generated in a region where the working gas can be cut (the upper two thirds of the discharge chamber), fast electrons which are unfavorable to the yield of negative hydrogen plasma are generated at the same time, the fast electrons are filtered out by a filtering field (the lower one third of the discharge chamber), and the slow electrons react with excited hydrogen molecules to form negative hydrogen plasma in the filtering field. However, since the gas is injected from top to bottom, a part of the gas is lost in the tangential field area, so that the residual gas reaching the filtering field area is insufficient to generate enough excited state hydrogen molecules, the number of the excited state hydrogen molecules formed in the formation area of the negative hydrogen plasma in the mode is relatively small, and the yield of the negative hydrogen plasma is not improved;
Second, poor safety of the lead-out structure results in low yields. The conventional extraction system of the multi-peak field negative hydrogen ion source usually adopts a direct cooling mode, as shown in fig. 3a, wherein a special water path is designed for cooling in the interior of the plasma electrode 1 and the anode 2 with the thickness of less than 10mm respectively. A circle of waterway needs to be processed inside the plasma electrode 1 and the suction electrode 2, and a water inlet channel needs to be provided for the waterway, and welding is performed at corresponding positions. The process is complex, the processing difficulty coefficient is high, and the water leakage phenomenon can be caused by slightly error in processing and welding. When the water leakage phenomenon occurs, the vacuum environment of the whole equipment can be damaged, so that the whole equipment cannot operate, and the leaked water possibly falls on an electrode with high voltage of tens of kilovolts, so that the risk to the equipment and operators is great. Safety is critical for stable operation of the ion source and even the whole apparatus.
Third, poor insulation of the extraction structure results in low yields. The multimodal field negative hydrogen ion source adopts a three-electrode extraction system, high-voltage insulation is carried out between electrodes through an insulation device, and beam current sequentially passes through the three electrodes and the insulation device between the three electrodes. During beam extraction, ions are sputtered onto the insulator. When the withstand voltage of the insulating device is insufficient, negative hydrogen plasma cannot be led out; when the withstand voltage of the insulating device is lowered, the beam intensity that could be originally extracted with higher energy is lowered. The insulating properties of the insulating device affect the extraction capacity of the ion source.
Disclosure of Invention
The invention provides a multimodal field negative hydrogen ion source extraction structure for solving the problems in the prior art, wherein the first aim is to solve the problem of low ion source yield caused by gas loss in the middle of a discharge chamber, and the second aim is to solve the problem of low ion source yield caused by poor extraction structure safety; the third object is to solve the problem of low ion source yield caused by poor insulation of the extraction structure.
The invention provides the following technical scheme for solving the technical problems.
A multi-peak field negative hydrogen ion source extraction structure, which is arranged in an extraction area of ion source electrons and negative hydrogen ions; the extraction structure is sequentially provided with: the plasma electrode 1, the suction electrode 2, the ground electrode 3, the insulating device 4-1 between the discharge chamber 7 and the plasma electrode 1, the insulating device 4-2 between the plasma electrode 1 and the suction electrode 2 and the insulating device 4-3 between the suction electrode 2 and the ground electrode 3 at the outlet of the discharge chamber 7;
The method is characterized in that: the gas channel 8 is also arranged on the extraction structure, the gas channel 8 is used for the gas inlet of the ion source in a penetrating way between the plasma electrode 1 and the discharge chamber 7, and the gas inlet way leads hydrogen to diffuse from the extraction port to the filament direction, thereby being beneficial to improving the yield of negative hydrogen; the plasma electrode 1 and the suction electrode 2 adopt an indirect cooling mode, copper pipes are wound on the periphery of the two electrodes to carry out indirect water cooling, so that the problems of leakage of cooling water and high direct water cooling processing difficulty coefficient are avoided; the insulating device 4-3 between the suction electrode 2 and the ground electrode 3 is protected by the first check ring 5-1 and the second check ring 5-2, so as to effectively prevent the sputtering of ions on the insulating device.
Further, the gas passage 8 is introduced from the plasma electrode 1, into the discharge chamber 7 through a gap between the electrode 1 and the insulating means 4-1 against the plasma and a gap between the electrode 1 and the inner wall of the discharge chamber 7 against the plasma.
Further, the air passage 8 is provided with a rectangular hole on the contact surface of the insulating device 4-1 and the plasma electrode 1, the rubber ring 8-1 is placed in the rectangular hole, and the diameter of the rubber ring 8-1 is larger than the height of the rectangular hole.
Further, the air passage 8 is provided with a rectangular hole on the contact surface of the insulating device 4-1 and the outer wall of the discharge chamber 7, a rubber ring 8-2 is placed in the rectangular hole, and the diameter of the rubber ring 8-2 is larger than the thickness of the rectangular hole.
Further, the indirect water cooling device is a plasma electrode cooling water pipe 6-1 which surrounds the annular outer wall of the plasma electrode 1, and the diameter of the plasma electrode cooling water pipe 6-1 is matched with a groove on the annular outer wall of the plasma electrode (1).
Further, the indirect water cooling device is a suction electrode cooling water pipe 6-2 which surrounds the annular outer wall of the suction electrode 2, and the diameter of the suction electrode cooling water pipe 6-2 is matched with a groove on the annular outer wall of the suction electrode 2.
Further, a first check ring 5-1 of the double-layer check ring is arranged between the suction electrode 2 and the insulating device 4-3; the second retainer ring 5-2 of the double-layer retainer ring is arranged between the first retainer ring 5-1 and the insulating device 4-3.
Furthermore, the cooling copper pipe can also be used as a carrier for connecting the electrode, so that the whole ion source is positioned on the high-pressure platform.
Advantageous effects of the invention
According to the invention, the extraction structure of the multi-peak field negative hydrogen ion source is optimized by changing the air inlet mode, the electrode cooling mode, the insulating device protection mode and the like, so that the yield of negative hydrogen is improved, and the quality of beam current injected into the accelerator is further improved. The method comprises the following steps:
First, changing the intake mode can increase the negative hydrogen yield.
Second, changing the water cooling mode can increase the safety of the whole equipment.
Thirdly, the baffle plate of the insulating device is added to effectively prevent the sputtering of ions on the insulating device and ensure the insulating performance of the insulating device.
Drawings
FIG. 1 is a schematic view of the overall structure of the multi-modal field negative hydrogen ion source extraction of the present invention;
FIG. 2 is an enlarged view of a portion of the air circuit of FIG. 1;
FIG. 3a is a schematic diagram of direct water cooling of a negative hydrogen ion source extraction structure of the prior art;
FIG. 3b is a schematic diagram of indirect water cooling of the negative hydrogen ion source extraction structure of the present invention;
FIG. 4 is a schematic diagram of a dual baffle ring of the negative hydrogen ion source extraction structure of the present invention;
FIG. 4a is a schematic view of a first baffle ring of the negative hydrogen ion source extraction structure of the present invention;
FIG. 4b is a schematic view of a second baffle ring of the negative hydrogen ion source extraction structure of the present invention;
1: a plasma electrode; 2: sucking the electrode; 3: a ground electrode; 4-1: an insulating device between the discharge chamber and the plasma electrode; 4-2 an insulating device between the plasma electrode and the suction electrode; 4-3: an insulation device between the suction electrode and the ground electrode; 5-1: a first retainer ring; 5-2: the second check ring; 6-1: a plasma electrode cooling water pipe; 6-2: a suction electrode cooling water pipe; 7: a discharge cell; 8: an airway; 8-1: the rubber ring 8-1 is used for preventing hydrogen from being transmitted rightward along the crack; 8-2: the rubber ring 8-2 is used for preventing the hydrogen from being transmitted upwards along the crack.
Detailed Description
Principle of design of the invention
1. The design goal of the invention is as follows: realizing high yield of the negative hydrogen plasma of the multi-peak field negative hydrogen ion source.
2. One of the innovation points is as follows: the unexpected effect is achieved by overcoming the traditional prejudice. The traditional prejudice is: a special gas path is designed at the top of the ion source to lead the working gas into the discharge chamber from top to bottom through a gas pipe. Because the gas is injected from top to bottom, the gas has lost a portion in the cusped field region of the pathway discharge field such that the remaining gas that reaches the discharge field filtering field region is insufficient to generate sufficient excited state hydrogen molecules. The invention changes the gas entering from bottom to top, the gas entering from bottom to top is the gas entering into the formation area of negative hydrogen plasma of the discharge field filtering field from the gap between the plasma electrode and the inner wall of the discharge chamber, the difference between the lower third area and the upper two third area of the discharge field is that: the lower third is the area where the slow electrons have been formed, while the upper two third is the process area where the slow electrons are generated, not the resulting area where the slow electrons are formed, so the lower third of the discharge field is the area where negative hydrogen ions are generated. Compared with the traditional direct air inlet mode through an air pipe, the air inlet mode is reversely diffused from the ion source outlet to the filament direction of the inlet, and has obvious effect of improving the yield of negative hydrogen.
3. And the second innovation point is as follows: the indirect water cooling mode meets the requirement of three parties and finds a balance point which gives consideration to the benefits of the three parties: not only meets the water cooling requirement, but also ensures high safety and ensures very simple processing. The direct water cooling mode is shown in fig. 3a, and the thick black line area represents the upper layer of water channel and the lower layer of water channel. Because the thickness of the electrode of each layer is less than 10mm, two layers of round holes are also needed to be drilled on the metal plate with the thickness of less than 10mm, and the round holes of the first layer are used as inlets, and the round holes of the second layer are round holes leading to a water channel. This design leaves only a few mm of height space for the second course of waterways. The method has the advantages that the processing difficulty is high, the electrodes are easy to damage after long-term sputtering, and in this way, water in the water-cooling pipeline flows out of the electrodes from inside the electrodes, provided that the first check ring and the second check ring between the electrodes for preventing sputtering are not arranged, ions are easy to sputter to insulators or the electrodes around in the beam extraction process, and the electrodes are easy to damage after long-term sputtering. As shown in fig. 3b, the present invention solves the safety problem by moving the water-cooled tube from inside the electrode to outside the electrode: grooves corresponding to the diameters of the water cooling pipes are respectively formed in the outer wall of the disc of the plasma electrode 1 and the outer wall of the disc of the suction electrode 2, and the water cooling pipes are laid on the grooves, so that an indirect water cooling effect is achieved. Through simulation and calculation, the indirect water cooling effect is equivalent to that of direct water cooling, and the water cooling requirements of the plasma electrode 1 and the suction electrode 2 are met. That is, the invention finds the balance point which gives consideration to the benefits of water cooling requirement, high safety and simple processing by an indirect water cooling method.
4. And the innovation points are as follows: the air inlet mode, the indirect water cooling and the anti-sputtering check ring are organically combined to realize high yield of negative hydrogen plasma. ① The two most direct key points of high yield are the quantity of hydrogen and the high voltage on the three electrodes, which are indispensable to complement each other, and the quantity of the hydrogen is enough but the high voltage on the high voltage electrode is insufficient, so that negative hydrogen plasmas of the extraction structure are in a stacked state although being generated in a large quantity, and the plasmas are extracted due to the lack of enough voltage; conversely, if the pressure differential is sufficient to draw particles from the outlet, the negative hydrogen ions are produced in insufficient amounts at the outlet, and even if the negative hydrogen ions are pulled out one hundred percent, high yields cannot be achieved. Improvement for the first key point: the air inlet mode is improved to be an air inlet mode of diffusing from the outlet to the filament direction, the quantity of hydrogen entering the negative hydrogen ion generation area in the lower third area of the discharge chamber is doubled, and the collision probability of slow electrons and excited hydrogen molecules in the lower third area is doubled due to the doubled quantity of hydrogen, so that the quantity of negative hydrogen ions pulled out from the outlet is doubled; improvement for the second key point: the three electrodes have large pressure difference, so that the number of the extracted particles is large, and the number of the extracted particles is small. In the case that the high voltage applied to each of the three electrodes is constant, the magnitude of the high voltage applied to the three electrodes depends on the effectiveness of the insulating device, and if the insulating device is partially failed or damaged, the pressure difference becomes smaller from large to small, so that the high yield of the extracted particles cannot be ensured all the time. The invention protects the insulating device through the first check ring 5-1 and the second check ring 5-2, so as to effectively prevent the sputtering of ions on the insulating device. ② The indirect relationship with high yield is the safety and stability of the extraction structure. If the system crashes, nothing is said about the system. The direct water cooling structure of the traditional method has great risks of human bodies and equipment, the invention adopts a double-insurance method in the aspect of guaranteeing the safety of the extraction structure, on one hand, the water cooling pipeline is moved from the inside of the electrode to the outer ring of the electrode, the problem that the upper surface or the lower surface of the electrode is damaged by slightly upwards or downwards deviating in the processing process of the inside of the electrode to cause water leakage is thoroughly avoided, the first layer of insurance is provided, the second layer of insurance is provided for ensuring that three electrodes are not sputtered by particles, and even if the situation of water seepage of the indirect water cooling pipeline occurs, the three electrodes can not react with the high-voltage electrode of a few kilovolts, thereby reducing the risks of human bodies and equipment to 0 degree.
Based on the principle of the invention, the invention designs a multimodal field negative hydrogen ion source extraction structure which is shown in figures 1,2, 3b, 4a and 4b and is arranged in an extraction area of electrons and negative hydrogen ions of the ion source; the extraction structure is sequentially provided with: the plasma electrode 1, the suction electrode 2, the ground electrode 3, the insulating device 4-1 between the discharge chamber 7 and the plasma electrode 1, the insulating device 4-2 between the plasma electrode 1 and the suction electrode 2 and the insulating device 4-3 between the suction electrode 2 and the ground electrode 3 at the outlet of the discharge chamber 7;
The method is characterized in that: the gas channel 8 is also arranged on the extraction structure, the gas channel 8 is used for the gas inlet of the ion source in a penetrating way between the plasma electrode 1 and the discharge chamber 7, and the gas inlet way leads hydrogen to diffuse from the extraction port to the filament direction, thereby being beneficial to improving the yield of negative hydrogen; the plasma electrode 1 and the suction electrode 2 adopt an indirect cooling mode, copper pipes are wound on the periphery of the two electrodes to carry out indirect water cooling, so that the problems of leakage of cooling water and high direct water cooling processing difficulty coefficient are avoided; the insulating device 4-3 between the suction electrode 2 and the ground electrode 3 is protected by the first check ring 5-1 and the second check ring 5-2, so as to effectively prevent the sputtering of ions on the insulating device.
Further, the gas passage 8 is introduced from the plasma electrode 1, into the discharge chamber 7 through a gap between the electrode 1 and the insulating means 4-1 against the plasma and a gap between the electrode 1 and the inner wall of the discharge chamber 7 against the plasma.
Further, the air passage 8 is provided with a rectangular hole on the contact surface of the insulating device 4-1 and the plasma electrode 1, the rubber ring 8-1 is placed in the rectangular hole, and the diameter of the rubber ring 8-1 is larger than the height of the rectangular hole.
Further, the air passage 8 is provided with a rectangular hole on the contact surface of the insulating device 4-1 and the outer wall of the discharge chamber 7, a rubber ring 8-2 is placed in the rectangular hole, and the diameter of the rubber ring 8-2 is larger than the thickness of the rectangular hole.
Further, the indirect water cooling device is a plasma electrode cooling water pipe 6-1 which surrounds the annular outer wall of the plasma electrode 1, and the diameter of the plasma electrode cooling water pipe 6-1 is matched with a groove on the annular outer wall of the plasma electrode (1).
Further, the indirect water cooling device is a suction electrode cooling water pipe 6-2 which surrounds the annular outer wall of the suction electrode 2, and the diameter of the suction electrode cooling water pipe 6-2 is matched with a groove on the annular outer wall of the suction electrode 2.
Further, a first check ring 5-1 of the double-layer check ring is arranged between the suction electrode 2 and the insulating device 4-3; the second retainer ring 5-2 of the double-layer retainer ring is arranged between the first retainer ring 5-1 and the insulating device 4-3.
Furthermore, the copper tube can also be used as a carrier for connecting the electrode, so that the whole ion source is positioned on the high-voltage platform.
Example 1
The invention optimizes the extraction structure of the multi-peak field negative hydrogen ion source by changing the air inlet mode 8, the electrode cooling modes 6-1 and 6-2, the protection modes of the insulating devices 4-1, 4-2 and 4-3, and the like, improves the yield of negative hydrogen, and further improves the quality of beam current injected into the accelerator.
The discharge chamber 7 is sealed with the plasma electrode 1 through a rubber ring, the plasma electrode 1 is insulated with the suction electrode 2 through a rubber ring sealing and insulating device 4-2, and the suction electrode 2 is insulated with the ground electrode 3 through a rubber ring sealing and insulating device 4-3. Electrons emitted by the filament are restrained in the discharge chamber by the cusp field and collide with working gas to form negative hydrogen plasma, fast electrons are separated out by the filtering field, slow electrons and excited hydrogen molecules are left to act to form negative hydrogen, the formed plasma is led out by the three-electrode leading-out system, the led-out beam (comprising electrons and negative hydrogen ions) is led out by the leading-out hole, the leading-out hole is a central round hole of the plasma electrode, the two ions are separated under the action of the magnetic field of a suction electrode, the electrons are deflected, the negative hydrogen plasma is led out, the negative hydrogen plasma is collected by the Faraday cylinder, and the beam intensity of the negative hydrogen is measured.
First, the ion source gas inlet mode adopts a mode of permeation at the side face of the plasma electrode 1, as shown by a gas channel 8 in fig. 2, the design has no fixed hydrogen pipeline, and gas finally enters a negative hydrogen forming area in a gap between the plasma electrode and the inner wall of a discharge chamber. Compared with the traditional direct air inlet mode through an air pipe, the air inlet mode is more beneficial to improving the yield of negative hydrogen. The formation of negative hydrogen is mainly the collision of excited hydrogen molecules of the extraction region with slow electrons. The air inlet mode diffuses hydrogen from the outlet to the filament direction, which has obvious effect on improving the yield of negative hydrogen.
Second, the plasma electrode 1 and the suction electrode 2 are indirectly cooled, and as shown in fig. 3b, the periphery of the two electrodes is indirectly cooled by copper pipe winding. The design can avoid the problem of high direct water cooling processing difficulty coefficient and can prevent the problem of cooling water leakage. In addition, the copper tube can also be used as a carrier for connecting the electrode. The whole ion source is positioned on a high-pressure platform, and the hydropower problem is not only the ion source, but also the key problem of the whole equipment, otherwise, the consequences are not considered.
Thirdly, the insulating device between the suction electrode 2 and the ground electrode 3 protects the ion source through the first check ring 5-1 and the first check ring 5-2, so that the sputtering of the ion to the insulating device can be effectively prevented, the insulating performance of the insulating device is ensured, the service life of the ion source is further prolonged, and the maintenance times of equipment operation are reduced.
It will be apparent to those skilled in the art that various modifications and variations can be made to the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.
Claims (3)
1. A multi-peak field negative hydrogen ion source extraction structure, which is arranged in an extraction area of ion source electrons and negative hydrogen ions; the extraction structure is sequentially provided with: the plasma electrode (1), the suction electrode (2) and the ground electrode (3) at the outlet of the discharge chamber (7), an insulating device (4-1) between the discharge chamber (7) and the plasma electrode (1), an insulating device (4-2) between the plasma electrode (1) and the suction electrode (2) and an insulating device (4-3) between the suction electrode (2) and the ground electrode (3);
the method is characterized in that: the gas channel (8) is also arranged on the extraction structure, the gas channel (8) is used for the gas inlet of the ion source in a penetrating way between the plasma electrode (1) and the discharge chamber (7), and the gas inlet way enables hydrogen to diffuse from the extraction port to the filament direction, thereby being beneficial to improving the yield of negative hydrogen; the plasma electrode (1) and the suction electrode (2) adopt an indirect cooling mode, copper pipes are wound on the periphery of the two electrodes to carry out indirect water cooling, so that the leakage of cooling water is prevented, and the problem of high direct water cooling processing difficulty coefficient is avoided; the insulation device (4-3) between the suction electrode (2) and the ground electrode (3) is protected by the first check ring (5-1) and the second check ring (5-2) so as to effectively prevent the ion from sputtering the insulation device;
the air passage (8) is introduced from the plasma electrode (1), and enters the discharge chamber (7) through a gap between the electrode (1) and the insulating device (4-1) which are attached to the plasma and a gap between the electrode (1) and the inner wall of the discharge chamber (7) which are attached to the plasma;
The air flue (8) is provided with a rectangular hole on the contact surface of the insulating device (4-1) and the plasma electrode (1), a rubber ring (8-1) is placed in the rectangular hole, and the diameter of the rubber ring (8-1) is larger than the height of the rectangular hole;
the indirect water cooling is a plasma electrode cooling water pipe (6-1) encircling the annular outer wall of the plasma electrode (1), and the diameter of the plasma electrode cooling water pipe (6-1) is matched with a groove on the annular outer wall of the plasma electrode (1);
The indirect water cooling is a suction electrode cooling water pipe (6-2) encircling the annular outer wall of the suction electrode (2), and the diameter of the suction electrode cooling water pipe (6-2) is matched with a groove on the annular outer wall of the suction electrode (2);
The first check ring (5-1) is arranged between the suction electrode (2) and the insulating device (4-3); the second check ring (5-2) is arranged between the first check ring (5-1) and the insulating device (4-3).
2. The multi-modal field negative hydrogen ion source extraction structure of claim 1, wherein: the air flue (8) is provided with a rectangular hole on the contact surface of the insulating device (4-1) and the outer wall of the discharge chamber (7), a rubber ring (8-2) is placed in the rectangular hole, and the diameter of the rubber ring (8-2) is larger than the thickness of the rectangular hole.
3. The multi-modal field negative hydrogen ion source extraction structure of claim 1, wherein: the cooling copper pipe can also be used as a carrier for connecting the electrode, so that the whole ion source is positioned on the high-voltage platform.
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| CN202311238303.2A CN117460142B (en) | 2023-09-22 | 2023-09-22 | Multimodal field negative hydrogen ion source extraction structure |
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| CN202311238303.2A CN117460142B (en) | 2023-09-22 | 2023-09-22 | Multimodal field negative hydrogen ion source extraction structure |
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| CN117460142B true CN117460142B (en) | 2024-04-26 |
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