CN117448826A - Recycling process of etching solution of integrated circuit lead frame - Google Patents

Recycling process of etching solution of integrated circuit lead frame Download PDF

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Publication number
CN117448826A
CN117448826A CN202311413484.8A CN202311413484A CN117448826A CN 117448826 A CN117448826 A CN 117448826A CN 202311413484 A CN202311413484 A CN 202311413484A CN 117448826 A CN117448826 A CN 117448826A
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CN
China
Prior art keywords
air
electrolytic tank
tank
etching solution
electrolytic
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Granted
Application number
CN202311413484.8A
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Chinese (zh)
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CN117448826B (en
Inventor
康亮
李军强
李小虎
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Tianshui Huayang Electronic Technology Co ltd
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Tianshui Huayang Electronic Technology Co ltd
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Priority to CN202311413484.8A priority Critical patent/CN117448826B/en
Priority claimed from CN202311413484.8A external-priority patent/CN117448826B/en
Publication of CN117448826A publication Critical patent/CN117448826A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • C23F1/46Regeneration of etching compositions
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25CPROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C1/00Electrolytic production, recovery or refining of metals by electrolysis of solutions
    • C25C1/12Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25CPROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C7/00Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25CPROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
    • C25C7/00Constructional parts, or assemblies thereof, of cells; Servicing or operating of cells
    • C25C7/06Operating or servicing
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling

Abstract

The invention relates to the technical field of lead frame etching liquid recovery, in particular to a process for recovering and reutilizing integrated circuit lead frame etching liquid, which comprises the following steps: step one: extracting the used etching solution into an electrolytic tank in a recovery device, then sealing a cover plate on the electrolytic tank, and electrifying the etching solution in the electrolytic tank to perform electrolytic work; according to the invention, through the arrangement of the neutralization tank and the air circulation assembly, the air circulation assembly pumps the air in the electrolytic tank into the neutralization tank, and then the air is blown back into the electrolytic tank through the air pump and the fixing pipe, in the process, the neutralization work of acidic substances is realized by utilizing the alkaline solution in the neutralization tank, so that the neutralization reaction of the volatile acidic substances in the solution, such as sulfuric acid, hydrochloric acid and other acidic substances, is carried out, and the harm of the acidic substances to technicians and the pollution to the environment are reduced.

Description

Recycling process of etching solution of integrated circuit lead frame
Technical Field
The invention relates to the field of lead frame etching liquid recovery, in particular to a process for recovering and reutilizing integrated circuit lead frame etching liquid.
Background
Etching solution, which is a raw material for engraving drypoint, is commonly used in the production of lead frames, and etching mainly refers to the removal of unnecessary metallic copper on circuit boards. In general, the etching of a circuit board is a chemical etching process, and the etching solution after etching contains copper ions and other chemical substances with very high concentration, so that the etching solution has a certain recovery value.
The patent with publication number CN113969404B discloses an etching liquid recovery device for an integrated circuit lead frame, which comprises a recovery tank, wherein a recovery pipe is fixedly communicated with the side surface of the recovery tank near the position of the lower end, and a first partition plate, a second partition plate and a filter plate are sequentially arranged on the inner wall of the recovery tank from top to bottom.
However, the recovery device still has certain defects when in use, in the prior art, because some acidic substances such as sulfuric acid, hydrochloric acid and the like are often present in etching solution, the acidic substances are easy to volatilize, the acidic substances are easy to diffuse in the air due to volatilization, the acidic substances are adhered to the air, irreversible damage is easily caused after the acidic substances are breathed into a body by a technician, and secondly, in the prior art, copper is often obtained at a cathode, and in the case that concentration polarization exists at the cathode, the electrolysis process is more electricity-consuming due to the polarization of strong tea.
Disclosure of Invention
The invention aims to solve the defects in the prior art, and provides a recycling process of etching liquid of an integrated circuit lead frame.
In order to achieve the above purpose, the invention adopts the following technical scheme: an integrated circuit lead frame etching solution recycling process comprises the following steps:
step one: extracting the used etching solution into an electrolytic tank in a recovery device, then sealing a cover plate on the electrolytic tank, and electrifying the etching solution in the electrolytic tank to perform electrolytic work;
step two: starting an air pump, circulating air in the electrolytic tank by using the air pump, neutralizing acidic substances contained in the etching solution in the circulating process, starting a water pump, circulating water in the electrolytic tank by using the water pump, and stirring the etching solution by using water circulation;
step three: in the process of electrolysis, observing whether the reaction is carried out or not through a bulb, and heating etching solution through a resistance heating wire to accelerate volatilization of acidic substances;
the recovery device comprises an electrolytic cell and further comprises:
the cover plate is arranged at the top of the electrolytic tank in a lifting manner and is used for realizing the blocking of the electrolytic tank;
the neutralization box is fixedly connected to the top of the cover plate, and alkaline solution is added in the neutralization box in advance;
an air circulation assembly for circulating air in the electrolytic cell and passing through the neutralization tank;
the water circulation assembly is arranged on one side of the electrolytic tank and is used for realizing circulation of etching solution in the electrolytic tank;
the conductive heating assembly is used for realizing the electrolysis of the etching solution and the heating work of the etching solution;
in the electrolytic process, the electrolytic tank is sealed through the cover plate, the neutralization work of acidic substances is realized by the air circulation component through the neutralization box, the air circulation component blows air on etching liquid to cause the fluctuation of the etching liquid, the stirring of the etching liquid is realized through the water circulation component, the fluctuation of the etching liquid is further realized, the etching liquid plays a stirring role, the conducting heating component can accelerate the electrolytic reaction in the working process, and the volatilization of the acidic substances is accelerated.
Preferably, the sealing assembly is further included, the sealing assembly includes:
the rubber pad is fixedly connected to the bottom of the cover plate and is in butt joint with the top wall plate of the electrolytic tank;
the air bag is embedded in the top wall plate of the electrolytic tank and is abutted with the rubber pad;
in the electrolysis process, the air circulation assembly can conduct the heat emitted by the conductive heating assembly to the etching liquid, so that the temperature of the etching liquid is increased, then the temperature in the electrolysis bath is increased, the gas in the air bag is heated and expanded, the air bag is abutted with the rubber pad more tightly, and the sealing of the electrolysis bath is further realized.
Preferably, the air circulation assembly includes:
the air pump is fixedly connected to one side of the electrolytic tank, two air suction ends are arranged on the air pump, the telescopic pipe and the air inlet pipe are respectively communicated, and the output end of the air pump is communicated with the fixed pipe;
the gas tank is arranged at the bottom of the electrolytic tank;
a plurality of air holes, two ends of which are respectively communicated with the air tank and the internal cavity of the electrolytic tank;
the check valves are respectively arranged in the air holes;
wherein, the telescopic pipe is communicated with the neutralization box;
in the air circulation process, air is pumped from the neutralization tank through the air pump and is conveyed to the air tank, then enters the electrolytic tank through the air hole, and then returns to the neutralization tank through the electrolytic tank, so that the air circulation is realized, and in the air circulation process, the alkaline solution in the neutralization tank is utilized to neutralize the acid matters volatilized in the etching solution.
Preferably, a dispersing unit is disposed in the neutralization tank, and the dispersing unit includes:
the air outlet pipe penetrates through the top of the cover plate and the bottom wall plate of the neutralization box;
the dispersing box is fixedly connected to the bottom of the neutralization box, and a hollow groove is formed in the center of the inside of the dispersing box;
the dispersing holes are formed in the dispersing box and communicated with the hollow grooves, and a check valve is arranged at the top of each dispersing hole;
in the air circulation process, air entering the electrolytic tank enters the hollow tank through the air outlet pipe, then returns to the neutralization tank through the dispersion holes, the air flow is divided through the dispersion holes, the contact area of the air flow and alkaline solution in the neutralization tank is enlarged, and the alkaline solution is used for fully neutralizing volatile acidic substances in the electrolytic tank.
Preferably, the water circulation assembly includes:
the water pump is fixedly connected to one side of the electrolytic tank;
the two circulating water pipes are respectively communicated with the output end and the input end of the water pump, one ends of the two circulating water pipes, which are far away from the water pump, are communicated with the electrolytic tank, and an anti-blocking unit is arranged on the circulating water pipe, which is communicated with the input end of the water pump and is arranged in the electrolytic tank;
the arc-shaped guide plate is fixedly connected to the inner wall of the electrolytic tank, and a circulating water pipe communicated with the output end of the water pump is positioned at one side of the arc-shaped guide plate;
in the water circulation process, water flow pumped by the water pump can impact on the arc-shaped guide plate, the arc-shaped guide plate is utilized for guiding the water flow, so that the water flow forms vortex in the electrolytic tank, and the stirring effect is realized by utilizing the vortex formed by the water flow.
Preferably, the anti-blocking unit includes:
the filter plate is arranged in a circulating water pipe communicated with the input end of the water pump and is positioned at one end of the circulating water pipe far away from the water pump;
the brush plate is rotatably arranged in the electrolytic tank and is abutted with the filter plate;
the fan blades are rotatably arranged in the electrolytic tank and are used for providing power for the rotation of the brush plate;
in the working process of the water pump, the filter plate filters copper generated by electrolysis, and the flow of etching liquid in the electrolytic tank drives the fan blades to rotate, so that the fan blades drive the brush plate to rotate, and the brush plate realizes anti-blocking of the filter plate.
Preferably, the conductive heating assembly comprises a cathode column and an anode column respectively arranged at two ends of the electrolytic tank, and further comprises:
the bulb is electrically connected with one end of the cathode column, which is far away from the anode column;
the resistance heating wires are electrically connected with one end of the bulb, which is far away from the current detection sensor;
when electrolysis starts, the solution in the electrolytic tank is electrified, whether the electric conduction of the etching solution is switched on or not is detected by observing whether the bulb shines, the gas dissolving tank is heated by the resistance heating wire, heat is conducted to the etching solution in the electrolytic tank through the gas tank and the bottom wall plate of the electrolytic tank, and in the process of electrolysis, the etching solution is subjected to electrolytic reaction on the cathode column to obtain cathode copper.
Preferably, the resistance heating wire is arranged in the air tank, and the air circulation component conducts heat emitted by the resistance heating wire to etching liquid in the electrolytic tank through air flow in the heating process of the resistance heating wire.
Preferably, the conductive heating assembly further comprises:
the controller is fixedly connected to the electrolytic tank;
the electromagnetic switch is electrically connected with one end of the anode column far away from the cathode column;
the current detection sensor is arranged between the cathode column and the bulb, and two ends of the current detection sensor are respectively and electrically connected with the bulb and the cathode column;
in the process of electrolysis, the conductivity of the etching solution is reduced along with the reduction of copper ions in the solution, and when the conductivity of the etching solution is lower than a certain value, the controller controls the electromagnetic switch to be disconnected according to current information fed back by the current detection sensor, so that the power supply to the electrolytic tank is stopped.
Preferably, the working method of the controller in the electrolysis process specifically comprises the following steps:
the controller acquires current information fed back by the current detection sensor;
the controller judges according to the current information and generates control information according to the judgment;
the controller sends control information to the electromagnetic switch to control the electromagnetic switch to disconnect the circuit;
the control information is generated according to the following specific steps: the controller generates the control information when the current fed back by the current information is less than 0.5 ampere.
Compared with the prior art, the invention has the following beneficial effects:
1. according to the invention, through the arrangement of the neutralization tank and the air circulation assembly, the air circulation assembly pumps the air in the electrolytic tank into the neutralization tank, and then the air is blown back into the electrolytic tank through the air pump and the fixing pipe, in the process, the neutralization work of acidic substances is realized by utilizing the alkaline solution in the neutralization tank, so that the neutralization reaction of the volatile acidic substances in the solution, such as sulfuric acid, hydrochloric acid and other acidic substances, is carried out, and the harm of the acidic substances to technicians and the pollution to the environment are reduced.
2. According to the invention, through the arrangement of the water circulation assembly and the air circulation assembly, the etching solution is effectively stirred in the electrolysis process, concentration polarization on the cathode can be restrained by stirring the etching solution, so that electricity is saved in the electrolysis process, and secondly, the power supply to the etching solution can be timely disconnected through the arrangement of the current detection sensor and the electromagnetic switch, so that electricity is saved in the electrolysis process, and the situation of wasting electricity caused by too few ions in the etching solution is avoided.
3. According to the invention, through the arrangement of the conductive heating component, the conductive heating component can effectively electrify the etching liquid in the electrolytic tank in the working process, and can effectively heat the etching liquid, so that the movement and diffusion speed of molecules and ions are faster when the temperature is higher, the electrolytic reaction can be accelerated through the conductive heating component, and the volatilization speed of acidic substances is faster when the temperature is higher than that when the temperature is lower, and the aim of accelerating the volatilization of the acidic substances can be achieved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the installation structure of the water pump of the present invention;
FIG. 3 is a schematic cross-sectional view of the air pump of the present invention;
FIG. 4 is an enlarged schematic view of the structure of the portion A shown in FIG. 3 according to the present invention;
FIG. 5 is an enlarged schematic view of the structure of the portion B shown in FIG. 3 according to the present invention;
FIG. 6 is a schematic cross-sectional view of the structure of the electrolytic cell of the invention;
FIG. 7 is an enlarged schematic view of the structure of the portion C shown in FIG. 6 according to the present invention;
FIG. 8 is a schematic diagram of the connection structure of the resistance heating wire and the pole plate of the present invention;
FIG. 9 is a schematic cross-sectional view of the circulating water pipe of the present invention;
FIG. 10 is a circuit diagram of the connection of the electrolytic cell of the present invention;
FIG. 11 is a control flow chart of the controller of the present invention.
In the figure: 1. an electrolytic cell; 2. a cover plate; 3. a neutralization tank; 4. an electric telescopic rod; 5. an air pump; 6. a controller; 7. a bulb; 8. a cathode column; 9. an anode column; 10. a water pump; 11. a circulating water pipe; 12. a fixed tube; 13. a current detection sensor; 14. a telescopic tube; 15. an air inlet pipe; 16. an air tank; 17. a resistance heating wire; 18. a one-way valve; 19. a dispersion box; 20. an air outlet pipe; 21. a hollow groove; 22. dispersing holes; 23. a non-return valve; 24. a rubber pad; 25. an air bag; 26. a fan blade; 27. a filter plate; 28. a mounting frame; 29. brushing a plate; 30. a polar plate; 31. air holes; 32. an arc-shaped guide plate; 33. an electromagnetic switch.
Detailed Description
The following description is presented to enable one of ordinary skill in the art to make and use the invention. The preferred embodiments in the following description are by way of example only and other obvious variations will occur to those skilled in the art.
An integrated circuit lead frame etching solution recycling process as shown in fig. 1 to 11, the process comprising the steps of:
step one: extracting the used etching solution into an electrolytic tank 1 in a recovery device, then sealing a cover plate 2 on the electrolytic tank 1, and electrifying the etching solution in the electrolytic tank 1 to perform electrolytic work;
step two: the air pump 5 is started, the air in the electrolytic tank 1 is circulated by the air pump 5, acidic substances contained in etching solution are neutralized in the circulation process, the water pump 10 is started, the water in the electrolytic tank 1 is circulated by the water pump 10, and the etching solution is stirred by water circulation;
step three: in the process of electrolysis, whether the reaction is carried out or not is observed through the bulb 7, and the etching solution is heated through the resistance heating wire 17, so that the volatilization of acidic substances is accelerated;
in the prior art, in order to obtain copper with high purity, for example, a sulfuric acid-copper sulfate electrolyte is used as an anode (also called anode copper) containing more than 99.8% obtained by fire refining, a pure copper sheet is used as a cathode, and electrolysis is performed in a sulfuric acid-copper sulfate solution to obtain a reaction product, namely copper (also called "cathode copper" or "electric copper") containing more than 99.96% of copper at the cathode. This technique is prior art and is not disclosed in any great detail herein.
The recovery device comprises an electrolytic cell 1, and further comprises:
the cover plate 2 is arranged at the top of the electrolytic tank 1 in a lifting manner and is used for blocking the electrolytic tank 1;
the neutralization box 3 is fixedly connected to the top of the cover plate 2, and alkaline solution is added in the neutralization box in advance;
an air circulation assembly for circulating air in the electrolytic cell 1 and passing through the neutralization tank 3;
the water circulation assembly is arranged on one side of the electrolytic tank 1 and is used for realizing circulation of etching solution in the electrolytic tank 1;
the conductive heating assembly is used for realizing the electrolysis of the etching solution and the heating work of the etching solution;
in the electrolytic process, the electrolytic tank 1 is sealed through the cover plate 2, the neutralization tank 3 is utilized by the air circulation component to realize the neutralization work of acidic substances, the air circulation component blows air on etching liquid to cause the fluctuation of the etching liquid, the stirring of the etching liquid is realized through the water circulation component, the fluctuation of the etching liquid is further realized, the etching liquid further plays a role in stirring, the conducting heating component can accelerate the electrolytic reaction in the working process, and the volatilization of the acidic substances is accelerated.
In concrete implementation, in the electrolytic process, the electrolytic tank 1 is sealed through the cover plate 2, the electrolytic tank 1 can be effectively sealed through the arrangement of the cover plate 2, air pollution caused by volatilization of acidic substances in etching solution is avoided, and secondly, damage to technicians in electrolytic work can be reduced in a sealing mode, so that the technicians are prevented from being fully filled with the acidic substances in air due to volatilization of the acidic substances, corrosion of the acidic substances is further caused, and physical damage of the technicians due to long-term acidic environment is avoided.
The air circulation component extracts the gas in the electrolytic tank 1 into the neutralization tank 3, and then blows the gas back into the electrolytic tank 1 through the air pump 5 and the fixed pipe 12, and in the process, the alkaline solution in the neutralization tank 3 is utilized to realize the neutralization work of acidic substances, so that the acidic substances which are easy to volatilize in the solution, such as sulfuric acid, hydrochloric acid and other acidic substances, are subjected to neutralization reaction, and the harm of the acidic substances to technicians and the pollution to the environment are further reduced.
The air circulation assembly blows air on the etching solution to cause the fluctuation of the etching solution, plays a role similar to stirring on the etching solution, can accelerate the electrolysis rate through stirring on the etching solution, can also enable metal ions in the etching solution to rapidly reach the surface of the cathode through stirring, accelerates the reaction, and secondly, can also inhibit the condition of concentration polarization on the cathode through stirring the etching solution, so that the electrolysis process is more power-saving. Concentration polarization is common knowledge of those skilled in the art, and this can be effectively inhibited by stirring, and is not disclosed here too much.
Through the stirring of hydrologic cycle subassembly realization to the etching solution, further realize the fluctuation of etching solution, and then the etching solution plays the effect of stirring, on the one hand can promote the stirring of etching solution, promotes the going on of reaction jointly with the hydrologic cycle subassembly for electrolytic reaction goes on more rapidly, on the other hand also can utilize hydrologic cycle subassembly and the stirring of hydrologic cycle subassembly to the solution, makes the acid material in the solution volatilize faster, also can carry out effectual neutralization to the acid material through neutralization case 3.
In the process of working, the conductive heating assembly can carry out effective electrifying work on the etching liquid in the electrolytic tank 1, on the other hand, can also carry out effective heating work on the etching liquid, the movement and diffusion speed of molecules and ions are faster when the temperature is higher, so that the electrolytic reaction can be accelerated through the conductive heating assembly, and the volatilization speed of acidic substances is faster when the temperature is higher than that when the temperature is lower, so that the aim of accelerating the volatilization of the acidic substances can be achieved. Therefore, the reaction rate can be further accelerated by the conductive heating component, and the volatilization of acidic substances in the etching solution can be further accelerated.
As an alternative embodiment, as shown in fig. 1 and fig. 2, electric telescopic rods 4 are fixedly connected to the centers of two ends of the top of the cover plate 2, the telescopic ends of the electric telescopic rods 4 are fixedly connected to the cover plate 2, and the fixed ends of the electric telescopic rods 4 can be suspended in an electrolysis shop or fixedly connected to the upper side of the cover plate 2 by adding a bracket.
As a further embodiment of the present invention, there is also included a seal assembly comprising:
the rubber pad 24 is fixedly connected to the bottom of the cover plate 2, and the rubber pad 24 is abutted against the top wall plate of the electrolytic tank 1;
the air bag 25 is embedded in the top wall plate of the electrolytic tank 1, and the air bag 25 is abutted with the rubber pad 24;
in the electrolysis process, the air circulation assembly can conduct heat emitted by the conductive heating assembly to etching liquid, so that the temperature of the etching liquid is increased, then the temperature in the electrolysis tank 1 is increased, gas in the air bag 25 is heated and expanded, the abutting connection between the air bag 25 and the rubber pad 24 is tighter, and the sealing of the electrolysis tank 1 is further realized.
In specific implementation, when apron 2 and electrolysis trough 1 butt, through the butt of gasbag 25 and rubber pad 24 for electrolysis trough 1 obtains effectual sealedly, and at the in-process of conductive heating subassembly work, the temperature of the interior etching solution of electrolysis trough 1 and electrolysis trough 1 all can rise, and then makes the gasbag 25 temperature also rise, utilizes the nature of gaseous expend with heat and contract with cold, makes the gasbag 25 inflation, and then makes the butt of gasbag 25 and rubber pad 24 inseparabler, further improves the sealing between apron 2 and the electrolysis trough 1, and then reaches the degree of difficulty that improves the acid substance and volatilize.
As a further embodiment of the present invention, an air circulation assembly includes:
the air pump 5 is fixedly connected to one side of the electrolytic tank 1, the air pump 5 is provided with two air suction ends, the two air suction ends are respectively communicated with the telescopic pipe 14 and the air inlet pipe 15, and the output end of the air pump 5 is communicated with the fixed pipe 12;
the gas tank 16 is arranged at the bottom of the electrolytic tank 1;
a plurality of air holes 31, both ends of which are respectively communicated with the air tank 16 and the inner chamber of the electrolytic tank 1;
a plurality of check valves 18 respectively provided in the plurality of air holes 31;
wherein the telescopic pipe 14 is communicated with the neutralization tank 3;
in the air circulation process, air is pumped from the neutralization tank 3 through the air pump 5 and conveyed into the air tank 16, then enters the electrolytic tank 1 through the air hole 31, and then returns to the neutralization tank 3 through the electrolytic tank 1, so that the air circulation is realized, and in the air circulation process, the alkaline solution in the neutralization tank 3 is used for neutralizing the acid substances volatilized in the etching solution.
In specific implementation, the air pump 5 draws air from the neutralization tank 3 to form negative pressure in the neutralization tank 3, the negative pressure in the neutralization tank 3 is utilized to draw air from the electrolytic tank 1, then the air is conducted through the air pump 5 to enable the gas to return to the electrolytic tank 1, so that air circulation is achieved, in the air circulation process, partial acidic substances can be carried by the gas circulation, the acidic substances are brought into the neutralization tank 3, the acidic substances react with alkaline solution in the neutralization tank 3, the acidic substances are effectively eliminated, volatilization of the acidic substances is restrained through the sealing component, and then the acidic substances are neutralized through the alkaline solution in the neutralization tank 3, so that the acidic substances are more thoroughly purified by neutralization.
As a further embodiment of the present invention, a dispersing unit is provided in the neutralization tank 3, the dispersing unit including:
the air outlet pipe 20 penetrates through the top of the cover plate 2 and the bottom wall plate of the neutralization box 3;
the dispersing box 19 is fixedly connected to the bottom of the neutralization box 3, and a hollow groove 21 is formed in the center of the inside of the dispersing box 19;
a plurality of dispersion holes 22 which are formed in the dispersion box 19, wherein the dispersion holes 22 are communicated with the hollow groove 21, and a check valve 23 is arranged at the top of the dispersion holes 22;
in the air circulation process, air entering the electrolytic tank 1 enters the hollow tank 21 through the air outlet pipe 20, then returns to the neutralization tank 3 through the dispersion holes 22, the air flow is divided through the dispersion holes 22, the contact area of the air flow and alkaline solution in the neutralization tank 3 is enlarged, and the alkaline solution sufficiently neutralizes the volatilized acidic substances in the electrolytic tank 1.
As an alternative embodiment, as shown in fig. 3, one end of the air outlet pipe 20 penetrating the cover plate 2 is provided with a one-way air valve, and the one-way air valve can only enable air in the electrolytic tank 1 to enter the air outlet pipe 20, so that the air outlet pipe and the one-way air valve 23 can jointly prevent alkaline solution from entering the electrolytic tank 1.
In the specific implementation, in the working process of the air circulation assembly, the air flow is divided by the dispersing holes 22, so that the gas is fully contacted with the alkaline solution, and the neutralization efficiency of acidic substances in the gas is improved.
As a further embodiment of the present invention, a water circulation assembly includes:
the water pump 10 is fixedly connected to one side of the electrolytic tank 1; the water pump 10 is located on the side of the cell 1 remote from the air pump 5.
The two circulating water pipes 11 are respectively communicated with the output end and the input end of the water pump 10, one ends of the two circulating water pipes 11 far away from the water pump 10 are communicated with the electrolytic tank 1, and an anti-blocking unit is arranged on the circulating water pipe 11 communicated with the input end of the water pump 10 and is arranged in the electrolytic tank 1;
the arc-shaped guide plate 32 is fixedly connected to the inner wall of the electrolytic tank 1, and the circulating water pipe 11 communicated with the output end of the water pump 10 is positioned at one side of the arc-shaped guide plate 32;
in the water circulation process, water flow pumped by the water pump 10 can impact on the arc-shaped guide plate 32, the arc-shaped guide plate 32 is utilized for guiding the water flow, so that the water flow forms a vortex in the electrolytic tank 1, and the stirring effect is realized by utilizing the vortex formed by the water flow.
In the concrete implementation, the water pump 10 circulates the etching solution in the electrolytic tank 1, the etching solution output by the water pump 10 can impact on the arc-shaped guide plate 32, the solution forms vortex in the electrolytic tank 1 by utilizing the guidance of the arc-shaped guide plate 32, the purpose of stirring is achieved by utilizing the vortex, the air circulation component blows gas onto the etching solution in the electrolytic tank 1 from bottom to top, the stirring effect of the etching solution can be further promoted, the stirring effect of the etching solution is further realized by utilizing the forces in two different directions, and the interaction of the two can jointly promote the volatilization of acidic substances in the etching solution.
As a further embodiment of the present invention, the blocking prevention unit includes:
a filter plate 27, the filter plate 27 is arranged in the circulating water pipe 11 communicated with the input end of the water pump 10, and the filter plate 27 is positioned at one end of the circulating water pipe 11 far away from the water pump 10;
a brush plate 29 rotatably installed in the electrolytic tank 1, and the brush plate 29 abuts against the filter plate 27;
fan blades 26 rotatably installed in the electrolytic bath 1 for powering the rotation of the brush plate 29;
in the working process of the water pump 10, the filter plate 27 filters copper generated by electrolysis, and the flow of etching liquid in the electrolytic tank 1 drives the fan blades 26 to rotate, the fan blades 26 further drive the brush plate 29 to rotate, and the brush plate 29 realizes anti-blocking of the filter plate 27.
As an alternative embodiment, as shown in fig. 7, the fan blade 26 is fixedly connected to one end of the rotating shaft, the brush plate 29 is fixedly connected to the other end of the rotating shaft, the middle section of the rotating shaft is sleeved with the mounting frame 28, and the mounting frame 28 is fixedly connected to the inner wall of the electrolytic tank 1, so that the fan blade 26 and the brush plate 29 are mounted.
In specific implementation, in the process of the operation of the water pump 10, the filter plate 27 filters copper generated by electrolysis, the operation of the water pump 10 drives etching liquid to flow, the flow of the etching liquid in the electrolytic tank 1 drives the fan blades 26 to rotate, the fan blades 26 further drive the brush plate 29 to rotate through the rotating shaft, the brush plate 29 realizes the anti-blocking of the filter plate 27, the brush plate 29 is driven to clean the filter plate 27 by the impact of water flow, the filter plate 27 filters the generated copper by electrolysis, the brush plate 29 can clean the filter plate 27, and copper attached to the filter plate 27 is brushed down. Air blown out of the air circulation assembly also blows against the fan blades 26, which can further promote rotation of the fan blades 26.
As a further embodiment of the present invention, the conductive heating assembly includes cathode and anode posts 9 provided at both ends of the electrolytic cell 1, respectively, and further includes:
the bulb 7 is electrically connected with one end of the cathode column 8, which is far away from the anode column 9;
a plurality of resistance heating wires 17 electrically connected with one end of the bulb 7 far away from the current detection sensor 13;
at the beginning of electrolysis, the solution in the electrolytic tank 1 is electrified, whether the conduction of the etching solution is conducted or not is detected by observing whether the bulb 7 is lightened, the gas dissolving tank 16 is heated by the resistance heating wire 17, heat is conducted to the etching solution in the electrolytic tank 1 through the gas tank 16 and the bottom wall plate of the electrolytic tank 1, and in the process of electrolysis, the etching solution is subjected to electrolytic reaction on the cathode column 8 to obtain cathode copper.
As an alternative embodiment, copper sheets (not shown) are electrically connected to both the anode and cathode columns 9 and 8 to generate electrical copper, which is a prior art technology and is not disclosed herein.
As an alternative embodiment, as shown in fig. 10, the connection mode of the cathode column 8, the anode column 9, the current detection sensor 13, the bulb 7 and the resistance heating wire 17 is series connection, while the electromagnetic switch 33 is disposed at one end of the anode column 9 away from the cathode column 8, one end of the resistance heating wire 17 away from the bulb 7 and one end of the electromagnetic switch 33 away from the anode column 9 are respectively electrically connected with the negative pole and the positive pole of the power supply, and the power supply is an external power supply, which is the prior art and not disclosed herein too much.
In particular implementation, in order to ensure that the reaction is performed, whether the circuit is switched on or not is judged by whether the bulb 7 emits light, after the circuit is switched on, the electrolytic reaction can be effectively performed, the electric current in the circuit can be limited by the arrangement of the resistance heating wire 17, the excessively rapid temperature rise of the etching solution caused by the excessively large electric current is avoided, the pressure increase in the electrolytic tank 1 is further caused, the electrolytic tank 1 is damaged or exploded due to the excessively large internal pressure, and secondly, the solution in the electrolytic tank 1 can be heated by the resistance heating wire 17, and the heat conduction exists in the heating process, so that the process is mild, and the reaction is accelerated by the mild heating.
As a further embodiment of the invention, the resistance heating wire 17 is arranged in the air tank 16, and the air circulation assembly conducts heat emitted by the resistance heating wire 17 to the etching liquid in the electrolytic tank 1 through the air flow during heating of the resistance heating wire 17.
As an alternative embodiment, the resistance heating wires 17 are provided in plurality, two ends of the resistance heating wires 17 are fixedly connected with the polar plates 30, and one ends of the two polar plates 30 away from the resistance heating wires 17 are respectively and electrically connected with the negative electrode of the power supply and the bulb 7.
In practice, after the resistance heating wire 17 is energized, its temperature increases, which in turn increases the temperature inside the air tank 16, and the gas after the temperature increase is then fed into the electrolytic tank 1 by means of an air circulation assembly.
As a further embodiment of the present invention, the conductive heating assembly further comprises:
the controller 6 is fixedly connected to the electrolytic tank 1;
an electromagnetic switch 33 electrically connected to one end of the anode column 9 away from the cathode column 8;
the current detection sensor 13 is arranged between the cathode column 8 and the bulb 7, and two ends of the current detection sensor 13 are respectively and electrically connected with the bulb 7 and the cathode column 8;
during electrolysis, the conductivity of the etching solution decreases with the decrease of copper ions in the solution, and when the conductivity of the etching solution is lower than a certain value, the controller 6 controls the electromagnetic switch 33 to be turned off according to the current information fed back by the current detection sensor 13, and stops the power supply to the electrolytic cell 1.
It should be noted that, as shown in fig. 10, the electrical connection between the anode column 9 and the cathode column 8 is achieved by a conductive wire, and the technology is the prior art, and is not disclosed herein too much.
As a further embodiment of the present invention, the working method of the controller 6 in the electrolysis process is specifically:
the controller 6 acquires current information fed back by the current detection sensor 13;
the controller 6 makes a judgment according to the current information and generates control information according to the judgment;
the controller 6 sends control information to the electromagnetic switch 33 to control the electromagnetic switch 33 to open the circuit;
the control information is generated according to the following specific steps: when the current fed back by the current information is less than 0.5 ampere, the controller 6 generates control information.
In the specific implementation, when the current detected by the current detection sensor 13 is small, it is indicated that the metal ions in the etching solution are small and effective conduction cannot be performed, so that the reaction is close to the tail sound, and the electromagnetic switch 33 is turned off to reduce the consumption of electric quantity in turn, so that the device is promoted to save electricity together with the stirring of the solution.
The working principle of the invention is as follows:
when the invention is used, the etching liquid is added into the electrolytic tank 1, then the cover plate 2 is utilized to realize the cover sealing of the electrolytic tank 1, the air pump 5 and the water pump 10 are started, the air circulation and the water circulation in the electrolytic tank 1 are realized, the stirring of the etching liquid is realized by utilizing the water circulation, the purification of acidic substances in the etching liquid is realized by utilizing the air circulation, in the process, the stirring can accelerate the volatilization of the acidic substances, and more acidic molecules can be carried in the process of the air circulation, so the purification of the acidic substances is realized by the neutralization tank 3.
The stirring of the etching solution by the water circulation assembly can also effectively inhibit concentration polarization on the cathode, so that electricity is saved in the electrolysis process, and the current detection sensor 13 and the electromagnetic switch 33 can also save electricity in the electrolysis process, thereby avoiding electricity waste caused by too few ions in the etching solution.
Through the setting of resistance heating wire 17, can utilize the temperature to promote the volatilization of acid material in the etching solution on the one hand, promote the purification of neutralization case 3 to acid material, on the other hand also can accelerate the velocity of movement of ion, improve the speed of electrolytic reaction, secondly, can also promote the inflation of gasbag 25 for the seal of electrolysis trough 1 is more thorough.
Through the setting of air cycle subassembly, on the one hand can promote the neutralization of sour material, on the other hand also can play the effect of stirring to the etching solution, secondly, can also promote the clean work of flabellum 26 to filter plate 27, avoid filter plate 27 to be plugged, air cycle's in-process can also conduct the heat that resistance heating wire 17 sent to the etching solution.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present invention, and various changes and modifications may be made therein without departing from the spirit and scope of the invention, which is defined by the appended claims.

Claims (10)

1. The integrated circuit lead frame etching liquid recycling process is characterized by comprising the following steps of:
step one: extracting the used etching solution into an electrolytic tank (1) in a recovery device, then sealing a cover plate (2) on the electrolytic tank (1), and electrifying the etching solution in the electrolytic tank (1) to perform electrolytic work;
step two: starting an air pump (5), circulating air in the electrolytic tank (1) by using the air pump (5), neutralizing acidic substances contained in etching solution in the circulating process, starting a water pump (10), circulating water in the electrolytic tank (1) by using the water pump (10), and stirring the etching solution by using water circulation;
step three: in the electrolysis process, a bulb (7) is used for observing whether the reaction is carried out, and a resistance heating wire (17) is used for heating the etching solution to accelerate the volatilization of acidic substances;
the recovery device comprises an electrolytic cell (1), and further comprises:
the cover plate (2) is arranged at the top of the electrolytic tank (1) in a lifting manner and is used for blocking the electrolytic tank (1);
the neutralization box (3) is fixedly connected to the top of the cover plate (2), and alkaline solution is added in the neutralization box in advance;
an air circulation assembly for circulating air in the electrolytic tank (1) and flowing the air through the neutralization tank (3);
the water circulation assembly is arranged at one side of the electrolytic tank (1) and is used for realizing the circulation of etching solution in the electrolytic tank (1);
the conductive heating assembly is used for realizing the electrolysis of the etching solution and the heating work of the etching solution;
in the electrolytic process, the electrolytic tank (1) is sealed through the cover plate (2), the neutralization of acidic substances is realized by the air circulation component through the neutralization box (3), the air circulation component blows air on the etching liquid to cause the fluctuation of the etching liquid, the stirring of the etching liquid is realized through the water circulation component, the fluctuation of the etching liquid is further realized, the etching liquid further plays a stirring role, the conducting heating component can accelerate the electrolytic reaction in the working process, and the volatilization of the acidic substances is accelerated.
2. The integrated circuit lead frame etching solution recycling process according to claim 1, wherein the process comprises the following steps: also included is a seal assembly, the seal assembly comprising:
the rubber pad (24) is fixedly connected to the bottom of the cover plate (2), and the rubber pad (24) is abutted with the top wall plate of the electrolytic tank (1);
the air bag (25) is embedded in the top wall plate of the electrolytic tank (1), and the air bag (25) is abutted with the rubber pad (24);
in the electrolysis process, the air circulation assembly can conduct heat emitted by the conductive heating assembly to etching liquid, so that the temperature of the etching liquid is increased, then the temperature in the electrolytic tank (1) is increased, gas in the air bag (25) is heated and expanded, the abutting connection between the air bag (25) and the rubber pad (24) is tighter, and the sealing of the electrolytic tank (1) is further realized.
3. The integrated circuit lead frame etching solution recycling process according to claim 1, wherein the process comprises the following steps: the air circulation assembly includes:
the air pump (5) is fixedly connected to one side of the electrolytic tank (1), the air pump (5) is provided with two air suction ends, the two air suction ends are respectively communicated with the telescopic pipe (14) and the air inlet pipe (15), and the output end of the air pump (5) is communicated with the fixed pipe (12);
the gas tank (16) is arranged at the bottom of the electrolytic tank (1);
a plurality of air holes (31) both ends of which are respectively communicated with the air tank (16) and the internal chamber of the electrolytic tank (1);
a plurality of check valves (18) respectively arranged in a plurality of air holes (31);
wherein the telescopic pipe (14) is communicated with the neutralization box (3);
in the air circulation process, air is pumped from the neutralization tank (3) through the air pump (5) and conveyed into the air tank (16), then enters the electrolytic tank (1) through the air hole (31), and then returns to the neutralization tank (3) through the electrolytic tank (1), so that air circulation is realized, and in the air circulation process, the alkaline solution in the neutralization tank (3) is utilized to neutralize the acid matters volatilized in the etching solution.
4. The integrated circuit lead frame etching solution recycling process according to claim 3, wherein: a dispersing unit is arranged in the neutralization box (3), and the dispersing unit comprises:
the air outlet pipe (20), the air outlet pipe (20) penetrates through the top of the cover plate (2) and the bottom wall plate of the neutralization box (3);
the dispersing box (19) is fixedly connected to the bottom of the neutralization box (3), and a hollow groove (21) is formed in the center of the inside of the dispersing box (19);
a plurality of dispersing holes (22) which are formed on the dispersing box (19) and the dispersing holes (22) are communicated with the hollow groove (21), and a check valve (23) is arranged at the top of the dispersing holes (22);
in the air circulation process, air entering the electrolytic tank (1) enters the hollow tank (21) through the air outlet pipe (20), then returns to the neutralization tank (3) through the dispersion holes (22), the air flow is divided through the dispersion holes (22), the contact area of the air flow and alkaline solution in the neutralization tank (3) is enlarged, and the alkaline solution sufficiently neutralizes volatile acidic substances in the electrolytic tank (1).
5. The integrated circuit lead frame etching solution recycling process according to claim 1, wherein the process comprises the following steps: the water circulation assembly includes:
the water pump (10) is fixedly connected to one side of the electrolytic tank (1);
the two circulating water pipes (11) are respectively communicated with the output end and the input end of the water pump (10), one ends of the two circulating water pipes (11) far away from the water pump (10) are both communicated with the electrolytic tank (1), and an anti-blocking unit is arranged on the circulating water pipe (11) communicated with the input end of the water pump (10) and is arranged in the electrolytic tank (1);
the arc-shaped guide plate (32) is fixedly connected to the inner wall of the electrolytic tank (1), and the circulating water pipe (11) communicated with the output end of the water pump (10) is positioned at one side of the arc-shaped guide plate (32);
in the water circulation process, water flow pumped by the water pump (10) can impact on the arc-shaped guide plate (32), the arc-shaped guide plate (32) is utilized for guiding the water flow, so that the water flow forms a vortex in the electrolytic tank (1), and the stirring effect is realized by utilizing the vortex formed by the water flow.
6. The integrated circuit lead frame etching solution recycling process according to claim 5, wherein the process comprises the following steps: the anti-blocking unit includes:
the filter plate (27) is arranged in the circulating water pipe (11) communicated with the input end of the water pump (10), and the filter plate (27) is positioned at one end of the circulating water pipe (11) far away from the water pump (10);
a brush plate (29) rotatably installed in the electrolytic tank (1), and the brush plate (29) is abutted against the filter plate (27);
the fan blades (26) are rotatably arranged in the electrolytic tank (1) and are used for providing power for the rotation of the brush plate (29);
in the working process of the water pump (10), the filter plate (27) filters copper generated by electrolysis, and the flow of etching liquid in the electrolytic tank (1) drives the fan blades (26) to rotate, the fan blades (26) further drive the brush plate (29) to rotate, and the brush plate (29) realizes anti-blocking of the filter plate (27).
7. The integrated circuit lead frame etching solution recycling process according to claim 1, wherein the process comprises the following steps: the conductive heating component comprises a cathode column and an anode column (9), wherein the cathode column and the anode column (8) are respectively arranged at two ends of the electrolytic tank (1), and the conductive heating component further comprises:
the bulb (7) is electrically connected with one end of the cathode column (8) far away from the anode column (9);
a plurality of resistance heating wires (17) which are electrically connected with one end of the bulb (7) far away from the current detection sensor (13);
when electrolysis starts, the solution in the electrolytic tank (1) is electrified, whether the conduction of the etching solution is switched on or not is detected by observing whether the bulb (7) is lightened, the gas dissolving tank (16) is heated by the resistance heating wire (17), heat is conducted to the etching solution in the electrolytic tank (1) through the gas dissolving tank (16) and the bottom wall plate of the electrolytic tank (1), and in the process of electrolysis, the etching solution is subjected to electrolytic reaction on the cathode column (8) to obtain cathode copper.
8. The integrated circuit lead frame etching solution recycling process according to claim 7, wherein: the resistance heating wire (17) is arranged in the air groove (16), and the air circulation component conducts heat emitted by the resistance heating wire (17) to etching liquid in the electrolytic tank (1) through air flow in the heating process of the resistance heating wire (17).
9. The integrated circuit lead frame etching solution recycling process according to claim 7, wherein: the conductive heating assembly further comprises:
the controller (6) is fixedly connected to the electrolytic tank (1);
the electromagnetic switch (33) is electrically connected with one end of the anode column (9) far away from the cathode column (8);
the current detection sensor (13) is arranged between the cathode column (8) and the bulb (7), and two ends of the current detection sensor (13) are respectively and electrically connected with the bulb (7) and the cathode column (8);
during electrolysis, the conductivity of the etching solution is reduced along with the reduction of copper ions in the solution, and when the conductivity of the etching solution is lower than a certain value, the controller (6) controls the electromagnetic switch (33) to be disconnected according to current information fed back by the current detection sensor (13) so as to stop supplying power to the electrolytic tank (1).
10. The integrated circuit lead frame etching solution recycling process according to claim 9, wherein: the working method of the controller (6) in the electrolysis process specifically comprises the following steps:
the controller (6) acquires current information fed back by the current detection sensor (13);
the controller (6) judges according to the current information and generates control information according to the judgment;
the controller (6) sends control information to the electromagnetic switch (33) to control the electromagnetic switch (33) to open the circuit;
the control information is generated according to the following specific steps: when the current fed back by the current information is less than 0.5 ampere, the controller (6) generates control information.
CN202311413484.8A 2023-10-30 Recycling process of etching solution of integrated circuit lead frame Active CN117448826B (en)

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CN202311413484.8A CN117448826B (en) 2023-10-30 Recycling process of etching solution of integrated circuit lead frame

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Application Number Priority Date Filing Date Title
CN202311413484.8A CN117448826B (en) 2023-10-30 Recycling process of etching solution of integrated circuit lead frame

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Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002327288A (en) * 2001-04-27 2002-11-15 Nittetsu Mining Co Ltd Method for collecting hydrochloric acid and copper from copper chloride solution
DE10300597A1 (en) * 2003-01-10 2004-07-22 Eilenburger Elektrolyse- Und Umwelttechnik Gmbh Process for regeneration of acid chloride etching solutions containing copper and/or iron chloride as oxidizing agents involves cathodic separation of dissolved copper from catholyte solution with pumping of anolyte through two-part cell
CN103290415A (en) * 2013-06-09 2013-09-11 赣州聚环科技有限公司 Treatment process and system of acid etching solution
CN208087748U (en) * 2018-02-02 2018-11-13 何世武 Two-component acidity etching liquid recycling device
CN108866572A (en) * 2018-08-27 2018-11-23 苏碧云 A kind of iron displacement copper electrolysis cells
CN108950564A (en) * 2018-08-27 2018-12-07 安徽绿洲危险废物综合利用有限公司 A kind of alkali etching electrolysis cycle regenerative system and electrolysis cycle regeneration method
CN210765518U (en) * 2019-09-10 2020-06-16 长沙利洁环保科技有限公司 Acid etching solution cyclic regeneration system
CN113964064A (en) * 2021-10-25 2022-01-21 天水华洋电子科技股份有限公司 Etching equipment for producing integrated circuit lead frame
CN113969404A (en) * 2021-10-25 2022-01-25 天水华洋电子科技股份有限公司 Integrated circuit lead frame etching solution recovery unit
CN114050117A (en) * 2021-11-17 2022-02-15 天水华洋电子科技股份有限公司 Semi-etching equipment for lead frame of integrated circuit
CN218568782U (en) * 2022-09-05 2023-03-03 崇辉半导体(深圳)有限公司 Integrated circuit lead frame etching solution recovery plant
CN219032380U (en) * 2022-12-14 2023-05-16 苏州统硕科技有限公司 Acid etching solution recovery system

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002327288A (en) * 2001-04-27 2002-11-15 Nittetsu Mining Co Ltd Method for collecting hydrochloric acid and copper from copper chloride solution
DE10300597A1 (en) * 2003-01-10 2004-07-22 Eilenburger Elektrolyse- Und Umwelttechnik Gmbh Process for regeneration of acid chloride etching solutions containing copper and/or iron chloride as oxidizing agents involves cathodic separation of dissolved copper from catholyte solution with pumping of anolyte through two-part cell
CN103290415A (en) * 2013-06-09 2013-09-11 赣州聚环科技有限公司 Treatment process and system of acid etching solution
CN208087748U (en) * 2018-02-02 2018-11-13 何世武 Two-component acidity etching liquid recycling device
CN108866572A (en) * 2018-08-27 2018-11-23 苏碧云 A kind of iron displacement copper electrolysis cells
CN108950564A (en) * 2018-08-27 2018-12-07 安徽绿洲危险废物综合利用有限公司 A kind of alkali etching electrolysis cycle regenerative system and electrolysis cycle regeneration method
CN210765518U (en) * 2019-09-10 2020-06-16 长沙利洁环保科技有限公司 Acid etching solution cyclic regeneration system
CN113964064A (en) * 2021-10-25 2022-01-21 天水华洋电子科技股份有限公司 Etching equipment for producing integrated circuit lead frame
CN113969404A (en) * 2021-10-25 2022-01-25 天水华洋电子科技股份有限公司 Integrated circuit lead frame etching solution recovery unit
CN114050117A (en) * 2021-11-17 2022-02-15 天水华洋电子科技股份有限公司 Semi-etching equipment for lead frame of integrated circuit
CN218568782U (en) * 2022-09-05 2023-03-03 崇辉半导体(深圳)有限公司 Integrated circuit lead frame etching solution recovery plant
CN219032380U (en) * 2022-12-14 2023-05-16 苏州统硕科技有限公司 Acid etching solution recovery system

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