CN117446692A - Auxiliary installation device for process cavity - Google Patents
Auxiliary installation device for process cavity Download PDFInfo
- Publication number
- CN117446692A CN117446692A CN202311556679.8A CN202311556679A CN117446692A CN 117446692 A CN117446692 A CN 117446692A CN 202311556679 A CN202311556679 A CN 202311556679A CN 117446692 A CN117446692 A CN 117446692A
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- China
- Prior art keywords
- process chamber
- lifting
- frame
- auxiliary installation
- process cavity
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- 238000000034 method Methods 0.000 title claims abstract description 96
- 230000008569 process Effects 0.000 title claims abstract description 87
- 238000009434 installation Methods 0.000 title claims abstract description 45
- 238000001514 detection method Methods 0.000 claims abstract description 20
- 238000006073 displacement reaction Methods 0.000 claims abstract description 6
- 230000005540 biological transmission Effects 0.000 claims description 23
- 230000007246 mechanism Effects 0.000 claims description 15
- 238000005096 rolling process Methods 0.000 claims description 8
- 208000027418 Wounds and injury Diseases 0.000 abstract description 6
- 230000006378 damage Effects 0.000 abstract description 6
- 208000014674 injury Diseases 0.000 abstract description 6
- 230000009977 dual effect Effects 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000011900 installation process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
- B66F7/065—Scissor linkages, i.e. X-configuration
- B66F7/0666—Multiple scissor linkages vertically arranged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geology (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Machine Tool Units (AREA)
Abstract
The invention provides an auxiliary mounting device for a process cavity, which comprises a movable device frame, wherein the device frame is provided with a lifting device, a leveling device and an in-place detection frame, the lifting end of the lifting device is connected with a lifting table of the process cavity, and two ends of the in-place detection frame are respectively provided with an in-place sensor. One side of the process cavity lifting table is connected with a sensor mounting seat, and displacement sensors are respectively mounted on two sides of the sensor mounting seat. According to the invention, the lifting device, the leveling device and the in-place detection frame are arranged, in-place detection, lifting adjustment and horizontal adjustment are carried out on the double-process cavity, so that the leveling and installation of the whole double-process cavity can be completed by a single person, the installation precision is improved, the installation time and the labor cost are saved, and the risk of personnel injury is reduced.
Description
Technical Field
The invention relates to the technical field of semiconductor processing equipment, in particular to an auxiliary mounting device for a process cavity.
Background
The size and the weight of the double process cavity are large, a plurality of people are needed to be matched and installed when the double process cavity is installed in the TM cavity, and personnel injury is easily caused due to poor matching. In addition, the double process cavities are easily installed in a non-parallel manner due to overlarge installation holes in the installation process, and the double process cavities are required to be leveled after the installation is completed, so that time and labor are wasted.
Disclosure of Invention
In order to solve the problems in the prior art, at least one embodiment of the invention provides an auxiliary installation device for a process cavity, which is provided with a lifting device, a leveling device and an in-place detection frame, and is used for in-place detection, lifting adjustment and horizontal adjustment of a double process cavity, so that the leveling and installation of the whole double process cavity can be completed by a single person, the installation precision is improved, the installation time and the labor cost are saved, and the risk of personnel injury is reduced.
The embodiment of the invention provides an auxiliary mounting device for a process cavity, which comprises a movable device frame, wherein the device frame is provided with a lifting device, a leveling device and an in-place detection frame, the lifting end of the lifting device is connected with a lifting table of the process cavity, and two ends of the in-place detection frame are respectively provided with an in-place sensor.
In some embodiments, the invention provides an auxiliary installation device for a process cavity, wherein a device frame comprises a bottom plate, a middle plate, lateral supports and lateral supports, wherein the lateral supports are respectively connected to two sides of the bottom plate, and two ends of each lateral support are respectively connected to the lateral supports; the lifting device is arranged on the middle plate, one end of the middle plate is connected with the lateral support, and the other end of the middle plate is connected with the transverse strut through the vertical column.
In some embodiments, the lifting device comprises a screw rod transmission mechanism and folding frames respectively arranged at two sides of the screw rod transmission mechanism, wherein one end of the bottom of each folding frame is rotatably connected with the middle plate, and the other end of the bottom of each folding frame is rotatably connected with the transmission end of the screw rod transmission mechanism.
In some embodiments, the auxiliary installation device for the process cavity is provided with a fixing seat on the middle plate, and one end of the bottom of the folding frame is rotatably connected with the fixing seat; the two sides of the transmission end of the screw rod transmission mechanism are respectively connected with rollers, and the middle plate is provided with rolling groove rollers corresponding to the rollers and arranged in the rolling grooves.
In some embodiments, the auxiliary installation device for the process cavity is provided with a process cavity input table at one side of the top of the transverse strut, and the process cavity input table and the process cavity lifting table are both provided with transmission raceways.
In some embodiments, the auxiliary installation device for the process cavity is provided with an anti-slip device on one side of a process cavity lifting table facing to a process cavity input table, wherein the anti-slip device comprises an anti-slip sliding seat and a lifting block, and the lifting block is provided with an inclined part facing to the process cavity input table; an elastic component is arranged in the anti-falling sliding seat, one end of the elastic component is connected to the inner wall of the anti-falling sliding seat, and the other end of the elastic component is connected to the lifting block.
In some embodiments, the auxiliary mounting device for the process cavity provided by the invention is a spiral lifter, and at least three groups of leveling devices are arranged at the bottom of the bottom plate.
In some embodiments, the invention provides an auxiliary installation device for a process cavity, wherein an in-place detection frame comprises an oblique angle bracket and an anti-collision crosspiece, wherein the oblique angle bracket is positioned on one side of a middle plate, the oblique angle bracket is connected with a lateral bracket, the anti-collision crosspiece is connected with the oblique angle bracket, and in-place sensors are installed at two ends of the anti-collision crosspiece.
In some embodiments, the invention provides a process chamber auxiliary mounting device, wherein a plurality of universal wheels are mounted on a bottom plate.
In some embodiments, the auxiliary installation device for the process cavity provided by the invention is characterized in that one side of a lifting table of the process cavity is connected with a sensor installation seat, and displacement sensors are respectively installed on two sides of the sensor installation seat.
Therefore, the auxiliary mounting device for the process cavity is provided with the lifting device, the leveling device and the in-place detection frame, in-place detection, lifting adjustment and horizontal adjustment are carried out on the double process cavity, and leveling and mounting of the whole double process cavity can be completed by a single person, so that the mounting precision is improved, the mounting time and the labor cost are saved, and the risk of injury to personnel is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of an auxiliary mounting device for a process chamber according to an embodiment of the invention;
FIG. 2 is a scaled schematic view of the portion I of FIG. 1;
FIG. 3 is a top view of an auxiliary mounting device for a process chamber according to an embodiment of the invention;
fig. 4 is a schematic diagram of the assembly of a dual process chamber according to an embodiment of the invention.
Reference numerals in the drawings corresponding to the specification are referred to as follows:
the device comprises a device frame 1, a bottom plate 11, universal wheels 111, an intermediate plate 12, a lateral support 13, a transverse support 14, a vertical column 15, a lifting device 2, a screw rod transmission mechanism 21, a folding frame 22, a fixed seat 23, rollers 24, a rolling groove 25, a leveling device 3, an in-place detection frame 4, an in-place sensor 41, an oblique angle support 42, an anti-collision crosspiece 43, a process cavity lifting table 5, a sensor mounting seat 51, a displacement sensor 52, a process cavity input table 6, a transmission rollaway nest 7, an anti-slip device 8, an anti-slip sliding seat 81, an elastic component 811, a lifting block 82, an inclined part 821, a backing plate 9, a double process cavity 100 and a TM cavity 200.
Detailed description of the preferred embodiments
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that in this document, relational terms such as "first" and "second" and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. In this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
The inventor of the scheme finds that in the prior art, the size and the weight of the double process cavity are large, a plurality of people are needed to be matched and installed when the double process cavity is installed in a TM cavity, and personnel injury is easily caused due to poor matching. In addition, the double process cavities are easily installed in a non-parallel manner due to overlarge installation holes in the installation process, and the double process cavities are required to be leveled after the installation is completed, so that time and labor are wasted. The embodiment of the invention provides the following scheme:
as shown in fig. 1 to 4, the embodiment of the invention provides an auxiliary installation device for a process cavity, which comprises a movable device frame 1, wherein the device frame 1 is provided with a lifting device 2, a leveling device 3 and an in-place detection frame 4, the lifting end of the lifting device 2 is connected with a lifting table 5 for the process cavity, and two ends of the in-place detection frame 4 are respectively provided with an in-place sensor 41.
It should be noted that, the device frame 1 is pushed to the front of the installation position of the TM cavity 200, and whether the device frame 1 is precisely in place is detected by the position sensor 41 of the in-place detection frame 4, so that the initial installation accuracy of the dual process cavity 100 is improved. The double-process cavity 100 to be installed is adjusted to the horizontal position through the leveling device 3, and then is lifted to the installation position of the TM cavity 200 through the lifting device 2 for installation, so that the installation accuracy is improved, and the labor cost is reduced.
Specifically, the device frame 1 includes a bottom plate 11, a middle plate 12, lateral brackets 13, and lateral struts 14, the lateral brackets 13 being connected to both sides of the bottom plate 11, respectively, and both ends of the lateral struts 14 being connected to the lateral brackets 13, respectively. The lifting device 2 is mounted to a middle plate 12, one end of the middle plate 12 being connected to a lateral bracket 13, the other end of the middle plate 12 being connected to a transverse strut 14 via a vertical column 15. The base plate 11 is mounted with a plurality of universal wheels 111. The leveling devices 3 are screw elevators, and at least three groups of leveling devices 3 are arranged at the bottom of the bottom plate 11.
It should be noted that, in order to save the cost, three sets of leveling devices 3 may be provided, two sets of leveling devices 3 are provided at one end of the bottom of the base plate 11, and one set of leveling devices 3 is provided at two sections of the bottom of the base plate 11, so that the entire device frame 1 is adjusted to the horizontal position.
The in-place detecting bracket 4 includes a bevel bracket 42 and an anti-collision rail 43 at one side of the middle plate 12, the bevel bracket 42 is connected to the lateral bracket 13, the anti-collision rail 43 is connected to the bevel bracket 42, and in-place sensors 41 are installed at both ends of the anti-collision rail 43.
It should be noted that, the bevel bracket 42 may guide the position detecting frame 4 to the middle position of the mounting frame below the TM cavity 200, so as to improve the mounting accuracy.
The lifting device 2 comprises a screw rod transmission mechanism 21 and folding frames 22 respectively arranged at two sides of the screw rod transmission mechanism 21, one end of the bottom of each folding frame 22 is rotatably connected with the middle plate 12, and the other end of the bottom of each folding frame 22 is rotatably connected with the transmission end of the screw rod transmission mechanism 21.
It will be appreciated that the driving end of the screw driving mechanism 21 moves forward and backward to drive the other end of the bottom of the folding frame 22 to move forward and backward, thereby raising or lowering the folding frame 22.
Further, the middle plate 12 is provided with a fixing seat 23, and one end of the bottom of the folding frame 22 is rotatably connected to the fixing seat 23. The two sides of the transmission end of the screw rod transmission mechanism 21 are respectively connected with a roller 24, the middle plate 12 is provided with a rolling groove 25 corresponding to the roller 24, and the roller 24 is arranged in the rolling groove 25.
It should be noted that, when the driving end of the screw rod driving mechanism 21 pushes the other end of the bottom of the folding frame 22, the roller 24 rolls in the rolling groove 25, so that the friction force is reduced when the other end of the bottom of the folding frame 22 moves, and the accuracy is improved and the service life is prolonged.
Further, a sensor mounting seat 51 is connected to one side of the process chamber lifting table 5, and displacement sensors 52 are respectively mounted on two sides of the sensor mounting seat 51.
When the lifting device 2 is used for lifting and the leveling device 3 is used for leveling, the displacement sensor 52 detects the position of the process chamber lifting table 5 in real time so as to enable the process chamber lifting table to be continuously adjusted to a proper position.
Further, a process cavity input table 6 is arranged on one side of the top of the transverse strut 14, and a transmission rollaway nest 7 is arranged on each of the process cavity input table 6 and the process cavity lifting table 5. The process chamber lifting table 5 is provided with an anti-slip device 8 toward one side of the process chamber input table 6, the anti-slip device 8 includes an anti-slip seat 81 and a lifting block 82, and the lifting block 82 is provided with an inclined portion 821 toward the process chamber input table. An elastic member 811 is provided in the fall prevention slide 81, and the elastic member 811 may be a spring, one end of the elastic member 811 is connected to the inner wall of the fall prevention slide 81, and the other end of the elastic member 811 is connected to the lifting block 82.
It should be noted that, when the dual process chamber 100 is transferred from the process chamber input stage 6 to the process chamber lifting stage 5 through the transfer raceways 7 of the process chamber input stage 6 and the process chamber lifting stage 5 by the pad 9, the lifting block 82 is compressed and lowered by the inclined portion 821 of the lifting block 82. When the dual process chamber 100 is transferred to the process chamber lifting table 5, the lifting block 82 is restored to its original position by the elasticity of the spring member 811, so that the lifting block 82 is pushed against the dual process chamber 100 to prevent the reverse sliding thereof.
In specific implementation, the device frame 1 is pushed to the installation position of the TM cavity 200, the dual-process cavity 100 to be installed is adjusted to the horizontal position by the leveling device 3, and then the dual-process cavity 100 is lifted to the installation position of the TM cavity 200 by the lifting device 2, so that the dual-process cavity 100 is fixed to the TM cavity 200 by screws.
In summary, the embodiment of the invention provides an auxiliary installation device for a process cavity, which is provided with a lifting device, a leveling device and an in-place detection frame, and is used for in-place detection, lifting adjustment and horizontal adjustment of a double process cavity, so that leveling and installation of the whole double process cavity can be completed by a single person, the installation precision is improved, the installation time and the labor cost are saved, and the risk of injury to personnel is reduced.
The above is merely a specific embodiment of the present application, and the protection scope of the present application is not limited thereto. Those skilled in the art can make changes or substitutions within the technical scope of the present disclosure, and such changes or substitutions should be within the scope of the present disclosure.
Those skilled in the art will appreciate that while some embodiments described herein include some features but not others included in other embodiments, combinations of features of different embodiments are meant to be within the scope of the invention and form different embodiments.
Although embodiments of the present invention have been described in connection with the accompanying drawings, various modifications and variations may be made by those skilled in the art without departing from the spirit and scope of the invention, and such modifications and variations fall within the scope of the invention as defined by the appended claims.
Claims (10)
1. The auxiliary installation device for the process cavity is characterized by comprising a movable device frame (1), wherein the device frame (1) is provided with a lifting device (2), a leveling device (3) and an in-place detection frame (4), the lifting end of the lifting device (2) is connected with a process cavity lifting table (5), and in-place sensors (41) are respectively arranged at two ends of the in-place detection frame (4).
2. The process chamber auxiliary installation device according to claim 1, wherein the device frame (1) comprises a bottom plate (11), a middle plate (12), lateral supports (13) and lateral struts (14), the lateral supports (13) are respectively connected to two sides of the bottom plate (11), and two ends of the lateral struts (14) are respectively connected to the lateral supports (13); the lifting device (2) is mounted on the middle plate (12), one end of the middle plate (12) is connected with the lateral support (13), and the other end of the middle plate (12) is connected with the transverse strut (14) through a vertical column (15).
3. The process chamber auxiliary installation device according to claim 2, wherein the lifting device (2) comprises a screw transmission mechanism (21) and folding frames (22) respectively installed at two sides of the screw transmission mechanism (21), one end of the bottom of each folding frame (22) is rotatably connected with the middle plate (12), and the other end of the bottom of each folding frame (22) is rotatably connected with a transmission end of the screw transmission mechanism (21).
4. A process chamber auxiliary installation device according to claim 3, wherein the intermediate plate (12) is provided with a fixed seat (23), and the bottom end of the folding frame (22) is rotatably connected to the fixed seat (23); the two sides of the transmission end of the screw rod transmission mechanism (21) are respectively connected with a roller (24), the middle plate (12) is provided with a rolling groove (25) corresponding to the roller (24), and the roller (24) is arranged in the rolling groove (25).
5. The process chamber auxiliary installation device according to claim 2, wherein a process chamber input table (6) is arranged on one side of the top of the transverse strut (14), and a transmission raceway (7) is arranged on each of the process chamber input table (6) and the process chamber lifting table (5).
6. The process chamber auxiliary installation device according to claim 5, wherein an anti-slip device (8) is provided on a side of the process chamber lifting table (5) facing the process chamber input table (6), the anti-slip device (8) comprising an anti-slip seat (81) and a lifting block (82), the lifting block (82) being provided with an inclined portion (821) facing the process chamber input table; an elastic component (811) is arranged in the anti-falling sliding seat (81), one end of the spring component (811) is connected to the inner wall of the anti-falling sliding seat (81), and the other end of the spring component (811) is connected to the lifting block (82).
7. Process chamber auxiliary installation device according to claim 2, characterized in that the levelling means (3) are screw elevators, the bottom of the bottom plate (11) being provided with at least three sets of levelling means (3).
8. The process chamber auxiliary installation device according to claim 2, wherein the in-place detection frame (4) comprises an oblique angle bracket (42) and an anti-collision crosspiece (43) positioned on one side of the middle plate (12), the oblique angle bracket (42) is connected to the lateral bracket (13), the anti-collision crosspiece (43) is connected to the oblique angle bracket (42), and the in-place sensor (41) is installed at two ends of the anti-collision crosspiece (43).
9. Process chamber auxiliary installation according to any of the claims 2, characterized in that the base plate (11) is fitted with a plurality of universal wheels (111).
10. The process chamber auxiliary installation device according to any one of claims 1 to 9, wherein one side of the process chamber lifting table (5) is connected with a sensor installation seat (51), and displacement sensors (52) are respectively installed on two sides of the sensor installation seat (51).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311556679.8A CN117446692A (en) | 2023-11-21 | 2023-11-21 | Auxiliary installation device for process cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311556679.8A CN117446692A (en) | 2023-11-21 | 2023-11-21 | Auxiliary installation device for process cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117446692A true CN117446692A (en) | 2024-01-26 |
Family
ID=89592965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311556679.8A Pending CN117446692A (en) | 2023-11-21 | 2023-11-21 | Auxiliary installation device for process cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117446692A (en) |
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2023
- 2023-11-21 CN CN202311556679.8A patent/CN117446692A/en active Pending
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