CN117425825A - Mass analysis device and method - Google Patents
Mass analysis device and method Download PDFInfo
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- CN117425825A CN117425825A CN202280034305.7A CN202280034305A CN117425825A CN 117425825 A CN117425825 A CN 117425825A CN 202280034305 A CN202280034305 A CN 202280034305A CN 117425825 A CN117425825 A CN 117425825A
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- 238000004458 analytical method Methods 0.000 title claims description 32
- 238000000034 method Methods 0.000 title claims description 16
- 238000005461 lubrication Methods 0.000 claims abstract description 9
- 239000010687 lubricating oil Substances 0.000 claims description 43
- 238000001514 detection method Methods 0.000 claims description 18
- 150000002500 ions Chemical class 0.000 claims description 18
- 239000003921 oil Substances 0.000 claims description 15
- 230000006866 deterioration Effects 0.000 claims description 12
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 10
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052785 arsenic Inorganic materials 0.000 claims description 7
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 7
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 5
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 claims description 4
- 238000005086 pumping Methods 0.000 claims 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 21
- 238000005070 sampling Methods 0.000 description 15
- 238000009616 inductively coupled plasma Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 239000000314 lubricant Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 239000004254 Ammonium phosphate Substances 0.000 description 5
- 229910000148 ammonium phosphate Inorganic materials 0.000 description 5
- 235000019289 ammonium phosphates Nutrition 0.000 description 5
- 239000000112 cooling gas Substances 0.000 description 5
- MNNHAPBLZZVQHP-UHFFFAOYSA-N diammonium hydrogen phosphate Chemical group [NH4+].[NH4+].OP([O-])([O-])=O MNNHAPBLZZVQHP-UHFFFAOYSA-N 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 239000002904 solvent Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000498 cooling water Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010702 perfluoropolyether Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000001176 liquid chromatography-inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 239000002480 mineral oil Substances 0.000 description 1
- 235000010446 mineral oil Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/26—Oils; Viscous liquids; Paints; Inks
- G01N33/28—Oils, i.e. hydrocarbon liquids
- G01N33/30—Oils, i.e. hydrocarbon liquids for lubricating properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Biochemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The present invention provides an ICPMS (200), comprising: a plasma torch (10) that ionizes a sample (S) and a mobile phase (M) of the sample; a storage chamber (25) into which the ionized sample (S) and the mobile phase (M) are introduced; a first vacuum pump (61) for evacuating the housing chamber (25); a sensor (60) that detects a consumption current value (I) flowing through the first vacuum pump (61); and a control device (300) for notifying a user of predetermined information related to the lubrication oil of the first vacuum pump (61) when the consumption current value (I) is equal to or greater than the threshold value (Th).
Description
Technical Field
The present disclosure relates to a mass spectrometry apparatus and method.
Background
For example, japanese patent application laid-open No. 2015-194380 (patent document 1) discloses an inductively coupled plasma (Inductively Coupled Plasma, ICP) mass analysis apparatus. The ICP analysis apparatus of patent document 1 includes a sampling chamber and a vacuum pump for evacuating the sampling chamber. In the ICP analyzer, a sample is ionized by heat of plasma, and the ionized sample is introduced into a sampling chamber in a vacuum state. Then, the mass analysis unit analyzes the sample introduced into the sampling chamber.
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 2015-194380
Disclosure of Invention
[ problem to be solved by the invention ]
The vacuum pump of the ICP mass spectrometer uses lubricating oil. As the number of times of analysis of the sample by the ICP mass analysis apparatus increases, the lubricating oil may deteriorate. If the lubricant is degraded, the vacuum pump may no longer operate properly. Therefore, if the ICP mass spectrometer analyzes a sample in a state where the lubricating oil is degraded, there is a possibility that an accurate analysis result cannot be derived.
The present invention has been made to solve the above problems, and an object of the present invention is to provide a technique for analyzing a sample while suppressing deterioration of lubricating oil in a vacuum pump.
[ means of solving the problems ]
The mass analysis device of the present disclosure includes: a plasma ion source, a housing chamber, a vacuum pump, a sensor, and a control device. The plasma ion source ionizes a sample and a mobile phase of the sample. The storage chamber is introduced with an ionized sample and a mobile phase. The vacuum pump makes the accommodating chamber vacuum. The sensor detects a detection value that is a consumption current value in the vacuum pump or a consumption power value in the vacuum pump. When the detection value is equal to or greater than the threshold value, the control device notifies the user of predetermined information related to the lubrication oil of the vacuum pump.
The method of the present disclosure comprises: ionizing a sample and a mobile phase of the sample; the holding chamber into which the ionized sample and the mobile phase are introduced is evacuated by a vacuum pump; acquiring a detection value as a consumed current value in the vacuum pump or a consumed power value in the vacuum pump; and notifying the user of the predetermined information when the detection value is equal to or greater than the threshold value.
[ Effect of the invention ]
According to the technology of the present disclosure, a user can be made to recognize prescribed information related to the lubrication oil of the vacuum pump, and thus can be reminded of the replacement of the lubrication oil. Therefore, according to the technology of the present disclosure, it is possible to suppress analysis of a sample in a state where the lubricating oil of the vacuum pump is degraded.
Drawings
Fig. 1 is a diagram showing a configuration example of an analysis system of the present disclosure.
Fig. 2 is a diagram showing an example of a hardware configuration of the control device.
Fig. 3 is a functional block diagram of a control device and the like.
Fig. 4 is a diagram showing an example of the predetermined information.
Fig. 5 is an example of a flowchart of main processing in the control device.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same or corresponding portions in the drawings are denoted by the same reference numerals, and the description thereof will not be repeated. Further, the embodiments and modifications are previously specified from the beginning of the application, and the structures described in the embodiments are appropriately combined to the extent that inadequacies or contradictions do not occur, including combinations not mentioned in the specification.
First embodiment
Fig. 1 is a diagram showing a configuration example of an analysis system of the present disclosure. In fig. 1, as an example of an analysis system, a liquid chromatograph-inductively coupled plasma mass spectrometer (Liquid Chromatograph-Inductively Coupled Plasma Mass Spectrometry, LC-ICPMS) 1000 is shown. In this embodiment, the LC-ICPMS1 performs analysis of a sample containing arsenic (As) in accordance with the form of the arsenic.
The LC-ICPMS1 includes a liquid chromatograph (hereinafter also referred to as "LC 100"), an ICP mass analysis device (hereinafter also referred to as "ICPMS 200"), a control device 300, an input device 400, a display device 500, and a microphone 600.ICPMS200 corresponds to the "mass spectrometry device" of the present disclosure. In the present embodiment, the ICPMS200 is described as being connected to the LC 100, but may be connected to another device.
First, LC 100 will be described. LC 100 includes: a mobile phase vessel 111, a liquid feed pump 112, a sample injector 113, and a column 114. The mobile phase container 111 accommodates the mobile phase M of the sample S. The mobile phase M of the present embodiment is a solvent containing phosphoric acid. In this embodiment, mobile phase M is ammonium phosphate.
The liquid feed pump 112 sucks the mobile phase M from the mobile phase container 111 and feeds it to the injector 113. The injector 113 injects the introduced sample S into the mobile phase M by the user. The column 114 separates the various components in the sample S in the time direction. The separated sample S and mobile phase M are transferred to ICPMS200.
Next, ICPMS200 will be described. ICPMS200 includes: the plasma torch 10, a sampling unit 20 disposed in front of the plasma torch 10, and a mass analysis unit 30 disposed adjacent to the sampling unit 20. The plasma torch 10 corresponds to the "plasma ion source" of the present disclosure.
The plasma torch 10 ionizes the separated sample S and the mobile phase M. Although not particularly shown, the sample tube, the plasma gas tube, and the cooling gas tube are included. The sample S and the mobile phase M (hereinafter also referred to as "object") carried from the LC 100 are introduced into the plasma torch 10. The plasma gas tube is formed on the outer periphery of the sample tube. The cooling gas pipe is formed on the outer periphery of the plasma gas pipe. Although not particularly shown, an atomizing gas supply source for supplying an atomizing gas is connected to the sample tube. A plasma gas supply source for supplying a plasma gas (for example, argon gas) is connected to the plasma gas pipe. A cooling gas supply source for supplying a cooling gas is connected to the cooling gas pipe. The object atomized by the atomizing gas flows through the sample tube. The sampling unit 20 includes a case 21 having a through hole and made of aluminum and copper (block). The space inside the housing 21 becomes the housing chamber 25. The sampling unit 20 is provided with a sampling cone 51, a cutting cone 52, and a lead electrode 53 in this order from the plasma torch 10 side.
A cooling solvent flow path (not shown) through which cooling water flows is formed in the wall of the casing 21, and the cooling solvent supply source 41 is connected to an inlet and an outlet of the cooling solvent flow path. Thereby, the housing 21 is cooled by the cooling water. An opening 22 is formed in the wall of the housing 21, and is connected to the first vacuum pump 61. Thereby, the housing chamber 25 is exhausted to a pressure lower than the atmospheric pressure by the first vacuum pump 61. Therefore, the ionized sample S and mobile phase M are sucked into the storage chamber 25, and then introduced into the storage chamber 25. The housing chamber 25 has a function of outputting ions supplied from the plasma torch 10 to the mass analysis unit 30. The first vacuum pump 61 corresponds to the "vacuum pump" of the present disclosure.
The sampling cone 51 is a metal body including a disk body and a conical portion formed at the center of the disk body. A circular opening 51a is formed in the center of the conical portion. The opening 51a of the sampling cone 51 has a shape that gradually increases with respect to the ion traveling direction.
The truncated cone 52 is a metal body including a disk body and a conical portion formed at the center of the disk body. A circular opening 52a is formed in the center of the conical portion. The opening 52a of the skimmer 52 has a shape that gradually increases with respect to the ion traveling direction.
The extraction electrode 53 is a metal body including a disk body and a cylindrical portion 53a formed in the center of the disk body. The extraction electrode 53 is applied with a predetermined voltage from the power supply device 42. The power supply 42 also supplies electric power to other parts. The power supply device 42 supplies electric power to, for example, the first vacuum pump 61.
The mass analysis unit 30 includes: a first chamber 31, and a second chamber 32. The first chamber 31 includes an aluminum box-like housing 31a. A condensing lens plasma lens section 33 is disposed in the case 31a. A second vacuum pump 62 is connected to the first chamber 31. The first chamber 31 is brought into a vacuum state by the second vacuum pump 62.
The second chamber 32 includes an aluminum box-like housing 32a. A mass separation unit 34 and a detector 35 are disposed in the housing 32a. The mass separating portion 34 includes a quadrupole rod structure or the like. The detector 35 includes an electron multiplier and the like. The detection result in the detector 35 is output to the control device 300. The control device 300 displays information corresponding to the detection result on the display device 500. A third vacuum pump 63 is connected to the second chamber 32. The second chamber 32 is brought into a vacuum state by the third vacuum pump 63.
The first vacuum pump 61, the second vacuum pump 62, and the third vacuum pump 63 may be any pumps as long as the corresponding spaces can be evacuated. The first vacuum pump 61, the second vacuum pump 62, and the third vacuum pump 63 are, for example, rotary vane pumps.
In this ICPMS200, a high-frequency current is supplied to a high-frequency induction coil of the plasma torch 10 to generate plasma P. The sample S is ionized by heat of 5000 to 6000 degrees of plasma P. The ions and plasma P are then introduced into the housing 21 through the opening 51a of the sampling cone 51.
Ions introduced into the case 21 are sequentially introduced into the case 31a through the opening 52a of the skimmer cone 52 and the cylindrical portion 53a of the extraction electrode 53. In the case 31a, the ion lens portion 33 converges ions from the sampling portion 20 to the second chamber 32.
A voltage obtained by superimposing a direct-current voltage and a high-frequency voltage is applied to the mass separator 34. In the mass separation section 34, only ions having a mass number (mass m/charge z) corresponding to the applied voltage selectively pass through. Thus, the selected ions reach the detector 35. Also, the mass number of ions passing through the second chamber 32 depends on the applied voltage. Therefore, by the user's or the like operation voltage, an ion intensity signal related to ions having a prescribed mass number can be obtained by the detector 35.
The control device 300 controls the LC 100, ICPMS200, and the like. The input device 400 receives input of a command from a user. The input device 400 includes, for example, a keyboard, a mouse, and the like. The display device 500 displays various information under the control of the control device 300. The input device 400 and the display device 500 may be integrated and function as a touch panel. The loudspeaker 600 outputs various sounds by the control of the control device 300.
Hardware architecture of control device 300
Fig. 2 is a diagram showing an example of a hardware configuration of the control device 300. Referring to fig. 2, the control device 300 includes, as main constituent elements, a central processing unit (Central Processing Unit, CPU) 160, a Read Only Memory (ROM) 162, a random access Memory (Random Access Memory, RAM) 164, a Hard Disk Drive (HDD) 166, a communication I/F (Interface) 168, a display I/F170, an input I/F172, and a microphone I/F174. The structural elements are connected with each other through a data bus.
Communication I/F168 is an interface for communicating with LC 100 and ICPMS200. The display I/F170 is an interface for communicating with the display device 500. The input I/F172 is an interface for communicating with the input device 400. The microphone I/F174 is an interface for communicating with the microphone 600.
The ROM 162 stores programs executed by the CPU 160. The RAM 164 can temporarily store data generated by execution of programs in the CPU 160 and data input via the communication I/F168. RAM 164 may function as a temporary data storage that serves as a work area. HDD166 is a nonvolatile storage device. Instead of the HDD166, a semiconductor storage device such as a flash memory may be used.
The program stored in the ROM 162 may be stored in a recording medium and distributed as a program product. Or the program may be provided in the form of a product program which can be downloaded by an information provider via the so-called internet or the like. The control device 300 reads a program provided from a recording medium, the internet, or the like. The control device 300 stores the read program in a predetermined storage area (for example, the ROM 162). The CPU 160 can execute various processes by executing the program.
The recording medium may be a medium in which a program is fixedly loaded, such as a digital versatile disk (Digital Versatile-Disk Read Only Memory, DVD-ROM) or a compact disk (compact disc read-only memory). The recording medium is a non-transitory medium that can read a program or the like.
[ functional block diagram of control device ]
Fig. 3 is a functional block diagram of a control device 300 and the like. The control device 300 includes an acquisition unit 302, a determination unit 304, a control unit 306, and a storage unit 308. The first vacuum pump 61 includes an object 381 to be lubricated and a lubricant 382. The object 381 is driven by receiving power from the power supply device 42. The object 381 is a part that is driven to realize the exhaust treatment of the first vacuum pump 61. The object 381 is a portion lubricated by the lubricating oil 382. In the case where the first vacuum pump 61 is, for example, a rotary vane pump, the object 381 to be lubricated is a bearing including a rotor, a vane, or the like. Moreover, the lubricating oil is an inexpensive mineral oil or synthetic oil.
The sensor 60 detects a current value flowing in the first vacuum pump 61 as a current value (hereinafter also referred to as a consumed current value I) consumed by the first vacuum pump 61. The sensor 60 is, for example, a ammeter (current measuring device) that detects a current value supplied to the first vacuum pump 61. The sensor 60 outputs the detected consumption current value I to the control device 300. The acquisition unit 302 of the control device 300 acquires the consumption current value I. The acquisition unit 302 outputs the consumption current value I to the determination unit 304.
Here, as described above, in the housing chamber 25, the ammonium phosphate solution as the mobile phase M is introduced from the LC 100 into the ICPMS200. The ammonium phosphate solution is caused to generate a gas containing water vapor (hereinafter also referred to as "corrosive gas") by the plasma P of the ICPMS200. As described above, the first vacuum pump 61 exhausts the housing chamber 25, so that the corrosive gas is exhausted to the outside through the first vacuum pump 61. In the case where the corrosive gas passes through first vacuum pump 61, lubricating oil 382 in first vacuum pump 61 is degraded by the corrosive gas. Deterioration of lubricating oil 382 causes the viscosity of lubricating oil 382 to rise. The viscosity of lubricating oil 382 increases, resulting in an increase in the rotational resistance of the rotor of first vacuum pump 61.
For example, in the maintenance of the ICPMS200, when the first vacuum pump 61 is restarted after the first vacuum pump 61 is stopped, if the rotational resistance of the rotor of the first vacuum pump 61 increases, there is a case where a torque shortage occurs to cause a failure in starting the first vacuum pump 61. In addition, during the operation of the first vacuum pump 61, the self-heating of the first vacuum pump 61 causes the surface temperature of the first vacuum pump 61 to become high (the surface temperature becomes, for example, approximately 50 degrees). This reduces the viscosity rise of the lubricant oil, and does not affect the evacuation of the first vacuum pump 61. However, in maintenance of ICPMS200, when first vacuum pump 61 is cooled down to room temperature while accommodating chamber 25 is in a vacuum state, first vacuum pump 61 is cooled down to cause a significant increase in viscosity of lubricating oil 382, and the rotational resistance of the rotor increases, and the above-described start failure may occur.
Moreover, manufacturers of ICPMS200 and the like recommend that lubricating oil 382 be replaced every predetermined period (for example, every 6 months). However, the user is not necessarily able to change at a proper time. Therefore, ICPMS200 may be used in spite of deterioration of lubricating oil 382. In that case, the start-up failure may occur. Moreover, there are cases where lubricating oil 382 is replaced although lubricating oil 382 is not degraded. In this case, lubricating oil 382 is wasted.
In order to reduce the start-up failure (deterioration of lubricating oil 382), a perfluoropolyether (PFPE) oil (perfluoralyether: fomblin)) as a fluorine-based oil is considered as the first structure of lubricating oil 382. Further, as the first vacuum pump 61, a second structure using a dry pump without using lubricating oil is also considered. However, in the first and second structures, there is a problem that the cost of ICPMS200 increases.
On the other hand, as the rotational resistance of the rotor of the first vacuum pump 61 increases, the value of the consumed current in the motor of the first vacuum pump 61 increases. Therefore, in the present embodiment, the sensor 60 detects the consumption current value I in the first vacuum pump 61 (the consumption current value in the motor of the first vacuum pump 61), and the acquisition unit 302 acquires the consumption current value I. The determination unit 304 determines whether or not the consumption current value I is equal to or greater than a predetermined threshold Th. The threshold Th is stored in the storage unit 308. The judgment unit 304 outputs the judgment result to the control unit 306.
The case where the consumption current value I is equal to or greater than the predetermined threshold value Th is a case where the rotational resistance of the rotor of the first vacuum pump 61 increases, that is, a case where the possibility of deterioration of the lubricating oil 382 is high. In this case, the control unit 306 notifies the user of the predetermined information. The predetermined information is information related to lubricating oil 382 of first vacuum pump 61. Therefore, by notifying the user of the predetermined information, the user can be reminded of the replacement of lubricating oil 382. The control unit 306 may stop the driving of the first vacuum pump 61 when the consumption current value I is equal to or greater than the predetermined threshold Th. With this configuration, the control device 300 can prevent the "first vacuum pump 61 from being driven in a state where the rotational resistance of the rotor of the first vacuum pump 61 is increased", and thus can ensure the safety of the first vacuum pump 61. Further, the control unit 306 may stop the driving of the LC-ICPMS1 by stopping the driving of the first vacuum pump 61. Further, control unit 306 may output a sound from microphone 600 prompting replacement of lubricating oil 382.
Fig. 4 is a diagram showing an example of the predetermined information. The predetermined information is displayed in the display area 500A of the display device 500. The predetermined information includes first information 501 and second information 502. First information 501 is information indicating deterioration of lubricating oil 382 of first vacuum pump 61. In the example of fig. 4, information showing a sentence "lubricant deterioration of a vacuum pump" is shown. Further, second information 502 is information prompting replacement of lubricating oil 382 of first vacuum pump 61. In the example of fig. 4, the second information 502 is information showing a sentence "please replace lubricating oil".
As described above, first information 501 is displayed by display device 500, so that the user can directly recognize "deterioration of lubricating oil 382 of first vacuum pump 61". Further, second information 502 is displayed by display device 500, which can directly prompt the user to replace lubricating oil 382 of first vacuum pump 61. Further, the display device 500 may display any one of the first information 501 and the second information 502. Also, the display device 500 may display an image (e.g., a character image) or the like different from the information shown in fig. 4. The predetermined information may be information indirectly identifying replacement of lubricating oil 382.
[ flow chart of processing in control device ]
Fig. 5 is an example of a flowchart of main processing in the control device 300. In step S2, the control device 300 starts the process of ionizing the sample S and the mobile phase M using the plasma P. Next, in step S4, the control device 300 controls the first vacuum pump 61, whereby the first vacuum pump 61 vacuums the housing chamber 25. Thereby, the ionized sample S and the mobile phase M are introduced into the storage chamber 25.
Next, in step S5, the control device 300 determines whether or not the analysis process is completed. When the analysis process is completed (YES in step S5), the process of fig. 5 is completed. If the analysis process is not completed (NO in step S5), the process proceeds to step S6.
In step S6, the control device 300 acquires a consumption current value I (corresponding to the consumption current value in the first vacuum pump 61). Next, in step S8, the control device 300 determines whether or not the consumption current value I is equal to or greater than the threshold value Th. When the consumption current value I is smaller than the threshold value Th (no in step S8), the process returns to step S5. The case where the consumption current value I is smaller than the threshold Th is the case where lubricating oil 382 is not degraded. When the consumption current value I is equal to or greater than the threshold value Th (yes in step S8), the control device 300 stops driving the first vacuum pump 61 in step S10. Next, in step S12, the control device 300 notifies predetermined information (see fig. 4).
As described above, ICPMS200 of the present embodiment has the following preconditions. The sample S is ionized with the mobile phase M using the plasma torch 10. Furthermore, by ionizing mobile phase M (ammonium phosphate), corrosive gas is generated. When the first vacuum pump 61 vacuums the housing chamber 25, the corrosive gas contained in the gas is discharged to the outside through the first vacuum pump 61 because the gas in the housing chamber 25 is discharged to the outside. When the corrosive gas passes through first vacuum pump 61, the corrosive gas reacts with lubricating oil 382, and lubricating oil 382 is deteriorated (viscosity of lubricating oil 382 increases). The increase in viscosity of lubricating oil 382 causes an increase in rotational resistance of the rotor of first vacuum pump 61. An increase in the rotational resistance of the rotor of the first vacuum pump 61 causes an increase in the consumption current value (consumption current value detected by the sensor 60) in the first vacuum pump 61. Under such a precondition, ICPMS200 notifies predetermined information when the consumption current value detected by sensor 60 becomes equal to or greater than the threshold value. Accordingly, ICPMS200 may notify the prescribed information associated with lubricating oil 382 at the appropriate time.
Modification example
(1) In this embodiment, a structure in which the mobile phase is ammonium phosphate is described. However, the mobile phase may be other substances. The mobile phase may be, for example, other substances comprising phosphoric acid. The mobile phase may be a substance containing any one of sulfonic acid and dimethyl sulfoxide.
(2) The structure of the LC-ICPMS1 according to the present embodiment, in which analysis is performed in the form of arsenic, that is, the structure in which the sample S is a substance containing arsenic, will be described. However, the LC-ICPMS1 may perform analysis in the form of other substances.
(3) In this embodiment, a structure in which the detected value is the consumption current value I is described. However, the detection value may be another value. The detection value may be, for example, a power consumption value in the first vacuum pump 61 (e.g., a power value supplied to the first vacuum pump 61). In the case of this configuration, the sensor 60 is an electric force sensor that detects the value of electric power supplied to the first vacuum pump 61.
In the above embodiment, the configuration in which the control device 300 acquires the current value detected by the sensor 60 as the consumption current value I in the first vacuum pump 61 has been described. However, the control device 300 may acquire a value obtained by performing a predetermined operation on the current value detected by the sensor 60 as the consumed current value I. In the case where the sensor 60 is configured as a power sensor, the control device 300 may acquire a value obtained by performing a predetermined operation on the power value detected by the power sensor as the consumed power value I. Further, the control device 300 may acquire other parameters and perform a predetermined operation on the other parameters, instead of using the current value detected by the sensor 60 or the power value detected by the power sensor, to acquire the cancellation power consumption value or the power consumption value. Even in the LC-ICPMS1 having such a structure, the same effects as those of the above-described embodiment are exhibited.
Form of the invention
Those skilled in the art will appreciate that the various exemplary embodiments are specific examples of the following aspects.
The mass spectrometer according to the first aspect includes: a plasma ion source for ionizing a sample and a mobile phase of the sample; a storage chamber into which the ionized sample and the mobile phase are introduced; a vacuum pump for making the accommodating chamber vacuum; and a control device, wherein the control device acquires a detection value which is a consumption current value in the vacuum pump or a consumption power value in the vacuum pump, and notifies a user of prescribed information related to the lubrication oil of the vacuum pump when the detection value is greater than or equal to a threshold value.
According to the mass spectrometer of the first aspect, the user can be notified of predetermined information related to the lubrication oil of the vacuum pump at an appropriate timing. Therefore, the mass spectrometer can suppress analysis of the sample in a state where the lubricant oil of the vacuum pump is deteriorated.
(second) in the mass spectrometer of the first aspect, the control device stops driving the vacuum pump when the detection value is equal to or greater than the threshold value.
According to the mass spectrometer of the second aspect, the safety of the vacuum pump can be ensured.
(third) in the mass spectrometry device of the first or second, the prescribed information includes information indicating deterioration of the lubricating oil of the vacuum pump.
According to the mass spectrometer of the third aspect, the user can directly recognize the deterioration of the lubricant oil of the vacuum pump.
(fourth) in the mass spectrometer according to any one of the first to third, the predetermined information includes information for prompting replacement of the lubricant oil of the vacuum pump.
According to the mass spectrometer of the third aspect, the user can be directly reminded of replacing the lubricating oil of the vacuum pump.
(fifth) in the mass spectrometer according to any one of the first to fourth, the mobile phase contains any one of phosphoric acid, sulfonic acid, and dimethyl sulfoxide.
According to the mass spectrometer of the fifth aspect, even when the mobile phase contains any one of phosphoric acid, sulfonic acid, and dimethyl sulfoxide, the sample can be analyzed while suppressing deterioration of the lubricating oil of the vacuum pump.
(sixth) in the mass spectrometer according to any one of the first to fifth, the sample contains arsenic.
According to the mass spectrometer of the sixth aspect, even when the sample contains arsenic, analysis of the sample in a state in which the lubricating oil of the vacuum pump is degraded can be suppressed.
The method of the seventh aspect includes: ionizing a sample and a mobile phase of the sample; the holding chamber into which the ionized sample and the mobile phase are introduced is evacuated by a vacuum pump; acquiring a detection value as a consumed current value in the vacuum pump or a consumed power value in the vacuum pump; and notifying the user of the predetermined information when the detection value is equal to or greater than the threshold value.
According to the method of the seventh aspect, the user can be notified of the predetermined information related to the lubrication oil of the vacuum pump at an appropriate timing. Therefore, the mass spectrometer can suppress analysis of the sample in a state where the lubricant oil of the vacuum pump is deteriorated.
The embodiments disclosed herein are to be considered in all respects as illustrative and not restrictive. The scope of the invention is indicated by the scope of the claims rather than by the description, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.
[ description of symbols ]
10: plasma torch
20: sampling part
21: shell body
22: an opening part
25: housing chamber
30: mass analysis unit
31: first chamber
32: a second chamber
33: ion lens unit
34: mass separator
35: detector for detecting a target object
41: cooling solvent supply source
42: power supply device
51: sampling cone
51a: an opening
52: intercepting cone
53: extraction electrode
60: sensor for detecting a position of a body
61: first vacuum pump
62: second vacuum pump
63: third vacuum pump
111: container
112: liquid feeding pump
113: sample injector
114: tubular column
162:ROM
164:RAM
300: control device
302: acquisition unit
304: judgment part
306: control unit
308: storage unit
381: lubrication object
382: lubricating oil
400: input device
500: display device
500A: display area
501: first information
502: and second information.
Claims (7)
1. A mass spectrometer, comprising:
a plasma ion source for ionizing a sample and a mobile phase of the sample;
a storage chamber into which the ionized sample and the mobile phase are introduced;
a vacuum pump for evacuating the housing chamber; and
the control device is used for controlling the control device,
wherein, the control device is that,
a detection value is acquired as a consumption current value in the vacuum pump or a consumption power value in the vacuum pump,
when the detection value is equal to or greater than a threshold value, predetermined information related to the lubrication oil of the vacuum pump is notified to a user.
2. A mass analysis device according to claim 1, wherein,
the control device stops driving of the vacuum pump when the detection value is equal to or greater than the threshold value.
3. A mass analysis device according to claim 1 or 2, wherein,
the prescribed information includes: information indicating the deterioration of the lubricating oil of the vacuum pump.
4. A mass analysis device according to claim 1 or 2, wherein,
the prescribed information includes: and reminding of replacing the lubricating oil of the vacuum pump.
5. A mass analysis device according to claim 1 or 2, wherein,
the mobile phase comprises: any of phosphoric acid, sulfonic acid, and dimethyl sulfoxide.
6. A mass analysis device according to claim 1 or 2, wherein,
the sample comprises arsenic.
7. A method, comprising:
ionizing a sample and a mobile phase of the sample;
vacuum-pumping the sample and the mobile phase introduced into the ionized storage chamber;
acquiring a detection value as a consumption current value in the vacuum pump or a consumption power value in the vacuum pump; and
when the detection value is equal to or greater than the threshold value, predetermined information is notified to the user.
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JP2021-082219 | 2021-05-14 | ||
JP2021082219 | 2021-05-14 | ||
PCT/JP2022/010559 WO2022239438A1 (en) | 2021-05-14 | 2022-03-10 | Mass spectrometry device and method |
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CN117425825A true CN117425825A (en) | 2024-01-19 |
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CN202280034305.7A Pending CN117425825A (en) | 2021-05-14 | 2022-03-10 | Mass analysis device and method |
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JP (1) | JPWO2022239438A1 (en) |
CN (1) | CN117425825A (en) |
WO (1) | WO2022239438A1 (en) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS63268996A (en) * | 1987-04-24 | 1988-11-07 | Tokyo Electron Ltd | Deterioration warning device for oil rotary pump |
JPH07208369A (en) * | 1993-12-30 | 1995-08-08 | Jatco Corp | Deterioration monitoring device for vacuum pump |
EP1910959A1 (en) * | 2005-07-25 | 2008-04-16 | Metanomics GmbH | Means and methods for analyzing a sample by means of chromatography-mass spectrometry |
JP6167969B2 (en) * | 2014-03-31 | 2017-07-26 | 株式会社島津製作所 | Sampling unit and ICP mass spectrometer having the same |
JP7449235B2 (en) * | 2018-04-10 | 2024-03-13 | アイエムエー ライフ ノース アメリカ インコーポレーテッド | Freeze-drying process and equipment health monitoring |
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2022
- 2022-03-10 WO PCT/JP2022/010559 patent/WO2022239438A1/en active Application Filing
- 2022-03-10 CN CN202280034305.7A patent/CN117425825A/en active Pending
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WO2022239438A1 (en) | 2022-11-17 |
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