CN117387763B - Spectrometer test calibration method, device and equipment - Google Patents
Spectrometer test calibration method, device and equipment Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 56
- 229910052754 neon Inorganic materials 0.000 claims abstract description 64
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims abstract description 64
- 230000005469 synchrotron radiation Effects 0.000 claims abstract description 62
- 238000011088 calibration curve Methods 0.000 claims abstract description 53
- 238000001514 detection method Methods 0.000 claims description 27
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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Abstract
The invention discloses a method, a device and equipment for testing and calibrating a spectrometer, and belongs to the field of testing and calibrating of spectrometers. The spectrometer test calibration method comprises the following steps: obtaining a wavelength calibration curve of a spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer; obtaining experimental data of a spectrometer, wherein the experimental data is obtained by measuring a synchrotron radiation light source through the spectrometer; calculating a wavelength calibration curve according to each actual pixel value in sequence to obtain a reference wavelength value corresponding to each actual pixel value; and carrying out difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value to obtain a first difference value set, and judging that the wavelength calibration is successful if all the difference values in the first difference value set are in a first preset range. The measurement of the spectrometer to the synchrotron radiation light source is increased, and the reliability of a wavelength calibration curve fitted by the neon light source is judged by utilizing experimental data, so that the obtained wavelength calibration is ensured to be accurate, and the use reliability of the spectrometer is improved.
Description
Technical Field
The application belongs to the field of spectrometer testing, and particularly relates to a spectrometer testing and calibrating method, device and equipment.
Background
The spectrometer is a scientific instrument for decomposing light with complex components into spectral lines, and the spectrometer is used for capturing and analyzing the light information to obtain the elemental components and proportions contained in the tested object, so that the spectrometer is widely applied to detection of air pollution, water pollution, food sanitation, metal industry and the like. The extreme ultraviolet spectrometer is used as one of spectrometers, is a research tool widely applied to extreme ultraviolet spectral bands, can be used for advanced researches such as detection of nuclear fusion experimental reactor plasma spectrum, defect diagnosis of quantum devices, light source diagnosis in the field of photoetching machines and the like, and therefore, the accuracy and stability of the extreme ultraviolet spectrometer are particularly important, and meanwhile, the efficiency of the extreme ultraviolet spectrometer is one of important indexes, so that the extreme ultraviolet spectrometer has important significance for test research.
However, currently, when the wavelength of the extreme ultraviolet spectrometer is calibrated, a neon lamp is generally adopted as a standard light source, that is, a specific spectral line generated by the neon lamp is obtained from a wavelength range which can be detected by the extreme ultraviolet spectrometer, then pixel values corresponding to the specific spectral lines are recorded, and finally a polynomial fitting method is adopted to obtain a wavelength calibration curve, so that the whole pixel and the wavelength are mapped one by one, and the calibration of the wavelength is realized. However, since the intensity of the different neon lamps varies, the reliability of the wavelength curve of the euv spectrometer obtained by calibrating the neon lamps cannot be confirmed, resulting in the possibility of inaccurate wavelength calibration results.
Disclosure of Invention
The present application aims to solve at least one of the technical problems existing in the prior art. Therefore, the application provides a method, a device and equipment for testing and calibrating a spectrometer, which are used for obtaining new experimental data by adding measurement of the spectrometer to a synchrotron radiation light source and judging the reliability of a wavelength calibration curve fitted by a neon light source by utilizing the experimental data, thereby ensuring the accuracy of wavelength calibration obtained by the neon light source and improving the reliability of the spectrometer.
In a first aspect, the present application provides a method for calibrating a spectrometer, the method comprising:
obtaining a wavelength calibration curve of a spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer;
obtaining experimental data of the spectrometer, wherein the experimental data is obtained by measuring a synchrotron radiation light source through the spectrometer, and the experimental data comprises a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values;
calculating the wavelength calibration curve according to each actual pixel value in sequence to obtain a reference wavelength value corresponding to each actual pixel value;
and carrying out difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value to obtain a first difference value set, and judging that the wavelength calibration is successful if all the difference values in the first difference value set are in a first preset range.
According to the spectrometer test calibration method, the measurement of the spectrometer to the synchrotron radiation light source is added to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of the wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
According to one embodiment of the present application, the obtaining a wavelength calibration curve of a spectrometer includes:
controlling the neon lamp light source to irradiate the spectrometer so as to obtain an actual energy spectrogram;
determining a plurality of reference wavelength values according to an actual energy spectrogram, and recording a reference pixel value corresponding to each reference wavelength value;
and selecting a plurality of reference wavelength values and reference pixel points corresponding to the reference wavelength values to perform polynomial fitting, and taking the obtained fitting curve as the wavelength calibration curve.
According to an embodiment of the present application, the obtaining the first difference set further includes:
if at least one difference value in the first difference value set is not in the first preset range, judging that the wavelength calibration fails.
According to one embodiment of the present application, the obtaining experimental data of the spectrometer further includes:
Obtaining a first wavelength resolution corresponding to each reference wavelength value;
the obtaining experimental data of the spectrometer further comprises the following steps:
obtaining a second wavelength resolution corresponding to each actual wavelength value, wherein the first wavelength resolution corresponds to the second wavelength resolution one by one;
and carrying out difference operation on each first wavelength resolution and the corresponding second wavelength resolution to obtain a second difference set, and judging that the resolution calibration is successful if all differences in the second difference set are in a second preset range.
According to one embodiment of the present application, the obtaining experimental data of the spectrometer further comprises:
and obtaining an efficiency curve of the spectrometer, wherein the efficiency curve comprises a plurality of actual wavelength values and detection efficiency corresponding to each actual wavelength value.
According to one embodiment of the present application, the obtaining experimental data of the spectrometer includes:
controlling the synchrotron radiation light source to irradiate on the photodiode, and enabling the monochromator to start monochromatic light wavelength scanning to obtain the incident intensity of each actual wavelength value;
controlling the spectrometer to work, so that the monochromator starts to scan monochromatic light wavelength, and obtaining the emergent intensity and the actual pixel value of each actual wavelength value;
And obtaining the detection efficiency corresponding to each actual wavelength value according to the incident intensity and the emergent intensity of each actual wavelength value.
According to one embodiment of the present application, the controlling the spectrometer to operate further comprises:
closing a slit of the spectrometer to obtain the back intensity corresponding to each actual wavelength value;
opening a slit of a spectrometer;
the detection efficiency corresponding to each actual wavelength value is obtained according to the incident intensity and the emergent intensity of each actual wavelength value:
obtaining the actual intensity corresponding to each wavelength according to the emergent intensity of each actual wavelength value and the back intensity;
and obtaining the calibration efficiency corresponding to each wavelength according to the actual intensity and the incident intensity corresponding to each actual wavelength value.
According to one embodiment of the present application, the obtaining the incident intensity of each actual wavelength value further includes:
selecting the target wavelength value with the maximum incident intensity from all the actual wavelength values;
closing the photodiode and opening the spectrometer to enable the monochromator to emit monochromatic light with the target wavelength value;
and determining the acquisition time of the spectrometer, wherein the emergent intensity corresponding to each actual wavelength value is obtained by a detector of the spectrometer based on the acquisition time.
According to one embodiment of the present application, the controlling the synchrotron radiation light source to irradiate on the photodiode further includes:
and carrying out collimation treatment on the synchrotron radiation light source.
According to an embodiment of the present application, the collimating treatment on the synchrotron radiation light source further includes:
obtaining instrument parameters when the spectrometer measures a neon lamp light source as target parameters;
the synchrotron radiation light source, the monochromator, the photodiode and the spectrometer are sequentially arranged along the transmission direction of the light path;
and adjusting instrument parameters of the spectrometer to target parameters.
In a second aspect, the present application provides a spectrometer test calibration device comprising:
the first obtaining module is used for obtaining a wavelength calibration curve of the spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer;
the second obtaining module is used for obtaining experimental data of the spectrometer, wherein the experimental data is obtained by measuring a synchrotron radiation light source through the spectrometer, and the experimental data comprises a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values;
the judging module is used for calculating the wavelength calibration curve according to the actual pixel values in sequence to obtain reference wavelength values corresponding to the actual pixel values; the judging module is further configured to perform a difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value, to obtain a first difference set, where: and if all the differences in the first difference set are in the first preset range, judging that the wavelength calibration is successful.
According to the spectrometer test calibration device, the measurement of the spectrometer to the synchrotron radiation light source is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
In a third aspect, the present application provides a spectrometer test calibration device comprising:
a synchrotron radiation light source;
a monochromator and a photodiode which are sequentially arranged along the transmission direction of the light path; and
the spectrometer test calibration device as described above.
According to the spectrometer test calibration equipment, the measurement of the spectrometer to the synchrotron radiation light source is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
Additional aspects and advantages of the application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application.
Drawings
The foregoing and/or additional aspects and advantages of the present application will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings, wherein:
FIG. 1 is a schematic flow chart of a spectrometer test calibration method provided in an embodiment of the present application;
FIG. 2 is a schematic diagram of a difference curve generated from each first set of differences provided in an embodiment of the present application;
fig. 3 is a diagram of a practical energy spectrum obtained by measuring a neon light source by a spectrometer according to an embodiment of the present application;
FIG. 4 is a spectrum diagram corresponding to an actual wavelength value provided in an embodiment of the present application;
FIG. 5 is a schematic illustration of an efficiency curve provided by an embodiment of the present application;
FIG. 6 is a spectrum obtained by closing a slit of a spectrometer provided in an embodiment of the present application;
FIG. 7 is a schematic structural diagram of a spectrometer test calibration device provided in an embodiment of the present application;
FIG. 8 is a schematic structural diagram of a spectrometer test calibration device provided in an embodiment of the present application;
fig. 9 is a schematic structural diagram of an electronic device according to an embodiment of the present application;
fig. 10 is a hardware schematic of an electronic device according to an embodiment of the present application.
Detailed Description
Technical solutions in the embodiments of the present application will be clearly described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application are within the scope of the protection of the present application.
The terms first, second and the like in the description and in the claims, are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged, as appropriate, such that embodiments of the present application may be implemented in sequences other than those illustrated or described herein, and that the objects identified by "first," "second," etc. are generally of a type and not limited to the number of objects, e.g., the first object may be one or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.
The spectrometer test calibration method, the spectrometer test calibration device 600, the spectrometer test calibration apparatus, the electronic device and the readable storage medium provided in the embodiments of the present application will be described in detail below with reference to the accompanying drawings by specific embodiments and application scenarios thereof.
The spectrometer test calibration method can be applied to a terminal, and can be specifically executed by hardware or software in the terminal.
The terminal includes, but is not limited to, a portable communication device such as a mobile phone or tablet having a touch sensitive surface (e.g., a touch screen display and/or a touch pad). It should also be appreciated that in some embodiments, the terminal may not be a portable communication device, but rather a desktop computer having a touch-sensitive surface (e.g., a touch screen display and/or a touch pad).
In the following various embodiments, a terminal including a display and a touch sensitive surface is described. However, it should be understood that the terminal may include one or more other physical user interface devices such as a physical keyboard, mouse, and joystick.
The execution main body of the spectrometer test calibration method provided by the embodiment of the application may be an electronic device or a functional module or a functional entity capable of implementing the spectrometer test calibration method in the electronic device, where the electronic device includes, but is not limited to, a mobile phone, a tablet computer, a camera, a wearable device, and the like, and the spectrometer test calibration method provided by the embodiment of the application is described below by taking the electronic device as an execution main body as an example.
As shown in fig. 1, the spectrometer test calibration method includes: step 110, step 120, step 130 and step 140.
Step 110, obtaining a wavelength calibration curve of the spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer.
It should be noted that a neon light source is a standard light source that excites a characteristic spectrum by high pressure, and provides a characteristic spectrum in the wavelength range of 5 nanometers (nm) to 20 nm. It is understood that the steps and principles of measuring neon light source by a spectrometer to obtain a wavelength calibration curve are well known in the art, and this embodiment is not specifically described herein.
In this embodiment, the types of spectrometers include, but are not limited to, extreme ultraviolet spectrometers.
It can be appreciated that, since the wavelength calibration curve is obtained by means of polynomial fitting and the number of characteristic spectral lines emitted by the neon light source in the wavelength range of 5-20nm is limited, the reliability of the neon light source calibration method needs to be determined by determining the accuracy of the wavelength calibration curve fitting, so that the same neon light source is used for carrying out wavelength calibration on other spectrometers later.
Step 120, obtaining experimental data of a spectrometer, wherein the experimental data is obtained by measuring the synchrotron radiation light source 701 by the spectrometer, and the experimental data includes a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values.
The synchrotron radiation light source 701 is a physical device for generating synchrotron radiation, and is a high-performance novel strong light source for generating synchrotron radiation when deflected in a magnetic field by relativistic electrons (or positrons). The monochromatic light with accurate wavelength values can be generated, so that the pixel value of the monochromatic light with each wavelength value, which is actually obtained by a spectrometer, can be obtained, and the accuracy of the wavelength calibration curve obtained by the neon lamp light source can be further judged.
And 130, sequentially calculating the wavelength calibration curve according to each actual pixel value to obtain a reference wavelength value corresponding to each actual pixel value.
It should be noted that, since the wavelength calibration curve is used to represent the mapping relationship between the wavelength and the pixel, the actual wavelength value and the actual pixel value are known and accurate, so as to obtain the reference wavelength value corresponding to each actual pixel value obtained by the wavelength calibration curve, and the reference wavelength value and the actual wavelength value are compared to determine the reliability of the fitted wavelength calibration curve, so as to determine whether the wavelength calibration by using the neon lamp light source is reliable.
And 140, performing difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value to obtain a first difference value set, and if all the difference values in the first difference value set are in a first preset range, judging that the wavelength calibration is successful.
It can be understood that if the difference values are all within the first preset range, it is indicated that the wavelength calibration of the spectrometer by the neon light source is accurate and reliable. It should be noted that, the specific value of the first preset range may be adjusted according to the actual requirement, which is not particularly limited in this embodiment. The first preset range may be, for example, specifically [ -0.02,0.08].
In connection with fig. 2, a schematic diagram of a difference curve generated from the first difference sets is schematically shown, with the wavelength on the abscissa and the difference on the ordinate. Referring to fig. 2, the difference obtained for the wavelength of 16nm is about 0.005, which is within the first preset range, which indicates that the calibration efficiency of the neon light source for the wavelength of 16nm is more accurate.
According to the spectrometer test calibration method provided by the embodiment of the application, the measurement of the spectrometer to the synchrotron radiation light source 701 is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of the wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
In some embodiments, the obtaining a first set of differences in step 140 further comprises:
if at least one difference value in the first difference value set is not in the first preset range, judging that the wavelength calibration fails.
It can be understood that when the difference value is not within the first preset range, it reflects that the accuracy of the wavelength calibration curve fitted by the neon light source is low, and further reflects that the calibration method using the test data of the neon light source is not accurate enough, and the improvement of the algorithm or the test method is needed.
In some embodiments, obtaining a wavelength calibration curve for a spectrometer in step 110 includes:
controlling a neon lamp light source to irradiate to a spectrometer so as to obtain an actual energy spectrogram;
determining a plurality of reference wavelength values according to the actual energy spectrogram, and recording a reference pixel value corresponding to each reference wavelength value;
and selecting a plurality of reference wavelength values and reference pixel points corresponding to the reference wavelength values to perform polynomial fitting, and taking the obtained fitting curve as a wavelength calibration curve.
Referring to fig. 3, an actual spectrum obtained by measuring a neon light source by a spectrometer is exemplarily shown, an abscissa represents a pixel value, an ordinate represents an illumination intensity, and each reference wavelength value, and a pixel value and an illumination intensity corresponding to each reference wavelength value are determined based on a known reference wavelength value existing in 5-20 nm and each peak in fig. 3, which are obtained by measuring the neon light source.
Three reference wavelength values and corresponding reference pixel values are then selected therefrom, according to the fitted wavelength calibration curve formula λ=a+b×pixel+c×pixel 2 The constants a, b and c are calculated to obtain a wavelength calibration curve obtained by measuring neon light sources using the spectrometer. Where λ represents the wavelength and pixel represents the pixel.
In some embodiments, the obtaining experimental data of the spectrometer in step 120 further comprises:
and obtaining a first wavelength resolution corresponding to each reference wavelength value.
It will be appreciated that, in conjunction with the illustration of fig. 3, an actual spectrum obtained by measuring a neon light source by a spectrometer is exemplarily shown, an abscissa represents a pixel value, an ordinate represents an illumination intensity, each reference wavelength value is determined based on each peak in fig. 3, and a first wavelength resolution corresponding to each reference wavelength value is obtained by fitting a half-width of each peak in the actual spectrum.
The experimental data of the spectrometer is obtained in step 120, which further comprises:
obtaining a second wavelength resolution corresponding to each actual wavelength value, wherein the first wavelength resolution corresponds to the second wavelength resolution one by one;
performing difference operation on each first wavelength resolution and the corresponding second wavelength resolution to obtain a second difference set, and judging that the resolution calibration is successful if all differences in the second difference set are in a second preset range; if at least one difference value in the second difference value set is not in the second preset range, judging that the resolution calibration fails.
It can be understood that, since each actual wavelength value has a corresponding spectrum, and as shown in fig. 4, the abscissa in the spectrum represents the wavelength value, and the ordinate represents the illumination intensity, and the half-width of the peak in the spectrum is fitted, so that the wavelength resolution corresponding to the actual wavelength value corresponding to the spectrum can be obtained.
It should be noted that, since the reference wavelength value and the actual wavelength value are in one-to-one correspondence, the first wavelength resolution corresponding to the reference wavelength value and the second wavelength resolution corresponding to the actual wavelength value are also in one-to-one correspondence, so as to determine whether the wavelength resolution obtained by the neon light source is reliable.
It can be understood that if the difference values are within the second preset range, it is indicated that the resolution calibration of the spectrometer by the neon light source is accurate and reliable. When the difference value is not in the second preset range, the fact that the wavelength resolution precision calibrated by the neon light source is low is reflected, and further the fact that the method for calibrating by using the test data of the neon light source is not accurate enough is reflected, and improvement of an algorithm or a test method and the like is needed. It should be noted that, the specific value of the second preset range may be adjusted according to the actual requirement, which is not particularly limited in this embodiment.
In the related art, when calibrating the efficiency of a spectrometer (such as an extreme ultraviolet spectrometer), the intensity stability of a neon light source is not high, so that the reliability of the efficiency of the extreme ultraviolet spectrometer obtained by calibrating the neon light source cannot be confirmed, which results in that the efficiency calibration is rarely performed and related data is lacking.
In some embodiments, the experimental data of the spectrometer is obtained in step 140, which further comprises:
an efficiency curve of the spectrometer is obtained, wherein the efficiency curve comprises a plurality of actual wavelength values and detection efficiency corresponding to each actual wavelength value.
It can be appreciated that, since the detection efficiency is related to the illumination intensity of the light source, and the intensity of the neon light source is not controllable, the detection efficiency cannot be obtained, and then the detection efficiency is obtained by using the synchrotron radiation light source 701 with controllable and accurate illumination intensity, so as to improve the performance understanding of the spectrometer, and facilitate the use of the subsequent spectrometer. In connection with fig. 5, which shows an exemplary diagram of an efficiency curve, the abscissa indicates wavelength and the ordinate indicates detection efficiency, it can be seen from the figure that the spectrometer detects a wavelength of 16nm with an efficiency of 20.5%.
In some embodiments, the experimental data of the spectrometer obtained in step 120 specifically includes step 121, step 122 and step 123.
Step 121, controlling the synchrotron radiation light source 701 to irradiate on the photodiode, and enabling the monochromator to start to scan monochromatic wavelength to obtain the incident intensity of each actual wavelength value.
It can be appreciated that, considering that the intensity of the synchrotron radiation light source 701 will vary with the intensity of different wavelengths, by directly irradiating the synchrotron radiation light source 701 on the photodiode (i.e. the photodiode is located in the optical path propagation direction of the synchrotron radiation light source 701), and dispersing the synchrotron radiation light source 701 into monochromatic light arranged according to the wavelengths by using a monochromator, the photodiode obtains the incident intensity of the monochromatic light of each actual wavelength value, and the accuracy of obtaining the actual pixel value, wavelength resolution and detection efficiency corresponding to each actual wavelength value wavelength is ensured.
Step 122, controlling the spectrometer to work, so that the monochromator starts to scan monochromatic light wavelength, and obtaining the emergent intensity and the actual pixel value of each actual wavelength value.
It can be understood that after the incident intensities corresponding to the actual wavelength values are obtained, the photodiodes are turned off (i.e., the photodiodes are not located in the optical path propagation direction of the synchrotron radiation light source 701), and the synchrotron radiation light source 701 is dispersed into monochromatic light arranged according to the actual wavelength values by using a monochromator and the detector of the spectrometer is sequentially received, so that the detector obtains the emergent intensity corresponding to the actual wavelength values. Illustratively, a knotAs shown in FIG. 4, it can be seen that the emission intensity of the actual wavelength value of about 13.5nm is 1.52X10 4 The unit of the incident intensity and the outgoing intensity is the photon number.
And 123, obtaining the detection efficiency corresponding to each actual wavelength value according to the incident intensity and the emergent intensity of each actual wavelength value. It can be understood that the calibration efficiency corresponding to the actual wavelength value can be obtained by calculating the ratio of the emergent intensity to the incident intensity. The efficiency curve is then obtained by setting the abscissa as the wavelength and the ordinate as the coordinate axis of the detection efficiency, and connecting the points (i.e. the detection efficiency representing the actual wavelength values under the measurement synchrotron radiation light source 701).
In some embodiments, controlling the operation of the spectrometer in step 122 further comprises:
closing a slit of the spectrometer to obtain the back intensity corresponding to each actual wavelength value;
the slit of the spectrometer was opened.
It can be appreciated that, considering that the spectrometer itself has a certain light transmittance, the accuracy of the obtained efficiency curve is further improved by obtaining the back intensity corresponding to each actual wavelength value of the spectrometer. It should be noted that the slit and the detector of the spectrometer are all well known in the art, and are not explained in detail herein.
It should be noted that, in connection with fig. 6, a spectrum obtained by closing a slit of a spectrometer is exemplarily shown, an abscissa represents a pixel value, an ordinate represents an illumination intensity, and a back intensity corresponding to each actual wavelength value is determined according to each peak.
In some embodiments, obtaining the detection efficiency corresponding to each actual wavelength value according to the incident intensity and the emergent intensity of each actual wavelength value in step 123 includes:
step 1231, obtaining the actual intensity corresponding to each actual wavelength value according to the exit intensity and the back intensity of each actual wavelength value.
It will be appreciated that the emission intensity at a wavelength of 13.5nm is assumed to be 1.52X10 4 The back strength is 0.03X10 4 I.e. the actual intensity of the actual wavelength value is 1.52×10 4 -0.03×10 4 =1.49×10 4 。
Step 1232, obtaining the detection efficiency corresponding to each actual wavelength value according to the actual intensity and the incident intensity corresponding to each actual wavelength value.
It will be appreciated that the actual wavelength value of 13.5nm is assumed to be 5.56X10 4 The actual strength was 1.49×10 4 The actual wavelength value corresponds to a calibration efficiency of (1.49×10) 4 ）÷（5.56×10 4 ）=0.268。
In some embodiments, obtaining the detection efficiency corresponding to each actual wavelength value further includes:
obtaining an efficiency parameter eta 1 of the photodiode, and obtaining detection efficiency, wherein: detection efficiency η= (I3-I2)/(I1/η1).
Note that I3 is the emission intensity, I2 is the back intensity, and I1 is the incident intensity.
In some embodiments, obtaining the incident intensity for each actual wavelength value in step 121 further comprises: and then further comprises:
selecting the target wavelength value with the maximum incident intensity from all the actual wavelength values;
turning off the photodiode and turning on the spectrometer to make the monochromator emit monochromatic light with the target wavelength value;
and determining the acquisition time of the spectrometer, wherein the emergent intensity corresponding to each actual wavelength value is obtained by a detector of the spectrometer based on the acquisition time.
It will be appreciated that in order to prevent overexposure and saturation of the detector, the time required for the detector to absorb monochromatic light of maximum incident intensity needs to be determined, taking into account the difference in time required for the detector to absorb monochromatic light of different actual wavelength values. When the monochromator emits monochromatic light with a target wavelength value onto the detector, the exposure time of the detector is continuously adjusted from small to large to determine the current exposure time T when the detector is saturated, so as to obtain acquisition time t=t- Δt, wherein Δt is the unit time of adjusting the exposure time of the detector each time. Illustratively, t=0.4 s, Δt=0.1 s, t=0.4 s-0.1 s=0.3 s.
In some embodiments, the controlling synchrotron radiation light source 701 of step 121 is irradiated on a photodiode, and further includes:
the synchrotron radiation light source 701 is collimated.
It will be appreciated that by collimating the synchrotron radiation light source 701, it is ensured that the synchrotron radiation light source 701 is able to strike the detector after passing through the monochromator, ensuring that the actual pixel value, wavelength resolution and efficiency curve are obtained.
In this embodiment, the collimation treatment for the synchrotron radiation light source 701 includes:
the photodiode is turned off (i.e., the photodiode is not in the direction of propagation of the optical path of the synchrotron radiation light source 701), and the light source parameters of the synchrotron radiation light source 701 and the pose of the spectrometer are adjusted until the detector can obtain the intensity of the synchrotron radiation light source 701. The light source parameters include, but are not limited to, luminous flux, illuminance, light intensity, brightness, color temperature, color rendering property, and the like.
In some embodiments, the collimation treatment is performed on the synchrotron radiation light source 701, which further includes:
obtaining instrument parameters when a spectrometer measures a neon light source as target parameters;
a synchrotron radiation light source 701, a monochromator, a photodiode and a spectrometer are sequentially arranged along the transmission direction of the light path;
and adjusting instrument parameters of the spectrometer to target parameters.
It can be understood that by making the instrument parameters of the spectrometer be target parameters when the wavelength calibration curve and the actual pixel values are obtained, the interference error in comparison is further reduced, and the accuracy is improved.
The target parameters include, but are not limited to, the model of the detector, the cooling temperature of the detector, the size of the slit opening, and the position of the detector. When the spectrometer measures a neon light source, the position of the detector refers to the distance between the detector and the neon light source; when the spectrometer measures the synchrotron radiation light source 701, the detector position refers to the distance between the detector and the synchrotron radiation light source 701.
The whole spectrometer test calibration method comprises the following steps:
obtaining a wavelength calibration curve of the spectrometer and a first wavelength resolution corresponding to each reference wavelength value;
obtaining instrument parameters when a spectrometer measures a neon light source as target parameters;
A synchrotron radiation light source 701, a monochromator, a photodiode and a spectrometer are sequentially arranged along the transmission direction of the light path;
adjusting instrument parameters of the spectrometer to target parameters;
collimation treatment is carried out on the synchrotron radiation light source 701;
controlling the synchrotron radiation light source 701 to irradiate on a photodiode, and enabling the monochromator to start monochromatic light wavelength scanning to obtain the incident intensity of each actual wavelength value;
selecting the target wavelength value with the maximum incident intensity from all the actual wavelength values;
closing the photodiode and opening the spectrometer to enable the monochromator to emit monochromatic light with a target wavelength value to the detector;
determining the acquisition time of a spectrometer;
controlling the spectrometer to work and closing the slit of the spectrometer to obtain the back intensity corresponding to each actual wavelength value;
opening a slit of a spectrometer;
enabling the monochromator to start monochromatic light wavelength scanning to obtain the emergent intensity and the actual pixel value of each actual wavelength value;
calculating a wavelength calibration curve according to each actual pixel value in sequence to obtain a reference wavelength value corresponding to each actual pixel value;
performing difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value to obtain a first difference set, and judging that the wavelength calibration is successful if all the differences in the first difference set are in a first preset range; if at least one difference value in the first difference value set is not in the first preset range, judging that the wavelength calibration fails;
Obtaining a second wavelength resolution corresponding to each actual wavelength value;
performing difference operation on each first wavelength resolution and the corresponding second wavelength resolution to obtain a second difference set, and judging that the resolution calibration is successful if the differences in the second difference set are all within a second preset range; if at least one difference value in the second difference value set is not in the second preset range, judging that the resolution calibration fails;
according to the emergent intensity and the back intensity corresponding to each actual wavelength value, obtaining the actual intensity corresponding to each actual wavelength value;
according to the actual intensity and the incident intensity corresponding to each actual wavelength value, obtaining the calibration efficiency corresponding to each actual wavelength value;
and drawing an efficiency curve according to each actual wavelength value and the detection efficiency corresponding to each actual wavelength value.
According to the spectrometer test calibration method provided by the embodiment of the application, the execution main body can be the spectrometer test calibration device 600. In this embodiment, taking the spectrometer test calibration device 600 as an example to execute the spectrometer test calibration method, the spectrometer test calibration device 600 provided in the embodiment of the present application is described.
The embodiment of the application also provides a spectrometer testing and calibrating device 600.
As shown in fig. 7, the spectrometer test calibration device 600 includes: a first obtaining module 610, a second obtaining module 620, and a judging module 630. The first obtaining module 610 is configured to obtain a wavelength calibration curve of the spectrometer, where the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer; the second obtaining module 620 is configured to obtain experimental data of the spectrometer, where the experimental data is obtained by measuring the synchrotron radiation light source 701 by the spectrometer, and the experimental data includes a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values; the judging module 630 is configured to calculate the wavelength calibration curve according to each actual pixel value in sequence, so as to obtain a reference wavelength value corresponding to each actual pixel value; the judging module 630 is further configured to perform a difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value, to obtain a first difference set, where: and if all the differences in the first difference set are in the first preset range, judging that the wavelength calibration is successful.
According to the spectrometer test calibration device 600 provided by the embodiment of the application, the measurement of the spectrometer to the synchrotron radiation light source 701 is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of the wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
In some embodiments, the determining module 630 is configured to, after obtaining the first set of differences of the curve, further include: if at least one difference value in the first difference value set is not in the first preset range, judging that the wavelength calibration fails.
In some embodiments, the first obtaining module 610 is configured to obtain a wavelength calibration curve of a spectrometer, including:
controlling a neon lamp light source to irradiate to a spectrometer so as to obtain an actual energy spectrogram;
determining a plurality of reference wavelength values according to the actual energy spectrogram, and recording a reference pixel value corresponding to each reference wavelength value;
and selecting a plurality of reference wavelength values and reference pixel points corresponding to the reference wavelength values to perform polynomial fitting, and taking the obtained fitting curve as a wavelength calibration curve.
In some embodiments, the first obtaining module 610 is further configured to obtain a first wavelength resolution corresponding to each reference wavelength value, and the second obtaining module 620 is further configured to obtain a wavelength resolution corresponding to each actual wavelength value; the judging module 630 is further configured to perform a difference operation on each first wavelength resolution and a corresponding second wavelength resolution to obtain a second difference set, and if all differences in the second difference set are within a second preset range, judge that the resolution calibration is successful; if at least one difference value in the second difference value set is not in the second preset range, judging that the resolution calibration fails.
In some embodiments, the second obtaining module 620 is configured to obtain experimental data of the spectrometer and then obtain an efficiency curve of the spectrometer, where the efficiency curve includes a plurality of actual wavelength values and detection efficiencies corresponding to the actual wavelength values.
In some embodiments, the second obtaining module 620 is configured to obtain experimental data, including the steps of:
controlling the synchrotron radiation light source 701 to irradiate on a photodiode, and enabling the monochromator to start monochromatic light wavelength scanning to obtain the incident intensity of each actual wavelength value;
controlling the spectrometer to work, so that the monochromator starts to scan monochromatic light wavelength, and obtaining the emergent intensity and the actual pixel value of each actual wavelength value;
and obtaining the detection efficiency corresponding to each actual wavelength value according to the incident intensity and the emergent intensity of each actual wavelength value.
In some embodiments, the second obtaining module 620 is configured to control the spectrometer to operate, and then further includes:
closing a slit of the spectrometer to obtain the back intensity corresponding to each actual wavelength value;
opening a slit of a spectrometer;
according to the incident intensity and the emergent intensity of each actual wavelength value, the detection efficiency corresponding to each actual wavelength value is obtained:
according to the emergent intensity and the back intensity of each actual wavelength value, obtaining the actual intensity corresponding to each wavelength;
And obtaining the calibration efficiency corresponding to each wavelength according to the actual intensity and the incident intensity corresponding to each actual wavelength value.
In some embodiments, the second obtaining module 620 is configured to obtain the incident intensity of each actual wavelength value, and then further includes:
selecting the target wavelength value with the maximum incident intensity from all the actual wavelength values;
turning off the photodiode and turning on the spectrometer to make the monochromator emit monochromatic light with the target wavelength value;
and determining the acquisition time of the spectrometer, wherein the emergent intensity corresponding to each actual wavelength value is obtained by a detector of the spectrometer based on the acquisition time.
In some embodiments, the second obtaining module 620 is configured to control the synchrotron radiation light source 701 to irradiate on the photodiode, and further includes:
the synchrotron radiation light source 701 is collimated.
In some embodiments, the second obtaining module 620 is configured to perform a collimation treatment on the synchrotron radiation light source 701, and further includes:
obtaining instrument parameters when a spectrometer measures a neon light source as target parameters;
a synchrotron radiation light source 701, a monochromator, a photodiode and a spectrometer are sequentially arranged along the transmission direction of the light path;
and adjusting instrument parameters of the spectrometer to target parameters.
The spectrometer test calibration device 600 in the embodiment of the present application may be an electronic device, or may be a component in an electronic device, such as an integrated circuit or a chip. The electronic device may be a terminal, or may be other devices than a terminal. By way of example, the electronic device may be a mobile phone, tablet computer, notebook computer, palm computer, vehicle-mounted electronic device, mobile internet appliance (Mobile Internet Device, MID), augmented reality (augmented reality, AR)/Virtual Reality (VR) device, robot, wearable device, ultra-mobile personal computer, UMPC, netbook or personal digital assistant (personal digital assistant, PDA), etc., but may also be a server, network attached storage (Network Attached Storage, NAS), personal computer (personal computer, PC), television (TV), teller machine or self-service machine, etc., and the embodiments of the present application are not limited in particular.
The spectrometer test calibration device 600 in the embodiment of the present application may be a device with an operating system. The operating system may be a microsoft (Windows) operating system, an Android operating system, an IOS operating system, or other possible operating systems, which are not specifically limited in the embodiments of the present application.
The spectrometer test calibration device 600 provided in the embodiment of the present application can implement each process implemented by the embodiments of the methods of fig. 1 to 6, and in order to avoid repetition, a detailed description is omitted here.
The embodiment of the application also provides a spectrometer test calibration device.
As shown in fig. 8, the spectrometer test calibration device includes a synchrotron radiation light source 701, a monochromator, a photodiode, and the above-mentioned spectrometer test calibration apparatus 600; wherein, monochromator and photodiode set gradually along the direction of transmission of light path.
According to the spectrometer test calibration equipment provided by the embodiment of the application, the measurement of the spectrometer to the synchrotron radiation light source 701 is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of the wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
In some embodiments, the spectrometer test calibration apparatus further comprises a focusing system and a reflectance meter, the focusing system and the monochromator being integrally configured, the reflectance meter and the photodiode being integrally configured. I.e. the focusing system, monochromatic light, reflectance meter and photodiode, constitute a metering beam line 702, by docking the spectrometer with the metering beam line 702 to ensure that the spectrometer measures the synchrotron radiation light source 701 to obtain a second calibration efficiency curve. It should be noted that the focusing system, monochromatic light, reflectometer and photodiode are all well known in the art, and this is not specifically described in the art.
In some embodiments, the spectrometer test calibration apparatus further comprises a neon light source for causing the spectrometer to obtain a wavelength calibration curve by measuring the neon light source.
In some embodiments, as shown in fig. 9, the embodiment of the present application further provides an electronic device 800, including a processor 801, a memory 802, and a computer program stored in the memory 802 and capable of running on the processor 801, where the program when executed by the processor 801 implements the respective processes of the above-mentioned embodiment of the calibration method for testing a spectrometer, and the same technical effects can be achieved, so that repetition is avoided, and no further description is given here.
The electronic device in the embodiment of the application includes the mobile electronic device and the non-mobile electronic device.
Fig. 10 is a schematic hardware structure of an electronic device implementing an embodiment of the present application.
The electronic device 900 includes, but is not limited to: radio frequency unit 901, network module 902, audio output unit 903, input unit 904, sensor 905, display unit 906, user input unit 907, interface unit 908, memory 909, and processor 910.
Those skilled in the art will appreciate that the electronic device 900 may also include a power source (e.g., a battery) for powering the various components, which may be logically connected to the processor 910 by a power management system to perform functions such as managing charge, discharge, and power consumption by the power management system. The electronic device structure shown in fig. 10 does not constitute a limitation of the electronic device, and the electronic device may include more or less components than shown, or may combine certain components, or may be arranged in different components, which are not described in detail herein.
According to the electronic equipment provided by the embodiment of the application, the measurement of the spectrometer to the synchrotron radiation light source 701 is increased to obtain new experimental data, and the reliability of the wavelength calibration curve fitted by the neon light source is judged by utilizing the experimental data, so that the accuracy of wavelength calibration obtained by the neon light source is ensured, and the use reliability of the spectrometer is improved.
It is understood that in the embodiment of the present application, the input unit 904 may include a graphics processor (Graphics Processing Unit, GPU) 9041 and a microphone 9042, and the graphics processor 9041 processes image data of still pictures or video obtained by an image capturing device (such as a camera) in a video capturing mode or an image capturing mode. The display unit 906 may include a display panel 9061, and the display panel 9061 may be configured in the form of a liquid crystal display, an organic light emitting diode, or the like. The user input unit 907 includes at least one of a touch panel 9071 and other input devices 9072. Touch panel 9071, also referred to as a touch screen. The touch panel 9071 may include two parts, a touch detection device and a touch controller. Other input devices 9072 may include, but are not limited to, a physical keyboard, function keys (e.g., volume control keys, switch keys, etc.), a trackball, a mouse, a joystick, and so forth, which are not described in detail herein.
The memory 909 may be used to store software programs as well as various data. The memory 909 may mainly include a first storage area storing programs or instructions and a second storage area storing data, wherein the first storage area may store an operating system, application programs or instructions (such as a sound playing function, an image playing function, etc.) required for at least one function, and the like. Further, the memory 909 may include a volatile memory or a nonvolatile memory, or the memory 909 may include both volatile and nonvolatile memories. The nonvolatile Memory may be a Read-Only Memory (ROM), a Programmable ROM (PROM), an Erasable PROM (EPROM), an Electrically Erasable EPROM (EEPROM), or a flash Memory. The volatile memory may be random access memory (Random Access Memory, RAM), static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double Data Rate SDRAM (ddr SDRAM), enhanced SDRAM (Enhanced SDRAM), synchronous DRAM (SLDRAM), and Direct RAM (DRRAM). Memory 909 in embodiments of the present application includes, but is not limited to, these and any other suitable types of memory.
Processor 910 may include one or more processing units; the processor 910 integrates an application processor that primarily processes operations involving an operating system, user interface, application programs, etc., and a modem processor that primarily processes wireless communication signals, such as a baseband processor. It will be appreciated that the modem processor described above may not be integrated into the processor 910.
The embodiment of the application further provides a non-transitory computer readable storage medium, on which a computer program is stored, which when executed by a processor, implements each process of the above-mentioned spectrometer test calibration method embodiment, and can achieve the same technical effect, so that repetition is avoided, and no further description is provided here.
The processor is a processor in the electronic device in the above embodiment. Readable storage media include computer readable storage media such as computer readable memory ROM, random access memory RAM, magnetic or optical disks, and the like.
The embodiment of the application also provides a computer program product, which comprises a computer program, wherein the computer program realizes the spectrometer test calibration method when being executed by a processor.
The processor is a processor in the electronic device in the above embodiment. Readable storage media include computer readable storage media such as computer readable memory ROM, random access memory RAM, magnetic or optical disks, and the like.
The embodiment of the application further provides a chip, the chip includes a processor and a communication interface, the communication interface is coupled with the processor, the processor is used for running a program or instructions, each process of the above spectrometer test calibration method embodiment is realized, the same technical effect can be achieved, and in order to avoid repetition, the description is omitted here.
It should be understood that the chips referred to in the embodiments of the present application may also be referred to as system-on-chip chips, chip systems, or system-on-chip chips, etc.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Furthermore, it should be noted that the scope of the methods and apparatus in the embodiments of the present application is not limited to performing the functions in the order shown or discussed, but may also include performing the functions in a substantially simultaneous manner or in an opposite order depending on the functions involved, e.g., the described methods may be performed in an order different from that described, and various steps may also be added, omitted, or combined. Additionally, features described with reference to certain examples may be combined in other examples.
From the above description of the embodiments, it will be clear to those skilled in the art that the above-described embodiment method may be implemented by means of software plus a necessary general hardware platform, but of course may also be implemented by means of hardware, but in many cases the former is a preferred embodiment. Based on such understanding, the technical solutions of the present application may be embodied essentially or in a part contributing to the prior art in the form of a computer software product stored in a storage medium (such as ROM/RAM, magnetic disk, optical disk), comprising several instructions for causing a terminal (which may be a mobile phone, a computer, a server, or a network device, etc.) to perform the methods described in the embodiments of the present application.
The embodiments of the present application have been described above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, which are merely illustrative and not restrictive, and many forms may be made by those of ordinary skill in the art without departing from the spirit of the present application and the scope of the claims, which are also within the protection of the present application.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present application have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the application, the scope of which is defined by the claims and their equivalents.
Claims (12)
1. A spectrometer testing and calibration method, comprising:
obtaining a wavelength calibration curve of a spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer;
Obtaining experimental data of the spectrometer, wherein the experimental data is obtained by measuring a synchrotron radiation light source through the spectrometer, and the experimental data comprises a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values;
calculating the wavelength calibration curve according to each actual pixel value in sequence to obtain a reference wavelength value corresponding to each actual pixel value;
and carrying out difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value to obtain a first difference value set, and judging that the wavelength calibration is successful if all the difference values in the first difference value set are in a first preset range.
2. The method of claim 1, wherein obtaining a wavelength calibration curve for a spectrometer comprises:
controlling the neon lamp light source to irradiate the spectrometer so as to obtain an actual energy spectrogram;
determining a plurality of reference wavelength values according to an actual energy spectrogram, and recording a reference pixel value corresponding to each reference wavelength value;
and selecting a plurality of reference wavelength values and reference pixel points corresponding to the reference wavelength values to perform polynomial fitting, and taking the obtained fitting curve as the wavelength calibration curve.
3. The method of calibrating a spectrometer testing according to claim 1, wherein the obtaining a first set of differences further comprises:
if at least one difference value in the first difference value set is not in the first preset range, judging that the wavelength calibration fails.
4. The method for calibrating a spectrometer according to claim 1, wherein the obtaining experimental data of the spectrometer further comprises:
obtaining a first wavelength resolution corresponding to each reference wavelength value;
the obtaining experimental data of the spectrometer further comprises the following steps:
obtaining a second wavelength resolution corresponding to each actual wavelength value, wherein the first wavelength resolution corresponds to the second wavelength resolution one by one;
and carrying out difference operation on each first wavelength resolution and the corresponding second wavelength resolution to obtain a second difference set, and judging that the resolution calibration is successful if all differences in the second difference set are in a second preset range.
5. The method of any one of claims 1 to 4, wherein the obtaining experimental data of the spectrometer further comprises:
And obtaining an efficiency curve of the spectrometer, wherein the efficiency curve comprises a plurality of actual wavelength values and detection efficiency corresponding to each actual wavelength value.
6. The method of claim 5, wherein obtaining experimental data for the spectrometer comprises:
controlling the synchrotron radiation light source to irradiate on the photodiode, and enabling the monochromator to start monochromatic light wavelength scanning to obtain the incident intensity of each actual wavelength value;
controlling the spectrometer to work, so that the monochromator starts to scan monochromatic light wavelength, and obtaining the emergent intensity and the actual pixel value of each actual wavelength value;
and obtaining the detection efficiency corresponding to each actual wavelength value according to the incident intensity and the emergent intensity of each actual wavelength value.
7. The method of spectrometer test calibration according to claim 6, wherein said controlling said spectrometer operation further comprises, thereafter:
closing a slit of the spectrometer to obtain the back intensity corresponding to each actual wavelength value;
opening a slit of a spectrometer;
the detection efficiency corresponding to each actual wavelength value is obtained according to the incident intensity and the emergent intensity of each actual wavelength value:
Obtaining the actual intensity corresponding to each wavelength according to the emergent intensity of each actual wavelength value and the back intensity;
and obtaining the calibration efficiency corresponding to each wavelength according to the actual intensity and the incident intensity corresponding to each actual wavelength value.
8. The method of calibrating a spectrometer according to claim 6, wherein the obtaining the incident intensity for each actual wavelength value further comprises:
selecting the target wavelength value with the maximum incident intensity from all the actual wavelength values;
closing the photodiode and opening the spectrometer to enable the monochromator to emit monochromatic light with the target wavelength value;
and determining the acquisition time of the spectrometer, wherein the emergent intensity corresponding to each actual wavelength value is obtained by a detector of the spectrometer based on the acquisition time.
9. The method of calibrating a spectrometer testing according to claim 6, wherein said controlling the synchrotron radiation light source to impinge on a photodiode further comprises, before:
and carrying out collimation treatment on the synchrotron radiation light source.
10. The method of calibrating a spectrometer according to claim 9, wherein said collimating the synchrotron radiation light source further comprises:
Obtaining instrument parameters when the spectrometer measures a neon lamp light source as target parameters;
the synchrotron radiation light source, the monochromator, the photodiode and the spectrometer are sequentially arranged along the transmission direction of the light path;
and adjusting instrument parameters of the spectrometer to target parameters.
11. A spectrometer testing calibration device, comprising:
the first obtaining module is used for obtaining a wavelength calibration curve of the spectrometer, wherein the wavelength calibration curve is obtained by measuring a neon light source through the spectrometer;
the second obtaining module is used for obtaining experimental data of the spectrometer, wherein the experimental data is obtained by measuring a synchrotron radiation light source through the spectrometer, and the experimental data comprises a plurality of actual wavelength values and actual pixel values corresponding to the actual wavelength values;
the judging module is used for calculating the wavelength calibration curve according to the actual pixel values in sequence to obtain reference wavelength values corresponding to the actual pixel values; the judging module is further configured to perform a difference operation on the reference wavelength value and the actual wavelength value corresponding to each actual pixel value, to obtain a first difference set, where: and if all the differences in the first difference set are in the first preset range, judging that the wavelength calibration is successful.
12. A spectrometer test calibration apparatus, comprising:
a synchrotron radiation light source;
a monochromator and a photodiode which are sequentially arranged along the transmission direction of the light path; and
the spectrometer test calibration device of claim 11.
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