CN117375540A - Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance - Google Patents

Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance Download PDF

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Publication number
CN117375540A
CN117375540A CN202311316781.0A CN202311316781A CN117375540A CN 117375540 A CN117375540 A CN 117375540A CN 202311316781 A CN202311316781 A CN 202311316781A CN 117375540 A CN117375540 A CN 117375540A
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Prior art keywords
radio frequency
shell
voltage
inner conductor
sampling
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Inventor
王志宇
付浩然
蔡晓葳
***
张辉
翟港佳
陈雨松
吴亚龙
万宏
杨家奇
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Guodian Nuclear Power Technology Wuxi Technology Co ltd
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Guodian Nuclear Power Technology Wuxi Technology Co ltd
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Priority to CN202311316781.0A priority Critical patent/CN117375540A/en
Publication of CN117375540A publication Critical patent/CN117375540A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F1/00Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/56Modifications of input or output impedances, not otherwise provided for
    • H03F1/565Modifications of input or output impedances, not otherwise provided for using inductive elements
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F3/00Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/189High-frequency amplifiers, e.g. radio frequency amplifiers
    • H03F3/19High-frequency amplifiers, e.g. radio frequency amplifiers with semiconductor devices only
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03FAMPLIFIERS
    • H03F3/00Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/20Power amplifiers, e.g. Class B amplifiers, Class C amplifiers
    • H03F3/21Power amplifiers, e.g. Class B amplifiers, Class C amplifiers with semiconductor devices only
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02DCLIMATE CHANGE MITIGATION TECHNOLOGIES IN INFORMATION AND COMMUNICATION TECHNOLOGIES [ICT], I.E. INFORMATION AND COMMUNICATION TECHNOLOGIES AIMING AT THE REDUCTION OF THEIR OWN ENERGY USE
    • Y02D30/00Reducing energy consumption in communication networks
    • Y02D30/70Reducing energy consumption in communication networks in wireless communication networks

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses an output matching detection device and method of a radio frequency amplifier system adapting to complex dynamic impedance, comprising the following steps: the device comprises: the shell, the said shell both ends have inner conductor and radio frequency to connect, said inner conductor and radio frequency connect part extend to the shell and interconnect; an inner conductor tube is arranged in the shell, and the inner conductor and the inner cavity of the shell form a coaxial transmission line for transmitting high-power radio frequency energy; the sampling plate is arranged on the shell, and is provided with copper screws for connecting the sampling plate with the inner conductor tube and the inner conductor to collect voltage signals; the sampling plate is also provided with an inductor which is used for coupling a current signal through the inner cavity of the shell; the coupling plate is arranged on the side part of the shell and comprises a coupling rod mounting plate connected with the shell and a coupling rod connected with the coupling rod mounting plate, and is used for forming a coupling structure with the inner conductor to realize a radio frequency coupling sampling function.

Description

Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance
Technical Field
The invention relates to an output matching detection device and method, in particular to an output matching detection device and method of a radio frequency amplifier system adapting to complex dynamic impedance.
Background
When the radio frequency system is applied to industries such as industrial equipment, particle accelerators and the like, the practical requirement of adapting to complex dynamic load impedance exists.
The dynamic range of the load impedance is large, the change speed is high, and strict requirements are put on the output matching of a radio frequency system, particularly a radio frequency amplifier.
The main purpose of the output impedance matching of the radio frequency amplifier is to enable the output impedance of the amplifier and the load impedance to reach a matching state by reasonably adjusting the load equivalent impedance, so that the power can be maximally and effectively transmitted from the radio frequency amplifier to the load.
For example, if the load impedance is not equal to 50 ohms, a part of energy will be reflected back to the rf amplifier, possibly causing damage to the rf amplifier, and meanwhile, the rf energy obtained from the load will be reduced, resulting in waste of rf energy, so it is important to match the impedance to the amplifier impedance by adjusting the load impedance in real time.
The output matching of the radio frequency amplifier can be detected to be used as a basis for adjusting the impedance of the load matching network in real time, so that the radio frequency energy can be utilized by the load effectively to the maximum.
Therefore, how to detect the values of the incident voltage and the reflected voltage, and provide a feedback control measurement signal for matching the output of the load is a problem that needs to be solved at present.
Disclosure of Invention
The invention aims to: an output matching detection device and method for a radio frequency amplifier system adapting to complex dynamic impedance are provided to solve the above problems in the prior art.
The technical scheme is as follows: an output match detection apparatus for a radio frequency amplifier system that accommodates complex dynamic impedances, comprising:
the shell, the said shell both ends have inner conductor and radio frequency to connect, said inner conductor and radio frequency connect part extend to the shell and interconnect; an inner conductor tube is arranged in the shell, and the inner conductor and the inner cavity of the shell form a coaxial transmission line for transmitting high-power radio frequency energy;
the sampling plate is arranged on the shell, and is provided with copper screws for connecting the sampling plate with the inner conductor tube and the inner conductor to collect voltage signals;
the sampling plate is also provided with an inductor which is used for coupling a current signal through the inner cavity of the shell;
the coupling plate is arranged on the side part of the shell and comprises a coupling rod mounting plate connected with the shell and a coupling rod connected with the coupling rod mounting plate, and is used for forming a coupling structure with the inner conductor to realize a radio frequency coupling sampling function.
In a further embodiment, a cover plate is further arranged on the outer side of the coupling plate;
the shell is further provided with an insulating cover at one end of the inner conductor.
In a further embodiment, the sampling board is internally provided with a current sampling circuit and a voltage sampling circuit;
the voltage sampling circuit comprises a structureHigh withstand voltage capacitor C forming a capacitive voltage divider 1 And C 2
The invention discloses an output matching detection device and method of a radio frequency amplifier system adapting to complex dynamic impedance, wherein the detection device is designed, and the output of the radio frequency amplifier is transmitted to a load through the detection device;
the device is characterized in that one part of the device samples incident power and reflected power through inductive coupling, the incident power and the reflected power are sent to a multiplier for self-multiplication after being detected by a diode, and the amplitude calibration output of the incident power and the reflected power is completed through a conditioning circuit, so that a control system can conveniently perform linear fitting of power display and subsequent oversized reflection protection treatment;
the other part is used for completing the sampling of radio frequency current and radio frequency voltage through inductive coupling and capacitive coupling, and the power is divided into two paths after filtering;
the phase difference of the radio frequency current and the radio frequency voltage of one path is subjected to phase discrimination to output radio frequency current and voltage phase difference for a control system to carry out subsequent load impedance adjustment, if the load impedance is pure resistance, the radio frequency voltage and the current phase difference are 0, if the load impedance is inductive, the current phase lags the voltage phase, and if the load impedance is capacitive, the current phase leads the voltage phase;
the other path of radio frequency current and radio frequency voltage are subjected to diode detection and then are subjected to addition operation and subtraction operation respectively, and finally are subjected to division operation to obtain a reflection coefficient;
the control system can perform standing-wave ratio protection and corresponding load adjustment according to the reflection coefficient, perform coarse adjustment of load impedance according to the reflection coefficient, and finish fine adjustment of load impedance according to the phase difference.
Meanwhile, all detection circuits are hardware analog circuits, and the detection circuit has the advantages of high sensitivity, high response speed, structural cooperation integration level and the like;
compared with the traditional directional coupler, the high isolation between the incident signal and the reflected signal with high precision, which is easier to adjust, is realized, and the influence of the isolation degree which is inevitably present in the traditional directional coupler on accurate measurement is avoided;
based on this approach, higher accuracy values of the incident and reflected voltages can be obtained, providing a feedback control measurement signal for achieving output matching of the load.
An output match detection method of a radio frequency amplifier system adapting to complex dynamic impedance, comprising:
step 1, let the incident voltage be U f The reflected voltage is U r The characteristic impedance of the transmission line is Z 0 The angular frequency is omega, and the transmission speed of the electromagnetic wave in the inner conductor is V;
when the length of a feed tube from the output end of the radio frequency amplifier to the radio frequency current and radio frequency voltage sampling coil is X meters, the voltage U at the X point X Current I X The signals are respectively as follows:
wherein j represents an imaginary part;
step 2, assuming that the mutual inductance between the feed-pipe inner core and the inductor T is M, the inductance of the inductor T is L, and when the feed-pipe inner core is provided with high-frequency current I X When flowing through, the induced electromotive force generated on the inductor T is e, and this induced electromotive force is:
e=jωMI X =(jωL+jωC//R)I 1
this electromotive force e forms a high-frequency current I in a network of L and R, C 1 R represents resistance; c represents a capacitance;
step 3, selecting jωl+jωc// R, there are:
the voltage signal output by the current sampling is:
step 4, analyzing the high withstand voltage capacitor C 2 The voltage U obtained above c_pickup
Due to L and high withstand voltage capacitance C 1 High withstand voltage capacitor C 2 As a design parameter that can be adjusted, it can be seen that:
step 5, adjusting parameters to enable k to be 1 =k 2 The following steps are:
U f_pickup sample representing forward power, U r_-pickup Representing a sampling of reverse power.
The beneficial effects are that: the invention discloses an output matching detection device and method of a radio frequency amplifier system adapting to complex dynamic impedance, which are used for realizing high isolation of incident signals and reflected signals with high precision, which are easier to adjust, compared with a traditional directional coupler, and avoiding the influence of the unavoidable isolation of the traditional directional coupler on accurate measurement;
based on this approach, higher accuracy values of the incident and reflected voltages can be obtained, providing a feedback control measurement signal for achieving output matching of the load.
Drawings
Fig. 1 is a functional block diagram of a radio frequency amplifier system.
Fig. 2 is a schematic diagram of a method and apparatus for output match detection of a radio frequency amplifier.
FIG. 3 is a schematic diagram of the structure of the detecting device of the present invention.
FIG. 4 is a schematic cross-sectional view of the detection device of the present invention.
FIG. 5 is a schematic cross-sectional view of the detecting device of the present invention.
FIG. 6 is a schematic cross-sectional view of a detection device according to the present invention.
Fig. 7 is a schematic view of a coupling plate of the detection device of the present invention.
FIG. 8 is a schematic view of the inner conductor and inner conductor tube of the detection device of the present invention.
FIG. 9 is a schematic diagram of a current sampling circuit according to the present invention.
FIG. 10 is a schematic diagram of a voltage sampling circuit according to the present invention.
The reference numerals are:
1. a radio frequency connector; 2. sampling plate; 3. a housing; 4. copper screws; 5. an inner conductor; 6. an insulating cover; 7. a cover plate; 8. a coupling plate; 81. a coupling rod mounting plate; 82. a coupling rod; 9. an inner conductor tube; 10. an inductance.
Detailed Description
The present application relates to an output matching detection apparatus and method for a radio frequency amplifier system adapted to complex dynamic impedance, and is explained in detail below by way of specific embodiments.
An output match detection apparatus for a radio frequency amplifier system that accommodates complex dynamic impedances, comprising:
the radio frequency connector comprises a shell 3, wherein an inner conductor 5 and a radio frequency connector 1 are arranged at two ends of the shell 3, and the inner conductor 5 and the radio frequency connector 1 partially extend into the shell 3 and are connected with each other; an inner conductor pipe 9 is arranged in the shell 3, and the inner conductor 5 and the inner cavity of the shell 3 form a coaxial transmission line for transmitting high-power radio frequency energy;
the sampling plate 2 is arranged on the shell 3, and a copper screw 4 is arranged on the sampling plate 2 and used for connecting the sampling plate 2 with the inner conductor tube 9 and the inner conductor 5 to collect voltage signals;
an inductor 10 is also arranged on the sampling plate 2 and is used for coupling current signals through the inner cavity of the shell 3;
the coupling plate 8 is arranged at the side part of the shell 3 and comprises a coupling rod mounting plate 81 connected with the shell 3 and a coupling rod 82 connected with the coupling rod mounting plate 81, and is used for forming a coupling structure with the inner conductor 5 to realize a radio frequency coupling sampling function.
A cover plate 7 is further arranged on the outer side of the coupling plate 8;
the housing 3 is further provided with an insulating cover 6 at one end of the inner conductor 5.
The sampling board 2 is internally provided with a current sampling circuit and a voltage sampling circuit;
the voltage sampling circuit comprises high withstand voltage capacitors C_1 and C_2 which form a capacitive voltage divider;
the invention discloses an output matching detection device and method of a radio frequency amplifier system adapting to complex dynamic impedance, wherein the design detection device is shown in figure 1, and can be seen that the output matching detection device is positioned between a radio frequency amplifier and a load, an output signal of the output matching detection device is sent to control, and the control system completes load impedance adjustment so as to match the output impedance of the radio frequency amplifier;
as shown in fig. 2, a part of the device is coupled and sampled through an inductor 10, the incident power and the reflected power are sent to a multiplier for self-multiplication after being detected by a diode, and the amplitude calibration output of the incident power and the reflected power is completed through a conditioning circuit, so that a control system can conveniently perform linear fitting of power display and subsequent oversized reflection protection treatment;
the other part is coupled through an inductor 10 and coupled through a capacitor to finish the sampling of radio frequency current and radio frequency voltage, and the power is divided into two paths after filtering;
the phase difference of the radio frequency current and the radio frequency voltage of one path is subjected to phase discrimination to output radio frequency current and voltage phase difference for a control system to carry out subsequent load impedance adjustment, if the load impedance is pure resistance, the radio frequency voltage and the current phase difference are 0, if the load impedance is inductive, the current phase lags the voltage phase, and if the load impedance is capacitive, the current phase leads the voltage phase;
the other path of radio frequency current and radio frequency voltage are subjected to diode detection and then are subjected to addition operation and subtraction operation respectively, and finally are subjected to division operation to obtain a reflection coefficient;
the control system can perform standing-wave ratio protection and corresponding load adjustment according to the reflection coefficient, perform coarse adjustment of load impedance according to the reflection coefficient, and finish fine adjustment of load impedance according to the phase difference.
Meanwhile, all detection circuits are hardware analog circuits, and the detection circuit has the advantages of high sensitivity, high response speed, structural cooperation integration level and the like;
compared with the traditional directional coupler, the high isolation between the incident signal and the reflected signal with high precision, which is easier to adjust, is realized, and the influence of the isolation degree which is inevitably present in the traditional directional coupler on accurate measurement is avoided;
based on this approach, higher accuracy values of the incident and reflected voltages can be obtained, providing a feedback control measurement signal for achieving output matching of the load.
An output match detection method of a radio frequency amplifier system adapting to complex dynamic impedance, comprising:
step 1, let the incident voltage be U f The reflected voltage is U r The characteristic impedance of the transmission line is Z 0 The angular frequency is omega, and the transmission speed of the electromagnetic wave in the inner conductor is V;
when the length of a feed tube from the output end of the radio frequency amplifier to the radio frequency current and radio frequency voltage sampling coil is X meters, the voltage U at the X point X Current I X The signals of (a) are respectively:
wherein U is X Is a voltage signal, I X Is a current signal;
step 2, assuming that the mutual inductance between the feed-pipe inner core and the inductor T is M, the inductance of the inductor T is L, and when the feed-pipe inner core is provided with high-frequency current I X When flowing through, the induced electromotive force generated on the inductor T is e, and this induced electromotive force is:
e=jωMI X =(jωL+jωC//R)I 1
this electromotive force e forms a high-frequency current I in a network of L and R, C 1
Step 3, selecting jωl+jωc// R, there are:
the voltage signal output by the current sampling is:
step 4, analyzing the high withstand voltage capacitor C 2 The voltage U obtained above c_pickup
Due to L and high withstand voltage capacitance C 1 High withstand voltage capacitor C 2 As a design parameter that can be adjusted, it can be seen that:
step 5, adjusting parameters to enable k to be 1 =k 2 The following steps are:
the monitoring mechanism of the incident signal and the reflected signal based on the method can realize high isolation of the incident signal and the reflected signal which are easier to adjust compared with the traditional directional coupler, and avoid the influence of the unavoidable isolation of the traditional directional coupler on accurate measurement.
Based on this approach, higher accuracy values of the incident and reflected voltages can be obtained, providing a feedback control measurement signal for achieving output matching of the load.
Based on the output matching detection method, the method can be used for realizing a detection mechanism of dynamic load under various industrial scene applications such as solar photovoltaic, semiconductors, film coating and the like.
The method can obtain the voltage and current instant messages simultaneously, can realize the high resolution of the sub us time level, further realize the detection of the sparking phenomenon, and can be used for judging the micro discharge mechanism in the plasma application.
When the voltage transient sampled by the device exceeds a preset threshold (referred to as a preset amplitude threshold and a time threshold), the detection of such a fire may be used to analyze the phenomenon of such a fire and determine the process parameters of the load device at that time.
Typical sparking phenomena in plasma generation include, for example:
1. sudden drops in voltage, current, which may be caused by charge accumulation in the plasma process;
2. the voltage and current spikes jump, which may be caused by plasma extinction.
The device can detect the firing of us and is used for judging the type of the firing and evaluating the amplitude of the firing.
Meanwhile, the information can be used for carrying out necessary maintenance operation on the reaction cavity, and the method can be used for diagnosing the state and working condition of the reaction cavity.
The method can be used for establishing an early detection mechanism of the reaction cavity, transient changes such as dynamic changes of plasma can occur, and the control system can store long-term operation parameters and rules of reaction load changes according to the detection output parameters of the device.
Description of working principle:
let the incident voltage be U f The reflected voltage is U r The characteristic impedance of the transmission line is Z 0 The angular frequency is omega, and the transmission speed of the electromagnetic wave in the inner conductor is V;
when the length of a feed tube from the output end of the radio frequency amplifier to the radio frequency current and radio frequency voltage sampling coil is X meters, the voltage U at the X point X Current I X The signals of (a) are respectively:
wherein U is X Is a voltage signal, I X Is a current signal;
assuming that the mutual inductance between the feed tube inner core and the inductor T is M, the inductance of the inductor T is L, and when the feed tube inner core is provided with high-frequency current I X When flowing through, the induced electromotive force generated on the inductor T is e, and this induced electromotive force is:
e=jωMI X =(jωL+jωC//R)I 1
this electromotive force e forms a high-frequency current I in a network of L and R, C 1
If jωl+jωc// R is selected, there are:
the voltage signal output by the current sampling is:
analysis of high withstand voltage capacitance C 2 The voltage U obtained above c_pickup
Due to L and high withstand voltage capacitance C 1 High withstand voltage capacitor C 2 As a design parameter that can be adjusted, it can be seen that:
adjusting parameters to make k 1 =k 2 The following steps are:
the preferred embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the specific details of the embodiments, and various equivalent changes can be made to the technical solutions of the present invention within the scope of the technical concept of the present invention, and all such equivalent changes belong to the protection scope of the present invention.

Claims (4)

1. An output match detection device of a radio frequency amplifier system adapted to complex dynamic impedance, comprising:
the shell, the said shell both ends have inner conductor and radio frequency to connect, said inner conductor and radio frequency connect part extend to the shell and interconnect; an inner conductor tube is arranged in the shell, and the inner conductor and the inner cavity of the shell form a coaxial transmission line for transmitting radio frequency energy;
the sampling plate is arranged on the shell, and is provided with copper screws for connecting the sampling plate with the inner conductor tube and the inner conductor to collect voltage signals;
the sampling plate is also provided with an inductor which is used for coupling a current signal through the inner cavity of the shell;
the coupling plate is arranged on the side part of the shell and comprises a coupling rod mounting plate connected with the shell and a coupling rod connected with the coupling rod mounting plate, and is used for forming a coupling structure with the inner conductor to realize a radio frequency coupling sampling function.
2. An output matching detection device of a radio frequency amplifier system adapted to complex dynamic impedance as claimed in claim 1, wherein: a cover plate is further arranged on the outer side of the coupling plate;
the shell is further provided with an insulating cover at one end of the inner conductor.
3. An output matching detection device of a radio frequency amplifier system adapted to complex dynamic impedance as claimed in claim 1, wherein: the sampling board is internally provided with a current sampling circuit and a voltage sampling circuit;
the voltage sampling circuit comprises a high withstand voltage capacitor C forming a capacitive voltage divider 1 And C 2
4. An output matching detection method of a radio frequency amplifier system adapted to complex dynamic impedance, implemented based on the detection device of any one of claims 1-3, characterized by comprising:
step 1, let the incident voltage be U f The reflected voltage is U r The characteristic impedance of the transmission line is Z 0 Angular frequency ω, transmission speed of electromagnetic wave in inner conductorV is the number;
when the length of a feed tube from the output end of the radio frequency amplifier to the radio frequency current and radio frequency voltage sampling coil is X meters, the voltage U at the X point X Current I X The signals of (a) are respectively:
wherein j represents an imaginary part;
step 2, assuming that the mutual inductance between the feed-pipe inner core and the inductor T is M, the inductance of the inductor T is L, and when the feed-pipe inner core is provided with high-frequency current I X When flowing through, the induced electromotive force generated on the inductor T is e, and this induced electromotive force is:
e=jωMI X =(jωL+jωC//R)I 1
this electromotive force e forms a high-frequency current I in a network of L and R, C 1
Step 3, selecting jωl+jωc// R, there are:
the voltage signal output by the current sampling is:
step 4, analyzing the high withstand voltage capacitor C 2 The voltage U obtained above c_pixkup
Due to L and high withstand voltage capacitance C 1 High withstand voltage capacitor C 2 As a design parameter that can be adjusted, it can be seen that:
step 5, adjusting parameters to enable k to be 1 =k 2 The following steps are:
U f_pickup sample representing forward power, U r_-pickup Representing a sampling of reverse power.
CN202311316781.0A 2023-10-11 2023-10-11 Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance Pending CN117375540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311316781.0A CN117375540A (en) 2023-10-11 2023-10-11 Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311316781.0A CN117375540A (en) 2023-10-11 2023-10-11 Output matching detection device and method of radio frequency amplifier system adapting to complex dynamic impedance

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CN117375540A true CN117375540A (en) 2024-01-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117907667A (en) * 2024-03-20 2024-04-19 季华实验室 Acquisition device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117907667A (en) * 2024-03-20 2024-04-19 季华实验室 Acquisition device
CN117907667B (en) * 2024-03-20 2024-05-28 季华实验室 Acquisition device

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