CN117293074A - Wafer boat transfer device - Google Patents

Wafer boat transfer device Download PDF

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Publication number
CN117293074A
CN117293074A CN202311402801.6A CN202311402801A CN117293074A CN 117293074 A CN117293074 A CN 117293074A CN 202311402801 A CN202311402801 A CN 202311402801A CN 117293074 A CN117293074 A CN 117293074A
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CN
China
Prior art keywords
driving
assembly
boat
base
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311402801.6A
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Chinese (zh)
Inventor
张文平
潘忠怀
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Beijing Naura Microelectronics Equipment Co Ltd
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Beijing Naura Microelectronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Beijing Naura Microelectronics Equipment Co Ltd filed Critical Beijing Naura Microelectronics Equipment Co Ltd
Priority to CN202311402801.6A priority Critical patent/CN117293074A/en
Publication of CN117293074A publication Critical patent/CN117293074A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention provides a wafer boat transfer device, which comprises a wafer boat bearing assembly, a first moving assembly, a second moving assembly, a third moving assembly and a fourth moving assembly, wherein the first moving assembly is fixed on a mounting surface and is used for driving the second moving assembly and driving the third moving assembly, the fourth moving assembly and the wafer boat bearing assembly to synchronously move along a first direction parallel to the mounting surface; the second motion assembly is used for driving the third motion assembly and driving the fourth motion assembly and the wafer boat bearing assembly to synchronously move along a second direction perpendicular to the mounting surface; the third motion assembly is used for driving the fourth motion assembly and driving the wafer boat bearing assembly to synchronously rotate around a rotation center line vertical to the mounting surface; the fourth motion assembly is connected with the wafer boat bearing assembly and used for driving the wafer boat bearing assembly to move along any direction parallel to the mounting surface. The scheme not only can reduce the occupied area, but also has simple structure and is convenient to install and maintain, thereby reducing the equipment, installation and maintenance cost.

Description

Wafer boat transfer device
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a wafer boat transfer device.
Background
In the production process of silicon wafers in the solar photovoltaic industry, in order to reduce the manual use cost, improve the efficiency and increase the yield, a heavily loaded wafer boat needs to be transported frequently, and therefore, the design of a wafer boat transfer device is imperative.
Referring to fig. 1, the conventional wafer boat transferring device is to movably connect a six-axis manipulator to a rail base, and drive the six-axis manipulator to move by a motor through a rack and pinion, so as to move between a temporary storage station and a plurality of process chambers. On the basis, the six-axis mechanical arm is utilized to grasp the wafer boat, so that the wafer boat is taken out from the temporary storage station and put into the process chamber.
However, the six-axis manipulator occupies a large space, and the radius of gyration required for transporting the boat is relatively large, so that the occupied area of the whole equipment is excessively large; furthermore, the six-axis manipulator is complicated in structure and high in installation and maintenance costs, resulting in an increase in the overall equipment cost.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art, and provides a wafer boat transfer device which not only can reduce the occupied area, but also has a simple structure and is convenient to install and maintain, thereby reducing the equipment, installation and maintenance costs.
The invention provides a wafer boat transferring device, which comprises a first moving component, a second moving component, a third moving component, a fourth moving component and a wafer boat bearing component which are connected in sequence, wherein,
the first moving assembly is fixed on the mounting surface and is used for driving the second moving assembly and driving the third moving assembly, the fourth moving assembly and the wafer boat bearing assembly to synchronously move along a first direction parallel to the mounting surface;
the second motion assembly is used for driving the third motion assembly and driving the fourth motion assembly and the wafer boat bearing assembly to synchronously move along a second direction perpendicular to the mounting surface;
the third motion assembly is used for driving the fourth motion assembly and driving the wafer boat bearing assembly to synchronously rotate around a rotation center line perpendicular to the mounting surface;
the fourth motion assembly is connected with the wafer boat bearing assembly and is used for driving the wafer boat bearing assembly to move along any direction parallel to the mounting surface.
Optionally, the first motion assembly comprises a stationary base, a first drive member, and a first transmission mechanism, wherein,
the fixed base is fixed on the mounting surface;
The first driving piece is used for driving the second moving assembly through the first transmission mechanism and driving the third moving assembly, the fourth moving assembly and the wafer boat bearing assembly to synchronously move along the first direction.
Optionally, the first transmission mechanism comprises a rack, a gear, a first guide rail and a first moving base, wherein,
the rack and the first guide rail are both fixed on the fixed base and are both arranged in an extending manner along the first direction; the gear is meshed with the rack;
the first moving base is movably connected to the first guide rail along the first direction, and the first moving base is connected with the second moving component;
the first driving piece is fixed on the first movable base, connected with the gear and used for driving the gear to rotate so as to drive the first movable base to move along the first direction relative to the first guide rail.
Optionally, the second motion assembly comprises a second drive member and a second transmission mechanism, wherein,
the second driving piece is fixed on the first motion assembly and is used for driving the third motion assembly to move along the second direction through the second transmission mechanism.
Optionally, the second transmission mechanism comprises a first transmission belt structure, a screw nut structure, a second guide rail and a second movable base, wherein,
the second guide rail is fixed on the first motion assembly and extends along the second direction, and the second movable base is movably connected with the second guide rail along the second direction; the second movable base is connected with the third movement assembly;
the second driving piece is fixed on the first motion assembly, is connected with the driving wheel of the first driving belt structure and is used for driving the first driving wheel to rotate and driving the conveying belt of the first driving belt structure to move; the screw rod of the screw rod nut structure extends along the second direction and is connected with the driven wheel of the first transmission belt structure; the nut of the screw nut structure is connected with the second movable base.
Optionally, the third motion assembly comprises a third drive member and a third transmission mechanism, wherein,
the third driving piece is used for driving the fourth motion assembly to rotate around the rotation center line through the third transmission mechanism.
Optionally, the third transmission mechanism comprises a drive gear, a rotational bearing structure and a rotational base, wherein,
The third driving piece is connected with the driving gear and is used for driving the driving gear to rotate;
the rotary bearing structure comprises a bearing with an external gear and a fixed shaft in rotary connection with the bearing, wherein the fixed shaft is fixed on the second motion assembly; the external gear of the bearing is meshed with the driving gear so that the bearing can rotate around the rotation center line relative to the fixed shaft;
the rotating base is connected with the bearing and the fourth motion assembly.
Optionally, the fourth motion assembly comprises a fourth drive member and a fourth transmission mechanism, wherein,
the fourth driving piece is used for driving the boat bearing assembly to move along any direction parallel to the mounting surface through the fourth transmission mechanism.
Optionally, the fourth transmission mechanism comprises a telescopic base, a transition base, a second transmission belt structure, a first connecting piece, a second connecting piece and a third guide rail, wherein,
the telescopic base is fixed on the third motion assembly; the third guide rail is fixed to one of the telescopic base and the transition base; the other of the telescopic base and the transition base is movably connected to the third guide rail along the extending direction of the third guide rail;
The second driving belt structure and the fourth driving piece are both fixed on the transition base, and the fourth driving piece is connected with the driving wheel of the second driving belt structure and is used for driving the second driving belt structure to rotate and driving the driving belt of the second driving belt structure to move;
the first connecting piece is fixedly connected with the telescopic base and the driving belt of the second driving belt structure respectively at one side of the driving belt of the second driving belt structure adjacent to the telescopic base; the second connecting piece is fixedly connected with the wafer boat bearing assembly and the driving belt of the second driving belt structure respectively at one side of the driving belt of the second driving belt structure far away from the telescopic base; and, when the first connecting member is moved to a position close to one of the driving pulley and the driven pulley of the second belt structure, the second connecting member is moved to a position close to the other.
Optionally, the wafer boat bearing assembly includes a pallet and a fixing structure, wherein the pallet is fixed on the fourth moving assembly and is used for bearing the wafer boat;
the fixing structure is arranged on the supporting plate and is used for fixing the wafer boat on the supporting plate or releasing the fixation of the wafer boat.
Optionally, the fixing structure comprises a fifth driving piece, a fifth transmission mechanism and a fixing piece, wherein,
the fifth driving piece is connected with the supporting plate, and drives the fixing piece to move to a fixing position for fixing the wafer boat on the supporting plate or to a non-fixing position for releasing the fixing of the wafer boat through the fifth transmission mechanism.
Optionally, the fifth transmission mechanism includes a first transmission rod, a second transmission rod and a plurality of connection seats, where the plurality of connection seats are fixed on the supporting plate and are arranged at intervals on one side of the supporting plate for bearing the bearing surface of the wafer boat;
the first transmission rod sequentially penetrates through the plurality of connecting seats and can rotate relative to each connecting seat;
the fifth driving piece is rotatably connected with the supporting plate and is used for providing linear power; the second transmission rod is connected with the driving shaft of the fifth driving piece, is perpendicular to the driving shaft and is parallel to the first transmission rod;
the fixing pieces are one or more, and the fixing pieces are arranged at intervals along the extending direction of the first transmission rod; each fixing piece comprises a first fixing arm and a second fixing arm which form an included angle, one end of each first fixing arm is connected with one end of each second fixing arm, and the connecting position of each first fixing arm and each second fixing arm is connected with the first transmission rod; the other end of the first fixed arm is connected with the second transmission rod;
The fifth driving piece can drive the second transmission rod and drive the first fixing arm and the second fixing arm to rotate around the first transmission rod, so that the second fixing arm can be located at the fixed position or the non-fixed position.
The invention has the following beneficial effects:
according to the wafer boat transfer device, the first moving component, the second moving component, the third moving component, the fourth moving component and the wafer boat bearing component are sequentially connected, so that the wafer boat bearing component can move and rotate in the corresponding direction under the drive of any one of the first moving component, the second moving component, the third moving component and the fourth moving component, the wafer boat bearing component can move between the temporary storage station and a plurality of process chambers, the wafer boat is taken out from the temporary storage station and put into the process chambers, and compared with a six-axis manipulator in the prior art, the wafer boat transfer device is formed by combining the four moving components, the combined structure is more flexible in design, the structure of any one moving component can be independently designed, the occupied area is easier to design, the structure is simpler, the installation and maintenance of the moving component structure are convenient, and the equipment, the installation and maintenance cost can be reduced.
Drawings
FIG. 1 is a schematic view of a conventional boat transfer apparatus;
FIG. 2 is a diagram showing the position of a wafer boat transfer apparatus between a temporary storage station and a plurality of process chambers according to an embodiment of the present invention;
FIG. 3 is a block diagram of a boat transfer apparatus according to an embodiment of the present invention;
FIG. 4 is a block diagram of a first motion assembly employed in an embodiment of the present invention;
FIG. 5 is an enlarged view of a portion of a first motion assembly employed in an embodiment of the present invention;
FIG. 6 is a cross-sectional view of a second motion assembly employed in an embodiment of the present invention;
FIG. 7 is a cross-sectional view of a third motion assembly employed in an embodiment of the present invention;
FIG. 8 is a top partial cross-sectional view of a third motion assembly employed in an embodiment of the present invention;
FIG. 9 is a block diagram of a fourth motion assembly in an initial position, as employed in an embodiment of the present invention;
FIG. 10 is a block diagram of a fourth motion assembly in an extended position, as employed in an embodiment of the present invention;
FIG. 11 is an enlarged view of a portion of a fourth motion assembly employed in an embodiment of the present invention;
FIG. 12 is a block diagram of a boat carrier assembly in an unset position according to an embodiment of the present invention;
FIG. 13 is a block diagram of a boat carrier assembly in a stationary position in accordance with an embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical scheme of the present invention, the following describes the boat transfer device provided by the present invention in detail with reference to the accompanying drawings.
The embodiment of the invention provides a wafer boat transferring device which is used for transferring wafer boats between a temporary storage station and a plurality of process chambers, namely, taking the wafer boat out of the temporary storage station and placing the wafer boat into the process chambers, taking the wafer boat out of the process chambers and placing the wafer boat in the temporary storage station. For example, as shown in fig. 2, the boat transferring device 100 is disposed near the temporary storage station C, the process chamber a and the process chamber B, and is used for taking out the boat from the temporary storage station C, transferring the boat to the process chamber a or the process chamber B for processing, and taking out the boat 11 from the process chamber a or the process chamber B after the process is completed, and transferring the boat to the temporary storage station C.
Referring to fig. 3, the boat transferring apparatus 100 includes a first moving assembly 1, a second moving assembly 2, a third moving assembly 3, a fourth moving assembly 4, and a boat supporting assembly 5, which are sequentially connected. The sequential connection means that the first motion assembly 1 is connected with the second motion assembly 2, the second motion assembly 2 is connected with the third motion assembly 3, the third motion assembly 3 is connected with the fourth motion assembly 4, and the fourth motion assembly 4 is connected with the boat carrying assembly 5. By adopting a mode of sequential connection, taking the first motion assembly 1 as an example, the driving force of the first motion assembly directly acts on the second motion assembly 2 connected with the first motion assembly, and indirectly drives the third motion assembly 3, the fourth motion assembly 4 and the boat bearing assembly 5 to move through the second motion assembly 2, other assemblies are similar to the driving mode of the first motion assembly 1, so that the motion modes of all the motion assemblies can be overlapped, and the boat bearing assembly 5 positioned at the connecting end can move and rotate in corresponding directions under the driving of any one of the first motion assembly, the second motion assembly, the third motion assembly and the fourth motion assembly.
The first moving assembly 1 is fixed to a mounting surface D, which is a mounting base surface for mounting the boat transfer device, such as a floor surface on which the boat transfer device is placed, a table surface, and the like, and a fixed base 11 (described in detail later) in the first moving assembly 1 is placed on the mounting surface D and is fixed with respect to the mounting surface D. The mounting surface D may be parallel to the horizontal plane or may form an angle with the horizontal plane. The first motion assembly 1 is used for driving the second motion assembly 2 and driving the third motion assembly 3, the fourth motion assembly 4 and the boat carrier assembly 5 to synchronously move along a first direction (i.e., an X direction) parallel to the mounting surface D. For example, if the mounting surface D is parallel to the horizontal plane, the above-described first direction is the horizontal direction.
The first direction (i.e., the X direction) may be configured to enable the boat transfer apparatus 100 to move in the first direction to a position corresponding to any one of the temporary storage station C and all the process chambers, where the boat transfer apparatus 100 may perform the operation of taking out or putting in the boat at the corresponding temporary storage station C or process chamber. For example, as shown in fig. 2, the second motion assembly 2 directly connected thereto and the third motion assembly 3, the fourth motion assembly 4 and the boat carrier assembly 5 indirectly connected thereto may be synchronously moved in the first direction (i.e., the X direction) to a position corresponding to any one of the temporary storage station C, the process chamber a and the process chamber B by the driving of the first motion assembly 1.
In order to enable the boat transfer device to move in the first direction (i.e., the X direction) to a position corresponding to any one of the temporary storage station C and all the process chambers (e.g., the process chamber a and the process chamber B), the temporary storage station C and all the process chambers may be aligned in a row along the first direction and all the process chambers may be located at one side of the boat transfer device in a direction perpendicular to the first direction; alternatively, all the process chambers are arranged in a row along the first direction and are all located at one side of the boat transfer device in a direction perpendicular to the first direction, and the temporary storage station C is located at the other side of the boat transfer device in the first direction.
The second motion assembly 2, the third motion assembly 3, the fourth motion assembly 4 and the boat carrier assembly 5 can synchronously move along the first direction under the driving of the first motion assembly 1, so as to move to a position corresponding to any one of the temporary storage station C and all the process chambers. Referring to fig. 4, the first moving assembly 1 for achieving this function includes, for example, a fixed base 11, a first driving member 12, and a first transmission mechanism, wherein the fixed base 11 is fixed on the mounting surface D, and the fixed base 11 is, for example, a rectangular base, and its length direction is parallel to the first direction; the first driving part 12 is used for driving the second motion assembly 2 through the first transmission mechanism and driving the third motion assembly 3, the fourth motion assembly 4 and the boat carrier assembly 5 to synchronously move along the first direction.
The first driving member 12 includes, for example, a rotating electric machine for supplying rotational power, and preferably includes a speed reducer 13 connected to the rotating electric machine, which may be a servo motor in particular. In this case, the first transmission mechanism is configured to convert the rotational power output from the rotary electric machine into linear power in the first direction and transmit the linear power to the second motion assembly 2. Specifically, the first transmission mechanism includes a rack 14, a gear (not shown in the figure), a first rail 15, and a first moving base 16, wherein the rack 14 and the first rail 15 are each fixed to the fixed base 11 and each extend in a first direction; the gear wheel is meshed with the rack 14. The first moving base 16 is movably connected to the first guide rail 15 in a first direction, and the first moving base 16 is connected to the second moving assembly 2. The first driving member 12 is fixed to the first movable base 16 and is connected to a gear for driving the gear 34 to rotate. When the first driving member 12 drives the gear 34 to rotate, under the meshing and matching action of the gear and the rack 14, the gear moves along the rack 14 while rotating, so as to drive the first moving base 16 connected with the gear to move along the first direction relative to the first guide rail 15, and further drive the second moving assembly 2 on the first moving base 16 to move along the first direction.
In some embodiments, the number of the first guide rails 15 is two, and the two edge portions of the first moving base 16 in the direction perpendicular to the first direction are respectively movably connected to the two first guide rails 15 along the first direction, which ensures that the two first guide rails 15 can stably support the first moving base 16. The first driver 12, the gear and the rack 14 may be arranged on a side close to one of the first guide rails 15.
In some embodiments, referring to fig. 5, the first guide rail 15 includes a guide rail body 151 and a guide rail slider 153 slidably connected to the guide rail body 151, where the guide rail body 151 is fixed on the fixed base 11, and the first moving base 16 is fixed on the guide rail slider 152, so that the first moving base 16 can move along the first direction relative to the fixed base 11.
The first driving member 12 may also be a linear motor for providing linear power, and in this case, the first transmission mechanism is used to transmit the linear power output by the linear motor to the second motion assembly 2. The first driving member 12 may be another driving source such as an air cylinder or a hydraulic cylinder, and the embodiment of the present invention is not limited thereto.
The second moving assembly 2 is used for driving the third moving assembly 3 and driving the fourth moving assembly 4 and the boat supporting assembly 5 to synchronously move along a second direction perpendicular to the mounting surface D. For example, if the mounting surface D is parallel to the horizontal plane, the above-described second direction is a vertical direction, i.e., a Z direction in fig. 6, so that the elevation of the boat-carrying assembly 5 can be achieved, and thus the operation of lifting or lowering the boat can be achieved.
The third moving assembly 3, the fourth moving assembly 4 and the boat supporting assembly 5 are synchronously moved in the second direction, for example, in a lifting motion, under the driving of the second moving assembly 2. Referring to fig. 6, the second moving assembly 2 for achieving this function includes, for example, a second driving member 22 and a second transmission mechanism, wherein the second driving member 22 is connected to the first moving assembly 1, for example, fixed to the first moving base 16 in the first moving assembly 1. The second driving member 22 is configured to drive the third movement assembly 3 to move in the second direction through the second transmission mechanism.
The second driving member 22 includes, for example, a rotating electric machine for supplying rotational power, and preferably includes a speed reducer 23 connected to the rotating electric machine, which may be a servo motor in particular. In this case, the second transmission mechanism is configured to convert the rotational power output from the rotary electric machine into linear power in the second direction, and transmit the linear power to the third movement assembly 3. Specifically, as shown in fig. 6, the second transmission mechanism includes a first belt structure, a lead screw nut structure, a second guide rail 24, and a second moving base 21, wherein the second guide rail 24 is fixed to the first moving assembly 1, for example, to the first moving base 16 in the first moving assembly 1. The second rail 24 extends in the second direction, and the second movable base 21 is connected to the second rail 24 so as to be movable in the second direction. The second moving base 21 is connected to the third moving assembly 3. The second driving member 22 is fixed to the first moving assembly 1, for example, to the first moving base 16 in the first moving assembly 1. The second driving piece 22 is connected with the driving wheel 251 of the first driving belt structure and is used for driving the driving wheel to rotate and driving the conveying belt 252 of the first driving belt structure to move; the screw 261 of the screw nut structure extends along the second direction and is connected with the driven wheel 253 of the first transmission belt structure; the nut 262 of the lead screw nut structure is connected to the second moving base 21. When the second driving member 22 drives the driving wheel 251 of the first driving belt structure to rotate, the driving wheel 251 drives the driving belt 252 to move, the driving belt 252 drives the driven wheel 253 to rotate, the driven wheel 253 drives the lead screw 261 of the lead screw nut structure connected with the driving wheel 253 to rotate, and under the action of the threaded cooperation of the lead screw 261 and the nut 262, the nut 262 moves along the extending direction (i.e. the second direction) of the lead screw 261, so as to drive the second moving base 21 connected with the driving wheel 262 and the third moving assembly 3 connected with the second moving base 21 to synchronously move along the second direction.
In some embodiments, the two second guide rails 24 are disposed opposite to the first moving assembly 1, for example, fixed on the first moving base 16 in the first moving assembly 1, and the second moving base 21 is movably connected to the two second guide rails 24 along the first direction, so that the two second guide rails 24 can be ensured to stably support the second moving base 21. The second movable base 21 is, for example, a flat plate, and a nut 262 having a screw-nut structure is provided through the second movable base 21 and fixedly connected thereto. The nut 262 has an internal thread, the screw 261 of the screw-nut structure has an external thread, the screw 261 is inserted into the nut 262, and the external thread is matched with the internal thread of the nut 262.
In some embodiments, the second guide rail 24 includes a guide rail body and a guide rail slider slidably connected thereto, where the guide rail body is fixed to the first motion assembly 1, for example, to the first motion base 16 in the first motion assembly 1, and the second motion base 21 is fixed to the guide rail slider, so that the second motion base 21 can move in the second direction relative to the first motion base 16 in the first motion assembly 1.
In some embodiments, as shown in fig. 6, the first belt structure is disposed below the second driving member 22, and the driving wheel 251 is coaxially connected to the driving shaft of the second driving member 22; the lower end of the screw 261 is coaxially connected with the driven wheel 253.
The second driving member 22 may be a linear motor for providing linear power, and in this case, the second transmission mechanism is configured to transmit the linear power output from the linear motor to the third motion assembly 3. The second driving member 22 may be another driving source such as a cylinder or a hydraulic cylinder, and the embodiment of the present invention is not limited thereto.
The third moving assembly 3 is used for driving the fourth moving assembly 4 and driving the boat carrying assembly 5 to synchronously rotate around a rotation center line perpendicular to the mounting surface D. For example, if the mounting surface D is parallel to the horizontal plane, the rotation center line is disposed in the vertical direction. In this way, the boat carrier assembly 5 can be rotated to any angle of 360 ° in the plane parallel to the mounting surface D, so that when the boat transfer apparatus 100 moves in the first direction to a position corresponding to any one of the temporary storage station C and all the process chambers, the third movement assembly 3 drives the fourth movement assembly 4 and drives the boat carrier assembly 5 to rotate synchronously about the rotation center line perpendicular to the mounting surface D, so that the boat carrier assembly 5 can be rotated to a position opposite to the transfer port of any one of the temporary storage station C and all the process chambers. Referring to fig. 7 and 8, the third moving assembly 3 for achieving this function includes, for example, a third driving member 32 and a third transmission mechanism, wherein the third driving member 32 is fixed to the second moving assembly 2, for example, fixed to the second moving base 21 in the second moving assembly 2. The third driving member 32 is configured to drive the fourth moving assembly 4 to rotate about the rotation center line O through a third transmission mechanism. The third driving member 32 includes, for example, a rotating electric machine for supplying rotational power, and preferably includes a speed reducer 33 connected to the rotating electric machine, which may be a servo motor in particular.
The third transmission mechanism includes, for example, a drive gear 34, a rotation bearing structure, and a rotation base 31, wherein the third driving member 32 is connected to the drive gear 34 for driving the drive gear 34 to rotate. Specifically, the drive shaft of the third drive member 32 is coaxially connected with a drive gear 34, and the drive gear 34 is located, for example, above the third drive member 32. The rotary bearing structure comprises a bearing 35 with an external gear and a stationary shaft 36 in rotational connection therewith, wherein the stationary shaft 36 is fixed to the second moving assembly 2, for example to the second moving base 21 in the second moving assembly 2. The outer gear of the bearing 35 is meshed with the driving gear 34 so that the bearing 35 can rotate about the rotation center line with respect to the fixed shaft 36; the rotating base 31 is connected to the bearing 35 and to the fourth movement assembly 4. The bearing 35 is, for example, a rolling bearing having an external gear, and is fitted over the fixed shaft 36. The third driving member 32 drives the driving gear 34 to rotate, and under the meshing and matching action of the outer gear of the bearing 35, the bearing 35 is driven to rotate around the rotation center line O relative to the fixed shaft 36, so that the rotating base 31 and the fourth moving assembly 4 are driven to synchronously rotate.
It should be noted that, the embodiment of the present invention is not limited to the above structure using the third transmission mechanism, and any other structure capable of transmitting rotational power may be used in practical applications.
The fourth moving assembly 4 is connected to the boat-carrying assembly 5 for driving the boat-carrying assembly 5 to move in any direction parallel to the mounting surface D. For example, if the mounting surface D is parallel to the horizontal plane, the boat carrier assembly 5 may be moved in any horizontal direction. After the third moving assembly 3 drives the fourth moving assembly 4 and drives the boat carrying assembly 5 to synchronously rotate around the rotation center line O perpendicular to the mounting surface D, so that the boat transferring device 100 rotates to a position opposite to the transmission port of any one of the temporary storage station C and all the process chambers, the fourth moving assembly 4 can drive the boat carrying assembly 5 to move towards the transmission port, so as to transfer the boat into the temporary storage station C or the process chamber through the transmission port; or, the wafer boat is moved into the temporary storage station C or the process chamber so as to realize the operation of taking out the wafer boat. The arbitrary direction parallel to the mounting surface D may be set to a direction of movement toward the transfer port, which is determined after the third movement assembly 3 drives the fourth movement assembly 4 and the boat carrier assembly 5 to rotate synchronously by a prescribed angle. It is to be understood that the transfer port of the temporary storage station C can be understood as a specific direction of the temporary storage station C for transferring the wafer boat into or out of the temporary storage station C.
Referring to fig. 9 to 11, the fourth motion assembly 4 for achieving the above-mentioned functions includes, for example, a fourth driving member 42 and a fourth transmission mechanism, wherein the fourth driving member 42 is configured to drive the boat carrier assembly 5 to move along any direction parallel to the mounting surface D through the fourth transmission mechanism. The fourth driving member 42 includes, for example, a rotating electric machine for supplying rotational power, and preferably includes a speed reducer 43 connected to the rotating electric machine, which may be a servo motor. In this case, the fourth transmission mechanism is used to convert the rotational power output from the rotating electric machine into linear power and transmit it to the boat carrier assembly 5.
Specifically, the fourth transmission mechanism includes a telescopic base 41, a transition base 44, a second belt structure, a first link 45, a second link 46, and a third guide rail 47, wherein the telescopic base 41 is fixed to the third movement assembly 3, for example, to the rotating base 31 of the third movement assembly 3. The third guide rail 47 is fixed to the telescopic base 41 or the transition base 44; the transition base 44 or the telescopic base 41 is movably connected to the third rail 47 along the extending direction of the third rail 47. The second driving belt structure and the fourth driving member 42 are both fixed on the transition base 44, and the fourth driving member 42 is connected with the driving wheel 481 of the second driving belt structure, and is used for driving the driving wheel 481 to rotate and driving the driving belt 482 of the second driving belt structure to move; the first connecting piece 45 is fixedly connected with the telescopic base 41 and the driving belt 482 of the second driving belt structure respectively at one side of the driving belt 482 of the second driving belt structure adjacent to the telescopic base 41; the second connecting piece 46 is fixedly connected with the wafer boat bearing assembly 5 and the driving belt 482 of the second driving belt structure respectively at one side of the driving belt 482 of the second driving belt structure away from the telescopic base 41; further, as shown in fig. 10, when the first link 45 is moved to a position close to one of the driving pulley 481 and the driven pulley 483 of the second belt structure, the second link 46 is moved to a position close to the other.
When the driving wheel 481 of the fourth driving member 42 drives the second driving belt structure to rotate, the driving belt 482 sleeved on the driving wheel 481 and the driven wheel 483 moves, and two straight sections of the driving belt 482 parallel to each other in the second direction (i.e., the vertical direction) are a first straight section 482a and a second straight section 482b, respectively, wherein the first straight section 482a is adjacent to the telescopic base 41 and fixedly connected with the first connecting member 45; the second straight section 482b is located on a side of the first straight section 482a away from the telescopic base 41 and is fixedly connected with the second connecting member 46. During movement of the first and second straight segments 482a, 482b, the first and second connectors 45, 46 are relatively stationary with the first and second straight segments 482a, 482b, respectively, i.e., the first and second connectors 45, 46 are movable relative to the transition base 44 in opposite directions of movement. On this basis, the first connecting piece 45 is fixedly connected with the telescopic base 41, and under the condition that the telescopic base 41 is fixed, the transition base 44 can move relative to the telescopic base 41 under the driving of the second driving belt structure, for example, the transition base 44 extends from the telescopic base 41 to the right side from the position of fig. 9, and in the process, the third guide rail 47 plays a role in guiding the transition base 44. The second connecting piece 46 is connected with the boat carrier assembly 5, when the transition base 44 moves relative to the telescopic base 41, the boat carrier assembly 5 moves relative to the transition base 44 under the driving of the second driving belt structure, for example, the transition base 44 stretches out from the telescopic base 41 to the right side of the transition base to the position of fig. 10 under the driving of the second driving belt structure, and meanwhile, the boat carrier assembly 5 stretches out from the transition base 44 to the right side of the transition base to the position of fig. 10 from the position of fig. 9, so that the two parts can be driven to perform telescopic actions simultaneously by one rotating motor, and the telescopic distance of the boat carrier assembly 5 relative to the telescopic base 41 can be prolonged, so that the process requirement of a large moving stroke can be met. For example, as shown in fig. 9, the maximum length of the overall structure of the fourth moving assembly 4 in the original state is 1200mm, and as shown in fig. 10, the maximum length of the overall structure in the extended state is 2490mm. Comparing the maximum length of the whole structure of the fourth motion assembly 4 in the original state and the extended state shows that the occupied area of the fourth motion assembly 4 in the original state is small, and when the fourth motion assembly is switched to the extended state, the fourth motion assembly can have enough extension distance, so that the process requirement of a large moving stroke can be met, and meanwhile, the occupied area is reduced. Meanwhile, by combining the structure that the fourth moving assembly 4 adopting the above structure and the third moving assembly 3 drive the fourth moving assembly 4 to rotate around the rotation center line O perpendicular to the mounting surface D, the radius of gyration of the fourth moving assembly 4 and the boat carrier assembly 5 in the original state is small when the third moving assembly 3 drives both to synchronously rotate, and as can be seen by combining the overall structure of the boat transfer device shown in fig. 2 and 3, the occupied space of the fourth moving assembly 4 and the boat carrier assembly 5 in the original state when rotating is approximately the same as the occupied space of the overall structure of the boat transfer device, no additional space is occupied, and compared with the additional space required when the arm of the six-axis manipulator in the prior art is required to rotate, the radius of gyration of the overall structure of the boat transfer device can be effectively reduced, so that the occupied space of the overall device can be reduced.
It will be readily appreciated that in order to ensure that the first and second links 45, 46 do not rotate with the conveyor belt 482 to a curved section around either the primary or secondary drive wheels 481, 482, the first link 45 moves to a position adjacent one of the primary and secondary drive wheels 481, 483 of the second conveyor belt structure as the second link 46 moves to a position adjacent the other.
In some embodiments, the number of the third guide rails 47 is two, and one of the telescopic base 41 and the transition base 44 is disposed opposite to the other of the telescopic base and the transition base, and the other of the telescopic base and the transition base is movably connected to the two third guide rails 47 along the extending direction of each third guide rail 47, so that the two third guide rails 47 can be ensured to stably support the transition base 44.
In some embodiments, the fourth transmission mechanism further includes at least one fourth rail 49, and the fourth rail 49 is fixed to one of the transition pedestal 44 and the boat carrier assembly 5 and is parallel to the third rail 47. The other of the transition pedestal 44 and the boat carrier assembly 5 is movably connected to the fourth rail 49 along the extending direction of the fourth rail 49. The fourth guide rail 49 guides the boat carrier assembly 5 during the process that the boat carrier assembly 5 is driven by the second belt structure to move relative to the transition base 44.
In some embodiments, the third guide rail 47 includes a guide rail body and a guide rail slider slidably connected thereto, wherein the guide rail body is fixed to one of the telescopic base 41 and the transition base 44, and the guide rail slider is fixed to the other, so that the relative movement of the telescopic base 41 and the transition base 44 can be achieved. Similarly, the fourth guide rail 49 includes a guide rail body and a guide rail slider slidably connected thereto, wherein the guide rail body is fixed to one of the telescopic base 41 and the transition base 44, and the guide rail slider is fixed to the other, so that the relative movement of the transition base 44 and the boat carrier assembly 5 can be achieved.
In this case, the fourth driving member 42 may be a linear motor for providing linear power, and the fourth transmission mechanism is configured to transmit the linear power output from the linear motor to the boat carrier assembly 5. The fourth driving member 42 may be another driving source such as an air cylinder or a hydraulic cylinder, and the embodiment of the present invention is not limited thereto.
The wafer boat carrying assembly 5 is used for carrying a wafer boat and carrying out picking and placing operations on the wafer boat. Referring to fig. 12 and 13 together, the boat carrier 5 for performing this function includes, for example, a pallet 51 and a fixing structure, where the pallet 51 is fixed to the fourth moving assembly 4, for example, the second connecting member 46 fixed to the fourth moving assembly 4, for carrying the boat 6; the fixing structure is provided on the support plate 51 for fixing the boat 6 to the support plate 51 or releasing the fixing of the boat 6.
The fixing structure is used for preventing the wafer boat 6 from falling off the supporting plate 51. In some embodiments, the above-mentioned fixing structure may automatically fix the boat 6 or automatically release the fixing of the boat 6, specifically, the fixing structure includes a fifth driving member 52, a fifth transmission mechanism, and a fixing member 54, where the fifth driving member 52 is connected with the supporting plate 51, and the fixing member 54 is driven to move to a fixing position for fixing the boat 6 on the supporting plate 51 by the fifth transmission mechanism, or a non-fixing position for releasing the fixing of the boat 6.
The fifth driving part 52 includes, for example, a linear cylinder for providing linear power, in which case the fifth driving mechanism includes a first driving lever 531, a second driving lever 532, and a plurality of connection seats 55, wherein the plurality of connection seats 55 are fixed to the tray 51 and are disposed at intervals on one side of a carrying surface of the tray 51 for carrying the wafer boat 6; the first transmission rod 531 sequentially penetrates through the plurality of connecting seats 55 and can rotate relative to each connecting seat 55; the fifth driving member 52 is rotatably coupled to the supporting plate 51 for providing linear power; the second transmission rod 532 is connected to the driving shaft 521 of the fifth driving member 52, and the second transmission rod 532 is perpendicular to the driving shaft 521 and parallel to the first transmission rod 531, i.e., parallel to the E direction; one or more fixing pieces 54 are arranged, and the fixing pieces 54 are arranged at intervals along the extending direction of the first transmission rod 531; each fixing piece 54 comprises a first fixing arm 541 and a second fixing arm 542 which form an included angle, one end of the first fixing arm 541 is connected with one end of the second fixing arm 542, and the connection part of the first fixing arm 541 and the second fixing arm 542 is connected with a first transmission rod 531; the other end of the first fixing arm 541 is connected to the second transmission lever 532; the fifth driving member 52 can drive the second transmission rod 532 and rotate the first fixing arm 541 and the second fixing arm 542 around the first transmission rod 531 such that the second fixing arm 542 can be located at the fixed position as shown in fig. 13 or the non-fixed position as shown in fig. 12. It will be appreciated that as the second transfer lever 532 rotates about the first transfer lever 531, there is a change in height in the second direction (i.e., the vertical direction), which requires the fifth drive member 52 (e.g., the housing) to be rotatably coupled to the pallet 51 so that the angle between the fifth drive member 52 and the pallet 51 can be varied as the second transfer lever 532 rotates.
When the driving shaft 521 of the fifth driving member 52 extends, the second transmission rod 532 may rotate clockwise relative to the first transmission rod 531 and drive the second fixing arm 542 to rotate clockwise through the first fixing arm 541, so that the second fixing arm 542 can be pressed down toward the direction approaching to the bearing surface of the pallet 51, thereby fixing the boat 6; when the driving shaft 521 of the fifth driving member 52 is retracted, the second transmission rod 532 may rotate counterclockwise relative to the first transmission rod 531 and drive the second fixing arm 542 to rotate counterclockwise via the first fixing arm 541, so that the second fixing arm 542 may move in a direction away from the bearing surface of the pallet 51, thereby releasing the fixing of the wafer boat 6.
The fifth driving element 52 may be any other driving source such as an electric cylinder or a hydraulic cylinder, and the embodiment of the present invention is not limited thereto.
The boat transfer device provided by the embodiment of the invention is positioned at the initial position corresponding to the temporary storage station C and the process chamber A in FIG. 2. When the boat on the temporary storage station C needs to be transferred to the process chamber A, firstly, the third motion assembly 3 is utilized to rotate the boat bearing assembly 5 clockwise by 90 degrees from the current position in FIG. 2, and the boat bearing assembly 5 is opposite to the transfer port of the temporary storage station C; then, the fourth moving assembly 4 is utilized to extend the wafer boat bearing assembly 5 to a direction close to the transmission port of the temporary storage station C, so that the wafer boat bearing assembly 5 can extend below the wafer boat on the temporary storage station C; then, the second motion assembly 2 is utilized to lift the wafer boat carrying assembly 5 so as to enable the wafer boat carrying assembly to hold up the wafer boat; then, the fourth moving assembly 4 is utilized to retract the wafer boat bearing assembly 5 in a direction away from the transmission port of the temporary storage station C, and after the retraction is in place, the second moving assembly 2 is utilized to descend the wafer boat bearing assembly 5 to an initial height position; then, the third motion assembly 3 is utilized to rotate the wafer boat carrying assembly 5 anticlockwise by 90 degrees, and the wafer boat carrying assembly 5 is opposite to the transmission port of the process chamber A; then, the fourth motion assembly 4 is utilized to extend the boat carrying assembly 5 (carrying the boat) towards the direction close to the transmission port of the process chamber A, so that the boat carrying assembly 5 can extend into the process chamber A and be positioned above the base in the process chamber A; then, the boat carrying assembly 5 is lowered by the second moving assembly 2 so that the boat thereon is transferred to the susceptor; then, the boat carrier assembly 5 is retracted by the fourth moving assembly 4 in a direction away from the transfer port of the process chamber a, thereby completing the transfer of the boat at the temporary storage station C to the process chamber a.
When the process chamber A completes the process, the wafer boat bearing assembly 5 is extended out by the fourth moving assembly 4 towards the direction close to the transmission port of the process chamber A, so that the wafer boat bearing assembly 5 can extend into the process chamber A and is positioned below the base in the process chamber A; then, the second motion assembly 2 is utilized to lift the wafer boat carrying assembly 5, so that the wafer boat on the base is transferred to the wafer boat carrying assembly 5; then, the fourth moving assembly 4 is utilized to retract the wafer boat carrying assembly 5 in a direction away from the transmission port of the process chamber A, after the retraction is in place, the third moving assembly 3 is utilized to rotate the wafer boat carrying assembly 5 clockwise by 90 degrees, and at the moment, the wafer boat carrying assembly 5 is opposite to the transmission port of the temporary storage station C; then, the fourth moving assembly 4 is utilized to extend the wafer boat bearing assembly 5 to a direction close to the transmission port of the temporary storage station C, so that the wafer boat bearing assembly 5 can extend above the temporary storage station C; then, the boat-carrying assembly 5 is lowered by the second moving assembly 2 so that the boat thereon is transferred to the temporary storage station C, thereby completing the transfer of the boat completed from the process chamber a to the temporary storage station C.
The boat transfer between the process chamber B and the temporary storage station C, and the boat transfer between the process chamber a and the process chamber B may be implemented by using a similar transfer process as described above, which is not described herein.
In summary, according to the boat transfer device provided by the embodiment of the invention, the first motion assembly, the second motion assembly, the third motion assembly, the fourth motion assembly and the boat bearing assembly are sequentially connected, so that the boat bearing assembly can move and rotate in corresponding directions under the drive of any one of the first motion assembly, the second motion assembly, the third motion assembly and the fourth motion assembly, thereby realizing the functions that the boat bearing assembly moves between the temporary storage station and a plurality of process chambers, and the boat is taken out from the temporary storage station and put into the process chambers.
For example, as shown in fig. 2 and 3, by sequentially connecting the first motion assembly 1, the second motion assembly 2, the third motion assembly 3, the fourth motion assembly 4 and the boat carrier assembly 5, the overall occupied area of the combined structure formed by these assemblies is substantially the same as the occupied area of the first moving base 16 in the first motion assembly 1, and at the same time, when the combined structure rotates (the fourth motion assembly 4 and the boat carrier assembly 5 are driven to rotate synchronously by the third motion assembly 3), the occupied space of the fourth motion assembly 4 and the boat carrier assembly 5 in the original state is substantially the same as the occupied space of the overall structure of the boat transfer device (or the occupied space is substantially the same as the occupied area of the first moving base 16 in the first motion assembly 1), no additional space is occupied, which is compared with the additional space required for the arm of the six-axis manipulator in the prior art when rotating, the radius of revolution of the overall structure of the boat transfer device can be effectively reduced, and thus the occupied area of the whole equipment can be reduced.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.

Claims (12)

1. The wafer boat transferring device is characterized by comprising a first motion assembly, a second motion assembly, a third motion assembly, a fourth motion assembly and a wafer boat bearing assembly which are sequentially connected, wherein,
the first moving assembly is fixed on the mounting surface and is used for driving the second moving assembly and driving the third moving assembly, the fourth moving assembly and the wafer boat bearing assembly to synchronously move along a first direction parallel to the mounting surface;
the second motion assembly is used for driving the third motion assembly and driving the fourth motion assembly and the wafer boat bearing assembly to synchronously move along a second direction perpendicular to the mounting surface;
the third motion assembly is used for driving the fourth motion assembly and driving the wafer boat bearing assembly to synchronously rotate around a rotation center line perpendicular to the mounting surface;
The fourth motion assembly is connected with the wafer boat bearing assembly and is used for driving the wafer boat bearing assembly to move along any direction parallel to the mounting surface.
2. The boat transfer apparatus of claim 1, wherein the first motion assembly comprises a stationary base, a first driving member, and a first transmission mechanism, wherein,
the fixed base is fixed on the mounting surface;
the first driving piece is used for driving the second moving assembly through the first transmission mechanism and driving the third moving assembly, the fourth moving assembly and the wafer boat bearing assembly to synchronously move along the first direction.
3. The boat transfer apparatus of claim 2, wherein the first transmission mechanism comprises a rack, a pinion, a first rail, and a first moving base, wherein,
the rack and the first guide rail are both fixed on the fixed base and are both arranged in an extending manner along the first direction; the gear is meshed with the rack;
the first moving base is movably connected to the first guide rail along the first direction, and the first moving base is connected with the second moving component;
The first driving piece is fixed on the first movable base, connected with the gear and used for driving the gear to rotate so as to drive the first movable base to move along the first direction relative to the first guide rail.
4. The boat transfer apparatus of claim 1 wherein the second motion assembly comprises a second drive member and a second transmission mechanism, wherein,
the second driving piece is fixed on the first motion assembly and is used for driving the third motion assembly to move along the second direction through the second transmission mechanism.
5. The boat transfer apparatus of claim 4, wherein the second drive mechanism comprises a first drive belt structure, a lead screw nut structure, a second guide rail, and a second moving base, wherein,
the second guide rail is fixed on the first motion assembly and extends along the second direction, and the second movable base is movably connected with the second guide rail along the second direction; the second movable base is connected with the third movement assembly;
the second driving piece is fixed on the first motion assembly, is connected with the driving wheel of the first driving belt structure and is used for driving the first driving wheel to rotate and driving the conveying belt of the first driving belt structure to move; the screw rod of the screw rod nut structure extends along the second direction and is connected with the driven wheel of the first transmission belt structure; the nut of the screw nut structure is connected with the second movable base.
6. The boat transfer apparatus of claim 1, wherein the third motion assembly comprises a third drive member and a third transmission mechanism, wherein,
the third driving piece is used for driving the fourth motion assembly to rotate around the rotation center line through the third transmission mechanism.
7. The boat transfer apparatus of claim 6, wherein the third transmission mechanism comprises a drive gear, a rotary bearing structure, and a rotary base, wherein,
the third driving piece is connected with the driving gear and is used for driving the driving gear to rotate;
the rotary bearing structure comprises a bearing with an external gear and a fixed shaft in rotary connection with the bearing, wherein the fixed shaft is fixed on the second motion assembly; the external gear of the bearing is meshed with the driving gear so that the bearing can rotate around the rotation center line relative to the fixed shaft;
the rotating base is connected with the bearing and the fourth motion assembly.
8. The boat transfer apparatus of claim 1, wherein the fourth motion assembly comprises a fourth driving member and a fourth transmission mechanism, wherein,
The fourth driving piece is used for driving the boat bearing assembly to move along any direction parallel to the mounting surface through the fourth transmission mechanism.
9. The boat transfer apparatus of claim 8, wherein the fourth drive mechanism comprises a telescoping base, a transition base, a second belt structure, a first link, a second link, and a third rail, wherein,
the telescopic base is fixed on the third motion assembly; the third guide rail is fixed to one of the telescopic base and the transition base; the other of the telescopic base and the transition base is movably connected to the third guide rail along the extending direction of the third guide rail;
the second driving belt structure and the fourth driving piece are both fixed on the transition base, and the fourth driving piece is connected with the driving wheel of the second driving belt structure and is used for driving the second driving belt structure to rotate and driving the driving belt of the second driving belt structure to move;
the first connecting piece is fixedly connected with the telescopic base and the driving belt of the second driving belt structure respectively at one side of the driving belt of the second driving belt structure adjacent to the telescopic base; the second connecting piece is fixedly connected with the wafer boat bearing assembly and the driving belt of the second driving belt structure respectively at one side of the driving belt of the second driving belt structure far away from the telescopic base; and, when the first connecting member is moved to a position close to one of the driving pulley and the driven pulley of the second belt structure, the second connecting member is moved to a position close to the other.
10. The boat transfer apparatus of any one of claims 1-9, wherein the boat carrier assembly comprises a pallet and a fixed structure, wherein the pallet is fixed to the fourth motion assembly for carrying a boat;
the fixing structure is arranged on the supporting plate and is used for fixing the wafer boat on the supporting plate or releasing the fixation of the wafer boat.
11. The boat transfer apparatus of claim 10, wherein the fixing structure comprises a fifth driving member, a fifth transmission mechanism, and a fixing member, wherein,
the fifth driving piece is connected with the supporting plate, and drives the fixing piece to move to a fixing position for fixing the wafer boat on the supporting plate or to a non-fixing position for releasing the fixing of the wafer boat through the fifth transmission mechanism.
12. The boat transfer apparatus of claim 11, wherein the fifth transmission mechanism comprises a first transmission rod, a second transmission rod, and a plurality of connection seats, wherein the plurality of connection seats are fixed on the pallet and are arranged at intervals on one side of a carrying surface of the pallet for carrying the boat;
the first transmission rod sequentially penetrates through the plurality of connecting seats and can rotate relative to each connecting seat;
The fifth driving piece is rotatably connected with the supporting plate and is used for providing linear power; the second transmission rod is connected with the driving shaft of the fifth driving piece, is perpendicular to the driving shaft and is parallel to the first transmission rod;
the fixing pieces are one or more, and the fixing pieces are arranged at intervals along the extending direction of the first transmission rod; each fixing piece comprises a first fixing arm and a second fixing arm which form an included angle, one end of each first fixing arm is connected with one end of each second fixing arm, and the connecting position of each first fixing arm and each second fixing arm is connected with the first transmission rod; the other end of the first fixed arm is connected with the second transmission rod;
the fifth driving piece can drive the second transmission rod and drive the first fixing arm and the second fixing arm to rotate around the first transmission rod, so that the second fixing arm can be located at the fixed position or the non-fixed position.
CN202311402801.6A 2023-10-26 2023-10-26 Wafer boat transfer device Pending CN117293074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311402801.6A CN117293074A (en) 2023-10-26 2023-10-26 Wafer boat transfer device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311402801.6A CN117293074A (en) 2023-10-26 2023-10-26 Wafer boat transfer device

Publications (1)

Publication Number Publication Date
CN117293074A true CN117293074A (en) 2023-12-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311402801.6A Pending CN117293074A (en) 2023-10-26 2023-10-26 Wafer boat transfer device

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