CN117270246B - LCOS full-automatic packaging system - Google Patents
LCOS full-automatic packaging system Download PDFInfo
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- CN117270246B CN117270246B CN202311284836.4A CN202311284836A CN117270246B CN 117270246 B CN117270246 B CN 117270246B CN 202311284836 A CN202311284836 A CN 202311284836A CN 117270246 B CN117270246 B CN 117270246B
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- 238000004806 packaging method and process Methods 0.000 title claims abstract description 43
- 238000001514 detection method Methods 0.000 claims abstract description 135
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 101
- 238000007405 data analysis Methods 0.000 claims abstract description 48
- 238000009826 distribution Methods 0.000 claims abstract description 37
- 239000011521 glass Substances 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 238000001228 spectrum Methods 0.000 claims abstract description 12
- 210000002858 crystal cell Anatomy 0.000 claims description 31
- 230000002159 abnormal effect Effects 0.000 claims description 26
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000004364 calculation method Methods 0.000 claims description 7
- 238000004458 analytical method Methods 0.000 claims description 6
- 239000000284 extract Substances 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 abstract description 8
- 238000000034 method Methods 0.000 description 6
- 238000003825 pressing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012986 modification Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 4
- 239000013307 optical fiber Substances 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- -1 deuterium halogen Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the field of LCOS packaging detection, in particular to a LCOS full-automatic packaging system, which comprises: the liquid crystal box packaging unit is used for exerting pressure on the aligned ITO glass substrate and the LCOS silicon wafer to form a liquid crystal box with a preset gap; the information acquisition unit is used for acquiring the demand information; the data analysis unit is used for determining the light intensity characteristic points and the maximum reference difference values corresponding to the detection points according to the spectrum images corresponding to the detection points, and determining the working mode according to the maximum reference difference values; the detection and adjustment unit is used for determining an adjustment and judgment mode according to the thickness uniformity of the target liquid crystal box, and comprises a first adjustment and judgment mode for detecting and analyzing a thickness reference value of the target liquid crystal box and a second adjustment and judgment mode for detecting and analyzing thickness distribution of the target liquid crystal box; the invention improves the thickness detection precision of the LCOS liquid crystal box and improves the preparation precision of the LCOS liquid crystal box by adjusting working parameters.
Description
Technical Field
The invention relates to the field of LCOS packaging detection, in particular to a LCOS full-automatic packaging system.
Background
The LCOS (Liquid Crystal on silicon) is a reflective liquid crystal micro panel display technology, and has the characteristics of high light utilization efficiency, small volume, high aperture opening ratio, mature manufacturing technology and the like. However, in the existing LCOS package, the thickness uniformity of the LCOS package is not easy to be ensured, the thickness is easy to deviate, the product is easy to be disqualified, and the problem of lower yield is caused, so how to improve the thickness precision of the package of the LCOS is a problem to be solved by the current technicians.
Chinese patent publication No. CN116381981a discloses a method for manufacturing an LCOS chip case without a pad support and an LCOS chip, wherein the method comprises: providing an LCOS chip product to be packaged; the LCOS chip product to be packaged is arranged between an upper plate mask of packaging equipment and a lower plate mask of the packaging equipment, and the packaging equipment is sealed; applying target pressure on a cover plate of the packaging equipment through a pressure device of the packaging equipment, and solidifying the LCOS chip product after the packaging equipment is fixed through a fixing device between the cover plate and the base to obtain the packaged LCOS chip product, and transmitting the pressure to a frame of the LCOS chip product to be packaged through an annular mask plate, so that the center of a panel of the LCOS chip product to be packaged is not required to be contacted, and the situation that the uniformity of the thickness of a box is poor due to collapse of the center of the panel is reduced; therefore, the above technical scheme improves the uniformity of the prepared thickness of the liquid crystal box by a pressure application mode without contacting the center of the panel of the LCOS chip product to be packaged, but does not consider how to rapidly detect whether the required thickness uniformity is realized after the preparation is finished and how to correspondingly adjust the liquid crystal box when the thickness uniformity is unqualified so as to improve the subsequent preparation precision.
Disclosure of Invention
Therefore, the invention provides a full-automatic LCOS packaging system, which is used for solving the problems that the thickness detection effect of a liquid crystal box after LCOS packaging is poor and the preparation precision is poor due to the fact that the follow-up preparation adjustment cannot be effectively carried out when the thickness is not in accordance with the requirement in the prior art.
To achieve the above object, the present invention provides an LCOS full-automatic packaging system, comprising:
the liquid crystal box packaging unit is used for exerting pressure on the aligned ITO glass substrate and the LCOS silicon wafer to form a liquid crystal box with a preset gap;
the information acquisition unit is connected with the liquid crystal box packaging unit and is used for detecting the thickness of each detection point of the prepared liquid crystal box so as to acquire the requirement information;
the data analysis unit is connected with the liquid crystal box packaging unit and the information acquisition unit and is used for determining light intensity characteristic points and maximum reference difference values corresponding to all detection points according to the spectrum images corresponding to all detection points and determining a working mode according to the maximum reference difference values;
the working modes comprise a first working mode and a second working mode, and the data analysis unit adjusts the light source intensity of the information acquisition unit in the first working mode; calculating the thickness of a corresponding detection point according to the maximum reference difference value in the second working mode;
the detection and adjustment unit is connected with the liquid crystal box packaging unit, the information acquisition unit and the data analysis unit and is used for determining an adjustment and judgment mode according to the thickness uniformity of the target liquid crystal box;
the adjusting judging modes comprise a first adjusting judging mode and a second adjusting judging mode, wherein the detecting and adjusting unit detects and analyzes the thickness reference value of the target liquid crystal box in the first adjusting judging mode, and the detecting and adjusting unit detects and analyzes the thickness distribution of the target liquid crystal box in the second adjusting judging mode;
the demand information comprises spectral images corresponding to detection points of the target liquid crystal box.
Further, the data analysis unit controls the information acquisition unit to perform thickness detection for the target liquid crystal cell under the first data analysis condition, and the thickness detection includes: the information acquisition unit adopts detection light beams to sequentially and vertically irradiate each detection point on the surface of the target liquid crystal box and acquire a spectrum image, the data analysis unit extracts each light intensity characteristic point in the spectrum image and extracts a reference difference value between each adjacent light intensity characteristic points, and the data analysis unit determines a corresponding working mode according to the maximum reference difference value, and the information acquisition unit comprises: a first mode of operation for adjusting the light source intensity of the information acquisition unit when the maximum reference difference is in a first preset difference state, and,
calculating a second working mode of the thickness of the corresponding detection point according to the maximum reference difference value when the maximum reference difference value is in a second preset difference value state;
the first data analysis condition is that the working parameter of the information acquisition unit is set and an operation instruction is received.
Further, the data analysis unit detects a distance difference between the maximum reference difference and a preset maximum reference difference under a second data analysis condition,
if the interval difference value is smaller than 0, the data analysis unit increases and adjusts the light source intensity according to the interval difference value, and the increase of the light source intensity and the interval difference value are in a negative correlation;
the second data analysis condition is that the maximum reference difference value corresponding to the single detection point is in a first preset difference value state and the data analysis unit is in a first working mode.
Further, the data analysis unit determines the thickness K of the corresponding detection point according to the maximum reference difference value and the light intensity characteristic point corresponding to the maximum reference difference value under the third data analysis condition through a thickness calculation formula, wherein the thickness calculation formula is as follows:
wherein, L1 is the first light intensity characteristic point corresponding to the maximum reference difference, L2 is the second light intensity characteristic point corresponding to the maximum reference difference, and DeltaL is the maximum reference difference.
Further, the detection and adjustment unit calculates thickness uniformity of the target liquid crystal cell under a first detection and adjustment condition, and determines an adjustment determination mode according to the thickness uniformity, including: the thickness uniformity is in a first thickness uniformity state, a first adjustment determination mode for detecting and analyzing a thickness reference value of the target liquid crystal cell, and,
the thickness uniformity is in a second thickness uniformity state, and a second regulation judgment mode of detection analysis is carried out aiming at the thickness distribution of the target liquid crystal box;
the first detection adjustment condition is that thickness detection for all detection points is completed.
Further, the detection and adjustment unit detects a thickness reference value of the target liquid crystal box under a second detection and adjustment condition, and if the thickness reference value is greater than or less than the required thickness, the detection and adjustment unit judges that the fitting pressure is adjusted;
the adjustment trend of the attaching pressure and the adjustment quantity are related to the thickness reference value;
the second detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a first thickness uniformity state.
Further, the detection and adjustment unit detects the thickness distribution of the target liquid crystal cell under the third detection and adjustment condition, and if the thickness distribution is in the first thickness distribution state, the detection and adjustment unit judges that optical path compensation is performed on the target liquid crystal cell;
if the thickness distribution is in the second thickness distribution state, the detection and adjustment unit judges that judgment information is transmitted to a user so as to remind the user of manual detection and analysis;
and the third detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a second thickness uniformity state.
Further, the first thickness distribution state is that the thickness uniformity of the target liquid crystal box is in an abnormal thickness reference range, and the area of a minimum enclosing circle corresponding to an abnormal detection point is smaller than the area of a preset enclosing circle; and the second thickness distribution state is that the thickness uniformity of the target liquid crystal box is in an abnormal thickness reference range, and the area of a minimum enclosing circle corresponding to the abnormal detection point is larger than or equal to the area of a preset enclosing circle.
Further, the detection and adjustment unit detects an abnormal thickness average value of an abnormal detection point of the target liquid crystal cell under a fourth detection and adjustment condition, and determines an optical path compensation amount according to the abnormal thickness average value;
the optical path compensation position and the optical path compensation quantity are related to the average value of all thickness anomalies;
wherein the fourth detection adjustment condition is that the thickness distribution is in a first thickness distribution state.
Further, the abnormal detection point is a detection point with a corresponding thickness larger or smaller than the required thickness.
Compared with the prior art, the method has the advantages that the maximum reference difference value is in the first preset difference value state, the light source intensity of the information acquisition unit is regulated, the situation that the measured result is influenced by the fact that the light source intensity is lower than the detection requirement and the spectral curve peak value is too low is avoided, when the thickness reference value is larger than or smaller than the required thickness, the detection regulation unit judges that the attaching pressure is regulated, the attaching pressure is regulated according to the actual preparation condition, the attaching pressure is more in accordance with the actual working condition, the detection regulation unit detects the thickness distribution of the target liquid crystal box under the third detection regulation condition, if the thickness distribution is in the first thickness distribution state, the detection regulation unit judges that the optical path compensation is carried out on the target liquid crystal box, the compensation work is carried out on the liquid crystal box with the thickness preparation defect through the optical path compensation, the optical influence caused by the fact that the thickness of the liquid crystal box is uneven is effectively reduced through the optical compensation, the loss of materials is further reduced, the thickness detection accuracy of the liquid crystal box package is improved, different processing methods are adopted for different thickness states, and the working efficiency of the method is further improved.
Drawings
FIG. 1 is a block diagram of a LCOS fully automatic packaging system according to an embodiment of the present invention;
FIG. 2 is a flowchart of a data analysis unit according to an embodiment of the present invention for determining a corresponding working mode according to a maximum reference difference;
FIG. 3 is a flowchart of determining an adjustment determination mode by the detection adjustment unit according to thickness uniformity in an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating detection of an information acquisition unit according to an embodiment of the present invention;
in the figure: 1, a balanced deuterium-halogen lamp light source; 2, an optical fiber collimator; 3, a broadband beam splitter prism; 4, a target liquid crystal cell; and 5, an optical fiber probe.
Detailed Description
In order that the objects and advantages of the invention will become more apparent, the invention will be further described with reference to the following examples; it should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are merely for explaining the technical principles of the present invention, and are not intended to limit the scope of the present invention.
It should be noted that, in the description of the present invention, terms such as "upper," "lower," "left," "right," "inner," "outer," and the like indicate directions or positional relationships based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the apparatus or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention.
Furthermore, it should be noted that, in the description of the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention can be understood by those skilled in the art according to the specific circumstances.
Referring to fig. 1 to 3, the present invention provides a full-automatic LCOS packaging system, comprising:
the liquid crystal box packaging unit is used for exerting pressure on the aligned ITO glass substrate and the LCOS silicon wafer to form a liquid crystal box with a preset gap;
the information acquisition unit is connected with the liquid crystal box packaging unit and is used for detecting the thickness of each detection point of the prepared liquid crystal box so as to acquire the requirement information;
the data analysis unit is connected with the liquid crystal box packaging unit and the information acquisition unit and is used for determining light intensity characteristic points and maximum reference difference values corresponding to all detection points according to the spectrum images corresponding to all detection points and determining a working mode according to the maximum reference difference values;
the working modes comprise a first working mode and a second working mode, and the data analysis unit adjusts the light source intensity of the information acquisition unit in the first working mode; calculating the thickness of a corresponding detection point according to the maximum reference difference value in the second working mode;
the detection and adjustment unit is connected with the liquid crystal box packaging unit, the information acquisition unit and the data analysis unit and is used for determining an adjustment and judgment mode according to the thickness uniformity of the target liquid crystal box;
the adjusting judging modes comprise a first adjusting judging mode and a second adjusting judging mode, wherein the detecting and adjusting unit detects and analyzes the thickness reference value of the target liquid crystal box in the first adjusting judging mode, and the detecting and adjusting unit detects and analyzes the thickness distribution of the target liquid crystal box in the second adjusting judging mode;
the demand information comprises spectral images corresponding to detection points of the target liquid crystal box.
Specifically, the liquid crystal box packaging unit comprises a pressing machine, and the working steps of the pressing machine comprise:
preparation: the surfaces of the ITO glass substrate and the LCOS silicon wafer are ensured to be clean and flat, and the surfaces are cleaned by removing surface pollutants and deionized water.
Positioning: the ITO glass substrate and the LCOS silicon wafer were placed on the jig of the press and their positions and alignment were ensured.
And (3) pressing parameter setting: and setting appropriate pressing parameters including temperature, pressure and time according to the requirements and application of the specific application scene. Notably, these parameters will be adjusted according to the characteristics of the ITO glass substrate and LCOS silicon wafer and packaging requirements.
And (3) pressing: and starting the pressing machine to enable the upper clamp and the lower clamp to apply proper pressure and temperature. This will bring the ITO glass substrate and the LCOS silicon wafer into close contact and bond together.
Cooling and solidifying: after the bonding process is completed, the bonded ITO glass substrate and LCOS silicon wafer are cooled to room temperature by a cooling system or other methods.
The foregoing is what is understood by those skilled in the art, and is not described herein.
Specifically, the data analysis unit controls the information acquisition unit to perform thickness detection for the target liquid crystal cell under a first data analysis condition, and the thickness detection includes: the information acquisition unit adopts detection light beams to sequentially and vertically irradiate each detection point on the surface of the target liquid crystal box and acquire a spectrum image, the data analysis unit extracts each light intensity characteristic point in the spectrum image and extracts a reference difference value between each adjacent light intensity characteristic points, and the data analysis unit determines a corresponding working mode according to the maximum reference difference value, and the information acquisition unit comprises: a first mode of operation for adjusting the light source intensity of the information acquisition unit when the maximum reference difference is in a first preset difference state, and,
calculating a second working mode of the thickness of the corresponding detection point according to the maximum reference difference value when the maximum reference difference value is in a second preset difference value state;
the first preset difference state is that the maximum reference difference is less than or equal to 130% of the preset maximum reference difference and greater than or equal to the preset maximum reference difference; the second preset difference state is that the maximum reference difference is 130% or less than the preset maximum reference difference.
The first data analysis condition is that the working parameter of the information acquisition unit is set and an operation instruction is received.
The light intensity characteristic points are points corresponding to the maximum extremum and the minimum extremum of each wave crest in the spectrum image, the reference difference value is the absolute value of the difference value between the maximum extremum and the minimum extremum of the light intensity characteristic points adjacent to each other in the horizontal axis direction, the horizontal axis in the spectrum image is wavelength, and the vertical axis is reflectivity.
Referring to fig. 4, a schematic diagram of a detection diagram of an information acquisition unit according to an embodiment of the present invention is shown, the information acquisition unit includes a balanced deuterium halogen lamp light source 1, a light beam with a suitable spot size is collimated by an optical fiber collimator 2, and then is perpendicularly irradiated to a detection point on the surface of a target liquid crystal cell 4 after passing through a broadband beam splitting prism 3, the reflected light beam is received by an optical fiber probe 5 of a spectrometer, and according to a generated spectrogram of the received reflected light beam, the detection point is the surface of an ITO glass substrate of the target liquid crystal cell 4, and the light beam is incident into the surface of an LCOS silicon wafer of the target liquid crystal cell through the surface of the ITO glass substrate for reflection.
With continued reference to fig. 1 to 3, the data analysis unit detects a difference between the maximum reference difference and a preset maximum reference difference under a second data analysis condition, where the difference is a value obtained by subtracting the preset maximum reference difference from the maximum reference difference,
if the interval difference value is smaller than 0, the data analysis unit increases and adjusts the light source intensity according to the interval difference value, and the increase of the light source intensity and the interval difference value are in a negative correlation;
if the distance difference is greater than 130% of the preset maximum reference difference, the data analysis unit judges that the manually detected reminding information is transmitted to the user so as to redetermine the working parameters of the detection equipment;
the second data analysis condition is that the maximum reference difference value corresponding to the single detection point is in a first preset difference value state and the data analysis unit is in a first working mode.
Specifically, the preset maximum reference difference value is 80% of the average value of the maximum reference difference values in the history detection record, if the distance difference value is smaller than 0, the light source intensity is reflected to be lower than the detection requirement, so that the accuracy and the reliability of measurement are ensured, and the above contents are understood by those skilled in the art and are not repeated herein.
Specifically, the data analysis unit determines the thickness K of the corresponding detection point according to the maximum reference difference value and the light intensity characteristic point corresponding to the maximum reference difference value under the third data analysis condition through a thickness calculation formula, wherein the thickness calculation formula is as follows:
wherein, L1 is the first light intensity characteristic point corresponding to the maximum reference difference, L2 is the second light intensity characteristic point corresponding to the maximum reference difference, and DeltaL is the maximum reference difference.
Specifically, the detection adjustment unit calculates thickness uniformity of the target liquid crystal cell under a first detection adjustment condition, and determines an adjustment determination mode according to the thickness uniformity, including: the thickness uniformity is in a first thickness uniformity state, a first adjustment determination mode for detecting and analyzing a thickness reference value of the target liquid crystal cell, and,
the thickness uniformity is in a second thickness uniformity state, and a second regulation judgment mode of detection analysis is carried out aiming at the thickness distribution of the target liquid crystal box;
the first detection adjustment condition is that thickness detection for all detection points is completed.
Specifically, the calculation formula of the thickness uniformity S is:
where Ki is the thickness corresponding to each detection point i, K0 is the average value of the sum of the thicknesses of all detection points, i=1, 2,3, … …, n, n is the total number of detection points.
Specifically, the detection and adjustment unit detects a thickness reference value of the target liquid crystal box under a second detection and adjustment condition, and if the thickness reference value is greater than or less than a required thickness, the detection and adjustment unit determines to adjust the attaching pressure;
the adjustment trend of the attaching pressure and the adjustment quantity are related to the thickness reference value;
the second detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a first thickness uniformity state. The thickness reference value is the thickness average value of the target liquid crystal box, if the thickness average value is larger than the required thickness, the attaching pressure is increased and adjusted, the value obtained by subtracting the required thickness from the thickness average value is in positive correlation, and if the thickness average value is smaller than the required thickness, the attaching pressure is decreased and adjusted, and the value obtained by subtracting the thickness average value from the required thickness is in positive correlation.
The liquid crystal box packaging unit comprises a laminating machine, and the laminating pressure is the pressure of the laminating machine for laminating the ITO glass substrate and the LCOS silicon wafer.
Specifically, the detection and adjustment unit detects the thickness distribution of the target liquid crystal cell under the third detection and adjustment condition, and if the thickness distribution is in the first thickness distribution state, the detection and adjustment unit determines that optical path compensation is performed for the target liquid crystal cell;
if the thickness distribution is in the second thickness distribution state, the detection and adjustment unit judges that judgment information is transmitted to a user so as to remind the user of manual detection and analysis;
and the third detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a second thickness uniformity state.
Specifically, the first thickness distribution state is that the thickness uniformity of the target liquid crystal box is in an abnormal thickness reference range, and the area of a minimum enclosing circle corresponding to an abnormal detection point is smaller than the area of a preset enclosing circle; the second thickness distribution state is that the thickness uniformity of the target liquid crystal box is in an abnormal thickness reference range, the area of a minimum enclosing circle corresponding to an abnormal detection point is larger than or equal to the area of a preset enclosing circle, the numerical values in the abnormal thickness reference range are all larger than 0.1 mu m, the area of the preset enclosing circle is smaller than 10% of the area of an ITO glass substrate of the target liquid crystal box, and the minimum enclosing circle is the minimum circle which can comprise all abnormal monitoring points.
Specifically, the detection adjustment unit detects an abnormal thickness average value of an abnormal detection point of the target liquid crystal cell under a fourth detection adjustment condition, and determines an optical path compensation amount according to the abnormal thickness average value;
the optical path compensation position and the optical path compensation quantity are related to the average value of all thickness anomalies;
wherein the fourth detection adjustment condition is that the thickness distribution is in a first thickness distribution state.
Specifically, when the thickness of the liquid crystal cell is uneven, an optical compensation layer can be used to reduce the optical influence caused by the optical path difference, a thin film deposition device is used to deposit a thin film material of the optical compensation layer on the ITO glass substrate, the thin film material is an optical thin film material, and the coating agent of the optical path compensation amount is coated by a coating process to achieve the required performance of the compensation layer, and the thickness unevenness of the liquid crystal cell compensated by the optical compensation layer is easily understood by those skilled in the art, and will not be described herein.
Specifically, the abnormal detection point is a detection point with a corresponding thickness greater than or less than a required thickness, wherein the required thickness is a thickness of the liquid crystal cell to be prepared, and the thickness is a thickness of a preset gap of the liquid crystal cell in a vertical direction.
Specifically, if the thickness uniformity of the target liquid crystal cell is smaller than any value in the abnormal thickness reference range, the thickness uniformity of the target liquid crystal cell is judged to be qualified, and the thickness average value of the target liquid crystal cell is calculated and is K0.
Thus far, the technical solution of the present invention has been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of protection of the present invention is not limited to these specific embodiments. Equivalent modifications and substitutions for related technical features may be made by those skilled in the art without departing from the principles of the present invention, and such modifications and substitutions will be within the scope of the present invention.
The foregoing description is only of the preferred embodiments of the invention and is not intended to limit the invention; various modifications and variations of the present invention will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A LCOS fully automatic packaging system, comprising:
the liquid crystal box packaging unit is used for exerting pressure on the aligned ITO glass substrate and the LCOS silicon wafer to form a liquid crystal box with a preset gap;
the information acquisition unit is connected with the liquid crystal box packaging unit and is used for detecting the thickness of each detection point of the prepared liquid crystal box so as to acquire the requirement information;
the data analysis unit is connected with the liquid crystal box packaging unit and the information acquisition unit and is used for determining light intensity characteristic points and maximum reference difference values corresponding to all detection points according to the spectrum images corresponding to all detection points and determining a working mode according to the maximum reference difference values;
the working modes comprise a first working mode and a second working mode, and the data analysis unit adjusts the light source intensity of the information acquisition unit in the first working mode; calculating the thickness of a corresponding detection point according to the maximum reference difference value in the second working mode;
the detection and adjustment unit is connected with the liquid crystal box packaging unit, the information acquisition unit and the data analysis unit and is used for determining an adjustment and judgment mode according to the thickness uniformity of the target liquid crystal box;
the adjusting judging modes comprise a first adjusting judging mode and a second adjusting judging mode, wherein the detecting and adjusting unit detects and analyzes the thickness reference value of the target liquid crystal box in the first adjusting judging mode, and the detecting and adjusting unit detects and analyzes the thickness distribution of the target liquid crystal box in the second adjusting judging mode;
the demand information comprises spectral images corresponding to detection points of the target liquid crystal box.
2. The LCOS fully-automatic packaging system according to claim 1, wherein the data analysis unit controls the information acquisition unit to perform thickness detection for the target liquid crystal cell under the first data analysis condition, the thickness detection comprising: the information acquisition unit adopts detection light beams to sequentially and vertically irradiate each detection point on the surface of the target liquid crystal box and acquire a spectrum image, the data analysis unit extracts each light intensity characteristic point in the spectrum image and extracts a reference difference value between each adjacent light intensity characteristic points, and the data analysis unit determines a corresponding working mode according to the maximum reference difference value, and the information acquisition unit comprises: a first mode of operation for adjusting the light source intensity of the information acquisition unit when the maximum reference difference is in a first preset difference state, and,
calculating a second working mode of the thickness of the corresponding detection point according to the maximum reference difference value when the maximum reference difference value is in a second preset difference value state;
the first data analysis condition is that the working parameter of the information acquisition unit is set and an operation instruction is received.
3. The LCOS fully automatic packaging system according to claim 2, wherein the data analysis unit detects a difference in spacing between the maximum reference difference and a predetermined maximum reference difference under second data analysis conditions,
if the interval difference value is smaller than 0, the data analysis unit increases and adjusts the light source intensity according to the interval difference value, and the increase of the light source intensity and the interval difference value are in a negative correlation;
the second data analysis condition is that the maximum reference difference value corresponding to the single detection point is in a first preset difference value state and the data analysis unit is in a first working mode.
4. The LCOS fully-automatic packaging system according to claim 3, wherein the data analysis unit determines the thickness K of the corresponding detection point according to the maximum reference difference value and the light intensity characteristic point corresponding to the maximum reference difference value under the third data analysis condition by using a thickness calculation formula, and the thickness calculation formula is as follows:
wherein, L1 is the first light intensity characteristic point corresponding to the maximum reference difference, L2 is the second light intensity characteristic point corresponding to the maximum reference difference, and DeltaL is the maximum reference difference.
5. The LCOS fully automatic packaging system according to claim 4, wherein said detection and adjustment unit calculates thickness uniformity of the target liquid crystal cell under the first detection and adjustment conditions, and determines an adjustment determination mode according to the thickness uniformity, comprising: the thickness uniformity is in a first thickness uniformity state, a first adjustment determination mode for detecting and analyzing a thickness reference value of the target liquid crystal cell, and,
the thickness uniformity is in a second thickness uniformity state, and a second regulation judgment mode of detection analysis is carried out aiming at the thickness distribution of the target liquid crystal box;
the first detection adjustment condition is that thickness detection for all detection points is completed.
6. The LCOS fully automatic packaging system according to claim 5, wherein the detection and adjustment unit detects a thickness reference value of the target liquid crystal cell under the second detection and adjustment condition, and if the thickness reference value is greater than or less than the required thickness, the detection and adjustment unit determines to adjust the fitting pressure;
the adjustment trend of the attaching pressure and the adjustment quantity are related to the thickness reference value;
the second detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a first thickness uniformity state.
7. The LCOS fully automatic packaging system according to claim 5, wherein said detection and adjustment unit detects the thickness distribution of the target liquid crystal cell under a third detection and adjustment condition, and if the thickness distribution is in the first thickness distribution state, said detection and adjustment unit determines that optical path compensation is performed for the target liquid crystal cell;
if the thickness distribution is in the second thickness distribution state, the detection and adjustment unit judges that judgment information is transmitted to a user so as to remind the user of manual detection and analysis;
and the third detection and adjustment condition is that the thickness uniformity of the target liquid crystal box is in a second thickness uniformity state.
8. The LCOS fully-automatic packaging system according to claim 7, wherein the first thickness distribution state is that the thickness uniformity of the target liquid crystal cell is within an abnormal thickness reference range, and the area of the minimum bounding circle corresponding to the abnormal detection point is smaller than the area of the preset bounding circle; and the second thickness distribution state is that the thickness uniformity of the target liquid crystal box is in an abnormal thickness reference range, and the area of a minimum enclosing circle corresponding to the abnormal detection point is larger than or equal to the area of a preset enclosing circle.
9. The LCOS fully-automatic packaging system according to claim 8, wherein said detection and adjustment unit detects an abnormal thickness average value of the abnormal detection points of the target liquid crystal cell under the fourth detection and adjustment condition, and determines the optical path compensation amount based on the abnormal thickness average value;
the optical path compensation position and the optical path compensation quantity are related to the average value of all thickness anomalies;
wherein the fourth detection adjustment condition is that the thickness distribution is in a first thickness distribution state.
10. The LCOS fully-automatic packaging system according to claim 9, wherein the anomaly detection points are detection points having a corresponding thickness greater than or less than a desired thickness.
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| CN1326543A (en) * | 1999-09-20 | 2001-12-12 | 大塚电子株式会社 | Method and apparatus for measuring cell gap of va liquid crystal panel |
| CN1340690A (en) * | 2000-09-01 | 2002-03-20 | 精工爱普生株式会社 | Inspection method for liquid crystal box thickness, control system for liquid crystal box thickness and manufacture method for liquid crystal device |
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