CN117249976B - Device and method for detecting divergence angle of semiconductor laser - Google Patents
Device and method for detecting divergence angle of semiconductor laser Download PDFInfo
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- CN117249976B CN117249976B CN202311351715.7A CN202311351715A CN117249976B CN 117249976 B CN117249976 B CN 117249976B CN 202311351715 A CN202311351715 A CN 202311351715A CN 117249976 B CN117249976 B CN 117249976B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention provides a device for detecting a divergence angle of a semiconductor laser and a control method. Including the linear slide rail, sliding part is provided with rotary mechanism on the sliding part, is provided with laser instrument installation department on the rotary mechanism, installs the detector mounting bracket on the linear slide rail at laser instrument installation department contralateral side and be located, is provided with the detector one on the detector mounting bracket, and the detection area center of detector one is located same horizontal line with the light source center of laser instrument, and this horizontal line is perpendicular and crossing with rotary mechanism axis. The detection method comprises the following steps: and controlling the rotating mechanism to rotate according to the preset angle I and the preset speed I, and in the process, feeding back the detection information of the fast axis divergence angle to the computer system in real time by the detector I and storing a fast axis divergence angle detection result curve. The invention has the advantages of high detection efficiency, simple and convenient operation, good operation flexibility and stability and low detection cost.
Description
Technical Field
The invention relates to the technical field of semiconductor lasers, in particular to a device for detecting a divergence angle of a semiconductor laser and a control method.
Background
The semiconductor laser has the advantages of wide wavelength range, low cost, light weight, small volume, easy mass production and the like, and is applied to the fields of optical communication, laser radar, laser weapon, medical treatment and the like. However, due to the special waveguide structure of the semiconductor laser, the divergence angle of the output laser beam is larger and the distribution is asymmetric, the divergence angle of the fast axis perpendicular to the junction direction is about 50 degrees, the divergence angle of the slow axis parallel to the junction direction is about 10 degrees, and the semiconductor laser can be applied to practical engineering after the beam shaping in the production process. Therefore, accurately measuring the divergence angle of a semiconductor laser is of great importance for laser production and application.
At present, although mature semiconductor laser far-field divergence angle testing equipment is already available on the market, if CCD is adopted for direct measurement, because the LD chip laser energy is higher, in order to avoid burning CCD caused by CCD saturation, an attenuation sheet is generally required to be used for attenuating light intensity and then the CCD is used for collecting, so that the light intensity two-dimensional distribution on a CCD plane is obtained, and the far-field divergence angle of a light beam is calculated. However, CCD instruments are relatively expensive (typically imported and mostly over sixty-thousand per set), and are not conducive to wide spread.
In the prior art, document CN111351641a discloses a method and a device for measuring the far-field divergence angle of a laser: determining an X axis, a Y axis and a Z axis, forming a measuring plane by XZ, setting a laser at the origin of the measuring plane, and enabling a light sensitive surface of a detector to face a light emitting surface of the laser; the detector rotates on a Y axis, detects the light intensity of the laser, obtains the diameter of a light spot, and calculates a far-field divergence angle perpendicular to a junction plane or parallel to the junction plane; rotating the laser by 90 degrees, rotating the detector by a Y axis, detecting the light intensity emitted by the laser, obtaining the diameter of a light spot, and calculating a far-field divergence angle parallel to a junction plane or perpendicular to the junction plane; the vertical divergence angle and the horizontal divergence angle of the laser are obtained. However, it is difficult to ensure the accuracy of the detection result in the actual operation process by adopting the method, because the laser needs to be rotated by 90 degrees when detecting the vertical divergence angle and the horizontal divergence angle, which is difficult to ensure that the center of the light source is not changed after the laser is rotated by 90 degrees; moreover, the projections received as their detector is moved are likely to not correspond to the long and short axes of the spot center.
More importantly, the method for detecting the divergence angle of the laser by adopting the existing method also has the problem of complex operation process and has higher requirements on technicians. How to implement detection of the divergence angle of a semiconductor laser in a manner that is simple to operate and suitable for a person of ordinary skill using low cost equipment is a problem to be solved.
Disclosure of Invention
At least to solve the technical problems mentioned in the background art, the invention aims to provide a device for detecting the divergence angle of a semiconductor laser and a control method.
The invention adopts the following technical scheme. The device for detecting the divergence angle of the semiconductor laser comprises a linear slide rail and a sliding part matched with the linear slide rail, wherein a rotating mechanism is arranged on the sliding part, a laser mounting part is arranged on the rotating mechanism, a laser to be tested is arranged on the laser mounting part, a detector mounting frame is arranged on the opposite side of the laser mounting part and positioned on the linear slide rail, a first detector is arranged on the detector mounting frame, the center of a detection area of the first detector and the center of a light source of the laser are positioned on the same horizontal line, and the horizontal line is perpendicular to and intersected with the axis of the rotating mechanism; when the rotating mechanism horizontally rotates within a set angle range, the light of the plane where the fast axis of the laser is located can be always detected by the first detector and the detection result is fed back to the computer system.
In order to implement detection more efficiently, more simply and more accurately, an adjustable support is arranged on the sliding part, an arc-shaped arm rod is arranged on the adjustable support, one end of the arc-shaped arm rod is connected with a servo motor, and the arc-shaped arm rod simultaneously abuts against a limiting block; and a second detector is arranged at the center of the arc-shaped arm rod, when the servo motor drives the arc-shaped arm rod to rotate, the center of a detection area of the second detector always rotates on a spherical surface which takes the intersection point of the horizontal line and the rotation center line of the arc-shaped arm rod as a spherical center, and the intersection point of the rotation center line of the arc-shaped arm rod, the axis of the rotation mechanism and the horizontal line coincides with the light source center of the laser.
Further, the side of the sliding part is connected with a secondary sliding rail, the sliding surface of the secondary sliding rail is parallel to the sliding surface of the sliding part, and the adjustable support is arranged on the secondary sliding rail; the middle part of the adjustable support is provided with a hollowed-out area, the hollowed-out area can be used for the rotating mechanism to pass through, the adjustable support can slide to the left side of the rotating mechanism and also slide to the right side of the rotating mechanism, and the adjustable support can also slide to the area where the rotating mechanism is located.
In order to ensure more flexible operation on the basis of detection accuracy, the arc arm rod comprises an arc section and conical ejector rods connected to two ends of the arc section, and the conical surfaces of the conical ejector rods are matched with the conical holes in the limiting blocks.
As a preferred scheme, the conical ejector rod comprises a conical ejector rod I and a conical ejector rod II, wherein the outer end of the conical ejector rod I is connected with a servo motor, the inner end of the conical ejector rod I is abutted against a first limiting block, both ends of the conical ejector rod II are of conical structures, both ends of the conical ejector rod II are abutted against two second limiting blocks which are arranged at intervals at the same time, and the first limiting block and the second limiting block can be fixedly arranged on a linear sliding rail and can slide along the linear sliding rail after the limiting is released; one end of the arc-shaped section is connected to the middle of the first conical ejector rod, the other end of the arc-shaped section is connected to the middle of the second conical ejector rod, and the first limiting block and the second limiting block are matched with the linear slide rail; the conical ejector rod I and the conical ejector rod II are coaxially arranged and are positioned right above the linear slide rail.
Further, the effective detection surface of the second detector is of an arc-shaped structure, and the central angle corresponding to the arc-shaped structure is 120-150 degrees. The second detector can be spliced by a plurality of detectors, and can also be a detector with a curved surface structure.
In order to prevent the arc section from deflecting in the vertical direction, a vertically arranged screw rod lifting mechanism is arranged below the arc section, a vertically arranged U-shaped fork is arranged on a lifting component of the screw rod lifting mechanism, and the arc section is always supported on the inner wall of the U-shaped fork in a pressure-free state.
The method for detecting the divergence angle of the semiconductor laser by adopting the device comprises the following steps that a controller is connected with and controls a rotating mechanism, a detector, a servo motor, a lead screw lifting mechanism and a computer system, and when a processor of the controller executes a program, the controller realizes the following steps:
S1, controlling a servo motor to run, so that an arc-shaped arm lever deflects to a lower limit position or an upper limit position;
s2, firstly controlling the first detector and the computer system to be started, and then controlling the rotating mechanism to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector feeds back the detection information of the fast axis divergence angle to the computer system in real time and stores a detection result curve of the fast axis divergence angle; after the light detection of the plane where the fast axis of the laser is located is finished, closing the first detector;
S, controlling a second detector to be started, and then controlling a servo motor to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects to an upper limit position from a lower limit position or deflects to a lower limit position from the upper limit position; in the process, the screw rod lifting mechanism is synchronously controlled to run, so that the arc section is always supported on the inner wall of the U-shaped fork in a non-pressure state, and the detector I feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
The method for detecting the divergence angle of the semiconductor laser by adopting the device comprises the following steps that a controller is connected with and controls a rotating mechanism, a detector, a servo motor and a computer system, and when a processor of the controller executes a program, the following steps are realized:
S1, controlling a servo motor to run, so that an arc-shaped arm lever deflects to a lower limit position or an upper limit position;
s2, firstly controlling the first detector and the computer system to be started, and then controlling the rotating mechanism to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector feeds back the detection information of the fast axis divergence angle to the computer system in real time and stores a detection result curve of the fast axis divergence angle; after the light detection of the plane where the fast axis of the laser is located is finished, closing the first detector;
S, controlling a second detector to be started, and then controlling a servo motor to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects to an upper limit position from a lower limit position or deflects to a lower limit position from the upper limit position; in the process, the detector I feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
Further, before implementing step S1, the position of the detector is adjusted in advance, so that the effective detection surface of the detector is aligned to the spot center of the laser; when the two positions of the detector are adjusted: firstly controlling a second detector and a starting laser to start, then controlling an adjustable support to be positioned at an ascending initial point, and then controlling one end of an arc-shaped arm rod in a horizontal state to be fixed, and the other end of the arc-shaped arm rod to be compressed or stretched until the maximum light intensity in the fast axis direction is found; then, the adjustable support is controlled to ascend until the maximum value of the light intensity in the slow axis direction is found out, and the adjustable support is fixed.
For more convenient regulation, adopt the jackscrew adjusting part who installs at the inboard second stopper to adjust the position of two second stoppers in step, and then drive arc armed lever by axial stretching or axial compression.
The beneficial effects are that: by adopting the scheme of the invention, the divergence angle of the laser can be rapidly detected on the basis of one-time positioning of the laser, the rotating mechanism is rotated firstly to enable the laser to rotate to measure the divergence angle in the fast axis direction during detection operation, then the servo motor is controlled to work to enable the arc arm rod to deflect to measure the divergence angle in the slow axis direction, so that the detection efficiency is high, the laser is not required to rotate 90 degrees during detection operation, the operation is simple and convenient, and the advantages of good operation flexibility and stability are achieved; the scheme of the invention has the advantage of low detection cost, the used equipment does not need an attenuation sheet or a high CCD instrument, and the price of a single set of equipment under the condition of meeting the precision detection requirement can be controlled within twenty ten thousand yuan, and the single set of equipment can be used for replacing imported equipment with the same detection requirement.
Drawings
Fig. 1 and fig. 2 are schematic perspective views of an apparatus for detecting a divergence angle of a semiconductor laser according to an embodiment;
FIG. 3 is a schematic diagram showing the main direction of an apparatus for detecting the divergence angle of a semiconductor laser according to an embodiment;
FIG. 4 is a schematic view illustrating a device for detecting divergence angle of a semiconductor laser according to an embodiment;
FIG. 5 is a schematic perspective view of an arcuate arm in an embodiment;
FIG. 6 is a schematic view of a curved arm in a forward direction in an embodiment;
Fig. 7 is a schematic perspective view of a part of an apparatus for detecting a divergence angle of a semiconductor laser (a part where an arc arm is located) in the embodiment;
FIG. 8 is a schematic perspective view of an apparatus for detecting the divergence angle of a semiconductor laser (without U-shaped prongs) in an embodiment;
FIG. 9 is a schematic perspective view of an apparatus for detecting divergence angle of a semiconductor laser (an adjustable support is positioned on the right side of a rotating mechanism) according to an embodiment;
fig. 10 is a graph showing the result of fast axis divergence detection of a divergence angle of a semiconductor laser.
Detailed Description
The following description of the embodiments of the present invention will be made more apparent and fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
Referring to fig. 1 to 9, a device for detecting a divergence angle of a semiconductor laser includes a linear slide rail 1 and a sliding part 2 fitted on the linear slide rail 1, a rotation mechanism 3 is provided on the sliding part 2, a laser mounting part 4 is provided on the rotation mechanism 3, a laser to be tested is mounted on the laser mounting part 4, a detector mounting frame 5 is mounted on the opposite side of the laser mounting part 4 and on the linear slide rail 1, a first detector 6 is provided on the detector mounting frame 5, a detection area center of the first detector 6 and a light source center of the laser are positioned on the same horizontal line, and the horizontal line is perpendicular to and intersects with an axis of the rotation mechanism 3; when the rotating mechanism 3 rotates horizontally within the set angle range, the light of the plane of the fast axis of the laser can be always detected by the first detector 6 and the detection result is fed back to the computer system. When the detector is used, the detector (PD detector) converts the detected optical signal into an electric signal, the electric signal is amplified and subjected to ADC analog-to-digital conversion and then is collected by a computer, the rotation angle position information and the corresponding position light intensity data are recorded, and far field divergence angle light intensity and angle curves of a fast axis and a slow axis of the laser are respectively fitted by utilizing the data.
In the embodiment, an adjustable support 7 is arranged on a sliding part 2, the adjustable support 7 is matched on a linear sliding rail 1, the adjustable support 7 adopts a screw lifting mechanism capable of lifting, an arc-shaped arm rod is arranged at the top of the adjustable support 7, one end of the arc-shaped arm rod is connected with a servo motor 8, and the arc-shaped arm rod simultaneously abuts against a limiting block; the second detector 10 is installed at the center of the arc arm, when the servo motor 8 drives the arc arm to rotate, the center of the detection area of the second detector 10 always rotates on the spherical surface taking the intersection point of the horizontal line and the rotation center line of the arc arm as the spherical center, and the intersection point of the rotation center line 21 (namely the axis of the conical ejector rod) of the arc arm, the axis of the rotation mechanism 3 and the horizontal line 20 coincides with the center of the light source of the laser 11 (shown in fig. 4). The side of the sliding part is connected with a secondary sliding rail 19, the sliding surface of the secondary sliding rail 19 is parallel to the sliding surface of the sliding part, and the adjustable support 7 is arranged on the secondary sliding rail 19; the middle part of the adjustable support 7 is provided with a hollowed-out area, the hollowed-out area can be used for the rotation mechanism 3 to pass through, in essence, the adjustable support 7 can slide to the left side of the rotation mechanism 3, also can slide to the right side of the rotation mechanism 3 (shown in fig. 9) and also can slide to the area where the rotation mechanism 3 is located (shown in fig. 1 and 2), one of the purposes is to ensure that the intersection point of the rotation center line of the arc arm rod, the axis of the rotation mechanism 3 and the horizontal line 20 coincides with the center of the light source of the laser 11, and the other purpose is to facilitate the selection of only the slow axis divergence angle detection or the fast axis divergence angle detection.
In this embodiment, as shown in fig. 5 to 7, the arc arm lever includes an arc section 12 and tapered ejector rods 13 connected to two ends of the arc section 12, and the tapered surfaces of the tapered ejector rods 13 are fitted in tapered holes on the limiting block. The conical ejector rod 13 comprises a conical ejector rod I131 and a conical ejector rod II 132, wherein the outer end of the conical ejector rod I131 is connected with the servo motor 8, the inner end of the conical ejector rod I abuts against the first limiting block 9, both ends of the conical ejector rod II 132 are of conical structures, both ends of the conical ejector rod II 132 abut against two second limiting blocks 16 which are arranged at intervals at the same time, and the first limiting block 9 and the second limiting block 16 can be fixedly arranged on the linear sliding rail 14 and can slide along the linear sliding rail 14 after the limiting is released; one end of the arc-shaped section 12 is connected to the middle of the first conical ejector rod 131, the other end of the arc-shaped section 12 is connected to the middle of the second conical ejector rod 132, and the first limiting block 9 and the second limiting block 16 are matched with the linear slide rail 14; the first tapered ejector rod 131 and the second tapered ejector rod 132 are coaxially arranged and are positioned right above the linear slide rail 14.
In this embodiment, the positions of the two second limiting blocks 16 are synchronously adjusted by using the jackscrew adjusting assembly 15 installed inside the second limiting blocks 16, so as to drive the arc-shaped arm rod to be axially stretched or axially compressed. The jackscrew adjusting assembly 15 comprises a fixed seat, a threaded hole is formed in the fixed seat, a jackscrew is matched in the threaded hole, and the front end of the jackscrew abuts against a second limiting block 16 on the inner side of the arc-shaped section 12. When the jackscrew is rotated, the second limiting block 16 is driven to transversely move through the front end of the jackscrew.
In this embodiment, the probe mount 5 is mounted on a three-dimensional adjustment mechanism, and the positions of the probe mount 5 and the probe one 6 are changed by adjusting the three-dimensional adjustment mechanism. Before step S1 is performed, the positions of the first detector 6 and the second detector 10 are adjusted in advance, so that the effective detection surfaces of the first detector 6 and the second detector 10 can be aligned with the spot center of the laser.
When the arc-shaped arm rod is installed, the servo motor 8 is installed firstly, then the first conical ejector rod 131 is connected to the output end of the servo motor 8, then the first limiting block 9 is abutted against the first conical ejector rod 131, and the first limiting block 9 is fixed by adopting a fastening screw; then, the second limiting block 16 on the inner side of the arc-shaped section 12 is abutted against the first conical ejector rod 131. Then, the position of the second detector 10 is adjusted so that the effective detection surface of the second detector 10 is aligned with the spot center of the laser. When the position of the second detector 10 is adjusted: firstly, the second detector 10 is controlled to be started and the laser is started, then the adjustable support 7 is controlled to be positioned at an ascending initial point, then one end of an arc-shaped arm rod in a horizontal state is controlled to be fixed (namely, the first conical ejector rod 131 is fixed through the fixed first limiting block 9), the other end of the arc-shaped arm rod is compressed or stretched (specifically, the jackscrew adjusting component 15 is adjusted to enable the second conical ejector rod 132 to transversely move to a position corresponding to the maximum light intensity value), then the adjustable support 7 is controlled to be ascended, and the adjustable support 7 is fixed until the maximum light intensity value in the vertical direction is found. Then, the second limiting block 16 outside the arc-shaped section 12 is abutted against the first conical ejector rod 131 and locked. So far, the first conical ejector rod 131 and the second conical ejector rod 132 are tightly matched in the corresponding conical holes, so that the precise installation of the second detector 10 is realized. By adopting the scheme, the axial stretching or axial compression of the arc-shaped section 12 is realized by transversely adjusting the position of the second limiting block 16, the accurate adjustment of the position of the second detector 10 in the middle of the arc-shaped section 12 is skillfully realized, and the accuracy of the second detector 10 can be controlled to be 0.01mm under the condition of ensuring the flexible deflection of the second detector 10.
By adopting the semiconductor laser divergence angle detection method in the embodiment, the controller is connected with and controls the rotating mechanism 3, the detector, the servo motor 8 and the computer system, and the processor of the controller executes the program to realize the following steps:
in the initial state (before the rotation mechanism 3 deflects/rotates), the laser 11 is opposite to the first detector 6;
S1, controlling a servo motor 8 to run, so that an arc arm lever deflects to a lower limit position or an upper limit position;
S2, firstly controlling the first detector 6 and the computer system to be started, and then controlling the rotating mechanism 3 to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector 6 feeds back the fast axis divergence angle detection information to the computer system in real time and stores a fast axis divergence angle detection result curve; when the light detection of the plane where the fast axis of the laser is located is finished, controlling the rotating mechanism 3 to reset, and closing the first detector 6;
S3, controlling the second detector 10 to be started, and then controlling the servo motor 8 to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects from a lower limit position to an upper limit position or deflects from the upper limit position to the lower limit position; in the process, the first detector 6 feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
Example 2
An apparatus for detecting divergence angle of a semiconductor laser, referring to embodiment 1, is mainly different from embodiment 1 in that: the effective detection surface of the second detector 10 is in an arc structure, and the central angle corresponding to the arc structure is any value between 120 and 150 degrees; a vertically arranged screw lifting mechanism 17 is arranged below the arc-shaped section 12, a vertically arranged U-shaped fork 18 is arranged on a lifting component of the screw lifting mechanism 17, and the arc-shaped section 12 is always supported against the inner wall of the U-shaped fork 18 in a non-pressure state.
The detector mounting frame 5 is mounted on a three-dimensional adjusting mechanism, and the positions of the detector mounting frame 5 and the detector one 6 are changed by adjusting the three-dimensional adjusting mechanism. Before step S1 is performed, the positions of the first detector 6 and the second detector 10 are adjusted in advance, so that the effective detection surfaces of the first detector 6 and the second detector 10 can be aligned with the spot center of the laser. When the position of the second detector 10 is adjusted: firstly, controlling the second detector 10 and the starting laser to start, then controlling the adjustable support 7 to be positioned at an ascending initial point, and then controlling one end of the arc-shaped arm rod in a horizontal state to be fixed, and the other end of the arc-shaped arm rod to be compressed or stretched until the maximum light intensity in the fast axis direction is found; then, the adjustable support 7 is controlled to rise until the adjustable support 7 is fixed when the maximum value of the light intensity in the slow axis direction is found.
By adopting the semiconductor laser divergence angle detection method in the embodiment, the controller is connected with and controls the rotating mechanism 3, the detector, the servo motor 8, the screw lifting mechanism 17 and the computer system, and the following steps are realized when the processor of the controller executes a program:
in the initial state (before the rotation mechanism 3 deflects/rotates), the laser 11 is opposite to the first detector 6;
S1, controlling a servo motor 8 to run, so that an arc arm lever deflects to a lower limit position or an upper limit position;
S2, firstly controlling the first detector 6 and the computer system to be started, and then controlling the rotating mechanism 3 to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector 6 feeds back the fast axis divergence angle detection information to the computer system in real time and stores a fast axis divergence angle detection result curve; when the light detection of the plane where the fast axis of the laser is located is finished, controlling the rotating mechanism 3 to reset, and closing the first detector 6;
S3, controlling the second detector 10 to be started, and then controlling the servo motor 8 to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects from a lower limit position to an upper limit position or deflects from the upper limit position to the lower limit position; in the process, the screw rod lifting mechanism 17 is synchronously controlled to run, so that the arc section 12 is always supported on the inner wall of the U-shaped fork 18 in a non-pressure state, the first detector 6 feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
In the embodiment, when the divergence angle of the semiconductor laser is detected: firstly, a laser to be detected is installed on a laser installation part 4, a first detector 6 is installed on a detector installation frame 5, and a second detector 10 is installed on an arc-shaped section 12; then, the positions of the first detector 6 and the second detector 10 are adjusted in advance, so that the effective detection surfaces of the first detector 6 and the second detector 10 can be aligned to the spot centers of laser; next, the detection is performed according to steps S1 to S4. As shown in fig. 10, a curve (in the figure, the horizontal axis represents an angle and the vertical axis represents light intensity) of the detection result of a certain semiconductor laser divergence angle shows that, in combination with the curve, the fast axis divergence angle is 38 °, and the slow axis divergence angle is 8 °.
According to the invention, two sets of detectors for detecting the fast axis divergence angle and the slow axis divergence angle are integrated on the same set of linear slide rail 1, the two sets of detectors cannot be mutually dry in the use process, and the fast axis divergence angle detection can be flexibly switched in the moment (within five seconds), so that the method is very convenient.
According to the invention, the detector II 10 is arranged on the arc-shaped arm rod and matched with the servo motor 8 to control the deflection scheme of the detector II, so that the divergence angle of the laser can be rapidly detected on the basis of one-time positioning of the laser, the rotating mechanism is rotated firstly to enable the laser to rotate to measure the divergence angle in the fast axis direction during detection operation, then the servo motor is controlled to work to enable the arc-shaped arm rod to deflect to measure the divergence angle in the slow axis direction, the detection efficiency is high, the detection result is accurate and reliable, the operation is simple and convenient, the laser does not need to be rotated by 90 degrees during detection operation, and meanwhile, the detector has the advantages of good operation flexibility and stability, and the detector cost is low. In the invention, the used equipment does not need an attenuation sheet or a high CCD instrument, and the price of a single set of equipment under the condition of meeting the precision detection requirement can be controlled within twenty thousands yuan, so that the invention can be used for replacing import equipment with the same detection requirement.
Claims (9)
1. The utility model provides a detect device of semiconductor laser divergence angle, includes linear slide (1) and cooperation sliding part (2) on linear slide (1), its characterized in that: a rotating mechanism (3) is arranged on the sliding part (2), a laser mounting part (4) is arranged on the rotating mechanism (3), a laser (11) to be tested is arranged on the laser mounting part (4), a detector mounting frame (5) is arranged on the opposite side of the laser mounting part (4) and positioned on the linear sliding rail (1), a first detector (6) is arranged on the detector mounting frame (5), the center of a detection area of the first detector (6) and the center of a light source of the laser (11) are positioned on the same horizontal line (20), and the horizontal line (20) is perpendicular to and intersected with the axis of the rotating mechanism (3); when the rotating mechanism (3) horizontally rotates within a set angle range, the light of the plane where the fast axis of the laser (11) is located can be always detected by the first detector (6) and the detection result is fed back to the computer system; an adjustable support (7) is arranged on the sliding part (2), an arc-shaped arm rod is arranged on the adjustable support (7), one end of the arc-shaped arm rod is connected with a servo motor (8), and the arc-shaped arm rod simultaneously abuts against the limiting block; and a second detector (10) is arranged at the center of the arc-shaped arm rod, when the servo motor (8) drives the arc-shaped arm rod to rotate, the center of a detection area of the second detector (10) is always in spherical rotation taking the intersection point of the horizontal line (20) and the rotation center line (21) of the arc-shaped arm rod as the spherical center, and the intersection point of the rotation center line (21) of the arc-shaped arm rod, the axis of the rotation mechanism (3) and the intersection point of the horizontal line (20) are coincided with the light source center of the laser (11).
2. The apparatus according to claim 1, wherein: the arc arm rod comprises an arc section (12) and conical ejector rods (13) connected to two ends of the arc section (12), and the conical surfaces of the conical ejector rods (13) are matched in conical holes in the limiting blocks.
3. The apparatus according to claim 2, wherein: the conical ejector rod (13) comprises a conical ejector rod I (131) and a conical ejector rod II (132), the outer end of the conical ejector rod I (131) is connected with the servo motor (8), the inner end of the conical ejector rod I is propped against the first limiting block (9), both ends of the conical ejector rod II (132) are of a conical structure, both ends of the conical ejector rod II (132) are propped against the second limiting blocks (16) which are arranged at intervals at the same time, and the first limiting block (9) and the second limiting blocks (16) can be fixedly arranged on the linear sliding rail (14) and can slide along the linear sliding rail (14) after the limiting is released; one end of the arc-shaped section (12) is connected to the middle of the first conical ejector rod (131), the other end of the arc-shaped section (12) is connected to the middle of the second conical ejector rod (132), and the first limiting block (9) and the second limiting block (16) are matched with the linear sliding rail (14); the first conical ejector rod (131) and the second conical ejector rod (132) are coaxially arranged and are positioned right above the linear slide rail (14).
4. A device according to claim 3, characterized in that: the effective detection surface of the second detector (10) is of an arc-shaped structure, and the central angle corresponding to the arc-shaped structure is 120-150 degrees.
5. The apparatus according to claim 4, wherein: a vertically arranged screw rod lifting mechanism (17) is arranged below the arc-shaped section (12), a vertically arranged U-shaped fork (18) is arranged on a lifting component of the screw rod lifting mechanism (17), and the arc-shaped section (12) is always supported against the inner wall of the U-shaped fork (18) in a non-pressure state.
6. A method for detecting divergence angle of a semiconductor laser using the apparatus of claim 5, wherein the controller is connected to and controls the rotation mechanism (3), the detector, the servo motor (8), the screw elevating mechanism (17) and the computer system, and the processor of the controller executes the program to realize the steps of:
S1, controlling a servo motor (8) to run, so that an arc arm lever deflects to a lower limit position or an upper limit position;
s2, firstly controlling the first detector (6) and the computer system to be started, and then controlling the rotating mechanism (3) to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector (6) feeds back the fast axis divergence angle detection information to the computer system in real time and stores a fast axis divergence angle detection result curve; after the light detection of the plane where the fast axis of the laser is located is finished, turning off the first detector (6);
S3, controlling a second detector (10) to be started, and then controlling a servo motor (8) to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects to an upper limit position from a lower limit position or deflects to the lower limit position from the upper limit position; in the process, the screw rod lifting mechanism (17) is synchronously controlled to run, so that the arc-shaped section (12) is always supported on the inner wall of the U-shaped fork (18) in a non-pressure state, and the first detector (6) feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
7. A method for detecting divergence angle of a semiconductor laser using the apparatus as claimed in any one of claims 1 to 3, wherein a controller is connected to and controls the rotation mechanism (3), the detector, the servo motor (8) and the computer system, and a processor of the controller executes a program to realize the steps of:
S1, controlling a servo motor (8) to run, so that an arc arm lever deflects to a lower limit position or an upper limit position;
s2, firstly controlling the first detector (6) and the computer system to be started, and then controlling the rotating mechanism (3) to rotate according to a preset angle I and a preset speed I, wherein in the process, the first detector (6) feeds back the fast axis divergence angle detection information to the computer system in real time and stores a fast axis divergence angle detection result curve; after the light detection of the plane where the fast axis of the laser is located is finished, turning off the first detector (6);
S3, controlling a second detector (10) to be started, and then controlling a servo motor (8) to deflect according to a second preset angle and a second preset speed, so that the arc-shaped arm rod deflects to an upper limit position from a lower limit position or deflects to the lower limit position from the upper limit position; in the process, the detector I (6) feeds back the detection information of the slow axis divergence angle to the computer system in real time and stores a slow axis divergence detection result curve;
S4, outputting a detection result.
8. The method for detecting a divergence angle of a semiconductor laser as claimed in claim 6, wherein: before implementing step S1, the position of the detector is adjusted in advance, so that the effective detection surface of the detector is aligned with the spot center of the laser; and (3) adjusting the position of a second detector (10): firstly, controlling a second detector (10) and starting a laser to start, then controlling an adjustable support (7) to be positioned at an ascending initial point, and then controlling one end of an arc-shaped arm rod in a horizontal state to be fixed, and the other end of the arc-shaped arm rod to be compressed or stretched until the maximum light intensity in the fast axis direction is found; then, the adjustable support (7) is controlled to rise until the adjustable support (7) is fixed when the maximum value of the light intensity in the slow axis direction is found.
9. The method for detecting a divergence angle of a semiconductor laser as claimed in claim 8, wherein: the positions of the two second limiting blocks (16) are synchronously adjusted by adopting a jackscrew adjusting assembly (15) arranged on the inner sides of the second limiting blocks (16), so that the arc-shaped arm rod is driven to be axially stretched or axially compressed.
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| CN102914420A (en) * | 2012-10-10 | 2013-02-06 | 西安炬光科技有限公司 | Semiconductor laser beam characteristic testing device and testing method |
| CN104515592B (en) * | 2014-12-20 | 2017-07-14 | 西安炬光科技股份有限公司 | A kind of quick characterization apparatus of three-dimensional far field intensity for semiconductor light source |
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| CN111351641A (en) * | 2020-03-12 | 2020-06-30 | 苏州矩阵光电有限公司 | Method and device for measuring far-field divergence angle of laser |
| CN116086776A (en) * | 2023-01-19 | 2023-05-09 | 南京理工大学 | Device and method for detecting divergence angle of collimated light beam |
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