CN117217065A - Fuel system gap radio frequency discharge characteristic analysis method based on dynamic sheath analysis - Google Patents
Fuel system gap radio frequency discharge characteristic analysis method based on dynamic sheath analysis Download PDFInfo
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- 239000003574 free electron Substances 0.000 claims abstract description 24
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Abstract
The application relates to a dynamic sheath analysis-based fuel system gap radio frequency discharge characteristic analysis method, which comprises the steps of enabling a structure which is easiest to couple with external electromagnetic energy in a fuel system and generates radio frequency discharge so as to ignite mixed gas to be equivalent to a metal parallel plate gap discharge structure; calculating an applicable frequency range according to a sheath mechanism formed between the plasma and the grounded metal polar plate and an avalanche breakdown condition; setting initial value parameters and performing simulation, and analyzing discharge characteristics such as the law of time-dependent change of the dynamic sheath thickness, the distribution of free electrons and positive ions between plates and ionization rate; analysis of sheath thickness and variation characteristics from electron number density, analysis of discharge from ionization rateProcess and apparatusThe degree of process intensity. The application equivalent the complex fuel system gap radio frequency discharge process to the parallel polar plate discharge process, is simpler and more visual for characteristic analysis, and simplifies the complex process of plasma characteristics in the gap discharge by analyzing the dynamic sheath model.
Description
Technical Field
The application relates to the technical field of electromagnetics and plasma discharge, in particular to a method for analyzing the radio frequency discharge characteristics of a fuel system gap based on dynamic sheath analysis.
Background
For the phenomenon of electromagnetic radiation versus fuel Hazard (HERF), there is a capacitively coupled RF discharge process after the fuel system couples excessive RF electromagnetic energy; of course, not every part of the fuel system has the HERF hidden trouble, and the typical structure of the fuel system, which is most easily coupled with external electromagnetic energy and generates radio frequency discharge so as to ignite the combustible gas mixture, is a slit structure, so that the analysis and evaluation of slit radio frequency discharge characteristics are very important. In the prior art, only the existence of a sheath layer and the difference between the sheath layer and central plasma in a gap discharge model are pointed out, and detailed analysis in the scheme is not given, so that how to analyze the gap radio frequency discharge characteristics based on the sheath layer theory is needed to be considered at present.
It should be noted that the information disclosed in the above background section is only for enhancing understanding of the background of the present disclosure and thus may include information that does not constitute prior art known to those of ordinary skill in the art.
Disclosure of Invention
The application aims to overcome the defects of the prior art, provides a method for analyzing the gap radio frequency discharge characteristics of a fuel system based on dynamic sheath analysis, and solves the defects in the prior art.
The aim of the application is achieved by the following technical scheme: the method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis comprises the following steps:
firstly, the structure which is most easily coupled with external electromagnetic energy in a fuel system and generates radio-frequency discharge so as to ignite mixed gas is equivalent to a metal parallel plate gap discharge structure;
step two, calculating an applicable frequency range according to a sheath mechanism formed between the plasma and the grounded metal polar plate and an avalanche breakdown condition;
step three, setting initial value parameters and simulating, and analyzing discharge characteristics such as the law of the change of the dynamic sheath thickness along with time, the distribution of free electrons and positive ions among plates and ionization rate;
and fourthly, analyzing the thickness and the change characteristics of the sheath layer according to the electron number density, wherein the area with high electron number density is the sheath layer area, and analyzing the intensity degree of the alpha process and the gamma process of discharge according to the ionization rate.
The initial value parameters include radio frequency power drive, applicable frequency range, pressure, temperature, gas gap and boundary conditions.
The calculating of the applicable frequency range comprises:
and calculating an upper limit value of a frequency range according to the side length and the wavelength of the metal polar plate in the metal parallel plate gap discharge structure, and setting the critical frequency of the electron avalanche effect as a lower limit value of the frequency range according to the electron avalanche effect condition met by the dynamic sheath parameterized model.
The analysis of the intensity of the alpha and gamma processes of the discharge according to the ionization rate includes: when the plasma is in the oscillation center, there is a peak value of alpha process at the boundary of the sheath layer, when the plasma is in the oscillation extremum, there is a peak value of gamma process in the sheath layer with the largest thickness, then the gamma process is judged to only occur in the sheath layer, and when the macroscopic electron cloud is in the oscillation extremum, the sheath layer thickness at one side reaches the maximum value, the electric field and the potential difference in the sheath layer reach the maximum value, which indicates that the gamma process is the most intense at the moment.
The analysis method further comprises:
simulation analysis is carried out on the electric field potential distribution between plates, free electron current and ion current of the dynamic sheath layer, current of the left electrode plate and fitting current of the dynamic sheath layer in a radio frequency period, the dynamic sheath layer is equivalent to an equivalent circuit model, and the equivalent circuit model is analyzed by combining simulation results.
The establishment of the equivalent circuit model comprises the following steps:
the dynamic sheath layers at two sides in the metal parallel plate gap discharge structure bear a plurality of radio frequency voltages, positive charge density distribution and periodic electric field distribution pointing to the metal polar plates exist, so that the characteristics of the dynamic sheath layers are equivalent to time-varying capacitance at the moment, two metal parallel plates are equivalent to two time-varying capacitances, the total thickness of the dynamic sheath layers at two sides is unchanged, and the total capacitance of the equivalent sheath layers after the two time-varying nonlinear capacitances are connected in series is a constant linear capacitance;
meanwhile, positive ions entering the sheath layer are accelerated by a strong electric field to collide with the polar plate, so that ion current with stable amplitude is equivalent to an ideal current source;
when the macroscopic electron cloud is at the oscillation extremum, the sheath thickness at one side is close to zero, the sheath thickness is also close to zero, free electrons reach the polar plate to form transient free electron current, the characteristic is equivalent to an ideal diode, and the positive direction of the ideal diode points to the central plasma from the metal polar plate;
and the dynamic sheath layer is equivalent to a circuit model formed by connecting a time-varying capacitor, an ideal current source and a diode in parallel.
The application has the following advantages: a method for analyzing the radio frequency discharge characteristics of a fuel system gap based on dynamic sheath analysis, which is characterized in that the complex radio frequency discharge process of the fuel system gap is equivalent to a parallel polar plate discharge process, the characteristic analysis is simpler, more convenient and more visual, and the complex process of plasma characteristics in the gap discharge is simplified through the analysis of a dynamic sheath model.
Drawings
FIG. 1 is a typical structural equivalent parallel plate slot discharge structure in a fuel system that most easily couples with external electromagnetic energy and generates a radio frequency discharge to ignite a combustible mixture;
FIG. 2 is a schematic diagram of dynamic sheath and charged particle distribution;
FIG. 3 is a particle collision reaction equation for an argon discharge process;
FIG. 4 shows the time-dependent dynamic sheath thickness at 13.56MHz and 167W;
FIG. 5 shows the free electron and positive ion distribution between plates at 13.56MHz, 167W, T/4;
FIG. 6 shows ionization rate distribution at 13.56MHz, 167W;
FIG. 7 is a parameterized model of a narrow air gap standard atmospheric pressure capacitively coupled RF discharge process;
FIG. 8 shows the electric field potential distribution between plates at 13.56MHz, 167W, and time 0;
FIG. 9 shows the free electron current and ion current of sheath a during a radio frequency cycle at 13.56MHz and 167W;
FIG. 10 shows the left plate current during a radio frequency cycle at 13.56MHz, 167W;
fig. 11 shows the fitting current of the sheath a in a radio frequency period at 13.56MHz and 167W.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Accordingly, the following detailed description of the embodiments of the application, as presented in conjunction with the accompanying drawings, is not intended to limit the scope of the application as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present application. The application is further described below with reference to the accompanying drawings.
The application particularly relates to a method for analyzing the gap radio frequency discharge characteristics of a fuel system based on a dynamic sheath layer, which comprises the following steps:
step one: as shown in FIG. 1, the metal plate gap structure is constructed, the metal plates are square with a side length a of 10mm, and the plate-to-plate spacing is 2mm.
Step two: the applicable frequency range of the present embodiment is calculated.
The applicable frequency range calculation method comprises the following steps:
1. the movement of positive ions during discharge is only affected by the time-averaged electric field. This requiresWherein omega pi Is the ion plasma frequency. According to the plasma theory, the particle mass m i Larger, therefore omega pi The radio frequency discharge in the MHz frequency band is generally very small and meets the condition;
2. the movement of free electrons during discharge is affected by the transient electric field, and the rf current inside the plasma is almost entirely formed by the movement of free electrons. This requiresWherein v is m For electron to neutral particle collision frequency omega pe Is the plasma frequency. The electron number density of the weakly ionized cold plasma at the atmospheric pressure considered in this embodiment is usually 10 17 ～10 18 The magnitude, the corresponding electron plasma frequency is about in GHz magnitude, so this condition requires our radio frequency f < 1GHz;
3. when the radio frequency power drive is applied to the metal polar plate, the effect of distributed parameters is not considered, and the electric potential on the whole polar plate is consistent. This condition allows the plasma to be uniformly distributed in the plate plane direction, only taking into account its variation in one-dimensional space in the plate pitch direction. The metal plate selected in this embodiment is a square plate with a side length of a=10cm, so it must satisfy the following requirements: a > λ/10, where λ is the wavelength, converted to frequency: f is less than 300MHz;
4. the analyzed capacitively coupled radio frequency discharge also meets the electron avalanche effect condition, and the critical frequency f of the electron avalanche effect is established according to a discharge model with room temperature, atmospheric pressure and polar plate spacing l=2mm which is established by earlier research 0 About 12MHz;
therefore, the applicable frequency range of this embodiment is 12MHz to 300MHz.
Step three: the dynamic sheath is set to facilitate parametric modeling in order to simplify the analysis as much as possible, and in addition to assuming an approximately uniform distribution of positive ions between plates, it is assumed that the free electron density within the sheath decreases rapidly to zero, so that the charged particle distribution between plates is as shown in fig. 2 (b). Based on the above assumption, it is possible toTo obtain an important property: although the central plasma region oscillates due to the periodic oscillation of the high density free electrons, its width d remains unchanged. That is, although the thickness s of the sheath layers on both sides a (t) and s b (t) is dynamically variable, but the overall thickness of the sheath is constant, i.e
In the method, in the process of the application,the time average of the thickness of the sheath on one side is shown.
Step four: in order to reduce the degree of freedom of the model as much as possible and reduce the calculation amount, the gas gap is set to be argon for the simulation analysis of the mechanism. Particle collision reaction equations and collision cross section data are imported, wherein the collision reaction equations are shown in fig. 3. In order to simulate the gamma process of secondary electron emission caused by the fact that positive ions bombard a metal polar plate by the electric field of a sheath layer in an acceleration way, surface reaction boundary conditions are arranged on the surface of the polar plate.
Step five: and (3) selecting a standard reference reaction tank with the excitation frequency of 13.56MHz as a comparison, and simultaneously enabling the radio frequency driving power to be 167W to start simulation.
Step six: analyzing the discharge characteristics such as the law of the change of the dynamic sheath thickness along with time, the distribution of free electrons and positive ions among plates, ionization rate and the like; through the analysis of the above, a more detailed gap discharge rule can be obtained, and the hazard characteristic of the fuel system is predicted.
Simulation shows that the change of the dynamic sheath thickness along with time is shown in fig. 4, the ordinate scale represents the time change of one period, the abscissa scale represents the distance of the plate spacing in one-dimensional direction, and the white thick line is the dynamic sheath boundary. It can be seen intuitively that the sheath thickness varies periodically over time, but the sum of the sheath thicknesses on both sides remains substantially unchanged.
Fig. 5 shows the results of the distribution of free electrons and positive ions between plates at T/4 (at the moment of polarity reversal of the plates), wherein the black curve represents the free electron number density and the gray curve represents the positive ion number density. It can be seen that the thickness of the dynamic sheath layers at the two sides is almost equal at this time, which corresponds to the case of 0.25 on the ordinate scale in fig. 5, and the free electron density in the sheath layer rapidly decays to zero, and positive ions are approximately uniformly distributed between the plates.
Further, the ionization rate distribution results are shown in fig. 6. It can be seen that there is a peak in the alpha process at the boundary of the sheath when the plasma is at the centre of oscillation, i.e. at times 0.25 and 0.75 on the ordinate scale in the figure; and when the plasma is at the oscillation extremum, i.e. 0 and 0.5 on the ordinate scale in the figure, there is a peak of the gamma process inside the sheath with the greatest thickness. It is explained that the gamma process only occurs inside the sheath layer, and when the macroscopic electron cloud is at the oscillation extremum, the sheath layer thickness on one side reaches a maximum, the internal electric field and the potential difference also reach a maximum, and the gamma process is most intense at this moment.
And step seven, carrying out simulation analysis on the electric field potential distribution between plates, the free electron current and the ion current of the dynamic sheath layer a in a radio frequency period, the current of the left electrode plate and the fitting current of the dynamic sheath layer a, wherein the simulation analysis is shown in figures 8-11.
By analyzing the intensity degree of the alpha process and the gamma process of the discharge, the corresponding intensity degree of the two discharge processes is different, and the alpha process is lower than the gamma process in the discharge threshold value and is more easy to generate harm.
And step eight, equivalent dynamic sheath layers are equivalent to an equivalent circuit model, and the equivalent circuit model is analyzed by combining simulation results.
As can be seen from a combination of fig. 4 and 6, the thickness s of the left dynamic sheath a is around time 0 a (t) is reduced to almost zero, and then the voltage across it is reduced to almost zero as shown in FIG. 8, and at the same time, it is found from FIG. 8 that free electrons can reach the left plate to form a transient free electron current I e (t) while the ion current I i (t) is small and stable in amplitude throughout the radio frequency period, and has a direction opposite to the direction of the free electron current, so that the above properties can be equivalent to an ideal diode and an ideal current source.
On the other hand, as can be seen from FIG. 8, the voltage amplitude between the plates is about 320V, and for a distance of 2mm, the uniform electric field between the plates should be 10 5 Magnitude. However, as the dynamic sheath layer is generated during the discharge process, the positive charge density distribution exists in the sheath layer in combination with FIG. 6, so that the RF electric field and voltage are mainly concentrated on the sheath layers at two sides, and the time-varying transient electric field in the sheath layer can be enhanced by 10 times to reach 10 6 The dynamic sheath should also have time-varying capacitance characteristics.
Conversely, the electric field and voltage of the central plasma region are small, and the displacement current in the central plasma region is far smaller than the conduction current, so that the central plasma region can be regarded as a good conductor with high conductivity. Thus, the rf discharge current is primarily maintained by the displacement current in the sheath and the conduction current in the plasma.
Finally, the sheath current closure relationship is analytically verified. The current closure relationship of the dynamic sheath layer a in the equivalent circuit is as follows:
wherein I (t) is the current on the polar plate,
for displacement current in time-varying capacitance, V a And (t) is the instantaneous radio frequency voltage on the dynamic sheath a. FIG. 10 shows the current on the left plate during a radio frequency period, while FIG. 11 shows the free electron current I from the inside of the sheath a during a radio frequency period e (t), ion current I i (t) and Displacement Current I d (t) fitting the total current. It can be seen that the fitted current substantially matches the current on the left plate. To this end, the reliability of the parameterized model of the narrow air gap standard atmospheric pressure capacitively coupled rf discharge process as shown in fig. 7 was analyzed in combination with simulation calculations.
The foregoing is merely a preferred embodiment of the application, and it is to be understood that the application is not limited to the form disclosed herein but is not to be construed as excluding other embodiments, but is capable of numerous other combinations, modifications and adaptations, and of being modified within the scope of the inventive concept described herein, by the foregoing teachings or by the skilled person or knowledge of the relevant art. And that modifications and variations which do not depart from the spirit and scope of the application are intended to be within the scope of the appended claims.
Claims (6)
1. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis is characterized by comprising the following steps of: the analysis method comprises the following steps:
firstly, the structure which is most easily coupled with external electromagnetic energy in a fuel system and generates radio-frequency discharge so as to ignite mixed gas is equivalent to a metal parallel plate gap discharge structure;
step two, calculating an applicable frequency range according to a sheath mechanism formed between the plasma and the grounded metal polar plate and an avalanche breakdown condition;
step three, setting initial value parameters and simulating, and analyzing discharge characteristics such as the law of the change of the dynamic sheath thickness along with time, the distribution of free electrons and positive ions among plates and ionization rate;
and fourthly, analyzing the thickness and the change characteristics of the sheath layer according to the electron number density, wherein the area with high electron number density is the sheath layer area, and analyzing the intensity degree of the alpha process and the gamma process of discharge according to the ionization rate.
2. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis according to claim 1, wherein the method comprises the following steps of: the initial value parameters include radio frequency power drive, applicable frequency range, pressure, temperature, gas gap and boundary conditions.
3. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis according to claim 2, wherein the method comprises the following steps of: the calculating of the applicable frequency range comprises:
and calculating an upper limit value of a frequency range according to the side length and the wavelength of the metal polar plate in the metal parallel plate gap discharge structure, and setting the critical frequency of the electron avalanche effect as a lower limit value of the frequency range according to the electron avalanche effect condition met by the dynamic sheath parameterized model.
4. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis according to claim 1, wherein the method comprises the following steps of: the analysis of the intensity of the alpha and gamma processes of the discharge according to the ionization rate includes: when the plasma is in the oscillation center, there is a peak value of alpha process at the boundary of the sheath layer, when the plasma is in the oscillation extremum, there is a peak value of gamma process in the sheath layer with the largest thickness, then the gamma process is judged to only occur in the sheath layer, and when the macroscopic electron cloud is in the oscillation extremum, the sheath layer thickness at one side reaches the maximum value, the electric field and the potential difference in the sheath layer reach the maximum value, which indicates that the gamma process is the most intense at the moment.
5. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis according to any one of claims 1 to 4, wherein the method comprises the following steps: the analysis method further comprises:
simulation analysis is carried out on the electric field potential distribution between plates, free electron current and ion current of the dynamic sheath layer, current of the left electrode plate and fitting current of the dynamic sheath layer in a radio frequency period, the dynamic sheath layer is equivalent to an equivalent circuit model, and the equivalent circuit model is analyzed by combining simulation results.
6. The method for analyzing the gap radio frequency discharge characteristics of the fuel system based on dynamic sheath analysis according to claim 5, wherein the method comprises the following steps of: the establishment of the equivalent circuit model comprises the following steps:
the dynamic sheath layers at two sides in the metal parallel plate gap discharge structure bear a plurality of radio frequency voltages, positive charge density distribution and periodic electric field distribution pointing to the metal polar plates exist, so that the characteristics of the dynamic sheath layers are equivalent to time-varying capacitance at the moment, two metal parallel plates are equivalent to two time-varying capacitances, the total thickness of the dynamic sheath layers at two sides is unchanged, and the total capacitance of the equivalent sheath layers after the two time-varying nonlinear capacitances are connected in series is a constant linear capacitance;
meanwhile, positive ions entering the sheath layer are accelerated by a strong electric field to collide with the polar plate, so that ion current with stable amplitude is equivalent to an ideal current source;
when the macroscopic electron cloud is at the oscillation extremum, the sheath thickness at one side is close to zero, the sheath thickness is also close to zero, free electrons reach the polar plate to form transient free electron current, the characteristic is equivalent to an ideal diode, and the positive direction of the ideal diode points to the central plasma from the metal polar plate;
and the dynamic sheath layer is equivalent to a circuit model formed by connecting a time-varying capacitor, an ideal current source and a diode in parallel.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110276109A (en) * | 2019-05-31 | 2019-09-24 | 南京理工大学 | A kind of emulation mode of hypersonic aircraft plasma sheath electromagnetic property |
| CN111800932A (en) * | 2020-08-07 | 2020-10-20 | 大连理工大学 | Plasma discharge process simulation method and system |
| CN115470648A (en) * | 2022-09-28 | 2022-12-13 | 大连理工大学 | Bias voltage induction coupling plasma source optimization method and system and electronic equipment |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110276109A (en) * | 2019-05-31 | 2019-09-24 | 南京理工大学 | A kind of emulation mode of hypersonic aircraft plasma sheath electromagnetic property |
| CN111800932A (en) * | 2020-08-07 | 2020-10-20 | 大连理工大学 | Plasma discharge process simulation method and system |
| CN115470648A (en) * | 2022-09-28 | 2022-12-13 | 大连理工大学 | Bias voltage induction coupling plasma source optimization method and system and electronic equipment |
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