CN117190992A - Angular velocity sensor and combined angular velocity sensor - Google Patents

Abstract

The application provides an angular velocity sensor and a combined angular velocity sensor, and belongs to the technical field of sensors. The first pair of vibration modules in the angular velocity sensor constitutes a drive mode motion and the second pair of vibration modules constitutes a sense mode motion. At a first pre-designed frequency, the first pair of vibration modules move synchronously and in opposite directions, and the synchronizing lever pivots about the Z-axis. In the direction of the sense mode motion, the second pair of vibration modules are synchronized and counter-moved at a second pre-designed frequency. The sensing mode mechanical amplifying structure elastically connects the first pair of vibration modules and the second pair of vibration modules, and is used for amplifying the motion caused by the Coriolis force. Wherein the direction of the sense mode motion is parallel to the direction of the drive mode motion and perpendicular to the Z-axis. The angular velocity sensor provided by the embodiment of the application can realize complete decoupling of the driving mode motion and the sensing mode motion, and is convenient for improving the performance and reliability of the angular velocity sensor.

Description

Angular velocity sensor and combined angular velocity sensor

Technical Field

The application relates to the technical field of sensors, in particular to an angular velocity sensor and a combined angular velocity sensor.

Background

An angular velocity sensor is an important device for measuring the rotational velocity of an object. It has wide application in many fields including aerospace, automotive industry, industrial automation, etc.

In a conventional angular velocity sensor, the drive mode and the sense mode are generally realized by sharing some structures, which means that there is a possibility of mutual interference between the drive structure and the sense structure during operation of the angular velocity sensor. Such interference may cause the signal output from the angular velocity sensor to be affected by noise, thereby reducing the measurement accuracy and reliability. That is, the existing angular velocity sensor has a certain coupling problem between the driving mode and the sensing mode, which limits its performance and reliability.

Therefore, there is a need for an angular velocity sensor in which the drive mode and the sense mode can be completely decoupled to improve the performance and reliability of the angular velocity sensor.

Disclosure of Invention

In view of the above, embodiments of the present application provide an angular velocity sensor and a combined angular velocity sensor that can completely decouple a driving mode and a sensing mode.

The angular velocity sensor is used for measuring the angular velocity in the Z-axis direction. The sensor of angular velocity comprises a substrate defining a "reference plane" or "reference plane", and a Z-axis perpendicular to the reference plane. Conveniently, the reference plane is the plane of the wafer from which the MEMS structure (mass, cantilever, anchor, etc.) is fabricated.

In a first aspect, the present application discloses a sensor of angular velocity. The angular velocity sensor may include:

a first pair of vibration modules connected to the synchronizing lever, constituting a driving mode motion; at a first pre-designed frequency, the first pair of vibration modules move synchronously and reversely, and the synchronous lever pivots around the Z axis;

a second pair of vibration modules constituting a sensing mode motion; in the direction of the sense mode motion, the second pair of vibration modules are synchronized and counter-moved at a second pre-designed frequency;

the sensing mode mechanical amplification structure is used for converting and amplifying the motion of the first pair of vibration modules in the direction of the motion of the driving mode, which is caused by the Coriolis force, into the motion of the second pair of vibration modules in the direction of the motion of the sensing mode; mechanical decoupling between drive mode motion and sense mode motion;

wherein the direction of the sense mode motion is parallel to the direction of the drive mode motion and perpendicular to the Z-axis.

In some embodiments, a first pair of vibration modules, referred to as drive modules, includes a first mass, a second mass, a first drive shuttle frame, a second drive shuttle frame, a third drive shuttle frame, and a fourth drive shuttle frame, a first end of the first mass mechanically coupled to the first drive shuttle frame, a second end of the first mass mechanically coupled to the second drive shuttle frame, the first drive shuttle frame and the second drive shuttle frame moving in a direction of drive mode movement to form drive mode movement of the first mass; the first end of the second mass is mechanically coupled to a third drive shuttle mount, the second end of the second mass is mechanically coupled to a fourth drive shuttle mount, the third drive shuttle mount and the fourth drive shuttle mount produce drive mode motion of the second mass in a direction of drive mode motion;

The synchronous lever comprises a first synchronous lever and a second synchronous lever; the first end of the first synchronous lever is connected with the first driving shuttle frame, and the second end of the first synchronous lever is connected with the third driving shuttle frame; the first end of the second synchronizing lever is connected with the second driving shuttle frame, and the second end of the second synchronizing lever is connected with the fourth driving shuttle frame.

In some embodiments, the first drive bay, the second drive bay, the third drive bay, and the fourth drive bay are each mechanically constrained by a first flexure such that the first drive bay, the second drive bay, the third drive bay, and the fourth drive bay move only in the direction of drive mode motion.

In some embodiments, the first drive bay and the third drive bay are each connected to the first synchronization lever by a first movable pivot;

the second drive bobbin and the fourth drive bobbin are each connected to the second synchronizing lever by a second movable pivot.

In some embodiments, the first synchronization lever includes a first mechanical decoupler for decoupling the linear motion of the first drive carriage and the linear motion of the third drive carriage from the rotational motion of the first synchronization lever;

The second synchronizing lever includes a second mechanical decoupler for decoupling the linear motion of the second drive carriage and the linear motion of the fourth drive carriage from the rotational motion of the second synchronizing lever.

As a design option, the first mechanical decoupler and the second mechanical decoupler may be forked, thus maintaining low stress even at large displacements of the first drive shuttle, the second drive shuttle, the third drive shuttle and the fourth drive shuttle.

The smaller the mass design of the shuttle frame is, the better the mechanical strength is not affected.

The design of restraining the same-directional movement of the symmetrical first mass block and the symmetrical second mass block ensures that the basic resonance movement of the system is opposite-phase movement, and the offset stability of the angular velocity sensor and the wandering along with a plurality of angles are greatly improved. In the case of a symmetrical first and second mass in the drive mode in the opposite direction, the drive module can achieve an excitation of the oscillation of the drive bobbin and maintain it with a predesigned stable amplitude. Since the stability of the drive mode amplitude is directly related to the stability of the walk with several angles, accurate control of this amplitude is crucial for a high-precision, high-stability sensor of angular velocity.

In some embodiments, a second pair of vibration modules, referred to as sensing modules, includes a first sensing shuttle frame and a second sensing shuttle frame;

the first pair of vibration modules and the second pair of vibration modules are elastically connected together through a sensing mode mechanical amplifying structure, and the Coriolis force sensing motion is mechanically amplified along the Y direction and converted into the motion of the first sensing shuttle frame and the second sensing shuttle frame along the X direction;

wherein the structure inhibits co-directional movement of the symmetrical first and second masses in the drive module, and of the symmetrical first and second sense bobbin holders;

wherein the drive mode and the sense mode are completely decoupled without Z-axis angular velocity;

wherein a reference plane and a Z-axis perpendicular to the reference plane may be defined through the device layer.

In some embodiments, the first and second sensing carriages are mechanically constrained by one second flexure, respectively, such that the first and second sensing carriages move only in the direction of the sensing mode motion.

In some embodiments, the sense mode mechanical amplification structure comprises four rigid cantilever beams arranged centrally symmetrically, two rigid cantilever beams near the first mass being connected to the first mass by a third movable pivot and two rigid cantilever beams near the second mass being connected to the second mass by a fourth movable pivot;

The direction of the coriolis force induced motion of the first mass and the direction of the coriolis force induced motion of the second mass each form a non-zero angle with each rigid cantilever.

In some embodiments, during the movement of the first mass and the second mass toward each other, an interior angle between the two rigid cantilevers connected to the first mass is increased, and an interior angle between the two rigid cantilevers connected to the second mass is also increased to amplify the movement caused by the coriolis force of the first mass and the movement caused by the coriolis force of the second mass to the movement of the second pair of vibration modules in the direction of the sense mode movement.

In some embodiments, the third movable pivot is mechanically constrained by the third flexure such that the third movable pivot moves only in the direction of coriolis force induced motion;

the fourth movable pivot is mechanically constrained by the fourth flexure such that the fourth movable pivot moves only in the direction of coriolis induced motion.

In some embodiments, the sensing mode mechanical amplification structure includes a sensing spring system coupled to the rigid cantilever on both sides in a direction of motion induced by the coriolis force, the sensing spring system coupled to the first sensing shuttle frame and the second sensing shuttle frame on both sides in the direction of motion of the sensing mode.

In some embodiments, the first and second drive shuttles each include a drive module for driving the first pair of vibration modules to oscillate in opposite directions by electrostatic force and a drive detection module for measuring/quantifying the oscillation amplitude of the drive module.

In some embodiments, the drive driver module and the drive detection module are designed to operate in a time division multiplexed mode.

In some embodiments, the first and second sensing shuttle holders include a sensing drive module and a sensing detection module, the sensing drive module and the sensing detection module being designed to operate in a time division multiplexed mode.

In some embodiments, the angular velocity sensor further comprises an electrostatic force quadrature compensation module comprising a set of comb drives, each comb drive comprising a fixed electrode anchored to the substrate of the angular velocity sensor by an anchor and a movable electrode connected to the first mass and the second mass, the electrostatic force quadrature compensation module being designed to compensate for residual quadrature errors with electrostatic force.

In some embodiments, the angular velocity sensor further comprises a frequency adjustment module comprising a set of comb drives, each comb drive having a fixed electrode anchored to the substrate of the angular velocity sensor by an anchor and a movable electrode connected to the first and second sensing shuttle frame, the frequency adjustment module being designed to adjust the sensing module movement frequency in a manner that modulates the electrostatic force until a match of the sensing mode movement resonance frequency to the driving module movement resonance frequency is achieved.

The angular velocity sensor of the present disclosure has the advantage that the angular velocity sensor includes a sensing mode mechanical amplification structure that amplifies the movement of the first and second masses in the Y-axis direction caused by the coriolis force to the movement of the first and second sensing shuttle frames in the X-axis direction. The sensing mode mechanical amplifying structure has the following advantages: parasitic co-directional movement of the symmetric first and second masses and parasitic co-directional movement of the symmetric first and second sense bobbin carriers are suppressed, thereby highly suppressing all common mode signals from the environment, such as shock and vibration. The coriolis force motion is amplified, thereby improving several key performance parameters of the angular velocity sensor, such as sensitivity and random angular walk. The driving force of the sensing module is reduced, thereby providing particular advantages for closed loop operation of the angular rate sensor. The conversion of the coriolis-induced Y-axis motion to X-axis motion is not possible with existing angular velocity sensors, including known synchronous levers.

In addition, because the sense mode mechanical amplification structure may provide better mechanical decoupling between sense mode motion and drive mode motion, provide better vibration suppression, and reduce line width control of the deep etch process, thereby relaxing demanding geometry control requirements during fabrication. This has the advantage that the drive and sense mode motions are decoupled from each other without Z-axis angular velocity, so that when one mode motion is excited the other is unaffected.

Wherein "coriolis force induced motion" refers to vibratory motion of the first and second masses generated by coriolis forces; it is perpendicular to the driving motion and the angular velocity vector and therefore occurs in the Y-axis direction. "sense motion" refers to the first and second sense bobbin movements of the first and second masses caused by the coriolis forces to translate in the X-axis.

The drive bobbin carriage is mechanically constrained to move in the direction of the drive mode motion (X direction). Wherein the first pair of vibration modules are mechanically coupled by at least one component that dampens co-directional motion.

In addition, the tuning fork vibrating gyroscope disclosed by the application has the advantages that the driving mode motion and the sensing mode motion occur in or parallel to the reference plane. This is in contrast to "out-of-plane" motion that occurs outside the reference plane. In-plane drive and sense mode motion has many advantages over out-of-plane motion designs. In particular, the in-plane linear drive and sense mode motion of the angular velocity sensor may be a large amplitude motion, advantageously enabling a higher sensitivity detection of the coriolis force than in out-of-plane schemes. Furthermore, all sensors of angular velocity using out-of-plane motion are inevitably affected by out-of-plane unbalanced momentums acting on the mechanical structure.

According to a second aspect of the present application, there is provided a combined angular velocity sensor for measuring an angular velocity of a Z-axis, which is composed of a structure of two aforementioned dual-mass angular velocity sensors mechanically connected with a synchronous lever structure, thereby achieving improvement of performance and stability of the angular velocity sensor and more effective realization of suppression of environmental vibration and linear acceleration.

The foregoing description is only an overview of the technical solutions of the embodiments of the present application, and may be implemented according to the content of the specification, so that the technical means of the embodiments of the present application can be more clearly understood, and the following specific embodiments of the present application are given for clarity and understanding.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural diagram of a dual-mass angular velocity sensor according to an embodiment of the present application.

Fig. 2 is a schematic structural diagram of a sensing mode mechanical amplifying structure according to an embodiment of the present application.

Fig. 3 is an enlarged schematic view of a mechanical structure of a sensing mode according to an embodiment of the present application.

Fig. 4 is a FEM simulation diagram of the angular velocity sensor in fig. 1.

Fig. 5 is a schematic view of a structure of a four-mass angular velocity sensor including the angular velocity sensor of fig. 1.

Fig. 6 is a schematic view of the angular velocity sensor of fig. 1 in a driving mode of movement.

Fig. 7 is a schematic view of the angular velocity sensor of fig. 1 in a sensing mode motion.

Fig. 8 is a simulation diagram of FEM of the angular velocity sensor of fig. 1 in a driving mode motion.

Fig. 9 is a simulation diagram of FEM of the angular velocity sensor of fig. 1 in a sensing mode motion.

Fig. 10 is a partial enlarged view of fig. 4.

Fig. 11 shows a schematic view of a first synchronized lever in a drive mode motion.

Fig. 12 is a schematic structural view of a first movable pivot and a first flexure according to an embodiment of the present application.

Fig. 13 is a schematic structural diagram of a first synchronization lever according to an embodiment of the present application.

Fig. 14 is a schematic structural diagram of a buffer structure according to an embodiment of the present application.

Fig. 15 shows an electrical module within a dual mass angular velocity sensor and a sensing mode mechanical amplification for coriolis motion.

Fig. 16 shows a preferred embodiment of a comb drive for driving and detecting the drive and sense mode motion.

Fig. 17 shows a preferred embodiment of a comb drive for a quadrature compensation module.

Fig. 18 shows a preferred embodiment of a comb drive for a frequency adjustment module.

Fig. 19 shows a C-SOI wafer as the preferred starting material for manufacturing the sensor of angular velocity.

Fig. 20 shows a general cross-sectional view of a C-SOI wafer after micromachining.

Fig. 21 shows a general cross-sectional view of a fully manufactured sensor of angular velocity.

Reference numerals illustrate:

1. a sensing mode mechanical amplifying structure; 3. an upper driving module; 31. a first mass; 32. a first drive bobbin; 33. a second drive bobbin; 4. a lower driving module; 41. a second mass; 42. a third drive bobbin carriage; 43. a fourth drive bobbin carriage; x, driving mode direction; 8. a left sensing module; 81. a first sensing shuttle frame; 9. a right sensing module; 91. a second sensing shuttle frame; 10. anchoring; 11. a main drive spring; 12. a guide spring; 13. a first flexure; 15. a sensing spring system; 16. a second flexure; 17. a rigid cantilever; 18. a third movable pivot; 19. a fourth movable pivot; 20. a third flexure; 21. a fourth flexure; x1, first displacement; y1, second displacement; 23. a first synchronization lever; 24. a second synchronizing lever; 25. a fixed pivot; 26. a first movable pivot; 27. a second movable pivot; 29. the second connecting cantilever beam; 30. a compensation surface; 34. a spring; 35. a flexible cantilever beam; 36. a buffer structure; 361. laterally constraining the cantilever beam; 362. the buffer is connected with the cantilever beam; 37. a driving module; 38. a drive detection module; 39. a sense drive module; 40. a sensing detection module; 44. an electrostatic force quadrature compensation module; 45. a frequency adjustment module; 46. a comb drive; 47. fixing the electrode; 48. a movable electrode;

300. A wafer; 301. a support layer; 302. an angular velocity sensor layer; 303. an insulating buried oxide layer; 304. a back surface oxide layer; 305. sealing the cavity; 306. depositing a metal layer on the front surface; 307. depositing a metal layer on the back; 308. a DRIE trench; 309. a mold frame; 310. an anchor layer; 311. a mechanical structure; 312 a reference plane; 400. sealing the cover wafer; 401. a front surface oxide layer; 402. a front electrode metal layer; 403. and a device electrode.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present application more apparent, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments of the present application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the application without making any inventive effort, are intended to be within the scope of the application.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used in the description of the applications herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having" and any variations thereof in the description and claims of the application and in the description of the drawings are intended to cover a non-exclusive inclusion.

Reference herein to "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearances of the phrase "an embodiment" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments. Those of skill in the art will explicitly and implicitly appreciate that the embodiments described herein may be combined with other embodiments.

The azimuth words appearing in the following description are all directions shown in the drawings, and do not limit the specific structure of the angular velocity sensor of the present application. For example, in the description of the present application, the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate an azimuth or a positional relationship based on that shown in the drawings, and are merely for convenience of describing the present application and simplifying the description, and do not indicate or imply that the apparatus or element to be referred to must have a specific azimuth, be constructed and operated in a specific azimuth, and thus should not be construed as limiting the present application.

Further, expressions such as the direction of the sense-mode movement, the direction of the drive-mode movement, and the direction of indication for explaining the operation and construction of each member of the angular velocity sensor of the present embodiment are not absolute but relative, and although these indications are appropriate when each member of the angular velocity sensor is in the position shown in the drawings, these directions should be interpreted differently when these positions are changed to correspond to the changes.

Furthermore, the terms first, second and the like in the description and in the claims or in the above-described figures, are used for distinguishing between different objects and not for describing a particular sequential order, and may be used to improve one or more of these features either explicitly or implicitly.

In the description of the present application, unless otherwise indicated, the meaning of "plurality" means two or more (including two), and similarly, "plural sets" means two or more (including two).

In the description of the present application, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, e.g., as a "connected" or "coupled" of a mechanical structure may refer to a physical connection, e.g., as a fixed connection, e.g., via a fastener, such as a screw, bolt, or other fastener; the physical connection may also be a detachable connection, such as a snap-fit or snap-fit connection; the physical connection may also be an integral connection, such as a welded, glued or integrally formed connection. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

In order to make the person skilled in the art better understand the solution of the present application, the technical solution of the embodiment of the present application will be clearly and completely described below with reference to the accompanying drawings.

A first embodiment of the application comprises a dual mass sensor of angular velocity comprising a sensing mode mechanical amplifying structure 1 for driving mode motion and coriolis motion, thus solving several limitations of conventional single axis MEMS angular velocity sensors.

A second embodiment of the application comprises a four-mass sensor of angular velocity comprising a sensing mode mechanical amplifying structure 1 for driving mode motion and coriolis motion. This is achieved by symmetrically coupling together the two dual-mass angular velocity sensor structures according to the first embodiment, so that the effects of external vibration, shock and linear acceleration can be completely accommodated, and a high quality factor can be achieved.

A third embodiment of the present application includes a dual-mass angular velocity sensor and a sensing mode mechanical amplifying structure 1 for coriolis motion based on the preferred embodiment to achieve a balance between the volume of the angular velocity sensor and the operational performance.

A fourth embodiment of the application comprises a four-mass angular velocity sensor for a mechanically amplified structure of coriolis motion by coupling together two dual-mass angular velocity sensor structures according to the third embodiment, achieving complete symmetry, so that external vibrations, shocks and linear accelerations can be completely accommodated, and higher quality factors are achieved.

Fig. 1 is a schematic structural diagram of a dual-mass angular velocity sensor according to an embodiment of the present application, and fig. 1 is a mechanical diagram of a dual-mass MEMS angular velocity sensor, which is a second exemplary embodiment of a sensor for measuring an angular velocity in a Z-axis direction, and includes only a sensing mode mechanical amplifying structure 1 for coriolis motion. The apparatus of fig. 1 comprises a first pair of vibration modules, an upper drive module 3 and a lower drive module 4. The upper drive module 3 comprises a first mass 31, a first drive shuttle mount 32 and a second drive shuttle mount 33. The lower drive module 4 comprises a second mass 41, a third drive shuttle mount 42 and a fourth drive shuttle mount 43.

The first end of the first mass 31 is mechanically coupled to a first drive shuttle frame 32, the second end of the first mass 31 is mechanically coupled to a second drive shuttle frame 33, and the first drive shuttle frame 32 and the second drive shuttle frame 33 drive the first mass 31 to move in the drive mode direction X under the excitation of electrostatic force. Similarly, the first end of the second mass 41 is mechanically coupled to the third drive shuttle 42, the second end of the second mass 41 is mechanically coupled to the fourth drive shuttle 43, and the third drive shuttle 42 and the fourth drive shuttle 43 move the second mass 41 in the drive mode direction X under the excitation of electrostatic force.

The symmetrical upper drive module 3 and lower drive module 4 are elastically connected by a first synchronization lever 23 and a second synchronization lever 24. Illustratively, a first end of the first synchronization lever 23 is coupled to the first drive bobbin carriage 32 and a second end of the first synchronization lever 23 is coupled to the third drive bobbin carriage 42; the first end of the second synchronizing lever 24 is connected to the second drive bobbin holder 33, and the second end of the second synchronizing lever 24 is connected to the fourth drive bobbin holder 43.

By allowing only the fixed pivot 25, which rotates about the Z-axis, to anchor to the substrate, opposite movements of the symmetrical first and second masses 31, 41 in the drive mode are created, while simultaneously suppressing the same-directional movement of the symmetrical first and second masses 31, 41, suppressing the same-directional movement of the symmetrical first and second drive shuttle holders 32, 33, and suppressing the same-directional movement of the symmetrical third and fourth drive shuttle holders 42, 43.

The device further comprises a second symmetrical vibration module, namely a left sensing module 8 and a right sensing module 9, the left sensing module 8 comprising a first sensing shuttle frame 81 and the right sensing module comprising a second sensing shuttle frame 91. Wherein the first sensing bobbin holder 81 and the second sensing bobbin holder 91 are symmetrical. First and second sensing bobbin holders 81 and 91

The mechanical amplification structure 1 is coupled to the first mass 31 and the second mass 41 by a sense mode.

The first and second pairs of vibration modules are elastically coupled to each other by a sensing mode mechanical amplifying structure 1, and the sensing mode mechanical amplifying structure 1 converts and amplifies Y-directional movements of the first and second masses 31 and 41 caused by the coriolis force into X-directional movements of the first and second sensing shuttle frames 81 and 91.

In some embodiments, the first drive bay 32 and the third drive bay 42 are each coupled to the first synchronization lever 23 by a first movable pivot 26. The second drive bobbin carriage 33 and the fourth drive bobbin carriage 43 are each connected to the second synchronizing lever 24 by a second movable pivot 27.

A first movable pivot 26 connected to the first drive carriage 32 that allows translational movement of the first drive carriage 32 in the drive mode direction X and rotational movement of the first synchronization lever 23 about the Z axis. The first movable pivot 26 connected to the third drive bobbin carriage 42 is designed to allow translational movement of the third drive bobbin carriage 42 in the direction of drive mode movement and rotational movement of the first synchronization lever 23 about the Z-axis.

The second movable pivot 27 connected to the second drive carriage 33 is designed to allow translational movement of the second drive carriage 33 in the direction of the drive mode movement and to allow rotational movement of the second synchronizing lever 24 about the Z-axis. The second movable pivot 27 connected to the fourth drive carriage 43 is designed to allow translational movement of the fourth drive carriage 43 in the direction of drive mode movement and to allow rotational movement of the second synchronizing lever 24 about the Z-axis.

As shown in fig. 1, the first, second, third and fourth driving bobbin holders 32, 33, 42 and 43 are connected to the substrate through the main driving springs 11, respectively, the first and second driving bobbin holders 32 and 33 are connected to the first mass block 31 through the Y guide springs 12, respectively, and the third and fourth driving bobbin holders 42 and 43 are connected to the second mass block 41 through the Y guide springs 12, respectively. The first, second, third and fourth drive bobbins 32, 33, 42 and 43 are mechanically constrained by a single first flexure 13, respectively, and the first, second, third and fourth drive bobbins 32, 33, 42 and 43 can only move in the direction of movement of the drive pattern (X-axis direction) under the constraint of the first flexure 13, the first flexure 13 being constituted by a multi-pronged spring fixed to the anchor 10.

The first and second sensing shuttle holders 81 and 91 are coupled to the substrate primarily by the sensing spring system 15 and to the first and second masses 31 and 41 by the sensing mode mechanical amplifying structure 1 and the movable pivot. The movement of the first and second sensing bobbin holders 81 and 91 is limited by the second flexure 16 to move only in the X-axis direction. The second flexure 16 is constituted by a multi-pronged spring fixed to the anchor 10.

The sense-mode mechanical amplifying structure 1 comprises four rigid cantilever beams 17 arranged symmetrically, two rigid cantilever beams 17 close to a first mass 31 being connected to the first mass 31 by a third movable pivot 18 and two rigid cantilever beams 17 close to a second mass 41 being connected to the second mass 41 by a fourth movable pivot 19. The direction of the coriolis induced motion of the first mass 31 and the direction of the coriolis induced motion of the second mass 41 each form a non-zero angle with each rigid cantilever 17.

In the case where the direction of the coriolis force induced motion of the first mass 31 and the direction of the coriolis force induced motion of the second mass 41 both form a non-zero angle with the rigid cantilever 17, when the third movable pivot 18 and the fourth movable pivot 19 move in the Y-axis direction, the ends of the rigid cantilever 17 away from the first mass 31 and the second mass 41 can move in the X-axis direction without being stuck and unable to push against the first sensing shuttle frame 81 and the second sensing shuttle frame 91.

The third movable pivot 18 is constrained by the third flexure 20 such that the third movable pivot 18 can move only in the direction of coriolis induced motion (Y-axis). The fourth movable pivot 19 is mechanically constrained by the fourth flexure 21 such that the fourth movable pivot 19 moves only in the direction of the coriolis induced motion.

The third 20 and fourth 21 flexures may be formed of multi-pronged springs secured to the anchor 10.

The rigid cantilever Liang Jiyao constitutes a drive mode mechanical amplifying structure 2 that amplifies drive mode motion. In a similar manner, the rigid cantilever beams 17 collectively form a sensing mode mechanical amplifying structure 1 that amplifies coriolis motions.

Fig. 2 schematically illustrates an exemplary structure of the coriolis motion sensing mode mechanical amplification structure 1. The structure comprises:

four symmetrical rigid cantilevers 17, each rigid cantilever 17 forms an included angle with the Y-axis. The two rigid cantilevers 17 close to the first mass 31 are both connected to the first mass 31, the first sensing shuttle frame 81 and the second sensing shuttle frame 91 by the third movable pivot 18, and the two rigid cantilevers 17 close to the second mass 41 are connected to the second mass 41, the first sensing shuttle frame 81 and the second sensing shuttle frame 91 by the fourth movable pivot 19. Rigid cantilevers 17 of length L are rigid under normal operating conditions, but their joints are flexible so that this angle can be changed when subjected to coriolis forces (along the Y-axis) or electrostatic forces driving the sensing module (along the X-axis);

Illustratively, during the opposite movement of the first mass 31 and the second mass 41, the interior angle between the two rigid cantilevers 17 connected to the first mass 31 becomes larger, as does the interior angle between the two rigid cantilevers 17 connected to the second mass 41. In this way, the coriolis force induced motion of the first mass 31 and the coriolis force induced motion of the second mass 41 can be amplified to the motion of the first and second sensing shuttles 81, 91 in the second pair of vibration modules in the direction of the sense mode motion.

Due to the geometry of the system, in connection with fig. 1-3, the first displacement X1 of the first drive bobbin 32, the second drive bobbin 33, the third drive bobbin 42 and the fourth drive bobbin 43 in the X-axis will be greater than the second displacement Y1 of the first mass 31 and the second mass 41 in the Y-axis.

In some embodiments, the sensing mode mechanical amplifying structure 1 may further comprise a pair of sensing spring systems 15, both sides of the sensing spring systems 15 in the direction of movement induced by the coriolis force being connected to the rigid cantilever 17, both sides of the sensing spring systems 15 in the direction of movement of the sensing mode being connected to the first and second sensing shuttle frames 81 and 91.

The provision of the sensing spring system 15 may limit the movement of the joint connected to the first and second sensing bobbin holders 81 and 91 in the X-axis direction only.

Due to the geometry of the third flexure 20, the fourth flexure 21, and the rigid cantilever 17, and the method of anchoring 10, the symmetrical first and second sensing shuttles 81, 91, and the symmetrical first and second masses 31, 41 are inhibited from co-directional movement.

Under normal operating conditions, the internal angle between the rigid cantilever beams 17 in the sensing mode mechanical amplifying structure 1 connected thereto can be changed due to the structural design of the third movable pivot 18 and the fourth movable pivot 19.

In the presence of angular velocity along the Z-axis, coriolis forces will act on the symmetric first and second masses 31, 41 in opposite directions due to the opposite movements of the symmetric first and second masses 31, 41, pushing the symmetric third and fourth movable pivots 18, 19 in opposite movements along the Y-axis. The movement of the third and fourth movable pivots 18, 19 is transferred to the first and second sensing shuttle holders 81, 91 through the rigid cantilever beam 17 and the sensing spring system 15, forcing the first and second sensing shuttle holders 81, 91 to move in the X-axis direction.

As shown in fig. 3, due to the geometric design of the system, the first displacement X1 of the first sensing shuttle frame 81 and the second sensing shuttle frame 91 in the X-axis direction is larger than the second displacement Y1 of the first mass 31, the second mass 41, the third movable pivot 18 and the fourth movable pivot 19 in the Y-axis direction, forming a mechanically amplified function, and the illustrated sensing mode mechanical amplifying structure 1 also suppresses the same directional movement of the symmetrical first sensing shuttle frame 81 and the second sensing shuttle frame 91 in the X-direction and suppresses the same directional movement of the symmetrical first mass 31 and the second mass 41 in the Y-direction.

A key requirement for the function of the sensing mode mechanical amplifying structure 1 is that the third movable pivot 18 and the fourth movable pivot 19 have to move only in the Y-axis direction (in the direction of the coriolis force). This can be achieved by using a third flexure 20 and a fourth flexure 21 fixed to the anchor 10. The third flexure 20 and the fourth flexure 21 allow bending in the Y-axis direction but are not affected by the force in the X-direction.

Fig. 3 shows a calculation model of the amplification factor of an example of the sensing mode mechanical amplification structure 1. Assuming that the rigid cantilever 17 remains undeformed (maintains its length L), the small vertical second displacement Y1 of the third movable pivot 18 and the fourth movable pivot 19 corresponds to an amplified displacement of the first sensing bobbin 81 and the second sensing bobbin 91, i.e. the first displacement X1, when the rigid cantilever 17 has a static angle θ with respect to the Y direction:

As a typical example, for an angle θ=15°, the magnification coefficient ζ=x/y=3.73.

Referring to fig. 3, in the equilibrium state of the forces:

fig. 4 shows an example of an implementation of the dual-mass MEMS angular velocity sensor shown in fig. 1, which is actually implemented.

Fig. 5 shows a schematic diagram of a four-mass MEMS angular velocity sensor comprising a sensing mode mechanical amplifying structure 1 amplifying coriolis motion, which is an angular velocity sensor (shown in fig. 1) constructed by coupling two dual-mass angular velocity sensor structures through a synchronous lever connection, thereby easily achieving better performance, higher stability and better resistance to vibration and linear acceleration. The second connecting cantilever beam 29 connects the two drive shuttles inside to achieve mechanical coupling and synchronous motion.

Fig. 6 shows a mechanical schematic diagram of a dual-mass angular velocity sensor, the driving mode of which comprises the synchronous lever structure shown in fig. 1, clearly showing the opposite movements of the symmetrical masses and the symmetrical drive bobbin, and the initial deformed states of the main drive spring 11 and the rotatable first and second synchronous levers 23 and 24 in the driving mode movement.

The advantage is that the sensing mode mechanical amplifying structure 1, the first sensing shuttle frame 81 and the second sensing shuttle frame 91, which can simply realize coriolis force in the driving mode motion, remain undisturbed, i.e. the sensing mode is mechanically decoupled from the driving mode.

The structure of the first and second synchronizing levers 23 and 24 allows the upper and lower driving modules 31 and 41 to be motion-synchronized. A fixed pivot 25 is located at the center of the first synchronization lever 23, allowing only the first synchronization lever 23 to rotate about the Z axis. Another fixed pivot 25 is located at the center of the second synchronizing lever 24, allowing only the second synchronizing lever 24 to rotate about the Z-axis.

The structure of the first movable pivot 26 allows the first synchronizing lever 23 to rotate without interfering with the linear movement of the first drive bobbin 32 and the third drive bobbin 42 in the X-axis direction. The structure of the second movable pivot 27 allows the second synchronizing lever 24 to rotate without interfering with the linear movement of the second drive bobbin 33 and the fourth drive bobbin 43 in the X-axis direction.

The third movable pivot 18 allows linear movement of the first mass 31 in the X-axis direction and allows the Y-axis to perturb the coriolis sensing mode mechanical amplification structure 1. The fourth movable pivot 19 allows linear movement of the second mass 41 along the X-axis direction and allows the Y-axis to perturb the coriolis sensing mode mechanical amplification structure 1.

Fig. 7 shows a mechanical schematic diagram of a dual-mass angular velocity sensor, the sensing mode of which comprises the synchronous lever structure shown in fig. 1, clearly showing the opposite movements of the symmetrical first mass 31, second mass 41 and symmetrical first and second sensing shuttle frames 81, 91, and the initial deformation states of the sensing spring system 15, third and fourth flexures 20, 21, Y-axis guide springs 12 of the first mass 31 and Y-axis guide springs 12 of the second mass 41, and the vertically displaceable third and fourth movable pivots 18, 19 in the sensing mode movement.

This has the advantage that the first drive bobbin holder 32, the second drive bobbin holder 33 and the first synchronizing lever 23, the third drive bobbin holder 42, the fourth drive bobbin holder 43 and the second synchronizing lever 24 can be easily realized in the sense mode movement, i.e. the drive mode is mechanically decoupled from the sense mode.

The structure of the rigid cantilever 17 and the sensing spring system 15 allows for a symmetrical left sensing module 8 and right sensing module 9 to be synchronized in motion.

Fig. 8 shows FEM simulation of drive mode motion of a dual mass angular velocity sensor with a synchronous lever as shown in fig. 1 and 4. The fixed electrode 47 is not shown and the deformation is exaggerated for better observation.

Fig. 9 shows FEM simulation of sense mode motion of the dual mass angular velocity sensor with synchronous lever shown in fig. 1 and 4. For better observation of the deformation, the fixed 30 electrodes are not shown and the deformation is exaggerated.

Fig. 10 shows a design example of a coriolis sensing mode mechanical amplification structure 1 according to the present disclosure. This has the advantage that the main drive spring 11 allows the first 31 and second 41 masses to move in the X-axis (drive mode movement direction) while the third movable pivot 18 is constrained by the third flexure 20 to move only in the Y-axis and the fourth movable pivot 19 is constrained by the fourth flexure 21 to move only in the Y-axis. The third and fourth movable pivots 18, 19 push or pull the rigid cantilever 17 in the presence of the coriolis force acting in the Y-axis, which in turn pushes or pulls the first sensing shuttle frame 81, the second sensing shuttle frame 91, and the sensing spring system 15 in the X-axis.

In some embodiments, one second flexure 16 is connected to each of the first and second sensing shuttle frames 81 and 91, and the sensing spring system 15 mechanically constrains the symmetrical first and second sensing shuttle frames 81 and 91 along the X-axis only in conjunction with the second flexure 16 (see fig. 4).

This has the advantage that the second flexure 16, the sensing spring system 15, the third flexure 20 and the fourth flexure 21 are designed to be connected to multi-pronged springs on the anchor 10, so that the stress level and the loss of momentum at the anchor 10 can be reduced, thereby significantly increasing the reliability and the operational performance of the sensor of angular velocity.

The dry etching process is precisely controlled by designing the compensation surface 30 for ease of manufacture. The compensation surface 30 is fixed to the substrate by the anchor 10.

Fig. 11 shows an exemplary schematic diagram of another synchronous lever according to the present disclosure, and the angular velocity sensor is an angular velocity sensor including a synchronous lever. The first and second synchronizing levers 23, 24 are anchored to the substrate by a fixed pivot 25 and are rotatable about the Z-axis, respectively. In order to separate the rotational movement of the synchronizing lever from the linear movement of the drive bobbin carriage, a structure of a first movable pivot 26 driving the first synchronizing lever 23 and a second movable pivot 27 driving the second synchronizing lever 24 is devised.

The first movable pivot 26 greatly reduces the force FDy exerted by the first synchronization lever 23 on the first drive bobbin carriage 32 and the third drive bobbin carriage 42 in the Y-axis direction, reducing the generation of quadrature error signals. The second movable pivot 27 greatly reduces the force FDy exerted by the second synchronizing lever 24 on the second drive bobbin carriage 33 and the fourth drive bobbin carriage 43 in the Y-axis direction.

Fig. 12 shows a preferred design example of the first movable pivot 26 and an alternative embodiment example of the first flexure 13 as part of the structure of the angular velocity sensor including the first synchronization lever 23.

Fig. 13 shows a preferred design example of the first synchronization lever 23 according to the present disclosure as a part of an angular velocity sensor including the first synchronization lever 23. The structure is a set of at least 4 but preferably 6 "S" springs 34 anchored at one end to the substrate allowing the first synchronization lever 23 to rotate about the Z axis while inhibiting all linear translation. In addition, a flexible cantilever beam 35 is added to limit the rotation of the first synchronization lever 23 to a certain range, thereby protecting the angular velocity sensor from large external mechanical shocks. The structure of the second synchronizing lever 24 is similar to that of the first synchronizing lever 23, and the structure of the second synchronizing lever 24 will not be described here.

Fig. 14 illustrates an exemplary embodiment of a damping structure 36 that may reduce damping in accordance with the present disclosure as applicable to all of the exemplary embodiments herein. Instead of directly connecting the movable third flexure 20 to the anchor 10, a set of cushioned connections of laterally constraining cantilevers 361 are designed to isolate the third flexure 20 from the direct connection of the anchor 10, reducing momentum dissipation at the anchor 10. In addition, a set of bump bonded cantilevers 362 is designed to reduce the contact area between third flexure 20 and anchor 10 to further reduce the momentum loss associated with anchor 10.

In practice, the above-mentioned buffer structure 36 may also be provided between the main driving spring 11 and the corresponding anchor 10. Also, any other spring and corresponding anchor 10 may be provided with the above-described cushioning structure 36 to reduce the dissipation of momentum on the spring at the anchor 10.

Fig. 15 shows the position of various electrical modules in a dual mass sensor of angular velocity with a synchronous lever.

The first driving bobbin holder 32 and the second driving bobbin holder 33 each comprise a driving module 37 and a driving detecting module 38, wherein the driving module 37 drives the first pair of vibration modules to reversely oscillate by electrostatic force, and the driving detecting module 38 is used for measuring/quantifying the oscillation amplitude of the driving module 37.

In an alternative embodiment of the application, the drive module 37 and the drive detection module 38 may be combined in one module that will operate in a time division multiplexed mode, most of the time as electrostatic force drivers and some as capacitive amplitude detectors.

These particular structural designs do not introduce the undesirable mechanical momentum associated with the drive mode motion, as compared to the prior art.

The first and second sensing shuttle holders 81 and 91 each include a sensing driving module 39 and a sensing detecting module 40, wherein the former counteracts/balances the motion of the left and right sensing modules 8 and 9 by electrostatic force, and the latter serves to measure/quantify the magnitude of the residual oscillation of the sensing modules. In an alternative embodiment of the present application, the sense drive module 39 and the sense detection module 40 may be combined in a module that will operate in a time division multiplexed mode, most of the time as one electrostatic force driver and some as a capacitive amplitude detector.

In addition, the symmetrical first mass 31 and second mass 41 each comprise an electrostatic force quadrature compensation module 44, so that the compensation of quadrature errors is achieved with electrostatic forces.

Further, for the angular velocity sensor for pattern matching, each of the symmetrical first and second sensing bobbin holders 81 and 91 includes at least one frequency adjustment module 45, and matching of the sensing mode movement resonance frequency with the driving mode movement resonance frequency is achieved by adjusting electrostatic damping.

As previously mentioned, these sensors of angular velocity employ electrostatic force actuation and capacitive sensing to actuate and sense the movement of various elements, regardless of the actual implementation. Fig. 16 shows a preferred embodiment of comb drive 46 for driving and detecting of the drive and sense modules. They consist of a fixed electrode 47 and a movable electrode 48, the fixed electrode 47 being fixed to the substrate by the anchor 10, the movable electrode 48 being connected to the drive shuttle frame and the sense shuttle frame.

As shown in fig. 16, the design of comb drive 46 is a preferred embodiment to vary the overlap of the areas between the teeth of the comb, wherein the overlap area between the teeth of the comb varies during movement. In alternative embodiments of the application, variations in the spacing between the teeth may also be used.

As shown in fig. 15-18, the disclosed sensor of angular velocity may further employ an electrostatic force quadrature compensation module 44, the electrostatic force quadrature compensation module 44 comprising a set of comb drives 46, each comb drive 46 having a fixed electrode 47 anchored to the substrate by anchors 10, and a movable electrode 48 connected to the first mass 31 and the second mass 41. The electrostatic force quadrature compensation module 44 may eliminate residual quadrature errors within the designed operating range.

As shown in fig. 15 to 18, the angular velocity sensor disclosed in the present application may further employ a frequency adjustment module 45. The frequency adjustment module 45 is made up of a set of comb drives 46, each comb drive 46 having a fixed electrode 47 anchored to the substrate by anchor 10, and a movable electrode 48 connected to a first sensing shuttle frame 81 and a second sensing shuttle frame 91. The frequency adjustment module 45 suppresses the sense mode motion in a manner that adjusts the electrostatic force, thereby lowering its resonant frequency to match the drive mode motion resonant frequency to achieve mode motion matching.

Fig. 18 shows a preferred embodiment of a comb drive for the frequency adjustment module 45.

Regardless of the example chosen, the disclosed angular rate sensor cavity SOI (C-SOI) wafer 300 serves as a substrate material, as shown in fig. 19. The C-SOI wafer 300 includes a silicon substrate layer or support layer 301, an angular velocity sensor layer 302, an insulating Buried Oxide (BOX) layer 303, a backside oxide layer 304 required to control wafer bow and warp, and a hermetic cavity 305 implemented in the substrate. As shown in fig. 19, the buried oxide layer 303 may not be present at all in the sealed cavity 305, but be present on the angular velocity sensor layer or the substrate or both.

Fig. 20 shows a general cross-sectional view of a micromachined C-SOI wafer. The front side deposited metal layer 306 is processed into seal rings and contact electrodes on the substrate. The back side deposited metal layer 307 is processed into a substrate contact electrode. DRIE is used to process the angular velocity sensor layer within the cavity to define DRIE grooves 308, mechanical structures 311 (combs, fingers, springs, masses, shuttle frames, synchronizing levers, etc.), anchor layers 310, and mold frames 309.

Fig. 21 shows a representative cross-sectional view of a fully fabricated sensor of angular velocity, the sealing structure is formed by bonding the MEMS wafer 300 shown in fig. 20 to a seal cap wafer 400 containing electrical wiring by wafer level bonding, a front side oxide layer 401 of which may be used to provide insulation between various conductive elements, and a front side electrode metal layer 402 may be processed into seal rings and contact electrodes on the seal cap wafer 400, ensuring signal transfer from the electrodes located on the MEMS wafer 300 to device electrodes 403 located on the seal cap wafer 400.

The above embodiments are only for illustrating the technical solution of the present application, and are not limiting; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims (18)

1. An angular velocity sensor for measuring an angular velocity of a Z-axis, the angular velocity sensor comprising:

a first pair of vibration modules connected to the synchronizing lever, constituting a driving mode motion; at a first pre-designed frequency, the first pair of vibration modules move synchronously and in opposite directions, the synchronizing lever pivoting about the Z-axis;

a second pair of vibration modules constituting a sensing mode motion; in the direction of the sense mode motion, the second pair of vibration modules move synchronously and in opposite directions at a second pre-designed frequency;

a sensing mode mechanical amplification structure elastically connecting the first and second pairs of vibrating modules, the sensing mode mechanical amplification structure configured to convert and amplify coriolis force induced motion of the first pair of vibrating modules in the direction of the drive mode motion to motion of the second pair of vibrating modules in the direction of the sense mode motion; mechanically decoupling between the drive mode motion and the sense mode motion;

wherein the direction of the sense mode motion is parallel to the direction of the drive mode motion and perpendicular to the Z-axis.

2. The sensor of angular velocity according to claim 1, wherein the first pair of vibration modules comprises a first mass, a second mass, a first drive shuttle frame, a second drive shuttle frame, a third drive shuttle frame, and a fourth drive shuttle frame;

a first end of the first mass is mechanically coupled to the first drive shuttle mount and a second end of the first mass is mechanically coupled to the second drive shuttle mount, the first drive shuttle mount and the second drive shuttle mount for generating drive mode motion of the first mass in a direction of the drive mode motion;

a first end of the second mass is mechanically coupled to the third drive shuttle mount, a second end of the second mass is mechanically coupled to the fourth drive shuttle mount, the third drive shuttle mount and the fourth drive shuttle mount for generating drive mode motion of the second mass in a direction of the drive mode motion;

the synchronous lever comprises a first synchronous lever and a second synchronous lever; the first end of the first synchronization lever is connected with the first driving shuttle frame, and the second end of the first synchronization lever is connected with the third driving shuttle frame; the first end of the second synchronizing lever is connected with the second driving shuttle frame, and the second end of the second synchronizing lever is connected with the fourth driving shuttle frame.

3. The sensor of angular velocity according to claim 2, wherein the first, second, third and fourth drive shuttle holders are mechanically constrained by one first flexure, respectively, such that the first, second, third and fourth drive shuttle holders move only in the direction of the drive mode movement.

4. The sensor of angular velocity according to claim 2, wherein the first and third drive shuttle holders are each connected to the first synchronization lever by a first movable pivot;

the second drive shuttle mount and the fourth drive shuttle mount are each connected to the second synchronizing lever by a second movable pivot.

5. The sensor of angular velocity according to claim 2, characterized in that the first synchronization lever comprises a first mechanical decoupler for decoupling the linear movement of the first drive shuttle frame and the linear movement of the third drive shuttle frame from the rotational movement of the first synchronization lever;

the second synchronizing lever includes a second mechanical decoupler for decoupling the linear motion of the second drive carriage and the linear motion of the fourth drive carriage from the rotational motion of the second synchronizing lever.

6. The sensor of angular velocity according to claim 2, wherein the second pair of vibration modules comprises a first sensing shuttle frame and a second sensing shuttle frame, the first and second sensing shuttle frames being coupled to the first and second masses by the sensing mode mechanical amplification structure.

7. The sensor of angular velocity according to claim 6, wherein the first and second sensor shuttle holders are mechanically constrained by one second flexure, respectively, such that the first and second sensor shuttle holders move only in the direction of the sensor mode movement.

8. The sensor of angular velocity according to claim 6, wherein the sensing mode mechanical amplifying structure comprises four rigid cantilevers arranged centrally symmetrically, two rigid cantilevers close to the first mass being connected to the first mass by a third movable pivot and two rigid cantilevers close to the second mass being connected to the second mass by a fourth movable pivot;

the direction of the coriolis force induced motion of the first mass and the direction of the coriolis force induced motion of the second mass each form a non-zero angle with each of the rigid cantilevers.

9. The sensor of angular velocity according to claim 8, wherein during the movement of the first mass and the second mass in opposite directions, the inner angle between the two rigid cantilevers connected to the first mass is increased, and the inner angle between the two rigid cantilevers connected to the second mass is also increased to amplify the movement caused by the coriolis force of the first mass and the movement caused by the coriolis force of the second mass to the movement of the second pair of vibration modules in the direction of the sense mode movement.

10. The sensor of angular velocity according to claim 8, characterized in that the third movable pivot is mechanically constrained by a third flexure such that the third movable pivot moves only in the direction of the coriolis induced motion;

the fourth movable pivot is mechanically constrained by a fourth flexure such that the fourth movable pivot moves only in the direction of the coriolis induced motion.

11. The sensor of angular velocity according to claim 8, wherein the sensing mode mechanical amplifying structure comprises a sensing spring system connected to the rigid cantilever on both sides in the direction of movement caused by the coriolis force, the sensing spring system connected to the first and second sensing shuttle frames on both sides in the direction of movement of the sensing mode.

12. The sensor of angular velocity according to claim 2, wherein the first and second drive carriages each comprise a drive module for driving the first pair of vibration modules to oscillate reversely by electrostatic force and a drive detection module for measuring/quantifying an oscillation amplitude of the drive module.

13. Sensor of angular velocity according to claim 12, characterized in, that the drive module and the drive detection module are designed to operate in a time division multiplexed mode.

14. The sensor of angular velocity according to claim 6, characterized in, that the first and second sensor shuttle holders comprise a sensor drive module and a sensor detection module, which are designed to operate in a time division multiplexed mode.

15. Angular velocity sensor according to claim 2, characterized in that it further comprises an electrostatic force quadrature compensation module comprising a set of comb drives, each comprising a fixed electrode anchored by an anchor to the substrate of the angular velocity sensor and a movable electrode connected to the first and second masses, said electrostatic force quadrature compensation module being designed to compensate residual quadrature errors with electrostatic force.

16. The sensor of angular velocity according to claim 6, further comprising a frequency adjustment module comprising a set of comb drives, each of the comb drives having a fixed electrode anchored to the substrate of the sensor of angular velocity by an anchor and a movable electrode connected to the first and second sensor shuttle holders, the frequency adjustment module being designed to adjust the sensor module movement frequency in a manner that adjusts the electrostatic force until a match of the sensor mode movement resonance frequency to the drive module movement resonance frequency is achieved.

17. A combination sensor of angular velocity, characterized in that it comprises two sensors of angular velocity according to any one of claims 1 to 16, said two sensors of angular velocity being mechanically coupled.

18. The combination sensor of angular velocity according to claim 17, wherein the two sensors of angular velocity are coupled symmetrically.