CN117123010A - Waste gas treatment device - Google Patents

Waste gas treatment device Download PDF

Info

Publication number
CN117123010A
CN117123010A CN202311096212.XA CN202311096212A CN117123010A CN 117123010 A CN117123010 A CN 117123010A CN 202311096212 A CN202311096212 A CN 202311096212A CN 117123010 A CN117123010 A CN 117123010A
Authority
CN
China
Prior art keywords
section
exhaust gas
treatment device
heat preservation
flushing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311096212.XA
Other languages
Chinese (zh)
Inventor
张伟明
于广游
姜润雨
金丙哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Shengjian Semiconductor Technology Co ltd
Original Assignee
Shanghai Shengjian Semiconductor Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Shengjian Semiconductor Technology Co ltd filed Critical Shanghai Shengjian Semiconductor Technology Co ltd
Priority to CN202311096212.XA priority Critical patent/CN117123010A/en
Publication of CN117123010A publication Critical patent/CN117123010A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/06—Spray cleaning
    • B01D47/063—Spray cleaning with two or more jets impinging against each other
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/01—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements
    • B01D29/03—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with flat filtering elements self-supporting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
    • B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
    • B01D29/56—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/1456—Removing acid components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
    • B01D53/18—Absorbing units; Liquid distributors therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto 
    • B08B9/02—Cleaning pipes or tubes or systems of pipes or tubes
    • B08B9/027—Cleaning the internal surfaces; Removal of blockages
    • B08B9/032—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing
    • B08B9/0321—Cleaning the internal surfaces; Removal of blockages by the mechanical action of a moving fluid, e.g. by flushing using pressurised, pulsating or purging fluid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Mechanical Engineering (AREA)
  • Treating Waste Gases (AREA)

Abstract

The embodiment of the invention provides an exhaust gas treatment device, and relates to the field of exhaust gas treatment. The waste gas treatment device comprises a gas washing pipe, a heating piece and a gas washing assembly; the gas washing pipe comprises a heat preservation section and a flushing section, one end of the heat preservation section is connected with the flushing section, and the other end of the heat preservation section is used for introducing waste gas; the heating piece is arranged outside the heat preservation section and is used for heating the heat preservation section; the gas washing assembly is arranged in the flushing section and used for spraying the flushing section. The heating piece is arranged on the heat preservation section to heat the pipeline, and meanwhile, the heat preservation function is achieved, so that the viscous dust in the waste gas is prevented from hardening due to temperature reduction, and the pipeline is prevented from being blocked; through set up the gas washing subassembly in the section of washing so as to spray the section of washing, both can wash the inner wall of section of washing to granule such as dust, impurity attached to the inner wall are washd, can reach anticorrosive and cooling treatment's purpose again, can also make solid particle and the acidic material in the waste gas quick-soluble in water, effectively prevent the inside jam problem of pipeline.

Description

Waste gas treatment device
Technical Field
The invention relates to the field of waste gas treatment, in particular to a waste gas treatment device.
Background
The semiconductor industry can produce various toxic and harmful gases in the production process, and at present, an electrothermal decomposition method, a gas combustion type, an adsorption type and the like are generally adopted to purify the toxic and harmful gases.
However, the existing waste gas treatment equipment can cause unsmooth or even blockage of gas circulation in pipelines and equipment due to accumulation of a large amount of dust in waste gas after long-time operation, so that the waste gas treatment efficiency is affected, the maintenance period of the equipment is shortened, and the production cost is increased.
Disclosure of Invention
The invention provides an exhaust gas treatment device, which can prevent a gas washing pipe from hardening due to the fact that the temperature of sticky dust in exhaust gas is reduced, avoid causing pipeline blockage, and can clean the inner wall of a flushing section so as to wash particles such as dust, impurities and the like attached to the inner wall, thereby achieving the aims of corrosion prevention and cooling treatment.
Embodiments of the invention may be implemented as follows:
in a first aspect, the present invention provides an exhaust gas treatment device comprising a scrubber, a heating element, and a scrubber assembly;
the gas washing pipe comprises a heat preservation section and a flushing section, one end of the heat preservation section is connected with the flushing section, and the other end of the heat preservation section is used for introducing waste gas;
the heating piece is arranged outside the heat preservation section and is used for heating the heat preservation section;
the gas washing assembly is arranged in the flushing section and is used for spraying the flushing section.
In the embodiment, the heating piece is arranged on the heat preservation section to heat the pipeline and also has the heat preservation function, so that the viscous dust in the waste gas is prevented from hardening due to temperature reduction, and the pipeline is prevented from being blocked; through set up the gas washing subassembly in the section of washing so as to spray the section of washing, both can wash the inner wall of section of washing to granule such as dust, impurity attached to the inner wall are washd, can reach anticorrosive and cooling treatment's purpose again, can also make solid particle and the acidic material in the waste gas fast dissolve in the aquatic, thereby effectively prevented the inside jam problem of pipeline.
In an alternative embodiment, the gas washing assembly is an overflow element, which is provided with an overflow gap for spraying against the inner wall of the flushing section and forming a water film.
In the above embodiment, the water flows into the flushing segment through the overflow gap to form a water curtain, and forms a water film on the inner wall of the flushing segment to flush dust while avoiding corrosion.
In an alternative embodiment, the heating element is wound around the outer wall of the insulation section.
In the above embodiment, the heating element is in a strip shape, and the heating element can be heated by adopting an electric heating mode, so that the heating element can be wound on the outer wall of the heat preservation section, the heating effect of the heating element on the heat preservation section is better, and the heating is uniform, the inside of the heat preservation section is maintained in a higher temperature environment, and thus, the viscous dust is effectively prevented from blocking the gas washing pipe.
In an alternative embodiment, the gas washing component is a water washing pipe, one end of the gas washing component is provided with a liquid inlet, and the other end of the gas washing component is positioned in the washing section and is provided with at least two liquid outlet holes.
In the above embodiment, at least two liquid outlet holes are uniformly distributed at the end part of the gas washing assembly, water can be uniformly sprayed from the at least two liquid outlet holes to the gas washing pipe through the gas washing assembly by injecting water into the liquid inlet, so that the particulate matters and acidic matters in the waste gas are dissolved in the water, and the cleaning of part of the inner wall of the gas washing pipe and the particulate matters such as dust, impurities and the like attached to the inner wall are realized, thereby effectively achieving the effects of cleaning, cooling and corrosion prevention.
In an alternative embodiment, the end part of the gas washing assembly provided with at least two liquid outlet holes is further provided with a flow guiding cover, and the flow guiding cover is used for enabling water sprayed out of the liquid outlet holes to form a water curtain.
In the above embodiment, the diversion cover is disposed at the top of the gas washing assembly where the liquid outlet is provided, so as to buffer and divert the water sprayed from the liquid outlet, so that the water flow forms a water curtain, so that the waste gas and the water are fully contacted, and the inner wall of the gas washing pipe is flushed.
In an alternative embodiment, the gas washing assembly comprises a liquid inlet section and at least two liquid outlet sections, wherein the at least two liquid outlet sections are connected with the liquid inlet section, the liquid inlet is arranged in the liquid inlet section, and the at least two liquid outlet sections are provided with the at least two liquid outlet holes;
the number of the gas washing pipes is at least two, and the at least two liquid outlet sections are arranged in the flushing sections of the at least two gas washing pipes in a one-to-one correspondence manner.
In the above embodiment, the treatment efficiency of the waste gas is improved by arranging at least two gas washing pipes, and meanwhile, a liquid outlet section is arranged in the flushing sections of the at least two gas washing pipes, so that each gas washing pipe is ensured to be sprayed.
In an alternative embodiment, the exhaust gas treatment device further comprises a liquid storage tank provided with an air inlet, and the air washing pipe is communicated with the air inlet of the liquid storage tank.
In the above embodiments, the tank is configured to receive and store the rinsed liquid, and the tank may be filled with the liquid such that the gas flows from the gas wash pipe into the tank and contacts the liquid in the tank to filter impurities in the exhaust gas.
In an alternative embodiment, the liquid storage tank is further provided with an air outlet, and at least one filter plate is arranged in the liquid storage tank and located between the air inlet and the air outlet, and the filter plate is used for filtering impurities.
In the above embodiment, since dust is dissolved in water and enters the liquid storage tank in the heat preservation section and the flushing section, at least one filter plate is arranged in the liquid storage tank, and gas is discharged from the gas outlet after sequentially passing through the at least one filter plate in the liquid storage tank.
In an alternative embodiment, the exhaust gas treatment device further comprises an air inlet pipe connected to the heat-preserving section for introducing the exhaust gas into the heat-preserving section.
In the above embodiment, the air inlet pipe is used for communicating with the semiconductor device, so that the exhaust gas generated by the semiconductor device is directly conveyed to the gas washing pipe through the air inlet pipe.
In an alternative embodiment, the insulation section comprises a corrosion-resistant and high temperature-resistant material;
and/or the flushing section comprises a material which is corrosion resistant and acid and alkali resistant.
In the above embodiment, since the heat-preserving section needs to be heated, the heat-preserving section is made of a material resistant to corrosion and high temperature, so as to improve the high temperature resistance and corrosion resistance of the heat-preserving section; because the flushing section needs to be sprayed, the flushing section is made of anti-corrosion and acid and alkali-resistant materials, so that the anti-corrosion and acid and alkali-resistant capacities of the flushing section are improved, and the adaptability and the service life of the gas washing pipe are improved.
The exhaust gas treatment device provided by the embodiment of the invention has the beneficial effects that: the heating piece is arranged on the heat preservation section to heat the pipeline, and meanwhile, the heat preservation function is achieved, so that the viscous dust in the waste gas is prevented from hardening due to temperature reduction, and the pipeline is prevented from being blocked; through set up the gas washing subassembly in the section of washing so as to spray the section of washing, both can wash the inner wall of section of washing to granule such as dust, impurity attached to the inner wall are washd, can reach anticorrosive and cooling treatment's purpose again, can also make solid particle and the acidic material in the waste gas fast dissolve in the aquatic, thereby effectively prevented the inside jam problem of pipeline.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a front view of an exhaust treatment device according to an embodiment of the present invention;
FIG. 2 is a top view of an exhaust treatment device according to an embodiment of the present invention;
FIG. 3 is a cross-sectional view A-A of FIG. 2, provided by an embodiment of the present invention;
figure 4 is an isometric view of a scrubbing assembly provided in an embodiment of the present invention.
Icon: 10-an exhaust gas treatment device; 100-gas washing pipe; 110-a heat preservation section; 120-flushing section; 200-heating elements; 300-a scrubber assembly; 310-liquid inlet section; 311-liquid inlet; 320-a liquid outlet section; 321-a liquid outlet hole; 330-a deflector cap; 400-liquid storage tank; 410-air inlet; 420-air outlet; 430-a filter plate; 500-air inlet pipe; 600-pneumatic three-way valve.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
Generally, the production processes in the semiconductor industry include a variety of processes such as diffusion, etching, chemical vapor deposition, metal deposition, and the like. The above process needs to be repeated on the silicon substrate, and the gases generated during this process may have strong characteristics such as toxicity, combustibility, corrosiveness, and the like. In the production process, only about 10% of the process gas participates in the reaction, and the remaining 90% in the unreacted state is discharged from the manufacturing apparatus. The discharged unreacted gas is required to undergo a series of treatments such as combustion, water washing, adsorption, etc.
So that the toxic and harmful gas is generally purified by adopting an electrothermal decomposition method, gas combustion, adsorption type and the like at present.
However, the existing waste gas treatment equipment can cause unsmooth or even blockage of gas circulation in pipelines and equipment due to accumulation of a large amount of dust in waste gas after long-time operation, so that the waste gas treatment efficiency is affected, the maintenance period of the equipment is shortened, and the production cost is increased. Meanwhile, the equipment can corrode a metal pipeline of the equipment due to the acid gas in the waste gas in a long-time and long-circulation state operation, so that gas leakage is caused, and a safety event occurs.
In view of the above, the present invention provides an exhaust gas treatment apparatus, which is applied to the technical field of semiconductors, and is particularly suitable for purifying exhaust gas generated in a semiconductor production process, wherein the exhaust gas refers to various gases having toxicity, combustibility or corrosiveness generated in the production process.
Referring to fig. 1 to 4, the exhaust gas treatment device 10 includes a scrubber tube 100, a heating element 200, and a scrubber assembly 300.
The gas washing pipe 100 comprises a heat preservation section 110 and a flushing section 120 which are sequentially arranged from top to bottom in the vertical direction, one end of the heat preservation section 110 is connected with the flushing section 120, and the other end of the heat preservation section is used for introducing waste gas. The heating element 200 is disposed on the heat preservation section 110 and is used for heating the heat preservation section 110; and the scrubber assembly 300 is disposed at the rinse section 120 for spraying the rinse section 120.
In this embodiment, the exhaust gas flows through the heat preservation section 110 and the flushing section 120 in sequence, so that the heating element 200 is arranged on the outer wall of the heat preservation section 110 to heat the pipeline and perform the heat preservation function at the same time, so as to prevent the sticky dust in the exhaust gas from hardening due to temperature reduction and avoid the pipeline blockage; through setting up the gas washing subassembly 300 in washing section 120 in order to spray washing section 120, both can wash washing section 120's inner wall to the particulate matter such as dust, impurity that adheres to on the inner wall washs, can reach anticorrosive and cooling treatment's purpose again, can also make solid particle and the acidic material in the waste gas fast dissolve in the aquatic, thereby effectively prevented the inside jam problem of pipeline.
It should be noted that, because the heat preservation section 110 and the flushing section 120 are in different environments, the heat preservation section 110 and the flushing section 120 are generally made of different materials. Specifically, the heat-preserving section 110 comprises a material that is corrosion-resistant and high temperature-resistant, and the flushing section 120 comprises a material that is corrosion-resistant and acid-base-resistant.
Alternatively, the insulation section 110 is made of a material that is resistant to corrosion and high temperature, for example, the insulation section 110 may be made of a metal material; the flushing segment 120 is made of a corrosion-resistant and acid-base-resistant material, for example, the flushing segment 120 may be made of a PVC material.
In other embodiments of the present invention, corrosion-resistant, high-temperature-resistant, corrosion-resistant, acid-resistant and alkali-resistant materials may be disposed on the inner walls of the heat insulation section 110 and the flushing section 120, so that the gas-washing pipe 100 meets the requirements of high temperature resistance, corrosion resistance, and acid-base resistance.
Of course, it is understood that the heat preservation section 110 and the flushing section 120 may be made of other materials or other arrangements, which are not particularly limited herein. Therefore, the heat preservation section 110 and the flushing section 120 are made of different materials, so that the adaptability and the service life of the air washing pipe 100 are improved.
In this embodiment, the heating element 200 is wound around the outer wall of the insulation section 110. Further, the heating element 200 is in a strip shape, and the heating element 200 can be heated by adopting an electric heating mode, so that the heating element 200 can have a better heating effect on the heat preservation section 110 by winding the heating element 200 on the outer wall of the heat preservation section 110, and the heating is uniform, so that the inside of the heat preservation section 110 is maintained in a higher temperature environment, and the viscous dust is effectively prevented from blocking the air washing pipe 100.
Further, the air washing assembly 300 is a water washing pipe, one end of the water washing pipe is provided with a liquid inlet 311, and the other end of the water washing pipe is located in the washing section 120 and is provided with at least two liquid outlet holes 321.
In this embodiment, at least two liquid outlet holes 321 are uniformly distributed at the end of the washing pipe, and water can be uniformly sprayed from the at least two liquid outlet holes 321 to the washing pipe 100 through the water injection to the liquid inlet 311, so that the particulate matters and acidic matters in the waste gas are dissolved in the water, and the part of the inner wall of the washing pipe 100 and the particulate matters such as dust and impurities attached to the inner wall are washed, so that the effects of cleaning, cooling and corrosion prevention are effectively achieved.
Further, the end of the washing pipe provided with at least two liquid outlet holes 321 is further provided with a diversion cover 330, and the diversion cover 330 is used for forming a water curtain by water sprayed from the liquid outlet holes 321.
In this embodiment, it is to be noted that, since the pipe section of the gas washing pipe 100 provided with the water washing pipe is vertically disposed, the pipe section of the water washing pipe provided with the liquid outlet 321 is also vertically disposed, and therefore the diversion cover 330 is disposed at the top of the water washing pipe provided with the liquid outlet 321, so as to buffer and divert the water sprayed from the liquid outlet 321, so that the water flow forms a water curtain to make the exhaust gas and the water fully contact and wash the inner wall of the gas washing pipe 100.
Further, the washing pipe comprises a liquid inlet section 310 and at least two liquid outlet sections 320, wherein the at least two liquid outlet sections 320 are connected with the liquid inlet section 310, the liquid inlet 311 is arranged on the liquid inlet section 310, and the at least two liquid outlet sections 320 are provided with at least two liquid outlet holes 321;
the number of the gas washing pipes 100 is at least two, and at least two liquid outlet sections 320 are arranged in the flushing sections 120 of at least two gas washing pipes 100 in a one-to-one correspondence.
In this embodiment, the number of the gas washing pipes 100 is identical to the number of the liquid outlet sections 320. By providing at least two gas wash pipes 100, the treatment efficiency of the exhaust gas is improved, and at the same time, a liquid outlet section 320 is provided in the flushing section 120 of at least two gas wash pipes 100, so as to ensure that each gas wash pipe 100 is sprayed.
Alternatively, the number of outlet sections 320 of the wash pipe 100 and the water wash pipe are three.
It should be noted that, in other embodiments of the present invention, the gas washing assembly 300 may also be an overflow member (not shown), where an overflow gap is formed between an end surface of an end portion of the overflow member and an inner wall surface of the end wall, so that a liquid may enter the overflow member and flow into the washing section 120 through the overflow gap to form a water curtain, and form a water film on an inner wall of the washing section to wash dust while avoiding corrosion.
Further, the exhaust gas treatment device 10 further comprises a liquid storage tank 400, the liquid storage tank 400 is provided with an air inlet 410, and the gas washing pipe 100 is communicated with the air inlet 410 of the liquid storage tank 400.
In this embodiment, since the air washing assembly 300 is vertically disposed, water sprayed from the air washing assembly 300 to the flushing section 120 can flow to the liquid storage tank 400, so as to avoid water accumulation in the flushing section 120.
In this embodiment, the liquid storage tank 400 is used to receive and store the rinsed liquid, and the liquid storage tank 400 may be filled with the liquid, so that the gas flows into the liquid storage tank 400 from the gas washing pipe 100 and contacts with the liquid in the liquid storage tank 400, so as to further dissolve the impurities in the exhaust gas.
The liquid in the liquid storage tank 400 may be the same as or different from the liquid sprayed by the gas washing assembly 300, for example, the liquid may be water, and may be adjusted according to actual situations.
Further, the liquid storage tank 400 is further provided with an air outlet 420, and at least one filter plate 430 is disposed inside the liquid storage tank 400, the filter plate 430 is located between the air inlet 410 and the air outlet 420, and the filter plate 430 is used for filtering impurities.
In this embodiment, since dust is dissolved in water and enters the liquid storage tank 400 in the heat preservation section 110 and the flushing section 120, at least one filter plate 430 is disposed in the liquid storage tank 400 to filter particulate impurities, and the gas is discharged from the gas outlet 420 after passing through the at least one filter plate 430 in sequence in the liquid storage tank 400.
In detail, the filter plates 430 are vertically disposed, and the filter plates 430 are provided with through holes (not shown) through which gas and liquid pass, thereby having a filtering effect on impurity particles.
Alternatively, the number of the filter plates 430 may be two, and two filter plates 430 may be spaced apart to further enhance the filtering effect.
Further, the exhaust gas treatment device 10 further comprises an air inlet pipe 500, and the air inlet pipe 500 is connected with the heat preservation section 110 for introducing exhaust gas into the heat preservation section 110.
In the present embodiment, the air inlet pipe 500 is used to communicate with the semiconductor device, so that exhaust gas generated from the semiconductor device is directly transferred to the gas washing pipe 100 through the air inlet pipe 500.
Further, the exhaust gas treatment device 10 further includes a pneumatic three-way valve 600, and the pneumatic three-way valve 600 is disposed on the intake pipe 500.
In the present embodiment, by providing the pneumatic three-way valve 600 in the intake pipe 500, it is possible to realize that the intake pipe 500 is opened in the case where exhaust gas flows and closed in the case where no exhaust gas flows, thereby playing a role in energy saving.
In summary, the embodiment of the invention provides the exhaust gas treatment device 10, which is provided with the heating element 200 in the heat preservation section 110 to heat the pipeline and also has the function of heat preservation, so as to prevent the sticky dust in the exhaust gas from hardening due to the temperature reduction and avoid the pipeline blockage; through setting up the gas washing subassembly 300 in washing section 120 in order to spray washing section 120, both can wash washing section 120's inner wall to the particulate matter such as dust, impurity that adheres to on the inner wall washs, can reach anticorrosive and cooling treatment's purpose again, can also make solid particle and the acidic material in the waste gas fast dissolve in the aquatic, thereby effectively prevented the inside jam problem of pipeline.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (10)

1. An exhaust gas treatment device, characterized by comprising a gas washing pipe (100), a heating element (200) and a gas washing assembly (300);
the gas washing pipe (100) comprises a heat preservation section (110) and a flushing section (120), one end of the heat preservation section (110) is connected with the flushing section (120), and the other end of the heat preservation section is used for introducing waste gas;
the heating element (200) is arranged on the heat preservation section (110) and is used for heating the heat preservation section (110);
the gas washing assembly (300) is arranged at the flushing section (120) and is used for spraying the flushing section (120).
2. The exhaust gas treatment device according to claim 1, characterized in that the scrubber assembly (300) is an overflow element provided with an overflow gap for spraying against the inner wall of the flushing section (120) and forming a water film.
3. The exhaust gas treatment device according to claim 1, characterized in that the heating element (200) is wound around the outer wall of the insulation section (110).
4. The exhaust gas treatment device according to claim 1 or 2, characterized in that the scrubber assembly (300) is a water scrubber tube, one end of which is provided with a liquid inlet (311) and the other end of which is located in the flushing section (120) and is provided with at least two liquid outlet holes (321).
5. The exhaust gas treatment device according to claim 4, wherein the end of the scrubbing assembly (300) provided with at least two outlet holes (321) is further provided with a deflector cover (330), the deflector cover (330) being adapted to cause water ejected from the outlet holes (321) to form a water curtain.
6. The exhaust gas treatment device according to claim 4, wherein the scrubber assembly (300) comprises a liquid inlet section (310) and at least two liquid outlet sections (320), the at least two liquid outlet sections (320) are connected to the liquid inlet section (310), the liquid inlet (311) is arranged in the liquid inlet section (310), and the at least two liquid outlet sections (320) are provided with the at least two liquid outlet holes (321);
the number of the gas washing pipes (100) is at least two, and the at least two liquid outlet sections (320) are arranged in the flushing sections (120) of the at least two gas washing pipes (100) in a one-to-one correspondence manner.
7. The exhaust gas treatment device according to claim 1, further comprising a reservoir (400), the reservoir (400) being provided with an air inlet (410), the scrubber tube (100) being in communication with the air inlet (410) of the reservoir (400).
8. The exhaust gas treatment device according to claim 7, characterized in that the reservoir (400) is further provided with an air outlet (420), and that the interior of the reservoir (400) is provided with at least one filter plate (430), the filter plate (430) being located between the air inlet (410) and the air outlet (420), the filter plate (430) being for filtering impurities.
9. The exhaust gas treatment device according to claim 1, characterized in that the exhaust gas treatment device further comprises an inlet pipe (500), which inlet pipe (500) is connected to the insulation section (110) for letting in the exhaust gas to the insulation section (110).
10. The exhaust gas treatment device according to claim 1, wherein the insulation section (110) comprises a corrosion-resistant and high temperature-resistant material;
and/or the flushing section (120) comprises a material that is corrosion resistant and acid and alkali resistant.
CN202311096212.XA 2023-08-28 2023-08-28 Waste gas treatment device Pending CN117123010A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311096212.XA CN117123010A (en) 2023-08-28 2023-08-28 Waste gas treatment device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311096212.XA CN117123010A (en) 2023-08-28 2023-08-28 Waste gas treatment device

Publications (1)

Publication Number Publication Date
CN117123010A true CN117123010A (en) 2023-11-28

Family

ID=88859469

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311096212.XA Pending CN117123010A (en) 2023-08-28 2023-08-28 Waste gas treatment device

Country Status (1)

Country Link
CN (1) CN117123010A (en)

Similar Documents

Publication Publication Date Title
EP2818225B1 (en) Exhaust gas abatement system
US7651329B2 (en) Exhaust gas processing device, and method of using the same
CN117123010A (en) Waste gas treatment device
KR0160391B1 (en) Apparatus for process gas treatment
CN112121602A (en) Washing formula exhaust-gas treatment equipment
JP4174396B2 (en) Exhaust gas introduction structure and exhaust gas treatment apparatus using the structure
CN114923193B (en) Harmful gas combustion reactor
CN106512613A (en) Water spraying system and waste gas treatment system
KR102176596B1 (en) Continuous operation type dual collecting system capable of self cleaning for by-product of semiconductor manufacturing process
CN207025061U (en) A kind of single column desulfurization cooperates with dedusting minimum discharge device
KR102335845B1 (en) Heat exchanger and heat exchange method for cooling hot gas
WO2022092086A1 (en) Exhaust gas treatment facility
CN112892157A (en) Tail gas treatment equipment and tail gas treatment system
CN110665345A (en) Waste gas spray tower
CN220176475U (en) Waste gas treatment device
KR100992752B1 (en) Scrubber of semiconductor manufacturing apparatus
KR100497477B1 (en) A Fume Collector
KR102588533B1 (en) Apparatus for treating waste gas of electronics industry
CN216367331U (en) A dehydrating unit for semiconductor exhaust-gas treatment
CN216259941U (en) Large-scale washing formula exhaust-gas treatment equipment
CN220737007U (en) Spray type acid mist absorption tower
CN215063885U (en) A prevent blockking up heat transfer device for SCR denitration catalyst performance detects
US6488269B1 (en) Wet scrubber
CN213965960U (en) Exhaust gas treatment device
CN213853810U (en) Washing formula exhaust-gas treatment equipment

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination