CN117109636A - Demodulation phase angle error calibration system and method for MEMS rate gyroscope detection passage - Google Patents
Demodulation phase angle error calibration system and method for MEMS rate gyroscope detection passage Download PDFInfo
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Abstract
The application discloses a demodulation phase angle error calibration system and a demodulation phase angle error calibration method for a detection passage of a MEMS rate gyroscope, wherein the system comprises the following components: the device comprises a gyroscope closed-loop driving module, a detection mode driving and detecting module and a demodulation phase angle error calibrating module; the gyroscope closed-loop driving module tracks the driving mode resonant frequency omega of the MEMS gyroscope x And produce omega x Sine wave signal sin omega of (a) x t and cos (omega) x t), and cos (ω) x t) outputting to a demodulation phase angle error calibration module and a detection mode driving and detecting module; the detection modality drive and detection module is based on cos (ω) x t) generating a detection mode vibration signal and inputting the detection mode vibration signal to a demodulation phase angle error calibration module; demodulation phase angle error calibration is based on cos (omega) x t) generating a demodulation phase angle error amount phi e And output to a drive closed loop module to generate a phase angle compensated demodulation reference signal sin (omega) x t+φ e ) And cos (omega) x t+φ e ) The method comprises the steps of carrying out a first treatment on the surface of the The application obtains and examines the electrode based on the detection mode excitation of the gyroscopeThe demodulation phase angle error of the measuring channel can effectively reduce the interference of the orthogonal signal on the angular velocity signal and improve the noise performance of the angular velocity signal of the gyroscope.
Description
Technical Field
The application relates to the technical field of MEMS rate gyroscopes, in particular to a demodulation phase angle error calibration system and method for a detection path of an MEMS rate gyroscope.
Background
The MEMS gyroscope is used as a sensor for utilizing the rotation angle motion quantity of the God effect sensitive carrier, is one of important application of the MEMS technology in the field of inertial navigation, has the advantages of small volume, light weight, low cost, mass production, easy integration and the like, and is widely applied to the fields of military use and civil use. The MEMS rate gyroscope is provided with a driving mode and a detection mode, wherein the driving mode tracks the resonant frequency of the driving mode in real time and maintains constant amplitude in the driving direction; the detection mode detects the mode vibration caused by the input angular velocity of the sensitive shaft in real time, and then a multiplication demodulation mode is utilized to obtain a signal containing angular velocity information.
The quality factor of the detection mode of the MEMS rate gyroscope and the front-end detection circuit introduce unavoidable phase lag, so that demodulation phase angle errors of an angular velocity detection path are caused, and the accuracy of detecting the angular velocity of the gyroscope is further limited. But the performance can be significantly improved by effective demodulation phase angle error compensation. The current calibration method for demodulation phase angle errors of the detection path of the MEMS rate gyroscope is mostly realized by relying on external excitation signals, and only the phase angle errors introduced by a front-end detection circuit are considered, so that the calibration of demodulation phase angle errors is realized. The method is complex to implement, and phase angle errors introduced by the quality factors of the MEMS rate gyroscopes are not considered.
Disclosure of Invention
The application aims to: the application provides a system and a method for demodulating phase angle error calibration of a detection path of an MEMS rate gyroscope, which are used for acquiring the compensation quantity of demodulating phase angle error calibration by inputting cosine signals of detection mode excitation electrodes of the gyroscope, and the accuracy of detecting angular velocity of the gyroscope is improved without accessing external excitation signals.
The technical scheme is as follows: the application relates to a demodulation phase angle error calibration system for a detection path of an MEMS rate gyroscope, which comprises the following components: the device comprises a gyroscope closed-loop driving module (100), a detection mode driving and detecting module (200) and a demodulation phase angle error calibration module (300);
the gyroscope closed-loop driving module (100) is used for tracking the driving mode resonant frequency omega of the silicon micro gyroscope x And produce omega x Is of the sine signal sin (omega x t) and cosine signal cos (ω) x t) to sin (ω) x t) as feedback to realize the closed-loop driving of the gyroscope, cos (omega) x t) outputting to a detection mode driving and detecting module (200) and a demodulation angle error calibration module (300);
the gyroscope drive closed loop circuit (100) includes: a driving mode excitation electrode (101), a driving mode vibration structure (102), a driving mode sensing electrode (103), a driving mode C/V conversion circuit (104), a driving mode A/D conversion circuit (105), a phase demodulation module (106), a phase PI controller (107), an amplitude demodulation module (108), an automatic gain controller (109), a direct digital frequency synthesizer (110), a first multiplier (111), a driving mode D/A conversion circuit (112) and a driving mode amplifying circuit (113);
the driving mode excitation electrode (101) is used for responding to the driving mode excitation signal and utilizing the driving mode excitation signal to enable the driving mode vibration structure (102) to vibrate; a driving mode vibration structure (102) vibrates to generate a driving mode vibration signal; after the driving mode sensing electrode (103) detects a driving mode vibration signal, the driving mode vibration signal is sequentially processed by the driving mode C/V conversion circuit (104) and the driving mode A/D conversion circuit (105) and then is respectively input into the phase demodulation module (106) and the amplitude demodulation module (108); the phase demodulation module (106) outputs a phase related signal to the phase PI controller (107) after demodulation, and the amplitude demodulation module (108) outputs an amplitude related signal to the automatic gain controller (109) after demodulation; the phase PI controller outputs a phase control amount to a direct digital frequency synthesizer (110) based on the phase-related signal; an automatic gain controller (109) generates a magnitude of the drive signal based on the magnitude-related signalA degree; direct digital frequency synthesizer (110) outputs a gyroscope drive mode resonant frequency omega x Correlated sine signal sin (omega x t) and cosine signal cos (ω) x t), and cos (ω) x t) input to a detection mode driving and detecting module (200) and a demodulation angle error calibration module (300); the first multiplier (111) combines the amplitude of the drive mode excitation signal with the sine signal sin (omega) x t) multiplying to obtain a driving mode excitation signal; the driving mode excitation signals are sequentially processed by a driving mode D/A conversion circuit (112) and a driving mode amplifying circuit (113) and then are input to a driving mode excitation electrode (101), so that the vibration amplitude of a driving mode vibration structure is kept constant, and the driving mode resonant frequency omega is tracked in real time x Realizing the closed-loop driving of the gyroscope;
the detection modality drive and detection module (200) is based on the cosine signal cos (ω x t) and gyroscope quadrature stiffness error and damping coupling error to generate detection mode vibration signals, and outputting the detection mode vibration signals to the demodulation phase angle error calibration module (300);
the demodulation phase angle error calibration module (300) is based on the cosine signal cos (omega) x t) and the detection mode vibration signal to generate demodulation phase angle error calibration quantityAnd output to the gyroscope closed loop drive module (100); the gyroscope closed-loop driving module (100) is omega-based x And->Generating a demodulation phase angle compensated demodulation signal +.>Andthe method is used for demodulating the angular velocity signal and the quadrature signal when the subsequent gyroscope works normally;
further, the detection modality drive and detection module (200) comprises: a detection mode D/A conversion circuit (201), a detection mode amplifying circuit (202), a detection mode exciting electrode (203), a detection mode vibration structure (204), a detection mode sensing electrode (205), a detection mode C/V conversion circuit (206) and a detection mode A/D conversion circuit (207);
cosine signal cos (omega) x t) is used as an equivalent orthogonal excitation signal, is sequentially processed by a detection mode D/A conversion circuit (201) and a detection mode amplifying circuit (202) and then is input to a detection mode excitation electrode (203), and combines a gyroscope orthogonal stiffness error and a damping coupling error to enable a detection mode vibration structure (204) to generate vibration and then displacement; the detection mode sensing electrode (205) detects the displacement of the detection mode vibration structure (204), and the detection result is processed by the detection mode C/V conversion circuit (206) and the detection mode A/D conversion circuit (207) in sequence to generate a detection mode output signal, and the detection mode output signal is input to the demodulation phase angle error calibration module (300).
Further, the detection mode output signal is:
wherein,
wherein Q is q Is equivalent to the orthogonal excitation signal passing through the detectionThe mode D/A conversion circuit (201) and the detection mode amplifying circuit (202) detect the amplitude of the output signal, C c To damp the amplitude of the coupled signal, m c Effective Goldwire mass, ω of gyroscope y ＝(k y /m c ) 1/2 To detect the resonant frequency of the mode, Q y ＝m c ω y /c y To detect the modal figure of merit, k y Detecting modal stiffness coefficient for gyroscope, c y The modal damping coefficient is detected for the gyroscope,phase angle delay errors generated for the detection modality C/V conversion circuit (206) and the detection modality a/D conversion circuit (207).
Further, the equivalent quadrature excitation signal and the gyroscope quadrature stiffness error together generate a quadrature error output signal y q Damping coupling error output signal y generated by damping coupling error of gyroscope c The quadrature error output signal y q Amplitude A of (2) q Far greater than the damped coupling error output signal y c Amplitude A of (2) c ThenCan be regarded as 90 °, the detection mode output signal is:
further, the demodulation phase angle error calibration module (300) includes: a first zero-crossing comparator (301), a second zero-crossing comparator (302) and a square wave phase detector (303);
the first zero-crossing comparator (301) performs zero-crossing comparison on the detection mode output signal to obtain a pulse signal of the detection mode output signal; the second zero-crossing comparator (302) compares the cosine signal cos (omega) x t) performing zero-crossing comparison to obtain a pulse signal of the cosine signal; the square wave phase discriminator (303) compares the pulse signal of the detection mode output signal with the pulse signal of the cosine signal to obtain the demodulation phase angle of the detection pathError amountAnd output to the gyroscope closed loop drive module (100).
Further, the first zero-crossing comparator (301) shapes the detection mode output signal into a square wave pulse signal (1), and the second zero-crossing comparator (302) shapes the cosine signal cos (ω x t) shaping into a square wave pulse signal (2); the square wave phase discriminator (303) utilizes the square wave pulse signal (1) and the square wave pulse signal (2) to calculate and obtain the demodulation phase angle error quantity
Further, the channel demodulation phase angle error amount is detectedIs input to a direct digital frequency synthesizer (110) to generate a demodulation reference signal after demodulation phase angle error compensation>And->
The application relates to a calibration method for a MEMS rate gyroscope detection path demodulation phase angle error calibration system, which comprises the following steps:
(1) Tracking the drive mode resonant frequency ω of a MEMS rate gyroscope x Generating omega x Is of the sine signal sin (omega x t) and cosine signal cos (ω) x t) to sin (ω) x t) realizing closed-loop driving of the gyroscope as feedback;
(2) Based on the cosine signal cos (omega x t), the quadrature stiffness error and the damping coupling error generate detection mode vibration signals;
(3) Based on the cosine signal cos (omega x t) and the detected modal vibration signal to generate a demodulation phase angle calibration compensation quantityOmega-based x And->Generating a demodulation phase angle compensated demodulation signal +.>And demodulation signal->
The application relates to a computer device, which comprises a memory, a processor and a computer program stored on the memory and capable of running on the processor, wherein the processor realizes the steps in a method for a MEMS rate gyroscope detection path demodulation phase angle error calibration system when executing the computer program.
The application relates to a computer readable storage medium, which stores a computer program, characterized in that the computer program when being executed by a processor realizes the steps in a method for a MEMS rate gyroscope detection path demodulation phase angle error calibration system.
The beneficial effects are that: compared with the prior art, the application has the following advantages: the method can effectively extract the phase lag error introduced by the MEMS gyroscope detection modal quality factor and the front-end detection circuit, and generate a demodulation reference signal after demodulation phase angle compensation, so that the interference of the orthogonal signal on the angular velocity signal can be effectively reduced, and the noise performance of the gyroscope angular velocity signal is improved.
Drawings
FIG. 1 is a system block diagram of the present application;
FIG. 2 is a diagram of the present application q And A is a c Ratio of (2) to (3)Is a function of the influence curve of (2);
fig. 3 is a schematic diagram of a square wave phase detector of the present application.
Detailed Description
The technical scheme of the application is further described below with reference to the accompanying drawings.
Referring to fig. 1, an embodiment of the present application provides a demodulation phase angle error calibration system for a MEMS rate gyroscope detection path, comprising: the device comprises a gyroscope closed-loop driving module 100, a detection mode driving and detecting module 200 and a demodulation phase angle error calibrating module 300.
The gyroscope drive closed loop circuit 100 includes a drive mode excitation electrode 101, a drive mode vibration structure 102, a drive mode sense electrode 103, a drive mode C/V conversion circuit 104, a drive mode a/D conversion circuit 105, a phase demodulation module 106, a phase PI controller 107, an amplitude demodulation module 108, an automatic gain controller 109, a direct digital frequency synthesizer 110, a first multiplier 111, a drive mode D/a conversion circuit 112, and a drive mode amplification circuit 113. The driving mode excitation electrode 101 is configured to respond to a driving mode excitation signal, so that the driving mode vibration structure 102 generates vibration; the driving mode sensing electrode 103 detects the vibration of the driving mode vibration structure 102 to generate driving mode vibration signals, and the driving mode vibration signals are respectively input to the phase demodulation module 106 and the amplitude demodulation module 108 after being processed by the driving mode C/V conversion circuit 104 and the driving mode A/D conversion circuit 105 in sequence; the phase demodulation module 107 demodulates and outputs a phase related signal to the phase PI controller 107, and the amplitude demodulation module 108 demodulates and outputs an amplitude related signal to the automatic gain controller 109; the phase PI controller outputs a phase control amount to the direct digital frequency synthesizer 110 based on the phase-related signal; the automatic gain controller 109 generates the amplitude of the driving signal based on the amplitude-related signal; the direct digital frequency synthesizer 110 outputs a gyroscope drive mode resonant frequency ω x Correlated sine signal sin (omega x t) and cosine signal cos (ω) x t), and cos (ω) x t) input to the detection modality drive and detection module 200 and the demodulation angle error calibration module 300; the first multiplier 111 multiplies the amplitude of the driving mode excitation signal by the sine signal sin (ω x t) multiplying to obtain a driving mode excitation signal; the driving mode excitation signalThe vibration amplitude of the driving mode vibration structure is kept constant and the driving mode resonant frequency omega is tracked in real time by processing the vibration amplitude of the driving mode vibration structure sequentially through the driving mode D/A conversion circuit 112 and the driving mode amplifying circuit 113 and inputting the vibration amplitude to the driving mode excitation electrode 101 x And realizing the closed-loop driving of the gyroscope.
The dynamic equation of the MEMS rate gyroscope drive mode is:
wherein x is the displacement of the driving mode vibration structure 102, which can be detected by the driving mode sensing electrode 101; m is m c Effective coriolis mass for gyroscope; t is a time variable; c x Is the damping coefficient, k of the driving mode of the gyroscope x For driving modal stiffness coefficient of gyroscope, A F The driving force amplitude of the gyroscope; m is m c Related to structural parameters of gyroscope, A F Generated by an automatic gain controller 109.
The steady state solution of formula (1) is:
wherein A is x The vibration amplitude of the gyroscope driving mode vibration structure.
The gyroscope detection mode driving and detecting module 200 includes a detection mode D/a conversion circuit 201, a detection mode amplifying circuit 202, a detection mode exciting electrode 203, a detection mode vibrating structure 204, a detection mode sensing electrode 205, a detection mode C/V conversion circuit 206, and a detection mode a/D conversion circuit 207. Cosine signal cos (omega) x t) is used as an equivalent orthogonal excitation signal, is sequentially processed by a detection mode D/A conversion circuit 201 and a detection mode amplifying circuit 202 and then is input to a detection mode excitation electrode 203, and combines the gyroscope orthogonal stiffness error and damping coupling error to enable a detection mode vibration structure 204 to vibrate, and a detection mode induction electrode 205 detects displacement of the detection mode vibration structure 204 and detects the displacement of the detection mode vibration structure 204The measurement results are processed by the detection mode C/V conversion circuit 206 and the detection mode a/D conversion circuit 207 in sequence to generate detection mode output signals, and the detection mode output signals are input to the demodulation phase angle error calibration module.
When the MEMS gyroscope has no angular velocity input, the kinetic equation of the detection mode corresponding to the detection mode driving and detecting module 200 is:
where y is the vibration displacement of the detection mode vibration structure 204, k y Detecting modal stiffness coefficient for gyroscope, c y For detecting modal damping coefficient, k for gyroscope xy Is the coupling error coefficient of the orthogonal rigidity of the gyroscope, C c Is the damping coupling error coefficient k of the gyroscope q Is the amplitude of the equivalent orthogonal excitation signal acting on the detection mode vibration structure. Solving the steady state solution of equation (3) can obtain the vibration displacement of the detection mode vibration structure 204 as:
wherein,
ω y ＝(k y /m c ) 1/2 detecting mode resonance frequency for gyroscope, Q y ＝m c ω y /c y The modal figure of merit is detected for the gyroscope. y is qk For vibration displacement caused by coupling error of orthogonal rigidity, y c To damp the vibration displacement caused by coupling errors, y qf For the vibration displacement caused by the equivalent orthogonal excitation signal,the phase angle hysteresis introduced for the detection modality.
The vibration displacement of the detection mode vibration structure 204 is detected by the detection mode C/V conversion circuit 206 and the detection mode a/D conversion circuit 207, and the signals are as follows:
wherein,
A q amplitude of cosine signal generated for equivalent quadrature excitation signal and quadrature stiffness coupling error, A c The amplitude of the sinusoidal signal generated for damping the coupling error,the phase angle hysteresis introduced for the detection modality C/V conversion circuit 206 and the detection modality a/D conversion circuit 207.
FIG. 2 is a diagram of the application q And A is a c Ratio of (2) to (3)Is a function of the influence curve of (a). When A is q /A c >At 100 +>Can be considered 90 °. In the case of a gyro without an angular velocity input,A q can be obtained by setting the amplitude k of the equivalent orthogonal excitation signal q Thereby realizing A q /A c >100。
The demodulation phase angle error scale module 300 comprises a first zero-crossing comparator 301, a second zero-crossing comparator 302, a square wave phase detector 303. The first zero-crossing comparator 301 shapes the detection mode output signal into a pulse signal (1) of unit amplitude, and the second zero-crossing comparator 302 shapes the cosine signal cos (ω x t) shaping the pulse signal (2) into a unit amplitude.
Fig. 3 is a schematic diagram of a square wave phase detector. And performing exclusive-or operation on the two square wave pulse signals to obtain square wave pulse signals with duty ratios corresponding to the phase difference of the two pulse signals corresponding to the frequency, and performing interpolation operation on the high-frequency signals on the square wave pulse signals after the exclusive-or operation to obtain phase difference information between the first pulse signals and the second pulse signals.
The square wave phase discriminator 303 outputs the demodulation phase angle error amountThen will->Is input to the direct digital frequency synthesizer 110 to obtain a demodulated signal after demodulation phase angle error calibration +.>And->
The embodiment of the application also provides a calibration method for the MEMS rate gyroscope detection path demodulation phase angle error calibration system, which comprises the following steps:
(1) Tracking the drive mode resonant frequency ω of a MEMS rate gyroscope x Generating omega x Is of the sine signal sin (omega x t) and cosine signal cos (ω) x t) to sin (ω) x t) realizing closed-loop driving of the gyroscope as feedback;
(2) Based on the cosine signal cos (omega x t), the quadrature stiffness error and the damping coupling error generate detection mode vibration signals;
(3) Based on the cosine signal cos (omega x t) and the detected modal vibration signal to generate a demodulation phase angle calibration compensation quantityOmega-based x And->Generating a demodulation phase angle compensated demodulation signal +.>And demodulation signal->
The embodiment of the application also provides computer equipment, which comprises a memory, a processor and a computer program stored on the memory and capable of running on the processor, and is characterized in that the steps in the method for the MEMS rate gyroscope detection path demodulation phase angle error calibration system are realized when the processor executes the computer program.
Embodiments of the present application also provide a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of a method for a MEMS rate gyroscope detection path demodulation phase angle error calibration system.
Claims (10)
1. A demodulation phase angle error calibration system for a MEMS rate gyroscope detection path, comprising: the device comprises a gyroscope closed-loop driving module (100), a detection mode driving and detecting module (200) and a demodulation phase angle error calibration module (300);
the gyroscope closed-loop driving module (100) is used for tracking the driving mode resonant frequency omega of the silicon micro gyroscope x And produce omega x Is of the sine signal sin (omega x t) and cosine signal cos (ω) x t) to sin (ω) x t) as feedback to realize the closed-loop driving of the gyroscope, cos (omega) x t) outputting to a detection mode driving and detecting module (200) and a demodulation angle error calibration module (300);
the gyroscope drive closed loop circuit (100) includes: a driving mode excitation electrode (101), a driving mode vibration structure (102), a driving mode sensing electrode (103), a driving mode C/V conversion circuit (104), a driving mode A/D conversion circuit (105), a phase demodulation module (106), a phase PI controller (107), an amplitude demodulation module (108), an automatic gain controller (109), a direct digital frequency synthesizer (110), a first multiplier (111), a driving mode D/A conversion circuit (112) and a driving mode amplifying circuit (113);
the driving mode excitation electrode (101) is used for responding to the driving mode excitation signal and utilizing the driving mode excitation signal to enable the driving mode vibration structure (102) to vibrate; a driving mode vibration structure (102) vibrates to generate a driving mode vibration signal; after the driving mode sensing electrode (103) detects a driving mode vibration signal, the driving mode vibration signal is sequentially processed by the driving mode C/V conversion circuit (104) and the driving mode A/D conversion circuit (105) and then is respectively input into the phase demodulation module (106) and the amplitude demodulation module (108); the phase demodulation module (106) outputs a phase related signal to the phase PI controller (107) after demodulation, and the amplitude demodulation module (108) outputs an amplitude related signal to the automatic gain controller (109) after demodulation; the phase PI controller outputs a phase control amount to a direct digital frequency synthesizer (110) based on the phase-related signal; an automatic gain controller (109) generating an amplitude of the drive signal based on the amplitude related signal; direct digital frequency synthesizer (110) outputs a gyroscope drive mode resonant frequency omega x Correlated sine signal sin (omega x t) and cosine signal cos (ω) x t), and cos (ω) x t) input to a detection mode driving and detecting module (200) and a demodulation angle error calibration module (300); the first multiplier (111) combines the amplitude of the drive mode excitation signal with the sine signal sin (omega) x t) multiplying to obtain a driving mode excitation signal; the driving mode excitation signal is amplified by a driving mode D/A conversion circuit (112) and a driving mode in turnThe circuit (113) is processed and then is input into the driving mode exciting electrode (101), so that the vibration amplitude of the driving mode vibration structure is kept constant, and the driving mode resonant frequency omega is tracked in real time x Realizing the closed-loop driving of the gyroscope;
the detection modality drive and detection module (200) is based on the cosine signal cos (ω x t) and gyroscope quadrature stiffness error and damping coupling error to generate detection mode vibration signals, and outputting the detection mode vibration signals to the demodulation phase angle error calibration module (300);
the demodulation phase angle error calibration module (300) is based on the cosine signal cos (omega) x t) and the detection mode vibration signal to generate demodulation phase angle error calibration quantityAnd output to the gyroscope closed loop drive module (100); the gyroscope closed-loop driving module (100) is omega-based x And->Generating a demodulation phase angle compensated demodulation signal +.>And->The method is used for demodulating the angular velocity signal and demodulating the quadrature signal when the subsequent gyroscope works normally.
2. A detection path demodulation phase angle error calibration system for a MEMS rate gyroscope according to claim 1, characterized in that the detection modality drive and detection module (200) comprises: a detection mode D/A conversion circuit (201), a detection mode amplifying circuit (202), a detection mode exciting electrode (203), a detection mode vibration structure (204), a detection mode sensing electrode (205), a detection mode C/V conversion circuit (206) and a detection mode A/D conversion circuit (207);
cosine signal cos (omega) x t) as equivalent orthogonal excitation signal, sequentially passing throughThe detection mode D/A conversion circuit (201) and the detection mode amplifying circuit (202) are used for processing and inputting the processed detection mode D/A conversion circuit and the processed detection mode amplifying circuit to the detection mode exciting electrode (203), and the detection mode vibrating structure (204) is enabled to generate vibration and displacement by combining the gyroscope orthogonal stiffness error and the damping coupling error; the detection mode sensing electrode (205) detects the displacement of the detection mode vibration structure (204), and the detection result is processed by the detection mode C/V conversion circuit (206) and the detection mode A/D conversion circuit (207) in sequence to generate a detection mode output signal, and the detection mode output signal is input to the demodulation phase angle error calibration module (300).
3. The system for MEMS rate gyroscope detection path demodulation phase angle error calibration of claim 2, wherein the detection mode output signal is:
wherein,
wherein Q is q Is the amplitude of the output signal after the equivalent orthogonal excitation signal passes through the detection mode D/A conversion circuit (201) and the detection mode amplifying circuit (202), C c To damp the amplitude of the coupled signal, m c Effective Goldwire mass, ω of gyroscope y ＝(k y /m c ) 1/2 To detect the resonant frequency of the mode, Q y ＝m c ω y /c y To detect the modal figure of merit, k y Detecting modal stiffness coefficient for gyroscope, c y The modal damping coefficient is detected for the gyroscope,phase angle delay errors generated for the detection modality C/V conversion circuit (206) and the detection modality a/D conversion circuit (207).
4. A demodulation phase angle error calibration system for a MEMS rate gyroscope detection path as claimed in claim 3 wherein the equivalent quadrature excitation signal and the gyroscope quadrature stiffness error together produce a quadrature error output signal y q Damping coupling error output signal y generated by damping coupling error of gyroscope c The quadrature error output signal y q Amplitude A of (2) q Far greater than the damped coupling error output signal y c Amplitude A of (2) c ThenCan be regarded as 90 °, the detection mode output signal is:
5. a demodulation phase angle error calibration system for a MEMS rate gyroscope detection path as claimed in claim 1, characterized in that the demodulation phase angle error calibration module (300) comprises: a first zero-crossing comparator (301), a second zero-crossing comparator (302) and a square wave phase detector (303);
the first zero-crossing comparator (301) performs zero-crossing comparison on the detection mode output signal to obtain a pulse signal of the detection mode output signal; the second zero-crossing comparator (302) compares the cosine signal cos (omega) x t) performing zero-crossing comparison to obtain a pulse signal of the cosine signal; square wave phase discriminationThe detector (303) compares the pulse signal of the detection mode output signal with the pulse signal of the cosine signal to obtain the demodulation phase angle error of the detection pathAnd output to the gyroscope closed loop drive module (100).
6. The demodulation phase angle error calibration system for a MEMS rate gyroscope detection path of claim 5, wherein the first zero-crossing comparator (301) shapes the detection mode output signal into a square wave pulse signal (1), and the second zero-crossing comparator (302) shapes the cosine signal cos (ω x t) shaping into a square wave pulse signal (2); the square wave phase discriminator (303) utilizes the square wave pulse signal (1) and the square wave pulse signal (2) to calculate and obtain the demodulation phase angle error quantity
7. The system for MEMS rate gyroscope detection path demodulation phase angle error calibration of claim 1, wherein the detection path demodulation phase angle error amountIs input to a direct digital frequency synthesizer (110) to generate a demodulation reference signal after demodulation phase angle error compensation>And->
8. A calibration method for a MEMS rate gyroscope detection path demodulation phase angle error calibration system as claimed in claim 1, comprising the steps of:
(1) Tracking drive mode resonant frequency of MEMS rate gyroscopeω x Generating omega x Is of the sine signal sin (omega x t) and cosine signal cos (ω) x t) to sin (ω) x t) realizing closed-loop driving of the gyroscope as feedback;
(2) Based on the cosine signal cos (omega x t), the quadrature stiffness error and the damping coupling error generate detection mode vibration signals;
(3) Based on the cosine signal cos (omega x t) and the detected modal vibration signal to generate a demodulation phase angle calibration compensation quantityOmega-based x And->Generating a demodulation phase angle compensated demodulation signal +.>And demodulation signal->
9. A computer device comprising a memory, a processor and a computer program stored on the memory and executable on the processor, characterized in that the processor implements the steps of the method of claims 1-7 when the computer program is executed by the processor.
10. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, implements the steps of the method of claims 1-7.
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