CN117103697A - Production method of airtight optical device - Google Patents
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- CN117103697A CN117103697A CN202311362920.3A CN202311362920A CN117103697A CN 117103697 A CN117103697 A CN 117103697A CN 202311362920 A CN202311362920 A CN 202311362920A CN 117103697 A CN117103697 A CN 117103697A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 103
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 61
- 238000001514 detection method Methods 0.000 claims abstract description 59
- 239000001307 helium Substances 0.000 claims abstract description 59
- 229910052734 helium Inorganic materials 0.000 claims abstract description 59
- 238000000034 method Methods 0.000 claims abstract description 35
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 230000003068 static effect Effects 0.000 claims description 3
- 230000001186 cumulative effect Effects 0.000 claims 1
- 238000007664 blowing Methods 0.000 abstract description 8
- 238000007789 sealing Methods 0.000 abstract description 6
- 238000012545 processing Methods 0.000 abstract description 2
- 238000012360 testing method Methods 0.000 description 15
- 239000007789 gas Substances 0.000 description 7
- 239000011148 porous material Substances 0.000 description 5
- 238000004806 packaging method and process Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000007873 sieving Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- SWQJXJOGLNCZEY-BJUDXGSMSA-N helium-3 atom Chemical compound [3He] SWQJXJOGLNCZEY-BJUDXGSMSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/02—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure
- B29C65/10—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor by heating, with or without pressure using hot gases (e.g. combustion gases) or flames coming in contact with at least one of the parts to be joined
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/34—Sorting according to other particular properties
- B07C5/3404—Sorting according to other particular properties according to properties of containers or receptacles, e.g. rigidity, leaks, fill-level
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B07—SEPARATING SOLIDS FROM SOLIDS; SORTING
- B07C—POSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
- B07C5/00—Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
- B07C5/36—Sorting apparatus characterised by the means used for distribution
- B07C5/38—Collecting or arranging articles in groups
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/82—Testing the joint
- B29C65/8269—Testing the joint by the use of electric or magnetic means
- B29C65/8276—Testing the joint by the use of electric or magnetic means by the use of electric means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C66/00—General aspects of processes or apparatus for joining preformed parts
- B29C66/001—Joining in special atmospheres
- B29C66/0012—Joining in special atmospheres characterised by the type of environment
- B29C66/0014—Gaseous environments
- B29C66/00145—Vacuum, e.g. partial vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Abstract
The invention relates to a production method of an airtight optical device, which comprises a capping step and a leak detection step, wherein the capping step comprises the following steps: baking the optical device to be capped in vacuum and helium environment, and then capping in helium environment; the leak detection step is as follows: and standing the capped optical device in the air for a set period of time, and then detecting the leak rate by using a helium mass spectrometer detector. According to the method, in the sealing step, the optical device is baked in vacuum and helium environment and is sealed in helium environment, so that helium does not need to be filled in the leakage detection step and an ion blower is used for blowing, the processing procedure of the leakage detection step is simplified, and the leakage detection efficiency and the detection accuracy are improved.
Description
Technical Field
The invention relates to the technical field of optical communication, in particular to a production method of an airtight optical device.
Background
The optical device refers to an optoelectronic device with various functions, which is made by using photoelectric conversion effect and is applied in the field of optical communication, and is a main component of an optical module. Optical devices come in a variety of packages including TO-coax packages, BOX packages, butterfly packages, and the like. The optical device is assembled from a variety of precision components including optical chips, electrical chips, temperature control devices TEC, optical devices block, filter, lens, and the like. Many components have strict requirements on the use environment, so in order to ensure the long-term reliability of the optical device, the optical device generally adopts an airtight packaging mode. In order to ensure the air tightness of the optical device, 100% of the total detection products of the optical device before delivery meet the requirements. CN113029460a discloses a method for detecting leakage of an optical device, which is also a method commonly adopted in the art, namely, the optical device to be detected is filled with helium for 2 hours, then an ion blower is used for blowing for 20 minutes, finally, the optical device is put into a helium mass spectrometer leak detector to detect leakage rate, if the leakage rate is lower than a set value, the optical device is qualified, otherwise, the optical device is unqualified. Although the ion blower is used for blowing for 20 minutes before detection, helium residues still exist on the surface of the optical device, particularly products with a complex structure, such as optical devices packaged by tail fibers, or optical devices welded with flexible circuit boards, even if the blowing time of the ion blower is prolonged, more helium residues still exist, so that the detection result of the leak rate is influenced, especially when the optical devices are detected in batches, the leak rate of the single optical device meets the requirement, but the residual helium at the gap outside the optical device can influence the whole leak rate of the batch optical devices, so that the detection result is inaccurate. Therefore, in order to improve the accuracy of the detection result, when the helium mass spectrometer leak detector is used for testing leak rate, only one product can be tested at a time, so that the detection efficiency is low, helium filling and blower blowing are required before detection, and the efficiency is further low.
Disclosure of Invention
The invention aims to provide a production method of an airtight optical device, which is used for improving the leak detection efficiency of the optical device and further improving the overall production efficiency of the optical device.
In order to achieve the above object, the present invention provides the following technical solutions:
a production method of airtight optical device comprises a capping step and a leak detection step,
the capping step is as follows: baking the optical device to be capped in vacuum and helium environment, and then capping in helium environment;
the leak detection step is as follows: and standing the capped optical device in the air for a set period of time, and then detecting the leak rate by using a helium mass spectrometer detector.
According to the scheme, in the sealing step, the optical device is baked in vacuum and helium environment, and the sealing is carried out in helium environment, so that helium does not need to be filled in the leakage detection step and a blower is used for blowing, namely, compared with the existing production flow, the time of helium pressing for 2 hours and air blowing by an ion blower for 20 minutes is reduced, and the leakage detection efficiency is improved. In addition, in the leakage detection step of the scheme, only the ion fan and helium filling equipment can be prevented from being used by standing in the air for a certain time, namely, the equipment usage amount is reduced, the cost of the fan is saved, and the quantity cost of the helium filling equipment is also reduced.
Moreover, the sealing cover and the leakage detection of the optical device are carried out by the method, and residual helium gas is rarely remained during the leakage detection, so that the detection precision and the detection accuracy can be improved.
In the capping step, the baking temperature is 70-95 ℃ and the baking time is 10-14 hours.
The purpose of baking is to remove moisture in the optical device products, and through summary analysis, the baking temperature is kept at 70-95 ℃, and the corresponding baking time is kept at 10-14 hours, so that the cost of baking equipment and the baking efficiency can be both considered.
In the capping step, the baking is carried out for a plurality of times, the accumulated baking time length reaches 10-14 hours, and a set period of time is reserved between two adjacent baking steps.
In the scheme, the baking equipment can stop for a certain time through baking for a plurality of times and setting the interval between two adjacent baking for a period of time, so that the performance of the baking equipment is reduced due to the fact that the baking equipment continuously works for a long time, and the service life of the baking equipment can be prolonged.
In the capping step, the specific mode of baking for multiple times is as follows: the optical device to be covered is placed in a closed environment in a static state, the environment temperature is controlled to be 80 ℃, the closed environment is vacuumized for 3 hours, and then helium is filled for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; finally, the vacuum is applied for 3 hours, followed by filling with helium for 3 minutes.
In the scheme, through evenly dividing four times to toast, can reach comparatively understanding toast effect and efficiency requirement, toast equipment shut down in addition during, through filling helium 3 minutes, even equipment sealing performance is not enough, fill the in-process of helium and also have the displacement other gases and get into the vacuum environment for in other gases can't get into the vacuum helium environment, guarantee the environment by other gases pollution in turn.
In the step of leak detection, the packaged optical device stands still in the air for 8-15 minutes.
The purpose of standing is to remove residual helium on the surface of the optical device, and unlike the existing mode, the mode of the invention does not adopt a high-pressure helium process, and helium does not enter the small pore space of the device to be detected, so that the residual helium adsorbed on the surface can be removed only by standing in air. As can also be seen from the actual test data provided hereinafter, the product itself adsorbs less helium.
In order to further improve the working efficiency, the invention provides the following technical scheme:
the number of the optical devices is N, and N is an integer greater than 1.
The method can improve the accuracy of the detection result, so that batch detection can be performed at one time, and in the scheme, the detection efficiency can be greatly improved by detecting N optical devices at one time. In the prior art, in order to improve the detection accuracy, only one optical device can be detected at a time, but based on the method, as described above, the residual helium on the surface can be eliminated by standing in the air, and the residual helium does not enter the small pore space, so that when the batch detection is performed, the detection result is not influenced by the residual helium in the small pore space, and then the batch detection can be realized, and the detection efficiency is improved.
If the leak rate is greater than the set value, dividing N optical devices into a plurality of groups, respectively detecting the leak of the optical devices of each group, dividing the group with the leak rate greater than the set value into a plurality of groups again, respectively detecting the leak of the optical devices of each group, and circulating in this way until a single optical device with the leak rate greater than the set value is screened out.
In the scheme, when the leak rate is detected to be out of compliance, the optical devices are subjected to grouping detection until the single optical device with the unqualified leak rate is screened out, the detection quantity can be greatly reduced by grouping detection, the detection quantity is reduced by half once every grouping, and then the detection efficiency is further improved.
The division into a plurality of packets is specifically equally divided into two packets.
Compared with the prior art, the invention has the following beneficial effects: the invention provides that the product to be capped is circularly baked in vacuum and helium environment and capped in helium environment. Compared with the existing production flow, the device for pressing helium for 2 hours and blowing air for 20 minutes by an ion blower is reduced, the working efficiency is improved, and the using amount of the device is reduced. In addition, the device produced by the method has little residual helium, improves the testing precision and accuracy, and can realize one-time testing of a plurality of products.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a flowchart of a method of producing a hermetic optical device in an embodiment.
FIG. 2 is a graph comparing the results of leak rates obtained by the method of the present invention and the prior art method, respectively.
Description of the embodiments
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
The production method of the airtight optical device provided in the embodiment comprises a capping step and a leak detection step. It should be noted that, for the whole production process of the optical device, besides the capping step and the leak detection step, other steps are included, and since the method in this embodiment only improves the capping step and the leak detection step, only specific processing flows of the capping step and the leak detection step are described herein.
Referring to fig. 1, the method for producing the airtight optical device provided in the present embodiment includes the following steps:
and S10, baking the optical device to be covered in a vacuum and helium environment.
The purpose of the baking is to evaporate moisture in the optical device to be capped. The higher the baking temperature, the shorter the baking time required, but too high a temperature may damage the constituent elements of the light device, and thus the baking temperature cannot be too high. In this example, the recommended baking temperature may be 70-95℃and the corresponding baking time period may be 10-14 hours. Through tests, the baking temperature can be adopted to ensure that not only the baking efficiency is considered, but also the component elements of the optical device are not damaged by high temperature.
The conventional baking method is to continuously bake at a set temperature until the time reaches a predetermined length. However, in this embodiment, a multiple baking mode is more recommended, and the accumulated time reaches a predetermined period.
More specifically, for the experimental example of the BOX packaging optical device with the soft board, the specific modes of baking for multiple times are as follows: the optical device to be covered is placed in a closed environment in a static state, the environment temperature is controlled to be 80 ℃, the closed environment is vacuumized for 3 hours, and then helium is filled for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; finally, the vacuum is applied for 3 hours, followed by filling with helium for 3 minutes. I.e. after 4 times of cyclic baking, the accumulated time length is 12 hours and 12 minutes. The vacuum is pumped for 3 hours at the temperature of 80 ℃ so as to fully remove residual moisture and residual gas in the product; stopping the vacuum equipment for 3 minutes can stop the vacuum equipment for rest; during the shutdown, if the sealing performance of the equipment is insufficient, other gases can enter the vacuum environment, and the situation that the other gases cannot enter can be ensured by filling helium, so that the environment is not polluted.
S20, after baking is completed, transferring the optical device to be capped into a helium environment with the water oxygen content less than 0.1ppm for capping.
The above steps S10 and S20 together constitute the capping step.
S30, standing the capped optical device in the air for a set period of time to release residual helium attached to the surface of the optical device. The longer the standing time is, the more helium is released, and the more accurate the subsequent leak detection result is. However, the longer the time, the lower the efficiency, and the test suggests that the test should be carried out for 8-15 minutes. For example, in the experimental example for the BOX package of the optical device with the compliance board, the standing is performed for 10 minutes.
S40, detecting the leak rate of the optical device after standing by using a helium mass spectrometer.
By adopting the method, one optical device can be capped and leak-detected at a time, and N (integer greater than 1) optical devices can be capped and leak-detected, so that the production efficiency is improved.
If the leakage rate is smaller than or equal to the set value, the optical device is qualified, and if the leakage rate is larger than the set value, the device is unqualified.
It is more preferable to detect the batch of optical devices at the same time, and in this case, if the leak rate is equal to or less than the set value, each of the batch of optical devices is a good product, and if the leak rate is greater than the set value, it is necessary to screen out a bad product because the batch of optical devices contains a bad product.
In this embodiment, a preferred screening manner is provided, that is, when the detection result of detecting N optical devices in batches is that the leak rate is greater than the set value, the N optical devices are equally divided into two groups, and leak detection is performed on the two groups of optical devices respectively, then, one group of optical devices with leak rate greater than the set value is equally divided into two groups, and leak detection is performed on the two groups of optical devices respectively, so that the process is circulated until a single optical device with leak rate greater than the set value is screened out.
When two N/2 packets are detected separately, the following two cases may occur:
(1) And in the two N/2 groups, only one group has an optical device with the leak rate larger than or equal to a set value, then the group is divided into two N/4 groups only, then the two N/4 groups are respectively detected, and the other N/2 group does not need to be regrouped and detected.
(2) And if the leak rate of each N/2 group is greater than or equal to a set value, dividing each N/2 group into two N/4 groups, namely obtaining four N/4 groups, and then respectively detecting the four N/4 groups.
Similarly, for N/4 packets, the following two cases may also occur:
(1) And in the two or four N/4 groups, only part (1 or 2 or 3) of the groups have optical devices with leak rates larger than or equal to a set value, then each group in the part (1 or 2 or 3) of the groups is only divided into two N/8 groups, then all the N/8 groups are detected respectively, and the N/4 groups which are qualified in the leak detection do not need to be regrouped and detected.
(2) And if the leak rate of each N/4 group is greater than or equal to a set value, dividing each N/4 group into two N/8 groups, and then detecting all the N/8 groups respectively.
The same strategy as described above is applied to N/8 packets, N/16 packets, etc. In short, after detecting the leak rate of the packets, only the packets with the leak rate larger than the set value are equally divided into two groups again, and the leak detection is carried out on the two groups of optical devices respectively, and the cycle is carried out until the single optical device with the leak rate larger than the set value is screened out.
N is typically an even number, e.g. 40, and when N is an odd number, then the number of packets is 1 more than the number of packets, i.e. the average is not absolutely uniform, and when the number of packets is 1 more than the number of packets, it is also understood that the average is uniform. Naturally, based on the above-mentioned sieving concept, the sieving may be not equally divided, or may be divided into a plurality of groups such as three groups and four groups, that is, may not be limited to equally dividing and dividing into two groups.
When the batch optical devices are packaged and detected in a leakage mode, the unqualified products can be rapidly positioned in a mode of gradually narrowing the detection range through grouping detection without detecting the unqualified products, namely, the detection efficiency is greatly improved, and then the overall production efficiency of the optical devices is improved.
In order to verify the reliability of the method in this embodiment, taking a BOX package optical device with a flexible board as an example, the method in this embodiment and the method in the prior art are used to perform packaging and leak detection, respectively. Description: in the capping step of the prior art, baking and capping are performed under vacuum and nitrogen atmosphere. In order to avoid influencing the results as much as possible due to differences in process conditions, the same process conditions, e.g. the same baking time, are used as much as possible in the comparative experiments, as shown in the following table:
from the above table, it can be seen that 2010-1740=270 minutes can be saved for only a single optical device, and if the method of the present invention is used for batch detection, the production efficiency can be greatly improved.
The prior method and the method simultaneously test 50 optical devices, and the graph display of the detection result is shown in figure 2, and the leak rate data are as follows:
it should be noted that, in order to eliminate the influence of the product itself on the test result, the 50 optical devices used in the test are respectively and independently tested (i.e. each optical device is tested separately), and the test results are all qualified (i.e. 1×10 is satisfied -8 Specification requirements of Pa.m3/s).
As can be seen from the leakage detection data distribution, the leakage rate of the product test produced by the existing method is obviously higher than that of the product test produced by the existing method, namely, helium enters the tiny pores of the product under the high pressure condition when helium is pressed by the existing method, and the residual helium in the tiny pores cannot be completely removed after the ion blower blows for 2 hours, so that the test result is inaccurate. Therefore, only 1 optical device can be tested at a time, otherwise the test result cannot meet 1×10 -8 Specification requirements of Pa.m3/s (set value).
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any person skilled in the art will readily appreciate variations or alternatives within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (8)
1. A production method of an airtight optical device comprises a capping step and a leak detection step, and is characterized in that,
the capping step is as follows: baking the optical device to be capped in vacuum and helium environment, and then capping in helium environment;
the leak detection step is as follows: and standing the capped optical device in the air for a set period of time, and then detecting the leak rate by using a helium mass spectrometer detector.
2. The method of producing a hermetic optical device according to claim 1, wherein in the capping step, the baking temperature is 70 to 95 ℃ and the baking time period is 10 to 14 hours.
3. The method of claim 2, wherein the capping step is performed in a plurality of bakes, the cumulative bakes are performed for a period of time up to 10-14 hours, and a predetermined time is set between two adjacent bakes.
4. A method of producing a hermetically sealed optical device as claimed in claim 3, wherein in the capping step, the specific manner of baking in multiple steps is: the optical device to be covered is placed in a closed environment in a static state, the environment temperature is controlled to be 80 ℃, the closed environment is vacuumized for 3 hours, and then helium is filled for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; then vacuumizing for 3 hours, and then filling helium for 3 minutes; finally, the vacuum is applied for 3 hours, followed by filling with helium for 3 minutes.
5. The method of claim 1, wherein in the step of leak detecting, the packaged optical device is left to stand in air for 8 to 15 minutes.
6. The method of producing a hermetic optical device according to claim 1, wherein the optical device is N, N being an integer greater than 1.
7. The method according to claim 6, wherein in the leak detection step, if the leak rate is greater than the set value, the N optical devices are divided into a plurality of groups, and leak detection is performed for each of the grouped optical devices, and then the group detected to have the leak rate greater than the set value is divided into a plurality of groups again, and leak detection is performed for each of the grouped optical devices, respectively, and the cycle is performed until a single optical device having the leak rate greater than the set value is selected.
8. The method according to claim 7, wherein in the step of leak detecting, the division into a plurality of groups is specifically divided into two groups.
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