CN117053683A - Angular position accuracy calibration method of laser tracker - Google Patents
Angular position accuracy calibration method of laser tracker Download PDFInfo
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- CN117053683A CN117053683A CN202310552866.2A CN202310552866A CN117053683A CN 117053683 A CN117053683 A CN 117053683A CN 202310552866 A CN202310552866 A CN 202310552866A CN 117053683 A CN117053683 A CN 117053683A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
- G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/042—Calibration or calibration artifacts
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Abstract
A calibration method for the angular position precision of laser tracker includes such steps as using multi-tooth indexing table as angle standard, respectively measuring the horizontal and vertical angles of calibration points of laser tracker, calculating the measurement errors of the horizontal and vertical angles, fitting each calibration point, drawing error curves, and compensating the error curves in the data processor of laser tracker to reduce the angular position measurement errors of laser tracker.
Description
Technical Field
The invention relates to a measuring instrument calibration method, in particular to a calibration method aiming at the angular position precision of a laser tracker.
Background
The laser tracker is an instrument which uses laser as a distance measuring means and is matched with a reflecting target, and is simultaneously matched with an angle measuring mechanism which rotates around two axes to form a complete spherical coordinate measuring system. The laser tracker can be used for measuring stationary targets, tracking and measuring moving targets, especially in the aspect of large-size measurement, the measuring range can be up to 80 meters, and the laser tracker is convenient to install and flexible in measuring point taking, so that the laser tracker is widely applied to the fields of aircraft manufacturing maintenance, ship building maintenance, carrier rocket security and the like.
The laser tracker is used as an important long-distance large-space measurement means in the last 20 years, a metering calibration mode method is in the gradual establishment perfection, and the current domestic metering mechanism is mainly based on the calibration standard of a JJF 1242-2010 laser tracking three-dimensional coordinate measurement system when calibrating the laser tracker, but only the detection of comprehensive precision and axis perpendicularity deviation is provided in the calibration standard, and the single error detection of the horizontal direction rotation angle (called horizontal direction angle for short) and the vertical direction rotation angle (called vertical direction angle or pitch angle for short) of the laser tracker is not involved. The single angle deviation of the laser tracker has an amplifying effect in long-distance measurement, and the final measurement result error caused by the angle deviation is larger as the distance is longer, so that the calibration of the horizontal direction angle and the vertical direction angle has great influence on the precision of the laser tracker, and the method is a necessary measure adopted by a manufacturer of the laser tracker in the process of installing and adjusting the tracking head and scientific research units to improve the comprehensive precision of the laser tracker.
Disclosure of Invention
The invention provides a method for calibrating angular position precision of a laser tracker, which aims to accurately measure horizontal direction angle and vertical direction angle of calibration points of the laser tracker by means of a high-precision angle metering instrument, calculate measurement errors of the horizontal direction angle and the vertical direction angle of the calibration points, fit each calibration point to draw an error curve, and then compensate the error curve into a data processor of the laser tracker so as to reduce the angular position measurement errors of the laser tracker and achieve the aim of improving the comprehensive precision of the laser tracker.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the method for calibrating the angular position precision of the laser tracker adopts a multi-tooth indexing table as an angle standard instrument to calibrate the angular position precision of the horizontal direction angle and the vertical direction angle of the laser tracker respectively, and comprises the following specific operation steps:
calibration of horizontal angular position accuracy of laser tracker
a. The method comprises the steps of installing a horizontal direction angular position accuracy calibration instrument, taking a vertical multi-tooth indexing table as an angle measurement standard instrument, placing the vertical multi-tooth indexing table on a horizontally arranged platform and leveling, installing an X-Y double-axis displacement adjustment platform on the table top of the vertical multi-tooth indexing table, placing a laser tracker on the X-Y double-axis displacement adjustment platform and leveling, and arranging a plane reflector at a position with a set distance from the laser tracker;
b. the laser tracker and the vertical multi-tooth indexing table are eccentrically adjusted, and X, Y axis eccentricity of the laser tracker on a plane with a zero pitch angle is respectively adjusted, so that the center point of a laser emission port of the laser tracker is positioned on the rotating axis of the vertical multi-tooth indexing table when the pitch angle is zero;
c. the calibration of the horizontal angle precision comprises two operation processes of forward calibration and reverse calibration, and relevant data of the forward calibration process and the reverse calibration process are recorded respectively;
d. according to the recorded data of forward calibration and reverse calibration, the rotation direction of a horizontal angle encoder corresponding to the laser tracker is used as a clockwise correction curve and a counterclockwise correction curve, the correction curves are compensated into a data processor of the laser tracker, and the angular position measurement error of the laser tracker is reduced through the data processor until the angular position accuracy calibration is qualified.
Calibration of vertical angular position accuracy of laser tracker
e. The installation of a vertical direction angular position precision calibration instrument, wherein a horizontal multi-tooth indexing table is used as an angle measurement standard instrument, the horizontal multi-tooth indexing table is placed on a platform, and the table top of the horizontal multi-tooth indexing table is adjusted to be vertical to the ground horizontal plane;
f. the rotary arm is arranged on the table top of the horizontal multi-tooth indexing table, so that the rotary arm is basically in a horizontal state when the horizontal multi-tooth indexing table is locked at the scale zero position;
g. the installation and posture adjustment of the plane mirror on the rotating arm are carried out, a fixing frame is arranged at one end of the rotating arm, the plane mirror is installed on the fixing frame at one end of the rotating arm, and the posture of the lens of the plane mirror is adjusted to be vertical to the horizontal plane;
h. setting up a laser tracker, placing an X-Y-Z axis displacement adjustment platform on a horizontal table top, enabling an X axis of the X-Y-Z axis displacement adjustment platform to be parallel to a rotating arm, fixing the laser tracker on the X-Y-Z axis displacement adjustment platform, enabling a vertical rotating axis of the laser tracker to be close to a rotating axis of a horizontal multi-tooth indexing table, and leveling the laser tracker;
i. the laser tracker and the horizontal multi-tooth indexing table are eccentrically adjusted, so that the vertical rotation axis of the laser tracker coincides with the rotation center of the horizontal multi-tooth indexing table in the X-axis direction and the Z-axis direction, and the laser point of the laser tracker is hit to the center of the plane mirror;
j. the calibration of the vertical angle precision comprises two operation processes of forward calibration and reverse calibration, and relevant data of the forward calibration and the reverse calibration processes are recorded respectively;
k. according to the recorded data of forward calibration and reverse calibration, the rotation direction of a vertical angle encoder corresponding to the laser tracker is used as a clockwise correction curve and a counterclockwise correction curve, the correction curve is compensated into a data processor of the laser tracker, and the vertical angle measurement error of the laser tracker is reduced through the data processor until the angular position accuracy calibration is qualified.
In the above calibration method for angular position accuracy of laser tracker, in the step b, the eccentric adjustment process of the laser tracker and the vertical multi-tooth indexing table is as follows: 1, placing a standard target ball on a fixed target seat A which is more than 2m away from a laser tracker, enabling the connecting line of the center of the target ball and the rotation center of a vertical multi-tooth indexing table to be parallel to the X axis of an X-Y double-axis displacement adjustment platform, adjusting the height of the target seat A, and enabling the center point of the target ball to fall on a plane with zero pitch angle of the tracker; precisely rotating the horizontal azimuth angle of the laser tracker by 90 degrees, setting another target seat B in the laser emission direction of the laser tracker, and adjusting the height of the target seat so that the center position of a target ball arranged on the target seat is on the horizontal plane of the pitch angle of the laser tracker, and recording a distance value B1 measured by the laser tracker; rotating the vertical multi-tooth indexing table by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table, and reading a distance value B2 measured by the laser tracker at the moment; comparing the values of B1 and B2, if |B1-B2| is less than or equal to the set value, judging that the laser tracker has no eccentricity in the connecting line direction between the target seat A and the vertical multi-tooth indexing table, if the absolute value of the B1-B2 is larger than the set value, adjusting the displacement of the X-Y biaxial displacement adjustment platform along the X axis until the absolute value of the B1-B2 is smaller than or equal to the set value; 2, rotating the laser emission direction of the laser tracker to the azimuth of the target seat A, and recording a distance value A1 measured by the laser tracker at the moment; rotating the vertical multi-tooth indexing table by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table, and reading a distance value A2 measured by the laser tracker at the moment; comparing the A1 with the A2, if the value of the absolute value A1-A2 is smaller than or equal to the set value, judging that the laser tracker is not eccentric in the direction of the connecting line of the B target seat and the center of the vertical multi-tooth indexing table at the moment, if the absolute value A1-A2 is larger than the set value, the displacement of the X-Y double-axis displacement adjustment platform along the Y axis is adjusted until the absolute value A1-A2 is smaller than or equal to the set value.
In the above calibration method for angular position accuracy of a laser tracker, in the step c, the calibration process of the accuracy of the forward horizontal azimuth angle is as follows: locking the indexing table at the position with zero index of the vertical multi-tooth indexing table, aligning the laser emission direction of the laser tracker with the plane mirror, and reading the horizontal angle value theta of the laser tracker at the moment 0 The vertical multi-tooth indexing table rotates anticlockwise to form a scale, at the moment, the tracking head of the laser tracker also automatically rotates clockwise to form a horizontal azimuth angle, and the numerical value is recorded as theta at the moment 1 Sequentially rotating each scale value of the vertical multi-tooth indexing table, and sequentially obtaining a numerical value theta by a laser tracker i Last data theta i For return to zero value, calculate |θ i -θ 0 The value obtained is positive return to zero error, when |theta i -θ 0 When the I is smaller than or equal to the set value, the laser tracker is judged to return to zero and pass the standard, and when the I theta is smaller than the set value i -θ 0 When the I is larger than the set value, judging that the laser tracker returns to zero and is not qualified; the reverse horizontal azimuth precision calibration process is as follows: after the forward horizontal azimuth position accuracy calibration process is completed, the horizontal angle data of the laser tracker at the moment is recorded as phi i ,φ i =θ i At this time, will be verticalThe multi-tooth indexing table rotates clockwise to a scale, the tracking head of the laser tracker also rotates anticlockwise to a horizontal azimuth automatically, and phi is obtained sequentially in anticlockwise order in the same way i Last data phi 0 For return to zero value, calculate |φ 0 -φ i The value obtained is the reverse zero return error, when the value is phi 0 -φ i When the I is smaller than or equal to the set value, the laser tracker is judged to return to zero and pass the standard, and when the I phi is smaller than the set value 0 -φ i And when the I is larger than the set value, judging that the laser tracker returns to zero and is unqualified.
In the above method for calibrating angular position accuracy of laser tracker, in the step d, each scale value of the vertical multi-tooth indexing table corresponds to if |phi i -θ i And when the I is smaller than or equal to the set value, namely each return error value is smaller, the I and the return error value are calculated as an arithmetic average value to obtain a comprehensive correction curve.
In the above method for calibrating angular position accuracy of a laser tracker, in the step e, the adjustment of the vertical direction of the horizontal multi-tooth indexing table surface and the ground plane comprises the following steps: 1 installing a plane reflecting mirror at the rotation center of a horizontal multi-tooth dividing table to ensure that the geometric center position of a reflecting surface of a lens is consistent with the center position of the horizontal multi-tooth dividing table, erecting a theodolite right against the center position, precisely leveling the theodolite, and reading the vertical angle value P of a cross cursor reflected by the plane mirror by using the theodolite 1 Horizontal angle value T 1 The horizontal multi-tooth dividing table is rotated for 180 degrees, and the theodolite is used for reading the vertical angle data P of the cross cursor reflected by the plane reflector again 2 Horizontal angle value T 1 If |P 1 -P 2 I is less than or equal to a set value or I T 1 -T 2 If the I is smaller than or equal to the set value, judging that the installation state of the plane mirror meets the requirement in the direction of the earth plumb line, if the I P is 1 -P 2 I is greater than the set value or T 1 -T 2 The I is larger than the set value, and the lens of the plane reflecting mirror is adjusted until the I P is the same as the I 1 -P 2 I is less than or equal to a set value or I T 1 -T 2 2, placing a marble slab between the theodolite and the plane mirror, leveling the slab by using a high-precision electronic level, wherein the leveling precision of the slab is smaller than or equal to the set value, and placing a vertical plate on the slabThe straight standard mirror is used for calculating an included angle L between a 90-degree pitch angle of the theodolite and a vertical line of the horizontal ground through the vertical standard mirror 1 The vertical mirror is removed, and the value L of the pitch angle of the theodolite is read 2 Adjusting a leveling knob of the horizontal multi-tooth indexing table in the pitch angle direction until the leveling knob reaches the level L 1 -L 2 And I is smaller than or equal to a set value.
In the above calibration method for angular position accuracy of a laser tracker, in the step g, the adjustment process for making the plane mirror perpendicular to the horizontal plane is as follows: 1 adjusting the level of the theodolite, aiming at a plane reflector, and recording the horizontal azimuth angle of a cross cursor of the theodolite as Z 1 The horizontal multi-tooth indexing table rotates 180 degrees, the theodolite pitching axis rotates 180 degrees and reads the horizontal azimuth angle Z again 2 If I Z 1 -Z 2 180 degrees less than or equal to the set point, judging that the installation state of the plane reflector meets the requirement in the horizontal azimuth direction of the theodolite, if the installation state of the plane reflector meets the requirement in the horizontal azimuth direction of the theodolite 1 -Z 2 The angle of the optical adjuster is 180 degrees larger than the set value, and the knob of the optical adjuster in the horizontal direction is rotated until Z is reached 1 -Z 2 The value of the I-180 degrees is smaller than or equal to a set value; 2 placing a marble plate between the theodolite and the plane mirror, leveling the plate by using a high-precision electronic level meter, wherein the leveling precision of the plate is smaller than or equal to a set value, placing a vertical standard mirror on the plate, and calculating an included angle H between the pitch angle direction of the transverse shaft of the theodolite and the vertical line of the horizontal ground through the vertical standard mirror 1 The vertical mirror is removed, and the theodolite is used for reading the vertical angle value H of the cross cursor reflected by the plane mirror on the rotating arm 2 If |H 1 -H 2 If I is smaller than or equal to the set value, judging that the installation state of the plane reflecting mirror meets the requirement in the direction of the vertical horizontal plane, if I H 1 -H 2 The I is larger than the set value, and the posture of the lens is adjusted through the adjusting frame of the plane reflecting mirror until the I H is equal to the I 1 -H 2 And I is smaller than or equal to a set value.
In the above calibration method for angular position accuracy of the laser tracker, in the step i, the eccentric adjustment process of the laser tracker and the horizontal multi-tooth indexing table is as follows: 1 locking a horizontal multi-tooth indexing table at a zero position, installing a target ball C at one end of a rotating arm, and collecting data D measured by a laser tracker 1 Horizontal multi-tooth indexing tableRotating 180 degrees for locking again, and collecting data D measured by a tracker 2 If |D 1 -D 2 When the I is smaller than or equal to the set value, judging that the vertical rotation axis of the tracking head coincides with the rotation center of the horizontal multi-tooth indexing table in the X-axis direction, and if the I is D 1 -D 2 When I is larger than the set value, the X axis is adjusted to be high and low until I is D 1 -D 2 2, turning the horizontal multi-tooth indexing table to 90 degrees for locking, collecting the ranging data E of the laser tracker at the moment, and calculating the I E-D 1 I and I E-D 2 If the two values are smaller than or equal to the set value, judging that the vertical rotation axis of the tracking head coincides with the rotation center of the horizontal multi-tooth indexing table in the Z-axis direction, and when the value is |E-D 1 I is greater than the set point or I E-D 2 When the I is larger than the set value, the displacement of the Z axis is adjusted until the I E-D 1 I and I E-D 2 And (3) turning the horizontal multi-tooth indexing table to a zero position for locking, installing a plane mirror at one end of a rotating arm, striking a laser point of a laser tracker on the plane mirror, checking whether the laser spot is positioned at the center of the plane mirror, and if the laser spot is deviated, adjusting the Y axis of the X-Y-Z axis displacement adjustment platform to ensure that the laser spot is positioned at the center of the plane mirror.
In the above calibration method for angular position accuracy of a laser tracker, in the step j, the calibration process for angular accuracy in the forward vertical direction is as follows: the laser emission direction of the laser tracker aims at a plane mirror positioned at one end of a rotating arm, the horizontal multi-tooth indexing table is rotated until reaching the depression angle limit position of the laser tracker (or the lowest angle position when the tracker is actually operated according to specific conditions), the horizontal multi-tooth indexing table is locked, and the vertical angle value omega of the laser tracker is recorded -k (k is a positive integer), then the horizontal multi-tooth dividing table is rotated anticlockwise by a scale value, and the vertical angle value omega of the laser tracker at the moment is recorded 1-k Sequentially rotating the horizontal multi-tooth indexing table to obtain a series of numerical values omega i Sorting and recording the values; the reverse vertical direction angle accuracy calibration process comprises the following steps: the position (omega) in the last measurement period i ) Marked as lambda i Then the horizontal multi-tooth dividing table is rotated clockwise by a scale value, and the excitation at this time is recordedVertical angle lambda of light tracker i Sequentially rotating the multi-tooth indexing table to obtain a series of values lambda i When recorded to lambda -k At the time, calculate lambda -k |-|ω -k And if the value is smaller than or equal to the set value, the return to zero is judged to be qualified, and when the value is equal to lambda -k |-|ω -k And when the I is larger than the set value, judging that the laser tracker returns to zero and is unqualified.
In the above-mentioned calibration method for angular position accuracy of laser tracker, in the step k, if the return error is less than or equal to the set value, that is, each return error value is smaller, the two values can be used as an arithmetic average value to obtain a comprehensive correction curve.
The invention provides a method for calibrating angular position precision of a laser tracker, which is used for calibrating the angular position precision of the horizontal direction of the laser tracker by matching a vertical multi-tooth indexing table, an X-Y axis displacement adjustment platform and a plane mirror, and calibrating the angular position precision of the vertical direction of the laser tracker by matching a horizontal multi-tooth indexing table, an X-Y-Z axis displacement adjustment platform, a rotating arm and the plane mirror, thereby not only improving the angular position precision of the laser tracker, ensuring the comprehensive measurement precision of the laser tracker, but also filling the blank of domestic angle calibration technology aiming at the high-precision laser tracker.
Drawings
FIG. 1 is a schematic diagram of a laser tracker (only tracking head drawn);
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a schematic diagram of an assembled structure of a laser tracker and a vertical multi-tooth indexing table;
FIGS. 4 and 5 are schematic views illustrating the eccentric adjustment of the laser tracker and the vertical multi-tooth indexing table;
FIG. 6 is a schematic diagram of a laser tracker horizontal angular position accuracy calibration;
FIG. 7 is a schematic diagram of the cooperation structure of the laser tracker and the horizontal multi-tooth indexing table;
FIG. 8 is a side view of FIG. 7;
fig. 9 and 10 are schematic views of the eccentric adjustment process of the laser tracker and the horizontal multi-tooth indexing table.
The reference numerals in the drawings are defined as follows:
1 is a laser tracker, 1-1 is a laser emission port, I is a vertical rotation shaft, and II is a horizontal rotation shaft;
2 is the angular position precision calibrating device of the laser tracker
2-1 is a vertical multi-tooth indexing table, and 2-1-1 is a horizontal multi-tooth indexing table base; 2-2 is a rotating arm; 2-3 is a plane reflector, 2-3-1 is a lens; 2-4 is a displacement adjustment platform of the laser tracker; 2-5 is a light compensating mirror; 2-6 are horizontal multi-tooth indexing tables.
Detailed Description
The invention will be further described with reference to the accompanying drawings and specific examples.
Referring to fig. 1 and 2, the laser tracker is an instrument using laser as a ranging means and matched with a reflection target, and mainly comprises a controller, a processor, a tracking head and a target, wherein the tracking head of the laser tracker 1 is matched with a vertical rotation axis I and a vertical rotation axis II, and the working principle is as follows: a target reflector is arranged on a target point, laser emitted by a laser tracker 1 through a laser emitting port 1-1 irradiates the target reflector and returns to a tracking head, when the target moves, the tracking head adjusts the direction of a light beam to aim at the target, and meanwhile, the returned light beam is received by a detection system of a processor and is used for measuring and calculating the spatial position of the target. At present, a metering calibration mode method of the laser tracker is in the process of gradually establishing perfection, and the main basis of the domestic metering mechanism is JJF 1242-2010 laser tracking three-dimensional coordinate measurement system calibration standard when the domestic metering mechanism calibrates the metering mechanism, but the calibration standard does not have single error detection related to the position accuracy of the horizontal direction angle and the vertical direction angle of the laser tracker. The single angle deviation of the laser tracker has an amplifying effect in long-distance measurement, and the error of a final measurement result caused by the angle deviation is larger as the distance is longer, so that the calibration of the horizontal direction angle and the vertical direction angle has great influence on the precision of the laser tracker.
Referring to fig. 3 to 10, a preferred embodiment of the present invention provides a method for calibrating angular position accuracy of a laser tracker, which uses a currently mature product 552 high-accuracy electric multi-tooth indexing table as an angle measurement standard device, and respectively calibrates angular position accuracy of a horizontal direction angle and a vertical direction angle of the laser tracker, wherein specific indexes of the electric multi-tooth indexing table are as follows: the horizontal direction angle positioning accuracy is 0.2 ", the horizontal direction angle positioning repeatability is 0.04", the vertical direction angle positioning accuracy is 0.3 ", the vertical direction angle positioning repeatability is 0.06", the scale unit 360/552 is approximately equal to 0.65217 degrees, and the specific operation steps are as follows:
calibration of horizontal angular position accuracy of laser tracker
a. The installation of a horizontal direction angular position precision calibration instrument is shown in figure 3, a vertical multi-tooth indexing table 2-1 is used as an angle measurement standard instrument, the vertical multi-tooth indexing table 2-1 is placed on a platform with a shock insulation foundation and leveled, an X-Y double-axis displacement adjustment platform is installed on the table top of the vertical multi-tooth indexing table 2-1, a laser tracker 1 is placed on the X-Y double-axis displacement adjustment platform and leveled, and a plane reflector 2-3 is arranged at a position with a set value distance from the laser tracker;
b. the laser tracker and the vertical multi-tooth indexing table are eccentrically adjusted, X, Y axes of the laser tracker 1 on a plane with a zero pitch angle are eccentrically adjusted respectively, so that the center point of a laser emitting port 1-1 of the laser tracker 1 is positioned on the rotating axis of the vertical multi-tooth indexing table 2-1 when the pitch angle is zero, and as shown in fig. 4 and 5, the specific adjustment method is as follows: 1, placing a standard target ball on a fixed target seat A at a position which is more than 2m away from a laser tracker 1, enabling the connecting line of the center of the target ball and the rotation center of a vertical multi-tooth indexing table 2-1 to be basically parallel to the X axis of an X-Y double-axis displacement adjustment platform, adjusting the height of the target seat A, and enabling the center point of the target ball to fall on a plane with zero pitch angle of the tracker; precisely rotating the horizontal azimuth angle of the laser tracker 1 by 90 degrees, setting another target seat B in the laser emission direction of the laser tracker 1, adjusting the height of the target seat so that the center position of a target ball arranged on the target seat is on the horizontal plane of the pitch angle of the laser tracker, and recording the distance value B1 measured by the laser tracker; rotating the vertical multi-tooth indexing table 2-1 by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table 2-1, and reading a distance value B2 measured by the laser tracker at the moment; comparing the numerical values of B1 and B2, if the absolute value of B1-B2 is less than or equal to 0.002mm, judging that the laser tracker 1 is not eccentric in the direction of the connecting line between the A target seat and the center of the vertical multi-tooth indexing table 2-1, and if the absolute value of B1-B2 is more than 0.002mm, adjusting the displacement of the X-Y biaxial linear displacement adjustment platform along the X axis until the absolute value of B1-B2 is less than or equal to 0.002mm;2, rotating the laser emission direction of the laser tracker 1 to the azimuth of the target seat A, and recording a distance value A1 measured by the laser tracker 1 at the moment; rotating the vertical multi-tooth indexing table 2-1 by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table 2-1, and reading the A2 measured by the laser tracker 1 at the moment; comparing the numerical values of A1 and A2, if the absolute value of A1-A2 is less than or equal to 0.002mm, judging that the laser tracker is not eccentric in the direction of the connecting line between the B target seat and the center of the vertical multi-tooth indexing table, and if the absolute value of A1-A2 is more than 0.002mm, adjusting the displacement of the X-Y biaxial displacement adjustment platform along the Y axis until the absolute value of A1-A2 is less than or equal to 0.002mm;
c. calibration of horizontal angular accuracy, as shown in fig. 6, the calibration process includes two operation processes of forward calibration and reverse calibration, which are respectively: 1 forward horizontal azimuth precision calibration process, locking the indexing table at the position of the vertical multi-tooth indexing table scale indicating zero position, aligning the laser emission direction of the laser tracker 1 with a far plane mirror 2-3, and reading the horizontal angle value theta of the tracker at the moment 0 The vertical multi-tooth dividing table rotates anticlockwise by one scale (360/552 apprxeq 0.65217 degrees), at the moment, the tracking head of the laser tracker 1 also automatically rotates clockwise by one horizontal azimuth angle, and the numerical value is recorded at the moment as theta 1 The scale values of the vertical multi-tooth indexing table 2-1 are respectively rotated, and the laser tracker sequentially obtains the numerical value theta i (0.ltoreq.i.ltoreq.552), the last data θ 552 For return to zero value, calculate |θ 552 -θ 0 The value obtained is positive return to zero error, when |theta 552 -θ 0 When the absolute value is less than or equal to 0.3', judging that the laser tracker returns to zero and is qualified, and when the absolute value is theta 552 -θ 0 When the I is more than 0.3', judging that the laser tracker returns to zero and is unqualified, and recording the related data; 2 a reverse horizontal azimuth accuracy calibration process, wherein after the forward horizontal azimuth position accuracy calibration process is completed, the horizontal angle data of the laser tracker at the moment is recorded as phi 552 Obviously phi 552 =θ 552 At this time, the vertical multi-tooth indexing table 2-1 is rotated clockwise by one scale, and the tracking head of the laser tracker 1 is also rotated automatically counterclockwise by one waterSquare azimuth, recording the value phi at the moment 551 And similarly, obtaining phi according to the anticlockwise sequence i (0.ltoreq.i.ltoreq.552), the last data phi 0 For return to zero value, calculate |φ 0 -φ 552 The value obtained is the reverse zero return error, when the value is phi 0 -φ 552 When the I is less than or equal to 0.3 ', judging that the laser tracker returns to zero and is qualified, and when the I phi is less than or equal to 0.3' 0 -φ 552 When the I is more than 0.3', judging that the laser tracker returns to zero and is unqualified, and recording the related data;
d. according to the recorded data of forward calibration and reverse calibration, the rotation direction of the horizontal angle encoder of the corresponding laser tracker is used as a clockwise correction curve and a counterclockwise correction curve, if phi i -θ i And (3) when the I is less than or equal to 0.3', namely each return error value is smaller, taking an arithmetic average value of the I and the II to obtain a comprehensive correction curve, compensating the correction curve into a data processor of the laser tracker, and reducing the angular position measurement error of the laser tracker through the data processor until the angular position accuracy is calibrated to be qualified.
Calibration of vertical angular position accuracy of laser tracker
e. As shown in fig. 7 and 8, the horizontal multi-tooth indexing table 2-6 is selected as an angle measurement standard instrument, the horizontal multi-tooth indexing table 2-6 is placed on a marble platform with a shock insulation foundation, and the table top is adjusted to be vertical to the ground plane, wherein the specific adjustment steps are as follows: 1 installing a plane mirror at the rotation center of a horizontal multi-tooth dividing table, enabling the geometric center position of a mirror reflection surface to be approximately at the center position of the horizontal multi-tooth dividing table 2-6, erecting a theodolite right against the center position, precisely leveling the theodolite, reading the pitch angle value P1 and the horizontal angle value T1 of a cross cursor reflected by the plane mirror by using the theodolite, rotating the horizontal multi-tooth dividing table by 180 degrees, reading the pitch angle data P2 and the horizontal angle value T1 of the cross cursor reflected by the plane mirror 2-3 by using the theodolite again, judging that the installation state of the plane mirror meets the requirement in the direction of a ground plumb line if the absolute value of P1-P2 is less than 2 ' or the absolute value of T1-T2 is more than 2 ', and adjusting the mirror 2-3-1 of the plane mirror 2-3 until the absolute value of P1-P2 is less than or the absolute value of T1-T2 is less than or equal to 2 '2 ', placing a small adjustable 00-level marble plate between the theodolite and the plane mirror, leveling the plate by using a high-precision electronic level meter, wherein the leveling precision of the plate is less than or equal to 0.2', placing a vertical standard mirror on the plate, and calculating an included angle L between a 90-degree pitch angle of the theodolite and a vertical line of the horizontal ground through the vertical standard mirror 1 Removing the vertical standard mirror, and reading the value L of the pitch angle of the theodolite 2 Adjusting a leveling knob of the horizontal multi-tooth indexing table in the pitch angle direction until the leveling knob reaches the level L 1 -L 2 |≤2″；
f. Removing a plane reflecting mirror arranged at the rotation center position of the horizontal multi-tooth indexing table 2-6, and then arranging a rotating arm 2-2 on the table top of the horizontal multi-tooth indexing table 2-6, so that the rotating arm 2-2 is basically in a horizontal state when the horizontal multi-tooth indexing table 2-6 is locked at the scale zero position;
g. the installation of the plane mirror on the rotating arm and the posture adjustment thereof are that a fixing frame is arranged at one end of the rotating arm 2-2, the plane mirror 2-3 is installed on the fixing frame at one end of the rotating arm 2-2, the posture of the plane mirror is adjusted to be vertical to the horizontal plane, and the specific adjustment steps are as follows: 1 adjusting the level of the theodolite, aiming at a plane reflector, and recording the horizontal azimuth angle of a cross cursor of the theodolite as Z 1 The horizontal multi-tooth indexing table rotates 180 degrees, the theodolite vertical shaft rotates 180 degrees and reads the horizontal azimuth angle Z again 2 If I Z 1 -Z 2 The installation state of the plane mirror can be judged to meet the requirement in the horizontal azimuth direction of the theodolite when the angle is 180 degrees or less than 2 degrees, and if Z is 1 -Z 2 The angle of the lens 2-3-1 of the plane mirror 2-3 is adjusted until the angle of the lens Z is larger than the angle of the lens 2-3-1 of the plane mirror 180 DEG 1 -Z 2 2, placing a small adjustable 00-level marble plate between the theodolite and the plane mirror, leveling the plate by using a high-precision electronic level meter, wherein the leveling precision of the plate is less than or equal to 0.2', placing a vertical standard mirror on the plate, and calculating an included angle H between the pitch angle direction of the transverse axis of the theodolite and the vertical line of the horizontal ground through the vertical standard mirror 1 The vertical mirror is removed, and a theodolite is used for reading the pitch angle value H of a cross cursor reflected by a plane mirror on the rotating arm 2 If |H 1 -H 2 The installation state of the plane mirror is considered to be in the earth lead and is less than or equal to 2 percentThe direction of the hammer line meets the requirements, if |H 1 -H 2 Adjusting the lens 2-3-1 of the plane mirror 2-3 until |H > 2' 1 -H 2 |≤2″；
h. Erecting a laser tracker, and installing an X-Y-Z axis displacement adjustment platform below the laser tracker 1, wherein the X axis of the X-Y-Z axis displacement adjustment platform is approximately parallel to the rotating arm 2-2, the vertical rotating axis of the laser tracker 1 is approximately placed near the rotating axis of the horizontal multi-tooth indexing table 2-6, and the laser tracker 1 is leveled;
i. the laser tracker and the horizontal multi-tooth indexing table are eccentrically adjusted, so that the vertical rotation axis of the laser tracker coincides with the rotation center of the horizontal multi-tooth indexing table in the X-axis direction and the Z-axis direction, and the laser point of the laser tracker is hit to the center of the plane mirror; as shown in fig. 9 and 10, the specific operation steps are as follows: 1 locking a horizontal multi-tooth indexing table 2-6 at a zero position, installing a target ball at one end of a rotating arm 2-2, and collecting data D of distance measurement of a laser tracker 1 The multi-tooth indexing table rotates 180 degrees to lock again, and data D measured by the tracker are collected 2 If |D 1 -D 2 When the absolute value is less than or equal to 0.003mm, the coincidence of the vertical rotation axis of the tracking head and the rotation center of the horizontal multi-tooth indexing table in the X-axis direction can be judged, if the absolute value D 1 -D 2 When the I is more than 0.003mm, the X-axis is adjusted to be I D 1 -D 2 2, turning the multi-tooth indexing table to 90 degrees for locking, collecting the ranging data E of the laser tracker at the moment, and calculating the I E-D 1 I and I E-D 2 If the two values are less than or equal to 0.003mm, the vertical rotation axis of the tracking head is judged to be coincident with the rotation center of the horizontal multi-tooth indexing table in the Z-axis direction, and the value of I E-D is calculated as 1 I > 0.003mm or I E-D 2| At > 0.003mm, the displacement of the Z axis is adjusted until two values |E-D 1 I and I E-D 2 Turning the horizontal multi-tooth indexing table 2-6 to zero position for locking, installing a plane mirror 2-3 at one end of a rotating arm 2-2, striking a laser spot of a laser tracker 1 on the plane mirror 2-3, checking whether the laser spot is positioned at the center of the plane mirror 2-3, and if the laser spot is deviated, adjusting the Y axis of the platform to be positioned at the center by adjusting the X-Y-Z axis displacement;
j. vertical columnThe calibration of the accuracy of the straight direction angle comprises two operation processes of forward calibration and reverse calibration, namely: 1 forward vertical direction angle accuracy calibration process, aiming the laser emission direction of the laser tracker 1 at a plane mirror 2-3 positioned at one end of a rotating arm 2-2, rotating a horizontal multi-tooth indexing table 2-6 until reaching the depression angle limit position of the laser tracker 1 (or according to the minimum angle position of the actual operation of the tracker in specific cases), locking the horizontal multi-tooth indexing table 2-6, and recording the vertical angle value omega of the laser tracker -k (k is a positive integer), then the horizontal multi-tooth indexing table 2-6 is rotated anticlockwise by a scale value (360/552/0.65217 degrees), and the vertical angle value omega of the laser tracker 1 at the moment is recorded 1-k The horizontal multi-tooth indexing table 2-6 is rotated in turn to obtain a series of numerical values omega i (-k.ltoreq.i.ltoreq.k+276), sort and record the values, 2 reverse vertical angular accuracy calibration procedure, and calculate the position (ω) in the previous measurement cycle k+276 ) Marked as lambda k+276 Lambda is easily known k+276 =ω k+276 Then the horizontal multi-tooth dividing table 2-6 is rotated clockwise by a scale value (360/552 approximately 0.65217 DEG), and the vertical angle value lambda of the laser tracker at the moment is recorded k+275 The multi-tooth indexing table 2-1 is rotated in turn to obtain a series of values lambda i (-k.ltoreq.i.ltoreq.k+276) when lambda is recorded -k At the time, calculate lambda -k |-|ω -k And (3) the value is less than or equal to 0.3', namely the return to zero is qualified, and the value is equal to lambda -k |-|ω -k The I is more than 0.3', the laser tracker is judged to return to zero and not pass, and the related data are recorded;
k. according to the recorded data of forward calibration and reverse calibration, the rotation direction of the vertical angle encoder of the corresponding laser tracker 1 is used as a clockwise correction curve and a counterclockwise correction curve, if the return error is less than or equal to 0.2', i.e. each return error value is smaller, the two values can be calculated as an arithmetic average value to obtain a comprehensive correction curve, the correction curve is compensated into a data processor of the laser tracker, and the vertical angle measurement error of the laser tracker is reduced through the data processor until the angular position accuracy calibration is qualified.
Claims (9)
1. A method for calibrating angular position accuracy of a laser tracker is characterized by comprising the following steps of: the method adopts a multi-tooth indexing table as an angle standard instrument to calibrate the position accuracy of the horizontal direction angle and the vertical direction angle of the laser tracker, and comprises the following specific operation steps:
calibration of horizontal angular position accuracy of laser tracker
a. The method comprises the steps of installing a horizontal direction angular position accuracy calibration instrument, taking a vertical multi-tooth indexing table (2-1) as an angle measurement standard instrument, placing the vertical multi-tooth indexing table (2-1) on a horizontally arranged platform and leveling, installing an X-Y double-axis displacement adjustment platform on the table top of the vertical multi-tooth indexing table (2-1), placing a laser tracker (1) on the X-Y double-axis displacement adjustment platform and leveling, and arranging a plane reflector (2-3) at a position with a set value from the laser tracker (1);
b. the laser tracker and the vertical multi-tooth indexing table are eccentrically adjusted, and X, Y axes of the laser tracker (1) on a plane with a pitch angle of zero are eccentrically adjusted respectively, so that the center point of a laser emitting port (1-1) of the laser tracker is positioned on the rotating axis of the vertical multi-tooth indexing table (2-1) when the pitch angle of the laser tracker is zero;
c. the calibration of the horizontal angle precision comprises two operation processes of forward calibration and reverse calibration, and relevant data of the forward calibration process and the reverse calibration process are recorded respectively;
d. according to the recorded data of forward calibration and reverse calibration, the rotation direction of a horizontal angle encoder corresponding to the laser tracker (1) is used as a clockwise correction curve and a counterclockwise correction curve, the correction curves are compensated into a data processor of the laser tracker, and the angular position measurement error of the laser tracker is reduced through the data processor until the angular position accuracy calibration is qualified;
calibration of vertical angular position accuracy of laser tracker
e. The installation of a vertical direction angular position precision calibration instrument takes a horizontal multi-tooth indexing table (2-6) as an angle measurement standard instrument, the horizontal multi-tooth indexing table (2-6) is placed on a platform, and the table top of the horizontal multi-tooth indexing table is adjusted to be vertical to the ground horizontal plane;
f. the rotary arm (2-2) is arranged on the table top of the horizontal multi-tooth indexing table (2-6), so that the rotary arm (2-2) is in a horizontal state when the horizontal multi-tooth indexing table (2-6) is locked at the scale zero position;
g. the installation of the plane reflector on the rotating arm and the posture adjustment thereof are carried out, a fixing frame is arranged at one end of the rotating arm (2-2), the plane reflector (2-3) is installed on the fixing frame at one end of the rotating arm, and the posture of the plane reflector (2-3) is adjusted to enable the lens (2-3-1) to be vertical to the horizontal plane;
h. setting up a laser tracker, placing an X-Y-Z axis displacement adjustment platform on a horizontal table top, wherein the X axis of the X-Y-Z axis displacement adjustment platform is parallel to a rotating arm (2-2), fixing the laser tracker (1) on the X-Y-Z axis displacement adjustment platform, enabling the vertical rotation axis of the laser tracker (1) to be close to the rotation axis of a horizontal multi-tooth indexing table (2-6), and leveling the laser tracker (1);
i. the laser tracker and the horizontal multi-tooth indexing table are eccentrically adjusted, so that the vertical rotation axis of the laser tracker coincides with the rotation center of the horizontal multi-tooth indexing table in the X-axis direction and the Z-axis direction, and the laser point of the laser tracker (1) is hit to the center of the plane reflector (2-3);
j. the calibration of the vertical angle precision comprises two operation processes of forward calibration and reverse calibration, and relevant data of the forward calibration and the reverse calibration processes are recorded respectively;
k. according to the recorded data of forward calibration and reverse calibration, the rotation direction of a vertical angle encoder corresponding to the laser tracker is used as a clockwise correction curve and a counterclockwise correction curve, the correction curve is compensated into a data processor of the laser tracker, and the vertical angle measurement error of the laser tracker is reduced through the data processor until the angular position accuracy calibration is qualified.
2. The method for calibrating angular position accuracy of a laser tracker according to claim 1, wherein: in the step b, the eccentric adjustment process of the laser tracker (1) and the vertical multi-tooth indexing table (2-1) is as follows: 1, placing a standard target ball on a fixed target seat A which is more than 2m away from a laser tracker, enabling the connecting line of the center of the target ball and the rotation center of a vertical multi-tooth indexing table to be parallel to the X axis of an X-Y double-axis displacement adjustment platform, adjusting the height of the target seat A, and enabling the center point of the target ball to fall on a plane with zero pitch angle of the tracker; precisely rotating the horizontal azimuth angle of the laser tracker by 90 degrees, setting another target seat B in the laser emission direction of the laser tracker (1), adjusting the height of the target seat so that the center position of a target ball arranged on the target seat is on the pitch angle horizontal plane of the laser tracker, and recording the distance value B1 measured by the laser tracker; rotating the vertical multi-tooth indexing table (2-1) by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table, and reading a distance value B2 measured by the laser tracker at the moment; comparing the values of B1 and B2, if |B1-B2| is less than or equal to the set value, judging that the laser tracker (1) is not eccentric in the connecting line direction of the A target seat and the center of the vertical multi-tooth indexing table at the moment, if the absolute value of the B1-B2 is larger than the set value, adjusting the displacement of the X-Y biaxial displacement adjustment platform along the X axis until the absolute value of the B1-B2 is smaller than or equal to the set value; 2, rotating the laser emission direction of the laser tracker to the azimuth of the target seat A, and recording a distance value A1 measured by the laser tracker at the moment; rotating the vertical multi-tooth indexing table by 180 degrees, locking a fluted disc of the vertical multi-tooth indexing table, and reading a distance value A2 measured by the laser tracker at the moment; comparing the A1 with the A2, if the value of the absolute value A1-A2 is smaller than or equal to the set value, judging that the laser tracker is not eccentric in the direction of the connecting line of the B target seat and the center of the vertical multi-tooth indexing table at the moment, if the absolute value A1-A2 is larger than the set value, the displacement of the X-Y double-axis displacement adjustment platform along the Y axis is adjusted until the absolute value A1-A2 is smaller than or equal to the set value.
3. The method for calibrating angular position accuracy of a laser tracker according to claim 1 or 2, characterized in that: in the step c, the forward horizontal azimuth precision calibration process is as follows: locking the indexing table at the position with zero index of the vertical multi-tooth indexing table, aligning the laser emission direction of the laser tracker (1) with the plane mirror (2-3), and reading the horizontal angle value theta of the laser tracker (1) at the moment 0 The vertical multi-tooth indexing table (2-1) rotates anticlockwise to form a scale, and at the moment, the tracking head of the laser tracker (1) is used for trackingAlso automatically rotate clockwise a horizontal azimuth, record the value of theta at this time 1 The scale values of the vertical multi-tooth indexing table (2-1) are respectively rotated, and the laser tracker sequentially obtains the numerical value theta i Last data theta i For return to zero value, calculate |θ i -θ 0 The value obtained is positive return to zero error, when |theta i -θ 0 When the I is smaller than or equal to the set value, the laser tracker is judged to return to zero and pass the standard, and when the I theta is smaller than the set value i -θ 0 When the I is larger than the set value, judging that the laser tracker returns to zero and is not qualified; the reverse horizontal azimuth precision calibration process is as follows: after the forward horizontal azimuth position accuracy calibration process is completed, the horizontal angle data of the laser tracker at the moment is recorded as phi i ,φ i =θ i At the moment, the vertical multi-tooth indexing table is rotated clockwise by one scale, the tracking head of the laser tracker is also rotated anticlockwise by one horizontal azimuth angle automatically, and phi is obtained sequentially in anticlockwise order in the same way i Last data phi 0 For return to zero value, calculate |φ 0 -φ i The value obtained is the reverse zero return error, when the value is phi 0 -φ i When the I is smaller than or equal to the set value, the laser tracker is judged to return to zero and pass the standard, and when the I phi is smaller than the set value 0 -φ i And when the I is larger than the set value, judging that the laser tracker returns to zero and is unqualified.
4. A method for calibrating angular position accuracy of a laser tracker according to claim 3, wherein: in the step d, each scale value of the vertical multi-tooth indexing table (2-1) is corresponding to the value of the scale, if phi i -θ i And (3) the I is smaller than or equal to a set value, and an arithmetic average value is obtained from the I and the II to obtain a comprehensive correction curve.
5. The method for calibrating angular position accuracy of a laser tracker according to claim 4, wherein: in the step e, the adjustment of the table top of the horizontal multi-tooth indexing table (2-6) vertical to the ground plane comprises the following steps: 1 a plane reflecting mirror (2-3) is arranged at the rotation center of a horizontal multi-tooth indexing table, so that the geometric center position of the reflecting surface of a lens (2-3-1) and the center position of the horizontal multi-tooth indexing table (2-6) are enabled to be at the same timeIn accordance, erecting a theodolite right against the center position, precisely leveling the theodolite, and reading the vertical angle value P of the cross cursor reflected by the plane mirror (2-3) by using the theodolite 1 Horizontal angle value T 1 The horizontal multi-tooth dividing table is rotated for 180 degrees, and the theodolite is used for reading the vertical angle data P of the cross cursor reflected by the plane mirror 2-3 again 2 Horizontal angle value T 1 If |P 1 -P 2 I is less than or equal to a set value or I T 1 -T 2 If the I is smaller than or equal to the set value, judging that the installation state of the plane mirror meets the requirement in the direction of the earth plumb line, if the I P is 1 -P 2 I is greater than the set value or T 1 -T 2 The I is larger than the set value, and the lens (2-3-1) of the plane reflector (2-3) is adjusted until the I P 1 -P 2 I is less than or equal to a set value or I T 1 -T 2 2, placing a marble flat plate between the theodolite and the plane mirror, leveling the flat plate by using a high-precision electronic level meter, wherein the flat plate leveling precision is smaller than or equal to the set value, placing a vertical standard mirror on the flat plate, and calculating an included angle L between a 90-degree pitch angle of the theodolite and a vertical line of the horizontal ground through the vertical standard mirror 1 The vertical mirror is removed, and the value L of the pitch angle of the theodolite is read 2 Adjusting a leveling knob of the horizontal multi-tooth indexing table in the pitch angle direction until the leveling knob reaches the level L 1 -L 2 And I is smaller than or equal to a set value.
6. The method for calibrating angular position accuracy of a laser tracker according to claim 4, wherein: in the step g, the adjustment process for making the plane mirror perpendicular to the horizontal plane is as follows: 1 adjusting the level of the theodolite, aiming a plane reflecting mirror (2-3), and recording the horizontal azimuth angle of a cross cursor of the theodolite as Z 1 The horizontal multi-tooth indexing table (2-6) rotates 180 degrees, the theodolite pitching axis rotates 180 degrees and reads the horizontal azimuth angle Z again 2 If I Z 1 -Z 2 180 degrees less than or equal to the set point, judging that the installation state of the plane reflector meets the requirement in the horizontal azimuth direction of the theodolite, if the installation state of the plane reflector meets the requirement in the horizontal azimuth direction of the theodolite 1 -Z 2 The value of the absolute value of 180 degrees is larger than a set value, adjusting the lens (2-3-1) of the plane mirror (2-3) until Z 1 -Z 2 The value of the I-180 degrees is smaller than or equal to a set value; 2 placing a marble plate between the theodolite and the plane mirror, leveling the plate by using a high-precision electronic level meter, wherein the leveling precision of the plate is smaller than or equal to a set value, placing a vertical standard mirror on the plate, and calculating an included angle H between the pitch angle direction of the transverse shaft of the theodolite and the vertical line of the horizontal ground through the vertical standard mirror 1 The vertical mirror is removed, and the theodolite is used for reading the vertical angle value H of the cross cursor reflected by the plane mirror on the rotating arm 2 If |H 1 -H 2 If I is smaller than or equal to the set value, judging that the installation state of the plane reflecting mirror meets the requirement in the direction of the vertical horizontal plane, if I H 1 -H 2 The I is larger than a set value, and the posture of the lens (2-3-1) is adjusted through an adjusting frame of the plane reflecting mirror (2-3) until the I H 1 -H 2 And I is smaller than or equal to a set value.
7. The method for calibrating angular position accuracy of a laser tracker according to claim 4, wherein: in the step i, the eccentric adjustment process of the laser tracker (1) and the horizontal multi-tooth indexing table (2-6) is as follows: 1 locking a horizontal multi-tooth indexing table (2-6) at a zero position, installing a target ball C at one end of a rotating arm (2-2), and collecting data D measured by a laser tracker 1 The horizontal multi-tooth indexing table (2-6) rotates 180 degrees to lock again, and data D measured by the tracker are collected 2 If |D 1 -D 2 When the I is smaller than or equal to the set value, judging that the vertical rotation axis of the tracking head coincides with the rotation center of the horizontal multi-tooth indexing table in the X-axis direction, and if the I is D 1 -D 2 When I is larger than the set value, the X axis is adjusted to be high and low until I is D 1 -D 2 And (2) turning the horizontal multi-tooth indexing table (2-6) to 90 degrees for locking, collecting the ranging data E of the laser tracker at the moment, and calculating the absolute value E-D 1 I and I E-D 2 If the two values are smaller than or equal to the set value, judging that the vertical rotation axis of the tracking head coincides with the rotation center of the horizontal multi-tooth indexing table in the Z-axis direction, and when the value is |E-D 1 I is greater than the set point or I E-D 2| When the displacement of the Z axis is larger than the set value, the displacement of the Z axis is regulated until the displacement is |E-D 1 I and I E-D 2 Both values are smallAnd 3, turning the horizontal multi-tooth indexing table (2-6) to a zero position for locking, installing a plane mirror (2-3) at one end of a rotating arm (2-2), striking a laser spot of a laser tracker (1) on the plane mirror (2-3), checking whether a laser spot is positioned at the center of the plane mirror (2-3), and if yes, adjusting the Y axis of an X-Y-Z axis displacement adjustment platform to enable the laser spot to be positioned at the center of the plane mirror (2-3).
8. The method for calibrating angular position accuracy of a laser tracker according to claim 7, wherein: in the step j, the calibration process of the positive vertical direction angle precision is as follows: the laser emission direction of the laser tracker (1) aims at a plane reflecting mirror (2-3) positioned at one end of a rotating arm (2-2), the horizontal multi-tooth indexing table (2-6) is rotated until reaching the depression angle limit position of the laser tracker (or the lowest angle position when the tracker is actually operated according to specific conditions), the horizontal multi-tooth indexing table (2-6) is locked, and the vertical angle value omega of the laser tracker is recorded -k (k is a positive integer), then the horizontal multi-tooth dividing table (2-6) is rotated anticlockwise by a scale value, and the vertical angle value omega of the laser tracker at the moment is recorded 1-k Sequentially rotating the horizontal multi-tooth indexing table (2-6) to obtain a series of numerical values omega i Sorting and recording the values; the reverse vertical direction angle accuracy calibration process comprises the following steps: the position (omega) in the last measurement period i ) Marked as lambda i Then the horizontal multi-tooth dividing table (2-6) is rotated clockwise by a scale value, and the vertical angle value lambda of the laser tracker at the moment is recorded i Sequentially rotating the multi-tooth indexing table (2-6) to obtain a series of values lambda i When recorded to lambda -k At the time, calculate lambda -k |-|ω -k And if the value is smaller than or equal to the set value, the return to zero is judged to be qualified, and when the value is equal to lambda -k |-|ω -k And when the I is larger than the set value, judging that the laser tracker returns to zero and is unqualified.
9. The method for calibrating angular position accuracy of a laser tracker according to claim 7, wherein: in the step k, each corresponding horizontal multi-tooth indexing table (2-6)A scale value is used for the calibration of the display device, if lambda is i |-|ω i And (3) the value of I is smaller than or equal to the set value, and the value of I and II is calculated as an arithmetic average value to obtain a comprehensive correction curve.
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