CN116972075B - Magnetic preloading structure and linear platform with same - Google Patents
Magnetic preloading structure and linear platform with same Download PDFInfo
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- CN116972075B CN116972075B CN202311213813.4A CN202311213813A CN116972075B CN 116972075 B CN116972075 B CN 116972075B CN 202311213813 A CN202311213813 A CN 202311213813A CN 116972075 B CN116972075 B CN 116972075B
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- 230000036316 preload Effects 0.000 claims abstract description 55
- 239000011159 matrix material Substances 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 16
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000003754 machining Methods 0.000 abstract description 3
- 230000033001 locomotion Effects 0.000 description 17
- 230000008569 process Effects 0.000 description 12
- 230000003139 buffering effect Effects 0.000 description 11
- 239000000725 suspension Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000009423 ventilation Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a magnetic preloading structure and a linear platform with the same, belonging to the technical field of precision machining, wherein the magnetic preloading structure comprises a first substrate, an air bearing table and a bearing table which are movably matched are arranged above the first substrate, the bearing table is arranged in the air bearing table, and an air bearing is arranged on the inner side of the air bearing table; a first preload piece is arranged on the side of the air bearing table and is used for realizing the magnetic attraction of the air bearing table and the first matrix; the second preload piece is arranged on the inner side of the air bearing table and is used for realizing magnetic repulsion between the air bearing table and the bearing table. According to the invention, the first magnet is matched with the fourth magnet, and the second magnet is matched with the third magnet to form magnetic preload, so that the force balance of the air bearing table can be ensured by utilizing magnetic force, the relative position of the bearing table and the air bearing table can be controlled or ensured, and the running precision of equipment can be further ensured.
Description
Technical Field
The invention belongs to the technical field of precision machining, and particularly relates to a magnetic preloading structure and a linear platform with the same.
Background
In industries such as precision machining, precision measurement and semiconductors, linear motion stages are widely used, and with the continuous development of these industries, requirements for operation precision of the linear motion stages are increasingly higher. At present, most of linear motion platforms adopt linear guide rails or crossed roller guide rails as guiding supports, but because the guide rails are all supported in a contact way, the control precision of the linear motion platform, particularly the positioning precision, the repeated positioning precision and the straightness are difficult to improve. In addition, although a part of the linear motion platform adopts the air-float guide rail as a guiding support, the air-float guide rail is a non-contact support, and the control precision of the linear motion platform is greatly improved, the air-float guide rail has the problem of slight vibration in application, and the vibration is amplified in the long-time use process, so that the control precision of the linear motion platform is reduced.
The invention patent with the authority of CN103790963B discloses a split type air foot, separates an air floatation structure and a magnetic pre-load structure, ensures that the air floatation structure cannot be deformed under the action of magnetic pre-load force and cannot touch a platform, and the design can avoid the damage of the air floatation structure and the defect of the traditional vacuum pre-load structure. The plane guide device formed on the basis can well meet the rigidity requirement of air floatation, so that the stability of a motion platform supported by the plane guide device is greatly improved.
The invention patent with the publication number US9079279B2 discloses an active compensation platform comprising: a guide bracket having first and second guide surfaces perpendicular to each other; the table has first and second sides opposite the first and second guide surfaces and has air bearings on the first and second sides; driving a linear motor to linearly move the workbench along the x-axis direction; a plurality of magnetic actuators apply a magnetic preload between the guide bracket and the table and change a magnetic force between the guide bracket and the table to compensate for a movement error generated in the table.
However, the existing magnetic preload structure also shifts during use, thereby affecting the control accuracy of the linear motion stage.
Disclosure of Invention
The invention aims to provide the magnetic preloading structure with simple structure, easy processing and long service life and the linear platform with the structure, and the magnetic preloading structure has the beneficial effects of improving stability, running precision and positioning precision.
The technical scheme adopted by the invention for achieving the purpose is as follows:
the magnetic preloading structure comprises a first substrate, wherein an air floatation table and a bearing table which are movably matched are arranged above the first substrate, the bearing table is arranged in the air floatation table, and an air floatation bearing is arranged in the air floatation table;
the air bearing is arranged on the outer side of the bearing table, and the air bearing is connected with the air bearing;
a first preload piece is arranged on the side of the air bearing table and is used for realizing the magnetic attraction of the air bearing table and the first matrix; the second preload piece is arranged on the inner side of the air bearing table and is used for realizing magnetic repulsion between the air bearing table and the bearing table.
By adopting the technical scheme, the air bearing can be used for realizing that the air bearing table is in a suspension state, so that the non-contact movement is realized. Under the air bearing table in a suspension state, the stability of the air bearing table can be improved through the cooperation of the first preload piece and the second preload piece, the stress balance of the air bearing table is ensured, the air bearing table is prevented from being offset, inclined and other defects under the running state, the bearing table is always in a relatively central position, the magnetic force of the first preload piece and the second preload piece is utilized to control or ensure that the position of the bearing table is in the central state, and therefore the running precision and the positioning precision are improved.
In addition, the load limit of the air bearing table and the bearing table can be adjusted by utilizing the cooperation of the first preload piece and the second preload piece, the partial pressure of the air bearing table and the bearing table due to the gravity of the materials can be shared in the operation process, and the influence of the dead weight of the materials on the integral structure is reduced. Under the action of high-speed air flow of the air bearing, the air pressure between the air bearing table and the bearing table is increased, the magnetic fields of the first preload piece and the second preload piece are utilized to help avoid or weaken the air hammer phenomenon, and the damage of the high-pressure air flow to the air bearing table, the bearing table and the like is reduced.
According to one embodiment of the invention, the first preload member comprises a first magnet and a fourth magnet which are arranged up and down correspondingly, the first magnet is arranged at the side of the air bearing table, and the fourth magnet is arranged above the first basal body; the fourth magnet is an electromagnet and can be attracted with the first magnet.
The second preload piece comprises a second magnet and a third magnet which are arranged up and down correspondingly, and the second magnet and the third magnet are arranged on the inner side of the air bearing table and are positioned below the bearing table and above the first basal body; the third magnet is an electromagnet and can repel the second magnet.
The air bearing table is characterized in that a first magnet is arranged on the side of the air bearing table, a second magnet and a third magnet which are arranged vertically and correspondingly are arranged in the air bearing table, the third magnet is an electromagnet and can repel the second magnet, the second magnet is arranged between the air bearing table and the upper surface of the bearing table, and the third magnet is embedded in the upper surface of the bearing table; a fourth magnet is arranged above the first substrate, and the fourth magnet is an electromagnet; the fourth magnet is arranged below the first magnet. In other embodiments, the positions between the first magnet and the fourth magnet, and between the second magnet and the third magnet may be interchanged.
Therefore, after the fourth magnet and the third magnet are electrified, attraction with the first magnet and repulsion with the second magnet can be respectively realized, so that the regulation and control of the magnetic preloading effect and the load capacity can be realized according to the needs, and the practicability and the applicability are further improved.
The first preload piece can prevent the overlarge distance between the air bearing table and the bearing table in the suspension state; and can provide the buffering for the upper and lower removal of air supporting platform in the air supporting bearing ventilation, the in-process of cutting off the air, prevent that it from taking place to adjust out of control because of the atress unbalance between suddenly, avoid its and parts such as plummer violent collision to reduce wearing and tearing, increase of service life.
According to one embodiment of the invention, a first shell and a second shell are arranged in the air bearing table, the first shell is sleeved in the second shell, and the first shell and the second shell are both arranged between the air bearing table and the bearing table; the second magnet is arranged in the first shell, and the third magnet is arranged below the second shell.
A gap is arranged between the outer wall of the first shell and the inner wall of the second shell, and the first shell is fixedly connected with the bearing table.
Further, the outer side wall of the first housing is provided with a first concave surface.
Further, the bottom of the second shell is provided with a protruding extension plate, a gap is arranged between the two opposite extension plates, and the second magnet is arranged below the gap.
The first concave surface on the side wall of the first shell is arranged, so that the first shell is not contacted with the second shell, and the bottom of the first shell is prevented from being contacted with the inner side wall of the second shell by the arrangement of the extension plate.
The first shell and the second shell are made of iron or nickel, have a certain shielding effect on a magnetic field, and can relatively limit the magnetic force of the second magnet and the magnetic force of the third magnet to be transmitted, so that the magnetic force relation between the second magnet and the third magnet is ensured, and the floating state between the air bearing table and the bearing table is kept stable through the mutual repulsive force between the second magnet and the third magnet.
The first housing and the second housing are not in contact in a normal state. In addition, the first shell is provided with a first concave surface, and the second shell is provided with an extension plate, so that the first shell and the second shell can be prevented from being contacted. Therefore, when the position of the first base body or the bearing table is changed, the first shell body is contacted with the second shell body, at this time, due to the arrangement of the first concave surface, the extension plate and the like, the contact area of the first concave surface and the extension plate can be greatly reduced, the bearing area of sliding friction is further reduced, the stress is increased, the abrasion between the first shell body and the second shell body can be reduced, noise is easily formed when the first concave surface and the extension plate are contacted, and a warning effect is formed.
In addition, the arrangement of the first shell and the second shell plays a role in guiding the floating or falling process of the air bearing table, and can limit the left-right offset of the air bearing table relative to the bearing table, namely, the bearing table is kept in a centering state relative to the air bearing table, so that the moving stability of the air bearing table is improved.
According to one embodiment of the invention, the outer surface of the second shell is provided with a guide vane, and the surface of the guide vane is provided with air guide lines.
Further, the guide vane is of a square sheet structure, and the air guide lines are of a stripe structure. The plurality of guide vanes are uniformly distributed on the outer surface of the second shell, and a gap is reserved between two adjacent guide vanes.
Because a plurality of air bearing are configured between the air bearing table and the bearing table, the air bearing is distributed around the bearing table, and the air bearing below the bearing table is located at the side of the second shell. The air guide lines on the second shell and gaps between the air guide sheets are utilized to guide air flow, so that the air flow is driven to flow in other directions, and the air flow is prevented from moving in the opposite direction to the direction of the air bearing.
The extending directions of the stripe-shaped air guide lines on the two adjacent guide plates can be the same or different. The extending directions are the same, and the air flow can be guided to flow in the same direction as the whole; when the extending directions are different, a crisscrossed stripe structure can be formed, so that air flow can be dispersed; thereby ensuring that the air flow is diffused in a direction away from the air bearing.
According to another aspect of the invention, there is provided a linear platform having any one of the magnetic preloading structures described above, a first preloading piece being provided on a lateral side of the air bearing table, the first preloading piece including a preloading plate connected to a sidewall of the air bearing table, the first magnet being embedded in the preloading plate; the fourth magnet is arranged below the pre-load plate and extends along the length direction of the bearing table.
The air bearing table is matched with the linear motor, and the linear motor can drive the air bearing table to linearly reciprocate; the linear motor comprises a stator and a rotor; the stator is arranged on the upper surface of the bearing table, and the rotor is arranged on the inner bottom surface of the air bearing table and corresponds to the stator. Specifically, the mover of the linear motor is matched with the air bearing table, and the stator is matched with the bearing table.
Further, the linear platform is provided with a grating ruler and a grating reading head which are oppositely arranged, the grating ruler is matched with the bearing table, and the grating reading head is matched with the air bearing table.
Therefore, the linear motor can start the linear movement of the air bearing table and the bearing table, and the accurate positioning of the air bearing table can be realized by utilizing the matching of the grating ruler and the grating reading head.
According to one embodiment of the invention, the first magnet is sleeved with a wrapping piece, and the inside of the wrapping piece is provided with a buffer cavity which is communicated with the outside.
Further, the wrapping piece is made of rubber, silica gel or similar materials.
Further, a buffer plate is arranged below the wrapping piece, an inner channel is arranged in the buffer plate, and the inner channel is communicated with the buffer cavity; the lateral wall of parcel spare is equipped with first through-hole, and first through-hole is linked together with the second cushion chamber, and the lateral wall of buffer board is equipped with the second through-hole, and the second through-hole is linked together with interior passageway.
Further, an auxiliary cavity is arranged in the buffer cavity.
So, can form the protection to the outside of first magnet through setting up the parcel outside at first magnet, avoid exposing completely to at the in-process that first magnet removed, the effect that causes the magnetic force can appear magnetism and inhale the condition of debris, set up the parcel and can conveniently clear up. In addition, in the air bearing working process, the air bearing can be caused to move up and down when ventilation or air interruption is carried out, and the air bearing is provided with a certain gravity, so that when no air bearing is provided, the air bearing can be quickly lowered, and a buffering effect can be generated through a wrapping piece wrapped outside the first magnet, so that the air bearing and a fourth magnet at the bottom can form buffering. Specifically, when the air bearing table is supported by air, the buffer cavity, the inner channel and the like in the wrapping piece are in an inflated state, and the air can normally enter and exit from the first through hole and the second through hole; when the air bearing table descends, the air can be discharged from the inner channel through the second through hole, and a buffering effect is formed along with deformation of the wrapping piece.
On the other hand, if serious accidents such as collision occur in the whole device stroke moving process, when collision occurs, the contact form of the air bearing table and the bearing table is unstable, and then the relative position angles of the first magnets on two sides of the air bearing table and the wrapping piece relative to the fourth magnets are possibly unstable, and friction buffering can be formed between the wrapping piece and the fourth magnets at the bottom, so that the severity of collision buffering is reduced.
Compared with the prior art, the invention has the following beneficial effects:
1. the first preload piece and the second preload piece are arranged, so that the stress balance of the air floating platform is ensured, the defects such as offset, inclination and the like are prevented under the running state, and the stability of the air floating platform is improved; the position of the bearing table is ensured to be in a centered state, so that the running precision and the positioning precision are improved;
2. the load of the air bearing table and the bearing table is adjusted through the matching of the first preload piece and the second preload piece, so that the air hammer phenomenon is avoided or weakened, and the damage of high-pressure air flow to the air bearing table, the bearing table and the like is reduced;
3. through the arrangement of the first shell and the second shell, the magnetic force relation between the second magnet and the third magnet is ensured, and the suspension state between the air bearing table and the bearing table is kept stable;
4. the first magnet is matched with the wrapping piece, so that on one hand, the protection of the first magnet is enhanced, and the cleaning is convenient; on the other hand, the buffer can be formed for the up-and-down movement of the air bearing table; the crash cushion severity can also be reduced.
Therefore, the magnetic preloading structure and the linear platform with the structure have the advantages of simple structure, easiness in processing and long service life, and have the advantages of improving stability, running precision and positioning precision.
Drawings
FIG. 1 is a schematic diagram of a magnetic preload device and a linear stage having the same according to embodiment 1 of the present invention;
FIG. 2 is a schematic view of the internal structure of the linear platform shown in FIG. 1 in a floating state of the air bearing table;
FIG. 3 is an enlarged partial schematic view of portion A of FIG. 2;
FIG. 4 is a schematic view of a baffle according to embodiment 1 of the present invention;
fig. 5 is a schematic structural view of a packing member according to embodiment 2 of the present invention.
Reference numerals: a first substrate 10; an air bearing table 11; a carrying table 12; a hollow groove 13; an air bearing 14; a linear motor 20; a stator 21; a mover 22; a grating scale 23; a grating reading head 24; a first magnet 31; a second magnet 32; a third magnet 33; a fourth magnet 34; a preload plate 35; a first housing 41; a second housing 42; a first concave surface 43; an extension plate 44; a deflector 45; a wrapper 50; a first through hole 51; a second through hole 52; a buffer chamber 53; an auxiliary cavity 54; a buffer plate 55; an inner channel 56.
Detailed Description
The technical scheme of the invention is further described in detail below with reference to the detailed description and the accompanying drawings. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention.
Example 1
Fig. 1 to 4 schematically show a magnetic preload structure and a linear stage having the same according to an embodiment of the present invention. As shown in the figure, the device comprises a first substrate 10, wherein an air floating table 11 and a bearing table 12 which are movably matched are arranged above the first substrate 10, the air floating table 11 is of an inverted U-shaped structure, an empty slot 13 is arranged at the bottom of the bearing table 12, and the air floating table 11 is sleeved outside the bearing table 12. The air bearing 14 is disposed in the air bearing 11, the air bearing 14 is dispersed around the bearing 12, and the air bearing 14 can cause the air bearing 11 to float relative to the bearing 12 after high-pressure gas is input.
The air floatation table 11 is matched with the linear motor 20, and the linear motor 20 can drive the air floatation table 11 to linearly reciprocate; the linear motor 20 includes a stator 21 and a mover 22. The stator 21 is provided on the upper surface of the bearing table 12, and the mover is provided on the inner bottom surface of the air bearing table 11 and corresponds to the stator 21. The linear platform is provided with a grating ruler 23 and a grating reading head 24 which are oppositely arranged, the grating ruler 23 is matched with the bearing table 12, and the grating reading head 24 is matched with the air bearing table 11. In this way, the linear motor 20 can start the linear movement of the air bearing table 11 and the bearing table 12, and the accurate positioning of the air bearing table 11 can be realized by utilizing the cooperation of the grating ruler 23 and the grating reading head 24.
The magnetic preloading structure comprises a first preloading piece arranged on the side of the air bearing table 11 and a second preloading piece arranged on the inner side of the air bearing table 11, wherein the first preloading piece is used for achieving magnetic attraction between the air bearing table 11 and the first substrate 10, and the second preloading piece is used for achieving magnetic repulsion between the air bearing table 11 and the bearing table 12.
The first pre-load comprises a first magnet 31 and a fourth magnet 34 which are correspondingly arranged up and down, and the first magnet 31 is arranged at the side of the air bearing table 11. Specifically, the first preload member further includes a preload plate 35 disposed at a side of the air bearing table 11, the preload plate 35 is connected to a sidewall of the air bearing table 11, and the first magnet 31 is embedded in the preload plate 35. The fourth magnet 34 is provided above the first base 10 and below the preload plate 35, and extends along the longitudinal direction of the stage 12. The fourth magnet 34 is an electromagnet, and is attracted to the first magnet 31 after being energized.
The second pre-load piece comprises a second magnet 32 and a third magnet 33 which are arranged up and down correspondingly, and the second magnet 32 and the third magnet 33 are arranged on the inner side of the air bearing table 11. Specifically, the second magnet 32 is disposed between the air bearing table 11 and the bearing table 12, and the third magnet 33 is embedded on the upper surface of the bearing table 12; the third magnet 33 is an electromagnet, and can repel the second magnet 32 after being energized.
The air bearing 14 can be used for realizing the suspension state of the air bearing table 11, thereby realizing the contactless movement. Under the suspension state of the air bearing table 11, the stability of the air bearing table 11 can be improved through the cooperation of the first preload piece and the second preload piece, the stress balance of the air bearing table is ensured, the air bearing table is prevented from being offset, inclined and other defects under the running state, the bearing table 12 is always in a relatively central position, the position of the bearing table 12 can be controlled or ensured to be in the central state by utilizing the magnetic force of the first preload piece and the second preload piece, and therefore the running precision and the positioning precision are improved.
In addition, by utilizing the cooperation of the first preload piece and the second preload piece, the load limit of the air bearing table 11 and the bearing table 12 can be adjusted, partial pressure of the air bearing table 11 and the bearing table 12 caused by the gravity of the materials can be shared in the operation process, and the influence of the dead weight of the materials on the overall structure is reduced. Under the action of the high-speed air flow of the air bearing 14, the air pressure between the air bearing table 11 and the bearing table 12 is increased, the magnetic fields of the first preload piece and the second preload piece are used for helping to avoid or weaken the air hammer phenomenon, and the damage of the high-pressure air flow to the air bearing table 11, the bearing table 12 and the like is reduced.
The first preload can prevent the excessive spacing between the air bearing table 11 and the bearing table 12 in the suspended state; and can provide buffering for the up-and-down movement of the air bearing 11 in the process of ventilation and air interruption of the air bearing 14, prevent the air bearing from being out of control due to adjustment caused by sudden stress unbalance, and avoid the severe collision with parts such as the bearing table 12, thereby reducing abrasion and prolonging service life.
The first housing 41 and the second housing 42 are disposed inside the air bearing table 11, and both are provided between the air bearing table 11 and the load bearing table 12. The first casing 41 is sleeved inside the second casing 42, and a gap is provided between the outer wall of the first casing 41 and the inner wall of the second casing 42. The first concave surface 43 is arranged on the outer side wall of the first housing 41.
The second housing 42 penetrates up and down, and an opening is also provided at the bottom of the first housing 41. The top of the first casing 41 is connected to the inner surface of the air bearing table 11, the bottom of the second casing 42 is connected to the upper surface of the bearing table 12, the second magnet 32 is disposed inside the first casing 41, and the third magnet 33 is embedded inside the first base 10. The bottom of the second housing 42 is provided with an inwardly protruding extension plate 44, with a gap between two opposing extension plates 44, under which the second magnet 32 is disposed.
The arrangement of the extension plate 44 also prevents the bottom of the first housing 41 from contacting the inner sidewall of the second housing 42 due to the arrangement of the first concave surface 43 on the sidewall of the first housing 41 so that the first housing 41 and the second housing 42 are not contacted.
The first casing 41 and the second casing 42 are made of iron or nickel, have a certain shielding effect on the magnetic field, and can relatively limit the magnetic force of the second magnet 32 and the third magnet 33 to be transmitted, so that the magnetic force relationship between the two is ensured, and the suspension state between the air bearing table 11 and the bearing table 12 is kept stable through the mutual repulsive force between the two.
The first housing 41 is provided with the first concave surface 43, and the second housing 42 is provided with the extension plate 44, so that contact between the first housing 41 and the second housing 42 can be avoided. In this way, when the position of the first substrate 10 or the bearing table 12 changes due to the external force, the first housing 41 and the second housing 42 will contact with each other due to the change of the distance between the bearing table 12 and the air bearing table 11, and at this time, due to the arrangement of the first concave surface 43, the extension plate 44, etc., the contact area between the two can be greatly reduced, so as to reduce the bearing area of the sliding friction, and increase the stress. In this process, the outer surface of the first housing 41 rubs against the inner surface of the second housing 42, and the first concave surface 43 causes turbulence of the gas between the first housing 41 and the second housing 42, which is easy to generate noise and alert; in addition, the bottom of the first housing 41 may abut against the extension plate 44, and even slide relatively, so that noise warning may be generated.
When the air bearing table 11 is suspended upward relative to the bearing table 12, the first housing 41 and the second housing 42 can avoid unstable or inclined end surfaces caused by sudden falling of the air bearing 14 due to air interruption, that is, the first housing 41 and the second housing 42 play a guiding role. Further, the sleeved structure of the first casing 41 and the second casing 42 can ensure stability of the relative position between the air bearing table 11 and the bearing table 12 in the horizontal direction, that is, helps to keep the bearing table 12 in a centered state relative to the air bearing table 11, and avoids the situation that the air bearing table 11 has a larger side spacing and a smaller side spacing compared with the bearing table 12. In this way, the stability of the movement of the air bearing table 11 can be improved by providing the first housing 41 and the second housing 42.
In addition, under the condition that the air bearing 14 is not inflated, the air bearing table 11 falls, in the process, the bottom of the first shell 41 contacts with the extension plate 44 at the bottom of the second shell 42 to play a role in braking, and the arrangement of the extension plate 44 plays a certain role in buffering the falling of the first shell 41, especially as shown in fig. 3, the tail end of the extension plate 44 is provided with an inclined plane, so that a certain space is reserved between the extension plate 44 and the third magnet 33 or the bearing table 12 below the extension plate, and the buffering effect can be further improved.
The outer surface of the second housing 42 is provided with a guide vane 45, as shown in fig. 4, and the surface of the guide vane 45 is provided with air guide lines. The guide vane 45 has a square sheet structure, and the air guide lines have a stripe structure. The plurality of guide vanes 45 are uniformly distributed on the outer surface of the second casing 42, and a gap is reserved between two adjacent guide vanes 45. Because a plurality of air bearing 14 are disposed between the air bearing table 11 and the bearing table 12, the plurality of air bearing 14 are distributed around the bearing table 12, and thus the air bearing 14 above the bearing table 12 is located at the side of the second housing 42. The air guide vane 45 is arranged on the outer surface of the second shell 42, and can guide the air flow by utilizing the air guide lines on the air guide vane and gaps between the air guide vane 45, so that the air flow is driven to flow in other directions, and the air flow is prevented from moving in the direction of the air bearing 14 in the reverse direction.
Example 2
Fig. 5 schematically shows a magnetic preloading structure and a linear stage having the same according to another embodiment of the present invention, which is different from example 1 in that:
the first magnet 31 is sleeved with a wrapping member 50, and the wrapping member 50 is made of rubber. The interior of the wrapper 50 is provided with a buffer cavity 53. In this embodiment, an auxiliary cavity 54 is further provided in the buffer cavity 53, and a buffer plate 55 is disposed below the wrapping member 50. The sidewall of the packing member 50 is provided with a first through hole 51, and the first through hole 51 communicates with the buffer cavity 53. An inner channel 56 is arranged in the buffer plate 55, and the inner channel 56 is communicated with the buffer cavity 53; the side wall of the buffer plate 55 is provided with a second through hole 52, and the second through hole 52 communicates with the inner channel 56. The air flow may enter the inside of the buffer chamber 53 through the first through hole 51 and may be discharged from the second through hole 52 again through the inner passage 56.
So, through set up the parcel piece 50 in the outside of first magnet 31 can form the protection to the outside of first magnet 31, avoid exposing completely to at the in-process that first magnet 31 removed, the effect that causes the magnetic force can appear magnetism and inhale the condition of debris, set up parcel piece 50 and can conveniently clear up. In addition, in the working process of the air bearing 14, the air bearing 11 can be moved up and down when ventilation or air interruption occurs, and the air bearing 11 has a certain gravity, so that when no air bearing is provided, the air bearing 11 can be quickly lowered, and the wrapping piece 50 wrapped outside the first magnet 31 can generate a buffering effect, so that the air bearing can form a buffer with the fourth magnet 34 and the like at the bottom. Specifically, when the air bearing table 11 is supported by air, the buffer cavity 53, the inner channel 56 and the like in the wrapping member 50 are in an inflated state, and the air can normally enter and exit from the first through hole 51 and the second through hole 52; when the air bearing table 11 descends, air can be discharged from the inner channel 56 through the second through holes 52, and a buffering effect is formed along with deformation of the wrapping member 50.
On the other hand, if serious accidents such as collision occur during the whole device travel, the contact form of the air bearing table 11 and the bearing table is unstable when the collision occurs, and thus the relative position angles of the first magnet 31 and the wrapping member 50 on both sides of the air bearing table 11 relative to the fourth magnet 34 may be unstable, and the existence of the wrapping member 50 can form friction buffer with the fourth magnet 34 on the bottom, so that the severity of collision buffer is reduced.
In addition, during the rapid descending process of the air bearing table 11, the buffer cavity 53, the inner channel 56, the first through hole 51 and the second through hole 52 form a flow channel of air flow, and air flow is formed outside the wrapping member 50, so that impurities are prevented from approaching or entering the wrapping member 50, impurities are promoted to be far away from the first magnet 31, and cleaning difficulty of the preload plate 35, the side wall of the air bearing table 11 and the like is further reduced. In addition, the wrapping member 50 is used for forming air flow, so that mixing of air at the side of the air bearing table 11 is facilitated, the air pressure at the inner side and the air pressure at the outer side of the air bearing table 11 are facilitated to be consistent as soon as possible, and further stability of the falling process of the air bearing table 11 is ensured.
Conventional operations in the operation steps of the present invention are well known to those skilled in the art, and are not described herein.
While the foregoing embodiments have been described in detail in connection with the embodiments of the invention, it should be understood that the foregoing embodiments are merely illustrative of the invention and are not intended to limit the invention, and any modifications, additions, substitutions and the like made within the principles of the invention are intended to be included within the scope of the invention.
Claims (7)
1. The utility model provides a magnetic preloading structure, includes first base member (10), the top of first base member (10) disposes movable fit's air supporting platform (11) and plummer (12), plummer (12) locate air supporting platform (11) inside, air supporting bearing (14) are disposed in air supporting platform (11) inside; it is characterized in that the method comprises the steps of,
a first preload piece is arranged on the side of the air bearing table (11) and is used for realizing the magnetic attraction of the air bearing table (11) and the first matrix (10); a second preload piece is arranged on the inner side of the air bearing table (11) and is used for realizing the magnetic repulsion between the air bearing table (11) and the bearing table (12);
the second preload piece comprises a second magnet (32) and a third magnet (33) which are arranged up and down correspondingly, and the second magnet (32) and the third magnet (33) are arranged on the inner side of the air floating platform (11); the third magnet (33) is an electromagnet and can repel the second magnet (32);
a first shell (41) and a second shell (42) are arranged on the inner side of the air floating platform (11), the first shell (41) is sleeved inside the second shell (42), and the first shell and the second shell are both arranged between the air floating platform (11) and the bearing platform (12); the second magnet (32) is arranged in the first shell (41), and the third magnet (33) is arranged below the second shell (42); a gap is provided between the first housing (41) and the second housing (42).
2. A magnetic preloading structure as defined in claim 1, wherein,
the first preload piece comprises a first magnet (31) and a fourth magnet (34) which are arranged up and down correspondingly, the first magnet (31) is arranged on the side of the air bearing table (11), and the fourth magnet (34) is arranged above the first base body (10); the fourth magnet (34) is an electromagnet and can attract the first magnet (31).
3. A magnetic preloading structure as defined in claim 2, wherein,
an extending plate (44) protruding inwards is arranged at the bottom of the second shell (42), a gap is arranged between the extending plates (44) which are oppositely arranged, and the third magnet (33) is arranged below the gap.
4. A magnetic preloading structure as defined in claim 3, wherein,
the outer surface of the second shell (42) is provided with a guide vane (45), and the surface of the guide vane (45) is provided with air guide lines.
5. A linear stage having a magnetic preload structure as defined in any one of claims 2-4,
the first preload member comprises a preload plate (35) connected with the side wall of the air bearing table (11), and the first magnet (31) is embedded in the preload plate (35); the fourth magnet (34) is arranged below the pre-load plate (35) and extends along the length direction of the bearing table (12);
the air floating table (11) is matched with the linear motor (20), and the linear motor (20) can drive the air floating table (11) to linearly reciprocate; the linear motor (20) comprises a stator (21) and a rotor (22), wherein the stator (21) is arranged on the upper surface of the bearing table (12), and the rotor (22) is arranged on the inner bottom surface of the air bearing table (11) and corresponds to the stator (21).
6. A linear platform according to claim 5, wherein,
the outside cover of first magnet (31) is equipped with parcel piece (50), the below of parcel piece (50) is disposed buffer board (55).
7. A linear platform according to claim 5, wherein,
the linear motor (20) is provided with a grating ruler (23) and a grating reading head (24) which are oppositely arranged, the grating ruler (23) is matched with the bearing table (12), and the grating reading head (24) is matched with the air floatation table (11).
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| CN202311213813.4A CN116972075B (en) | 2023-09-20 | 2023-09-20 | Magnetic preloading structure and linear platform with same |
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| CN202311213813.4A CN116972075B (en) | 2023-09-20 | 2023-09-20 | Magnetic preloading structure and linear platform with same |
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| CN117072561B (en) * | 2023-10-18 | 2023-12-19 | 无锡星微科技有限公司 | Combinable multi-shaft structure and linear motion platform with same |
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