CN116899644B - Photoelectric micro-fluidic device and system - Google Patents
Photoelectric micro-fluidic device and system Download PDFInfo
- Publication number
- CN116899644B CN116899644B CN202311169188.8A CN202311169188A CN116899644B CN 116899644 B CN116899644 B CN 116899644B CN 202311169188 A CN202311169188 A CN 202311169188A CN 116899644 B CN116899644 B CN 116899644B
- Authority
- CN
- China
- Prior art keywords
- microfluidic
- cavity
- array
- micro
- flow dividing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000003491 array Methods 0.000 claims abstract description 24
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000005693 optoelectronics Effects 0.000 claims description 15
- 239000007864 aqueous solution Substances 0.000 claims description 6
- 150000004812 organic fluorine compounds Chemical class 0.000 claims description 3
- 238000002474 experimental method Methods 0.000 abstract description 14
- 238000004458 analytical method Methods 0.000 abstract description 13
- 238000005516 engineering process Methods 0.000 abstract description 10
- 239000002245 particle Substances 0.000 abstract description 9
- 238000011160 research Methods 0.000 abstract description 9
- 239000011521 glass Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000608 laser ablation Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012576 optical tweezer Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011325 microbead Substances 0.000 description 2
- 239000011859 microparticle Substances 0.000 description 2
- 239000000178 monomer Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 1
- 238000004113 cell culture Methods 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 238000004720 dielectrophoresis Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 235000015220 hamburgers Nutrition 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/50273—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the means or forces applied to move the fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
- B01L2400/0424—Dielectrophoretic forces
Abstract
The invention provides a photoelectric microfluidic device and a system, which belong to the technical field of photoelectric tweezers, wherein the photoelectric microfluidic device comprises: a lower substrate, the surface of which is plated with a photoelectric film; the microfluidic array assembly is positioned on the lower substrate and comprises at least one group of microfluidic arrays, each group of microfluidic arrays are arranged in parallel, and at least one group of microfluidic arrays is provided with at least one microfluidic cavity; the surface of the upper substrate is plated with a conductive film, and one surface with the conductive film is connected with the micro-fluid array component. According to the embodiment of the invention, a large number of micro-objects can be respectively led into micro-fluid cavities in the independent micro-fluid array components for observation, analysis and research by utilizing the photoelectric tweezers technology, and more micro-object particles can be researched by one experiment, so that the research efficiency of the micro-objects is improved, and the analysis and experiment cost is reduced.
Description
Technical Field
The invention belongs to the technical field of photoelectric tweezers, and particularly relates to a photoelectric microfluidic device and a system.
Background
In the fields of biology, medicine and the like, targets with micro-nano scale such as cells, synthetic microbeads and the like are often involved, and the activities and the performances of the targets need to be independently analyzed and studied. In the independent research and analysis of the micro-object, an operation technology called optical tweezers is often used, and the micro-object can be controlled in a non-contact manner, so that the influence on the micro-object is reduced, and the accuracy and reliability of an experimental result are improved. The photoelectric tweezers technology is widely applied to the analysis and research in the fields of biology, medicine and the like at present, and is mainly characterized in the manufacture and application of a photoelectric microfluidic device, a target object to be analyzed is guided into a photoelectric microfluidic chip, and the photoelectric tweezers technology is used for controlling the target object to finish the analysis and verification of the target object.
The related technology can preliminarily meet the use requirements of researchers in the fields of biomedicine, chemical analysis and the like by manufacturing a microfluidic flow channel through laser ablation, and has the advantages of simple manufacturing process, easy operation and low cost.
However, burrs and curves exist at the edges of the flow channels manufactured by the laser ablation process, meanwhile, the laser ablation precision is limited, and some micro structures cannot be manufactured, so that the manufactured photoelectric microfluidic device is simple in structure, the number of analyzable monomers in each experiment is small, the experiment amount has to be increased, and the cost of the analytical research experiment is increased. And along with the higher and higher use demands of researchers, the photoelectric microfluidic device formed by the simple microfluidic fence structure can not meet the demands of experiments.
Disclosure of Invention
The invention provides a photoelectric microfluidic device and a system, which can solve the technical problems that the photoelectric microfluidic device has a simple structure, the number of analyzable monomers in each experiment is small, the experiment amount has to be increased, and the cost of an analytical research experiment is increased.
The technical scheme provided by the invention is as follows:
in one aspect, there is provided an optoelectronic microfluidic device comprising:
a lower substrate, the surface of which is plated with a photoelectric film;
the microfluidic array assembly is positioned on the lower substrate and comprises at least one group of microfluidic arrays, each group of microfluidic arrays are arranged in parallel, and at least one group of microfluidic arrays are provided with at least one microfluidic cavity;
and the surface of the upper substrate is plated with a conductive film, and one surface with the conductive film is connected with the micro-fluid array component. The conductive film is a conductive film having high light transmittance.
In an alternative embodiment, the microfluidic cavities are arranged at intervals, and the microfluidic cavities are provided with inlets, and the opening direction of the inlets is opposite to the flowing direction of the microfluid;
the diameter of the inlet is 2-10 times of the grain diameter of the micro target.
In an alternative embodiment, the inlet of the present microfluidic cavity is opposite the cavity back of the next microfluidic cavity, and the cavity back of the present microfluidic cavity is opposite the inlet of the previous microfluidic cavity.
In an alternative embodiment, adjacent microfluidic chambers are spaced apart a predetermined distance that is 5-10 times the size of the micro-objects.
In an alternative embodiment, the microfluidic array further comprises: a baffle and a diverter assembly;
the flow distribution assembly is connected with the guide plate, and the flow distribution assembly and the guide plate form the micro-fluid cavity.
In an alternative embodiment, the flow dividing assembly comprises a first flow dividing plate, a second flow dividing plate and a third flow dividing plate which are sequentially connected, the first flow dividing plate is connected with the flow guiding plate, a first included angle is formed between the first flow dividing plate and the second flow dividing plate, and a second included angle is formed between the second flow dividing plate and the third flow dividing plate;
the first, second, third and baffle plates form the microfluidic cavity.
In an alternative embodiment, the shunt assembly includes a shunt fence, the shunt fence is connected with the deflector, the shunt fence and the deflector form the microfluidic cavity, the shunt fence is an arc fence, and the arc fence arc face is oriented towards the deflector.
In an alternative embodiment, the device further comprises modifying the substrate and the sidewall of the microfluidic cavity, including injecting an aqueous solution containing fluorinated organic compounds into the microfluidic cavity, and completely displacing the aqueous solution with a microfluidic medium after a predetermined period of time to obtain a modified microfluidic cavity.
In an alternative embodiment, the microfluidic cavity of the present microfluidic array is opposite the microfluidic cavity of the next microfluidic array, opposite the microfluidic cavity of the previous microfluidic array;
and/or the microfluidic cavity of the present microfluidic array is opposite to the microfluidic cavity of the next microfluidic array and opposite to the microfluidic cavity of the previous microfluidic array;
and/or the microfluidic cavity of the present microfluidic array is opposite the microfluidic cavity of the next microfluidic array, opposite the microfluidic cavity of the previous microfluidic array.
In another aspect, there is provided an optoelectronic microfluidic system comprising any of the devices described above.
The method provided by the embodiment of the invention has at least the following beneficial effects:
the device provided by the embodiment of the invention can respectively guide a large number of micro-objects into the micro-fluid cavities in the independent micro-fluid array components for observation, analysis and research by utilizing the photoelectric tweezers technology, and can research more micro-object particles by one experiment, thereby improving the research efficiency of the micro-objects, reducing the analysis and experiment cost and shortening the experiment period.
Drawings
The foregoing and other objects, features and advantages of the disclosure will be apparent from the following more particular descriptions of exemplary embodiments of the disclosure as illustrated in the accompanying drawings wherein like reference numbers generally represent like parts throughout the exemplary embodiments of the disclosure.
Fig. 1 shows a schematic structural diagram of an optoelectronic microfluidic device;
FIG. 2 shows a schematic diagram of a microfluidic array assembly;
FIG. 3 shows a schematic diagram of a detailed structure of a microfluidic array assembly;
FIG. 4 shows another schematic structural view of a microfluidic array assembly;
fig. 5 shows a schematic diagram of microfluidic array assembly fabrication.
Wherein, the reference numerals are as follows:
1-a lower substrate, 2-a microfluidic array assembly, 3-an upper substrate, and a 101-an optoelectronic film; 100-microfluidic chamber, 102-inlet, 21-baffle, 22-first baffle, 23-second baffle, 24-third baffle, 25-diversion fence.
Detailed Description
Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While embodiments of the present disclosure are illustrated in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
In recent years, the manipulation of micro-nano biological particles by using an optoelectronic microfluidic device becomes a new micro-particle manipulation technology. The principle of the flexible control tool based on the photoelectric effect is as follows: the photoelectric microfluidic device is of a three-layer hamburger structure, liquid containing sample particles is located between an upper substrate 3 coated with an ITO (indium-tin oxide) film and a lower substrate 1 of the film layer, wherein the film layer is deposited on ITO glass of the lower substrate 1, the film layer material has higher resistance under the condition of no illumination, the conductivity of the film layer is rapidly improved when the film layer is illuminated, the electric potential of the illuminated place is different from that of the non-illuminated place, a nonuniform electric field is formed in a space, and a 'photo dielectrophoresis' phenomenon is generated.
Referring to fig. 1, in one aspect, there is provided an optoelectronic microfluidic device comprising: a lower substrate 1, a microfluidic array assembly 2, and an upper substrate 3;
wherein, the surface of the lower substrate 1 is plated with a photoelectric film 101;
the microfluidic array assembly 2 is located on the lower substrate 1, and the microfluidic array assembly 2 comprises at least one group of microfluidic arrays, each group of microfluidic arrays is arranged in parallel, and at least one group of microfluidic arrays is provided with at least one microfluidic cavity 100;
the surface of the upper substrate 3 is plated with a conductive film, and one surface with the conductive film is connected with the microfluidic array assembly 2.
The apparatus provided by embodiments of the present invention will be further explained and illustrated by alternative embodiments.
The upper substrate 3 provided by the embodiment of the invention is common conductive glass, a layer of ITO (indium-tin oxide) film is sputtered on the conductive glass by a magnetron sputtering method, the lower substrate 1 is conductive glass or silicon wafer, the conductive glass or silicon wafer is plated with the photoelectric film 101, and further, the photoelectric film 101 is a film made of hydrogenated amorphous silicon or cadmium sulfide material plated on the surface of the lower substrate 1 by adopting a sputtering film plating or electroplating film plating mode as the photoelectric film 101.
It should be noted that, the microfluidic array assembly 2 provided in the embodiment of the present invention includes at least one group of microfluidic arrays, where at least one group of microfluidic arrays has at least one microfluidic cavity 100, that is, the embodiment of the present invention may set a plurality of microfluidic arrays according to needs, and the number of microfluidic arrays may be 1 group, 2 groups, 3 groups, 4 groups, 5 groups, 6 groups, 7 groups, 8 groups, 9 groups, 10 groups, etc., and the number of microfluidic arrays in the embodiment of the present invention is not limited thereto. Each group of microfluidic arrays is arranged side by side, at least one microfluidic cavity 100 is arranged on one group of microfluidic arrays, the number of the microfluidic cavities 100 is determined according to the number of micro objects, and for example, the number of the microfluidic cavities 100 may be 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, etc., and the number of the microfluidic cavities 100 is not limited thereto in the embodiment of the present invention.
It can be understood that when the micro-object is analyzed, the optical tweezers technology can be used to control the flow of the micro-object, so that the micro-object enters the cavity of the microparticle, and the analysis of the single or a certain number of micro-objects is realized. Further, the device provided by the embodiment of the invention can analyze microorganisms, polymers wrapped by the microbeads and the like. Preferably, 1 to 5 micro-objects, for example, 1, 2, 3, 4, 5 micro-objects may be accommodated in one micro-fluidic chamber 100. By limiting the number within the above range, the accuracy of the analysis result of the micro-object can be ensured, and multiple groups of micro-fluid arrays and multiple micro-fluid cavities 100 can be arranged as required, so that the analysis of the micro-object in large batch can be realized, and the experimental analysis efficiency can be improved.
In an alternative embodiment, the microfluidic cavities 100 are arranged at intervals, the microfluidic cavities 100 are provided with inlets 102, and the inlet 102 is arranged in the opposite direction to the flow direction of the microfluid;
the diameter of the inlet 102 is 2-10 times the particle size of the micro-object.
Referring to fig. 2, 3 and 4, an inlet 102 is disposed on the microfluidic cavity 100, and the direction of the inlet 102 is opposite to the direction of the microfluidic flow, which can reduce the interference of the main flow direction of the microfluidic to the microfluidic in the microfluidic cavity 100, and the introduced micro-objects will not flow out again due to the flow rate, but the liquid exchange between the interior of the microfluidic cavity 100 and the outside will not be affected, such as the cell culture solution, which needs to enter the microfluidic cavity 100 to promote the experiment and ensure the necessary requirement of the experiment. A schematic of the flow of liquid inside the optomicrofluidic device is shown in fig. 3 and 4.
By setting the diameter of the inlet 102 of the micro-fluid chamber 100 to be 2-10 times of the particle size of the micro-object, on the one hand, the diameter of the inlet 102 of the micro-fluid chamber 100 cannot be too small, which can lead to the incapable entry of the micro-object, and too large, which can lead to the difficult control of the amount of the micro-object entering, so that the experimental difficulty is increased. Therefore, the diameter of the inlet 102 of the micro-fluid chamber 100 is 2-10 times of the particle size of the micro-object, so that the micro-object can enter the micro-fluid chamber 100, and the amount of the micro-object entering the micro-fluid chamber 100 can be better controlled. Illustratively, the inlet 102 of the microfluidic chamber 100 has a diameter that is 2 times, 3 times, 4 times, 5 times, 6 times, 7 times, 8 times, 9 times, 10 times, etc., the diameter of the micro-object particle.
In an alternative embodiment, the inlet 102 of the present microfluidic cavity 100 is opposite the cavity back of the next microfluidic cavity 100, and the cavity back of the present microfluidic cavity 100 is opposite the inlet 102 of the previous microfluidic cavity 100.
It will be appreciated that each microfluidic cavity 100 has one inlet 102, and when the microfluidic cavities 100 are plural, the embodiments of the present invention space the microfluidic cavities 100, i.e. the microfluidic cavity 100 is spaced from the previous microfluidic cavity 100 and the next microfluidic cavity 100, and the inlet 102 of the microfluidic cavity is opposite to the back of the cavity of the next microfluidic cavity 100, and the back of the cavity of the microfluidic cavity 100 is opposite to the inlet 102 of the previous microfluidic cavity 100, i.e. the inlet 102 of the adjacent two microfluidic cavities 100 is avoided.
In an alternative embodiment, adjacent microfluidic chambers 100 are spaced apart a predetermined distance that is 5-10 times the size of the micro-objects.
The predetermined distance between two adjacent microfluidic chambers 100 may be 5 times, 6 times, 7 times, 8 times, 9 times, or 10 times the particle size of the micro-objects. By setting the distance between adjacent microfluidic chambers 100 within the above-described range, on the one hand, it is convenient to control the entry of a micro-object into the microfluidic chamber 100, and on the other hand, it is avoided that excessive microfluidics enter simultaneously due to too large intervals between adjacent microfluidic chambers 100, resulting in inconvenient control.
In an alternative embodiment, referring to fig. 3, the microfluidic array further comprises: a baffle 21 and a diverter assembly;
the flow splitting assembly is connected to the baffle 21, the flow splitting assembly and the baffle 21 forming a microfluidic cavity 100.
It should be noted that, because the microfluidic array provided in the embodiment of the present invention includes a plurality of microfluidic arrays, when the microfluidic array is a plurality of microfluidic arrays, a fluid channel is formed between the baffle 21 of the microfluidic array and the baffle 21 of the next microfluidic array, or between the baffle 21 of the microfluidic array and the baffle 21 of the previous microfluidic array, when the microfluidic array passes through the fluid channel, a preset number of micro-objects are controlled to enter the microfluidic channel by using an optical tweezers technology, and the rest flows to the next microfluidic channel.
In an alternative embodiment, the flow dividing assembly comprises a first flow dividing plate 22, a second flow dividing plate 23 and a third flow dividing plate 24 which are sequentially connected, wherein the first flow dividing plate 22 is connected with the flow guiding plate 21, a first included angle is formed between the first flow dividing plate 22 and the second flow dividing plate 23, and a second included angle is formed between the second flow dividing plate 23 and the third flow dividing plate 24;
the first 22, second 23, third 24 and flow guide plates 21 form a microfluidic cavity 100.
Further, the first included angle may be 30 ° to 120 °, and for example, the first included angle may be 30 °, 45 °, 60 °, 90 °, 100 °, 120 °, and the like. The second included angle may be 30 ° to 120 °, and for example, the second included angle may be 30 °, 45 °, 60 °, 90 °, 100 °, 120 °, and the like.
Preferably, the connection part of the first flow dividing plate 22 and the second flow dividing plate 23 is in smooth transition connection, the second flow dividing plate 23 and the third flow dividing plate 24 are in smooth transition connection, so that micro-objects can be controlled conveniently through the electric forceps technology, and the experimental efficiency is improved.
As an example, the first 22 and second 23 splitter plates are 90 ° apart, and the second 23 and third 24 splitter plates are 90 ° apart. As another example, the first and second splitter plates 22, 23 may be arcuately connected, and the arc may be 120 °, and the second and third splitter plates 23, 24 may be arcuately connected, and the arc may be 120 °.
In an alternative embodiment, referring to fig. 4, the diversion assembly includes a diversion rail 25, where the diversion rail 25 is connected to the baffle 21, the diversion rail 25 and the baffle 21 form a micro-fluidic chamber 100, and the diversion rail 25 is an arc-shaped rail with an arc surface facing the baffle 21.
The diversion fence 25 may also be in a semicircular arc shape, and the semicircular arc diversion fence 25 slows down the flow friction resistance between the microfluid and the diversion fence 25, so that on one hand, the analysis of the micro-objects in the microfluidic cavity 100 is not affected, and on the other hand, the surface is in an arc shape, so that the flow of the rest microfluid in the fluid channel is not affected.
In an alternative embodiment, the apparatus further comprises modifying the substrate and sidewalls of the microfluidic chamber 100, including injecting an aqueous solution containing fluorinated organic compounds into the microfluidic chamber 100, and completely displacing the aqueous solution with the microfluidic medium after a predetermined period of time to obtain a modified microfluidic chamber 100.
In an alternative embodiment, the microfluidic cavity 100 of the present microfluidic array is opposite the microfluidic cavity 100 of the next microfluidic array, opposite the microfluidic cavity 100 of the previous microfluidic array;
and/or the microfluidic cavity 100 of the present microfluidic array is opposite to the microfluidic cavity 100 of the next microfluidic array, opposite to the microfluidic cavity 100 of the previous microfluidic array;
and/or the microfluidic cavity 100 of the present microfluidic array is opposite the microfluidic cavity 100 of the next microfluidic array, opposite the microfluidic cavity 100 of the previous microfluidic array.
Further, any of the above-described arrangements of the microfluidic arrays, or combinations of arrangements of the microfluidic arrays that intersect in multiple ways, may be selected in embodiments of the present invention.
Preferably, when the microfluidic cavity 100 of the present microfluidic array is selected to be opposite to the microfluidic cavity 100 of the next microfluidic array and opposite to the microfluidic cavity 100 of the previous microfluidic array, the influence of the fluid in the fluid channel on the micro-objects in the microfluidic cavity 100 can be reduced.
Further, referring to fig. 5, the device provided in the embodiment of the present invention includes the following steps: s1, firstly cleaning an upper substrate 3 and a lower substrate 1, and respectively cleaning the upper substrate and the lower substrate for 10 minutes by using acetone, alcohol and deionized water under ultrasonic waves; s2, sputtering a formed photoelectric film on the lower substrate 1; s3, spin-coating negative photoresist, such as SU-8, on the lower substrate 1, and exposing, developing and forming; and S4, bonding the upper substrate 3 with the lower substrate 1 with the micro-fluid array component 2 to obtain the device provided by the embodiment of the invention.
In another aspect, an optoelectronic microfluidic system is provided, the system comprising any of the devices described above.
The foregoing description of the embodiments of the present disclosure has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or the technical improvements in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (8)
1. An optoelectronic microfluidic device, the optoelectronic microfluidic device comprising: a lower substrate, the surface of which is plated with a photoelectric film;
the microfluidic array assembly is positioned on the lower substrate and comprises at least one group of microfluidic arrays, each group of microfluidic arrays are arranged in parallel, and at least one group of microfluidic arrays are provided with at least one microfluidic cavity;
an upper substrate, the surface of which is plated with a conductive film, and one surface with the conductive film is connected with the micro-fluid array component;
the microfluidic array further comprises: a baffle and a diverter assembly;
the flow dividing assembly is connected with the guide plate, and the flow dividing assembly and the guide plate form the micro-fluid cavity;
the flow dividing assembly comprises a first flow dividing plate, a second flow dividing plate and a third flow dividing plate which are sequentially connected, wherein the first flow dividing plate is connected with the flow guiding plate, a first included angle is formed between the first flow dividing plate and the second flow dividing plate, and a second included angle is formed between the second flow dividing plate and the third flow dividing plate;
the first, second, third and baffle plates form the microfluidic cavity.
2. The optoelectronic microfluidic device of claim 1, wherein the microfluidic chambers are spaced apart, the microfluidic chambers having inlets thereon, the inlets opening in a direction opposite to the direction of microfluidic flow;
the diameter of the inlet is 2-10 times of the grain diameter of the micro target.
3. The optoelectric microfluidic device of claim 2, wherein the inlet of the present microfluidic chamber is opposite the chamber back of the next microfluidic chamber, and the chamber back of the present microfluidic chamber is opposite the inlet of the previous microfluidic chamber.
4. The optoelectronic microfluidic device of claim 1, wherein adjacent microfluidic chambers are spaced apart a predetermined distance that is 5-10 times the size of the micro-objects.
5. The optoelectronic microfluidic device of claim 1, wherein the shunt assembly comprises a shunt rail connected to the baffle, the shunt rail and the baffle forming the microfluidic chamber, the shunt rail being an arcuate rail having an arcuate surface facing the baffle.
6. The optoelectronic microfluidic device of claim 5, wherein the microfluidic cavity of the present microfluidic array is opposite the microfluidic cavity of the next microfluidic array, opposite the microfluidic cavity of the previous microfluidic array;
and/or the microfluidic cavity of the present microfluidic array is opposite to the microfluidic cavity of the next microfluidic array and opposite to the microfluidic cavity of the previous microfluidic array;
and/or the microfluidic cavity of the present microfluidic array is opposite the microfluidic cavity of the next microfluidic array, opposite the microfluidic cavity of the previous microfluidic array.
7. The optoelectronic microfluidic device of claim 1, further comprising modifying the substrate and sidewalls of the microfluidic chamber, comprising injecting an aqueous solution comprising fluorinated organic compounds into the microfluidic chamber, and completely displacing the aqueous solution with a microfluidic medium after a predetermined period of time to provide a modified microfluidic chamber.
8. An optoelectronic microfluidic system, characterized in that it comprises the device according to any one of claims 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311169188.8A CN116899644B (en) | 2023-09-12 | 2023-09-12 | Photoelectric micro-fluidic device and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311169188.8A CN116899644B (en) | 2023-09-12 | 2023-09-12 | Photoelectric micro-fluidic device and system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116899644A CN116899644A (en) | 2023-10-20 |
| CN116899644B true CN116899644B (en) | 2023-11-28 |
Family
ID=88367181
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202311169188.8A Active CN116899644B (en) | 2023-09-12 | 2023-09-12 | Photoelectric micro-fluidic device and system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116899644B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767898A (en) * | 2003-01-31 | 2006-05-03 | 惠普开发有限公司 | Microfluidic device with thin-film electronic devices |
| CN101403742A (en) * | 2008-10-29 | 2009-04-08 | 东南大学 | Method for dielectric characterization of micro-nano biological particle by optoelectronic forceps |
| KR102038774B1 (en) * | 2018-06-22 | 2019-10-30 | 울산과학기술원 | Magnetic particle seperator and method of analysis of bio information using the same, analysis device of bio target material using the same |
| CN110653015A (en) * | 2019-10-30 | 2020-01-07 | 潍坊医学院 | Microbial detection chip with high sample filling rate and filling method thereof |
| CN113713869A (en) * | 2021-09-17 | 2021-11-30 | 苏州先米科技有限公司 | Micro-fluidic device |
| CN114438012A (en) * | 2022-01-26 | 2022-05-06 | 合肥工业大学 | Flexible capture method for micron-sized particles or cells |
| CN216778850U (en) * | 2021-12-22 | 2022-06-21 | 彩科(苏州)生物科技有限公司 | Microfluidic chip with improved flatness and microfluidic device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4812223B2 (en) * | 2000-06-02 | 2011-11-09 | バイエル・テクノロジー・サービシーズ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Kit and method for multi-analyte determination |
| EP3311918A1 (en) * | 2016-10-19 | 2018-04-25 | Sharp Life Science (EU) Limited | Fluid loading into a microfluidic device |
-
2023
- 2023-09-12 CN CN202311169188.8A patent/CN116899644B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1767898A (en) * | 2003-01-31 | 2006-05-03 | 惠普开发有限公司 | Microfluidic device with thin-film electronic devices |
| CN101403742A (en) * | 2008-10-29 | 2009-04-08 | 东南大学 | Method for dielectric characterization of micro-nano biological particle by optoelectronic forceps |
| KR102038774B1 (en) * | 2018-06-22 | 2019-10-30 | 울산과학기술원 | Magnetic particle seperator and method of analysis of bio information using the same, analysis device of bio target material using the same |
| CN110653015A (en) * | 2019-10-30 | 2020-01-07 | 潍坊医学院 | Microbial detection chip with high sample filling rate and filling method thereof |
| CN113713869A (en) * | 2021-09-17 | 2021-11-30 | 苏州先米科技有限公司 | Micro-fluidic device |
| CN216778850U (en) * | 2021-12-22 | 2022-06-21 | 彩科(苏州)生物科技有限公司 | Microfluidic chip with improved flatness and microfluidic device |
| CN114438012A (en) * | 2022-01-26 | 2022-05-06 | 合肥工业大学 | Flexible capture method for micron-sized particles or cells |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116899644A (en) | 2023-10-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103191791B (en) | Integrated chip system for high-throughput sorting and counting detection of biological particles, and application | |
| US20180361383A1 (en) | Sorting particles in a microfluidic device | |
| CN105829238B (en) | The fluid dynamic concentration chamber of various dimensions | |
| EP2923758B1 (en) | Microchip and channel structure for the same | |
| CN203220910U (en) | Integrated chip for high-throughput sorting and count detection of biological particles | |
| US11358147B2 (en) | System and method for isolating and analyzing cells | |
| CN110468026B (en) | Microfluidic chip for optical fiber photodynamic cell manipulation | |
| CN110591889B (en) | Microfluidic chip cell sorter based on coaxial double waveguide fibers | |
| CN111774103A (en) | Multi-core spiral inertia separation micro-fluidic device for high-throughput plasma separation | |
| CN116899644B (en) | Photoelectric micro-fluidic device and system | |
| CN111229336B (en) | Method for manufacturing optical waveguide multi-micro-channel chip | |
| CN211826083U (en) | Optical waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN111450907B (en) | Microfluidic device, sample mixing method and microfluidic system | |
| CN211603213U (en) | Optical waveguide multi-micro-channel detection system | |
| CN113333041A (en) | Cell capturing and detecting micro-fluidic chip | |
| CN111157731A (en) | Optical waveguide multi-micro-channel detection system based on CMOS image sensing | |
| CN113652333B (en) | Micro-column type multi-phase displacement channel for optimizing fluid distribution | |
| CN215586515U (en) | Five-channel particle separating device based on photoelectron tweezers | |
| CN104267201B (en) | A kind of robotization monoclonal antibody screening machine | |
| CN110193386A (en) | A kind of micro flow chip infiltrating effect based on dielectrophoresis/electricity | |
| CN111250181B (en) | Manufacturing method of optical waveguide multi-micro-channel chip based on CMOS image sensing | |
| CN111229341B (en) | Method for manufacturing grating waveguide multi-micro-channel chip | |
| CN211785134U (en) | Grating waveguide multi-micro-channel detection system | |
| CN215743516U (en) | Four-channel cell separation device based on optical virtual electrode | |
| KR102166770B1 (en) | Chip for analyzing fluids |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |