CN116890146A - Rapid sintering method - Google Patents

Rapid sintering method Download PDF

Info

Publication number
CN116890146A
CN116890146A CN202310666667.4A CN202310666667A CN116890146A CN 116890146 A CN116890146 A CN 116890146A CN 202310666667 A CN202310666667 A CN 202310666667A CN 116890146 A CN116890146 A CN 116890146A
Authority
CN
China
Prior art keywords
electrode
substrate
current
heated
sintering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202310666667.4A
Other languages
Chinese (zh)
Inventor
田天成
游志
王建龙
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Baosman Semiconductor Equipment Co ltd
Original Assignee
Suzhou Baosman Semiconductor Equipment Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Baosman Semiconductor Equipment Co ltd filed Critical Suzhou Baosman Semiconductor Equipment Co ltd
Priority to CN202310666667.4A priority Critical patent/CN116890146A/en
Publication of CN116890146A publication Critical patent/CN116890146A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/0008Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/83009Pre-treatment of the layer connector or the bonding area
    • H01L2224/83048Thermal treatments, e.g. annealing, controlled pre-heating or pre-cooling
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

Abstract

The invention discloses a rapid sintering method, which comprises the following steps: 1. placing the fixed piece at a preset position on one surface of the base material, wherein a welding material is arranged between the fixed piece and the base material; 2. an electrode disposed on the other opposing surface of the substrate, the electrode comprising a positive electrode and a negative electrode; the positive electrode and the negative electrode are arranged at intervals; the structure of the electrode is generally matched with the substrate to be heated, and the contact area between the electrode and the heated substrate is as large as possible; thereby ensuring that the current uniformly flows through the substrate and the welding material and ensuring that the temperature field is uniform; 3. energizing the electrode according to the parameters designed in advance, and sintering; the invention can rapidly realize local heating, rapidly heat the heated object by applying large current to the object to be heated to generate Joule heat, and reach the required sintering temperature in a relatively short time, thereby not needing to heat the whole product, and rapidly adjusting the sintering temperature at any time, and has high reliability.

Description

Rapid sintering method
Technical Field
The invention belongs to the technical field related to the technical improvement of sintering methods, and particularly relates to a rapid sintering method which is capable of rapidly and locally heating an object to be heated to generate Joule heat by applying large current to the object to be heated, rapidly heating the object to be heated to reach the required sintering temperature in a relatively short time, thereby avoiding heating the whole product to protect the product, and enabling the sintering temperature of the heating sintering mode to be rapidly adjusted at any time and having high reliability.
Background
At present, a plurality of common methods for fixedly connecting a metal part to an electric conductor, such as welding, fastening and the like, are available, wherein the welding comprises sintering, the sintering is often used in the semiconductor manufacturing industry, the existing sintering method needs to heat the whole die to a preset sintering temperature, and then the welding materials to be sintered are heated and sintered in a heat conduction mode, so that the parts to be fixedly connected are connected; in the sintering process, the heat conduction time is relatively long, and the sintering efficiency is low; in practice, some devices and materials thereof cannot withstand high temperatures for a long time, and in general, the preset temperature of the mold is relatively lowered, and the sintering time required is relatively long.
The shortcomings of the prior art scheme are: 1. in the sintering process, since the equipment and the die are always kept at the preset sintering temperature, the preset sintering temperature is relatively low and the sintering time is relatively long in order to ensure the service lives of the equipment, the die and the materials; 2. in order to ensure that the temperature of the sintered welding material can reach the preset temperature, the whole die is heated, so that the whole sintered welding material needs to bear high temperature for a long time, and the reliability of products can be influenced for some products which cannot bear high temperature for a long time; 3. in this way, the temperature is slowly changed and is not adjustable during the sintering process.
Therefore, a rapid sintering method is developed, which can rapidly heat the object to be heated by applying a large current to the object to be heated to generate Joule heat, rapidly heat the object to be heated, and reach the required sintering temperature in a relatively short time, so that the whole product is not required to be heated to protect the product, and the sintering temperature of the heating sintering mode can be rapidly adjusted at any time, and the reliability is high.
Disclosure of Invention
The invention aims to provide a rapid sintering method which can rapidly heat an object to be heated by applying large current to the object to be heated to generate Joule heat, rapidly heat the object to be heated and reach the required sintering temperature in a relatively short time, so that the whole product is not required to be heated to protect the product, the sintering temperature of the heating sintering mode can be rapidly adjusted at any time, and the reliability is high.
In order to achieve the above purpose, the present invention provides the following technical solutions: a rapid sintering method comprising the steps of:
1. placing the fixed piece at a preset position on one surface of the base material, wherein a welding material is arranged between the fixed piece and the base material;
2. an electrode disposed on the other opposing surface of the substrate, the electrode comprising a positive electrode and a negative electrode; the positive electrode and the negative electrode are arranged at intervals, and the sizes of the positive electrode and the negative electrode are consistent; the structure of the electrode is generally matched with the substrate to be heated, and the contact area between the electrode and the heated substrate is as large as possible; thereby ensuring that the current uniformly flows through the substrate and the welding material and ensuring that the temperature field is uniform;
3. energizing the electrode according to the parameters designed in advance, and sintering.
Preferably, the positive electrode and the negative electrode are of the same size.
Preferably, the projection of the welding material on the substrate coincides with the projection of the electrode on the substrate as much as possible, thereby ensuring that the current flows uniformly through the substrate, the welding material, and the temperature field is uniform.
Preferably, pressure is applied to the upper portion of the fixed member during sintering, which is advantageous in improving the quality of the sintered welding.
Preferably, the soldering material is a sintered soldering material, such as soldering or sintered silver or sintered copper.
Preferably; when the electric heater works, the current provided for the electrode is direct current or alternating current or pulse current, the conducted current can reach thousands of amperes at maximum, and the temperature of an object to be heated can be raised to 200-600 ℃ in a short time; and the temperature can be regulated by regulating the current in real time.
Compared with the prior art, the invention provides a rapid sintering method, which has the following beneficial effects:
the rapid sintering method can rapidly realize local heating, generate Joule heat by passing large current to the object to be heated, rapidly heat the object to be heated, and reach the required sintering temperature in a relatively short time, thereby not needing to heat the whole product to protect the product, and the sintering temperature of the heating sintering mode can be rapidly adjusted at any time, and the reliability is high.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate and together with the embodiments of the invention and do not constitute a limitation to the invention, and in which:
FIG. 1 is a schematic diagram of the working principle of the rapid sintering method according to the present invention;
in the figure: 1. a substrate; 2. a power module; 3. welding materials; 4. a positive electrode; 5. and a negative electrode.
Description of the embodiments
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention; all other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, the present invention provides a technical solution: a rapid sintering method for fixedly connecting a power module to a substrate, comprising the steps of:
1. placing the power module 2 at a preset position on one surface of the substrate 1, wherein a welding material 3 is arranged between the power module 2 and the substrate 1;
2. electrodes are provided on the other opposite surface of the substrate 1, the electrodes including a positive electrode 4 and a negative electrode 5; the positive electrode 4 and the negative electrode 5 are arranged at intervals, and the sizes of the positive electrode 4 and the negative electrode 5 are consistent; the structure of the electrode is generally matched with the substrate to be heated, and the contact area between the electrode and the heated substrate is as large as possible; simultaneously, the projection of the welding material 3 on the substrate 1 and the projection of the electrode on the substrate 1 are overlapped as much as possible, so that the current is ensured to uniformly flow through the substrate 1 and the welding material 3, and the temperature field is uniform;
3. energizing the motor according to the parameters designed in advance, and sintering.
When the welding device works, by conducting a large current to the substrate 1 to generate heat, the substrate 1 can be heated to a higher temperature in a short time, so that the welding of the welding material 3 is realized, and the welding material 3 is a sintered welding material, such as sintered silver, sintered copper or other sintered materials in general;
when the welding device works, only a place where current flows is a heat source, the welding material 3 is close to the substrate 1, and heat generated by the substrate 1 can rapidly heat the welding material 3 through heat conduction;
in the sintering process, a certain pressure can be applied to the upper part of the power module 2, so that the quality of sintering welding is improved;
in operation, since the welding material 3 has a certain conductivity, current flows through the welding material 3, and the welding material 3 generates heat by itself due to the flow of a large current;
when the electric heater works, the current provided for the electrode can be direct current or alternating current or pulse current, the magnitude of the current is selected according to the design requirement, the conducted current can reach thousands of amperes at maximum, and the temperature of an object to be heated can be raised to 200-600 ℃ in a short time; the temperature can be regulated by regulating the current in real time;
during operation, the structural design of the electrode is generally matched with the design of the substrate to be heated, and the contact area between the electrode and the heated substrate is as large as possible, so that the current uniformly flows through the heated substrate, and the temperature field is uniform;
when the welding device works, the welding material can be a sintered metal material such as soft soldering, silver sintering, copper sintering and the like, and meanwhile, the welding material is matched with the application of pressure to ensure the sintering quality; the current control heating can rapidly realize local high temperature, and sinter the sintering material, so that other materials can be protected from bearing high temperature for a long time, and better sintering quality can be obtained due to higher temperature.
In this embodiment, the fixed member is the power module 2; the base material is a heat dissipating substrate 1.
The present embodiment is of the semiconductor industry, although other industries may be used, and will not be described here again-!
Compared with the prior art, the invention has the following beneficial effects:
the rapid sintering method can rapidly realize local heating, generate Joule heat by passing large current to the object to be heated, rapidly heat the object to be heated, and reach the required sintering temperature in a relatively short time, thereby not needing to heat the whole product to protect the product, and the sintering temperature of the heating sintering mode can be rapidly adjusted at any time, and the reliability is high.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. A rapid sintering method, characterized in that: the method comprises the following steps:
1. placing the fixed piece at a preset position on one surface of the base material, wherein a welding material is arranged between the fixed piece and the base material;
2. an electrode disposed on the other opposing surface of the substrate, the electrode comprising a positive electrode and a negative electrode; the positive electrode and the negative electrode are arranged at intervals; the structure of the electrode is generally matched with the substrate to be heated, and the contact area between the electrode and the heated substrate is as large as possible; thereby ensuring that the current uniformly flows through the substrate and the welding material and ensuring that the temperature field is uniform;
3. energizing the electrode according to the parameters designed in advance, and sintering.
2. The rapid sintering method according to claim 1, characterized in that: the positive electrode and the negative electrode are of the same size.
3. The rapid sintering method according to claim 1, characterized in that: the projection of the welding material on the base material is overlapped with the projection of the electrode on the base material as much as possible, so that the current is ensured to uniformly flow through the base plate and the welding material, and the temperature field is uniform.
4. The rapid sintering method according to claim 1, characterized in that: in the sintering process, pressure is applied to the upper part of the fixed piece, so that the quality of sintering welding is improved.
5. The rapid sintering method according to claim 1, characterized in that: the soldering material is a sintered soldering material, such as soldering or sintered silver or sintered copper.
6. The rapid sintering method according to claim 1, characterized in that: when the electric heater works, the current provided for the electrode is direct current or alternating current or pulse current, the conducted current can reach thousands of amperes at maximum, and the temperature of an object to be heated can be raised to 200-600 ℃ in a short time; and the temperature can be regulated by regulating the current in real time.
CN202310666667.4A 2023-06-07 2023-06-07 Rapid sintering method Pending CN116890146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310666667.4A CN116890146A (en) 2023-06-07 2023-06-07 Rapid sintering method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310666667.4A CN116890146A (en) 2023-06-07 2023-06-07 Rapid sintering method

Publications (1)

Publication Number Publication Date
CN116890146A true CN116890146A (en) 2023-10-17

Family

ID=88310025

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202310666667.4A Pending CN116890146A (en) 2023-06-07 2023-06-07 Rapid sintering method

Country Status (1)

Country Link
CN (1) CN116890146A (en)

Similar Documents

Publication Publication Date Title
CN107464909A (en) The welding method of battery modules
US4649249A (en) Induction heating platen for hot metal working
JP6435330B2 (en) Metal forming equipment
CN108356270B (en) Metal 3D printing method based on contact resistance heating
CN108551067A (en) Inductive thermal crimping apparatus
CN116890146A (en) Rapid sintering method
JP5814906B2 (en) Resistance welding method and resistance welding apparatus
US11207845B2 (en) Inductive thermo-crimping apparatus
CN113000667B (en) Electric-assisted superplastic forming and aging treatment full-flow manufacturing method for aluminum-lithium alloy thin-wall component
CN103633550A (en) Packaging method of semiconductor laser bar vertical array
JP5029279B2 (en) Soldering apparatus, soldering method, and electronic device manufacturing method
CN105642765B (en) A kind of titanium alloy plate hot piercing device and the method being punched out using the device
CN213379791U (en) Resistance welding tool for water-cooled radiator
CN107649778A (en) A kind of diffusing joining method of copper foil and copper tip, aluminium foil and aluminium terminal
Rochala et al. Chip-level bonding for microelectronic components by induction sintering of micro structured Ag particles
CN101394056B (en) Heat fusion apparatus and fusion method for tin-coated copper conducting wire
CN220107170U (en) Glass sintering equipment of sealing connector
CN207615930U (en) A kind of device improving welding system thermal uniformity
US20210094111A1 (en) Device and method for thermal joining, in particular for thermal joining of a heat exchanger for a motor vehicle
JP3754185B2 (en) Thermocompression bonding apparatus and heater tool used therefor
KR102272200B1 (en) Contact heating apparatus and method for hot stamping
CN106334890B (en) The application method of copper busbar electric heater unit and the device
CN116565664A (en) Glass sintering equipment of sealing connector
KR101881048B1 (en) Socket fusing apparatus
JP2008221279A (en) Resistance welding method, resistance welding machine, and manufacturing method of electronic component

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication