CN116865520A - Vibration device - Google Patents

Abstract

The invention discloses a vibration device, which comprises a shell, a magnet structure and a coil assembly, wherein the magnet structure is arranged in the shell, the magnet structure comprises a first magnet structure and a second magnet structure which are oppositely arranged in a first direction, a magnetic field formed by the first magnet structure is distributed in at least a second direction, and a magnetic field formed by the second magnet structure is distributed in at least a third direction; the coil assembly includes a coil mounted within the housing and located between the first and second magnet structures; wherein, magnet structure with one of them set up as the vibrating piece, the vibrating piece pass through the elastic component connect in the casing, the elastic component sets up to be in two vibration directions elastic activity to make when the coil is supplied with alternating current, the vibrating piece vibrates in two vibration directions. The invention aims to provide a small-volume multidirectional vibration device.

Description

Vibration device

Technical Field

The invention relates to the technical field of linear motors, in particular to a vibration device.

Background

The linear motor is used as an important haptic device for man-machine interaction, has good haptic feedback capability, and is widely applied to the fields of mobile phones, handles and the like, wherein the mobile phone field mainly uses a unidirectional motor to provide haptic feedback in the prior art due to size limitation, but has single vibration direction and poor vibration experience, and when the requirement of multi-directional vibration lifting vibration experience is met, a plurality of vibration devices are required to be arranged to synchronously work, so that the device occupies a large volume and does not meet miniaturized use requirements.

Disclosure of Invention

The invention mainly aims to provide a vibrating device and aims to provide a small-volume multidirectional vibrating device.

In order to achieve the above object, the present invention provides a vibration device, wherein the vibration device includes:

a housing;

the magnet structure is arranged in the shell and comprises a first magnet structure and a second magnet structure which are oppositely arranged in a first direction, a magnetic field formed by the first magnet structure is distributed in at least a second direction, and a magnetic field formed by the second magnet structure is distributed in at least a third direction; the method comprises the steps of,

a coil assembly including a coil mounted within the housing and located between the first and second magnet structures;

wherein, magnet structure with one of them set up as the vibrating piece, the vibrating piece pass through the elastic component connect in the casing, the elastic component sets up to be in two vibration directions elastic activity to make when the coil is supplied with alternating current, the vibrating piece vibrates in two vibration directions.

Optionally, the two vibration directions include a second direction and a third direction.

Optionally, the coil assembly further comprises a core extending in a first direction;

the coil is wound on the iron core.

Optionally, the magnet structure further comprises a balancing weight, and the first magnet structure and the second magnet structure are mounted on the balancing weight;

the elastic piece is connected with the balancing weight and the shell.

Optionally, the first magnet structure comprises a first magnet and a second magnet distributed along a second direction, magnetic poles of the first magnet and the second magnet are distributed along the first direction, and magnetic poles of the two corresponding ends are different; and/or the number of the groups of groups,

the second magnet structure comprises a third magnet and a fourth magnet which are distributed along a third direction, the magnetic poles of the third magnet and the fourth magnet are distributed along a first direction, and the magnetic poles of the two corresponding ends are different.

Optionally, the first magnet structure includes a first magnet and a second magnet distributed along a second direction, magnetic poles of the first magnet and the second magnet are distributed along the second direction, and magnetic poles of two adjacent ends are the same; and/or the number of the groups of groups,

the second magnet structure comprises a third magnet and a fourth magnet which are distributed along a third direction, the magnetic poles of the third magnet and the fourth magnet are distributed along the third direction, and the magnetic poles of two adjacent ends are the same.

Optionally, the elastic piece includes first fixed part, second fixed part and elastic connection portion, the elastic connection portion extends along first direction and is located the one side that the magnet structure is in the second direction, first fixed part with the second fixed part sets up the both ends of elastic connection portion, and just connect respectively the magnet structure with the casing.

Optionally, at least one of the first fixing portion and the second fixing portion is bent with the elastic connection portion and located at a side of the magnet structure in the first direction.

Optionally, the elastic member is provided with two opposite elastic members;

the first fixing part of one elastic piece and the second fixing part of the other elastic piece are correspondingly arranged on the same side of the magnet structure in the first direction.

Optionally, the first fixing portion of one elastic member and the second fixing portion of the other elastic member are disposed at intervals in a first direction, and a pad is disposed at the intervals.

Optionally, a fixing plate is disposed on the first fixing portion and/or the second fixing portion, and the fixing plate forms the backing plate.

Optionally, the elastic moduli of the two elastic members in the second direction are equivalent; the method comprises the steps of,

the elastic modulus of the two elastic pieces in the third direction is equivalent.

Optionally, a damping member is disposed between the magnet structure and the housing, and the damping member is disposed at least on two sides of the magnet structure in the second direction;

the damping piece and the elastic piece are adjacently arranged in the third direction.

According to the technical scheme, the first magnet structure in the magnet structure is provided with the magnetic field distributed along the second direction, the second magnet structure is provided with the magnetic field distributed along the third direction, and the third direction is perpendicular to the first direction and the second direction, so that when the coil assembly is electrified with alternating current, magnetic driving forces in the second direction and the third direction are generated between the magnet structure and the coil assembly, one of the magnet structure and the coil assembly, which is connected with the shell through the elastic piece, vibrates along the two vibration directions of the elastic piece, and therefore vibration in two directions can be achieved by a single vibration device, the current situation that vibration in two directions is achieved by adopting two vibration devices in the prior art is solved, the volume of the vibration device is reduced, and miniaturized use requirements are met.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is an exploded view of an embodiment of a vibration device according to the present invention;

FIG. 2 is a schematic perspective view of a portion of the structure of FIG. 1;

FIG. 3 is a schematic plan view of FIG. 2;

FIG. 4 is a schematic cross-sectional view of the vibration device of FIG. 1 at a damping member;

fig. 5 is a schematic perspective view of the first and second magnet structures in fig. 1.

Reference numerals illustrate:

the achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that, if directional indications (such as up, down, left, right, front, and rear … …) are included in the embodiments of the present invention, the directional indications are merely used to explain the relative positional relationship, movement conditions, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are correspondingly changed.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.

The linear motor is used as an important haptic device for man-machine interaction, has good haptic feedback capability, and is widely applied to the fields of mobile phones, handles and the like, wherein the mobile phone field mainly uses a unidirectional motor to provide haptic feedback in the prior art due to size limitation, but has single vibration direction and poor vibration experience, and when the requirement of multi-directional vibration lifting vibration experience is met, a plurality of vibration devices are required to be arranged to synchronously work, so that the device occupies a large volume and does not meet miniaturized use requirements.

In view of this, the present invention provides a vibration device, and fig. 1 to 5 are views showing an embodiment of the vibration device according to the present invention, and the vibration device will be described with reference to the specific drawings.

Referring to fig. 1 to 5, the vibration device 100 includes a housing 1, a magnet structure 2, and a coil assembly 3, wherein the magnet structure 2 is mounted in the housing 1, the magnet structure 2 includes a first magnet structure 21 and a second magnet structure 22 disposed opposite to each other in a first direction, a magnetic field formed by the first magnet structure 21 is distributed in at least a second direction, and a magnetic field formed by the second magnet structure 22 is distributed in at least a third direction; the coil assembly 3 comprises a coil 32 mounted to the housing 1 and located between the first magnet structure 21 and the second magnet structure 22; wherein one of the magnet structure 2 and the coil block 3 is provided as a vibrating member, the vibrating member is connected to the housing 1 through an elastic member 4, and the elastic member 4 is provided to elastically move in two vibration directions, so that the vibrating member vibrates in the two vibration directions when the coil 32 is energized with an alternating current.

In the technical solution of the present invention, the first magnet structure 21 in the magnet structure 2 is formed with a magnetic field distributed along a second direction, the second magnet structure 22 is formed with a magnetic field distributed along a third direction, and the third direction is orthogonal to the first direction and the second direction, so that when the coil assembly 3 is energized with an alternating current, a magnetic driving force is generated between the magnet structure 2 and the coil assembly 3 in the second direction and the third direction, so that one of the magnet structure 2 and the coil assembly 3, which is connected to the housing 1 through the elastic member 4, vibrates along the two vibration directions of the elastic member 4, so that a single vibration device 100 can realize vibration in two directions, so as to solve the current situation that in the prior art, two vibration devices 100 are required to be adopted to realize vibration in two directions, and thus, the volume of the vibration device is reduced, and the miniaturized use requirement is satisfied.

Further, the two vibration directions include a second direction and a third direction. The vibration member is magnetically driven in the second direction and the third direction, but the vibration of the vibration member is mainly in the vibration direction of the elastic member 4, which may be along the second direction and the third direction or may be at a certain angle with the second direction and the third direction.

Further, the coil assembly 3 further includes a core 31 extending in the first direction; the coil 32 is wound around the core 31. By disposing the iron core 31 in the coil 32, the magnetic strength of the coil 32 is improved, and thus the vibration performance of the vibrating member is improved.

Further, the magnet structure 2 further comprises a balancing weight 23, and the first magnet structure 21 and the second magnet structure 22 are mounted on the balancing weight 23; the elastic member 4 connects the weight 23 and the housing 1. On the one hand, to enhance the vibration effect of the vibration device 100, on the other hand, to install and fix the first magnet structure 21 and the second magnet structure 22, the balancing weight 23 is provided with through holes along a third direction, the first magnet structure 21 and the second magnet structure 22 are distributed on two sides of the through holes in the first direction, the through holes are used for penetrating the coil assembly 3 fixed on the circuit board, so that the coil assembly 3 is clamped between the first magnet structure 21 and the second magnet structure 22, and at least a movable gap in the second direction exists in the through holes of the coil assembly 3, so as to avoid blocking the vibration of the magnet structure 2 in the second direction. In addition, the elastic member 4 is connected to the two ends of the balancing weight 23 and the housing 1, so that the balancing weight 23 is suspended in the housing 1, and the vibration space requirement of the balancing weight 23 in the second direction and the third direction is met, and compared with the case that the coil assembly 3 is movably arranged to fix the magnet structure 2, the stable connection of the power line during the movement of the coil assembly 3 is obviously not needed, so that the assembly forming of the vibration device 100 is more convenient.

Further, in an embodiment, referring specifically to fig. 5, the first magnet structure 21 includes a first magnet 211 and a second magnet 212 distributed along a second direction, the magnetic poles of the first magnet 211 and the second magnet 212 are distributed along the first direction, and the magnetic poles of the two ends are different; and/or, the second magnet structure 22 includes a third magnet 221 and a fourth magnet 222 distributed along a third direction, the poles of the third magnet 221 and the fourth magnet 222 are distributed along the first direction, and the poles of the respective two ends are different. Providing square-shaped first, second, third and fourth magnets 211, 212, 221, 222 facilitates magnet assembly as compared to providing adjacent end faces as inclined surfaces. Specifically, the magnetic poles of the first magnet 211, the second magnet 212, the third magnet 221 and the fourth magnet 222 are arranged to be distributed along the first direction, and the magnetic poles of the first magnet 211 and the second magnet 212 are arranged in opposite directions to form a magnetic field of the first magnet structure 21 distributed along the second direction, and the magnetic poles of the second magnet structure 22 are identical, that is, the magnetic poles of the third magnet 221 and the fourth magnet 222 are arranged in opposite directions to form a magnetic field of the second magnet structure 22 distributed along the third direction, so that the driving effect of the vibrating member is better, and synchronous vibration of the two vibrating directions is realized.

In another embodiment, the first magnet structure 21 includes a first magnet 211 and a second magnet 212 distributed along a second direction, the magnetic poles of the first magnet 211 and the second magnet 212 are distributed along the second direction, and the magnetic poles of two adjacent ends are the same; and/or, the second magnet structure 22 includes a third magnet 221 and a fourth magnet 222 distributed along a third direction, the magnetic poles of the third magnet 221 and the fourth magnet 222 are distributed along the third direction, and the magnetic poles of the adjacent two ends are the same. The magnetic poles of the first magnet 211 and the second magnet 212 in the first magnet structure 21 are arranged to be distributed along the second direction, and the magnetic poles of the adjacent two ends are arranged to be identical, and the magnetic poles thereof are repulsive to be excited to have enough magnetic induction lines passing through the coil assembly 3, and can also be driven to vibrate in the second direction by the coil assembly 3. Likewise, the magnetic poles of the third magnet 221 and the fourth magnet 222 in the second magnet structure 22 are arranged to be distributed along the third direction, and the magnetic poles of the adjacent two ends are arranged to be identical, so that the coil assembly 3 can also drive vibration in the third direction.

Further, the elastic member 4 includes a first fixing portion 41, a second fixing portion 42, and an elastic connection portion 43, the elastic connection portion 43 extending in the first direction and being located at one side of the magnet structure 2 in the second direction, the first fixing portion 41 and the second fixing portion 42 being provided at both ends of the elastic connection portion 43 and respectively connecting the magnet structure 2 and the housing 1. Arranging the elastic connection part 43 on one side of the magnet structure 2 in the second direction, wherein the side of the elastic connection part 43 is extended along the first direction, and on one hand, the elastic connection part 43 and the magnet structure 2 are spaced in the second direction, so that the elastic connection part 43 has an elastic deformation space in the second direction, and when the magnet structure 2 vibrates in the second direction, the elastic connection part 43 deforms in the second direction to provide a certain elastic force for the magnet structure 2 to assist the magnet structure 2 to vibrate; on the other hand, the elastic connection portion 43 extends along the first direction, and no bending is provided to affect the elastic deformation modulus of the elastic connection portion 43 in any direction, so that a deformation space exists in the third direction, so as to satisfy the elastic support of the magnet structure 2 moving in the third direction. In this way, the elastic connection portion 43 can meet the vibration support of the magnet structure 2 in the second direction and the third direction, and the structure is small and meets the miniaturization requirement.

Further, at least one of the first fixing portion 41 and the second fixing portion 42 is bent with the elastic connection portion 43, and is located at a side of the magnet structure 2 in the first direction. The first fixing portion 41 and the second fixing portion 42 may be directly connected to the magnet structure 2 and the side portion of the housing 1 in the second direction, so as to satisfy the elastic movement of the elastic connection portion 43 in the second direction and the third direction, but not limit the movement of the magnet structure 2 in the first direction. In order to avoid the magnet structure 2 contacting the coil assembly 3 and the housing 1, and further avoid affecting the vibration process, the magnet structure 2, the coil assembly 3 and the housing 1 are provided with a gap in the first direction, and no driving force in the first direction is generated between the magnet structure 2 and the coil assembly 3, but in a use scenario, an electronic product carrying the vibration device 100 may have extreme situations such as collision and drop, so that the magnet structure 2 moves in the first direction, and in the case that no movement restriction is set, the magnet structure 2 may contact the housing 1 or the coil assembly 3, causing damage, affecting the stability and the service life of the vibration device 100. Therefore, in the present embodiment, one of the first fixing portion 41 and the second fixing portion 42 is bent with the elastic connecting portion 43 and disposed at one side of the magnet structure 2 in the first direction, so as to provide elastic limitation for the movement of the magnet structure 2 in the first direction, and not affect the function of the elastic connecting portion 43, so as to meet the above protection requirement.

Further, the elastic member 4 is provided with two opposite parts; the first fixing portion 41 of one elastic member 4 and the second fixing portion 42 of the other elastic member 4 are disposed on the same side of the magnet structure 2 in the first direction. The number of the elastic members 4 may be plural, so that the use requirement of the elastic members may be satisfied, but the elastic members 4 are not limited herein, in order to satisfy the miniaturized use requirement, in this embodiment, two elastic members 4 are disposed, and the first fixing portion 41 of one elastic member 4 and the second fixing portion 42 of the other elastic member 4 are disposed on the same side of the magnet structure 2 in the first direction, so that the two elastic members 4 are symmetrical along the center of the magnet structure 2, so as to provide relatively balanced elastic support on two sides of the magnet structure 2 in the second direction and the third direction, reduce the active components in other directions in the vibration process, and make the vibration more stable. Specifically, the elastic moduli of the two elastic members 4 in at least the second direction and the third direction are set to be equal to each other so as to meet the requirement of the stabilizing activity, and further, in this embodiment, the two elastic members 4 are set to have the same elastic sheet structure, so that the performances of the two elastic members are equal to each other so as to meet the requirement of use. The first fixing portion 41 of one elastic member 4 and the second fixing portion 42 of the other elastic member 4 are disposed on the same side of the magnet structure 2 in the first direction, so as to elastically limit the movement of the magnet structure 2 in the first direction synchronously, and improve the protection effect.

Further, the first fixing portion 41 of one elastic member 4 and the second fixing portion 42 of the other elastic member 4 are spaced apart from each other in the first direction, and a spacer is disposed at the spacing. The first fixing portion 41 is connected to the magnet structure 2, the second fixing portion 42 is connected to the housing 1, the magnet structure 2 and the housing 1 have a space in the first direction, that is, a space exists between the first fixing portion 41 of one elastic member 4 and the second fixing portion 42 of the other elastic member 4, although the elastic member 4 is provided with an elastic support in the first direction to limit the movement of the magnet structure 2 in the first direction, a certain protection effect is further provided, a gap exists between the two elastic members, when the collision or the fall is serious, the magnet structure 2 may still be broken by the elastic force of the elastic member 4 by inertia, so that the magnet structure 2 and the housing 1 collide to cause damage.

Further, a fixing plate 44 is provided on the first fixing portion 41 and/or the second fixing portion 42, and the fixing plate 44 forms the pad. The pad may be a separate structure mounted on the magnet structure 2 or the housing 1, or may be a structure mounted on the first fixing portion 41 and/or the second fixing portion 42, so as to achieve the above-mentioned functions, which is not limited herein, but in this embodiment, the pad is provided with the fixing plate 44 mounted on the first fixing portion 41 and the second fixing portion 42, so that on the one hand, the above-mentioned functions are achieved, and on the other hand, the fixing plate 44 is fixed to the first fixing portion 41 or the second fixing portion 42, so that the adhesion between the first fixing portion 41 and the magnet structure 2, and between the second fixing portion 42 and the housing 1 is more stable, and the unstable fixation caused by the warpage of the first fixing portion 41 or the second fixing portion 42 is avoided, thereby reducing the risk of falling off, and prolonging the service life of the vibration device 100. It should be noted that the fixing manner between the first fixing portion 41 and the magnet structure 2, and between the second fixing portion 42 and the housing 1 may be welding, bonding, or the like, so that stable connection may be achieved, which is not limited herein, and in this embodiment, both fixing sides are made of metal materials, and may be connected and fixed by welding, so that connection is more stable, and on this basis, when the first fixing portion 41 and the magnet structure 2, and when the second fixing portion 42 and the housing 1 are welded, the stress is larger, and by providing the fixing plate 44, the effect of reducing the fracture risk of the elastic member 4 is also achieved.

In addition, a damping member 24 is further disposed between the magnet structure 2 and the housing 1, and the damping member 24 is disposed at least on both sides of the magnet structure 2 in the second direction; the damper 24 is disposed adjacent to the elastic member 4 in the third direction. The damping member 24 is disposed between the magnet structure 2 and the housing 1, specifically, the damping member 24 may be disposed on the housing 1 or may be disposed on the magnet structure 2, which is not limited herein, so that when the magnet structure 2 moves in the second direction, the damping member 24 is compressed to play a role in buffering, thereby suppressing resonance and improving the vibration effect of the vibration device 100; in addition, the damping member 24 is disposed adjacent to the elastic member 4 in the third direction, so that when the magnet structure 2 moves in the third direction, the elastic member 4 compresses the damping member 24 to play a role in buffering, and also plays a role in suppressing resonance and improving the vibration effect of the vibration device 100. By arranging the damping piece 24, resonance of the magnet structure 2 in the second direction and the third direction is suppressed, and the structure is small and exquisite and skillful, so that miniaturized use requirements are met. It should be noted that the damping member 24 may be made of an elastic material such as foam, rubber, etc., and the damping member 24 is provided as foam in consideration of the required elastic properties in the present embodiment.

The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the description of the present invention and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the invention.

Claims (13)

1. A vibration device, comprising:

a housing;

the magnet structure is arranged in the shell and comprises a first magnet structure and a second magnet structure which are oppositely arranged in a first direction, a magnetic field formed by the first magnet structure is distributed in at least a second direction, and a magnetic field formed by the second magnet structure is distributed in at least a third direction; the method comprises the steps of,

a coil assembly including a coil mounted within the housing and located between the first and second magnet structures;

wherein, magnet structure with one of them set up as the vibrating piece, the vibrating piece pass through the elastic component connect in the casing, the elastic component sets up to be in two vibration directions elastic activity to make when the coil is supplied with alternating current, the vibrating piece vibrates in two vibration directions.

2. The vibration apparatus of claim 1, wherein the two vibration directions include a second direction and a third direction.

3. The vibration apparatus of claim 2, wherein the coil assembly further comprises a core extending in a first direction;

the coil is wound on the iron core.

4. The vibration apparatus of claim 1, wherein the magnet structure further comprises a weight, the first magnet structure and the second magnet structure being mounted to the weight;

the elastic piece is connected with the balancing weight and the shell.

5. The vibration apparatus of claim 1, wherein the first magnet structure includes first and second magnets distributed along a second direction, poles of the first and second magnets being distributed along the first direction, and poles of the respective two ends being different; and/or the number of the groups of groups,

the second magnet structure comprises a third magnet and a fourth magnet which are distributed along a third direction, the magnetic poles of the third magnet and the fourth magnet are distributed along a first direction, and the magnetic poles of the two corresponding ends are different.

6. The vibration apparatus of claim 1, wherein the first magnet structure comprises a first magnet and a second magnet distributed along a second direction, magnetic poles of the first magnet and the second magnet being distributed along the second direction, and magnetic poles of adjacent two ends being identical; and/or the number of the groups of groups,

the second magnet structure comprises a third magnet and a fourth magnet which are distributed along a third direction, the magnetic poles of the third magnet and the fourth magnet are distributed along the third direction, and the magnetic poles of two adjacent ends are the same.

7. The vibration apparatus according to any one of claims 1 to 6, wherein the elastic member includes a first fixing portion, a second fixing portion, and an elastic connection portion extending in a first direction and located at one side of the magnet structure in a second direction, the first fixing portion and the second fixing portion being provided at both ends of the elastic connection portion and respectively connecting the magnet structure and the housing.

8. The vibration apparatus of claim 7, wherein at least one of the first fixing portion and the second fixing portion is disposed in a bent manner with the elastic connection portion and is located at a side of the magnet structure in the first direction.

9. The vibration apparatus of claim 8, wherein said elastic member is provided with two opposing members;

the first fixing part of one elastic piece and the second fixing part of the other elastic piece are correspondingly arranged on the same side of the magnet structure in the first direction.

10. The vibration apparatus of claim 9, wherein the first fixing portion of one elastic member and the second fixing portion of the other elastic member are spaced apart in a first direction, and a spacer is provided at the spacing.

11. The vibration apparatus according to claim 10, wherein a fixing plate is provided on the first fixing portion and/or the second fixing portion, the fixing plate forming the pad.

12. The vibration apparatus of claim 9, wherein the elastic moduli of the two elastic members in the second direction are equivalent; the method comprises the steps of,

the elastic modulus of the two elastic pieces in the third direction is equivalent.

13. The vibration apparatus according to any one of claims 1 to 6, wherein a damper is provided between the magnet structure and the housing, the damper being provided at least on both sides of the magnet structure in the second direction;

the damping piece and the elastic piece are adjacently arranged in the third direction.