CN116732501B - Support boat foot for isostatic pressure graphite boat for third-generation semiconductor - Google Patents
Support boat foot for isostatic pressure graphite boat for third-generation semiconductor Download PDFInfo
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- CN116732501B CN116732501B CN202310999096.6A CN202310999096A CN116732501B CN 116732501 B CN116732501 B CN 116732501B CN 202310999096 A CN202310999096 A CN 202310999096A CN 116732501 B CN116732501 B CN 116732501B
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- boat
- hollow sleeve
- sleeve
- feet
- support column
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 32
- 239000010439 graphite Substances 0.000 title claims abstract description 32
- 239000004065 semiconductor Substances 0.000 title claims abstract description 11
- 238000007790 scraping Methods 0.000 claims abstract description 51
- 238000000462 isostatic pressing Methods 0.000 claims abstract description 5
- 238000005096 rolling process Methods 0.000 claims description 20
- 229920001875 Ebonite Polymers 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 abstract description 23
- 239000000843 powder Substances 0.000 abstract description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 13
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 12
- 239000012634 fragment Substances 0.000 abstract description 12
- 230000002159 abnormal effect Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 239000000919 ceramic Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000001154 acute effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Inorganic Chemistry (AREA)
- Cleaning In General (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The invention discloses a support boat foot for an isostatic pressing graphite boat for a third-generation semiconductor, which relates to the technical field of graphite boats and comprises a boat body, boat feet, electrode blocks, support columns, floating sleeves and hollow sleeves; the scraping plates horizontally penetrate through the hollow sleeve and can freely slide on the hollow sleeve; the driving part is used for driving the plurality of scraping plates to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards; and the rotating part is used for driving the scraping plate to axially rotate around the support column when the hollow sleeve moves upwards. When the boat body is placed in the tubular PECVD device, along with the lowering of the boat body, the hollow sleeve moves upwards relative to the boat feet, and the rotating part drives the plurality of scraping plates to axially rotate around the supporting columns, so that the plurality of scraping plates can rotate and clean the surface of the electrode seat of the tubular PECVD device, and then the silicon nitride powder and fragments on the surface of the electrode seat are scraped out and are far away from the boat feet, so that the phenomenon that the silicon nitride powder or fragments are contacted with the boat feet, and poor contact between the boat feet and the electrode seat is caused can be avoided.
Description
Technical Field
The invention relates to the technical field of graphite boats, in particular to a support boat foot for an isostatic pressing graphite boat for a third-generation semiconductor.
Background
The graphite boat is used for bearing solar cells and is widely applied to tubular PECVD equipment for solar cell production. The graphite boat structure includes a plurality of graphite sheets arranged at intervals so that the polarities of two adjacent graphite sheets are opposite to each other. The graphite sheets with the same polarity are separated by conductive spacing blocks. In addition, the graphite boat also comprises boat feet which are used for integrally supporting the graphite boat, the boat feet are also generally made of conductive materials, and the graphite boat also plays the role of a separation block while supporting the whole graphite boat, and the graphite sheets with the same polarity are conducted while being separated.
In the production process of the existing tubular PECVD equipment, a double-boat mode is adopted in the industry at present, so that the uniformity of an electric field in a graphite boat is improved. The double-boat radio frequency discharge contact mode is that the double-boat adopts boat foot contact discharge, the front boat adopts boat foot contact, and the rear boat adopts tail electrode hole to make plug-in contact with the electrode rod. Both the two modes have a boat foot contact discharge mode. By adopting the discharging mode, the graphite boat feet are contacted with the electrode seat, but with the increase of the operation times of the tubular PECVD equipment, silicon nitride powder and fragments fall on the electrode seat, the contact effect of the graphite boat feet and the electrode seat is affected, and the abnormal phenomena of abnormal radio frequency voltage and current, abnormal discharge at the abnormal position, and the like are caused by abnormal contact.
Therefore, a support boat leg for an isostatic pressure graphite boat for a third-generation semiconductor is provided.
Disclosure of Invention
The invention aims to provide a support boat leg for an isostatic pressing graphite boat for a third-generation semiconductor, which aims to solve the problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a support boat foot for isostatic pressure graphite boat for third generation semiconductor, includes the boat body and connect in a plurality of boat feet of boat body bottom still includes:
the electrode block is detachably connected to the boat body, a support column is vertically fixedly connected to the electrode block, and the support column is fixedly connected with the boat foot;
the floating sleeve is movably sleeved on the supporting column, a hollow sleeve is coaxially and fixedly connected to the floating sleeve, the bottom of the hollow sleeve is open, and the boat feet are positioned in the hollow sleeve;
the scraping plates are horizontally arranged on the hollow sleeve in a penetrating mode, and can freely slide on the hollow sleeve;
the driving part is used for driving a plurality of scraping plates to move along the radial direction of the hollow sleeve when the hollow sleeve moves upwards;
and the rotating part is used for driving the scraping plate to axially rotate around the supporting column when the hollow sleeve moves upwards.
Preferably, a plurality of ear blocks are fixedly connected on the hollow sleeve in pairs, a sliding space is defined between two adjacent ear blocks, a notch communicated with the sliding space is formed in the hollow sleeve, a fixed block is fixedly connected on the ear blocks, and a waist-shaped hole which is used for clamping the fixed blocks and can slide horizontally and freely is formed in the scraping plate.
Preferably, the flight bottom surface is flush with the hollow sleeve bottom surface.
Preferably, the driving part includes:
a hinge rod hinged to the scraper;
and the rotating ring is rotationally sleeved on the supporting column, and one end of the hinge rod, which is far away from the scraping plate, is hinged on the rotating ring.
Preferably, a plurality of fixing arms are arranged on the outer wall of the hollow sleeve, sliding pins horizontally penetrate through the fixing arms, through grooves for inserting the sliding pins are formed in the hinge rods, and the sliding pins slide in the through grooves freely.
Preferably, the length direction of the through groove is parallel to the length direction of the hinge rod, and an included angle is formed between the length direction of the hinge rod and the axial direction of the support column.
Preferably, a plurality of the hinge rods are arranged in an axial array along the support column.
Preferably, the scraper is made of a hard rubber material.
Preferably, the rotating part includes:
two balls which are embedded on the inner wall of the floating sleeve along the axial direction of the floating sleeve in an array manner;
the two spiral rolling grooves are formed in the supporting columns, the two balls are respectively clamped in the two spiral rolling grooves, and the balls can roll in the spiral rolling grooves.
Preferably, a spring is sleeved on the support column, and two ends of the spring in the elastic direction respectively elastically support against the floating sleeve and the electrode block.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the scrapers, the rotating part and the driving part are arranged, when the boat body is placed in the tubular PECVD device, the hollow sleeve moves upwards relative to the boat feet along with the descending of the boat body, and when the hollow sleeve moves upwards, the plurality of scrapers are driven by the rotating part to rotate around the axial direction of the supporting column, so that the plurality of scrapers can rotate and clean the surface of the electrode seat of the tubular PECVD device, and further, silicon nitride powder and fragments on the surface of the electrode seat are scraped out and are far away from the boat feet, so that the phenomenon that the silicon nitride powder or fragments are contacted with the boat feet, and poor contact between the boat feet and the electrode seat is caused can be avoided;
according to the invention, the hinge rod and the rotating ring are arranged, so that when the hollow sleeve is contacted with the surface of the electrode seat of the tubular PECVD equipment, the hinge rod pushes the scraping plates to move towards the radial outer direction of the hollow sleeve, so that the scraping plates can be mutually far away, the boat leg and the hollow sleeve can relatively move, and the bottom surface of the boat leg can be flush with the bottom surface of the hollow sleeve;
according to the invention, the balls and the spiral rolling grooves are arranged, when the hollow sleeve moves relative to the boat legs, the balls roll in the spiral rolling grooves, so that the hollow sleeve can rotate, and then the scraping plate is driven to rotate, the scraping plate can be mutually far away and synchronously rotated through the movement of the hollow sleeve relative to the boat legs in the process of lowering the boat body, the structure is simple, and silicon nitride powder and fragments on the surface of the electrode seat can be cleaned out in a larger range;
the scraper is made of hard rubber materials, so that the scraper has insulating property, is not easy to influence discharge of boat legs, and can not scratch the surface of the electrode seat of the tubular PECVD device.
Drawings
FIG. 1 is a schematic view of the whole structure of a support boat foot for an isostatic pressing graphite boat for a third generation semiconductor;
FIG. 2 is a schematic view of the structure of FIG. 1 from the bottom;
FIG. 3 is a schematic view of the structure of the present invention with the boat omitted;
FIG. 4 is an exploded schematic view of the structure of FIG. 3;
FIG. 5 is a schematic cross-sectional view of the structure of FIG. 3;
FIG. 6 is a schematic view of the structure of FIG. 3 from below;
FIG. 7 is a schematic view of the assembled support column and boat feet according to the present invention;
FIG. 8 is a schematic view of the assembled floating sleeve and hollow sleeve of the present invention;
fig. 9 is a schematic view of the structure of fig. 8 from the bottom.
In the figure: 1. a boat body; 2. a cushion block; 3. a hinge rod; 4. a floating sleeve; 5. a scraper; 6. a hollow sleeve; 7. boat feet; 8. a spring; 9. a rotating ring; 10. an electrode block; 11. a spiral rolling groove; 12. a through groove; 13. a sliding pin; 14. a waist-shaped hole; 15. ear pieces; 16. a support column; 17. a fixed arm; 18. a notch; 19. a fixed block; 20. and (3) rolling balls.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-9, the present invention provides a technical solution: the utility model provides a support boat foot for isostatic pressure graphite boat for three generations semiconductor, including the boat body 1, a plurality of ceramic pipes wear to be equipped with on the boat body 1 with equidistant level on the boat body 1, a plurality of graphite pieces have been settled on the boat body 1, the ceramic pipe pierces through the graphite piece, and install graphite piece mount on the boat body 1, in addition, boat body 1 length direction both ends still are equipped with a plurality of electrode pieces 10, set up the mounting hole that supplies the ceramic pipe free passage on the electrode piece 10, electrode piece 10 is settled between two adjacent graphite pieces, so make interval between two adjacent graphite pieces equal, electrode piece 10 bottom integrated into one piece is equipped with cushion 2, the upper surface of cushion 2 offsets with boat body 1 lower surface, in addition, the bottom of every cushion 2 is vertical to be equipped with support column 16, support column 16 axial is perpendicular with the length direction of boat body 1, in addition the lower extreme of support column 16 is equipped with boat foot 7, boat foot 7 is used for supporting boat body 1 when boat body 1 is placed in tubular PECVD equipment, still include on this graphite boat:
the floating sleeve 4 is movably sleeved on the support column 16, the floating sleeve 4 can freely slide and rotate on the support column 16, the hollow sleeve 6 is coaxially and fixedly connected to the floating sleeve 4, the bottom of the hollow sleeve 6 is open, the boat foot 7 is positioned in the hollow sleeve 6, the boat foot 7 can freely rotate in the hollow sleeve 6, or the outer surface of the boat foot 7 does not interfere with the hole wall of the inner hole of the hollow sleeve 6, in addition, the depth of the inner hole of the hollow sleeve 6 is larger than the height of the boat foot 7, so that the boat foot 7 can be accommodated in the hollow sleeve 6;
the scraping plates 5 are horizontally penetrated on the hollow sleeve 6, the scraping plates 5 can freely slide on the hollow sleeve 6, specifically, the hollow sleeve 6 is fixedly connected with a plurality of ear blocks 15 in a pair mode, a sliding space is defined between every two adjacent ear blocks 15, a gap 18 communicated with the sliding space is formed in the hollow sleeve 6, a fixing block 19 is fixedly connected on each ear block 15, a waist-shaped hole 14 which is used for clamping the fixing block 19 and can freely slide horizontally is formed in the scraping plates 5, the scraping plates 5 can freely slide horizontally in the gap 18, and in addition, the longitudinal section of each fixing block 19 is rectangular, so that the scraping plates 5 are not easy to swing up and down when the fixing blocks 19 are clamped in the waist-shaped holes 14;
the driving part is used for driving the plurality of scrapers 5 to move along the radial direction of the hollow sleeve 6 when the hollow sleeve 6 moves upwards, when the boat body 1 is placed in the tubular PECVD device, the bottom of the hollow sleeve 6 contacts the electrode seat surface in the tubular PECVD device before the boat feet 7, so that the hollow sleeve 6 moves upwards relative to the boat feet 7 along with the slowing of the boat body 1, and when the hollow sleeve 6 moves upwards, the plurality of scrapers 5 are driven by the driving part to move towards the radial outer side direction of the hollow sleeve 6, so that the plurality of scrapers 5 can be separated from each other, the boat feet 7 can penetrate out from the mouth of the hollow sleeve 6, or the scrapers 5 are separated from each other, so that the boat feet 7 cannot be interfered by the scrapers 5 when moving towards the mouth direction of the hollow sleeve 6;
the rotating part is used for driving the scraping plate 5 to axially rotate around the supporting column 16 when the hollow sleeve 6 moves upwards, the rotating part is used for driving the scraping plate 5 to rotate when the hollow sleeve 6 moves upwards, silicon nitride powder or fragments on the surface of the electrode base can be scraped away when the scraping plate 5 rotates, in addition, the scraping plate 5 can move towards the radial outer side direction of the hollow sleeve 6 when the hollow sleeve 6 moves upwards, so that the scraping plate 5 can horizontally move and rotate through the upward movement of the hollow sleeve 6, the scraping plate 5 can better scrape the silicon nitride powder or fragments on the surface of the electrode base below the boat leg 7, the silicon nitride powder or fragments are prevented from contacting the boat leg 7, and abnormal phenomena are generated when the silicon nitride fragments or the powder contacts the boat leg 7 during operation of the tubular PECVD equipment, as shown in figures 5 and 6, the bottom surface of the scraping plate 5 is flush with the bottom surface of the hollow sleeve 6, and the scraping plate 5 can better scrape the silicon nitride powder or the fragments on the surface of the electrode base of the tubular PECVD equipment.
As shown in fig. 3, 4, 5, and 6, the driving unit includes:
a hinge rod 3 hinged to the scraper 5, i.e. one end of the scraper 5 penetrating out of the hollow sleeve 6 and the lower end of the hinge rod 3;
the rotary ring 9 rotatably sleeved on the support column 16, specifically, the upper end of the support column 16 is sleeved with a bearing, the rotary ring 9 is sleeved on the bearing, so that the rotary ring 9 is rotatably sleeved on the support column 16, and one end of the hinge rod 3, which is far away from the scraping plate 5, is hinged on the rotary ring 9.
In addition, be equipped with a plurality of fixed arms 17 on the hollow cover 6 outer wall, the position and the quantity of fixed arm 17 are corresponding with the position, the quantity of hinge rod 3, slide pin 13 is worn to be equipped with in the level on the fixed arm 17, set up on the hinge rod 3 and supply the logical groove 12 that slide pin 13 inserted, slide pin 13 freely slides in logical inslot 12, when hollow cover 6 contacts the electrode holder surface in the tubular PECVD equipment, hollow cover 6 will be relative boat foot 7 upwards move, in the course of upwards moving, the lower extreme of hinge rod 3 will swing towards the radial outside direction of hollow cover 6, in the course of swinging, slide pin 13 will slide in logical groove 12, make the lower extreme of hinge rod 3 can drive scraper blade 5 towards the radial outside direction of hollow cover 6 and remove, when realizing hollow cover 6 and upwards move, synchronous drive a plurality of scraper blades 5 keep away from each other, in addition through slide pin 13 inserts in logical groove 12, and then can carry out spacing to hollow cover 6 under the static state, hinge rod 3 production self-running swing, and then result in scraper blade 5 to slide out from breach 18.
As shown in fig. 4, the length direction of the through groove 12 is parallel to the length direction of the hinge rod 3, the length direction of the hinge rod 3 forms an included angle with the axial direction of the support column 16, and the included angle is smaller than 90 degrees, so that in the initial state, the hinge rod 3, the support column 16 and the scraping plate 5 form an acute triangle, and when the hollow sleeve 6 moves upwards, the hinge rod 3 can smoothly drive the scraping plate 5 to move towards the outer side direction of the hollow sleeve 6.
As shown in fig. 3, 4, 5 and 6, the plurality of hinge rods 3 are arranged along the axial array of the support column 16, or the scraping plates 5, the fixing arms 17 and the hinge rods 3 are arranged along the axial array of the support column 16, so that when the plurality of scraping plates 5 rotate, the surface cleaning effect of the electrode seat is good, and blind areas are not easy to generate.
As shown in fig. 3, the scraping plate 5 is made of a hard rubber material, so that the scraping plate 5 has insulation performance, and is not easy to affect the discharge of the boat legs 7, and in addition, the scraping plate 5 cannot scratch the surface of the electrode base of the tubular PECVD equipment due to the hard rubber material.
As shown in fig. 5, 7, and 8, the rotating unit includes:
two balls 20 which are embedded on the inner wall of the floating sleeve 4 along the axial direction of the floating sleeve 4 in an array manner, specifically, two spherical grooves are formed in the inner wall of the floating sleeve 4, and the two balls 20 are respectively embedded in the two spherical grooves in a rolling manner, so that the balls 20 can be embedded on the inner wall of the floating sleeve 4 in a rolling manner;
two spiral rolling grooves 11 are formed in the support column 16, two balls 20 are respectively clamped in the two spiral rolling grooves 11 and can roll in the spiral rolling grooves 11, when the hollow sleeve 6 moves upwards, the balls 20 roll in the spiral rolling grooves 11, and along with the rolling of the balls 20 in the spiral rolling grooves 11, the hollow sleeve 6 can be driven to rotate, so that the scraping plate 5 can clean the surface of the electrode seat. In addition, as shown in fig. 5 and 6, the supporting column 16 is sleeved with a spring 8, two ends of the spring 8 in the elastic direction elastically abut against the surfaces of the floating sleeve 4 and the cushion block 2 respectively, and the spring 8 elastically abuts against the floating sleeve 4, so that the hollow sleeve 6 can move downwards in the process of hoisting the boat body 1, the spring 8 drives the floating sleeve 4 to move downwards, so that the hollow sleeve 6 moves downwards, and the bottom surface of the hollow sleeve 6 is located below the bottom surface of the boat leg 7.
The working principle of the invention is as follows: the boat body 1 is hoisted into the tubular PECVD device by using an external hoisting device, then the boat body 1 is slowly lowered, along with the slow lowering of the boat body 1, when the hollow sleeve 6 contacts the electrode seat surface in the tubular PECVD device, the hollow sleeve 6 moves upwards relative to the boat feet 7, during the upward movement, the lower end of the hinge rod 3 swings towards the radial outer direction of the hollow sleeve 6, during the swinging, the sliding pin 13 slides in the through groove 12, so that the lower end of the hinge rod 3 can drive the scraping plate 5 to move towards the radial outer direction of the hollow sleeve 6, and further, the plurality of scraping plates 5 can be mutually separated, so that the boat feet 7 can pass out from the mouth of the hollow sleeve 6, or the hollow sleeve 6 can not be interfered by the scraping plates 5 when the boat feet 7 move towards the mouth of the hollow sleeve 6 through the mutual separation of the scraping plates 5, and simultaneously, when the hollow sleeve 6 moves upwards, simultaneously, the balls 20 roll in the spiral rolling groove 11, and when the balls 20 roll in the spiral rolling groove 11, the hollow sleeve 6 can be driven to rotate, so that the scraping plates 5 can clean the surface of the electrode seat, in addition, the floating sleeve 4 is elastically propped by the springs 8, so that the hollow sleeve 6 can move downwards in the lifting process of the boat body 1, the floating sleeve 4 is driven by the springs 8 to move downwards, so that the hollow sleeve 6 moves downwards, the bottom surface of the hollow sleeve 6 is positioned below the bottom surface of the boat foot 7, when the hollow sleeve 6 moves upwards relative to the boat foot 7, the scraping plates 5 can move towards the radial outer side direction of the hollow sleeve 6, the scraping plates 5 can also rotate along the axial direction of the hollow sleeve 6, or the scraping plates 5 can synchronously rotate along with the hollow sleeve 6, so that the boat foot 7 can move towards the outer side of the mouth of the hollow sleeve 6 after the scraping plates 5 are mutually far away, until the bottom of the boat foot 7 contacts with the surface of the electrode seat in the tubular PECVD device, the boat foot 7 is conducted with the electrode seat in the tubular PECVD device and is in an electric connection state, as the boat foot 7 is close to the electrode seat in the tubular PECVD device until contacting, the plurality of scrapers 5 are rotated and translated, and then the silicon nitride powder or fragments on the surface of the electrode seat in the tubular PECVD device are cleaned, the surface of the boat foot 7 cannot contact with the silicon nitride powder or fragments, so that when the boat foot 7 is discharged with the electrode seat, abnormal arc phenomenon cannot occur, and in addition, the electrode seat surface is cleaned without entering the tubular PECVD device in a manual mode, so that the potential safety hazard to workers can be reduced.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (2)
1. The utility model provides a support boat foot for isostatic pressure graphite boat for third generation semiconductor, includes the boat body (1) and connect in a plurality of boat feet (7) of the bottom of the boat body (1), its characterized in that still includes:
an electrode block (10) detachably connected to the boat body (1), wherein a support column (16) is vertically fixedly connected to the electrode block (10), and the support column (16) is fixedly connected with the boat foot (7);
the floating sleeve (4) is movably sleeved on the supporting column (16), the hollow sleeve (6) is coaxially and fixedly connected to the floating sleeve (4), the bottom of the hollow sleeve (6) is open, and the boat feet (7) are positioned in the hollow sleeve (6);
a plurality of scrapers (5) horizontally penetrating through the hollow sleeve (6), wherein the scrapers (5) can freely slide on the hollow sleeve (6);
a driving part for driving a plurality of scraping plates (5) to move along the radial direction of the hollow sleeve (6) when the hollow sleeve (6) moves upwards;
a rotating part for driving the scraping plate (5) to axially rotate around the supporting column (16) when the hollow sleeve (6) moves upwards;
a plurality of ear blocks (15) are fixedly connected on the hollow sleeve (6) in pairs, a sliding space is defined between two adjacent ear blocks (15), a gap (18) communicated with the sliding space is formed in the hollow sleeve (6), a fixed block (19) is fixedly connected on the ear blocks (15), and a waist-shaped hole (14) which is used for being clamped by the fixed block (19) and can slide horizontally and freely is formed in the scraping plate (5);
the bottom surface of the scraping plate (5) is flush with the bottom surface of the hollow sleeve (6);
the driving section includes:
a hinge rod (3) hinged to the scraper (5);
a rotating ring (9) rotationally sleeved on the supporting column (16), wherein one end of the hinge rod (3) far away from the scraping plate (5) is hinged on the rotating ring (9);
a plurality of fixed arms (17) are arranged on the outer wall of the hollow sleeve (6), sliding pins (13) horizontally penetrate through the fixed arms (17), through grooves (12) for inserting the sliding pins (13) are formed in the hinge rods (3), and the sliding pins (13) slide in the through grooves (12) freely;
the length direction of the through groove (12) is parallel to the length direction of the hinge rod (3), and an included angle is formed between the length direction of the hinge rod (3) and the axial direction of the support column (16);
a plurality of hinge rods (3) are axially arranged in an array along the support column (16);
the rotating part includes:
two balls (20) which are embedded on the inner wall of the floating sleeve (4) along the axial direction of the floating sleeve (4) in an array manner;
the two spiral rolling grooves (11) are formed in the support column (16), and the two balls (20) are respectively clamped in the two spiral rolling grooves (11) and can roll in the spiral rolling grooves (11);
the support column (16) is sleeved with a spring (8), and two ends of the spring (8) in the elastic direction elastically abut against the floating sleeve (4) and the electrode block (10) respectively.
2. The support boat foot for the isostatic pressing graphite boat for the third-generation semiconductors according to claim 1, wherein the scraping plate (5) is made of hard rubber materials.
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