CN116719140B - Multi-axis adjusting device for micron-sized optical slit - Google Patents
Multi-axis adjusting device for micron-sized optical slit Download PDFInfo
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- CN116719140B CN116719140B CN202310970497.9A CN202310970497A CN116719140B CN 116719140 B CN116719140 B CN 116719140B CN 202310970497 A CN202310970497 A CN 202310970497A CN 116719140 B CN116719140 B CN 116719140B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 73
- 238000006073 displacement reaction Methods 0.000 claims abstract description 24
- 238000007906 compression Methods 0.000 claims description 11
- 230000006835 compression Effects 0.000 claims description 10
- 239000003292 glue Substances 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 7
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 description 6
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 4
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 230000001186 cumulative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
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Abstract
The application discloses a multi-axis adjusting device for a micron-sized optical slit, which comprises an axial displacement adjusting device, an optical slit and an angle rotating device; the middle part of the axial displacement adjusting device is provided with an axial adjusting component, the middle part of the axial adjusting component is provided with a through hole for the light path to pass through, and the front end of the axial adjusting component is connected with the optical slit; the rear end of the axial displacement adjusting device is connected with the angle rotating device, the middle part of the angle rotating device is provided with a fine adjustment rotating assembly, the angle adjusting assembly is arranged above the angle rotating device, and the angle adjusting assembly is connected with the fine adjustment rotating assembly and used for adjusting the rotating angle of the fine adjustment rotating assembly; and an inner hole for installing a standard lens sleeve is formed in the middle of the fine adjustment rotating assembly. The application has compact structure and can realize the offset of the optical slit in the X, Y axial direction and the rotation of the optical slit in the angular direction.
Description
Technical Field
The application relates to the technical field of optical equipment, in particular to a micrometer-scale optical slit multi-axis adjusting device.
Background
The optical slit is functionally divided into an outgoing incident slit and a middle slit. The exit entrance and intermediate slits are an important part of the spectrometer. The main function of the entrance and exit slits is to control the resolution of the instrument, and the middle slit is mainly used for suppressing stray light.
The width of the optical slit is usually very small and ranges from 5um to 200um, and the machining precision of a common machined part is also 10 to 50um, so that the position of the optical slit is difficult to ensure by the machining precision. Due to insufficient accuracy of the position, there is often a loss of resolution or light source intensity. The optical slit at the present stage is usually adjusted manually under a microscope and then fixed by UV glue, so that the time is consumed, the precision is totally dependent on personal hand feeling, and mass production is difficult. After the light source passes through the cylindrical lens, the outgoing light is generally a linear light source, and if the angle and plane positioning accuracy positions of the optical slit are not right, a part of the light can be shielded, so that the loss of energy and the field of view range is brought, the image is unclear during imaging, and the image information is lost.
The existing lens sleeve fixing support can only adjust the displacement in the height direction, but cannot adjust pitching deflection and the height direction at the same time. As the larger the size of the work piece, the larger the machining tolerance, and the cumulative tolerance of the plurality of parts becomes larger. In the case where the system optical path is relatively long, it is not sufficient to perform only ordinary height direction adjustment in order to ensure the collimation of the system optical path. The existing scheme is that cage connection is carried out among a plurality of parts through a guide shaft, and due to the influences of the weight of a machined part and the position tolerance of a positioning hole, a certain angle deviation and a certain height deviation still exist in a light path, meanwhile, the larger the machining area is, the lower the machining precision is, the larger the deviation is, and the larger the pitching deflection error is brought. In the case of a long optical path, the height h=length l×tan; machining angle errors and height deviations increase with length, so that simultaneous precise pitching deflection and height direction adjustment are necessary;
the existing method is generally carried out under a microscope, manually adjusted by hands and then fixed by applying UV glue. The lens sleeve with the optical lens is placed into the lens sleeve slip ring, and then the screw is locked. The lens sleeve slip ring is connected with the connecting rod support through threads, the connecting rod support is placed into the mounting base and locked through the locking screw, and the mounting base provides a guiding function in the height direction. And finally, pressing the mounting base through a pressing block to fix the mounting base on the optical platform.
The prior device has the following problems:
1. time is consumed, the precision is fully dependent on personal hand feeling, and batch production is difficult;
2. there is no device capable of adjusting the X/Y axis and angle of the optical slit at home and abroad. The adjusting devices at home and abroad are separated, either the X/Y axes can be adjusted with high precision, or the angles can be adjusted with high precision, or two devices are installed together through a threaded connecting piece, so that the effect of adjusting the X/Y axes and the angles simultaneously is achieved, and the structure is not compact enough, and the space is large.
3. There is no high precision angle adjusting device which can be directly installed on the lens sleeve in domestic market and patent, thus, many lenses or similar optical slits with special angle requirements can be assembled by manual mode, then the lens is fixed by UV glue, the personal technical requirement is very high, time is consumed, if the UV glue on the part is loose, the angle can be readjusted, and the time is generally several days.
4. The existing lens sleeve fixing support can only regulate the displacement in the height direction by virtue of the hand feeling of workers, and can not accurately regulate the pitching deflection and the height direction at the same time.
Disclosure of Invention
The application aims to provide a micrometer-scale optical slit multi-axis adjusting device so as to overcome the defects in the prior art.
In order to achieve the above purpose, the present application provides the following technical solutions:
the application discloses a multi-axis adjusting device for a micron-sized optical slit, which comprises an axial displacement adjusting device, an optical slit and an angle rotating device; the middle part of the axial displacement adjusting device is provided with an axial adjusting component, the middle part of the axial adjusting component is provided with a through hole for the light path to pass through, and the front end of the axial adjusting component is connected with the optical slit; the rear end of the axial displacement adjusting device is connected with the angle rotating device, the middle part of the angle rotating device is provided with a fine adjustment rotating assembly, the angle adjusting assembly is arranged above the angle rotating device, and the angle adjusting assembly is connected with the fine adjustment rotating assembly and used for adjusting the rotating angle of the fine adjustment rotating assembly; and an inner hole for installing a standard lens sleeve is formed in the middle of the fine adjustment rotating assembly.
Preferably, the axial displacement adjusting device comprises a main body frame, an X-axis adjusting knob and a Y-axis adjusting knob, wherein a movable groove for installing an axial adjusting assembly is formed in the middle of the main body frame, and the axial adjusting assembly comprises a sliding block, an X-axis guide block, a Y-axis guide block and a compression spring; the working end of the X-axis adjusting knob horizontally passes through the main body frame and then contacts with the sliding block, one side of the sliding block, which is far away from the X-axis adjusting knob, is provided with an X-axis guide block, and a compression spring is arranged between the X-axis guide block and the inner wall of the movable groove; the working end of the Y-axis adjusting knob vertically penetrates through the main body frame and then contacts with the sliding block, one side, far away from the Y-axis adjusting knob, of the sliding block is provided with a Y-axis guide block, and a compression spring is arranged between the Y-axis guide block and the inner wall of the movable groove.
Preferably, a first locking nut is arranged between the X-axis adjusting knob, the Y-axis adjusting knob and the main body frame.
Preferably, an optical slit connector is arranged at the front end of the axial adjusting component, an optical slit is arranged on the optical slit connector, the optical slit comprises a slit sheet and a slit base, the slit sheet is fixed on the slit base, the slit base is fixed on the optical slit connector, and the slit position of the slit sheet is consistent with the slit base and the scale marks of silk-screen printing on the optical slit connector.
Preferably, the slit sheet is fixedly connected with the slit base through glue, the slit base is fixedly connected with the optical slit connecting piece through glue, and the optical slit connecting piece is fixedly connected with the axial adjusting component through bolts.
Preferably, the angle rotating device comprises an angle fine adjustment frame, and a central hole for installing a fine adjustment rotating component is formed in the middle of the angle fine adjustment frame; the angle adjusting assembly comprises a spring connecting piece, a spring connecting screw, a tension spring and a fine adjustment screw pair; the angle fine adjustment device comprises an angle fine adjustment frame, a tension spring, a fine adjustment screw pair, a locking nut and a fine adjustment screw pair, wherein the fine adjustment screw pair is arranged on the angle fine adjustment frame; the side of the angle fine adjustment frame is provided with an angle locking screw for locking the fine adjustment rotating assembly.
Preferably, a fixed support frame is arranged on an inner hole in the middle of the fine tuning rotating assembly, a mounting hole for mounting the standard lens sleeve is formed in the middle of the fixed support frame, and a plurality of POM head set screws for fastening the standard lens sleeve are arranged on the side wall of the fixed support frame.
Preferably, an annular inner groove is formed in one end, connected with the fine adjustment rotating assembly, of the fixed support frame, a guide locking screw is arranged on the side face of the fine adjustment rotating assembly, and the working end of the guide locking screw is located in the annular inner groove.
Preferably, the device also comprises a cage type supporting frame; the cage type support frame comprises a flange base body, wherein a plurality of connecting holes are further formed in the flange base body and used for cage type connection with other parts through a guide shaft; the middle part of the flange base body is provided with a through hole for installing a standard lens sleeve, and one side of the through hole is provided with a locking mechanism for adjusting the tightness of the through hole; the flange comprises a flange base body, wherein two sides of the bottom of the flange base body are provided with connecting seats, the bottoms of the connecting seats are fixedly connected with an optical platform through fixing screws, and a plurality of adjusting screws are arranged on the connecting seats.
Preferably, a sealing end cover is arranged on the rear side of the main body frame and is used for sealing the axial adjusting assembly.
The application has the beneficial effects that:
1. the structure is compact, and the offset of the optical slit in the X, Y axial direction and the rotation of the optical slit in the angular direction can be realized;
2. the combination installation can be carried out with a cage structure and a standard optical sleeve;
3. the lens sleeve fixing and pitching deflection adjusting device can adjust pitching deflection and height direction of the lens sleeve, and brings higher collimation to an optical system so as to improve imaging resolution of the system.
The features and advantages of the present application will be described in detail by way of example with reference to the accompanying drawings.
Drawings
FIG. 1 is a schematic diagram of a multi-axis adjusting device for a micro-scale optical slit according to the present application;
FIG. 2 is a schematic structural view of an axial displacement adjustment device of the present application;
FIG. 3 is a front view of the axial displacement adjustment device of the present application;
FIG. 4 is a cross-sectional view of the axial displacement adjustment device of the present application;
FIG. 5 is a side cross-sectional view of the axial displacement adjustment device of the present application;
FIG. 6 is a schematic view of the structure of an optical slit of the present application;
FIG. 7 is a schematic view of the angle rotating apparatus of the present application;
FIG. 8 is a front view of the angular rotation device of the present application;
FIG. 9 is a schematic cross-sectional view at A-A of FIG. 8;
FIG. 10 is a schematic cross-sectional view at B-B in FIG. 8;
FIG. 11 is a schematic view of the cage of the present application;
in the figure: 1-axial displacement adjusting device, 11-main body frame, 12-X axis adjusting knob, 13-Y axis adjusting knob, 14-movable groove, 15-sealing end cover, 16-locking nut I, 17-optical slit connector, 2-optical slit, 21-slit sheet, 22-slit base, 3-angle rotating device, 31-angle fine tuning frame, 32-angle locking screw, 4-cage support frame, 41-flange base, 42-locking mechanism, 43-connecting hole, 45-fixing screw, 46-adjusting screw, 61-slider, 62-X axis guide block, 63-Y axis guide block, 64-compression spring, 7-fine tuning rotating component, 71-fixing support frame, 72-POM head set screw, 73-annular inner groove, 74-guiding locking screw, 8-angle adjusting component, 81-spring connector, 82-spring connecting screw, 83-tension spring, 84-fine tuning screw pair, 85-locking nut II.
Detailed Description
The present application will be further described in detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present application more apparent. It should be understood that the detailed description and specific examples, while indicating the application, are intended for purposes of illustration only and are not intended to limit the scope of the application. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the present application.
Referring to fig. 1, an embodiment of the present application provides a micro-scale optical slit multi-axis adjusting device, which includes an axial displacement adjusting device 1, an optical slit 2, and an angle rotating device 3; the middle part of the axial displacement adjusting device 1 is provided with an axial adjusting component, the middle part of the axial adjusting component is provided with a through hole for the light path to pass through, and the front end of the axial adjusting component is connected with the optical slit 2; the rear end of the axial displacement adjusting device 1 is connected with the angle rotating device 3, a fine adjustment rotating assembly 7 is arranged in the middle of the angle rotating device 3, an angle adjusting assembly 8 is arranged above the angle rotating device 3, and the angle adjusting assembly 8 is connected with the fine adjustment rotating assembly 7 and used for adjusting the rotating angle of the fine adjustment rotating assembly 7; the middle part of the fine tuning rotating assembly 7 is provided with an inner hole for installing a standard lens sleeve.
Referring to fig. 2-5, the axial displacement adjustment device 1 includes a main body frame 11, an X-axis adjustment knob 12, and a Y-axis adjustment knob 13, where a movable slot 14 for mounting an axial adjustment assembly is provided in the middle of the main body frame 11, and the axial adjustment assembly includes a slider 61, an X-axis guide block 62, a Y-axis guide block 63, and a compression spring 64; the working end of the X-axis adjusting knob 12 horizontally passes through the main body frame 11 and then contacts with the sliding block 61, one side of the sliding block 61 far away from the X-axis adjusting knob 12 is provided with an X-axis guide block 62, and a compression spring 64 is arranged between the X-axis guide block 62 and the inner wall of the movable groove 14; the working end of the Y-axis adjusting knob 13 vertically passes through the main body frame 11 and then contacts with the sliding block 61, one side of the sliding block 61 far away from the Y-axis adjusting knob 13 is provided with a Y-axis guide block 63, and a compression spring 64 is arranged between the Y-axis guide block 63 and the inner wall of the movable groove 14. A first locking nut 16 is arranged between the X-axis adjusting knob 12, the Y-axis adjusting knob 13 and the main body frame 11, so that the first locking nut is locked and fixed and cannot move by rotating the knob; the rear side of the main body frame 11 is provided with a sealing end cover 15 for sealing the axial adjustment assembly.
When the span Y-axis adjusting knob 13 and the X-axis adjusting knob 12 are displaced, the compression spring 64 and the guide block provide a force in a fixed direction; a slider 61 of brass material having a low friction coefficient is required to be mounted on the main body frame 11, and the slider 61 is pushed to move in the X/Y direction by displacement generated after the Y-axis adjustment knob 13 and the X-axis adjustment knob 12 are rotated;
referring to fig. 6, an optical slit connector 17 is disposed at the front end of the axial adjustment assembly, an optical slit 2 is disposed on the optical slit connector 17, the optical slit 2 includes a slit plate 21 and a slit base 22, the slit plate 21 is fixed on the slit base 22, the slit base 22 is fixed on the optical slit connector 17, and the slit position of the slit plate 21 is consistent with the scale marks of silk-screen printing on the slit base 22 and the optical slit connector 17; the slit sheet 21 is fixedly connected with the slit base 22 through glue, the slit base 22 is fixedly connected with the optical slit connector 17 through glue, and the optical slit connector 17 is fixedly connected with the axial adjusting component through bolts.
Referring to fig. 7 to 10, the angle rotation device 3 includes an angle fine adjustment frame 31, and a central hole for installing the fine adjustment rotation assembly 7 is provided in the middle of the angle fine adjustment frame 31; the angle adjusting assembly 8 comprises a spring connecting piece 81, a spring connecting screw 82, a tension spring 83 and a fine adjustment screw pair 84; the fine adjustment rotating assembly 7 is provided with a spring connecting piece 81, the angle fine adjustment frame 31 is provided with a spring connecting screw 82, two ends of the tension spring 83 are respectively connected with the spring connecting piece 81 and the spring connecting screw 82, one end of the spring connecting piece 81 is connected with a fine adjustment thread pair 84, and a second locking nut 85 is arranged between the fine adjustment thread pair 84 and the angle fine adjustment frame 31; the side of the angle fine adjustment frame 31 is provided with an angle locking screw 32 for locking the fine adjustment rotating assembly 7.
The angle rotating device 3 and the axial displacement adjusting device 1 are in threaded connection through two threaded holes at opposite angles, the angle fine adjustment frame 31 is connected with the fine adjustment thread pair 84, the rotating angle of the fine adjustment rotating assembly 7 is controlled through rotating the fine adjustment thread pair 84, the spring connecting piece 81 is installed on the fine adjustment rotating assembly 7, the spring connecting screw 82 is installed on the angle fine adjustment frame 31, the tension spring 83 is connected to the spring connecting piece 81 and the spring connecting screw 82, and the tension spring 83 provides an acting force when rotating the fine adjustment thread pair 84. After rotating the second lock nut 85, the second lock nut can not move any more. The micro-penetration angle locking screw 32 is in threaded connection against the fine adjustment rotating assembly 7 so that the micro-adjustment rotating assembly cannot move, and the locking effect is achieved.
The inner hole in the middle of the fine tuning rotating assembly 7 is provided with a fixed supporting frame 71, the middle of the fixed supporting frame 71 is provided with a mounting hole for mounting a standard lens sleeve, and the side wall of the fixed supporting frame 71 is provided with a plurality of POM head set screws 72 for fastening the standard lens sleeve.
The fixed support 71 is provided with an annular inner groove 73 at one end connected with the fine adjustment rotating assembly 7, a guide locking screw 74 is arranged on the side face of the fine adjustment rotating assembly 7, and the working end of the guide locking screw 74 is located in the annular inner groove 73.
The fixed support 71 is connected with the standard lens sleeve through 4 POM head set screws 72, and the thread heads of the POM head set screws 72 are made of plastics, so that the surface of the standard lens optical sleeve cannot be damaged like a metal head. The fixed support frame 71 is plugged into the inner hole of the fine adjustment rotating assembly 7, the fixed support frame 71 is provided with a 45-degree annular inner groove 73 and is matched with a guide locking screw 74 with a 45-degree tip, the fine adjustment rotating assembly 7 can be subjected to wide-range angle adjustment when the guide locking screw 74 is not locked normally, and the fine adjustment screw pair 84 can only be rotated to perform angle micron-level adjustment after locking;
referring to fig. 11, the device further comprises a cage type supporting frame 4; the cage type support frame 4 comprises a flange base body 41, wherein a plurality of connecting holes 43 are formed in the flange base body 41 and are used for cage type connection with other parts through guide shafts; the middle part of the flange base body 41 is provided with a through hole for installing a standard lens sleeve, and one side of the through hole is provided with a locking mechanism 42 for adjusting the tightness of the through hole; the flange base 41 is provided with a connecting seat on two sides of the bottom, the bottom of the connecting seat is fixedly connected with the optical platform through fixing screws 45, and a plurality of adjusting screws 46 are arranged on the connecting seat. The pitching deflection and the height direction of the lens sleeve can be adjusted, so that higher collimation is brought to the optical system, and the resolution of imaging of the system is improved;
the foregoing description of the preferred embodiments of the application is not intended to be limiting, but rather is intended to cover all modifications, equivalents, or alternatives falling within the spirit and principles of the application.
Claims (8)
1. A micron-sized optical slit multi-axis adjusting device is characterized in that: comprises an axial displacement adjusting device (1), an optical slit (2) and an angle rotating device (3); an axial adjusting component is arranged in the middle of the axial displacement adjusting device (1), a through hole for the light path to pass through is formed in the middle of the axial adjusting component, and the front end of the axial adjusting component is connected with the optical slit (2); the rear end of the axial displacement adjusting device (1) is connected with the angle rotating device (3), a fine adjustment rotating assembly (7) is arranged in the middle of the angle rotating device (3), an angle adjusting assembly (8) is arranged above the angle rotating device (3), and the angle adjusting assembly (8) is connected with the fine adjustment rotating assembly (7) and used for adjusting the rotating angle of the fine adjustment rotating assembly (7); an inner hole for installing a standard lens sleeve is formed in the middle of the fine adjustment rotating assembly (7);
the angle rotating device (3) comprises an angle fine adjustment frame (31), and a central hole for installing a fine adjustment rotating component (7) is formed in the middle of the angle fine adjustment frame (31); the angle adjusting assembly (8) comprises a spring connecting piece (81), a spring connecting screw (82), a tension spring (83) and a fine adjustment thread pair (84); the fine adjustment rotating assembly (7) is provided with a spring connecting piece (81), the angle fine adjustment frame (31) is provided with a spring connecting screw (82), two ends of the tension spring (83) are respectively connected with the spring connecting piece (81) and the spring connecting screw (82), one end of the spring connecting piece (81) is connected with a fine adjustment thread pair (84), and a locking nut II (85) is arranged between the fine adjustment thread pair (84) and the angle fine adjustment frame (31); an angle locking screw (32) for locking the fine adjustment rotating assembly (7) is arranged on the side surface of the angle fine adjustment frame (31); the axial displacement adjusting device (1) comprises a main body frame (11), an X-axis adjusting knob (12) and a Y-axis adjusting knob (13), wherein a movable groove (14) for installing an axial adjusting assembly is formed in the middle of the main body frame (11), and the axial adjusting assembly comprises a sliding block (61), an X-axis guide block (62), a Y-axis guide block (63) and a compression spring (64); the working end of the X-axis adjusting knob (12) horizontally passes through the main body frame (11) and then contacts with the sliding block (61), one side of the sliding block (61) far away from the X-axis adjusting knob (12) is provided with an X-axis guide block (62), and a compression spring (64) is arranged between the X-axis guide block (62) and the inner wall of the movable groove (14); the working end of the Y-axis adjusting knob (13) vertically penetrates through the main body frame (11) and then contacts with the sliding block (61), one side, away from the Y-axis adjusting knob (13), of the sliding block (61) is provided with a Y-axis guide block (63), and a compression spring (64) is arranged between the Y-axis guide block (63) and the inner wall of the movable groove (14).
2. The micro-scale optical slit multiaxial adjusting device as defined in claim 1, wherein: and a first locking nut (16) is arranged between the X-axis adjusting knob (12), the Y-axis adjusting knob (13) and the main body frame (11).
3. The micro-scale optical slit multiaxial adjusting device as defined in claim 1, wherein: the front end of axial adjusting component is equipped with optical slit connecting piece (17), be equipped with optical slit (2) on optical slit connecting piece (17), optical slit (2) are including slit piece (21) and slit base (22), be fixed with slit piece (21) on slit base (22), slit base (22) are fixed in on optical slit connecting piece (17), the slit position of slit piece (21) with the scale mark of silk screen printing on slit base (22), optical slit connecting piece (17) is unanimous.
4. A micrometer-scale optical slit multiaxial adjusting device as defined in claim 3 wherein: the slit sheet (21) is fixedly connected with the slit base (22) through glue, the slit base (22) is fixedly connected with the optical slit connecting piece (17) through glue, and the optical slit connecting piece (17) is fixedly connected with the axial adjusting component through bolts.
5. The micro-scale optical slit multiaxial adjusting device as defined in claim 1, wherein: the inner hole in the middle of the fine-tuning rotating assembly (7) is provided with a fixed supporting frame (71), the middle of the fixed supporting frame (71) is provided with a mounting hole for mounting a standard lens sleeve, and the side wall of the fixed supporting frame (71) is provided with a plurality of POM head set screws (72) for fastening the standard lens sleeve.
6. The micro-scale optical slit multiaxial adjusting device as defined in claim 5, wherein: the fixed support frame (71) is equipped with annular inner groove (73) with the one end that fine setting rotating assembly (7) is connected, the side of fine setting rotating assembly (7) is equipped with direction locking screw (74), the work end of direction locking screw (74) is arranged in annular inner groove (73).
7. The micro-scale optical slit multiaxial adjusting device as defined in claim 1, wherein: also comprises a cage type supporting frame (4); the cage type support frame (4) comprises a flange base body (41), and a plurality of connecting holes (43) are formed in the flange base body (41) and are used for cage type connection with other parts through guide shafts; the middle part of the flange base body (41) is provided with a through hole for installing a standard lens sleeve, and one side of the through hole is provided with a locking mechanism (42) for adjusting tightness of the through hole; the flange comprises a flange base body (41), wherein connecting seats are arranged on two sides of the bottom of the flange base body, the bottom of each connecting seat is fixedly connected with an optical platform through fixing screws (45), and a plurality of adjusting screws (46) are arranged on each connecting seat.
8. The micro-scale optical slit multiaxial adjusting device as defined in claim 1, wherein: the rear side of the main body frame (11) is provided with a sealing end cover (15) for sealing the axial adjusting assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310970497.9A CN116719140B (en) | 2023-08-03 | 2023-08-03 | Multi-axis adjusting device for micron-sized optical slit |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202310970497.9A CN116719140B (en) | 2023-08-03 | 2023-08-03 | Multi-axis adjusting device for micron-sized optical slit |
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| CN116719140B true CN116719140B (en) | 2023-11-24 |
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| WO2018076339A1 (en) * | 2016-10-31 | 2018-05-03 | 中国科学院长春光学精密机械与物理研究所 | Six-degree-of-freedom microdisplacement regulating device for optical element, projection objective and lithography machine |
| CN108414084A (en) * | 2017-02-10 | 2018-08-17 | 北京金泰祁氏光电科技有限公司 | Regulating device and spectrometer |
| CN110285883A (en) * | 2019-06-27 | 2019-09-27 | 中国科学院西安光学精密机械研究所 | A kind of rotational electric slit |
| CN111208615A (en) * | 2020-03-09 | 2020-05-29 | 长沙麓邦光电科技有限公司 | Optical element adjusting frame |
| CN114019692A (en) * | 2021-11-23 | 2022-02-08 | 长园运泰利视觉科技(珠海)有限公司 | Optical device position adjusting device |
| CN217980545U (en) * | 2022-06-17 | 2022-12-06 | 重庆国科医创科技发展有限公司 | Adjustable optical slit device suitable for Raman spectrometer |
| CN217587729U (en) * | 2022-07-28 | 2022-10-14 | 苏州中科行智智能科技有限公司 | Slit adjustable device |
| CN219349231U (en) * | 2023-04-17 | 2023-07-14 | 广东立胜光学有限公司 | Optical lens positioning assembly |
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