CN116642612B - Sensor, preparation method thereof, manipulator and robot - Google Patents

Sensor, preparation method thereof, manipulator and robot Download PDF

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Publication number
CN116642612B
CN116642612B CN202310931899.8A CN202310931899A CN116642612B CN 116642612 B CN116642612 B CN 116642612B CN 202310931899 A CN202310931899 A CN 202310931899A CN 116642612 B CN116642612 B CN 116642612B
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China
Prior art keywords
substrate
optical fiber
high refractive
hole
core
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CN116642612A (en
Inventor
张璋
朱世强
谢安桓
张磊
张璞
孔令雨
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Zhejiang Lab
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Zhejiang Lab
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/24Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping

Abstract

The application relates to a sensor, a preparation method thereof, a manipulator and a robot. The sensor is for connection with a light source and a brightness detector and comprises a substrate and a high refractive core. The substrate includes a force bearing surface, sides, and fully reflective apertures. The side surface is connected with the stress surface and the extending direction is different from the stress surface. The full reflection hole penetrates through the substrate, and at least one end of the full reflection hole is arranged on the side face. A high refractive core is disposed in the total reflection hole. The high refractive core includes an entrance end and an exit end. The incident end is used for being connected with a light source. The emergent end is used for being connected with the brightness detector. Wherein the refractive index of the substrate is lower than the refractive index of the high refractive core.

Description

Sensor, preparation method thereof, manipulator and robot
Technical Field
The application relates to the technical field of robots, in particular to a sensor, a preparation method thereof, a manipulator and a robot.
Background
For a manipulator, flexible gripping is to be achieved, and the sensing capability of fingertip pressure is very important. For example, when picking the agricultural products, the picking robot needs to sense the fingertip pressure in real time so as to avoid damage to the agricultural products due to excessive grabbing force. The intelligent manipulator can flexibly judge the contact state of the manipulator and the target object through pressure sensing. For the playing robot, the force of each touch key needs to be sensitively perceived in real time, so that the accurate and sensitive control of the touch key force can be realized.
Conventional tactile sensors typically have too small a contact area or uneven sensitivity across the contact surface, which can cause the sensor to respond to pressure levels that affect the position and direction of the sensor's output signal.
Disclosure of Invention
The application provides a sensor, a preparation method thereof, a manipulator and a robot, so as to solve part or all of the defects in the related art.
A first aspect of the present application provides a sensor for connection with a light source and a luminance detector, comprising:
a substrate comprising a force bearing surface, a side surface, and a fully reflective aperture; the side surface is connected with the stressed surface and the extending direction is different from the stressed surface; the full reflection hole penetrates through the substrate, and at least one end of the full reflection hole is arranged on the side face; and
a high refractive core disposed in the total reflection hole; the high refraction core comprises an incident end and an emergent end; the incident end is used for being connected with a light source; the emergent end is used for being connected with the brightness detector; wherein the refractive index of the substrate is lower than the refractive index of the high refractive core.
Further, the sensor further includes:
the input optical fiber is inserted into the high refractive core at the incidence end and is used for connecting the incidence end and the light source; and/or, an output optical fiber is inserted into the high refractive core at the exit end for connecting the exit end and the brightness detector.
Further, the input optical fiber is inserted into the high refractive core to a depth of greater than or equal to 4mm and less than or equal to 6mm; and/or the depth of insertion of the output optical fiber into the high refractive core is greater than or equal to 4mm and less than or equal to 6mm.
Further, the substrate has a dimension greater than or equal to 1cm and less than or equal to 20cm in a direction parallel to the force bearing surface.
Further, the thickness of the substrate is greater than or equal to 0.45mm.
Further, the material of the substrate and/or the high refractive core is silica gel.
A second aspect of the present application provides a method for preparing the sensor according to the previous embodiment, including:
obtaining a substrate and forming a full reflection hole on the substrate;
and forming a high refractive index core in the total reflection hole to obtain the sensor.
Further, the method for obtaining the substrate and forming the full reflection hole on the substrate specifically comprises the following steps:
coating silica gel fluid on the base and solidifying to obtain a first half;
placing a hole forming member on the first half; the extending direction of the hole forming piece is different from the thickness direction of the first half part;
coating silica gel fluid on the first half part and the hole forming piece and solidifying to obtain the substrate; the refractive index of the silica gel fluid of the substrate is smaller than the refractive index of the high refractive core;
and extracting the hole forming piece to obtain the total reflection hole.
Further, the thickness of the first half is greater than or equal to 0.1mm; and/or the thickness of the substrate is greater than or equal to 0.45mm.
Further, the hole forming member is an optical fiber.
Further, the size of the substrate is greater than or equal to 1cm and less than or equal to 20cm in the extending direction of the total reflection hole.
Further, the forming the high refractive core in the total reflection hole specifically includes:
filling silica gel fluid in the total reflection hole and solidifying; the refractive index of the silica gel fluid of the high refractive core is greater than the refractive index of the substrate.
Further, after filling the silica gel fluid in the total reflection hole, the method further comprises:
an optical fiber is inserted into the silica gel fluid at least one end of the total reflection hole.
Further, the optical fiber is inserted into the high refractive index material to a depth of greater than or equal to 4mm and less than or equal to 6mm.
Further, the end face of the optical fiber is perpendicular to the extending direction of the optical fiber.
Further, the curing temperature is greater than or equal to 60 ℃ and less than or equal to 100 ℃.
A third aspect of the present application provides a manipulator comprising a light source, a brightness detector, a finger, and a sensor according to the previous embodiments; the finger comprises a finger tip and a finger root; wherein the fingertip part comprises a liquid filling hole; the liquid filling hole comprises a stress end and a sensing end; the stress end is arranged at one side of the fingertip part far away from the finger root part; the sensing end is arranged on one side of the fingertip part facing the finger root part; the sensor is arranged at the sensing end; the manipulator further includes:
filling liquid into the liquid filling hole; and
the sealing film is arranged at the stress end; the forced surface of the substrate and the sealing film seal the liquid filling hole.
Further, the bore diameter of the charging hole decreases from the force-receiving end toward the sensing end.
Further, the filling liquid comprises at least one of water, glycerol or silicone oil.
Further, the sealing film is made of polyimide film, polycarbonate, polyethylene terephthalate, polymethyl methacrylate, or polypropylene.
A fourth aspect of the present application provides a robot comprising a manipulator as described in the previous embodiments.
The technical scheme provided by the embodiment of the application can comprise the following beneficial effects:
as can be seen from the above embodiments, the sensor of the present application is capable of directly achieving total reflection of light using the refractive index difference between the high refractive index core and the substrate. Therefore, the external force can directly act on the substrate, and the sensitivity of the sensor to external force detection is improved. Compared with a sensor provided with a shell and a protective layer, the sensor has stronger sensing capability and quicker response time to external force.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 illustrates a schematic side view of one embodiment of a sensor of the present application;
FIG. 2 illustrates a schematic top view of one embodiment of a sensor of the present application;
FIG. 3 illustrates an overall schematic of one embodiment of a manipulator of the present application;
FIG. 4 illustrates a perspective schematic view of one embodiment of a finger tip for a manipulator of the present application;
fig. 5 shows a schematic flow chart of an embodiment of a method of manufacturing a sensor of the present application.
Reference numerals illustrate: 100 sensors, 1 substrate, 11 stress surface, 12 side, 13 total reflection hole, 2 high reflection core, 21 incident end, 22 emergent end, 3 input optical fiber, 4 output optical fiber, 200 manipulator, 210 finger, 211 finger tip, 2111 liquid filling hole, 2112 stress end, 2113 sensing end, 212 finger root, 220 filling liquid, 230 sealing film, 300 preparation method, L insertion depth, D size.
Detailed Description
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numbers in different drawings refer to the same or similar elements, unless otherwise indicated. The manner described in the following exemplary embodiments does not represent all manners consistent with the present application. Rather, they are merely examples of apparatus consistent with some aspects of the present application as detailed in the accompanying claims.
The terminology used in the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the present application. Unless defined otherwise, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs. The terms "first," "second," and the like in the description and in the claims, are not used for any order, quantity, or importance, but are used for distinguishing between different elements. Also, the terms "a" or "an" and the like do not denote a limitation of quantity, but rather denote the presence of at least one, and the terms "a" and "an" are used individually. "plurality" or "plurality" means two or more. Unless otherwise indicated, the terms "front," "rear," "lower," and/or "upper" and the like are merely for convenience of description and are not limited to one location or one spatial orientation. The word "comprising" or "comprises", and the like, means that elements or items appearing before "comprising" or "comprising" are encompassed by the element or item recited after "comprising" or "comprising" and equivalents thereof, and that other elements or items are not excluded. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It should also be understood that the term "and/or" as used herein refers to and encompasses any or all possible combinations of one or more of the associated listed items.
The present application provides a robot 200. The robot 200 may be in the form of a mechanical glove for a person to wear, in which case the robot 200 may be used alone. The robot 200 may be a tool hand for assisting in processing and production, or for providing entertainment services. In this case, the manipulator 200 may be used alone or may be mounted on a robot body having a trunk, a head, and limbs, and the present application is not limited thereto. In order to avoid damage to the manipulator 200 itself and the object due to excessive contact force when the manipulator 200 contacts the surface of the object, the manipulator 200 needs to be able to realize the sensing of the contact force.
In one design, the manipulator 200 achieves the perception of contact force by assembling the tactile sensor 100 at the fingertip 211. However, the finger tip 211 has a curved structure in practice, and the patch type tactile sensor 100 cannot achieve both an increase in the sensing area and an improvement in the fitting degree with the finger tip 211.
In order to solve the above-described problems, the inventors have improved the robot 200.
Referring to fig. 1 to 4, the robot 200 includes a finger 210 and a sensor 100. The robot 200 further includes a light source (not shown) and a brightness detector (not shown). The sensor 100 comprises a substrate 1 and a high refractive core 2. Wherein the refractive index of the substrate 1 is lower than the refractive index of the high refractive core 2. The substrate 1 comprises a force-bearing surface 11 and sides 12. The side 12 is connected to the force-bearing surface 11 and extends in a direction which differs from the force-bearing surface 11. The substrate 1 further comprises a total reflection hole 13 penetrating the substrate 1. And at least one end of the total reflection hole 13 is provided at the side 12. In other words, the total reflection hole 13 extends from the side 12 of the substrate 1 toward the center of the substrate 1, and extends to, for example, the side 12, the force receiving surface 11, or the like. The total reflection hole 13 may be straight or curved, and the present invention is not limited thereto. The high refractive core 2 is disposed in the total reflection hole 13, and includes an incident end 21 and an exit end 22. The entrance end 21 is adapted to be connected to a light source. The exit end 22 is adapted to be connected to a brightness detector.
When the sensor 100 is connected to a light source and a brightness detector, light from the light source enters the high refractive core 2 through the entrance end 21. Due to the difference in refractive index between the high refractive core 2 and the substrate 1, light is transmitted in the high refractive core 2 in total reflection to the output end and into the brightness detector. When the stress surface 11 of the substrate 1 receives the pressure, the substrate 1 deforms, thereby driving the high refractive core 2 to deform. The change in the cross section of the high refractive core 2 causes the propagation path of light to be blocked, and the total reflection condition to be destroyed. The degree of failure is related to the amount of deformation of the cross section. The greater the amount of deformation, the greater the degree of damage, the more light that leaves the high refractive core 2 into the substrate 1, and therefore the weaker the light that the brightness detector is able to receive. In this way, the brightness detector can detect whether the sensor 100 is in contact with pressure at this time.
The sensor 100 of the present application is capable of directly achieving total reflection of light using the refractive index difference between the high refractive core 2 and the substrate 1. Therefore, an external force can directly act on the substrate 1, improving the sensitivity of the sensor 100 to external force detection. Compared with the sensor 100 provided with the shell and the protective layer, the sensor 100 has stronger sensing capability and quicker response time to external force.
Referring to fig. 3 and 4 in combination, a finger 210 of a manipulator 200 of the present application includes a finger tip 211 and a finger base 212. Wherein the fingertip 211 comprises a liquid filled hole 2111. The fill port 2111 includes a force end 2112 and a sense end 2113. The force-bearing end 2112 is disposed on a side of the finger tip 211 away from the finger root 212, and the sense end 2113 is disposed on a side of the finger tip 211 toward the finger root 212. The sensor 100 is disposed at the sensing end 2113. The robot 200 further includes a filling liquid 220 filled in the filling hole 2111 and a sealing membrane 230 provided at the force receiving end 2112. The force-bearing surface 11 of the substrate 1 seals the liquid-filled hole 2111 with the sealing membrane 230.
The sealing membrane 230 and the force-bearing surface 11 of the substrate 1 seal the fill hole 2111 so that the fill liquid 220 can remain in the fill hole 2111. When the finger tip 211 contacts the surface of the object, the sealing film 230 is deformed by the contact force. The deformation can squeeze the fill fluid 220 in the fill bore 2111 such that the fill fluid 220 can transfer a contact force to the sensing end 2113 and apply the contact force to the force bearing surface 11 of the sensor 100, causing deformation of the force bearing surface 11, thereby enabling the intensity sensor 100 to detect the magnitude of the force applied by the operation.
The deformation of the sealing membrane 230 squeezes the filler fluid 220, which filler fluid 220 further transfers force to the sensor 100. The deformation of the sealing membrane 230 at each location can be sensed by the filling fluid 220 and transmit force to the sensor 100. Therefore, the manipulator 200 of the present application does not depend on the position where the contact force is applied to the fingertip 211 and the area of contact when sensing the contact force, and thus the sensing of the contact force is accurate. Compared with the scheme in which a plurality of patch sensors 100 are provided, the sensor 100 of the present application allows the finger 210 to be provided with only one sensor 100 to sense the contact force of the fingertip 211, and thus the wiring is simple and the operation speed is high.
Since the total reflection of the sensor 100 is accomplished only by the high refractive core 2 and the substrate 1, the structure of force transmission is reduced, so that the sensitivity can be improved and the response time can be reduced. Since the force-bearing surface 11 receives a force from deformation of the liquid, the high sensitivity of the sensor 100 enables this force to also be captured sharply by the sensor 100 and operated by the brightness detector.
In addition, the flexibility of the sealing film 230 enables the sealing film 230 to be disposed at any position of the finger tip 211 and to be deformed, so that a curved surface similar to the abdomen of the human finger 210 can be formed, thereby improving anthropomorphic level. And the arrangement of the liquid filling hole 2111 can be changed according to the actual requirement so as to change the sensing area of the contact force. For example, if the aperture of the sensing end 2113 of the filling hole 2111 is increased, the sensing area is also increased. However, due to the flexibility of the sealing membrane 230 and the nature of the liquid filling hole 2111, the increase in the aperture of the sensing end 2113 correspondingly results in a decrease in the rigidity of the finger tip 211.
To enable simplified mounting of the sensor 100 on the fingertip 211, in some embodiments both ends of the fully reflective aperture 13 are provided on the side 12. In other words, the total reflection holes 13 penetrate the substrate at the side 12. By so doing, the force-bearing surface 11 can be used entirely to seal the sensing end 2113 of the liquid-filled aperture 2111, and the surface opposite the force-bearing surface 11 can be used to contact and connect with the finger root 212. The light source and the brightness detector can be connected at the side 12 by a sensor, so that the finger 210 has a simple overall structure and high anthropomorphic level.
In some embodiments, the material of the substrate 1 and the high refractive core 2 is silica gel. The high transparency of the silica gel is beneficial to the transmission of light in the sensor 100, reduces the loss of light and improves the detection accuracy of the sensor 100. The resilient properties of the silica gel are good, and the response time and recovery time of the sensor 100 are also ensured. In addition, the soft nature of the silicone gel also enables the filler fluid 220 to transfer forces to the substrate 1, enabling the sensor 100 to sense forces from the filler fluid 220. Indeed, in some embodiments, the substrate 1 and the high refractive core 2 may be made of different materials, as long as the sensor 100 is capable of satisfying the total reflection propagation of light at the high refractive core 2.
The filler fluid 220 may be any non-corrosive fluid that protects the mechanical structure of the fingertip 211. The co-workers may choose to use a non-toxic liquid for the filling liquid 220 to avoid personnel safety problems when the filling liquid 220 leaks. In some embodiments of the present application, the filler fluid 220 includes at least one of water, glycerin, or silicone oil. It should be noted that water may be understood as purified water, mineral water having minerals, e.g. brine, etc., dissolved with any substance, which the present application is not limited to.
The sealing film 230 is made of polyimide film, polycarbonate, polyethylene terephthalate, polymethyl methacrylate, or polypropylene. These materials are easy to obtain and have good mechanical properties, and low temperature requirements, humidity requirements, etc. for the working environment, so that the manipulator 200 and the robot can be adapted to different geographical environments or production environments.
In some embodiments, the bore diameter of the fill bore 2111 decreases from the force end 2112 toward the sense end 2113. The smaller the aperture of the sensing end 2113, the smaller the area that the force bearing surface 11 needs to cover. The dimension D of the substrate 1 can be reduced to some extent. And the aperture of the sensing end 2113 is reduced, so that the force generated by the deformation of the sealing membrane 230 on the filling liquid 220 can be transmitted to the stressed surface 11 in a concentrated manner, and the detection sensitivity of the sensor 100 is improved.
The detection sensitivity can be actually achieved by adjusting the aperture of the sensing end 2113. Since the filling liquid 220 finally transmits the force to the position of the sensing end 2113, the smaller the aperture of the sensing end 2113 is, the smaller the deformation of the sensor 100 is, and thus the less the influence on the luminous flux is, with the same magnitude of force. At this time, the sensor 100 can bear larger force, and the force range of detection is wider. The aperture of the sensing end 2113 increases and the deformation of the sensor 100 due to the force increases, so that the sensitivity of the detection is higher.
In addition to this, the detection sensitivity can be actually performed by adjusting the thickness dimension D of the substrate 1. The embodiment in which the cross section of the high refractive core 2 is circular is described. In the case where the diameter of the high refractive core 2 is unchanged and the magnitude and direction of the force applied to the force receiving surface 11 are unchanged, the thickness dimension D of the substrate 1 increases, and the deformation generated by the high refractive core 2 decreases, so that the sensitivity decreases. In this case, however, the thickness of the substrate 1 allows the force-bearing surface 11 to bear a greater amount of force. The range of forces that can be detected by the sensor 100 actually increases.
In some embodiments, the thickness of the substrate 1 is greater than or equal to 0.45mm. The substrate 1 is too small in thickness and low in strength. Therefore, the utility model is easy to be damaged when being stressed or after long-term use. In addition, the thickness of the substrate 1 is too small, and the diameter of the high refractive core 2 is correspondingly reduced, which is disadvantageous for assembling and processing the high refractive core 2 and for connecting the incident end 21 with the light source and the exit end 22 with the brightness detector.
The entrance end 21 of the high refractive core 2 may be directly connected to the light source and the exit end 22 may be directly connected to the luminance detector. In some embodiments, the sensor 100 further comprises an input optical fiber 3 and an output optical fiber 4. The input optical fiber 3 is inserted into the high refractive core 2 at the incident end 21 for connecting the incident end 21 and the light source. The output fiber 4 is inserted into the high refractive core 2 at the exit end 22 for connecting the exit end 22 and the luminance detector. The output optical fiber 4 and the input optical fiber 3 can function like "wires" to connect the light source and the sensor 100, and the luminance detector and the sensor 100. In this way, a relatively bulky light source and brightness detector can be located remotely from the sensor 100. The light source and the brightness detector cannot be accommodated due to the limited space of the finger 210 itself. The simultaneous arrangement of the brightness detector and the light source on the finger 210 also causes the problem of inflexibility of the movement of the finger 210. By this arrangement, the requirements of the manipulator 200 or the robot for the arrangement positions of the light source and the brightness detector are reduced, and thus the flexibility of arrangement and the application range of the sensor 100 are improved.
Indeed, in other embodiments, the sensor 100 may be provided with the input optical fiber 3 only at the incident end 21 or the output optical fiber 4 only at the exit end 22, which is not limited in this application.
In fact, the sensor 100 of the present application does not divide forward and backward. For example, in an embodiment in which the input optical fiber 3 is disposed at the input end 21 and the output optical fiber 4 is disposed at the output end 22, the output optical fiber 4 may be connected to a light source, where the output optical fiber 4 serves as the input optical fiber 3, and the input optical fiber 3 may be connected to a brightness detector as the output optical fiber 4. In this manner, the assembly requirements of the sensor 100 are further reduced to reduce wiring difficulties and the likelihood of misconnection.
To further reduce the loss of light as it propagates inside the sensor 100, in some embodiments the end face of the input optical fiber 3 is perpendicular to the direction of extension of the input optical fiber 3 and the end face of the output optical fiber 4 is perpendicular to the direction of extension of the output optical fiber 4. The input fiber 3 is inserted into the protective cavity and light from the light source needs to enter the high refractive core 2 through the end face exiting the input fiber 3. When the end face and the extending direction of the input optical fiber 3 have a non-perpendicular angle, the incident angle of the light incident on the high refractive core 2 and the extending direction of the high refractive core 2 have a non-perpendicular angle, so that the light cannot meet the condition of total reflection to a certain extent and is lost. Similarly, light needs to enter the brightness detector through the end face entering the output optical fiber 4, so that when the end face forms a non-perpendicular angle with the extending direction of the output optical fiber 4, light loss is also formed to some extent. Therefore, the arrangement mode with the vertical end face can reduce the loss of light to a certain extent and improve the detection accuracy.
It should be noted that the end faces of the input optical fiber 3 and the end faces of the output optical fiber 4 are perpendicular to the input optical fiber 3 and the output optical fiber 4, respectively, and may be macroscopic or microscopic. From the macroscopic level, the macroscopic end face is perpendicular. From the microscopic level, the end face is flat, and almost every plane unit is perpendicular to the extending direction of the input optical fiber 3 and the output optical fiber 4. The end face is flat at this time, so that the directions of the light rays leaving from the input optical fiber 3 and the light rays entering from the output optical fiber 4 are kept parallel and consistent.
Indeed, the sensor 100 may be such that only the end face of the input optical fiber 3 is perpendicular to the extending direction of the input optical fiber 3, or only the end face of the output optical fiber 4 is perpendicular to the extending direction of the output optical fiber 4, which is not limited in this application.
In an embodiment provided with the input optical fiber 3, the depth L of insertion of the input optical fiber 3 into the high refractive core 2 may be 4mm or more and 6mm or less. In an embodiment in which the output optical fiber 4 is provided, the depth L of insertion of the output optical fiber 4 into the high refractive core 2 may be greater than or equal to 4mm and less than or equal to 6mm. This range of values of depth L can ensure to some extent the tightness of the bond between the input optical fiber 3 and the high refractive core 2, and between the output optical fiber 4 and the high refractive core 2, and also avoid too long an insertion of the high refractive core 2 resulting in an excessive size D of the high refractive core 2.
The space for the finger 210 is limited and therefore there is also a certain requirement for the size D of the sensor 100. In some embodiments, in the direction in which the force-bearing surface 11 extends, it may be greater than or equal to 1cm and less than or equal to 2cm. This dimension D range allows the sensor 100 to be positioned at the finger tip 211 without undue encumbrance, so that the finger 210 remains flexible for movement. In embodiments where the sensor 100 is used in other scenarios (e.g., detecting a robot walking gesture), the dimension D of the sensor 100 may be greater than or equal to 1cm and less than or equal to 20cm, as this application is not limited.
It should be noted that the shape of the substrate 1 shown in fig. 1 and 2 should be taken as exemplary and not limiting. The substrate 1 may be a cuboid, a cube, a prism, or even a special shape, which is not limited in this application. Likewise, the high refractive core 2 may be a cube, a cylinder, a prism, which is not limited in this application.
Based on the various embodiments described above with respect to sensor 100, with reference to fig. 5, the present application also provides a method of making comprising:
step 310: the substrate 1 is obtained and the full reflection hole 13 is formed in the substrate 1.
Step 320: the high refractive core 2 is molded in the total reflection hole 13 to obtain the sensor 100.
The substrate 1 may be a commercially available, e.g. silicone block or the like, and the fully reflective holes 13 are machined by means of, e.g., milling, turning or the like. In some embodiments, step 301 specifically includes:
coating silica gel fluid on the base and solidifying to obtain a first half;
a hole forming member is placed on the first half. The extending direction of the hole forming piece is different from the thickness direction of the first half part;
coating silica gel fluid on the first half part and the hole forming piece and curing to obtain a substrate 1; the refractive index of the silica gel fluid of the substrate 1 is smaller than that of the high refractive core 2;
the hole-forming member is extracted to obtain the total reflection hole 13.
The hole forming member may be made of a material having sufficient strength such as a wire or a plastic wire. In some embodiments, the hole-forming member is an optical fiber. The optical fiber has sufficient rigidity and is straight, which is advantageous in controlling the extending direction of the total reflection hole 13. In addition, the surface smoothness of the optical fiber is very high, and thus the wall smoothness of the total reflection hole 13 formed by drawing is also very high. If the wall surface of the total reflection hole 13 is roughened, the scattering of light upon entering the susceptor from the high refractive core 2 is increased. Thus, the improved wall smoothness is beneficial for reducing the optical loss rate of the subsequently formed sensor 100.
The thickness of the first half can be controlled by the amount of silicone fluid applied. Since the hole forming member is finally extracted at step 310, if the thickness of the first half is too small, the first half may be damaged when the hole forming member is extracted. In some embodiments, the thickness of the first half is greater than or equal to 0.1mm to ensure adequate strength.
In addition, the larger the dimension D of the substrate 1 in the extending direction of the stress surface 11, the greater the adhesion of the silicone fluid to the hole-forming member. This results in difficulty in extracting the molded hole parts later. Therefore, the sensor 100 of the present application sets the dimension D of the substrate 1 in the extending direction to be 20cm or less to avoid the problem of difficult processing.
Similarly, in some embodiments, step 320 specifically includes:
the total reflection hole 13 is filled with a silicone fluid and cured. Wherein the refractive index of the silica gel fluid of the high refractive core 2 is greater than the refractive index of the substrate 1. By injecting the silica gel fluid into the total reflection hole 13 and then solidifying, the total reflection hole 13 can be fully filled with the high reflection core 2, the bonding compactness between the substrate 1 and the high reflection core 2 is improved, and a compact structure is formed, so that the transparency of the high reflection core 2 is not negatively affected by impurities such as air.
Further, in some embodiments, after filling the silica gel fluid in the total reflection hole 13, an optical fiber may be inserted into the silica gel fluid at least one end of the total reflection hole 13. When the silica gel fluid is solidified, the high-refraction core 2 can be combined with the optical fiber into a whole, so that the combination compactness between the optical fiber and the high-refraction core 2 is improved, and the risk of falling off of the optical fiber when the sensor 100 is used is reduced. If an optical fiber is inserted at the entrance end 21, the optical fiber is the input optical fiber 3. If an optical fiber is inserted at the exit end 22, the optical fiber is the output optical fiber 4.
In this embodiment, the depth L of insertion of the optical fiber into the silica gel fluid may be in the range of 4mm-6 mm. Too small a depth L makes it difficult to form a stable bond with the high refractive core 2, and there is a risk of detachment. While too deep an insertion results in wastage of fiber material. Therefore, through a plurality of experiments by the inventor, the optical fiber insertion depth L is 4mm, 5mm and 6mm, for example, so that good bonding strength can be ensured.
In some embodiments, a pretreatment is also required between the insertion of the optical fiber into the silica gel fluid. The pretreatment treats the end face of the optical fiber so as to be perpendicular to the extending direction of the optical fiber. The condition of total reflection is formed, not only that light enters the low refractive index medium from the high refractive index medium, but also that the incident angle of the light is larger than the critical angle. The direction of extension of the optical fiber can be regarded as the direction of transmission of light. The optical fiber is inserted into the high refractive core 2, and is transmitted from the incident end 21 toward the exit end 22 along the extending direction of the high refractive core 2. If the end face of the optical fiber is not perpendicular to the extending direction of the optical fiber, then part of the light enters the low refractive sleeve at an incident angle smaller than a critical angle, and is refracted and lost. Therefore, after the end face of the optical fiber is processed, the light exiting from the optical fiber can be transmitted in the high refractive core 2 in a total reflection mode to the greatest extent, and the light utilization rate and the detection accuracy of the brightness detector can be improved.
In each of the above embodiments, the curing temperature is between 60 ℃ and 100 ℃ and the curing time is heated for 20-60 minutes until the silica gel is fully cured. For example, heating may be performed at 60℃at 80℃or at 100℃for 20 minutes, 40 minutes or 60 minutes. The heating temperature interval and the heating time interval can effectively solidify the silica gel fluid, and cannot cause excessive energy consumption. In embodiments in which an optical fiber is inserted, the heating temperature interval and time also avoid damage to the fiber structure.
The optical fiber may be a standard optical fiber or a polymer optical fiber. The polymer fiber has a greater light acceptance, which is advantageous for obtaining a higher signal-to-noise ratio for the sensor 100. However, in embodiments where the optical fiber is a polymer optical fiber, the curing temperature of the high refractive core 2 should be between 60 ℃ and 70 ℃ so as not to affect the polymer optical fiber.
The specific embodiments described herein are offered by way of example only to illustrate the spirit of the present application. Those skilled in the art may make various modifications, additions, or substitutions to the described embodiments without departing from the spirit of the invention or the scope thereof as defined in the accompanying claims.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

Claims (20)

1. A manipulator, comprising:
a light source;
a brightness detector;
a finger, including a finger tip and a finger root; the fingertip part comprises a liquid filling hole; the liquid filling hole comprises a stress end and a sensing end; the stress end is arranged at one side of the fingertip part far away from the finger root part; the sensing end is arranged on one side of the fingertip part facing the finger root part;
the sensor is arranged at the sensing end and comprises a substrate and a high refractive core; the substrate comprises a stress surface, a side surface and a full reflection hole; the side surface is connected with the stressed surface and the extending direction is different from the stressed surface; the full reflection hole penetrates through the substrate, and at least one end of the full reflection hole is arranged on the side face; the high refraction core is arranged in the total reflection hole; the high refraction core comprises an incident end and an emergent end; the incident end is connected with the light source; the emergent end is connected with the brightness detector; wherein the refractive index of the substrate is lower than the refractive index of the high refractive core;
filling liquid into the liquid filling hole; and
the sealing film is arranged at the stress end; the forced surface of the substrate and the sealing film seal the liquid filling hole.
2. The manipulator of claim 1, wherein the bore diameter of the charge bore decreases from the force-receiving end toward the sensing end.
3. The manipulator of claim 1, wherein the filler fluid comprises at least one of water, glycerol, or silicone oil.
4. The manipulator of claim 1, wherein the sealing membrane is made of polyimide film, polycarbonate, polyethylene terephthalate, polymethyl methacrylate, or polypropylene.
5. The manipulator of claim 1, wherein the sensor further comprises:
the input optical fiber is inserted into the high refractive core at the incidence end and is used for connecting the incidence end and the light source; and/or the number of the groups of groups,
and the output optical fiber is inserted into the high refractive core at the emergent end and is used for connecting the emergent end and the brightness detector.
6. The manipulator of claim 5, wherein the input optical fiber is inserted into the high refractive core to a depth of greater than or equal to 4mm and less than or equal to 6mm; and/or the number of the groups of groups,
the depth of insertion of the output optical fiber into the high refractive core is greater than or equal to 4mm and less than or equal to 6mm.
7. The robot of claim 1, wherein the substrate has a dimension greater than or equal to 1cm and less than or equal to 20cm in a direction parallel to the force bearing surface.
8. The robot of claim 1, wherein the thickness of the substrate is greater than or equal to 0.45mm.
9. The manipulator of claim 1, wherein the material of the substrate and/or the high refractive core is silicone.
10. A robot comprising a manipulator according to any of claims 1-9.
11. A method of manufacturing a sensor for a manipulator according to any one of claims 1-9, comprising:
obtaining a substrate and forming a full reflection hole on the substrate;
and forming a high refractive index core in the total reflection hole to obtain the sensor.
12. The method of manufacturing according to claim 11, wherein the step of obtaining a substrate and forming the total reflection hole in the substrate comprises:
coating silica gel fluid on the base and solidifying to obtain a first half;
placing a hole forming member on the first half; the extending direction of the hole forming piece is different from the thickness direction of the first half part;
coating silica gel fluid on the first half part and the hole forming piece and solidifying to obtain the substrate; the refractive index of the silica gel fluid of the substrate is smaller than the refractive index of the high refractive core;
and extracting the hole forming piece to obtain the total reflection hole.
13. The method of manufacturing according to claim 12, wherein the thickness of the first half is greater than or equal to 0.1mm; and/or the thickness of the substrate is greater than or equal to 0.45mm.
14. The method of manufacturing according to claim 12, wherein the hole-forming member is an optical fiber.
15. The method of manufacturing according to claim 12, wherein the size of the substrate in the extending direction of the total reflection hole is 1cm or more and 20cm or less.
16. The method of manufacturing according to claim 11, wherein the shaping of the high refractive core in the total reflection hole comprises:
filling silica gel fluid in the total reflection hole and solidifying; the refractive index of the silica gel fluid of the high refractive core is greater than the refractive index of the substrate.
17. The method of manufacturing according to claim 16, further comprising, after filling the silica gel fluid in the total reflection hole:
an optical fiber is inserted into the silica gel fluid at least one end of the total reflection hole.
18. The method of manufacturing according to claim 17, wherein the optical fiber is inserted into the high refractive index material to a depth of 4mm or more and 6mm or less.
19. The method of manufacturing according to claim 17, wherein the end face of the optical fiber is perpendicular to the direction of extension of the optical fiber.
20. The method of any one of claims 12-19, wherein the curing temperature is greater than or equal to 60 ℃ and less than or equal to 100 ℃.
CN202310931899.8A 2023-07-27 2023-07-27 Sensor, preparation method thereof, manipulator and robot Active CN116642612B (en)

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