CN116625095A

CN116625095A - Pressure drying equipment

Info

Publication number: CN116625095A
Application number: CN202310702005.8A
Authority: CN
Inventors: 周然杰; 韩涛
Original assignee: Shengjisheng Intelligent Equipment Jiangsu Co ltd
Current assignee: Shengjisheng Intelligent Equipment Jiangsu Co ltd
Priority date: 2023-06-14
Filing date: 2023-06-14
Publication date: 2023-08-22

Abstract

The application belongs to the technical field of semiconductor production and manufacturing, and discloses pressure drying equipment. The equipment is used for drying materials and comprises a conveying assembly, a pressure container, a first driving assembly and a second driving assembly, wherein the conveying assembly comprises a feeding conveying mechanism, a heating conveying mechanism and a discharging conveying mechanism; the feeding conveying mechanism is arranged at the upstream of the pressure vessel; the heating conveying mechanism is arranged in the pressure container; the blanking conveying mechanism is arranged at the downstream of the pressure vessel; the pressure vessel is used for heating materials; two ends of the pressure container are respectively provided with a translation door, the translation door is connected with a first driving assembly, and the first driving assembly can drive the translation door to be opened or closed; the second driving component can drive the feeding conveying mechanism to transfer the materials to the heating conveying mechanism and can continuously convey the materials from the heating conveying mechanism to the discharging conveying mechanism. The application can improve the automation degree, reduce the labor cost and meet the requirement of automatic production.

Description

Pressure drying equipment

Technical Field

The application relates to the technical field of semiconductor production and manufacturing, in particular to pressure drying equipment.

Background

The oven is a box type drying device for drying materials under the condition of negative pressure or positive pressure. Specifically, the box body is vacuumized, and the pressure pump is mainly used for exhausting air and dehumidifying so as to accelerate the drying speed; the positive pressure environment is provided for the space in the box body by inflating and pressurizing the box body.

The pressure oven has wide application in semiconductor industry and other industries.

At present, the pressure oven adopts a manual door opening and closing mode and a manual feeding and discharging mode, so that the automation degree is low, the operation is labor-consuming, time-consuming and labor-consuming, and the automatic production requirement cannot be met.

Disclosure of Invention

The application aims to provide pressure drying equipment, improve the degree of automation, reduce the labor cost and adapt to the requirement of automatic production.

To achieve the purpose, the application adopts the following technical scheme:

pressure drying equipment for stoving material includes:

the conveying assembly comprises a feeding conveying mechanism, a heating conveying mechanism and a discharging conveying mechanism;

the feeding conveying mechanism is arranged at the upstream of the pressure container; the heating conveying mechanism is arranged in the pressure container; the blanking conveying mechanism is arranged at the downstream of the pressure vessel; the pressure vessel is used for heating materials;

the two ends of the pressure container are respectively provided with a translation door, the translation doors are connected with the first driving assembly, and the first driving assembly can drive the translation doors to open or close;

the second driving assembly can drive the feeding conveying mechanism to transfer the materials to the heating conveying mechanism and can continue to convey the materials from the heating conveying mechanism to the discharging conveying mechanism.

As an alternative scheme of the pressure drying equipment, the feeding conveying mechanism comprises a plurality of first conveying rollers and first conveying roller frames which are arranged on a first rack in parallel, two ends of each first conveying roller are connected with the first conveying roller frames, the second driving assembly comprises a first driving piece arranged on the first rack and a second driving piece arranged in one of the first conveying rollers, the second driving piece can drive the first conveying rollers provided with the second driving pieces to rotate, and the plurality of first conveying rollers are in transmission connection; the first driving member can drive the first conveying roller frame to move along a first direction.

As an alternative of the pressure drying device, a first position sensor is arranged on the first frame, and the first position sensor is used for detecting the position of the material relative to the feeding conveying mechanism.

As an alternative to the pressure drying apparatus, the first frame is provided with a connection roller near one end of the pressure vessel, the connection roller is smaller than the first conveying roller, and the connection roller can adjust the height relative to the first frame.

As an alternative of the pressure drying apparatus, the first driving assembly is disposed along the second direction, the translation door is disposed on the translation seat, and the first driving assembly can drive the translation seat to move along the second direction.

As an alternative scheme of pressure drying equipment, translation seat bottom is equipped with the guide slot, heating conveying mechanism locates in the second frame, be equipped with on the second frame along the guide rail that the second direction extends, translation seat passes through the guide slot with guide rail sliding connection.

As an alternative scheme of pressure drying equipment, the periphery of translation door is equipped with the shrouding, be equipped with on the pressure vessel with shrouding matched with seal groove, when the translation door is closed, the shrouding inlays and locates the seal groove.

As an alternative to the pressure drying apparatus, a second position sensor is provided on the second frame, and the second position sensor can detect the position of the sliding door relative to the pressure container.

As an alternative scheme of pressure drying equipment, heating conveying mechanism is including locating a plurality of second conveying rollers that set up side by side in the second frame, the both ends of second conveying roller are equipped with driven gear, and a plurality of driven gear all is connected with the chain meshing, second drive assembly still includes locates the third driving piece in the pressure vessel outside, the third driving piece with the chain transmission is connected.

As an alternative scheme of the pressure drying device, the second driving assembly further comprises an output shaft connected with the output end of the third driving member, the output shaft penetrates through the pressure container, a transmission gear is arranged at one end of the output shaft and is in meshed connection with the chain, and a dynamic sealing member is sleeved on the output shaft to seal a rotating gap between the pressure container and the output shaft.

The beneficial effects are that:

according to the application, the material is placed in the feeding conveying mechanism, the feeding conveying mechanism is driven by the second driving assembly to convey, when the material reaches the outer side close to the pressure container, the translation door is driven to be opened by the first driving assembly, the material is conveyed to the heating conveying mechanism from the feeding conveying mechanism under the driving action of the second driving assembly, at the moment, the translation door is driven to be closed by the first driving assembly, the material is heated and dried in the pressure container, when the preset heating time is reached or the material is dried, the translation door on the other side is driven to be opened by the first driving assembly, the material is conveyed to the discharging conveying mechanism from the heating conveying mechanism under the driving action of the second driving assembly, finally the translation door on the other side is driven to be closed by the first driving assembly, and then the material is collected by an operator. The automatic feeding and discharging device can realize automation in the whole feeding and discharging process and the door opening and closing process, improves the automation level of the device, reduces the labor cost and can be more suitable for the automatic production requirement.

Drawings

Fig. 1 is an isometric view of a pressure drying apparatus provided in an embodiment of the present application;

fig. 2 is an isometric view of a feeding conveying mechanism provided in an embodiment of the present application;

FIG. 3 is a schematic view of a pressure vessel and its interior according to an embodiment of the present application;

FIG. 4 is an enlarged view of a portion of FIG. 3 at A;

FIG. 5 is a schematic view of a heating and conveying mechanism according to an embodiment of the present application;

fig. 6 is a partial enlarged view of fig. 5 at B.

In the figure:

x, a first direction; y, second direction;

1. a transport assembly; 11. a feeding conveying mechanism; 111. a first conveying roller; 112. a first conveying roller frame; 12. a heating and conveying mechanism; 121. a second conveying roller; 122. a driven gear; 123. a chain; 13. a blanking conveying mechanism; 14. a first frame; 15. a first position sensor; 16. a connection roller; 17. a second frame; 171. a guide rail; 18. a second position sensor;

2. a pressure vessel; 21. a translation door; 211. a sealing plate; 22. a translation seat; 221. a guide groove; 23. sealing grooves;

3. a first drive assembly;

4. a second drive assembly; 41. a first driving member; 42. a second driving member; 43. an output shaft; 44. a transmission gear; 45. and (5) moving the sealing member.

Detailed Description

The application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present application are shown in the drawings.

In the description of the present application, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present application will be understood in specific cases by those of ordinary skill in the art.

In the present application, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the application. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Referring to fig. 1-3 and 5, the present embodiment relates to a pressure drying apparatus (hereinafter referred to as "apparatus") for drying materials, in which the assembly process requires drying of colloid, and the apparatus can be used for automatic loading and unloading and drying of materials. The equipment specifically comprises a conveying assembly 1, a pressure vessel 2, a first driving assembly 3 and a second driving assembly 4, wherein the conveying assembly 1 comprises a feeding conveying mechanism 11, a heating conveying mechanism 12 and a discharging conveying mechanism 13; the feeding conveying mechanism 11 is arranged at the upstream of the pressure vessel 2; the heating and conveying mechanism 12 is arranged in the pressure vessel 2; the blanking conveying mechanism 13 is arranged at the downstream of the pressure vessel 2; the pressure vessel 2 is used for heating materials; the two ends of the pressure container 2 are respectively provided with a translation door 21, the translation door 21 is connected with the first driving component 3, and the first driving component 3 can drive the translation door 21 to be opened or closed; the second driving component 4 can drive the feeding conveying mechanism 11 to transfer the materials to the heating conveying mechanism 12, and can continue to convey the materials from the heating conveying mechanism 12 to the discharging conveying mechanism 13.

In this embodiment, through placing the material in material loading conveying mechanism 11, carry through second drive assembly 4 drive material loading conveying mechanism 11, when reaching and be close to the pressure vessel 2 outside, through first drive assembly 3 drive translation door 21 open, continue to carry the material to heating conveying mechanism 12 from material loading conveying mechanism 11 under the drive of second drive assembly 4, at this moment, through first drive assembly 3 drive translation door 21 close, the material is heated and dried in pressure vessel 2 inside, when reaching the preset time of heating or the material has dried and accomplish, through first drive assembly 3 drive translation door 21 open of opposite side, at the drive of second drive assembly 4 effect, the material is carried to unloading conveying mechanism 13 from heating conveying mechanism 12, finally through first drive assembly 3 drive translation door 21 of opposite side close, follow-up again by operating personnel collect the material, whole unloading process and the automatic level of switching process homoenergetic of equipment have been promoted, the cost of labor has been reduced, more suitable for automatic production demand.

In this embodiment, the pressure vessel 2 can vacuumize the internal space to provide a negative pressure environment, and can also inflate and pressurize the internal space to provide a positive pressure environment.

Optionally, the feeding conveying mechanism 11 includes a plurality of first conveying rollers 111 and a first conveying roller frame 112 that are disposed on the first frame 14 and are arranged in parallel, two ends of the first conveying rollers 111 are connected with the first conveying roller frame 112, the second driving assembly 4 includes a first driving member 41 disposed on the first frame 14 and a second driving member 42 disposed inside one of the first conveying rollers 111, and the second driving member 42 can drive the corresponding first conveying roller 111 to rotate, and the plurality of first conveying rollers 111 are in transmission connection; the first driving member 41 can drive the first conveying roller frame 112 to move in the first direction X.

With further reference to fig. 1 and 2, the first conveying rollers 111 in parallel rotate to drive the material to move on the feeding conveying mechanism 11 along the first direction X gradually, and the material is continuously close to the pressure container 2. Specifically, the second driving member 42 is disposed inside one of the first conveying rollers 111, the second driving member 42 may be a motor, and drives the first conveying rollers 111 to rotate, the first conveying rollers 111 are in transmission connection with each other, and all the first conveying rollers 111 are driven to synchronously rotate by the second driving member 42, which may adopt a sprocket transmission mode, and gears are disposed at the ends of the first conveying rollers 111 and are engaged with the conveying chain.

When the material reaches the pressure container 2 and is about to enter the pressure container 2, the translation door 21 is required to be turned over, but the material cannot be conveyed to the heating conveying mechanism 12 by only rotating the first conveying roller 111, in this embodiment, a first driving member 41 is further arranged on the first rack 14, specifically, below the first conveying roller 111, the first conveying roller frame 112 is driven to move along the first direction X, so that the material is conveyed into the pressure container 2 with the feeding conveying mechanism 11, the butt joint of the feeding conveying mechanism 11 and the heating conveying mechanism 12 is realized, the material falls onto the heating conveying mechanism 12 when the first conveying roller 111 is further driven by the second driving member 42, and when the material is separated from the feeding conveying mechanism 11, the first driving member 41 reversely drives the first conveying roller frame 112 to move, so that the feeding conveying mechanism 11 exits the pressure container 2, and smooth conveying of the material is completed.

In this embodiment, the first driving member 41 may be an air cylinder or a linear motor, a sliding rail is disposed on the first frame 14 along the first direction X, the bottom of the first conveying roller frame 112 is slidably disposed on the sliding rail, and the linear motor or the air cylinder directly drives the first conveying roller frame 112 to move along the sliding rail, so as to realize the movement of the first conveying roller frame 112 along the first direction X.

Optionally, the first rack 14 is provided with a first position sensor 15, and the first position sensor 15 is used for detecting a position of the material relative to the feeding conveying mechanism 11. In this embodiment, the first rack 14 is further provided with a first position sensor 15 for detecting a position of the material relative to the feeding conveying mechanism 11, when the first position sensor 15 detects that the position of the material along the second direction Y of the feeding conveying mechanism 11 exceeds a preset value, the material cannot accurately enter the pressure container 2 at this time and needs to be corrected timely by an operator, in this embodiment, the first position sensor 15 is in signal connection with a controller, the controller is connected with a prompting device, after receiving the information of the first position sensor 15, once the position of the detected material is offset, the controller transmits the information to the prompting device for prompting the operator to correct timely.

In this embodiment, the controller and the prompting device may be directly implemented by an upper computer in the prior art, and specific working principles thereof are not described herein.

Further, in order to ensure accuracy of position detection, a plurality of first position sensors 15 may be provided on the first rack 14.

Optionally, a docking roller 16 is provided at an end of the first frame 14 near the pressure vessel 2, the docking roller 16 having a length smaller than that of the first conveying roller 111, and the docking roller 16 being capable of adjusting a height relative to the first frame 14. In order to facilitate smooth conveying of the materials from the feeding conveying mechanism 11 to the heating conveying mechanism 12, a connection roller 16 is further arranged at one end, close to the pressure vessel 2, of the first frame 14, the length of the connection roller 16 is smaller than that of the first conveying roller 111, smooth entering of the pressure vessel 2 can be ensured, meanwhile, the connection roller 16 can be used for adjusting the height relative to the first frame 14, and the material can be conveniently adjusted to a proper height, so that the materials are stably conveyed from the feeding conveying mechanism 11 to the heating conveying mechanism 12.

Referring to fig. 3 and 4, optionally, the first driving assembly 3 is disposed along the second direction Y, the sliding door 21 is disposed on the sliding seat 22, and the first driving assembly 3 can drive the sliding seat 22 to move along the second direction Y. Referring to fig. 3 and fig. 4, in this embodiment, the translation door 21 is a circular body, the conveying inlet and the conveying outlet of the corresponding pressure vessel 2 are also circular, the translation seat 22 is connected to the bottom of the translation door 21, the driving end of the first driving component 3 is connected to the translation seat 22, and the first driving component 3 can select a linear motor or an air cylinder to enable the driving end to move along the second direction Y, so that the translation seat 22 is convenient to connect with the first driving component 3, and the first driving component 3 is convenient to arrange.

Further, a guide groove 221 is formed at the bottom of the translation seat 22, the heating and conveying mechanism 12 is arranged on the second frame 17, a guide rail 171 extending along the second direction Y is arranged on the second frame 17, and the translation seat 22 is slidably connected with the guide rail 171 through the guide groove 221. The sliding of the translation seat 22 along the second direction Y is realized by the guide rail 171 extending along the second direction Y on the second frame 17, and the guide groove 221 is provided at the bottom of the translation seat 22 and is in sliding fit with the guide rail 171, so as to realize the opening and closing of the translation door 21, and the guide rail 171 is used for providing a guiding function for the movement of the translation seat 22.

Optionally, a sealing plate 211 is arranged on the periphery of the sliding door 21, a sealing groove 23 matched with the sealing plate 211 is arranged on the pressure container 2, and when the sliding door 21 is closed, the sealing plate 211 is embedded in the sealing groove 23. By fitting the seal plate 211 in the seal groove 23, the sealing effect of the sliding door 21 on the pressure vessel 2 can be improved.

Optionally, a second position sensor 18 is provided on the second frame 17, the second position sensor 18 being able to detect the position of the sliding door 21 with respect to the pressure vessel 2.

In this embodiment, the second position sensor 18 is used to detect whether the sliding door 21 moves in place relative to the pressure container 2, and similarly, the second position sensor 18 is connected to a controller in signal, the controller is connected to a prompting device, and after receiving the information from the second position sensor 18, the controller will transmit the information to the prompting device to prompt the operator to correct the sliding door once the sliding door 21 is detected to move in place.

Optionally, the heating conveying mechanism 12 includes a plurality of second conveying rollers 121 disposed on the second frame 17 and disposed in parallel, driven gears 122 are disposed at two ends of the second conveying rollers 121, the driven gears 122 are engaged with and connected to a chain 123, and the second driving assembly 4 further includes a third driving member disposed outside the pressure vessel 2 and in transmission connection with the chain 123.

In this embodiment, the heating and conveying mechanism 12 includes a plurality of second conveying rollers 121 disposed on the second frame 17 and arranged in parallel, and the material is driven to be conveyed along the first direction X by the rotation of the plurality of second conveying rollers 121 disposed in parallel, so that by disposing a third driving member (not shown in the drawing) outside the pressure vessel 2, the influence of the working heat of the third driving member on the inside of the pressure vessel 2 can be avoided, and the influence of the high-pressure high-temperature environment inside the pressure vessel 2 on the heat dissipation of the third driving member can also be avoided; the third driving member drives the chain 123, and the chain 123 simultaneously drives the plurality of driven gears 122 to rotate, thereby achieving the simultaneous rotation of the second conveying roller 121.

Further, referring to fig. 3, 5 and 6, the second driving assembly 4 further includes an output shaft 43 connected to the output end of the third driving member, the output shaft 43 passes through the pressure vessel 2, a transmission gear 44 is disposed at one end of the output shaft 43, the transmission gear 44 is engaged with the chain 123, and a dynamic seal member 45 is sleeved on the output shaft 43 to seal a rotation gap between the pressure vessel 2 and the output shaft 43.

In this embodiment, the output shaft 43 is used to transmit rotational force and torque, the third driving member drives the output shaft 43 to rotate, the output shaft 43 drives the transmission gear 44 to rotate, the transmission gear 44 is meshed with the chain 123, the chain 123 is driven to rotate, and the driven gear 122 is driven to rotate, since the third driving member is arranged outside the pressure vessel 2, the output shaft 43 passes through the pressure vessel 2, and in order to ensure the high-pressure high-temperature environment of the pressure vessel 2, the output shaft 43 is sleeved with the dynamic seal member 45, so that the rotational gap between the pressure vessel 2 and the output shaft 43 is sealed.

It is understood that the dynamic seal 45 may be an axial seal structure commonly used in the prior art, and the specific structure and sealing principle of the seal will not be further described in detail.

In this embodiment, the apparatus further includes a discharging and conveying mechanism 13, and the discharging and conveying mechanism 13 has the same structure as the feeding and conveying mechanism 11 and is disposed downstream of the pressure vessel 2.

It is to be understood that the above examples of the present application are provided for clarity of illustration only and are not limiting of the embodiments of the present application. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the application. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the application are desired to be protected by the following claims.

Claims

1. Pressure drying equipment for stoving material, its characterized in that includes:

the conveying assembly (1), the conveying assembly (1) comprises a feeding conveying mechanism (11), a heating conveying mechanism (12) and a discharging conveying mechanism (13);

the feeding conveying mechanism (11) is arranged at the upstream of the pressure container (2); the heating and conveying mechanism (12) is arranged in the pressure container (2); the blanking conveying mechanism (13) is arranged at the downstream of the pressure vessel (2); the pressure vessel (2) is used for heating materials;

the pressure vessel comprises a pressure vessel body, a first driving assembly (3), a second driving assembly (3) and a control unit, wherein two ends of the pressure vessel (2) are respectively provided with a translation door (21), the translation doors (21) are connected with the first driving assembly (3), and the first driving assembly (3) can drive the translation doors (21) to be opened or closed;

the second driving assembly (4) can drive the feeding conveying mechanism (11) to transfer the materials to the heating conveying mechanism (12) and can continuously convey the materials from the heating conveying mechanism (12) to the discharging conveying mechanism (13).

2. Pressure drying apparatus according to claim 1, wherein the feeding conveyor mechanism (11) comprises a plurality of first conveyor rollers (111) and first conveyor roller frames (112) which are arranged on a first frame (14) and are arranged in parallel, two ends of each first conveyor roller (111) are connected with each first conveyor roller frame (112), the second drive assembly (4) comprises a first drive member (41) arranged on the first frame (14) and a second drive member (42) arranged inside one of the first conveyor rollers (111), the second drive member (42) can drive the first conveyor rollers (111) provided with the second drive members (42) to rotate, and a plurality of first conveyor rollers (111) are in transmission connection; the first driving member (41) can drive the first conveying roller frame (112) to move along a first direction (X).

3. Pressure drying apparatus according to claim 2, characterized in that the first frame (14) is provided with a first position sensor (15), the first position sensor (15) being arranged to detect the position of the material relative to the feeding conveyor (11).

4. Pressure drying apparatus according to claim 2, characterized in that the end of the first frame (14) adjacent to the pressure vessel (2) is provided with a docking roller (16), the docking roller (16) having a length smaller than the length of the first transport roller (111), the docking roller (16) being adjustable in height relative to the first frame (14).

5. Pressure drying apparatus according to claim 1, characterized in that the first drive assembly (3) is arranged in a second direction (Y), the translating door (21) being arranged on a translating carriage (22), the first drive assembly (3) being capable of driving the translating carriage (22) to move in the second direction (Y).

6. Pressure drying device according to claim 5, characterized in that the bottom of the translation seat (22) is provided with a guide groove (221), the heating and conveying mechanism (12) is arranged on a second frame (17), the second frame (17) is provided with a guide rail (171) extending along the second direction (Y), and the translation seat (22) is slidably connected with the guide rail (171) through the guide groove (221).

7. Pressure drying apparatus according to any one of claims 1-5, characterized in that a sealing plate (211) is arranged on the periphery of the translation door (21), a sealing groove (23) matched with the sealing plate (211) is arranged on the pressure container (2), and when the translation door (21) is closed, the sealing plate (211) is embedded in the sealing groove (23).

8. Pressure drying apparatus according to claim 6, characterized in that the second frame (17) is provided with a second position sensor (18), which second position sensor (18) is able to detect the position of the translating door (21) with respect to the pressure vessel (2).

9. Pressure drying apparatus according to claim 6, characterized in that the heating and conveying mechanism (12) comprises a plurality of second conveying rollers (121) arranged in parallel and arranged on the second frame (17), driven gears (122) are arranged at two ends of the second conveying rollers (121), a plurality of the driven gears (122) are meshed with a chain (123), and the second driving assembly (4) further comprises a third driving member arranged outside the pressure container (2), and the third driving member is in transmission connection with the chain (123).

10. Pressure drying apparatus according to claim 9, characterized in that the second drive assembly (4) further comprises an output shaft (43) connected to the output end of the third drive member, the output shaft (43) passing through the pressure vessel (2), one end of the output shaft (43) being provided with a transmission gear (44), the transmission gear (44) being in meshed connection with the chain (123), the output shaft (43) being provided with a dynamic seal member (45) for sealing the rotational gap of the pressure vessel (2) and the output shaft (43).