CN116571872A - five+N dimension laser scanning processing system and method - Google Patents
five+N dimension laser scanning processing system and method Download PDFInfo
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- CN116571872A CN116571872A CN202310625643.4A CN202310625643A CN116571872A CN 116571872 A CN116571872 A CN 116571872A CN 202310625643 A CN202310625643 A CN 202310625643A CN 116571872 A CN116571872 A CN 116571872A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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Abstract
The invention discloses a 'five+N' dimension laser scanning processing system and method, which comprises that a laser emits a laser beam collimated along an X-axis direction, a movable reflector is arranged in the laser beam running direction, the movable reflector is used for deflecting the laser beam to vertically enter along a-Y direction, the movable reflector is arranged in the laser beam running direction along the-Y direction, the movable reflector deflects the laser beam to be horizontal with the X-axis direction, a wave plate, a deflection module, a beam expansion module and a scanning module are arranged in the laser beam along the X-axis direction, and a light spot formed after the laser beam passing through the scanning module is focused by a focusing module moves on a working plane. The invention realizes the change of the light beam in the XYZ plane and the two dip angles alpha and beta by regulating and controlling the optical lens in the system.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a five+N dimension laser scanning processing system and method.
Background
In the arrival of the manufacturing age, the processing demands of various industries on refined parts are increasingly vigorous, and in order to meet the requirements of high efficiency and high precision of laser processing, researchers propose a scheme for controlling the change of the space dimension of a focused laser beam by a regulating and controlling system. The common regulation and control laser dimension space change is a two-dimensional galvanometer and a three-dimensional galvanometer, but only can realize the regulation and control of laser beams in two dimensions of an XY plane or three dimensions of the XYZ plane, and the regulation and control device cannot be used for processing certain complex parts in the fields of aerospace, automobile electronics and the like, for example, the machining of inverted cone holes and inverted cone grooves, the dimension for regulating and controlling the laser beams is required to be increased, and the regulation and control of two inclined shafts alpha and beta are increased, so that the regulation and control device has the machining capability of the complex parts under the regulation and control of a plurality of dimensions.
The presently disclosed invention patent CN107771112A, CN114178687a also proposes a method and a device for controlling the dimensional change of the laser beam, but the method and the system proposed by the patent CN107771112a belong to an integrated special system, cannot realize large-breadth fine processing and small-breadth large-depth-diameter ratio processing, have complex structure and high cost, and the pluggable dip angle control module proposed by the patent CN114178687a needs to realize processing of certain complex patterns, such as blind slots, inverted cone holes and the like, by means of an external auxiliary machine tool or a displacement table, thereby influencing the high efficiency of laser processing.
Therefore, a system capable of realizing space dimension regulation of the light beam is needed to be found, so that the light beam has the capability of changing the space of five+N dimensions, the processing of blind holes, through holes, blind grooves, through grooves, back taper grooves and back taper holes with various shapes is realized, the structure for regulating and controlling the space dimension changes of the light beam is relatively independent, the respective space dimension changes of the light beam can be correspondingly controlled, the capability of processing miniature complex parts by laser is effectively improved, and the superiority of ultrafast laser processing is exerted.
Disclosure of Invention
In order to overcome the technical problems, the invention aims to provide a five+N dimension laser scanning processing system and a method, wherein the change of a light beam in an XYZ plane and two inclined angles alpha and beta is realized through the regulation and control of an optical lens in the system, and the N represents the regulation and control of the energy, the pulse width and the polarization type of the laser beam.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
a 'five+N' dimension laser scanning processing system comprises a laser, a wave plate 4, an offset module 5, a beam expanding module 6, a scanning module 7 and a focusing module 8; the laser emits a laser beam 1, the laser beam 1 converts circularly polarized light into linearly polarized light through the wave plate 4, the linearly polarized light deflects the propagation direction through the deflection module 5, then expands the beam through the beam expansion module 6, scans the beam on an XY plane through the scanning module 7, and then enters the focusing module 8 to focus to form a light spot, and the light spot can move on the working plane 10 through the deflection module 5, the beam expansion module 6 and the scanning module 7; where the "five+n" dimensions refer to the modulation of the laser beam 1 energy, pulse width and polarization type in five dimensions.
A movable mirror 2 is arranged in the running direction of the laser beam 1, the movable mirror 2 is used for deflecting the laser beam 1 to vertically enter along the-Y direction, a movable mirror 3 is arranged in the running direction of the laser beam 1 along the-Y direction, the movable mirror 3 deflects the laser beam 1 to be horizontal to the X-axis direction, and a wave plate 4, a deflection module 5, a beam expansion module 6 and a scanning module 7 are arranged in the X-axis direction of the laser beam 1.
The dimension of five+N is five dimensions, comprising X, Y, Z and two inclination angles alpha and beta, wherein X, Y dimensions are controlled by the scanning module 7, Z dimensions are the functions of the beam expanding module 6 and the focusing module 8, and the two inclination angles alpha and beta are the combined functions of the offset module 5, the beam expanding module 6, the scanning module 7 and the focusing module 8;
the 'N' refers to the regulation and control of the energy, the pulse width and the polarization type of the laser beam, the energy and the pulse width of the laser beam are correspondingly regulated and controlled through laser control, and the polarization of the laser beam is regulated and controlled by a half-wave plate or a 1/4 wave plate, so that the required linearly polarized light is obtained.
The wave plate 4 converts circularly polarized light into linearly polarized light and then enters the offset module 5, so that the light beam is offset along the positive direction or the negative direction of the Y axis, then enters the beam expanding module 6 to expand the beam and then enters the scanning module 7, finally, the focusing module 8 focuses the beam to obtain a focused light beam 9, and the movement of a lens of the system is regulated, so that a light spot formed by the focused light beam 9 can move on the working plane 10.
The scanning module 7 comprises a mirror 72 rotating about the X-axis and a mirror 73 rotating about the Y-axis.
The beam expanding module 6 comprises a moving lens 61 and a lens group 62, wherein the lens group 62 is a plurality of lens combinations or aspherical lenses.
The offset module 3 is a double optical wedge, a parallel plate or a dove prism and other structures are selected to realize that the light beam deviates from the optical axis by a certain distance.
A regulation and control method of a 'five+N' dimension laser scanning processing system comprises the following steps;
the dimension of 'five+N' is five degrees of freedom, comprising X, Y, Z and two inclination angles alpha and beta, wherein 'N' refers to the regulation and control of laser beam energy, pulse width, polarization type and the like;
regulation and control of X, Y: wherein, the two degrees of freedom of X, Y are regulated by the scanning module 7, after the incident laser beam 71 passes through the reflecting mirror 72 rotating around the X axis and the reflecting mirror 73 rotating around the Y axis, the emergent laser beam 74 can strike the surface 81 of the focusing module, and the reflecting mirror 72 rotating around the X axis and the reflecting mirror 73 rotating around the Y axis can rotate around X, Y axes respectively, so that the emergent laser beam 74 can move on the XY plane on the surface 81 of the focusing module;
regulation of Z: the adjustment and control of the Z axis is based on the combined action of the beam expanding module 6 and the focusing module 8, aiming at different adjustment and control amplitudes of Z, in order to reduce aberration generated during lens movement, the lens group 62 can be a combination of a plurality of concave lenses and convex lenses or a single aspheric lens, the adjustment and control of the Z axis are realized through the movement of the moving lens 61 in the Z axis, the subsequent scanning module 7 and the focusing system 8 are equivalent to a lens 63, the lens 63 has a focusing function, and when the moving lens 61 moves by a distance of deltaz, the displacement of the focus, namely the displacement in the Z direction is deltas; the relationship between Δz and Δs is:
regulation of alpha and beta: the regulation and control of alpha and beta require that the light beam generates a certain amount of deflection along the optical axis, the final light beam forms an included angle after passing through the focusing system 8, the deflection generating device consists of the movable reflector 2 and the deflection module 3, when the laser beam 1 passes through the movable reflector 2, the reflection principle shows that the direction of the laser beam 1 deflects after the laser beam 1 passes through the 45-degree movable reflector 2, and the laser beam is emitted to the deflection module 3 along the X direction, and the laser beam entering the deflection module 3 deviates from the optical axis by a distance d due to the reciprocating movement of the movable reflector 2 along the Y axis 1 The shifting module consists of two optical wedges 5251 and 52 which are parallel and rotate synchronously around the X-axis, and the property of the optical wedges indicates that the laser beam passing through the shifting module 3 deviates from the X-axis d 2 And because of rotating around the X axis, the emergent light beam rotates on the YZ plane, and finally forms two inclined angles alpha and beta through the focusing system;
wherein:
d 2 ＝d 1 +l·(n-1)·α
the first optical wedge 51 rotates synchronously with the second optical wedge 52.
The invention has the beneficial effects that:
the invention can adjust the change of the laser beam in five dimensions and even a plurality of dimensions, thereby realizing the complex motion track of the focusing light spot in space, when certain complex microstructures such as special-shaped holes, special-shaped grooves and the like need to be processed, the complex spatial track of the light spot can be realized through adjusting and controlling each module of the multi-dimensional laser processing head and the joint motion among the modules, the processing of the complex microstructures is completed, and compared with the processing mode combined with a machine tool, the mode is more efficient and quick to cut.
The invention directly controls the space multidimensional change of laser, increases two deflection angles alpha and beta on the basis of the original XYZ three-dimensional space, achieves the change of five-dimensional and even multidimensional space, and completes the high-efficiency fine processing of the complex structure by utilizing the multidimensional change capability of space light beams.
Studies have shown that the difference in single pulse energy results in a different removal thickness for each pulse, which in turn affects the quality of the process, and the borehole diameter increases as the single pulse energy increases, with shorter pulse widths increasing the nonlinear absorption of the material into the laser energy, thereby increasing the removal rate of the material. The dielectric material linearly polarized light has different reflectivities. This difference can have an impact on the machining, especially on the machining of holes. Therefore, the regulation and control of laser energy, pulse and polarization can be regarded as the regulation and control of laser dimension, the regulation and control of laser energy and pulse can be correspondingly set through a laser device, the regulation and control of laser polarization can be carried out by utilizing a half wave plate or a 1/4 wave plate, corresponding linear polarized light or circular polarized light can be obtained, the linear polarized light has great influence on the shape of an outlet of a processing hole, particularly, the more obvious the larger the deep diameter is, and the good processing effect can be obtained by selectively controlling the corresponding polarized light according to different processing demands.
Description of the drawings:
fig. 1 is a schematic diagram of the structure of the present invention.
Fig. 2 is an exploded view of the beam offset module.
Fig. 3 is an exploded view of the offset module of the beam offset module.
Fig. 4 is an exploded view of the beam expansion module.
Fig. 5 is an exploded view of the plan scan module.
Detailed Description
The present invention will be described in further detail with reference to examples.
As shown in fig. 1 to 5: a 'five+N' dimension laser scanning processing system mainly comprises a laser beam 1, a fixed reflecting mirror 2, a movable reflecting mirror 3, a wave plate 4, an offset module 5, a beam expanding module 6, a plane scanning module 7, a focusing module 8, a focused laser beam 9 and a working plane 10;
the working process of the 'five+N' dimension laser scanning processing system comprises the following steps: the laser beam 1 is considered as laser light emitted by the laser device, the laser light is deflected by the fixed reflecting mirror 2 to vertically enter the movable reflecting mirror 3 along the-Y direction, circularly polarized light is converted into linearly polarized light through the wave plate 4 and then enters the offset module 5, so that the light beam is offset along the positive direction or the negative direction of the Y axis, then enters the beam expanding module 6 to be expanded and then enters the scanning module 7, finally, the focusing module 8 is used for focusing to obtain a focusing light beam 9, and the movement of a lens of the system is regulated, so that a light spot formed by the focusing light beam 9 can move on the working plane 10.
The dimension "five+N" is five degrees of freedom, including X, Y, Z and two inclinations α, β, where "N" refers to the regulation of laser beam energy, pulse width, polarization type, etc.;
regulation and control of X, Y: wherein the two degrees of freedom of X, Y are mainly controlled by the scanning module 7, the scanning module 7 mainly comprises a reflecting mirror 72 rotating around the X axis and a reflecting mirror 73 rotating around the Y axis, the incident laser beam 71 passes through the reflecting mirror 72 rotating around the X axis and the reflecting mirror 73 rotating around the Y axis, and then the emergent laser beam 74 can strike the surface of the focusing module 8, and the reflecting mirror 72 rotating around the X axis and the reflecting mirror 73 rotating around the Y axis can rotate around X, Y axes respectively, so that the emergent laser beam 74 can move on the XY plane on the surface of the focusing module 8;
regulation of Z: the adjustment and control of the Z axis is based on the combined action of the beam expanding module 6 and the focusing module 8, the composition of the beam expanding module 6 is shown in fig. 3, the beam expanding module comprises a movable lens 61 and a lens group 62, wherein the lens group 62 can be a plurality of lens combinations or aspheric lenses, the adjustment and control of the Z axis are realized through the movement of the movable lens 61 in the Z axis, the principle is shown in fig. 4, the following scanning module 7 and the focusing system 8 can be equivalent to a lens 63, the lens 63 has a focusing function, and when the moving distance of the movable lens 61 is deltaz, the displacement of the focus, namely the displacement in the Z direction is deltas;
the relationship between Δz and Δs is:
regulation of alpha and beta: the adjustment and control of alpha and beta require that the light beam generates a certain amount of deflection along the optical axis, the final light beam forms an included angle after passing through the focusing module 8, the deflection generating device consists of the movable reflector 2 and the deflection module 3, wherein the deflection module 3 can be a double-optical wedge, a parallel flat plate or a dove prism or other structures, the deflection generating principle is shown in fig. 5, when the laser beam 1 passes through the movable reflector 2, the reflection principle shows that the direction of the laser beam 1 deflects after the laser beam 1 passes through the 45-degree movable reflector 2, and the laser beam is emitted to the deflection module 3 along the X direction, and the laser beam entering the deflection module 3 deviates from the optical axis by a distance d due to the reciprocating movement of the movable reflector 2 along the Y axis 1 The offset module consists of a first optical wedge 51 and a second optical wedge 52 which are arranged in parallel and synchronously rotate around the X axis, and the property of the optical wedges indicates that the laser beam passing through the offset module 3 deviates from the X axis d 2 And due to the rotation around the X-axis, the outgoing beam will rotate in the YZ-plane, eventually forming two tilt angles α, β through the focusing module 8.
Claims (9)
1. The five+N dimension laser scanning processing system is characterized by comprising a laser, a wave plate (4), an offset module (5), a beam expanding module (6), a scanning module (7) and a focusing module (8); the laser emits a laser beam (1), the laser beam (1) converts circularly polarized light into linearly polarized light through the wave plate (4), the linearly polarized light deflects the propagation direction through the deflection module (5), then expands the beam through the beam expansion module (6), scans the beam on an XY plane through the scanning module (7), and then enters the focusing module 8 to focus to form a light spot, and the light spot can move on the working plane (10) by regulating and controlling the deflection module 5, the beam expansion module 6 and the scanning module 7; wherein the "N" dimension refers to the modulation of the spatial dimension of the beam modulation while modulating the energy, pulse width and polarization type of the laser beam (1).
2. A "five + N" dimensional laser scanning processing system according to claim 1, characterized in that a moving mirror (2) is arranged in the direction of travel of the laser beam (1), said moving mirror (2) being adapted to deflect the laser beam (1) vertically in the-Y direction, a moving mirror (3) is arranged in the direction of travel of the laser beam (1) in the-Y direction, said moving mirror (3) being adapted to deflect the laser beam (1) horizontally in the X-axis direction, and a wave plate (4), a deflection module (5), a beam expansion module (6) and a scanning module (7) are arranged in the direction of the X-axis of the laser beam (1).
3. The system of claim 1, wherein the "five+n" dimensions are five dimensions, including X, Y, Z and two tilt angles α, β, wherein X, Y dimensions are controlled by the scanning module (7), Z dimensions are the functions of the beam expanding module (6) and the focusing module (8), and the two tilt angles α, β are the functions of the offset module (5), the beam expanding module (6), the scanning module (7) and the focusing module (8);
the 'N' refers to the regulation and control of the energy, the pulse width and the polarization type of the laser beam (1), the energy and the pulse width of the laser beam (1) are correspondingly regulated and controlled through laser control, and the polarization of the laser beam (1) is regulated and controlled by a half-wave plate or a 1/4 wave plate, so that the required linearly polarized light is obtained.
4. The system according to claim 1, wherein the wave plate (4) converts circularly polarized light into linearly polarized light and then enters the offset module (5) to offset the light beam along the positive direction or the negative direction of the Y axis, then enters the beam expanding module (6) to expand the beam and then enters the scanning module (7), finally, the focusing module (8) focuses the beam to obtain the focused light beam (9), and the movement of the lens of the system is regulated, so that the light spot formed by the focused light beam (9) can move on the working plane (10).
5. A "five + N" dimensional laser scanning machining system according to claim 1, characterized in that the scanning module (7) comprises a mirror (72) rotating about the X-axis and a mirror (73) rotating about the Y-axis.
6. The system of claim 1, wherein the beam expanding module (6) comprises a moving lens (61) and a lens group (62), wherein the lens group (62) is a combination of a plurality of lenses or an aspherical lens, and the lens group (62) is a combination of a plurality of concave lenses and a convex lens or a single aspherical lens.
7. A "five+n" dimensional laser scanning processing system according to claim 1, characterized in that the offset module (3) is a double wedge or a parallel plate.
8. A method for controlling a "five+n" dimensional laser scanning machining system according to any one of claims 1 to 7, comprising the steps of;
the dimension of 'five+N' is five degrees of freedom, comprising X, Y, Z and two inclination angles alpha and beta, wherein 'N' refers to the regulation and control of laser beam energy, pulse width, polarization type and the like;
regulation and control of X, Y: wherein, the two degrees of freedom of X, Y are regulated by the scanning module (7), after the incident laser beam (71) passes through the reflecting mirror (72) rotating around the X axis and the reflecting mirror (73) rotating around the Y axis, the emergent laser beam (74) can strike the surface (81) of the focusing module, and the reflecting mirror (72) rotating around the X axis and the reflecting mirror (73) rotating around the Y axis can rotate around X, Y axes respectively, so that the emergent laser beam (74) moves on the surface (81) of the focusing module in the XY plane;
regulation of Z: the regulation and control of the Z axis is based on the combined action of the beam expanding module (6) and the focusing module (8), aiming at different regulation and control amplitudes of Z, in order to reduce aberration generated during lens movement, the regulation and control of the Z axis is realized by moving the lens (61) in the Z axis, the following scanning module (7) and the focusing system (8) are equivalent to be the lens (63), the lens (63) has a focusing function, and when the moving distance of the moving lens (61) is deltaz, the displacement of the focus, namely the displacement in the Z direction is deltas; the relationship between Δz and Δs is:
regulation of alpha and beta: alpha and beta are regulated by a certain amount of deflection of the light beam along the optical axis, the final light beam forms an included angle through a focusing system (8), a deflection generating device consists of a movable reflecting mirror (2) and a deflection module (3), when the laser beam (1) passes through the movable reflecting mirror (2), the reflection principle shows that the direction of the laser beam (1) deflects after the laser beam (1) passes through the 45-degree movable reflecting mirror (2), the laser beam is emitted to the deflection module (3) along the X direction, and the laser beam entering the deflection module (3) deviates from the optical axis by d due to the reciprocating motion of the movable reflecting mirror (2) along the Y axis 1 The shifting module consists of a first optical wedge (51) and a second optical wedge (52), wherein the two optical wedges are arranged in parallel and synchronously rotate around an X axis, and the property of the optical wedges indicates that the laser beam passing through the shifting module (3) deviates from the X axis d 2 And because of rotating around the X axis, the emergent light beam rotates on the YZ plane, and finally forms two inclined angles alpha and beta through the focusing system;
wherein:
d 2 ＝d 1 +l·(n-1)·α
9. the method of claim 8, wherein the first optical wedge (51) and the second optical wedge (52) rotate synchronously.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117047307A (en) * | 2023-08-31 | 2023-11-14 | 广东宏石激光技术股份有限公司 | Dynamic light spot cutting adjusting device and cutting method based on vortex light beams |
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2023
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117047307A (en) * | 2023-08-31 | 2023-11-14 | 广东宏石激光技术股份有限公司 | Dynamic light spot cutting adjusting device and cutting method based on vortex light beams |
| CN117047307B (en) * | 2023-08-31 | 2024-05-24 | 广东宏石激光技术股份有限公司 | Dynamic light spot cutting adjusting device and cutting method based on vortex light beams |
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