CN116499632A - Verification device and method for pressure distribution of air-floatation sliding block - Google Patents

Verification device and method for pressure distribution of air-floatation sliding block Download PDF

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Publication number
CN116499632A
CN116499632A CN202310396215.9A CN202310396215A CN116499632A CN 116499632 A CN116499632 A CN 116499632A CN 202310396215 A CN202310396215 A CN 202310396215A CN 116499632 A CN116499632 A CN 116499632A
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CN
China
Prior art keywords
air
sliding block
pressure
slider
movable plate
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Pending
Application number
CN202310396215.9A
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Chinese (zh)
Inventor
仇德中
牛增渊
丁辉
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Jiangsu Jijingkai High End Equipment Technology Co ltd
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Jiangsu Jijingkai High End Equipment Technology Co ltd
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Application filed by Jiangsu Jijingkai High End Equipment Technology Co ltd filed Critical Jiangsu Jijingkai High End Equipment Technology Co ltd
Priority to CN202310396215.9A priority Critical patent/CN116499632A/en
Publication of CN116499632A publication Critical patent/CN116499632A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00Testing of machine parts
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00Computer-aided design [CAD]
    • G06F30/20Design optimisation, verification or simulation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)

Abstract

The invention relates to a verification device and a verification method for pressure distribution of an air-float slide block, wherein the verification device comprises a workbench, a movable plate arranged on the workbench, a driving mechanism for driving the movable plate to move and a limiting mechanism arranged above the movable plate, a plurality of support columns are arranged between the limiting mechanism and the workbench, the air-float slide block is arranged above the movable plate, a plurality of orifices are arranged on the lower surface of the air-float slide block, an air film is formed between the air-float slide block and the movable plate when the air-float slide block is ventilated, the limiting mechanism limits the air-float slide block to move upwards, a first pressure sensor is arranged on the movable plate, the driving mechanism drives the movable plate to move relative to the air-float slide block, and the first pressure sensor detects the pressure below the air-float slide block.

Description

Verification device and method for pressure distribution of air-floatation sliding block
Technical Field
The invention relates to a verification device, in particular to a verification device and method for pressure distribution of an air-floating sliding block.
Background
Along with the continuous development of the air-float slide block technology, on the basis of the traditional air-float slide block, the technologies of gravity preloading, magnetic preloading, vacuum preloading and the like are continuously emerging and are continuously perfected, and the air pressure distribution test of each small hole throttling static air-float unit has significance for better researching the performance of products and verifying the feasibility of a simulation model.
For most of the current air floatation products, most of the detection is to detect the rigidity of the air floatation products under different air film gaps, the distribution condition of the pressure intensity of each small hole throttling static air floatation unit under different conditions can be checked in most of simulation models, but the results of the simulation models are too ideal, the given conditions are mostly air incompressible and laminar, the actual conditions are not ideal, the verification emphasis is neglected, which is not preferable for the experiment of perfecting the simulation models, and the simulation models have important significance for both products and academics.
Therefore, there is a need for a verification device for an air slider pressure distribution that can detect the pressure of each orifice throttling static air slider unit and visualize the pressure distribution of the air slider.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a verification device and a verification method for pressure distribution of an air-floating sliding block.
The technical scheme of the invention is as follows:
the utility model provides a verifying attachment for air supporting slider pressure distribution, is in including workstation, setting movable plate on the workstation, drive the actuating mechanism of movable plate motion and setting are in stop gear of movable plate top, stop gear with be equipped with a plurality of support columns between the workstation, the air supporting slider is placed the top of movable plate, the lower surface of air supporting slider is equipped with a plurality of orifices, when the air supporting slider is ventilated, the air supporting slider with form the air film between the movable plate, stop gear restriction air supporting slider upward movement, be equipped with first pressure sensor on the movable plate, the actuating mechanism drive the movable plate for the air supporting slider moves, first pressure sensor detects the pressure of air supporting slider below.
As a further improvement of the invention, the driving mechanism is a driving rod connected with the air-floating sliding block.
As a further improvement of the invention, the workbench is provided with a fixed block, the fixed block is provided with a through hole, and the driving rod passes through the through hole.
As a further improvement of the invention, the driving rod is provided with external threads, and the through hole is internally provided with internal threads matched with the external threads.
As a further improvement of the invention, the limiting mechanism comprises a supporting plate arranged on the supporting column, a pressing component arranged on the supporting plate and a pressing head driven by the pressing component, wherein the pressing head abuts against the air floatation sliding block when the air floatation sliding block is ventilated.
As a further improvement of the invention, a second pressure sensor is arranged between the pressing component and the pressure head and is used for measuring the pressure of the pressing component on the air-floating sliding block.
As a further improvement of the present invention, the ram has a plurality of alternate uses, each of the rams having a lower surface with a different curvature.
As a further improvement of the invention, the pressing component comprises a differential screw rod arranged on the supporting plate, the lower end of the differential screw rod is connected with the pressing head, and the upper end of the differential screw rod is provided with a handle.
As a further improvement of the invention, a displacement sensor is arranged on the movable plate and is used for measuring the thickness of the air film.
A verification method based on a verification device for air-bearing slider pressure distribution, comprising:
s1: establishing a simulation model at a computer end, inputting simulation parameters, and generating a simulation graph;
s2: after the limiting mechanism is adjusted to reach the initial position, the air-float sliding block to be detected is placed on the moving plate and ventilated, and the limiting mechanism props against the air-float sliding block to limit the upward movement of the air-float sliding block;
s3: the limiting mechanism is adjusted to drive the air-float sliding block to descend until the thickness of the air film reaches a set value;
s4: the adjusting driving mechanism drives the moving plate to move below the air-float sliding block;
s5: reading pressure change below the air-float sliding block in the moving process by a first pressure sensor on the moving plate, and deriving related data;
s6: after the data are processed, the data are compared and analyzed with the simulation graph, and if the results of the data and the simulation graph are the same or similar, the step S7 is carried out; if the results are different, the simulation model is unqualified, and the simulation model is readjusted;
s7: and repeating the experiment for 5-10 times by changing the thickness of the air film or the ventilation quantity of the air-floating sliding block, and if the results of the air-floating sliding block and the air-floating sliding block are the same or similar, indicating that the simulation model is qualified.
According to the invention of the scheme, the beneficial effects of the invention are as follows:
the invention can not only detect the pressure of each small hole throttling static pressure air floatation unit, but also visualize the pressure distribution of the air floatation sliding block, and compare and analyze the pressure distribution with the simulation curve generated by the simulation model, thereby effectively verifying the accuracy and reliability of the simulation model.
Drawings
FIG. 1 is a schematic diagram of the structure of the present invention;
fig. 2 is a simulation graph of the present invention.
In the figure: 1. a work table; 2. a moving plate; 31. a support column; 32. a support plate; 33. a pressure head; 34. a second pressure sensor; 35. a differential screw; 36. a handle; 41. a driving rod; 42. a fixed block; 7. a displacement sensor; 8. a first pressure sensor; 9. an air-float slide block.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art. In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Referring to fig. 1, the invention provides a verifying device for pressure distribution of an air-float slide block, comprising a workbench 1, a moving plate 2 arranged on the workbench 1, a driving mechanism for driving the moving plate 2 to move and a limiting mechanism arranged above the moving plate 2, wherein a plurality of support columns 31 are arranged between the limiting mechanism and the workbench 1, the air-float slide block 9 is arranged above the moving plate 2, a plurality of orifices are arranged on the lower surface of the air-float slide block 9, when the air-float slide block 9 is ventilated, an air film is formed between the air-float slide block 9 and the moving plate 2, the air-float slide block 9 moves upwards through the reaction force of the air film, and as the limiting mechanism is arranged above the air-float slide block 9, after the air-float slide block 9 rises to be contacted with the limiting mechanism, the limiting mechanism limits the air-float slide block 9 to continue to move upwards, the movable plate 2 is provided with a first pressure sensor 8 and a displacement sensor 7, the displacement sensor 7 is used for measuring the thickness of an air film, after the thickness of the air film is regulated to reach a set value by regulating the height of the limiting mechanism, the driving mechanism drives the movable plate 2 to move relative to the air-float sliding block 9, the first pressure sensor 8 detects the pressure below the air-float sliding block 9, and the pressure of each small hole throttling static air-float unit, namely the pressure released by each throttling hole, can be detected through the first pressure sensor 8, and the pressure distribution of the air-float sliding block can be visualized and is compared and analyzed with a simulation curve generated by a simulation model, so that the accuracy and reliability of the simulation model are effectively verified.
Preferably, the driving mechanism is a driving rod 41 connected with the air-floating sliding block 9, the workbench 1 is provided with a fixed block 42, the fixed block 42 is provided with a through hole, the driving rod 41 passes through the through hole, the fixed block 42 plays a role in guiding the driving rod 41, and the driving rod 41 and the through hole are connected in various ways, so that the surfaces of the driving rod 41 and the through hole are smooth, and the driving rod 41 is pushed and pulled to drive the moving plate 2 to move; the driving rod 41 can be provided with external threads, the through hole is internally provided with internal threads, the driving rod 41 is rotated to drive the moving plate 2 to move through the threaded cooperation of the external threads and the internal threads, the displacement of the driving rod 41 can be reduced in a threaded connection mode, the moving speed of the moving plate 2 can be controlled more accurately and precisely, and the moving plate 2 can conveniently move at a uniform speed below the air floatation sliding block 9; meanwhile, a motor can be arranged on the driving rod 41, the movement speed of the moving plate 2 is controlled by the motor to move at a constant speed of 2-7m/s, and when the driving rod 41 is manually rotated, the rotating speed of the motor is often not reached, so that the driving rod 41 only needs to be ensured to rotate at a constant speed, and the moving plate 2 moves at a constant speed.
Preferably, the limiting mechanism comprises a supporting plate 32 arranged on the supporting column 31, a pressing component arranged on the supporting plate 32 and a pressing head 33 driven by the pressing component, when the air floatation sliding block 9 is ventilated, the air floatation sliding block 9 moves upwards until the pressing head 33 butts against the air floatation sliding block 9, the pressing head 33 is provided with a plurality of pressing heads which can be replaced, the curvature of the lower surface of each pressing head 33 is different, and the upper surface of the air floatation sliding block 9 is in various shapes, so that the pressing heads 33 with different curvatures of the lower surface can be in surface contact with various air floatation sliding blocks 9, the contact area is increased, the limiting function of the pressing head 33 on the air floatation sliding block 9 is improved, meanwhile, point contact can be avoided, and abrasion is caused on the upper surface of the air floatation sliding block 9.
Preferably, a second pressure sensor 34 is arranged between the pressing component and the pressure head 33, and is used for measuring the pressure of the pressing component on the air-floating sliding block 9.
Preferably, the pressing component comprises a differential screw rod 35 arranged on the supporting plate 32, the lower end of the differential screw rod 35 is connected with the pressure head 33, the upper end of the differential screw rod 35 is provided with a handle 36, and the pressure head 33 can be controlled to accurately and finely lift through the differential screw rod 35, so that the thickness of the air film can be accurately adjusted.
Preferably, the displacement accuracy of the displacement sensor 7 is 1nm; the accuracy of both the first pressure sensor 8 and the second pressure sensor 34 is 0.001N.
The verification method based on the verification device for the pressure distribution of the air-floating sliding block comprises the following steps:
s1: establishing a simulation model at a computer end, inputting simulation parameters such as air film thickness, ventilation quantity of the air-float sliding block 9 and the like, and generating a simulation graph (shown in figure 2);
s2: after the limiting mechanism is adjusted to reach the initial position, the air-float sliding block 9 to be detected is placed on the moving plate 2 and ventilated, the air-float sliding block 9 ascends, and after the air-float sliding block 9 contacts the limiting mechanism, the limiting mechanism props against the air-float sliding block 9 to limit the upward movement of the air-float sliding block 9;
s3: the limiting mechanism is adjusted to drive the air-float sliding block 9 to descend until the thickness of the air film reaches a set value;
s4: the adjusting driving mechanism drives the moving plate 2 to move below the air-float sliding block 9;
s5: reading the pressure change under the air-float slide block 9 in the moving process by a first pressure sensor 8 on the moving plate 2, and deriving relevant data;
s6: after the data are processed, the data are compared and analyzed with the simulation graph, and if the results of the data and the simulation graph are the same or similar, the step S7 is carried out; if the results are different, the simulation model is unqualified, and the simulation model is readjusted;
s7: the experiment is repeated for 5-10 times by changing the thickness of the air film or the ventilation quantity of the air-floating sliding block 9, and if the results of the air-floating sliding block and the air-floating sliding block are the same or similar, the simulation model is qualified.
In summary, the device and the method for verifying the pressure distribution of the air-float slide block provided by the invention can detect the pressure of each orifice throttling static pressure air-float unit, namely the pressure released by each orifice, and can visualize the pressure distribution of the air-float slide block, and compare and analyze the pressure distribution with a simulation curve generated by a simulation model, thereby effectively verifying the accuracy and the reliability of the simulation model; the driving rod 41 is in threaded fit with the through hole, so that the movable plate 2 can conveniently move at a uniform speed below the air floatation sliding block 9; the plurality of pressure heads 33 with different curvatures on the lower surface can be used alternatively, so that the pressure heads can be kept in surface contact with various air-floating sliding blocks 9, the contact area is increased, the limiting function of the pressure heads 33 on the air-floating sliding blocks 9 is improved, meanwhile, point contact can be avoided, and abrasion is caused on the upper surface of the air-floating sliding blocks 9; the displacement sensor 7, the first pressure sensor 8 and the second pressure sensor 34 are all high-precision sensors, so that the accuracy of each parameter is ensured.
It is emphasized that: the above embodiments are merely preferred embodiments of the present invention, and the present invention is not limited in any way, and any simple modification, equivalent variation and modification made to the above embodiments according to the technical substance of the present invention still fall within the scope of the technical solution of the present invention.

Claims (10)

1. A verifying device for air supporting slider pressure distribution, its characterized in that includes workstation (1), sets up movable plate (2) on workstation (1), drive movable plate (2) motion actuating mechanism and setting are in stop gear of movable plate (2) top, stop gear with be equipped with a plurality of support columns (31) between workstation (1), air supporting slider (9) are placed the top of movable plate (2), the lower surface of air supporting slider (9) is equipped with a plurality of orifices, when air supporting slider (9) ventilates, air supporting slider (9) with form the air film between movable plate (2), stop gear restriction air supporting slider (9) upward movement, be equipped with first pressure sensor (8) on movable plate (2), actuating mechanism drive movable plate (2) for air supporting slider (9) moves, first pressure sensor (8) detect the pressure of air supporting slider (9) below.
2. Verification device for pressure distribution of an air slider according to claim 1, characterized in that the driving mechanism is a driving rod (41) connected to the air slider (9).
3. Verifying device for pressure distribution of an air-bearing slider according to claim 2, characterized in that a fixed block (42) is provided on the table (1), a through hole is provided on the fixed block (42), and the driving rod (41) passes through the through hole.
4. A verification apparatus for air bearing slider pressure distribution as claimed in claim 3 wherein said driving rod (41) is provided with external screw threads and said through hole is provided with internal screw threads cooperating with said external screw threads.
5. Verifying device for pressure distribution of an air-bearing slider according to claim 1, wherein the limit mechanism comprises a support plate (32) arranged on the support column (31), a pressing-down assembly arranged on the support plate (32) and a pressure head (33) driven by the pressing-down assembly, wherein the pressure head (33) abuts against the air-bearing slider (9) when the air-bearing slider (9) is ventilated.
6. The verification device for pressure distribution of an air-bearing slider according to claim 5, characterized in that a second pressure sensor (34) is arranged between the pressing component and the pressure head (33) for measuring the pressure of the pressing component on the air-bearing slider (9).
7. A verification apparatus for an air bearing slider pressure profile as claimed in claim 5 wherein said ram (33) has a plurality of alternate uses, each of said rams (33) having a lower surface with a different curvature.
8. The verifying apparatus for pressure distribution of an air-bearing slider according to claim 5, wherein the pressing down assembly includes a differential screw (35) provided on the support plate (32), a lower end of the differential screw (35) is connected to the ram (33), and an upper end of the differential screw (35) is provided with a handle (36).
9. Verifying device for pressure distribution of an air-bearing slider according to claim 1, characterized in that the mobile plate (2) is provided with a displacement sensor (7) for measuring the thickness of the air film.
10. A verification method of a verification device for an air slider pressure distribution as claimed in claim 1, wherein the verification method comprises:
s1: establishing a simulation model at a computer end, inputting simulation parameters, and generating a simulation graph;
s2: after the limiting mechanism is adjusted to reach an initial position, the air-float sliding block (9) to be detected is placed on the moving plate (2) and ventilated, the limiting mechanism props against the air-float sliding block (9), and the air-float sliding block (9) is limited to move upwards;
s3: the limiting mechanism is regulated to drive the air-float sliding block (9) to descend until the thickness of the air film reaches a set value;
s4: the adjusting driving mechanism drives the moving plate (2) to move below the air floatation sliding block (9);
s5: reading the pressure change under the air-float slide block (9) in the moving process by a first pressure sensor (8) on the moving plate (2), and deriving relevant data;
s6: after the data are processed, the data are compared and analyzed with the simulation graph, and if the results of the data and the simulation graph are the same or similar, the step S7 is carried out; if the results are different, the simulation model is unqualified, and the simulation model is readjusted;
s7: and repeating the experiment for 5-10 times by changing the thickness of the air film or the ventilation quantity of the air-floating sliding block (9), and if the results of the air-floating sliding block and the air-floating sliding block are the same or similar, indicating that the simulation model is qualified.
CN202310396215.9A 2023-04-14 2023-04-14 Verification device and method for pressure distribution of air-floatation sliding block Pending CN116499632A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202310396215.9A CN116499632A (en) 2023-04-14 2023-04-14 Verification device and method for pressure distribution of air-floatation sliding block

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202310396215.9A CN116499632A (en) 2023-04-14 2023-04-14 Verification device and method for pressure distribution of air-floatation sliding block

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117629024A (en) * 2023-12-04 2024-03-01 中轴精控(广州)科技有限公司 Method and device for detecting thickness of air film of porous medium air bearing in real time

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117629024A (en) * 2023-12-04 2024-03-01 中轴精控(广州)科技有限公司 Method and device for detecting thickness of air film of porous medium air bearing in real time

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