CN116443568B - Large-scale vacuum mechanical arm - Google Patents
Large-scale vacuum mechanical arm Download PDFInfo
- Publication number
- CN116443568B CN116443568B CN202310713926.4A CN202310713926A CN116443568B CN 116443568 B CN116443568 B CN 116443568B CN 202310713926 A CN202310713926 A CN 202310713926A CN 116443568 B CN116443568 B CN 116443568B
- Authority
- CN
- China
- Prior art keywords
- tilting
- assembly
- rod
- cavity
- transmission
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005540 biological transmission Effects 0.000 claims abstract description 100
- 230000007246 mechanism Effects 0.000 claims abstract description 68
- 230000005571 horizontal transmission Effects 0.000 claims abstract description 41
- 230000033001 locomotion Effects 0.000 claims abstract description 14
- 238000012546 transfer Methods 0.000 claims description 33
- 229910000831 Steel Inorganic materials 0.000 claims description 31
- 239000010959 steel Substances 0.000 claims description 31
- 238000007789 sealing Methods 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 230000008859 change Effects 0.000 claims description 4
- 238000009434 installation Methods 0.000 claims description 4
- 210000004210 tooth component Anatomy 0.000 claims 1
- 230000000712 assembly Effects 0.000 description 4
- 238000000429 assembly Methods 0.000 description 4
- 239000010963 304 stainless steel Substances 0.000 description 2
- 229910000589 SAE 304 stainless steel Inorganic materials 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/902—Devices for picking-up and depositing articles or materials provided with drive systems incorporating rotary and rectilinear movements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manipulator (AREA)
Abstract
The invention relates to the technical field of vacuum cavity handover, in particular to a large-scale vacuum manipulator. The device comprises a horizontal transmission mechanism, a supporting tilting mechanism, a fixed assembly, a tilting cavity and a transmission rod assembly, wherein the tilting cavity is movably arranged on the fixed assembly, the supporting tilting mechanism is arranged on the fixed assembly and is connected with the tilting cavity, and the supporting tilting mechanism is used for supporting and driving the tilting cavity to swing up and down; the transmission rod assembly penetrates through the tilting cavity and can move along the axial direction; the horizontal transmission mechanism is arranged on the fixed component and is in transmission connection with the transmission rod component, and the horizontal transmission mechanism is used for driving the transmission rod component to stretch out and draw back. The invention has simple principle, stable and reliable movement, adjustable transmission stroke, large-stroke and large-load sample connection, can be used in low and high vacuum environments, and has wide application range.
Description
Technical Field
The invention relates to the technical field of vacuum cavity handover, in particular to a large-scale vacuum manipulator.
Background
When scientific research and industrial production are carried out in a vacuum environment, the mechanical mechanism is required to transfer and operate the articles in the vacuum chamber on the premise of not damaging the vacuum degree in the vacuum chamber. At present, the magnetic force transfer rod produced in China can only transfer small samples with short travel, transfer long travel and large load samples, and the transfer rod can deform or even be damaged and cannot finish the transfer task.
At present, the vacuum internal transmission also uses a belt wheel and a chain transmission mode, the belt wheel and the chain transmission efficiency is poor, and the precision is low. Meanwhile, the transmission mode can only be used for low vacuum equipment and cannot be used in ultrahigh vacuum. And only horizontal transmission can be completed, and actions such as small swing and the like do not assist in handover.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a large vacuum manipulator which has the advantages of simple principle, stable and reliable motion, adjustable transmission stroke, capability of connecting large-stroke and large-load samples, capability of being used in low-vacuum and high-vacuum environments and wide application range.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
the invention provides a large vacuum manipulator which comprises a horizontal transmission mechanism, a supporting tilting mechanism, a fixed assembly, a tilting cavity and a transmission rod assembly, wherein the tilting cavity is movably arranged on the fixed assembly, the supporting tilting mechanism is arranged on the fixed assembly and is connected with the tilting cavity, and the supporting tilting mechanism is used for supporting and driving the tilting cavity to swing up and down; the transmission rod assembly penetrates through the tilting cavity and can move along the axial direction; the horizontal transmission mechanism is arranged on the fixed component and is in transmission connection with the transmission rod component, and the horizontal transmission mechanism is used for driving the transmission rod component to stretch out and draw back.
The fixing assembly comprises a fixing cavity; the tilting cavity is accommodated in the fixed cavity, and the rear end of the tilting cavity is rotationally connected with the fixed cavity through the tilting shaft assembly; the front end of the tilting cavity is connected with the supporting tilting mechanism.
The supporting tilting mechanism comprises a corrugated pipe telescopic assembly, a tilting connecting rod assembly, a supporting motor assembly and a supporting seat, wherein the supporting seat is connected with the fixed cavity, the supporting motor assembly is arranged on the supporting seat, the output end of the supporting motor assembly is connected with one end of the corrugated pipe telescopic assembly through the tilting connecting rod assembly, and the other end of the corrugated pipe telescopic assembly penetrates through a connecting sleeve arranged on the fixed cavity and is connected with the tilting cavity.
The bellows expansion assembly comprises a bellows and a driving rod, wherein the outer side end of the bellows is in sealing connection with the connecting sleeve, the driving rod penetrates through the bellows and is in sealing connection with the inner side end of the bellows, the inner side end of the driving rod is connected with a connecting column arranged on the tilting cavity, and the outer side end of the driving rod is connected with the tilting connecting rod assembly.
The tilting connecting rod assembly comprises a connecting rod I and a connecting rod II, wherein one end of the connecting rod I is hinged with the supporting seat, the other end of the connecting rod I is connected with the supporting motor assembly, one end of the connecting rod II is hinged with the connecting rod I, and the other end of the connecting rod II is hinged with the outer side end of the driving rod;
the support seat is provided with a photoelectric fixing component, and the photoelectric fixing component is matched with the other end of the connecting rod I, so that the swing of the transmission rod component is controlled and positioned.
The support motor assembly comprises a tilting motor, a screw and a screw rod, wherein the tilting motor is floatingly arranged on the support seat, the output end of the tilting motor is connected with one end of the screw rod, the screw rod is in threaded connection with the screw rod, and the other end of the connecting rod I is movably connected with the screw rod.
The transfer rod assembly comprises a I-steel transfer rod, a photoelectric positioning sheet and a transfer fork assembly, wherein the transfer fork assembly is arranged at the front end of the I-steel transfer rod and is used for delivering and transmitting articles; the photoelectric positioning sheet is arranged on the I-steel transmission rod;
the fixed cavity is provided with a correlation switch, the correlation switch obtains the linear movement position information of the I-steel transmission rod through the position change of the photoelectric positioning sheet on the I-steel transmission rod and feeds back the linear movement position information to the horizontal transmission mechanism, and the horizontal transmission mechanism enables the I-steel transmission rod to linearly move to a designated position.
The horizontal transmission mechanism comprises a driving tooth assembly, a horizontal transmission motor, a magnetic force rotating shaft assembly, a corrugated pipe coupling and a rack, wherein the rack is arranged on the transmission rod assembly; the driving tooth assembly is radially arranged on the tilting cavity and can rotate, and is meshed with the rack;
the horizontal transmission motor is arranged on the fixed assembly, and the output end of the horizontal transmission motor is connected with the driving tooth assembly through the magnetic rotating shaft assembly.
The front end of the fixed cavity is connected with the vacuum cavity, the rear end of the fixed cavity is connected with the outer cover of the transfer rod, and the outer cover of the transfer rod is used for vacuum sealing of the manipulator.
The tilting cavity comprises a tilting cylinder and two groups of guide assemblies symmetrically arranged at two ends of the tilting cylinder, and the two groups of guide assemblies are used for supporting and guiding the transmission rod assemblies;
the guide assembly comprises a transmission rod guide a, a transmission rod guide b and an adjusting mechanism, wherein the transmission rod guide b and the transmission rod guide a are arranged up and down and used for clamping the transmission rod assembly, and the adjusting mechanism is arranged below the transmission rod guide a and used for adjusting the installation position of the transmission rod guide a along the height direction.
The invention has the advantages and beneficial effects that:
1. the invention adopts the I-steel transmission rod for driving, has high yield strength, can connect long-stroke and heavy-load samples, is not easy to bend, has high overall strength and does not deform after high-temperature baking.
2. The invention can not only finish long-stroke linear transmission, but also finish small-amplitude lifting similar to the vertical direction, thereby being more convenient for sample delivery.
3. In the sample transmission process, the correlation switch is utilized to stop the sample at the designated position, so that the sample transmission device is convenient to adjust, stable and reliable.
4. In the supporting tilting mechanism, the photoelectric switch is utilized to control the swinging angle of the I-steel transmission rod along the axial direction, so that the supporting tilting mechanism is convenient to adjust, and is stable and reliable.
5. The mechanical arm has stable torque transmission, high mechanical efficiency, high overall high-temperature baking resistance, can be used in low-vacuum and high-vacuum environments, and has wide application range.
Drawings
FIG. 1 is an isometric view of a mainframe vacuum robot of the present invention;
FIG. 2 is a front view of a large vacuum robot of the present invention;
FIG. 3 is a schematic view of a fixing assembly according to the present invention;
FIG. 4 is an isometric view of a tilting cavity of the present invention;
FIG. 5 is a front view of a tilting chamber of the present invention;
FIG. 6 is a side view of FIG. 5;
FIG. 7 is an isometric view of a transfer lever assembly of the present invention;
FIG. 8 is a partial view of the I-steel transfer rod of the present invention;
FIG. 9 is a schematic view of a horizontal transmission mechanism of the present invention;
FIG. 10 is a schematic view of a support tilt mechanism according to the present invention;
fig. 11 is a schematic installation view of the support tilting mechanism of the present invention.
In the figure: the device comprises a transmission rod housing 1, a horizontal transmission mechanism 2, a supporting tilting mechanism 3, a fixing assembly 4, a tilting cavity 5, a transmission rod assembly 6, a fixing cavity 7, a correlation switch 8, an adjusting mechanism 9, a transmission rod guide a10, a transmission rod guide b11, a tilting shaft assembly 12, a driving gear assembly 13, a tilting cylinder 14, a bellows telescopic assembly 15, a bellows 151, a driving rod 152, a tilting connecting rod assembly 16, a connecting rod I161, a connecting rod II 162, a supporting motor assembly 17, a tilting motor 171, a nut 172, a lead screw 173, a photoelectric fixing assembly 18, an I-steel transmission rod 19, a photoelectric positioning plate 20, a transmission fork assembly 21, a horizontal transmission motor 22, a magnetic force rotating shaft assembly 23, a bellows coupling 24, a connecting column 25, a rack 26, a supporting seat 27 and a connecting sleeve 28.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments.
As shown in fig. 1-2, the invention provides a large vacuum manipulator, which comprises a horizontal transmission mechanism 2, a supporting tilting mechanism 3, a fixed component 4, a tilting cavity 5 and a transmission rod component 6, wherein the tilting cavity 5 is movably arranged on the fixed component 4, the supporting tilting mechanism 3 is arranged on the fixed component 4 and is connected with the tilting cavity 5, and the supporting tilting mechanism 3 is used for supporting and driving the tilting cavity 5 to swing up and down; the transmission rod assembly 6 penetrates through the tilting cavity 5 and can move along the axial direction; the horizontal transmission mechanism 2 is arranged on the fixed component 4 and is in transmission connection with the transmission rod component 6, and the horizontal transmission mechanism 2 is used for driving the transmission rod component 6 to stretch and retract. The large vacuum manipulator can drive the transfer rod assembly 6 to linearly move along the axial direction of the large vacuum manipulator through the horizontal transmission mechanism 2, and the tilting cavity 5 and the transfer rod assembly 6 inside the large vacuum manipulator are driven by the supporting tilting mechanism 3 to swing at a small angle along the up-down direction, so that the large vacuum manipulator is simple in principle, stable and reliable in motion, adjustable in transfer stroke, capable of connecting a large stroke and a large load sample, applicable to both low and high vacuum environments, and wide in application range.
As shown in fig. 1 and 3, in the embodiment of the present invention, the fixing assembly 4 includes a fixing cavity 7, and the tilting cavity 5 is accommodated in the fixing cavity 7. The fixed cavity 7 is provided with a correlation switch 8 and a connecting sleeve 28, and the connecting sleeve 28 is used for connecting and supporting the tilting mechanism 3. Further, the front end of the fixed cavity 7 is connected with the vacuum cavity, the rear end is connected with the transmission rod housing 1, and the transmission rod housing 1 is used for vacuum sealing of the manipulator. Specifically, the transmission rod housing 1 and the fixed cavity 7 adopt a metal knife edge sealing mode, and can be used in ultra-high vacuum. Other seals such as rubber seals may also accomplish this function if high vacuum requirements are not present.
As shown in fig. 4 to 6, in the embodiment of the present invention, the tilting cavity 5 includes a tilting cylinder 14 and two sets of guiding components symmetrically disposed at two ends of the tilting cylinder 14, where the two sets of guiding components are used for supporting and guiding the transmission rod component 6. Specifically, the guide assembly comprises a transmission rod guide a10, a transmission rod guide b11 and an adjusting mechanism 9, wherein the transmission rod guide b11 and the transmission rod guide a10 are arranged up and down and used for clamping the transmission rod assembly 6, and the adjusting mechanism 9 is arranged below the transmission rod guide a10 and used for adjusting the installation position of the transmission rod guide a10 along the height direction.
Further, the rear end of the tilting cylinder 14 is rotationally connected with the fixed cavity 7 through the tilting shaft assembly 12, and the tilting cylinder 14 can swing at a small angle relative to the fixed cavity 7 by taking the tilting shaft assembly 12 as an axis; the front end bottom of the tilting cylinder 14 is provided with a connecting post 25 for connecting with the supporting tilting mechanism 3.
As shown in fig. 7-8, in the embodiment of the present invention, the transfer rod assembly 6 includes a i-steel transfer rod 19, a photoelectric positioning plate 20 and a transfer fork assembly 21, wherein two ends of the i-steel transfer rod 19 are supported and guided by two sets of guiding assemblies, and the transfer fork assembly 21 is disposed at the front end of the i-steel transfer rod 19, for transferring a heavy load sample; the photoelectric positioning sheet 20 is arranged on the I-steel transmission rod 19. The correlation switch 8 on the fixed cavity 7 obtains the linear movement position information of the I-steel transmission rod 19 through the position change of the photoelectric positioning sheet 20 on the I-steel transmission rod 19, and feeds back to the horizontal transmission mechanism 2, and the horizontal transmission mechanism 2 enables the I-steel transmission rod 19 to move to a designated position along a straight line.
As shown in fig. 4 and 8-9, in the embodiment of the present invention, the horizontal transmission mechanism 2 includes a driving gear assembly 13, a horizontal transmission motor 22, a magnetic force rotating shaft assembly 23, a bellows coupling 24 and a rack 26, wherein the rack 26 is disposed on the i-steel transmission rod 19; the driving tooth assembly 13 is radially arranged on the tilting cavity 5 and can rotate, and the driving tooth assembly 13 is meshed with the rack 26; the horizontal transmission motor 22 is arranged on the fixed cavity 7, and the output end of the horizontal transmission motor is connected with the driving tooth assembly 13 through the magnetic rotation shaft assembly 23, and the magnetic rotation shaft assembly 23 is in sealing connection with the fixed cavity 7. The horizontal transmission motor 22 drives the driving tooth assembly 13 to rotate through the magnetic rotation shaft assembly 23, so that the I-steel transmission rod 19 is driven to do linear motion along the axial direction, and the expansion and contraction of the transmission rod assembly 6 are realized. In this embodiment, the horizontal transmission motor 22 provides a rotational torque, the magnetic rotation shaft assembly completes vacuum sealing and transmits the torque to the bellows coupling 24, the bellows coupling 24 cooperates with the driving gear assembly 13, and the torque is transmitted to the inside of the tilting cavity 5. The correlation switch 8 can obtain the linear movement position information of the I-steel transmission rod 19 through the position change of the photoelectric positioning sheet in the transmission rod assembly 6, and feed back the linear movement position information to the horizontal transmission motor 22 to stop the speed reduction, so that the I-steel transmission rod 19 moves to a specified position along the linear direction.
In the embodiment, the driving tooth assembly 13 and the I-steel transmission rod 19 are driven in a gear-rack meshing mode, so that the mechanical efficiency is high, and the movement is stable. Other mechanisms such as pulleys, chains may also accomplish this function. The bellows coupling 24 is convenient to install, torque can be continuously transmitted under the condition of micro deformation, and the hydraulic bellows is preferably adopted, so that the strength is high, and the deformation amount is allowed to be large. Other flexible couplings such as welded bellows, elongated couplings may also accomplish this function. The I-steel transfer rod 19 adopts a structure similar to an I shape, and reduces the weight as much as possible while improving the yield strength. Specifically, the I-steel transmission rod 19 is made of 304 stainless steel, and the 304 stainless steel has high strength, low price and convenient processing. Other materials can be made of aluminum or titanium structures according to the load of the transmission end, and the function can be realized.
As shown in fig. 10-11, in the embodiment of the present invention, the supporting tilting mechanism 3 includes a bellows expansion assembly 15, a tilting link assembly 16, a supporting motor assembly 17 and a supporting seat 27, wherein the supporting seat 27 is connected with a connecting sleeve 28 on the fixed cavity 7, the supporting motor assembly 17 is disposed on the supporting seat 27, an output end is connected with one end of the bellows expansion assembly 15 through the tilting link assembly 16, and the other end of the bellows expansion assembly 15 passes through the connecting sleeve 28 and is in threaded connection with a connecting post 25 on the tilting cavity 5.
As shown in fig. 11, in the embodiment of the present invention, the bellows expansion assembly 15 includes a bellows 151 and a driving rod 152, wherein an outer end of the bellows 151 is connected with the connection sleeve 28 in a sealing manner, the driving rod 152 penetrates the bellows 151 and is connected with an inner end of the bellows 151 in a sealing manner, the inner end of the driving rod 152 is connected with the connection post 25 provided on the tilting cavity 5, and an outer end of the driving rod 152 is connected with the tilting link assembly 16.
In the embodiment of the present invention, the supporting motor assembly 17 includes a tilting motor 171, a screw 172 and a screw 173, wherein the tilting motor 171 is floatingly mounted on the supporting base 27 to be capable of swinging with a lower amplitude. The output end of the tilting motor 171 is connected with one end of a screw 173, and the other end of the screw 173 is provided with a limit nut. The nut 172 is screwed with the screw 173 to form a screw pair. The tilting link assembly 16 includes a link i 161 and a link ii 162, wherein one end of the link i 161 is hinged to the support base 27, the other end is movably connected to the nut 172 in the support motor assembly 17, one end of the link ii 162 is hinged to the link i 161, and the other end is hinged to the outer end of the driving rod 152. The tilting motor 171 drives the screw 173 to rotate, the screw 172 drives the connecting rod I161 to swing, and the connecting rod I161 drives the tilting cavity 5 and the transmission rod assembly 6 therein to swing around the tilting shaft assembly 12 at a small angle up and down through the connecting rod II 162 and the driving rod 152.
In this embodiment, the supporting and tilting mechanism 3 adopts a crank block movement mode to complete the swing control of the supporting and tilting mechanism 3. The bellows expansion assembly 15 adopts a bellows ultra-high vacuum sealing mode, and simultaneously satisfies the variation of expansion stroke. If high vacuum requirements are not present, other dynamic sealing means, such as O-rings, may be used to achieve this function. The I-steel transmission rod 19 is adjusted to be matched with the gear rack of the driving tooth 28 through the adjusting mechanism 9. Specifically, the adjusting mechanism 9 includes a fixing plate fixed on the tilting cavity 5, and an adjusting bolt screwed with the fixing plate, and the end portion is abutted with the transmission rod guide a 10.
Further, the support base 27 is provided with a photoelectric fixing assembly 18, and the photoelectric fixing assembly 18 is matched with the other end of the connecting rod I161, so that the swing of the transmission rod assembly 6 is controlled and positioned.
The invention provides a large vacuum manipulator, which has the working principle that:
the horizontal transmission mechanism 2 and the tilting cavity 5 are arranged on the fixed component 4, the transmission rod component 6 is arranged on the tilting cavity 5, and the transmission rod component 6 can be driven to linearly move along the axial direction through the horizontal transmission mechanism 2. One end of the supporting tilting mechanism 3 is arranged on the fixed component 4, the other end of the supporting tilting mechanism is connected with the tilting cavity 5, the tilting cavity 5 and the transmission rod component 6 inside the supporting tilting mechanism 3 are driven to swing at a small angle along the up-down direction, the front end of the transmission rod component 6 is similar to the up-down lifting effect, and the sample can be conveniently connected. The photoelectric fixing assembly 18 is matched with the tilting connecting rod assembly 16, and can control the swinging angle of the transmission rod assembly 6. When the tilting cavity 5 swings slightly, the corrugated pipe coupling 24 in the horizontal transmission mechanism 2 swings slightly, and torque transmission can be completed at the same time of swinging by utilizing the flexibility of the corrugated pipe.
The large vacuum manipulator provided by the invention has the advantages of simple principle, stable and reliable movement, adjustable transmission stroke, capability of connecting large-stroke and large-load samples, capability of being used in low-vacuum and high-vacuum environments and wide application range.
The foregoing is merely an embodiment of the present invention and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, expansion, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.
Claims (5)
1. The large vacuum manipulator is characterized by comprising a horizontal transmission mechanism (2), a supporting tilting mechanism (3), a fixing assembly (4), a tilting cavity (5) and a transmission rod assembly (6), wherein the tilting cavity (5) is movably arranged on the fixing assembly (4), the supporting tilting mechanism (3) is arranged on the fixing assembly (4) and is connected with the tilting cavity (5), and the supporting tilting mechanism (3) is used for supporting and driving the tilting cavity (5) to swing up and down; the transmission rod assembly (6) penetrates through the tilting cavity (5) and can move along the axial direction; the horizontal transmission mechanism (2) is arranged on the fixed component (4) and is in transmission connection with the transmission rod component (6), and the horizontal transmission mechanism (2) is used for driving the transmission rod component (6) to stretch;
the fixing assembly (4) comprises a fixing cavity (7); the tilting cavity (5) is accommodated in the fixed cavity (7), and the rear end of the tilting cavity is rotationally connected with the fixed cavity (7) through the tilting shaft assembly (12); the front end of the tilting cavity (5) is connected with the supporting tilting mechanism (3);
the supporting tilting mechanism (3) comprises a corrugated pipe telescopic component (15), a tilting connecting rod component (16), a supporting motor component (17) and a supporting seat (27), wherein the supporting seat (27) is connected with the fixed cavity (7), the supporting motor component (17) is arranged on the supporting seat (27), an output end is connected with one end of the corrugated pipe telescopic component (15) through the tilting connecting rod component (16), and the other end of the corrugated pipe telescopic component (15) penetrates through a connecting sleeve (28) arranged on the fixed cavity (7) and is connected with the tilting cavity (5);
the corrugated pipe telescopic assembly (15) comprises a corrugated pipe (151) and a driving rod (152), wherein the outer side end of the corrugated pipe (151) is in sealing connection with the connecting sleeve (28), the driving rod (152) penetrates through the corrugated pipe (151) and is in sealing connection with the inner side end of the corrugated pipe (151), the inner side end of the driving rod (152) is connected with a connecting column (25) arranged on the tilting cavity (5), and the outer side end of the driving rod (152) is connected with the tilting connecting rod assembly (16);
the tilting connecting rod assembly (16) comprises a connecting rod I (161) and a connecting rod II (162), wherein one end of the connecting rod I (161) is hinged with the supporting seat (27), the other end of the connecting rod I is connected with the supporting motor assembly (17), one end of the connecting rod II (162) is hinged with the connecting rod I (161), and the other end of the connecting rod II is hinged with the outer side end of the driving rod (152);
the support seat (27) is provided with a photoelectric fixing assembly (18), and the photoelectric fixing assembly (18) is matched with the other end of the connecting rod I (161), so that the swing of the transmission rod assembly (6) is controlled and positioned;
the supporting motor assembly (17) comprises a tilting motor (171), a screw nut (172) and a screw rod (173), wherein the tilting motor (171) is arranged on the supporting seat (27) in a floating mode, the output end of the tilting motor is connected with one end of the screw rod (173), the screw nut (172) is in threaded connection with the screw rod (173), and the other end of the connecting rod I (161) is movably connected with the screw nut (172).
2. The large vacuum mechanical arm according to claim 1, wherein the transfer rod assembly (6) comprises a i-steel transfer rod (19), a photoelectric positioning sheet (20) and a transfer fork assembly (21), wherein the transfer fork assembly (21) is arranged at the front end of the i-steel transfer rod (19) and is used for delivering and transporting articles; the photoelectric positioning sheet (20) is arranged on the I-steel transmission rod (19);
the fixed cavity (7) is provided with a correlation switch (8), the correlation switch (8) obtains the linear movement position information of the I-steel transmission rod (19) through the position change of the photoelectric positioning sheet (20) on the I-steel transmission rod (19), and feeds back the linear movement position information to the horizontal transmission mechanism (2), and the horizontal transmission mechanism (2) enables the I-steel transmission rod (19) to move to a specified position along a straight line.
3. The large vacuum manipulator according to claim 1, characterized in that the front end of the stationary cavity (7) is connected with the vacuum cavity and the rear end is connected with the transfer rod housing (1), the transfer rod housing (1) being used for vacuum sealing of the manipulator.
4. The large vacuum mechanical arm according to claim 1, wherein the horizontal transmission mechanism (2) comprises a driving gear assembly (13), a horizontal transmission motor (22), a magnetic rotating shaft assembly (23), a corrugated pipe coupling (24) and a rack (26), wherein the rack (26) is arranged on the transmission rod assembly (6); the driving tooth assembly (13) is radially arranged on the tilting cavity (5) and can rotate, and the driving tooth assembly (13) is meshed with the rack (26);
the horizontal transmission motor (22) is arranged on the fixed component (4), and the output end of the horizontal transmission motor is connected with the driving tooth component (13) through the magnetic rotating shaft component (23).
5. The large vacuum mechanical arm according to claim 1, wherein the tilting cavity (5) comprises a tilting cylinder (14) and two groups of guide components symmetrically arranged at two ends of the tilting cylinder (14), and the two groups of guide components are used for supporting and guiding the transfer rod component (6);
the guide assembly comprises a transmission rod guide a (10), a transmission rod guide b (11) and an adjusting mechanism (9), wherein the transmission rod guide b (11) and the transmission rod guide a (10) are arranged up and down and used for clamping the transmission rod assembly (6), and the adjusting mechanism (9) is arranged below the transmission rod guide a (10) and used for adjusting the installation position of the transmission rod guide a (10) along the height direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310713926.4A CN116443568B (en) | 2023-06-16 | 2023-06-16 | Large-scale vacuum mechanical arm |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310713926.4A CN116443568B (en) | 2023-06-16 | 2023-06-16 | Large-scale vacuum mechanical arm |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116443568A CN116443568A (en) | 2023-07-18 |
| CN116443568B true CN116443568B (en) | 2023-08-22 |
Family
ID=87127713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310713926.4A Active CN116443568B (en) | 2023-06-16 | 2023-06-16 | Large-scale vacuum mechanical arm |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116443568B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000195923A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Ltd | Robot for carrying, carrier, carrier in vacuum chamber, and process treatment equipment |
| JP2009238962A (en) * | 2008-03-26 | 2009-10-15 | Japan Science & Technology Agency | Vacuum conveyance mechanism and multi-chamber system including the same |
| CN201537921U (en) * | 2009-09-17 | 2010-08-04 | 宝山钢铁股份有限公司 | Auxiliary mechanical arm for sample handover of vacuum equipment |
| CN204368298U (en) * | 2014-11-26 | 2015-06-03 | 孙玉林 | Automobile rod lift jack |
| CN108081245A (en) * | 2017-12-26 | 2018-05-29 | 欢乐飞（上海）机器人有限责任公司 | A kind of robot head structure of tongue strip expression |
| CN207671187U (en) * | 2017-12-25 | 2018-07-31 | 合肥布勒自动化设备有限公司 | Lift and conveyer |
| CN210071096U (en) * | 2019-06-14 | 2020-02-14 | 上海快仓智能科技有限公司 | Following lifting type weighing system of AGV car |
| CN112356060A (en) * | 2020-11-25 | 2021-02-12 | 宁波腾柏自动化科技有限公司 | Mechanical 90-degree automatic taking and placing device |
| CN113493904A (en) * | 2020-03-19 | 2021-10-12 | 中国科学院沈阳科学仪器股份有限公司 | High-temperature high-vacuum annealing furnace |
| CN216413028U (en) * | 2021-09-29 | 2022-04-29 | 湖南红太阳光电科技有限公司 | Boat pushing device capable of adjusting warping angle |
| CN216917776U (en) * | 2021-12-06 | 2022-07-08 | 安徽利为自动化设备有限公司 | Cantilever type stacking manipulator |
| CN218568799U (en) * | 2022-08-29 | 2023-03-03 | 合肥致真精密设备有限公司 | Full-automatic rapid sample introduction device suitable for vacuum system |
-
2023
- 2023-06-16 CN CN202310713926.4A patent/CN116443568B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000195923A (en) * | 1998-12-28 | 2000-07-14 | Hitachi Ltd | Robot for carrying, carrier, carrier in vacuum chamber, and process treatment equipment |
| JP2009238962A (en) * | 2008-03-26 | 2009-10-15 | Japan Science & Technology Agency | Vacuum conveyance mechanism and multi-chamber system including the same |
| CN201537921U (en) * | 2009-09-17 | 2010-08-04 | 宝山钢铁股份有限公司 | Auxiliary mechanical arm for sample handover of vacuum equipment |
| CN204368298U (en) * | 2014-11-26 | 2015-06-03 | 孙玉林 | Automobile rod lift jack |
| CN207671187U (en) * | 2017-12-25 | 2018-07-31 | 合肥布勒自动化设备有限公司 | Lift and conveyer |
| CN108081245A (en) * | 2017-12-26 | 2018-05-29 | 欢乐飞（上海）机器人有限责任公司 | A kind of robot head structure of tongue strip expression |
| CN210071096U (en) * | 2019-06-14 | 2020-02-14 | 上海快仓智能科技有限公司 | Following lifting type weighing system of AGV car |
| CN113493904A (en) * | 2020-03-19 | 2021-10-12 | 中国科学院沈阳科学仪器股份有限公司 | High-temperature high-vacuum annealing furnace |
| CN112356060A (en) * | 2020-11-25 | 2021-02-12 | 宁波腾柏自动化科技有限公司 | Mechanical 90-degree automatic taking and placing device |
| CN216413028U (en) * | 2021-09-29 | 2022-04-29 | 湖南红太阳光电科技有限公司 | Boat pushing device capable of adjusting warping angle |
| CN216917776U (en) * | 2021-12-06 | 2022-07-08 | 安徽利为自动化设备有限公司 | Cantilever type stacking manipulator |
| CN218568799U (en) * | 2022-08-29 | 2023-03-03 | 合肥致真精密设备有限公司 | Full-automatic rapid sample introduction device suitable for vacuum system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116443568A (en) | 2023-07-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2917979Y (en) | Industrial mechanical arm | |
| CN109648188B (en) | Series-parallel heavy-load friction stir welding robot | |
| RU2663510C2 (en) | Robot made by using the parallelogram principle | |
| CN109406634B (en) | Probe laminating device for weld joint detection | |
| CN103707296A (en) | Four-shaft mechanical arm for grabbing sheet metal parts | |
| CN107520836B (en) | Large-rotation-plane three-degree-of-freedom motion platform | |
| CN102554914A (en) | Novel three-degrees-of-freedom under-actuated mechanism | |
| CN111331588A (en) | Multi-freedom industrial mechanical arm | |
| CN110980262A (en) | Dual-drive liftable swing moving manipulator | |
| CN116443568B (en) | Large-scale vacuum mechanical arm | |
| US5017083A (en) | Apparatus for loading and/or unloading industrial presses | |
| CN215281966U (en) | Multi-posture conversion truss clamping manipulator compatible with two engine cylinder bodies | |
| CN205892098U (en) | Multi -functional transfer anchor clamps | |
| CN220162460U (en) | Small-range high-precision mechanical arm structure based on gear rack motor control | |
| CN112809577B (en) | Positioning clamp and positioning method for transmission shafts of water pumps with different specifications and lengths | |
| CN112643649A (en) | Large-scale workpiece manipulator device | |
| CN109849050B (en) | Hydraulic mechanical arm double-freedom-degree joint based on double cross shaft matching | |
| CN209903207U (en) | Full-direct-acting hydraulic cylinder driving mechanical arm | |
| CN114012710A (en) | Two-translation picking robot containing parallelogram closed-loop sub-chain with variable rod length | |
| CN209240020U (en) | A kind of gantry-type mechanical arm | |
| CN109664277B (en) | Full-direct-acting hydraulic cylinder driving mechanical arm | |
| CN212123341U (en) | Pneumatic mechanical gripper of robot | |
| CN108274457B (en) | Four-degree-of-freedom robot operating arm | |
| CN111085991A (en) | Double-power-source three-dimensional accurate manipulator | |
| CN218988070U (en) | Snatch structure |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |