CN116436436A - 压电谐振器及其制作方法 - Google Patents
压电谐振器及其制作方法 Download PDFInfo
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- CN116436436A CN116436436A CN202310418741.0A CN202310418741A CN116436436A CN 116436436 A CN116436436 A CN 116436436A CN 202310418741 A CN202310418741 A CN 202310418741A CN 116436436 A CN116436436 A CN 116436436A
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- piezoelectric
- piezoelectric resonator
- bottom electrode
- resonator according
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- 238000000034 method Methods 0.000 title claims abstract description 62
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- 239000000463 material Substances 0.000 claims description 31
- 238000005530 etching Methods 0.000 claims description 28
- 238000000059 patterning Methods 0.000 claims description 21
- 238000005498 polishing Methods 0.000 claims description 12
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- 239000000126 substance Substances 0.000 claims description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 3
- 229920005591 polysilicon Polymers 0.000 claims description 3
- 238000010897 surface acoustic wave method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
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Images
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (28)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202310418741.0A CN116436436A (zh) | 2023-04-17 | 2023-04-17 | 压电谐振器及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN202310418741.0A CN116436436A (zh) | 2023-04-17 | 2023-04-17 | 压电谐振器及其制作方法 |
Publications (1)
Publication Number | Publication Date |
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CN116436436A true CN116436436A (zh) | 2023-07-14 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN202310418741.0A Pending CN116436436A (zh) | 2023-04-17 | 2023-04-17 | 压电谐振器及其制作方法 |
Country Status (1)
Country | Link |
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CN (1) | CN116436436A (zh) |
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2023
- 2023-04-17 CN CN202310418741.0A patent/CN116436436A/zh active Pending
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SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Wu Ke Inventor after: Yang Shuai Inventor after: Zhang Lirong Inventor after: Zhang Zhang Inventor after: Zhuang Zhiqiang Inventor after: Wang Chao Inventor before: Wu Ke Inventor before: Yang Shuai Inventor before: Zhang Lirong Inventor before: Zhang Zhang Inventor before: Zhuang Zhiqiang Inventor before: Wang Chao Inventor before: Zhao Junwu |
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CB03 | Change of inventor or designer information |