CN116428954A - Axial-radial displacement detection device and detection method - Google Patents
Axial-radial displacement detection device and detection method Download PDFInfo
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Abstract
The invention provides a detection device and a detection method for axial and radial displacement, wherein the detection device comprises a first inclined surface and a second inclined surface which are arranged on the axial surface of a detected element, and the inclination angles of the first inclined surface and the second inclined surface are different; at least 2 sensors are oppositely arranged on the radial circumference of the first inclined surface, and at least 2 sensors are oppositely arranged on the radial circumference of the second inclined surface; the sensor is used for outputting an electric signal based on the radial displacement of the inclined plane of the tested element. Compared with the prior art, the invention has the advantages that only the radial sensor is arranged, and the axial and radial offset condition of the detected element can be detected without arranging an axial sensor.
Description
Technical Field
The invention belongs to the field of generator rotor displacement detection, and particularly relates to a device and a method for detecting axial and radial displacement of a shaft.
Background
The magnetic suspension bearing is to suspend the rotor in the air by electromagnetic force, so that the rotor and the stator have no mechanical contact. The magnetic suspension rotor adopts a magnetic suspension bearing as a rotor component for supporting, and the rotor is suspended in the air by the magnetic suspension bearing under the action of electromagnetic force, so that the rotor and the stator are not in direct contact.
Under the prior art condition, the magnetic suspension axial displacement detection needs to additionally install an axial displacement detection disc which is perpendicular to the rotor on the rotor, and the sensor determines the axial displacement of the rotor by measuring the axial displacement of the detection disc. However, due to errors caused by assembly, the detection surface is not perpendicular to the rotor, so that measurement deviation and fluctuation exist; on the other hand, after the machine set works for a long time, the detection disc can relatively displace with the rotor due to thermal expansion, so that the rotor deviates from the center of the axial air gap, and even more, the shaft is directly ground; in addition, the additional detection disc tends to increase the complexity and assembly difficulty of the rotor structure, increase the axial length of the rotor, reduce the critical rotation speed of the rotor and influence the performance of the whole machine.
The prior art also provides a solution to calculate the axial displacement of the rotor by measuring the rotor's inclined and non-inclined surfaces with radial sensors, respectively, using only a pair of sensor probes to measure the air gap difference on one side of the rotor. The problem with the above-mentioned solution is that 1, influenced by the linearity of the sensors, once the two sensor measurements do not fall within the same linear region, a large axial displacement error will result; 2. the size of the unilateral air gap is not only influenced by axial displacement, but also related to whether the rotor is on the axial lead, once the rotor moves in a tapering way and deviates from the axial lead, the front and rear air gaps are changed even if the rotor does not axially displace, and the axial displacement measurement is deviated; 3. in the scheme, a step-shaped mutation point exists at one end of a slope, when a sensor is close to the position, the formation area of the electric vortex is suddenly changed (suddenly changed from the bottom of the slope to the top of the step as shown in fig. 1), the measured value is suddenly changed, the axial displacement measurement is invalid, and the serious phenomenon also causes control logic confusion, and the rotor is ground.
The prior art also provides another solution, similar to the above solution, with the difference that this patent arranges a plurality of sensor probes on a conical surface, and the axial displacement is represented by summing the average values, avoiding errors caused by rotor cone movements. However, the processing of multiple sensor measurements by this patent is simply summing and averaging, and does not eliminate the effect of environmental factors on the sensor. For example, under different temperature and electromagnetic environments, the measured value of the eddy current sensor can drift a little, and the drift cannot be eliminated only by summing to obtain the average value, so that the measurement accuracy is reduced; in addition, the sensors are arranged too much in this way, and the cost is increased.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a device and a method for detecting axial radial displacement, which can accurately detect the radial or axial displacement of a rotor.
The invention provides a shaft radial displacement detection device, wherein a first inclined surface and a second inclined surface are arranged on the axial surface of a detected element, and the inclination angles of the first inclined surface and the second inclined surface are different; at least 2 sensors are oppositely arranged on the radial circumference of the first inclined surface, and at least 2 sensors are oppositely arranged on the radial circumference of the second inclined surface; the sensor is used for outputting an electric signal based on the radial displacement of the inclined surface of the measured element.
Preferably, the axial surface of the measured element further comprises a third inclined surface and a fourth inclined surface, and the first inclined surface, the second inclined surface, the third inclined surface and the fourth inclined surface incline towards the inner side of the shaft; the first inclined surface is connected to the third inclined surface, and the second inclined surface is connected to the fourth inclined surface.
Preferably, the included angles of the first inclined plane, the fourth inclined plane and the axis are 45 degrees, and the included angles of the second inclined plane, the third inclined plane and the axis are 30 degrees.
Preferably, there are at least 8 sensors, at least 4 sensors are uniformly arranged on the radial circumference where the first inclined surface meets the third inclined surface, and at least 4 sensors are arranged on the radial circumference where the second inclined surface meets the fourth inclined surface.
Preferably, the axial displacement calculating unit is included for calculating the axial displacement of the measured element according to the electric signal, the inclination angle of the first inclined surface and the inclination angle of the second inclined surface.
Preferably, the device comprises a radial displacement calculation unit for calculating the radial displacement of the tested element according to the electric signal.
Preferably, the measured element is a rotor of a magnetic suspension bearing, and the sensor is an eddy current sensor.
The invention also provides a detection method for detecting the radial displacement of the detection shaft, which utilizes the detection device according to any one of the technical schemes to detect the axial or radial displacement of the detected element, and specifically comprises the steps of receiving an electric signal output by the sensor based on the radial displacement of the detected element, and calculating the axial or radial displacement of the detected element according to the electric signal, the first inclined plane inclination angle and the second inclined plane inclination angle.
Preferably, the method for detecting the radial displacement of the measured element includes obtaining displacement values measured by 2 sensors opposite to each other on the radial circumference of the first inclined surface or the second inclined surface, wherein the difference between the displacement values is the offset of the measured element in the radial direction.
Preferably, the axial displacement detection method of the detected element comprises the steps of obtaining displacement values detected by 2 sensors opposite to each other on the radial circumference of the first inclined surface, and calculating the sum of the 2 displacement values as WFx; obtaining displacement values measured by 2 sensors opposite to each other on the radial circumference of the second inclined surface, and calculating the sum of the 2 position values to be WRx; the difference between WFx and WRx is calculated to yield the bilateral air gap difference DeltaW.
Preferably, the axial surface of the measured element comprises a third inclined surface and a fourth inclined surface, and the first inclined surface, the second inclined surface, the third inclined surface and the fourth inclined surface are inclined towards the inner side of the shaft; one end of the first inclined surface facing the inner side of the shaft is connected with one end of the third inclined surface facing the inner side of the shaft, and one end of the second inclined surface facing the inner side of the shaft is connected with one end of the fourth inclined surface facing the inner side of the shaft;
the included angles of the first inclined surface, the second inclined surface and the axis are 45 degrees and the lengths are allThe included angles between the third inclined surface and the axis and the included angles between the fourth inclined surface and the axis are 30 degrees, and the lengths of the third inclined surface and the fourth inclined surface are 2H; according to the formula
Therefore, the invention utilizes the double inclined planes arranged on the measured element to realize the measurement of the axial displacement, and the angles of the inclined planes are different. When the detected element moves axially, the sensors on the radial circumferences of the two inclined planes fall on the inclined planes with different angles, so that the radial detected bilateral air gaps of the two inclined planes are different, the difference calculation is facilitated, the axial displacement detection sensitivity is improved, and the accuracy of the axial measurement value is prevented from being influenced by the space angle of the detected element; the axial displacement is detected by the radial sensor, and the differential calculation is more accurate.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It will be apparent to those skilled in the art from this disclosure that the drawings described below are merely exemplary and that other embodiments may be derived from the drawings provided without undue effort.
The structures, proportions, sizes, etc. shown in the present specification are shown only for the purposes of illustration and description, and are not intended to limit the scope of the invention, which is defined by the claims, so that any structural modifications, changes in proportions, or adjustments of sizes, which do not affect the efficacy or the achievement of the present invention, should fall within the ambit of the technical disclosure.
FIG. 1 is a block diagram of an axial sensing device of the prior art;
FIG. 2 is a schematic diagram of the structure of the tested device according to the present invention;
FIG. 3 is a schematic view of the axial-radial displacement detecting device of the present invention;
FIG. 4 is a schematic view of the structure of the present invention in the case of radial movement of the measured element;
FIG. 5 is a schematic view of the structure of the tested element of the present invention in the case of axial movement;
FIG. 6 is a schematic side view of a detecting device according to a preferred embodiment of the present invention;
FIG. 7 is an enlarged schematic view of the structure of the tested element of the present invention in the case of axial movement;
FIG. 8 is a flow chart of the detection method of the present invention;
in the figure: the device under test 1, the first inclined surface 21, the second inclined surface 22, the third inclined surface 23, the fourth inclined surface 24, and the sensor 3.
Detailed Description
Other advantages and advantages of the present invention will become apparent to those skilled in the art from the following detailed description, which, by way of illustration, is to be read in connection with certain specific embodiments, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used in this application and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise, the "plurality" generally includes at least two, but does not exclude the case of at least one.
It should be understood that the term "and/or" as used herein is merely one relationship describing the association of the associated objects, meaning that there may be three relationships, e.g., a and/or B, may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or system comprising such elements.
As shown in fig. 2 to 3, the embodiment of the present application provides a shaft radial displacement detection device, in which the axial surface of the element 1 to be detected is provided with a first inclined surface 21 and a second inclined surface 22, and the inclination angles of the first inclined surface 21 and the second inclined surface 22 are different; at least 2 sensors 3 are arranged oppositely on the radial circumference of the first inclined surface 21, at least 2 sensors 3 are arranged oppositely on the radial circumference of the second inclined surface 22, and the sensors 3 are used for outputting an electric signal based on the radial displacement of the inclined surface of the measured element.
In order to ensure stable and high-precision suspension of the rotor, the existing magnetic suspension bearing needs 5 degrees of freedom bearing coils to control the spatial displacement of the rotor, and a displacement sensor corresponding to the 5 degrees of freedom is used for detecting the axial displacement of the rotor. It is necessary to arrange not only the sensors in the radial circumference of the rotor but also an axial detection disk with a plurality of eddy current sensors in the axial direction to detect the axial displacement. According to the invention, the axial displacement detection disc and the axial sensor are removed, and the five-degree-of-freedom displacement measurement of the rotor is completed by using at least 4 radial sensors, so that the number of sensors is reduced, and the cost is reduced.
As shown in fig. 2 to 3, the axial surface of the measured element 1 in the embodiment of the present application preferably further includes a third inclined surface 23 and a fourth inclined surface 24, and each of the first inclined surface 21, the second inclined surface 22, the third inclined surface 23, and the fourth inclined surface 24 is inclined toward the axial inner side of the measured element 1; one end of the first inclined surface 21 inclined toward the inside of the shaft is connected to one end of the third inclined surface 23 inclined toward the inside of the shaft, and one end of the second inclined surface 22 inclined toward the inside of the shaft is connected to one end of the fourth inclined surface 23 inclined toward the inside of the shaft; namely, the first inclined surface 21 and the third inclined surface 23 form a first groove with gentle edge transition on the tested element 1, and the second inclined surface 22 and the fourth inclined surface 24 also form a second groove with gentle edge transition on the tested element 1; the shape and the structure of the first groove and the second groove are the same and symmetrical.
In contrast to the prior art shown in fig. 1, a step-like abrupt change point exists at one end of the slope, when the sensor 3 approaches to the position, the eddy current formation area is abrupt (from the bottom of the slope to the top of the step, as shown in fig. 1), the measured value will be abrupt, resulting in failure of axial displacement measurement, and serious cases also resulting in confusion of control logic, and shaft grinding of the rotor (the measured element). The groove is formed by two inclined surfaces, so that transition is more gentle, abrupt change can not occur, serious influence caused by abrupt change of measured values in the prior art is avoided, and meanwhile, the processing is more convenient.
As shown in fig. 2-3, preferably, the angles between the first inclined surface 21, the second inclined surface 22, the third inclined surface 23, and the fourth inclined surface 24 and the axis in the embodiment of the present application may be arbitrarily selected; in order to be more beneficial to manufacturing and processing, the preferred angle selection is that the included angles of the first inclined surface 21, the fourth inclined surface 24 and the axis are 45 degrees, and the included angles of the second inclined surface 22, the third inclined surface 23 and the axis are 30 degrees; the angle can be adjusted according to the requirement in actual production.
It is further preferable that at least 8 sensors 3 are provided, at least 4 sensors 3 are uniformly arranged on the radial circumference where the first inclined surface 21 meets the third inclined surface 23, and at least 4 sensors 3 are arranged on the radial circumference where the second inclined surface 22 meets the fourth inclined surface 24, for the accuracy and convenience of measurement and calculation results. The sensors are arranged on the radial circumference of the inclined plane junction, so that initial detection values of the 8 sensors are the same, and the measurement is more convenient when the radial or axial movement of the measured element is calculated.
Preferably, the device comprises an axial displacement calculating unit for calculating the axial displacement of the measured element according to the electric signal, the inclination angle of the first inclined surface 21 and the inclination angle of the second inclined surface 22; and/or a radial displacement calculation unit for calculating the radial displacement of the element to be measured according to the electric signal.
Preferably, the measured element 1 in the implementation of the present application is a rotor of a magnetic suspension bearing, and the sensor 3 is an eddy current sensor, which can statically and dynamically measure the distance between the measured metal conductor and the surface of the probe in a non-contact, high-linearity and high-resolution manner.
The embodiment of the application further describes a detection method for detecting axial or radial displacement of a detected element by using the detection device according to any of the above embodiments, specifically including receiving an electrical signal output by the sensor 3 based on the radial displacement of the detected element 1, and calculating the axial or radial displacement of the detected element 1 according to the electrical signal, the first inclination angle of the inclined plane, and the second inclination angle of the inclined plane.
The specific calculation and execution steps comprise the steps of acquiring the electric signals of the sensors 3, respectively executing the calculation of the radial displacement of the measured element and the axial displacement of the measured element, receiving the electric signals of the two sensors 3 opposite to the measured element 1 with the same degree of freedom when calculating the radial displacement, thus acquiring the sizes of the air gaps at the two opposite ends in the radial direction, calculating the difference value of the air gaps at the two ends, and outputting the radial displacement of the degree of freedom.
When the axial displacement is calculated, the size of the front radial bilateral air gap and the rear radial bilateral air gap is obtained through the electric signal of the sensor 3, and the difference value of the front radial bilateral air gap and the rear radial bilateral air gap is calculated, so that the radial displacement of the degree of freedom is output.
Taking 8 sensors 3 as an example, 4 sensors 3 are uniformly arranged on the radial circumference where the first inclined surface 21 and the third inclined surface 23 meet, and the 4 sensors are named as FX1, FX2, FY1 and FY2, wherein FX1 and FX2 are oppositely arranged sensors, and FY1 and FY2 are oppositely arranged sensors; on the radial circumference where the second inclined surface 22 meets the fourth inclined surface 24, 4 sensors 3 are arranged, and these 4 sensors are named RX1, RX2, RY1, RY2, where RX1 and RX2 are oppositely disposed sensors, and RY1 and RY2 are oppositely disposed sensors; see fig. 6 for a specific arrangement.
As shown in fig. 4, preferably, the radial displacement of the measured element 1 is obtained by differential output of two sensors, and the radial displacement detection method of the measured element 1 specifically includes obtaining displacement values measured by 2 sensors opposing each other on the radial circumference of the first inclined surface 21 or the second inclined surface 22, wherein the difference between the displacement values is the offset of the measured element in the radial direction. Taking the detection data values of the sensors FX1 and FX2 as an example, the radial displacement offset is determined, when the measured element 1 is located at the air gap center reference position, the values of the displacements FX1 and FX2 measured by the sensor FX1 and FX2 are equal, and at this time, the radial displacement offset Δfx=fx1-fx2=0, that is, the measured element 1 is not radially offset. When the measured element 1 is radially offset, the detection values of the two sensors change, at this time, the measurement value of the sensor FX1 is FX1', the measurement value of the sensor FX2 is FX2', FX1 'is no longer equal to FX2', and the offset Δfx=fx1 '-fx2' is not zero.
As shown in fig. 5-7, the axial displacement of the measured element 1 of the present application is preferably calculated by the difference in the front and rear bilateral air gaps, which can be added by the two opposite radial sensor measurements. The axial displacement detection method of the detected element comprises the steps of obtaining displacement values detected by 2 sensors which are opposite to each other on the radial circumference of a first inclined surface, and calculating the sum of the 2 displacement values as WFx; obtaining displacement values measured by 2 sensors opposite to each other on the radial circumference of the second inclined surface, and calculating the sum of the 2 position values to be WRx; the difference between WFx and WRx is calculated to yield the bilateral air gap difference DeltaW.
Preferably, in the case of arranging 8 sensors, the bilateral air gap wfx=fx1+fx2 of the measured element 1 corresponding to the sensor FX1 and the sensor FX2, where FX1 is the linear distance between the probe surface measured by the sensor FX1 and the measured element 1, and FX2 is the linear distance between the probe surface measured by the sensor FX2 and the measured element 1; four sets of bilateral air gaps WFx, WFy, WRx, WRy can be measured by a displacement sensor with four degrees of freedom in the radial direction. Specifically, WFy =fy1+fy2, WRx =rx1+rx2, wry =ry 1+ry2, where FY1 is a linear distance between the probe surface measured by the sensor FY1 and the measured element 1, and FY2 is a linear distance between the probe surface measured by the sensor FY2 and the measured element 1; RX1 is the linear distance between the probe surface measured by the sensor RX1 and the measured element 1, and RX2 is the linear distance between the probe surface measured by the sensor RX2 and the measured element 1; RY1 is the linear distance between the probe surface measured by the sensor RY1 and the measured element 1, and RY2 is the linear distance between the probe surface measured by the sensor RY2 and the measured element 1. The bilateral air gap difference aw may be expressed as follows:
or 2Δw= (W Fx +W Fy )-(W Rx +W Ry ) The x direction is selected as an example, and the rest directions are obtained in the same way.
As shown in fig. 5 and 7, when the measured element 1 is located at the initial position, all radial detection points fall at the bottom of the groove, and the front-rear radial bilateral air gaps are the largest and equal, i.e. the air gap difference Δw=wfx-WRx =0.
As shown in fig. 7, when the measured element 1 moves forward in the axial direction, the detection point of the front radial displacement sensor falls on a gentle slope of 30 °, and the bilateral air gap measured by the front radial sensor is gradually reduced, and the relation between the reduction and the axial displacement Z is reduced; as shown in fig. 8, when the two cone angles are 30 ° and 45 °, respectively, the two cone angles can be expressed by the following formulas:
wherein FX1 is a linear distance between the probe surface measured by the sensor FX1 and the measured element 1 when the measured element 1 is in an initial state; FX1' is the linear distance between the probe surface measured by the sensor FX1 and the measured element 1 after the measured element 1 moves axially; ΔW (delta W) Fx =2 (fx 1-fx1 '), fx1-fx1' is the distance indicated by L in fig. 7.
The detection point of the radial circumference sensor 3 at the rear falls on a steep slope of 45 degrees, and the change of the measured value of the radial bilateral air gap after the same is as that:
wherein RX1 is the linear distance between the probe surface measured by the sensor RX1 and the measured element 1 when the measured element 1 is in the initial state; RX1' is the linear distance between the probe surface measured by the sensor RX1 and the measured element 1 after the measured element 1 moves axially; ΔW (delta W) Rx =2(rx1-rx1’)。
When (when)When the axial maximum displacement of the measured element 1 is a fixed value, no angle exists in the front-back radial direction, so that the axial maximum bilateral gap is +.>When Z is greater than or equal to H, deltaW Rx =2h is a fixed value.
Because the change rates of the radial bilateral air gaps at the grooves on the surface of the tested element 1 are different, the air gap difference DeltaW between the radial bilateral air gaps is no longer zero, and when the tested element 1 moves forwards along the axial direction, the air gap difference DeltaW and the axial displacement Z have the following relation:
similarly, when the measured element 1 moves backwards along the axial direction, the detection point of the displacement sensor 3 near the front end of the measured element 1 falls on a steep slope of 45 degrees, the sensor 3 near the rear end of the measured element 1 falls on a gentle slope of 30 degrees, and at this time, the air gap difference Δw and the axial displacement Z (the backward movement is negative) have the following relation:
therefore, whether the element 1 to be measured is displaced axially forward or backward, the front-rear radial double-sided air gap difference Δw can be measured by the sensors arranged on the radial circumference, and the rotor axial displacement Z can be obtained by the value of Δw. In conclusion, the axial displacement of the rotor can be measured only by using the radial displacement sensor, the rotor does not need to be provided with an additional axial detection disk, the rotor structure is simplified, the axial length of the rotor is shortened, and the overall performance is improved.
Exemplary embodiments of the present disclosure are specifically illustrated and described above. It is to be understood that this disclosure is not limited to the particular arrangements, instrumentalities and methods of implementation described herein; on the contrary, the disclosure is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.
Claims (10)
1. An axial-radial displacement detection device, characterized in that: the axial surface of the measured element is provided with a first inclined surface and a second inclined surface, and the inclination angles of the first inclined surface and the second inclined surface are different; at least 2 sensors are oppositely arranged on the radial circumference of the first inclined surface, and at least 2 sensors are oppositely arranged on the radial circumference of the second inclined surface; the sensor is used for outputting an electric signal based on the radial displacement of the inclined plane of the tested element.
2. The detection apparatus according to claim 1, wherein: the axial surface of the tested element further comprises a third inclined surface and a fourth inclined surface, and the first inclined surface, the second inclined surface, the third inclined surface and the fourth inclined surface incline to the inner side of the shaft; the first inclined surface is connected with the third inclined surface, and the second inclined surface is connected with the fourth inclined surface.
3. The detection apparatus according to claim 2, wherein: the included angles of the first inclined surface, the fourth inclined surface and the axis are equal, the range is between 0 and 90 degrees, and the included angles of the second inclined surface, the third inclined surface and the axis are equal, and the range is between 0 and 90 degrees.
4. A test device according to claim 3, wherein: the included angle between the first inclined surface and the axis is 30 degrees, and the included angle between the second inclined surface and the axis is 45 degrees.
5. The detection apparatus according to any one of claims 2 to 4, wherein: at least 8 sensors are arranged uniformly on the radial circumference where the first inclined surface and the third inclined surface meet, at least 4 sensors are arranged on the radial circumference where the second inclined surface and the fourth inclined surface meet.
6. The detection apparatus according to claim 1, wherein: the device comprises a displacement calculation unit, a first inclination angle detection unit and a second inclination angle detection unit, wherein the displacement calculation unit is used for calculating the axial displacement of the tested element according to the electric signal, the inclination angle of the first inclined surface and the inclination angle of the second inclined surface; and/or for calculating the radial displacement of the element under test from the electrical signal.
7. A method for detecting axial radial displacement is characterized in that: the detection device according to any one of claims 1-6, wherein the detection device is used for detecting the axial or radial displacement of the detected element, and specifically comprises receiving an electric signal output by a sensor based on the radial displacement of the detected element, and calculating the axial or radial displacement of the detected element according to the electric signal, the first inclined plane inclination angle and the second inclined plane inclination angle.
8. The method of detecting according to claim 7, wherein: the radial displacement detection method of the detected element comprises the steps of obtaining displacement values detected by 2 sensors which are opposite to each other on the radial circumference of the first inclined surface or the second inclined surface, wherein the difference of the displacement values is the offset of the detected element in the radial direction.
9. The method of detecting according to claim 7, wherein: the axial displacement detection method of the detected element comprises the steps of obtaining displacement values detected by 2 sensors which are opposite to each other on the radial circumference of the first inclined surface, and calculating the sum of the 2 displacement values as WFx; obtaining displacement values measured by 2 sensors opposite to each other on the radial circumference of the second inclined surface, and calculating the sum of the 2 position values as WRx; the difference between WFx and WRx is calculated to yield the bilateral air gap difference DeltaW.
10. The method of claim 9, wherein: the axial surface of the measured element comprises a third inclined surface and a fourth inclined surface, and the first inclined surface, the second inclined surface, the third inclined surface and the fourth inclined surface are inclined towards the inner side of the shaft; the first inclined surface is connected with the third inclined surface, and the second inclined surface is connected with the fourth inclined surface;
the included angles of the first inclined surface, the second inclined surface and the axis are 45 degrees and the lengths are allThe included angles between the third inclined surface and the axis and the included angles between the fourth inclined surface and the axis are 30 degrees, and the lengths of the third inclined surface and the fourth inclined surface are 2H; according to the formula
Or (b)
The axial displacement Z is calculated.
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