CN116413293A - Arc detector mechanism and X-ray diffraction-fluorescence spectrometer - Google Patents

Arc detector mechanism and X-ray diffraction-fluorescence spectrometer Download PDF

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CN116413293A
CN116413293A CN202310527370.XA CN202310527370A CN116413293A CN 116413293 A CN116413293 A CN 116413293A CN 202310527370 A CN202310527370 A CN 202310527370A CN 116413293 A CN116413293 A CN 116413293A
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detector
arc
ray diffraction
arc plate
fluorescence spectrometer
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唐浩奇
陈荣昌
杨君
张承功
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Shenzhen Integrated Particle Facility Research Institute
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Shenzhen Integrated Particle Facility Research Institute
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array

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Abstract

The application discloses an arc detector mechanism and an X-ray diffraction-fluorescence spectrometer, and relates to the technical field of spectrum analysis. The arc detector mechanism comprises an arc plate and a detector array; the detector array is arranged on the concave surface of the circular arc plate; the detector array comprises a plurality of detector sub-arrays which are sequentially arranged around the axis of the arc plate, and each detector sub-array comprises a plurality of single-point silicon drift detector units. The detection mechanism provided by the application can reduce the setting quantity of the detectors and reduce the input cost of the arc-shaped detector mechanism.

Description

Arc detector mechanism and X-ray diffraction-fluorescence spectrometer
Technical Field
The application relates to the technical field of spectrum analysis, in particular to an arc detector mechanism and an X-ray diffraction-fluorescence spectrometer.
Background
In the process of testing and analyzing the microstructure of a sample, a spectrum instrument is generally required to obtain spectrum information of the sample, and the microstructure of the sample is obtained through analysis of the spectrum information.
However, in the detection device used in the existing spectrum apparatus, the detectors are generally distributed in a plane, and do not have energy resolution capability, and meanwhile, the number of the detectors is relatively large, so that the cost of the detection device is increased.
Disclosure of Invention
The application provides an arc detector mechanism and X-ray diffraction-fluorescence spectrometer to possess energy resolution ability, reduce the use quantity of single-point silicon drift detector unit simultaneously, reduce the cost of arc detector mechanism.
The application provides an arc detector mechanism, which comprises an arc plate and a detector array;
the detector array is arranged on the concave surface of the circular arc plate;
the detector array comprises a plurality of detector sub-arrays which are sequentially arranged around the axis of the arc plate, and each detector sub-array comprises a plurality of single-point silicon drift detector units.
In some possible embodiments, the plurality of single-point silicon drift detector units in the same detector sub-array are linearly distributed along the axial direction of the circular arc plate.
In some possible embodiments, the arc detector mechanism further comprises a driving member and a connecting arm, one end of the connecting arm is connected to an output shaft of the driving member, and the other end of the connecting arm is connected to the arc plate;
the driving piece is used for driving the connecting arm to move so as to drive the arc plate to rotate around the axis of the arc plate.
In addition, the application also provides an X-ray diffraction-fluorescence spectrometer, which comprises the arc detector mechanism provided in each embodiment.
In some possible embodiments, the X-ray diffraction-fluorescence spectrometer further comprises a light source mechanism and a carrier mechanism;
the light source mechanism is used for providing micron-sized white light X rays;
the object carrying mechanism is positioned at the emergent end of the light source mechanism, and is used for carrying a test sample and is configured to enable the test sample to be positioned on the optical axis of the light source mechanism;
the concave surface of the arc plate faces the carrying mechanism.
In some possible embodiments, the arc detector mechanism includes N single point silicon drift detector cells,
Figure BDA0004223770800000021
wherein r is the radius of the arc plate, θ is the maximum diffraction angle of the micron-sized white light X-ray when the test sample diffracts, and d is the diameter of the single-point silicon drift detector unit.
In some possible embodiments, the light source mechanism includes an X-ray source and a focusing mirror disposed in sequence along the optical axis, the focusing mirror disposed proximate the cargo mechanism;
the X-ray source is used for providing white X-rays, and the focusing mirror is used for focusing the white X-rays in the vertical direction and the horizontal direction.
In some possible embodiments, a gate valve is connected to an end of the focusing lens away from the carrying mechanism, and the gate valve is used for controlling on-off of the end of the focusing lens away from the carrying mechanism.
In some possible embodiments, the loading mechanism includes a quadric diffractometer, a sliding table module and a bearing plate, the sliding table module is installed on the quadric diffractometer, the bearing plate is installed on the sliding table module, and the bearing plate is used for bearing the test sample.
In some possible embodiments, the sliding table module comprises a first sliding table and a second sliding table, the second sliding table is mounted on a sliding block in the first sliding table, and the bearing plate is mounted on a sliding block in the second sliding table;
the sliding direction of the sliding block in the first sliding table is perpendicular to the sliding direction of the sliding block in the second sliding table.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present application and therefore should not be considered limiting the scope, and that other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 illustrates a schematic diagram of sizing a conventional planar distributed detector array during use;
FIG. 2 shows a schematic structural diagram of an X-ray diffraction-fluorescence spectrometer in some embodiments;
FIG. 3 illustrates a schematic diagram of an arcuate detector mechanism in some embodiments;
FIG. 4 illustrates a schematic diagram of the structure of the load mechanism in some embodiments;
FIG. 5 shows a schematic illustration of sizing of an X-ray diffraction-fluorescence spectrometer of the present application during use;
fig. 6 is a graph showing the number of single point silicon drift detector units required for the arc detector mechanism of the present application versus the number of detector array units in a conventional planar distribution at a maximum diffraction angle of 40 deg. of the present application.
Description of main reference numerals:
100-arc detector mechanism; 110-arc plate; 111-a first side; 112-a second side; 120-a detector array; 121-a detector sub-array; 1211-single point silicon drift detector unit; 131-a bracket; 132-rotating shaft; 133-a connecting arm;
200-a light source mechanism; a 210-X-ray source; 220-a focusing mirror; 231-gate valve; 232-receiving a pipe;
300-carrying mechanism; 310-four-circle diffractometer; 320-slipway module; 321-a first sliding table; 322-a second slipway; 330-a carrier plate;
400-test sample.
Detailed Description
Embodiments of the present application are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only for the purpose of explaining the present application and are not to be construed as limiting the present application.
In the description of the present application, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," "circumferential," etc. indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be configured and operated in a particular orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present application, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In this application, unless specifically stated and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In this application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
As shown in fig. 2 and 5, a cartesian coordinate system is established, defining that the length direction of the X-ray diffraction-fluorescence spectrometer is parallel to the direction shown by the X-axis, the width direction of the X-ray diffraction-fluorescence spectrometer is parallel to the direction shown by the y-axis, and the height direction of the X-ray diffraction-fluorescence spectrometer is parallel to the direction shown by the z-axis. It is to be understood that the above definitions are merely for ease of understanding the relative positional relationship of the various parts in the X-ray diffraction-fluorescence spectrometer and should not be construed as limiting the present application.
In an embodiment, an X-ray diffraction-fluorescence spectrometer is provided for obtaining spectral information of a test sample 400, thereby obtaining a microstructure distribution of the test sample 400, including but not limited to a grain orientation distribution, a stress distribution, a grain boundary distribution, etc. of the test sample 400.
As shown in fig. 2, the X-ray diffraction-fluorescence spectrometer may include a light source mechanism 200, a carrier mechanism 300, and an arc detector mechanism 100.
Wherein the light source mechanism 200 may be used to provide micron-sized white light X-rays. The carrying mechanism 300 may be disposed at an exit end of the light source mechanism 200, and the carrying mechanism 300 may be used for carrying the test sample 400 and positioning the test sample 400 on an optical axis of the light source mechanism 200. Thus, the micron-sized white light X-rays generated by the light source mechanism 200 can be smoothly projected to the test sample 400 to generate diffraction. In some embodiments, micron-sized white light X-rays may undergo bragg diffraction on the test sample 400.
Referring again to fig. 3, the arcuate detector mechanism 100 may include an arcuate plate 110 and a detector array 120. The circular arc plate 110 may be used as a mounting carrier for the detector array 120, and the detector array 120 may be mounted on a concave surface of the circular arc plate 110. In addition, the concave surface of the arc plate 110 may face the loading mechanism 300. Accordingly, the detector array 120 may also be oriented toward the carrier mechanism 300 to acquire diffracted light of the test sample 400.
In some embodiments, detector array 120 may include a plurality of detector sub-arrays 121, and the plurality of detector sub-arrays 121 may be sequentially disposed about the axis of circular arc plate 110. It is understood that the axis of the circular arc plate 110 may refer to the axis of the cylindrical surface on which the circular arc plate 110 is located. In addition, each detector sub-array 121 may include a plurality of single-point silicon drift detector units 1211, and each single-point silicon drift detector unit 1211 may be a pixel.
In use, the light source mechanism 200 can provide micron-sized white light X-rays to the carrier mechanism 300 and project the micron-sized white light X-rays onto the test sample 400 on the carrier mechanism 300. Bragg diffraction may occur when micron-sized white light X-rays are projected onto the test sample 400 and corresponding diffracted light may be generated, and the arc detector mechanism 100 may be used to obtain the diffracted light generated by the test sample 400 to form spectral information of the test sample. In an embodiment, the arc detector mechanism 100 provided by the present application may have energy resolving power, and the obtained spectrum information can be clearly distinguished into the diffraction signal and the fluorescence signal of the test sample 400 through the arc detector mechanism 100 distributed in an arc manner, so as to obtain the diffraction spectrum and the fluorescence spectrum of the test sample 400, and meanwhile, the sensitivity and the signal-to-noise ratio of the diffraction signal and the fluorescence signal can be improved, so that the time required for obtaining complete data with a better signal-to-noise ratio is greatly shortened.
As shown in FIG. 1, prior conventional probe mechanism arrays are typically laid out along a two-dimensional plane. The detector array 120 in this embodiment is in an arc distribution, which can obviously reduce the number of single-point silicon drift detector units 1211 in the arc detector mechanism 100, further, can reduce the input cost of the arc detector mechanism 100, and can also reduce the cost of the X-ray diffraction-fluorescence spectrometer, thereby realizing the effect of reducing cost.
As shown in fig. 6, taking the maximum diffraction angle of 40 ° as an example, the arc detector mechanism 100 provided in the present embodiment can significantly reduce the number of single-point silicon drift detector units 1211 compared with the conventional detector array, so as to reduce the input cost of the arc detector mechanism 100.
Further, as shown in fig. 2, in some embodiments, the light source mechanism 200 may include an X-ray source 210 and a focusing mirror 220. The X-ray source 210 and the focusing mirror 220 may be disposed sequentially along the optical axis. The focusing lens 220 may be disposed near the carrying mechanism 300, and an output end of the focusing lens 220 may be used as an emitting end of the light source mechanism 200. The carrier mechanism 300 may be disposed on a side of the focusing mirror 220 remote from the X-ray source 210. That is, the white light X-rays of micron order generated by the light source mechanism 200 can be emitted from the end of the focusing mirror 220 away from the X-ray source 210 and projected onto the test sample 400 on the carrying mechanism 300.
In some embodiments, the X-ray source 210 may be a synchrotron radiation source, which can change the motion direction under the action of a dipolar ferromagnetic field by using an electron beam, and simultaneously emit synchrotron radiation light to obtain white light X-rays.
The focusing mirror 220 is used for performing a focusing process on the white light X-rays in a horizontal direction and a vertical direction to obtain micron-sized white light X-rays. The white X-rays pass through the focusing mirror 220 to form micron-sized white X-rays.
As shown in fig. 2, a receiving pipe 232 is further connected to the end of the focusing lens 220 away from the carrying mechanism 300, and may be used to connect to the X-ray source 210 to receive the white light X-rays emitted by the X-ray source 210.
In addition, a gate valve 231 may be installed at an end of the receiving duct 232 remote from the focusing mirror 220, and may be used to control the opening and closing of the receiving duct 232. In some embodiments, the flapper valve 231 may be a solenoid valve with a standard voltage of 24VDC. It will be appreciated that the gate valve 231 may be automatically closed when the gate valve 231 is de-energized.
In operation, the interior of the focusing lens 220 is a vacuum environment. When the X-ray diffraction-fluorescence spectrometer fails, the shutter valve 231 may disconnect the focusing mirror 220 from the outside to prevent the vacuum environment in the focusing mirror 220 from being broken.
As shown in fig. 2 and 4, the carrying mechanism 300 includes a quadric diffractometer 310, a sliding table module 320, and a carrying plate 330. The sliding table module 320 may be installed on the quadric diffractometer 310, and the carrier plate 330 may be installed on the sliding table module 320. Among other things, the tetracircle diffractometer 310 can be used to achieve high precision positioning of the test sample 400. In addition, the loading plate 330 may be used to load the test sample 400 to be tested.
The slipway module 320 may include a first slipway 321 and a second slipway 322. The second sliding table 322 may be mounted on a sliding block of the first sliding table 321. The carrier 330 may be mounted on the slider of the second sliding table 322. In an embodiment, the sliding direction of the sliding block in the first sliding table 321 may be perpendicular to the sliding direction of the sliding block in the second sliding table 322. In some embodiments, the sliding direction of the sliding block in the first sliding table 321 may be parallel to the length direction of the X-ray diffraction-fluorescence spectrometer, and the sliding direction of the sliding block in the second sliding table 322 may be parallel to the width direction of the X-ray diffraction-fluorescence spectrometer.
In an embodiment, the sliding table module 320 can drive the carrying plate 330 to move on a two-dimensional plane, and further drive the test sample 400 to move on the two-dimensional plane, so that the arc detector mechanism 100 can accurately scan each portion of the test sample 400 on the two-dimensional plane to obtain microstructure information within the scanning range of the test sample 400.
As shown in FIG. 3, in some embodiments, the arc detector mechanism 100 further includes a drive member (not shown) and a connecting arm 133. One end of the connecting arm 133 may be in driving connection with the driving member. The circular arc plate 110 may be connected to an end of the connecting arm 133 remote from the driving member. In operation, the driving member may be used to drive the connecting arm 133 to rotate to drive the arc plate 110 to rotate about its own axis, so as to adjust the scanning angle of the detector array 120.
In an embodiment, the arc detector mechanism 100 further includes a bracket 131 and a rotational shaft 132. The bracket 131 can be fixedly installed on a working table surface such as the ground or a table surface. The bracket 131 may be located at one side of the loading mechanism 300 in the width direction of the X-ray diffraction-fluorescence spectrometer. In some embodiments, the drive member may be mounted to a side of the bracket 131 remote from the load mechanism 300.
Of course, in other embodiments, the driving member may be disposed inside the bracket 131.
The rotation shaft 132 is rotatably mounted at an end of the bracket 131 away from the work table, i.e., the rotation shaft 132 is rotatable relative to the bracket 131. In some embodiments, the axis of rotation 132 may be parallel to the width direction of the X-ray diffraction-fluorescence spectrometer. One end of the connecting arm 133 may be fixedly connected to the rotation shaft 132, and one end of the connecting arm 133 remote from the rotation shaft 132 may be fixedly connected to the circular arc plate 110.
When the rotating shaft 132 rotates relative to the bracket 131, the arc plate 110 can be driven to rotate synchronously. It is understood that the axis of rotation of the circular arc plate 110 may be coaxial with the axis of the rotating shaft 132.
In some embodiments, the drive member may be a motor. The rotating shaft 132 may be coaxially disposed with the output shaft of the driving member, and one end of the rotating shaft 132 may be in driving connection with the output shaft of the driving member through a coupling. Thus, the rotation shaft 132 can be driven to rotate by the driving member.
In other embodiments, the rotation shaft 132 may be offset from the output shaft of the driving member, and correspondingly, the rotation shaft 132 and the output shaft of the driving member may be further in transmission connection through a transmission structure such as a gearbox.
As shown in fig. 2, the circular arc plate 110 may include opposite first and second sides 111 and 112, and the first and second sides 111 and 112 are parallel to an axial direction of the circular arc plate 110. When the concave surface of the arc plate 110 faces the carrier plate 330 and substantially faces the exit end of the light source mechanism 200, the second side 112 may be located on the side of the first side 111 near the light source mechanism 200. During testing, the normal line of the test sample 400 when diffracting can be located between the micron-sized white light X-ray and the first side 111, so as to ensure that the light received by the arc detector mechanism 100 is all derived from the surface of the test sample 400.
As shown in fig. 3, in some embodiments, a plurality of single-point silicon drift detector cells 1211 in the same detector sub-array 121 may be linearly distributed along the axial direction of the circular arc plate 110, and each detector sub-array 121 may be parallel to each other. Thus, the detector sub-array 121 can be modularized, packaging and wiring are facilitated, the processing difficulty of the arc detector mechanism 100 is reduced, and the input cost of the arc detector mechanism 100 can be further reduced. In an embodiment, the single point silicon drift detector unit 1211 may have a strong energy resolving power, which greatly increases the light flux received by the arc detector mechanism 100, thereby increasing the diffraction efficiency by several orders of magnitude compared to the conventional diffraction experiment device.
Of course, in other embodiments, multiple single-point silicon drift detector cells 1211 in the same detector sub-array 121 also exhibit a non-linear distribution, such as along an arc, irregular curve, irregular polyline, or the like.
Referring again to fig. 5, in some embodiments, the arc detector mechanism 100 may include N single point silicon drift detector cells 1211,
Figure BDA0004223770800000101
where r may represent the radius of the circular arc 110, θ may represent the maximum diffraction angle of the micron-sized white light X-rays when the test sample 400 is diffracted, and d may represent the diameter of the single point silicon drift detector unit 1211.
As shown in fig. 1, in the prior art,
Figure BDA0004223770800000102
where M represents the number of single point silicon drift detector units 1211 required for a conventional detection mechanism. D represents the distance between the test sample 400 and the conventional detection mechanism, θ may represent the maximum diffraction angle of the micron-sized white light X-rays when the test sample 400 diffracts, and D may represent the diameter of the single point silicon drift detector unit 1211.
It will be appreciated that when the distance D between the test specimen 400 and the conventional detection mechanism is close to the radius r of the circular arc plate 110 in this embodiment, the number of single point silicon drift detector units 1211 required by the conventional detection mechanism is significantly greater than the number of single point silicon drift detector units 1211 required by the present arc detector mechanism 100. Accordingly, when the arc detector mechanism 100 provided in the present application and the conventional detection mechanism achieve the same test, the arc detector mechanism 100 provided in the present application can obviously reduce the number of the single-point silicon drift detector units 1211, and reduce the input cost of the arc detector mechanism 100.
In addition, in this embodiment, the diffraction light of the test sample 400 is collected by the three-dimensional distributed detector array 120, so that the diffraction signal and the fluorescence signal of the test sample 400 can be clearly distinguished, the diffraction spectrum and the fluorescence spectrum of the test sample 400 can be obtained, and meanwhile, the sensitivity and the signal-to-noise ratio of the diffraction signal and the fluorescence signal can be improved, so that the time required for obtaining complete data with a better signal-to-noise ratio is greatly shortened.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Although embodiments of the present application have been shown and described above, it will be understood that the above embodiments are illustrative and not to be construed as limiting the application, and that variations, modifications, alternatives, and variations may be made to the above embodiments by one of ordinary skill in the art within the scope of the application.

Claims (10)

1. An arc detector mechanism is characterized by comprising an arc plate and a detector array;
the detector array is arranged on the concave surface of the circular arc plate;
the detector array comprises a plurality of detector sub-arrays which are sequentially arranged around the axis of the arc plate, and each detector sub-array comprises a plurality of single-point silicon drift detector units.
2. The arc detector mechanism of claim 1 wherein the plurality of single point silicon drift detector cells in the same detector sub-array are linearly distributed along the axis of the arc plate.
3. The arc detector mechanism according to claim 1 or 2, further comprising a driving member and a connecting arm, wherein one end of the connecting arm is connected to an output shaft of the driving member, and the other end of the connecting arm is connected to the arc plate;
the driving piece is used for driving the connecting arm to move so as to drive the arc plate to rotate around the axis of the arc plate.
4. An X-ray diffraction-fluorescence spectrometer comprising the arc detector mechanism of any of claims 1 to 3.
5. The X-ray diffraction-fluorescence spectrometer of claim 4, further comprising a light source mechanism and a carrier mechanism;
the light source mechanism is used for providing micron-sized white light X rays;
the object carrying mechanism is positioned at the emergent end of the light source mechanism, and is used for carrying a test sample and is configured to enable the test sample to be positioned on the optical axis of the light source mechanism;
the concave surface of the arc plate faces the carrying mechanism.
6. The X-ray diffraction-fluorescence spectrometer of claim 5, wherein the arc detector mechanism comprises N single point silicon drift detector units,
Figure FDA0004223770790000011
wherein r is the radius of the arc plate, θ is the maximum diffraction angle of the micron-sized white light X-ray when the test sample diffracts, and d is the diameter of the single-point silicon drift detector unit.
7. The X-ray diffraction-fluorescence spectrometer of claim 5 or 6, wherein the light source mechanism comprises an X-ray source and a focusing mirror disposed in sequence along the optical axis, the focusing mirror disposed proximate the carrier mechanism;
the X-ray source is used for providing white X-rays, and the focusing mirror is used for focusing the white X-rays in the vertical direction and the horizontal direction.
8. The X-ray diffraction-fluorescence spectrometer of claim 7, wherein the focusing lens is connected with a gate valve at an end far away from the carrying mechanism, and the gate valve is used for controlling on-off of the focusing lens at an end far away from the carrying mechanism.
9. The X-ray diffraction-fluorescence spectrometer of claim 5, wherein the loading mechanism comprises a quadric diffractometer, a slipway module and a carrier plate, the slipway module is mounted on the quadric diffractometer, the carrier plate is mounted on the slipway module, and the carrier plate is used for carrying the test sample.
10. The X-ray diffraction-fluorescence spectrometer of claim 9, wherein the slip module comprises a first slip and a second slip, the second slip mounted on a slide in the first slip, the carrier plate mounted on a slide in the second slip;
the sliding direction of the sliding block in the first sliding table is perpendicular to the sliding direction of the sliding block in the second sliding table.
CN202310527370.XA 2023-05-09 2023-05-09 Arc detector mechanism and X-ray diffraction-fluorescence spectrometer Pending CN116413293A (en)

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