CN116412971A - Microwave generator - Google Patents

Abstract

The invention provides a microwave generator, which comprises a magnetron, a detection component and a water cooling pipeline, wherein the detection component is connected with the magnetron in series to form a control circuit; one end of the water cooling pipeline is connected with the magnetron, and the other end of the water cooling pipeline is connected with an external water supply connector; the detection component is used for detecting the water leakage state of the water cooling pipeline and switching on or switching off the control circuit according to the water leakage state. According to the technical scheme, the detection component is arranged at the bottom of the water-cooling pipeline to detect the water leakage state of the water-cooling pipeline, and the on and off of the whole control circuit are automatically controlled according to the water leakage state, so that the purposes of water leakage detection and automatic turn-off are realized, and safety accidents caused by water leakage are avoided.

Description

Microwave generator

Technical Field

The invention relates to the technical field of microwaves, in particular to a microwave generator.

Background

The two core components for generating the microwaves are a direct-current high-voltage power supply (namely a microwave source) and a microwave generator (namely a microwave head), and the direct-current high-voltage power supply provides negative voltage of more than 7KV for the microwave generator so as to excite the microwave generator to generate the microwaves. The microwave application scene is very extensive, in the low-power microwave equipment, such as microwave heating and microwave cleaning, direct current high voltage power supply and microwave generator often are integrated design as a part, are favorable to saving equipment space. However, in high-power semiconductor devices, such as MPCVD, the dc high-voltage power supply and the microwave generator are respectively installed in the factory buildings on different floors as two independent components, which is beneficial to reducing the influence of high-voltage power on the devices, thereby increasing the stability of the operation of the devices.

The high-power microwave generator mainly comprises four parts of a magnetron, an excitation cavity, a control board and a heat dissipation device, wherein the magnetron is arranged on the excitation cavity to form a microwave waveguide assembly, and the heat dissipation device mainly dissipates heat of the microwave waveguide assembly.

However, when water cooling is employed, there is a lack of water leakage detection and microwave leakage prevention means. The magnetron water pipe joint is connected with the shell water pipe joint through a water pipe, after the equipment runs for a long time and at high power, the joint is at risk of water leakage caused by high-temperature aging of the water pipe, and if water leakage detection cannot be timely carried out, the internal circuit is short-circuited to cause serious accidents.

Disclosure of Invention

The invention mainly aims to provide a microwave generator, and aims to solve the technical problems that the microwave generator in the prior art lacks water leakage detection and cannot realize automatic turn-off and turn-off of water leakage.

To achieve the above object, the present invention provides a microwave generator comprising:

a magnetron;

the detection assembly is connected with the magnetron in series to form a control circuit;

one end of the water cooling pipeline is connected with the magnetron, and the other end of the water cooling pipeline is connected with an external water supply connector;

the detection component is used for detecting the water leakage state of the water cooling pipeline and switching on or switching off the control circuit according to the water leakage state.

Optionally, the detection component comprises:

the output end of the relay is connected with the magnetron in series to form the control circuit;

the electrode plate is arranged below the water cooling pipeline, and the input end of the relay is electrically connected with the anode of the electrode plate and the cathode of the electrode plate respectively;

the electrode plate is used for detecting the water leakage state of the water cooling pipeline and controlling the relay to be switched on or off the control circuit according to the water leakage state.

Optionally, the microwave generator further comprises an excitation cavity, wherein one end of the excitation cavity is communicated with the magnetron, and the excitation cavity is positioned below the water cooling pipeline;

the electrode plate is arranged above the excitation cavity and below the water cooling pipeline.

Optionally, the microwave generator further includes a displacement sensor, the displacement sensor is disposed on the excitation cavity, and the displacement sensor is connected in series to the control circuit, and the displacement sensor is configured to detect a connection state of the excitation cavity, and turn on or off the control circuit according to the connection state.

Optionally, the number of the electrode plates is a plurality, and the electrode plates are arranged on the excitation cavity at intervals.

Optionally, a spacer is arranged between the electrode plate and the excitation cavity, the thickness of the spacer is 1 cm-2 cm, and the spacer is made of epoxy resin.

Optionally, the microwave generator further comprises:

the upper shell and the lower shell are covered to form a containing cavity, and the magnetron, the detection component and the water cooling pipeline are arranged in the containing cavity;

the micro switch is arranged at the connection position of the upper shell and the lower shell, is connected in series on the control circuit, and is used for detecting the connection state of the upper shell and the lower shell and switching on or off the control circuit according to the connection state.

Optionally, the number of the micro-switches is multiple, and the plurality of micro-switches are arranged at the connection position of the upper shell and the lower shell at intervals.

Optionally, the microwave generator further comprises a fan assembly, wherein the fan assembly is arranged on the upper shell and/or the lower shell; the fan assembly is communicated with the magnetron to blow air outside the accommodating cavity into the magnetron.

Optionally, the fan assembly includes:

a first fan arranged on the upper shell or the lower shell,

the second fan is arranged above the first fan, and the air inlet end of the second fan faces the first fan;

one end of the air guide pipe is communicated with the air outlet end of the second fan, and the other end of the air guide pipe is communicated with the magnetron.

According to the technical scheme, the detection component is arranged at the bottom of the water-cooling pipeline to detect the water leakage state of the water-cooling pipeline, and the on and off of the whole control circuit are automatically controlled according to the water leakage state, so that the purposes of water leakage detection and automatic turn-off are realized, and safety accidents caused by water leakage are avoided.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic circuit diagram of a microwave generator according to a first embodiment of the invention;

fig. 2 is a schematic circuit diagram of a microwave generator according to a second embodiment of the invention;

FIG. 3 is a schematic circuit diagram of a microwave generator according to a third embodiment of the invention;

FIG. 4 is a schematic view of the structure of the upper casing of the microwave generator of the present invention;

fig. 5 is a schematic view of a first configuration of the microwave generator of the present invention.

Reference numerals illustrate:

reference numerals	Name of the name	Reference numerals	Name of the name
				10	Magnetron with a magnetron body having a plurality of magnetron electrodes	20	Detection assembly and detection assembly
21	Electrode plate	22	Relay device
				30	Excitation cavity	40	Displacement sensor
50	Micro-switch	61	Upper shell
				62	Lower shell	70	Fan assembly
71	First fan	72	Second fan
				73	Air guide pipe	80	Water-cooling pipeline

The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.

Furthermore, descriptions such as those referred to as "first," "second," and the like, are provided for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implying an order of magnitude of the indicated technical features in the present disclosure. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical solutions of the embodiments of the present invention may be combined with each other, but it is necessary to be based on the fact that those skilled in the art can implement the technical solutions, and when the technical solutions are contradictory or cannot be implemented, the combination of the technical solutions should be considered as not existing, and not falling within the scope of protection claimed by the present invention.

The invention provides a microwave generator, referring to fig. 1-5, the microwave generator comprises a magnetron 10, a detection component 20 and a water cooling pipeline 80, wherein the detection component 20 and the magnetron 10 are connected in series to form a control circuit; one end of the water cooling pipeline 80 is connected with the magnetron 10, and the other end is connected with an external water supply joint; the detection component is used for detecting the water leakage state of the water cooling pipeline 80 and switching on or switching off the control circuit according to the water leakage state.

The water cooling pipeline 80 comprises a cold water pipe and a hot water pipe, a heat exchange piece is arranged on the anode of the magnetron 10, one end of the cold water pipe is communicated with an external cooling water source, and the other end of the cold water pipe is communicated with a water pipe joint on the heat exchange piece; one end of the hot water pipe is communicated with the water pipe connector on the heat exchange piece so as to form a loop with the cold water pipe. External cooling water enters the heat exchange piece through the cold water pipe and exchanges heat with the anode of the magnetron 10, so that the heat dissipation effect of the external cooling water is realized. The hot water after heat exchange is discharged to an external heat dissipation mechanism through a hot water pipe to dissipate heat, or is stored in a storage mechanism.

In this embodiment, the detection component 20 may be disposed below the water-cooling pipeline 80, so as to save equipment cost, and the detection component 20 may be installed only below a position where the water-cooling pipeline 80 is prone to water leakage, for example, below a position where a cold water pipe or a hot water pipe is connected to a water pipe connector.

The control circuit is formed by connecting the detection component 20 and the magnetron 10 in series. Specifically, the connection of the control circuit can be realized through a circuit board. The control circuit is designed on a circuit board and the circuit board is electrically connected to the detection assembly 20 and the magnetron 10 by a cable.

When the water-cooling pipeline 80 leaks, water drops on the detection assembly 20 under the action of gravity, and the water drops are detected by the detection assembly 20, so that the magnetron 10 is controlled to be disconnected and stopped.

Specifically, the detecting component 20 may use a humidity sensor and a controller, and when water drops onto the humidity sensor, the humidity rises and is fed back to the controller, and the controller controls the magnetron 10 to stop running. The controller may employ a control unit such as a single-chip microcomputer.

Further, in order to simplify the circuit structure, the detection assembly 20 adopts a mode that the relay 22 is matched with a motor pole piece, the output end of the relay 22 is connected in series with the magnetron 10 to form the control circuit, the electrode piece 21 is arranged below the water cooling pipeline 80, and the input end of the relay 22 is electrically connected with the anode of the electrode piece 21 and the cathode of the electrode piece 21 respectively; the electrode plate 21 is used for detecting a water leakage state of the water cooling pipeline 80, and controlling the relay 22 to be turned on or off according to the water leakage state.

The relay 22 adopts an electromagnetic relay 22, a common terminal (COM) of the relay 22 is connected to the control circuit, and a power supply circuit of an electromagnet in the relay 22 is respectively connected with the anode and the cathode of the electrode sheet 21.

Normally, the anode and the cathode of the electrode plate 21 are disconnected, the electromagnet loses power, the relay 22 is switched to the COM end to be conducted with the NC end, and the control circuit is conducted.

When the water-cooling pipeline 80 leaks water, the water drops onto the electrode plate 21, and a short circuit occurs between the anode and the cathode of the electrode plate 21, so that the power supply circuit of the electromagnet is turned on, and the switch of the relay 22 is attracted to the other end of the electromagnet, that is, the relay 22 is switched to the COM end to be turned on with the NO end, so that the control circuit is turned off.

According to the technical scheme, the detection component 20 is arranged at the bottom of the water cooling pipeline 80 to detect the water leakage state of the water cooling pipeline 80, and the on and off of the whole control circuit are automatically controlled according to the water leakage state, so that the purposes of water leakage detection and automatic off are realized, and safety accidents caused by water leakage are avoided.

Further, the microwave generator further comprises an excitation cavity 30, wherein one end of the excitation cavity 30 is communicated with the magnetron 10, and the excitation cavity 30 is positioned below the water cooling pipeline 80; the electrode plate 21 is disposed on the excitation chamber 30 and below the water-cooling line 80.

The excitation chamber 30 serves as a key component directly connected to the magnetron 10, and effectively transmits microwave energy generated in the magnetron 10 to a load.

In this embodiment, the excitation chamber 30 is disposed at the bottom of the magnetron 10 for optimal structure. The direction of extension of the excitation chamber 30 is the same as the direction of extension of the water-cooled line 80. The electrode sheet 21 can thus be mounted directly on top of the excitation chamber 30 without the need for fixing the electrode sheet 21 by other fixing structures.

The number of the electrode plates 21 is plural, and the electrode plates 21 are arranged on the excitation cavity 30 at intervals.

To improve the accuracy of the detection assembly 20, the detection assembly 20 may be mounted at a plurality of different locations on the excitation chamber 30. Wherein, each detection component 20 is located right below the water-cooling pipeline 80, and by increasing the number of detection components 20, it is able to detect whether water leakage occurs at a plurality of different positions on the water-cooling pipeline 80.

Further, a spacer is disposed between the electrode plate 21 and the excitation chamber 30, the thickness of the spacer is 1 cm-2 cm, and the spacer is made of epoxy resin.

Since the input voltage of the magnetron 10 is negative voltage, the magnetron 10 is directly connected to the exciting chamber 30, and therefore the exciting chamber 30 is also in a negative high voltage loop, the isolation plate should be added between the electrode plate 21 and the exciting chamber 30 to avoid the electrode plate 21 from being broken down by high voltage.

The isolation plate can adopt an epoxy resin plate, and the thickness can be 1 cm-2 cm, so that an effective insulation effect is achieved. The spacer is firmly fixed to the excitation chamber 30 by insulating glue.

Further, the microwave generator further includes a displacement sensor 40, the displacement sensor 40 is disposed on the excitation cavity 30, and the displacement sensor 40 is connected in series to the control circuit, and the displacement sensor 40 is configured to detect a connection state of the excitation cavity 30, and turn on or off the control circuit according to the connection state.

One end of the excitation chamber 30 is communicated with the magnetron 10, the other end is provided with a flange edge, and a mounting hole is formed in the edge of the flange edge for mounting the displacement sensor 40. The displacement sensor 40 detects through a telescopic rod, and the telescopic rod is made of metal.

The displacement sensor 40 is connected in series with the control circuit, the control circuit is in an off state when the telescopic rod is in situ, and the control circuit is in an on state when the telescopic rod is compressed in place by external force.

In this embodiment, the installation position of the displacement sensor 40 is adjusted, so that the telescopic rod is in a conducting state when being retracted to a position flush with the surface of the flange edge.

Thus, when the connection face of the external load is connected in place with the flange edge, the two faces come into abutment, compressing the telescopic rod flush with the surface of the flange edge, the displacement sensor 40 making the control circuit conductive.

On the contrary, when the connection between the external load connection surface and the flange edge is not in place, a large gap exists between the two surfaces, the telescopic rod is not compressed, and the displacement sensor 40 breaks the control circuit. Avoiding a missing or virtual connection between the excitation chamber 30 and an external load, when the connection is not in place, the magnetron 10 and the excitation cavity 30 of the magnetron 10 are stopped, so that the microwave leakage is effectively prevented.

Specifically, the microwave generator further includes an upper housing 61, a lower housing 62, and a micro switch 50, where the upper housing 61 and the lower housing 62 are covered to form a containing cavity, and the magnetron 10, the detection assembly 20, and the water cooling pipeline 80 are disposed in the containing cavity; the micro switch 50 is disposed at a connection position between the upper housing 61 and the lower housing 62, the micro switch 50 is connected in series to the control circuit, and the micro switch 50 is configured to detect a connection state between the upper housing 61 and the lower housing 62, and turn on or off the control circuit according to the connection state.

The upper case 61 and the lower case 62 are enclosed to form a rectangular case, and the upper and lower surfaces are sealed by cover plates. In addition, the structural shapes of the upper case 61 and the lower case 62 may be adjusted to change the shape of the housing.

The upper housing 61 adopts an arch structure, two ends of the excitation cavity 30 are respectively connected with two opposite side walls, the lower housing 62 adopts an L-shaped structure, and main components such as a circuit board and a power supply are all arranged on the lower housing 62.

When the upper and lower housings 61 and 61 are connected, the upper and lower housings 62 and 61 are fixed by screws, and no other mechanical connection is provided, thereby facilitating the disassembly of the upper and lower housings 61 and 62. And after the disassembly, the excitation chamber 30 is only connected with the upper shell 61, so that maintenance test can be performed without independently disassembling the flange edge of the excitation chamber 30 from the outer shell.

A plurality of microswitches 50 are mounted at edge connection positions of the upper case 61 and the lower case 62.

The micro switch 50 is connected in series in the control circuit. The microswitch 50 is provided with a pressing rod, when being pressed downwards by external force, the movable contact is driven to move, the connection switching between the normally closed contact (NC) and the normally open contact (NO) and the common end (COM) can be realized, the COM end is conducted with the NC end when not being pressed downwards by external force, and the COM end is conducted with the NO end when being pressed downwards by external force.

The number of the micro switches 50 is plural, and the plurality of micro switches 50 are disposed at the connection position of the upper case 61 and the lower case 62 at intervals.

The microswitches 50 are respectively arranged at different orientations of the upper shell 61 and the lower shell 62, and can respectively detect the connection condition of the left side, the right side, the upper side and the lower side of the upper shell 61 and the lower shell 62, the connection in any direction is loose or missed, and then the COM end and the NC end are cut into conduction, so that the control circuit is disconnected.

In this embodiment, after the plurality of electrode plates 21 are connected in series, they are connected to two ends of the coil of the relay 22 to form a loop, the power supply end of the relay 22 is electrically connected to the power supply, one end of the displacement sensor 40 is electrically connected to the common end (COM) of the relay, the other end is electrically connected to the common end (COM) of the micro switch 50, the normally open contact (NO) of the micro switch 50 is electrically connected to the common end (COM) of the next micro switch 50, and so on. And finally electrically connected with the NC end of the relay 22 to form the control circuit.

When the microwave generator works normally, please refer to fig. 1, namely, NO water leakage and NO microwave leakage occur, an open circuit is formed between the anode and the cathode of the motor pole piece, NO power is supplied to the coil of the relay 22, the COM end of the relay 22 is conducted with the NC end, the displacement sensor 40 is conducted, the COM end of the microswitch 50 is conducted with the NO end, the whole control circuit is conducted, and the system works normally.

Referring to fig. 2, when the microwave generator is leaking, an open circuit is formed between the anode and the cathode of the motor pole piece, the coil of the relay 22 is not powered, the COM end of the relay 22 is connected with the NC end, but the displacement sensor 40 is disconnected, or the micro switch 50 is switched to be connected between the COM end and the NC end, or both ends are simultaneously generated, the whole control circuit is opened, the system alarms, and the microwave generator shuts off the microwave output.

When the microwave generator leaks water, referring to fig. 3, the anode and the cathode of the motor pole piece are in short circuit conduction, the coil of the relay 22 supplies power, the relay 22 is switched to be in conduction between the COM end and the NO end, the control circuit is opened, the system alarms, and the microwave generator shuts down the microwave output.

Further, the microwave generator further comprises a blower assembly 70, the blower assembly 70 being provided on the upper housing 61 and/or the lower housing 62; the blower assembly 70 communicates with the magnetron 10 to blow air outside the accommodating chamber into the magnetron 10.

The top of the magnetron 10 is provided with a filament housing, a plurality of ventilation holes which are arranged in order are arranged on the filament housing, the ventilation holes are all threaded holes, the fan assembly 70 is arranged on the filament housing, and air is blown into the magnetron 10 through the ventilation holes, so that the air cooling and heat dissipation effects on the magnetron 10 are realized.

Specifically, the fan assembly 70 includes a first fan 71, a second fan 72, and an air guiding duct 73, where the first fan 71 is disposed on the upper housing 61 or the lower housing 62; the second fan 72 is arranged above the first fan 71, and the air inlet end of the second fan 72 faces the first fan 71; one end of the air guide pipe 73 is communicated with the air outlet end of the second fan 72, and the other end is communicated with the magnetron 10.

The air guide pipe 73 is installed and fixed on the filament housing through a threaded hole, a half area of the air guide pipe 73 covering the air vent on the magnetron 10 is used as an air inlet hole, the other half area of the air vent is used as an air outlet hole, and air flows through the filament housing to cool the filament of the magnetron 10.

An air outlet and an air inlet are formed in the side walls of two opposite sides of the upper shell 61, the first fan 71 is installed at the position of the air inlet and used for sucking external cold air, and meanwhile, the wind direction of the first fan 71 faces the air outlet, so that hot air in the accommodating cavity is blown out from the air outlet, and a heat exchange effect is achieved.

The second fan 72 is disposed at the top of the first fan 71, and is configured to suck the cold air blown by the first fan 71, and guide the cold air into the magnetron 10 through the air guide pipe 73 and cool the filament, so as to realize heat exchange between the inside and outside air.

The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the description of the present invention and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the invention.

Claims (10)

1. A microwave generator, the microwave generator comprising:

a magnetron;

the detection assembly is connected with the magnetron in series to form a control circuit;

one end of the water cooling pipeline is connected with the magnetron, and the other end of the water cooling pipeline is connected with an external water supply connector;

the detection component is used for detecting the water leakage state of the water cooling pipeline and switching on or switching off the control circuit according to the water leakage state.

2. The microwave generator of claim 1, wherein the detection assembly comprises:

the output end of the relay is connected with the magnetron in series to form the control circuit;

the electrode plate is arranged below the water cooling pipeline, and the input end of the relay is electrically connected with the anode of the electrode plate and the cathode of the electrode plate respectively;

the electrode plate is used for detecting the water leakage state of the water cooling pipeline and controlling the relay to be switched on or off the control circuit according to the water leakage state.

3. The microwave generator of claim 2, further comprising an excitation chamber, one end of the excitation chamber being in communication with the magnetron and the excitation chamber being located below the water cooling line;

the electrode plate is arranged above the excitation cavity and below the water cooling pipeline.

4. A microwave generator according to claim 3, further comprising a displacement sensor disposed on the excitation chamber and connected in series with the control circuit, the displacement sensor being configured to detect a connection state of the excitation chamber and to turn on or off the control circuit in accordance with the connection state.

5. A microwave generator as claimed in claim 3, wherein the number of electrode pads is plural, and a plurality of the electrode pads are arranged on the excitation chamber at intervals.

6. A microwave generator according to claim 3, wherein a spacer is provided between the electrode plate and the excitation chamber, the spacer having a thickness of 1cm to 2cm, the spacer being made of an epoxy resin material.

7. The microwave generator of claim 1, further comprising:

the upper shell and the lower shell are covered to form a containing cavity, and the magnetron, the detection component and the water cooling pipeline are arranged in the containing cavity;

the micro switch is arranged at the connection position of the upper shell and the lower shell, is connected in series on the control circuit, and is used for detecting the connection state of the upper shell and the lower shell and switching on or off the control circuit according to the connection state.

8. The microwave generator of claim 7, wherein the number of micro switches is plural, and a plurality of micro switches are disposed at a connection position of the upper case and the lower case at intervals.

9. The microwave generator of claim 7, further comprising a blower assembly disposed on the upper housing and/or the lower housing; the fan assembly is communicated with the magnetron to blow air outside the accommodating cavity into the magnetron.

10. The microwave generator of claim 1, wherein the blower assembly comprises:

the first fan is arranged on the upper shell or the lower shell;

the second fan is arranged above the first fan, and the air inlet end of the second fan faces the first fan;

one end of the air guide pipe is communicated with the air outlet end of the second fan, and the other end of the air guide pipe is communicated with the magnetron.

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