CN116381441A - 半导体器件失效分析方法、装置、计算机设备和存储介质 - Google Patents
半导体器件失效分析方法、装置、计算机设备和存储介质 Download PDFInfo
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- CN116381441A CN116381441A CN202310250336.2A CN202310250336A CN116381441A CN 116381441 A CN116381441 A CN 116381441A CN 202310250336 A CN202310250336 A CN 202310250336A CN 116381441 A CN116381441 A CN 116381441A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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Citations (19)
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JPH1012691A (ja) * | 1996-06-19 | 1998-01-16 | Mitsubishi Electric Corp | 放電検出装置およびその検出方法 |
US20010040461A1 (en) * | 1992-06-11 | 2001-11-15 | Harwood Warren K. | Wafer probe station having environment control enclosure |
CN101271858A (zh) * | 2007-03-23 | 2008-09-24 | 东京毅力科创株式会社 | 检查装置 |
US20130002273A1 (en) * | 2011-05-02 | 2013-01-03 | Kyung Jin Min | System and method for electrostatic discharge testing of devices under test |
CN105425136A (zh) * | 2015-12-25 | 2016-03-23 | 中国科学院半导体研究所 | 一种半导体激光器静电失效分析方法 |
CN106019114A (zh) * | 2016-06-23 | 2016-10-12 | 上海战旗电子有限公司 | 测试温箱 |
CN207423465U (zh) * | 2017-10-20 | 2018-05-29 | 长春一汽富晟李尔汽车电器电子有限公司 | 汽车电线束橡胶套密封测试平台 |
CN109613016A (zh) * | 2018-12-04 | 2019-04-12 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 一种半导体芯片缺陷检测设备及方法 |
CN212031653U (zh) * | 2020-03-10 | 2020-11-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | 集成多功能半导体器件可靠性测试装置 |
CN112908875A (zh) * | 2021-01-11 | 2021-06-04 | 华东师范大学 | 一种基于图像的失效esd器件无损表征方法 |
US20210305074A1 (en) * | 2020-03-31 | 2021-09-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for recognizing and addressing plasma discharge during semiconductor processes |
CN113486622A (zh) * | 2021-06-29 | 2021-10-08 | 海光信息技术股份有限公司 | 一种芯片的失效分析方法及装置、电子设备、存储介质 |
CN113959981A (zh) * | 2021-10-21 | 2022-01-21 | 中国科学院合肥物质科学研究院 | 一种硫化羰(cos)痕量气体实时在线观测装置 |
CN113985259A (zh) * | 2021-11-30 | 2022-01-28 | 海光信息技术股份有限公司 | 芯片测试舱 |
CN113985240A (zh) * | 2021-10-28 | 2022-01-28 | 中国科学院国家空间科学中心 | 用于半导体器件瞬态辐射感生电荷的测量方法、***及装置 |
CN114646638A (zh) * | 2022-04-12 | 2022-06-21 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 芯片失效分析定位方法、装置、设备及存储介质 |
CN115236483A (zh) * | 2022-06-17 | 2022-10-25 | 长鑫存储技术有限公司 | 一种测试设备、失效分析方法和测试*** |
CN115361546A (zh) * | 2022-08-08 | 2022-11-18 | 苏州清研精准汽车科技有限公司 | 一种仿真测试的多综合环境暗箱及其操作方法 |
CN115420979A (zh) * | 2022-08-31 | 2022-12-02 | 中国科学院国家空间科学中心 | 集成电路空间静电放电脉冲精确注入***及测试方法 |
-
2023
- 2023-03-15 CN CN202310250336.2A patent/CN116381441A/zh active Pending
Patent Citations (19)
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---|---|---|---|---|
US20010040461A1 (en) * | 1992-06-11 | 2001-11-15 | Harwood Warren K. | Wafer probe station having environment control enclosure |
JPH1012691A (ja) * | 1996-06-19 | 1998-01-16 | Mitsubishi Electric Corp | 放電検出装置およびその検出方法 |
CN101271858A (zh) * | 2007-03-23 | 2008-09-24 | 东京毅力科创株式会社 | 检查装置 |
US20130002273A1 (en) * | 2011-05-02 | 2013-01-03 | Kyung Jin Min | System and method for electrostatic discharge testing of devices under test |
CN105425136A (zh) * | 2015-12-25 | 2016-03-23 | 中国科学院半导体研究所 | 一种半导体激光器静电失效分析方法 |
CN106019114A (zh) * | 2016-06-23 | 2016-10-12 | 上海战旗电子有限公司 | 测试温箱 |
CN207423465U (zh) * | 2017-10-20 | 2018-05-29 | 长春一汽富晟李尔汽车电器电子有限公司 | 汽车电线束橡胶套密封测试平台 |
CN109613016A (zh) * | 2018-12-04 | 2019-04-12 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 一种半导体芯片缺陷检测设备及方法 |
CN212031653U (zh) * | 2020-03-10 | 2020-11-27 | 中国科学院苏州纳米技术与纳米仿生研究所 | 集成多功能半导体器件可靠性测试装置 |
US20210305074A1 (en) * | 2020-03-31 | 2021-09-30 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for recognizing and addressing plasma discharge during semiconductor processes |
CN112908875A (zh) * | 2021-01-11 | 2021-06-04 | 华东师范大学 | 一种基于图像的失效esd器件无损表征方法 |
CN113486622A (zh) * | 2021-06-29 | 2021-10-08 | 海光信息技术股份有限公司 | 一种芯片的失效分析方法及装置、电子设备、存储介质 |
CN113959981A (zh) * | 2021-10-21 | 2022-01-21 | 中国科学院合肥物质科学研究院 | 一种硫化羰(cos)痕量气体实时在线观测装置 |
CN113985240A (zh) * | 2021-10-28 | 2022-01-28 | 中国科学院国家空间科学中心 | 用于半导体器件瞬态辐射感生电荷的测量方法、***及装置 |
CN113985259A (zh) * | 2021-11-30 | 2022-01-28 | 海光信息技术股份有限公司 | 芯片测试舱 |
CN114646638A (zh) * | 2022-04-12 | 2022-06-21 | 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) | 芯片失效分析定位方法、装置、设备及存储介质 |
CN115236483A (zh) * | 2022-06-17 | 2022-10-25 | 长鑫存储技术有限公司 | 一种测试设备、失效分析方法和测试*** |
CN115361546A (zh) * | 2022-08-08 | 2022-11-18 | 苏州清研精准汽车科技有限公司 | 一种仿真测试的多综合环境暗箱及其操作方法 |
CN115420979A (zh) * | 2022-08-31 | 2022-12-02 | 中国科学院国家空间科学中心 | 集成电路空间静电放电脉冲精确注入***及测试方法 |
Non-Patent Citations (1)
Title |
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CHANG LIU 等: ""RF Overdrive Burnout Behavior and Mechanism Analysis of GaN HEMTs Based on High Speed Camera"", 《IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY》, vol. 11, pages 355 - 356 * |
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Inventor after: Liu Chang Inventor after: Liu Hongxia Inventor after: Cai Zongqi Inventor after: He Zhiyuan Inventor after: Chen Yiqiang Inventor after: Lai Ping Inventor before: Liu Chang Inventor before: Cai Zongqi Inventor before: He Zhiyuan Inventor before: Chen Yiqiang Inventor before: Lai Ping |
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Effective date of registration: 20240528 Address after: No. 78, Zhucun Avenue West, Zhucun street, Zengcheng District, Guangzhou, Guangdong 511370 Applicant after: CHINA ELECTRONIC PRODUCT RELIABILITY AND ENVIRONMENTAL TESTING Research Institute (THE FIFTH ELECTRONIC Research Institute OF MIIT)(CEPREI LABORATORY)) Country or region after: China Applicant after: XIDIAN University Address before: No. 78, Zhucun Avenue West, Zhucun street, Zengcheng District, Guangzhou, Guangdong 511370 Applicant before: CHINA ELECTRONIC PRODUCT RELIABILITY AND ENVIRONMENTAL TESTING Research Institute (THE FIFTH ELECTRONIC Research Institute OF MIIT)(CEPREI LABORATORY)) Country or region before: China |