CN116372393A - Cutting workbench for chip processing laser cutting machine - Google Patents

Cutting workbench for chip processing laser cutting machine Download PDF

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Publication number
CN116372393A
CN116372393A CN202310663641.4A CN202310663641A CN116372393A CN 116372393 A CN116372393 A CN 116372393A CN 202310663641 A CN202310663641 A CN 202310663641A CN 116372393 A CN116372393 A CN 116372393A
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CN
China
Prior art keywords
laser cutting
air
pipe
groove
plate
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Granted
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CN202310663641.4A
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Chinese (zh)
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CN116372393B (en
Inventor
庄伟东
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NANJING SILVERMICRO ELECTRONICS Ltd
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NANJING SILVERMICRO ELECTRONICS Ltd
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Priority to CN202310663641.4A priority Critical patent/CN116372393B/en
Publication of CN116372393A publication Critical patent/CN116372393A/en
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Publication of CN116372393B publication Critical patent/CN116372393B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
    • B23K37/04Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
    • B23K37/0426Fixtures for other work
    • B23K37/0435Clamps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to the technical field of chip cutting, in particular to a cutting workbench for a chip processing laser cutting machine, which comprises an upper processing rack and a lower clamping table, wherein a laser cutting control box driven front and back is arranged on the upper processing rack, the lower end of the laser cutting control box is provided with a cutting head opposite to the lower clamping table, and a clamping assembly for clamping chips is transversely and slidably arranged on the lower clamping table, and has the beneficial effects that: through the cooperation drainage of trachea and slip pipe for the accurate side direction of air current is strikeed, under the effect of air current internal pressure, makes the air bag pipe inflation, and drive pressure-bearing end plate is pegged graft in the dislocation hole along the change groove, realizes the fixed to the centre gripping subassembly, makes the direction of air current the same with the machine direction, can not produce the side direction skew, and then under the impact of air current, even the centre gripping subassembly appears removing, also is the displacement in the machine direction, can not produce machining error.

Description

Cutting workbench for chip processing laser cutting machine
Technical Field
The invention relates to the technical field of chip cutting, in particular to a cutting workbench for a chip processing laser cutting machine.
Background
The chips are made of wafers, and in the process of processing and production, the wafers need to be cut to obtain single chips, and in the process of cutting, in order to reduce physical stress and improve cutting accuracy, a laser cutting machine is generally adopted.
Most of the existing laser cutting machines are divided into two types, one type is that a cutting head is not moved, the purpose of cutting is achieved by adjusting a clamping table of a wafer, the other type is that the clamping table is not used, the cutting head moves to achieve the purpose of cutting, however, in the actual machining process, the required precision of the wafer and a chip is extremely high, and when the movement is too much and complex, the corresponding precision is reduced.
The existing chip processing process can produce fine dust, and then pollute the processing environment, and is harmful to the human body, common processing mode is for setting up dust extraction in the processing process, timely sucking away the dust, avoid the diffusion, but to the clamping table that the precision requirement is high, and need the motion to adjust, the air pump negative pressure adsorbs the back needs exhaust gas, to the high air current, can produce the reaction force, thereby under the reaction impact of air current, make the clamping table that the regulation was accomplished offset once more, and because the continuity of processing, the reaction force exists always, cause the error to increase continuously, extend the precision that influences the processing.
Disclosure of Invention
The invention aims to provide a cutting workbench for a chip processing laser cutting machine, which aims to solve the problems in the background technology.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the cutting workbench comprises an upper processing rack and a lower clamping table, wherein a laser cutting control box driven front and back is arranged on the upper processing rack, a cutting head opposite to the lower clamping table is arranged at the lower end of the laser cutting control box, and a clamping assembly for clamping a chip is transversely and slidably arranged on the lower clamping table; the clamping assembly comprises a base, a connecting column and a cutting table, wherein a sliding disc which is in sliding fit with the upper end face of the lower clamping table is arranged at the lower end of the base, the connecting column is vertically arranged at the upper end of the base in a rotating mode, transverse pushing rods are symmetrically connected to the two ends of the base, the transverse pushing rods are slidably mounted on the side wall of the lower clamping table, the cutting table is arranged at the upper end of the connecting column, a downward concave stepped inner groove is formed in the middle of the upper end face of the cutting table, a supporting inner plate is fixedly mounted in the stepped inner groove, a plurality of groups of negative pressure suction heads distributed in a circumferential array are arranged on the supporting inner plate, a plurality of groups of dust collection grooves distributed in a circumferential array are formed in the outer edge of the upper end face of the cutting table, a suction head is fixedly mounted at the outer edge port of the dust collection groove, an air pump which is communicated with the suction head and the negative pressure suction head is arranged in an inner cavity of the connecting column, a pair of air pipes which are horizontally symmetrical are connected, and the end parts of the air pipes are provided with an air bag pipe and a pressure-bearing end plate; the side wall of lower centre gripping platform is provided with the ring guide rail with trachea contour, be provided with annular change groove on the ring guide rail, through adapter sleeve fixed connection between the outside of ring guide rail and the lower centre gripping platform, be provided with the dislocation hole with adapter sleeve intercommunication on the inner wall of change groove, elasticity slip grafting has the sliding tube in the adapter sleeve, and the tip of sliding tube is provided with extrusion end plate, gasbag pipe and pressure-bearing end plate rotate and install in the change groove, extrusion end plate and pressure-bearing end plate laminating each other, and the junction surface upper end that extrusion end plate and pressure-bearing end plate laminated each other is provided with lifter driven extrusion picture peg.
Preferably, the upper processing rack is provided with a cross-shaped longitudinal chute extending back and forth, the upper end of the laser cutting control box is provided with a cross sliding rack which is slidably arranged in the longitudinal chute, racks are arranged on two sides of the cross sliding rack, gears are arranged in inner cavities on the left side and the right side of the longitudinal chute, the gears are driven by a motor, and the gears are meshed with the racks.
Preferably, a positioning origin which is installed in a downward sinking mode is arranged in the middle of the upper end face of the lower clamping table, a correction probe is arranged in the center of the lower end of the sliding plate, an infrared light emitter is arranged on the correction probe, and a miniature camera is arranged in the positioning origin.
Preferably, the side walls of the two sides of the lower clamping table are provided with T-shaped slots with the same height as the transverse pushing rods, one end of each transverse pushing rod is provided with a T-shaped inserting plate which is slidably arranged in each T-shaped slot, the other end of each transverse pushing rod is fixed on the side wall of the base, and a folding protective cover for wrapping the transverse pushing rods is arranged between each T-shaped inserting plate and the side wall of the base.
Preferably, the trachea extends to the outside of spliced pole, and tracheal outside tip is provided with the pterygoid lamina, the pterygoid lamina is connected to the one end of gasbag pipe, and the pressure-bearing end plate is connected to the other end of gasbag pipe, and the inner circle of ring guide is provided with spacing end cover ring, spacing end cover ring comprises a pair of ring plate about respectively, and the trachea runs through spacing end cover ring, the inboard lateral wall of spacing end cover ring is laminated to the pterygoid lamina.
Preferably, the sliding tube is sleeved with a spring, the spring is located in the dislocation hole, and two ends of the spring are pressed between the inner wall of the dislocation hole and the extrusion end plate.
Preferably, the upper end of the circular guide rail is provided with an upper frame, the lifting rod is vertically arranged on the upper frame, the lower end of the lifting rod is connected with the extrusion inserting plate, the lower end of the extrusion inserting plate extends into the dislocation hole, and a first chamfer which is mutually attached is arranged between the lower end of the extrusion inserting plate and the extrusion end plate.
Preferably, the outside of lower centre gripping platform is provided with the extension seat, be provided with the expansion slot with adapter sleeve intercommunication on the extension seat, the tip of sliding tube extends to in the expansion slot, and the upper end of expansion slot is provided with sealed sidebar, is provided with the exhaust hole that runs through sealed sidebar on the expansion slot, the upper end of sliding tube is provided with the rubber strip of sliding grafting with sealed sidebar cooperation, is provided with the through-hole of intercommunication sliding tube inner chamber on the rubber strip, through-hole and the horizontal dislocation distribution of exhaust hole.
Preferably, a second chamfer is arranged at the port of the upper end of the stepped inner groove, the stepped inner groove is communicated with the dust collection groove through the second chamfer, an air cavity is arranged at the lower end of the stepped inner groove, and the lower end of the supporting inner plate is fixedly arranged in the stepped inner groove in a sealing mode.
Preferably, the plurality of groups of the air suction heads distributed in the circumferential array are communicated with the air cavity through connecting pipes, the lower ends of the plurality of groups of the negative pressure suction heads are communicated with the air cavity, the lower ends of the air cavities are communicated with the air pump, and the negative pressure suction heads are internally provided with rubber suction pipes which are elastically folded and extend to the upper ends of the support inner plates.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the purpose of decomposing movement is achieved by arranging the transverse pushing rod and the longitudinally sliding cutting head, so that the clamping assembly and the cutting head respectively keep movement in a single direction, errors are reduced, meanwhile, the air flow is enabled to impact laterally accurately through the matching drainage of the air pipe and the sliding pipe, under the action of the internal pressure of the air flow, the air bag pipe is enabled to expand, the pressure-bearing end plate is driven to be inserted into the dislocation hole along the rotating groove, the clamping assembly is fixed, the air flow direction is the same as the machining direction, lateral offset is not generated, and even if the clamping assembly moves under the impact of the air flow, the displacement in the machining direction does not generate machining errors, and meanwhile, the rotation adjustment of the cutting table is convenient to adjust after machining is completed by the matching insertion of the extrusion insertion plate.
Drawings
Fig. 1 is a schematic structural view of the present invention.
Fig. 2 is an enlarged view of the structure at a of the present invention.
Fig. 3 is an enlarged view of the structure at B of the present invention.
Fig. 4 is a schematic perspective view of a clamping assembly according to the present invention.
Fig. 5 is a schematic perspective view of a circular guide rail of the present invention.
Fig. 6 is an assembly view of the clamping assembly of the present invention.
Fig. 7 is a schematic view showing a perspective structure of a sliding tube mounted on a circular guide rail.
Fig. 8 is a schematic perspective view of a base of the present invention.
Fig. 9 is a schematic perspective view of a sliding tube according to the present invention.
In the figure: 1. a processing rack is arranged; 2. a lower clamping table; 3. a longitudinal chute; 4. a motor; 5. a laser cutting control box; 6. a cutting head; 7. a cross carriage; 8. a rack; 9. a gear; 10. a base; 11. a connecting column; 12. an air pump; 13. an air suction head; 14. t-shaped plugboard; 15. a T-shaped slot; 16. a slide plate; 17. positioning an origin; 18. a transverse pushing rod; 19. an air pipe; 20. loading on a frame; 21. a circular ring guide rail; 22. a lifting rod; 23. extruding the plugboard; 24. a connection sleeve; 25. a sliding tube; 26. folding the protective cover; 27. a spring; 28. extruding the end plate; 29. a limiting end cover ring; 30. a wing plate; 31. an air bag tube; 32. a pressure-bearing end plate; 33. an extension seat; 34. an exhaust hole; 35. sealing the side bars; 36. a through hole; 37. a telescopic slot; 38. a rubber strip; 39. a first chamfer; 40. a rotary groove; 41. staggered holes; 42. a connecting conduit; 43. supporting an inner plate; 44. a negative pressure suction head; 45. a stepped inner tank; 46. a dust collection groove; 47. a second chamfer; 48. a cutting table; 49. correcting the probe; 50. an air cavity.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1 to 9, the present invention provides a technical solution:
example 1: the utility model provides a chip processing laser cutting machine is with cutting workstation, cutting workstation includes processing frame 1 and lower centre gripping platform 2, go up processing frame 1 and go up the laser cutting control box 5 of back-and-forth drive, the lower extreme of laser cutting control box 5 is provided with just cutting head 6 to lower centre gripping platform 2, upward be provided with the longitudinal sliding groove 3 that extends around the cross on processing frame 1, the upper end of laser cutting control box 5 is provided with the cross balladeur train 7 of slidable mounting in longitudinal sliding groove 3, the both sides of cross balladeur train 7 all are provided with rack 8, the left and right sides inner chamber of longitudinal sliding groove 3 all is provided with gear 9, gear 9 passes through motor 4 drive, and gear 9 and rack 8 meshing.
The motor 4 drives the gear 9 to rotate, so as to drive the rack 8 to slide back and forth, and the cross sliding frame 7 is pulled to slide in the longitudinal sliding groove 3, so that the aim of adjusting the position of the cutting head 6 back and forth is fulfilled.
The clamping assembly for clamping the chip is transversely slidably mounted on the lower clamping table 2 and comprises a base 10, a connecting column 11 and a cutting table 48, a sliding disc 16 which is slidably attached to the upper end face of the lower clamping table 2 is arranged at the lower end of the base 10, the connecting column 11 is vertically rotatably arranged at the upper end of the base 10, transverse pushing rods 18 are symmetrically connected to the two ends of the base 10, and the transverse pushing rods 18 are slidably mounted on the side wall of the lower clamping table 2.
The left and right transverse sliding of the base 10 is realized through the matching of the transverse pushing rod 18 and the sliding disc 16, and the cutting head 6 is not moved in the cutting process, and the transverse pushing rod 18 drives the wafer chips to be transversely cut; or the clamping component is not moved, and the cutting head 6 slides back and forth, so that the purpose of longitudinally cutting the wafer chips is achieved.
The cutting table 48 is arranged at the upper end of the connecting column 11, a step inner groove 45 which is sunken downwards is arranged in the middle of the upper end face of the cutting table 48, a supporting inner plate 43 is fixedly arranged in the step inner groove 45, a plurality of groups of negative pressure suction heads 44 distributed in a circumferential array are arranged on the supporting inner plate 43, a plurality of groups of dust collection grooves 46 distributed in a circumferential array are arranged on the outer edge of the upper end face of the cutting table 48, an air suction head 13 is fixedly arranged at the outer edge port position of the dust collection grooves 46, an air pump 12 which is communicated with the air suction head 13 and the negative pressure suction heads 44 is arranged in the inner cavity of the connecting column 11, a pair of air pipes 19 which are symmetrical left and right are connected with the output end of the air pump 12, and an air bag pipe 31 and a pressure bearing end plate 32 are arranged at the end parts of the air pipes 19.
The wafer is transported and installed in the stepped inner groove 45 through the mechanical arm, the lower end of the wafer is installed on the inner plate 43, the purpose of fixing and adsorbing the wafer is achieved through the negative pressure suction head 44, the purpose of absorbing dust generated in the cutting process is achieved through the suction head 13, negative pressure is formed by the air pipe 19 and the air pump 12, and air flow is guided, so that the air flow flows transversely.
The lateral wall of lower centre gripping platform 2 is provided with the ring guide rail 21 with trachea 19 the same height, be provided with annular change groove 40 on the ring guide rail 21, pass through adapter sleeve 24 fixed connection between the outside of ring guide rail 21 and the lower centre gripping platform 2, be provided with the dislocation hole 41 with adapter sleeve 24 intercommunication on the inner wall of change groove 40, elastic slip grafting has slide tube 25 in the adapter sleeve 24, the tip of slide tube 25 is provided with extrusion end plate 28, gasbag pipe 31 and pressure-bearing end plate 32 rotate and install in change groove 40, extrusion end plate 28 and pressure-bearing end plate 32 laminating each other, and the junction surface upper end that extrusion end plate 28 and pressure-bearing end plate 32 laminating each other is provided with the extrusion picture peg 23 of lifter 22 drive.
In the transverse driving cutting process, air flow gathers in the air pipe 19, the internal pressure is increased, the air bag pipe 31 is expanded, the pressure-bearing end plate 32 is driven to move towards the dislocation hole 41, the pressure-bearing end plate 32 is tightly pressed on the extrusion end plate 28, the front and the rear of the clamping assembly are misplaced and fixed along with misplacement grafting of the pressure-bearing end plate 32, and under the impact of the air flow, even if displacement occurs, the direction is the same as that of the transverse pushing rod 18, and machining errors cannot be generated.
When the vertical processing is needed, through the vertical grafting of extrusion picture peg 23 for pressure-bearing end plate 32 and extrusion end plate 28 separation, pressure-bearing end plate 32 moves to in the change groove 40, under the rotation regulation of spliced pole 11, make air pipe 19 rotate to the position parallel with the cutting direction, after air pump 12 works, air pipe 19 and the slip pipe 25 cooperation dislocation of fore-and-aft direction are fixed this moment, air pipe 19 and clamping assembly form 90 degrees contained angles this moment, reach the purpose of transversely fixing clamping assembly, the direction of action of air current is the same with the cutting direction of cutting head 6, can not produce machining error.
Example 2: on the basis of embodiment 1, a positioning origin 17 which is arranged in a downward concave manner is arranged in the middle of the upper end face of the lower clamping table 2, a correction probe 49 is arranged in the center of the lower end of the sliding plate 16, an infrared light emitter is arranged on the correction probe 49, and a miniature camera is arranged in the positioning origin 17.
By setting the coincidence of the correction probe 49 and the positioning origin 17, accurate resetting is realized after each machining is completed, and error accumulation is avoided.
Example 3: on the basis of embodiment 1, the side walls of the two sides of the lower clamping table 2 are provided with T-shaped slots 15 which are as high as the transverse pushing rods 18, one end of each transverse pushing rod 18 is provided with a T-shaped plugboard 14 which is slidably arranged in each T-shaped slot 15, the other end of each transverse pushing rod 18 is fixed on the side wall of the base 10, and a folding protection cover 26 for wrapping the transverse pushing rod 18 is arranged between each T-shaped plugboard 14 and the side wall of the base 10.
Through setting up the cooperation of T shape slot 15 and T shape picture peg 14, realize the installation of clamping assembly, utilize folding protection casing 26 protection horizontal push rod 18, avoid dust pollution, improve the life of equipment.
Example 4: on the basis of embodiment 3, the air pipe 19 extends to the outer side of the connecting column 11, a wing plate 30 is arranged at the outer side end part of the air pipe 19, one end of the air bag pipe 31 is connected with the wing plate 30, the other end of the air bag pipe 31 is connected with a pressure-bearing end plate 32, the inner ring of the circular ring guide rail 21 is provided with a limiting end cover ring 29, the limiting end cover ring 29 is composed of a pair of circular ring plates which are respectively arranged at the upper side and the lower side, the air pipe 19 penetrates through the limiting end cover ring 29, and the wing plate 30 is attached to the inner side wall of the limiting end cover ring 29.
By arranging the matching of the wing plates 30 and the limiting end cover ring 29, the purpose of limiting the end position of the air pipe 19 is achieved, and the pressure-bearing end plate 32 is prevented from falling off in the rotary groove 40.
The sliding tube 25 is sleeved with the spring 27, the spring 27 is located in the dislocation hole 41, two ends of the spring 27 are pressed between the inner wall of the dislocation hole 41 and the extrusion end plate 28, the upper end of the circular guide rail 21 is provided with the upper frame 20, the lifting rod 22 is vertically arranged on the upper frame 20, the lower end of the lifting rod 22 is connected with the extrusion inserting plate 23, the lower end of the extrusion inserting plate 23 extends into the dislocation hole 41, and a first chamfer 39 which is mutually attached is arranged between the lower end of the extrusion inserting plate 23 and the extrusion end plate 28.
Smooth bonding between the extrusion inserting plate 23 and the extrusion end plate 28 is achieved through the arrangement of the first chamfer 39, so that separation of the pressure-bearing end plate 32 and the extrusion end plate 28 is achieved under extrusion of the lifting rod 22, and rotation of the air pipe 19 and the cutting table 48 is facilitated.
Example 5: on the basis of embodiment 4, the outside of lower clamping table 2 is provided with extension seat 33, be provided with on extension seat 33 with the flexible slot 37 of adapter sleeve 24 intercommunication, the tip of slip pipe 25 extends to in the flexible slot 37, the upper end of flexible slot 37 is provided with sealed lateral strip 35, be provided with the exhaust hole 34 that runs through sealed lateral strip 35 on the flexible slot 37, the upper end of slip pipe 25 is provided with the rubber strip 38 of the cooperation slip grafting with sealed lateral strip 35, be provided with the through-hole 36 of intercommunication slip pipe 25 inner chamber on the rubber strip 38, through-hole 36 and the horizontal dislocation distribution of exhaust hole 34.
Through setting up the cooperation grafting of rubber strip 38 and sealed side bar 35, realize the sealing to exhaust hole 34, after the inflation of gasbag pipe 31, slide tube 25 pressurized side direction slip for exhaust hole 34 and through hole 36 coincide, reach the purpose of exhaust, utilize dislocation distribution and spring return elasticity, guarantee the inside atmospheric pressure of slide tube 25, avoid gasbag pipe 31 shrink in the course of working.
Example 6: on the basis of embodiment 5, the upper end port of the stepped inner groove 45 is provided with a second chamfer 47, the stepped inner groove 45 is communicated with the dust collection groove 46 through the second chamfer 47, the lower end of the stepped inner groove 45 is provided with an air cavity 50, the lower end of the support inner plate 43 is fixedly arranged in the stepped inner groove 45 in a sealing manner, a plurality of groups of air suction heads 13 distributed in a circumferential array are communicated with the air cavity 50 through connecting pipes 42, the lower ends of the plurality of groups of negative pressure suction heads 44 are communicated with the air cavity 50, the lower ends of the air cavity 50 are communicated with the air pump 12, and the negative pressure suction heads 44 are internally provided with rubber suction pipes which are elastically folded and extend to the upper end of the support inner plate 43.
Through the cooperation of the air cavity 50 and the connecting conduit 42, the mutual communication of the negative pressure suction head 44 and the suction head 13 is realized, and negative pressure adsorption is formed, so that the purposes of fixing wafer chips and adsorbing dust are achieved.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (10)

1. The utility model provides a chip processing laser cutting machine is with cutting workstation which characterized in that: the cutting workbench comprises an upper processing rack (1) and a lower clamping table (2), a laser cutting control box (5) driven front and back is arranged on the upper processing rack (1), a cutting head (6) opposite to the lower clamping table (2) is arranged at the lower end of the laser cutting control box (5), and a clamping assembly for clamping a chip is transversely and slidably arranged on the lower clamping table (2);
the clamping assembly comprises a base (10), a connecting column (11) and a cutting table (48), wherein a sliding disc (16) which is in sliding fit with the upper end face of the lower clamping table (2) is arranged at the lower end of the base (10), the connecting column (11) is vertically arranged at the upper end of the base (10) in a rotating mode, transverse pushing rods (18) are symmetrically connected to the two ends of the base (10), the transverse pushing rods (18) are slidably arranged on the side wall of the lower clamping table (2), the cutting table (48) is arranged at the upper end of the connecting column (11), a stepped inner groove (45) which is sunken downwards is arranged in the middle of the upper end face of the cutting table (48), a plurality of groups of negative pressure suction heads (44) which are distributed in a circumferential array are fixedly arranged in the stepped inner groove (45), a plurality of groups of dust suction grooves (46) which are distributed in a circumferential array are arranged on the outer edge of the upper end face of the cutting table (48), an air suction head (13) is fixedly arranged at the outer edge port position of the dust suction groove (46), an inner cavity of the connecting column (11) is internally provided with a suction head (12) which is communicated with the air pump (12) and the air pump (12) which is symmetrically connected with the air pump (19), an air bag pipe (31) and a pressure-bearing end plate (32) are arranged at the end part of the air pipe (19);
the utility model discloses a lower centre gripping platform (2) lateral wall is provided with annular guide rail (21) of equal height with trachea (19), be provided with annular change groove (40) on annular guide rail (21), through adapter sleeve (24) fixed connection between the outside of annular guide rail (21) and lower centre gripping platform (2), be provided with dislocation hole (41) with adapter sleeve (24) intercommunication on the inner wall of change groove (40), elasticity slip grafting has slip pipe (25) in adapter sleeve (24), and the tip of slip pipe (25) is provided with extrusion end plate (28), gasbag pipe (31) and pressure-bearing end plate (32) are rotated and are installed in change groove (40), extrusion end plate (28) and pressure-bearing end plate (32) laminating each other, and the junction surface upper end that extrusion end plate (28) and pressure-bearing end plate (32) laminate each other is provided with extrusion picture peg (23) of lifter (22) driven.
2. The dicing table for a chip processing laser cutting machine according to claim 1, wherein: the laser cutting machine is characterized in that a cross-shaped longitudinal sliding groove (3) extending front and back is formed in the upper machining frame (1), a cross sliding frame (7) which is slidably installed in the longitudinal sliding groove (3) is arranged at the upper end of the laser cutting control box (5), racks (8) are arranged on two sides of the cross sliding frame (7), gears (9) are arranged in inner cavities on the left side and the right side of the longitudinal sliding groove (3), the gears (9) are driven by a motor (4), and the gears (9) are meshed with the racks (8).
3. The dicing table for a chip processing laser cutting machine according to claim 2, wherein: the middle position of the upper end face of the lower clamping table (2) is provided with a positioning origin (17) which is installed in a downward sinking mode, the center position of the lower end of the sliding disc (16) is provided with a correction probe (49), the correction probe (49) is provided with an infrared light emitter, and a miniature camera is arranged in the positioning origin (17).
4. The dicing table for a chip processing laser cutting machine according to claim 2, wherein: the two side walls of the lower clamping table (2) are provided with T-shaped slots (15) which are as high as the transverse pushing rods (18), one end of each transverse pushing rod (18) is provided with a T-shaped inserting plate (14) which is slidably arranged in each T-shaped slot (15), the other end of each transverse pushing rod (18) is fixed on the side wall of the base (10), and a folding protective cover (26) for wrapping each transverse pushing rod (18) is arranged between each T-shaped inserting plate (14) and the side wall of the base (10).
5. The dicing table for a chip processing laser cutting machine according to claim 1, wherein: the air pipe (19) extends to the outer side of the connecting column (11), a wing plate (30) is arranged at the outer side end part of the air pipe (19), the wing plate (30) is connected to one end of the air bag pipe (31), the pressure-bearing end plate (32) is connected to the other end of the air bag pipe (31), a limiting end cover ring (29) is arranged on the inner ring of the circular ring guide rail (21), the limiting end cover ring (29) is composed of a pair of circular ring plates which are vertically separated, the air pipe (19) penetrates through the limiting end cover ring (29), and the wing plate (30) is attached to the inner side wall of the limiting end cover ring (29).
6. The dicing table for a chip processing laser cutting machine according to claim 5, wherein: the sliding pipe (25) is sleeved with a spring (27), the spring (27) is located in the dislocation hole (41), and two ends of the spring (27) are pressed between the inner wall of the dislocation hole (41) and the extrusion end plate (28).
7. The dicing table for a chip processing laser cutting machine according to claim 6, wherein: the upper end of the circular guide rail (21) is provided with an upper frame (20), the lifting rod (22) is vertically arranged on the upper frame (20), the lower end of the lifting rod (22) is connected with the extrusion inserting plate (23), the lower end of the extrusion inserting plate (23) extends into the dislocation hole (41), and a first chamfer (39) which is mutually attached is arranged between the lower end of the extrusion inserting plate (23) and the extrusion end plate (28).
8. The dicing table for a chip processing laser cutting machine according to claim 7, wherein: the outside of lower centre gripping platform (2) is provided with extension seat (33), be provided with on extension seat (33) with telescopic slot (37) of adapter sleeve (24) intercommunication, the tip of slip pipe (25) extends to in telescopic slot (37), and the upper end of telescopic slot (37) is provided with sealed lateral strip (35), is provided with on telescopic slot (37) and runs through exhaust hole (34) of sealed lateral strip (35), the upper end of slip pipe (25) is provided with rubber strip (38) with sealed lateral strip (35) cooperation slip grafting, is provided with through-hole (36) of intercommunication slip pipe (25) inner chamber on rubber strip (38), through-hole (36) and exhaust hole (34) horizontal dislocation distribution.
9. The dicing table for a chip processing laser cutting machine according to claim 1, wherein: the upper end port of ladder inside groove (45) is provided with second chamfer (47), and ladder inside groove (45) and dust absorption groove (46) are through second chamfer (47) intercommunication, and the lower extreme of ladder inside groove (45) is provided with air cavity (50), and the lower extreme of support inner panel (43) is sealed fixed mounting in ladder inside groove (45).
10. The dicing table for a chip processing laser cutting machine according to claim 9, wherein: the plurality of groups of air suction heads (13) distributed in a circumferential array are communicated with the air cavity (50) through connecting pipes (42), the lower ends of the plurality of groups of negative pressure suction heads (44) are communicated with the air cavity (50), the lower ends of the air cavities (50) are communicated with the air pump (12), and rubber suction pipes which are elastically folded and extend to the upper ends of the supporting inner plates (43) are arranged in the negative pressure suction heads (44).
CN202310663641.4A 2023-06-06 2023-06-06 Cutting workbench for chip processing laser cutting machine Active CN116372393B (en)

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CN117564562A (en) * 2024-01-15 2024-02-20 河南威猛振动设备股份有限公司 Welding device with adjustable welding station and welding method
CN117680849A (en) * 2024-02-01 2024-03-12 辽源飞跃工模具有限公司 Laser cutting device for extrusion die machining

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CN217752166U (en) * 2022-05-26 2022-11-08 深圳台达创新半导体有限公司 Semiconductor chip processing and slitting device
CN115625437A (en) * 2022-12-21 2023-01-20 江苏东方九天新能源材料有限公司 A nickel plating steel band laser cutting machine for lithium cell

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CN212420110U (en) * 2020-06-24 2021-01-29 景德镇市昌友汽车零部件有限公司 Automobile parts cutting device
WO2022099976A1 (en) * 2020-11-12 2022-05-19 德清杭壳智能科技有限公司 Sheet metal part machining and cutting system for production of new energy automobile
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117517846A (en) * 2023-12-29 2024-02-06 山东佰洁智能电器有限公司 Electromagnetic oven testing device and testing method
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CN117564562A (en) * 2024-01-15 2024-02-20 河南威猛振动设备股份有限公司 Welding device with adjustable welding station and welding method
CN117564562B (en) * 2024-01-15 2024-04-19 河南威猛振动设备股份有限公司 Welding device with adjustable welding station and welding method
CN117680849A (en) * 2024-02-01 2024-03-12 辽源飞跃工模具有限公司 Laser cutting device for extrusion die machining
CN117680849B (en) * 2024-02-01 2024-04-02 辽源飞跃工模具有限公司 Laser cutting device for extrusion die machining

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