CN1162964C - Resonance encode type passive wireless acoustic surface wave array sensor system - Google Patents
Resonance encode type passive wireless acoustic surface wave array sensor system Download PDFInfo
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- CN1162964C CN1162964C CNB021134804A CN02113480A CN1162964C CN 1162964 C CN1162964 C CN 1162964C CN B021134804 A CNB021134804 A CN B021134804A CN 02113480 A CN02113480 A CN 02113480A CN 1162964 C CN1162964 C CN 1162964C
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Abstract
The present invention relates to a resonant encoding type passive and radio array sensing system for surface acoustic waves. The passive and radio array sensing system comprises a sensing part and a signal inquiring, receiving and processing part. The passive and radio array sensing system is characterized in that the sensing part is composed of a sound acoustic wave resonator and a plurality of sensor or marker units, wherein the harmonic frequencies of the sound acoustic wave resonator are distributed at the same frequency point or different frequency point; the sensor or marker units are composed of delay lines with different delay times, and have different encoding arrangements; the sensor or marker units are arranged in the same space position or different space positions. The signal receiving and processing part adopts a form of a computer controlling adjustable local oscillation. The system not only has the advantage of far distance of the resonant passive and radio sensor, but also has the advantage of the delayed type large-scale encoding, and the system can be used for recognizing passive and radio targets.
Description
Technical field
The invention belongs to the surface acoustic wave field of sensing technologies, be specifically related to passive many or sensor array and concentrator marker that above SAW (Surface Acoustic Wave) resonator of a kind of usefulness (comprising dual-port and single port resonator) and delay line are realized, and be used for the wireless signal inquiry and system a plurality of or array sensing signal or concentrator marker is obtained, handles in noncontact.
Technical background
From the eighties of last century the eighties, countries such as U.S., moral, day have carried out the research to the passive wireless acoustic surface wave transducer, in patent of having delivered and technical literature, have reported and have adopted surface acoustic wave device to realize the whole bag of tricks of passive sensor.Because SAW (Surface Acoustic Wave) resonator has the higher quality factor (Q value) that gets than the surface acoustic wave device of other type, is particularly suitable for the passive and wireless Application in Sensing.For example technical literature 1, Reindl Leonhard, Scholl Gerd, Ostertag Thomas etc., " the passive sonic surface wave transponder is as the theory and the method for transducer "/IEEE Transactions onUltrasonics, Ferroelectrics, and Frequency Control/1998,45 (5): 1281-1291; Document 2, A.Pohl, G.Ostermayer and F.Seifer, " locking the wireless sensing of long-range high Q value SAW (Surface Acoustic Wave) resonator with pierce circuit "/IEEE Trans.UFFC/vol.45, no.5, pp.1161-1168,1998; Document 3, A.Springer, R.Weigel, A.Phol and F.Seifert, " with the wireless identification and the sensing of SAW (Surface Acoustic Wave) device "/Mechatronics, / 1999, the above-mentioned document of No.9 pp745-756. has all been introduced the technology of SAW (Surface Acoustic Wave) resonator as the passive and wireless transducer that adopt.Fig. 1 is the typical instrument system principle diagram of reporting in these documents that is used for the inquiry of Passive Wireless SAW Sensors signal, receives and handle.The characteristics that this system constitutes are, the frequency that is used to produce the local oscillator of request signal in use is unregulated, and it is fixed on and be used as on the interior Frequency point of the resonant frequency scope of transducer.A characteristic feature of prior art is exactly only to comprise the single SAW (Surface Acoustic Wave) resonator as transducer in the sensing system.If use a plurality of this passive wireless acoustic surface wave resonator-type transducers, must use a plurality of signal inquiries, receiving element.So this method is not suitable for multisensor, large scale array sensor application.This circuit system complex structure, control flexibility relatively poor.
SAW (Surface Acoustic Wave) resonator is mainly caused the variation of resonator natural resonance frequency as transducer by the sensing amount.At technical literature Pohl Alfred, Ostermayer Gerald, Seifert Franz, " lock the wireless sensing of long-range high Q value SAW (Surface Acoustic Wave) resonator with pierce circuit "/IEEETransactions on Ultrasonics, Ferroelectrics, and FrequencyControl/1998,45 (5): among the 1261-1268, adopt gate phase-locked loop detection technique, the frequency of oscillation of echo-signal is extracted in locking, and obtains corresponding heat transfer agent thus.This circuit system complexity be difficult to debugging and control, and closed-loop bandwidth is narrow, can not be applied to the desired broadband control of sensor array.
In order to be identified in each sensing unit or the transducer in multisensor or the sensor array, technology existing and that openly report for work mainly is to adopt the encoder type SAW (Surface Acoustic Wave) device.For example Siemens is at the patent of invention (application number: 97117768.6) adopt the pulse interval coding of China's application.United States Patent (USP) adopts the passive sonic surface wave concentrator marker (Passive SAW-IDTags Using Chirp Transducer, Patent Number:5469170, Nov., 21,1995) of linear frequency modulation transducer to adopt surface acoustic wave linear frequency modulation encoder.The realization of these sensing systems can be adopted with figure one similar signal and inquire about, receives collecting unit.When wherein adopting the linear frequency modulation coding, the local oscillator among Fig. 1 must be a swept signal source.Instrument system is used traditional Radar Technology, adopts the heterodyne receiver structure, obtains a plurality of tested parameters or target identities identification and heat transfer agent by the extraction to echo signal amplitude, phase information.Yet, in all code identification devices and transducer, all only utilize encode different of time delay between transmitting-receiving with phase place, the sensing amount is also determined by time delay and phase change.Therefore, signal a little less than, the variation of sensing amount is very little.
The present invention is directed to the problem that prior art exists, a kind of resonance encode type passive wireless acoustic surface wave array sensor system is proposed, not only there is resonant mode passive and wireless sensor distance advantage far away in this system, and, have the extensive advantage of encoding of delaying type, also can be used for the target identification of passive and wireless.
Summary of the invention
General plotting of the present invention is: the delayed line of passive sonic surface wave resonator as transducer or concentrator marker is connected with antenna, perhaps be connected with antenna through the passive impedance matching network, directly from the request signal of wireless transmission, obtain energy, and return the radiofrequency signal of carrying heat transfer agent.Itself does not comprise active device transducer or concentrator marker, need not power supply (AC and DC power supply, battery etc.) power supply.This transducer can be used for physical parameters such as sensing temperature, pressure, stress, strain, acceleration, flow, also can be by on senser (SAW (Surface Acoustic Wave) resonator) substrate, the acoustic surface wave propagation path is covered optionally chemisorbed film, biomembrane come the corresponding physics of sensing and chemical parameters, biological parameter.The sensor apparatus system method of code identification, can inquire about and obtain the transducing signal of several this sensers in same monitoring of environmental with same instrument system, obtain transducing signal, and obtain the output of phase inductive sensing parameter or concentrator marker with Digital Signal Processing through signal condition, conversion.The resonance frequency that is used as the resonator of senser in same sensing or concentrator marker system distributes and can also can be operated on the identical Frequency point on different Frequency points.The selected of any one transducer and concentrator marker determined by code signal, and resonator is the variation of natural resonance frequency in the influence reaction that is subjected to physics, chemistry, biological parameter.
This resonance encode type passive wireless acoustic surface wave array sensor system comprises transducing part and signal inquiry, receives and handle two parts.Wherein, transducing part is with the distribute a plurality of transducers or the concentrator marker of coding arrangement a plurality of inequality of SAW (Surface Acoustic Wave) resonator on can identical Frequency point that also can be different and the delay line of different time of delays formation of resonance frequency, be placed on same or different locus, each transducer is used to measure identical or different from the sensing amount, and concentrator marker then can be discerned automatically by the sign object.
Each coding resonant transducer or identifier unit can be that the surface acoustic wave and other passive device that separate are formed, and also can process single chip architecture on a substrate.In isolating construction, most typically link to each other with antenna by sound surface resonance device, delay line, perhaps realize the connection of each several part, as shown in Figure 2 by passive impedance coupling coupling device.To determine coding the time of delay of delay line.Single chip architecture can have many forms, as Fig. 3 and 4.In Fig. 3, IDT and the reflecting grating of different distance have just constituted the resonator of different time of delays, and IDT can be a Frequency point, also can be the frequency sweep IDT that a plurality of Frequency points are formed, and the operating frequency of every group of reflecting grating can be identical, also can be different, and as f among Fig. 3
1, f
2, f
3In Fig. 4, transducer is made up of antenna, diode group, unidirectional interdigital transducer, reception IDT and reflecting grating.The signal that antenna receives by diode group control flows to, guarantee that this signal is added on the unidirectional interdigital transducer, to receiving IDT, surface acoustic wave constitutes resonator to the surface acoustic wave that encourages on unidirectional interdigital transducer between unidirectional interdigital transducer and reflecting grating through the unidirectional biography of substrate.Receiving IDT is the IDT group of a codified, be PSK coding IDT (also can be other coding) among the figure, when the excitation coding of pumping signal is identical with the coding that receives IDT, could gating should reception IDT, convert surface acoustic wave to electromagnetic wave, be added on the antenna through the diode group then and launch.
The energisation mode of its signal can be intermittently sinusoidal signal, ASK signal, fsk signal and psk signal, because the difference of excitation, its response is also different.Wherein, psk signal has the stronger antijamming capability and the littler error rate.Code signal was determined jointly by resonator duration of oscillation time of delay of delay device.In the array system of a plurality of transducers, the resonator duration of oscillation is long more, and the amplitude of signal is big more.
Whole system can be following several form: as shown in Figure 5, each of transducing part surface probe links to each other with delay line, a common antenna by passive impedance coupling device, constitutes whole system with signal inquiry, reception and processing section.Also can be that transducing part is by the shared common antenna of a plurality of transducers, with signal inquiry, reception and processing section formation whole system, as shown in Figure 6.Can also be to link to each other with one or more antennas after transducing part adopts a resonator to link to each other with a plurality of delay lines, constitute whole system with signal inquiry, reception and processing section, shown in Fig. 7 and 8.
The signal inquiry of native system, reception and processing section circuit such as Fig. 9 show, it connects an adjustable local oscillator by the output interface of computer, this adjustable local oscillator connects power amplifier successively, receive transmit button and antenna, send request signal, the echo of request signal is via antenna and send receiving key input radio frequency amplifier, inserts computer behind connecting band bandpass filter and the A/D converter successively again.
The another kind of way of realization of signal inquiry, reception and processing section as shown in figure 10, it comprises two local oscillators, promptly except that adjustable local oscillator, the echo of request signal is behind radio frequency amplifier, also connect fixedly a local oscillator and a frequency mixer, connect low pass filter, amplifier, A/D converter more successively, insert computer at last.Like this, the sensing response signal and that receives fixedly after the local oscillator mixing down-conversion, carries out digitlization again.
This part best implementation as shown in figure 11, it is on basis shown in Figure 10, also connects a frequency mixer at adjustable local oscillator output, fixedly local oscillator is connected between two frequency mixers.One of them is the fixed frequency oscillation source for two local oscillators, and another can be by the oscillation source of variable frequency, phase place and the amplitude of computer programming control for frequency.So just can produce the request signal of different frequencies of oscillation, phase place and amplitude by computer control, and in sensor side, the transducer that has only response range to comprise request signal frequency and phase place just there is response output.Therefore, each transducer in many (array) transducer is by the unique identification of sensor apparatus system.Simultaneously, after surface acoustic wave sensor is received the echo of wireless request signal, through and fixedly local oscillator mixing, by low-pass filtering, realized down-conversion, make and can gather sensing data with low sampling rate, calculate corresponding sensing value by Computer Processing.
In addition, native system can also replace the digitlization of analog/digital converter (A/D) the realization transducing signal in the circuit with counter.The signal that promptly receives is input to shaping circuit after mixing, amplifying, the output of generation is as the input of timing, counter circuit, and perhaps as clock signal, perhaps as gate-control signal, the output of counter is input to computer.
Implementation step of the present invention is as follows:
1. determine to be used as the SAW (Surface Acoustic Wave) resonator of transducer (sensing unit) and the number of delay line in many (array) sensing system, and guarantee each resonator on time of delay or the working band zero lap.
2. these resonators and delay line can be discrete components independently, promptly on different piezoelectric substrates, and the element of individual packages; Also can be on same piezoelectric substrate, the subregion makes the resonator array with different resonance frequencys or time of delay.
3. each transducer (perhaps sensing unit) comprises a resonator (resonator element), delay line, matching network and common antenna, the input of resonator, the delayed line of output directly are connected with antenna, perhaps are connected with antenna by the passive impedance matching element again; The input/output port of transducer also can be all or part links together, and is connected with one or more antenna, perhaps is connected with one or more antenna by the passive impedance matching element; Also can adopt a resonator to link to each other with one or more antennas through a plurality of delay lines.
4. according to selected transducer (sensing unit number) and working band scope, determine the frequency range of adjustable local oscillator in the instrument.The frequency range of adjustable local oscillator is that lowest operating frequency from all resonators is to maximum operating frequency at least.
5. according to the characteristics of the structure of transducer, determine the form of coding signal transmitted, as adopt intermittently sinusoidal signal and intermittently psk signal, and the decision receiving terminal to the measurement scheme of time of delay of phase place, amplitude and the frequency processing method of reflection sensing quantitative changeization.The delay of different signals has determined the coding of each transducer, and the value of the frequency of resonance signal has reflected the size of sensing amount.
6. when the inquiry transducing signal, computer is according to the working band of each resonator in the system, and control can be regulated local oscillator.In a polling cycle, the frequency of the request signal that control produces is in system in the working band of a resonator.In Fig. 9, system shown in Figure 10, the frequency of request signal is exactly the frequency of local oscillator; In system shown in Figure 11, the fixing frequency sum of local oscillator and adjustable local oscillator exactly.In the receiving cycle of correspondence, the echo-signal that receives covers the resonator of this frequency from working band.
7. in next polling cycle, can keep launching the request signal of this frequency, all working produces response at the transducer of this Frequency point so, but the response time delay of each transducer has nothing in common with each other, and can determine the value of the different sensors of same frequency according to the difference of delayed response; Also can control and produce new frequency sweep request signal, this frequency is the change of resonance frequency that causes owing to the sensing quantitative changeization for following the tracks of, and therefore, request signal is the signal that frequency, phase place and an amplitude are all changing.
8. computer can be in a plurality of polling cycles, and order produces the request signal of different frequency, catch and obtain the sensing response of all the sensors in multisensor or the sensor array; Also several polling cycles continuously only produce the request signal of same frequency, obtain near the sensing response of the transducer fixed frequency point.
The advantage of native system is: transducer adopts low-loss resonator type surface acoustic wave device and SAW (Surface Acoustic Wave) delay line to combine, and uses intermittently signal excitation of psk signal intermittently or other.Its echo-signal is the special P SK oscillator signal that all changes of one that postpone, amplitude and phase place or the oscillator signal of other type, the centre frequency of its oscillator signal directly reflects the natural frequency of temperature variant resonator type surface acoustic wave device, and the psk signal that the oscillator signal generation postpones can be encoded, receiving system can be distinguished out the value of the sensing amount of different sensors according to the echo delay coding difference of different transducers and the variation of natural frequency.Therefore, this system existing resonant mode passive and wireless sensor distance advantage far away has the extensive strong point of encoding of delaying type again, can realize that large scale array distributes and longer-distance measurement.
Description of drawings
Fig. 1 is for existing signal inquiry, the reception that typically is used for passive and wireless sound surface probe gathered, the treatment system theory diagram.
Fig. 2 is the coding resonant transducer or the typical isolating construction figure of identifier unit of native system transducing part;
Fig. 3 and Fig. 4 are the transducing part coding resonant transducer of native system or the single chip architecture figure of identifier unit;
Fig. 5, Fig. 6, Fig. 7 and Fig. 8 are the various overall structure schematic diagrames of native system;
Fig. 9 is the structure chart of native system signal reception with a kind of implementation of processing section.
Figure 10 is the structure chart of native system signal reception with the another kind of implementation of processing section.
Figure 11 is the structure chart of native system signal reception with a kind of optimum implementation of processing section.
Embodiment
Embodiment 1: realize passive and wireless multi-point temp sensing with SAW (Surface Acoustic Wave) resonator and delay line that spatial spreading distributes.
Adopt Fig. 2, Fig. 5 and structure shown in Figure 11, select for use resonance frequency to be distributed in the SAW (Surface Acoustic Wave) resonator of amateur radio band 433MHz as temperature-sensing element (device).Changes between-10 ℃-200 ℃ if measure temperature, with interior variation, so the frequency separation when this launches is 432.7MHz-433.3MHz to the resonance frequency that will cause resonator at 300KHz.It is the psk signal excitation of 2ms that pumping signal adopts the resting period, and transducer with 50 identical SAW (Surface Acoustic Wave) resonator as senser, the port of each resonator is connected with antenna by delay line 1-delay line 50 and the matching network of difference time of delays.In this system, fixedly to select resonance frequency for use be the quartz-crystal resonator of 432MHz to local oscillator, adjustable local oscillator is a numerical frequency source, select NI5401 16MHz pci interface function generator for use, insert in PIII 600 personal computers, the sine wave freuqency of its output is adjustable continuously in 0 to 16MHz, and actual is arrived the 1.5MHz range regulation 0.A/D converter is selected NI5102 20Ms/s pci interface digitizer for use, inserts in the above-mentioned personal computer.The passband of band pass filter is that 430MHz is to 440MHz; The passband of low pass filter is 0 to 2MHz.Power amplifier is selected Max2601 DC-1GHZ+30dbm power amplifier for use, and switch is selected the two switches of putting of 0-500MHz hilted broadsword for use, and radio frequency is put device and selected Max 2650 DC-microwave section low noise amplifiers for use.
Embodiment 2: the surface acoustic wave sensor array of wireless inquiry
Adopt Fig. 3, Fig. 6 and structure shown in Figure 11, on same piezoelectric substrate, the subregion makes has the resonator of different resonance frequencys and the delay line of different time of delays.These resonance frequencys have certain frequency interval each other.The delayed line of the port of all these resonators with link to each other with common antenna.In this system, fixedly the frequency of oscillation of local oscillator is chosen as greater than (perhaps less than) all resonant frequencies.Adjustable local oscillator is the numerical frequency source of a frequency adjustable, and the adjustable local oscillator of computer control is caught the reflex response of all resonators to the sinusoidal signal at intermittence automatically.
Claims (8)
1. resonance encode type passive wireless acoustic surface wave array sensor system comprises transducing part and signal inquiry, reception and processing section, it is characterized in that:
Transducing part is made of SAW (Surface Acoustic Wave) resonator and the delay line of different time of delays, the resonance frequency of SAW (Surface Acoustic Wave) resonator is to be distributed on the identical or different Frequency point, the delay line of different time of delays constitutes a plurality of transducers or the identifier unit that a plurality of different codings are arranged, these transducers or identifier unit are to be placed on the same or different locus, thereby constitute transducing part; This resonator can separate with delay line, also can be incorporate structure; The heat transfer agent of this transducer is by the resonance frequency decision of resonator, and the encoded radio of transducer is by decision time of delay of the delayed line-resonator of pumping signal-echo-signal that delay line produced; Signal inquiry, reception and processing section are the adjustable local oscillators of output interface connection by computer, this adjustable local oscillator connects power amplifier successively, receives transmit button and antenna, send request signal, the echo of request signal inserts computer via antenna with after sending receiving key input radio frequency amplifier, filter and A/D converter, computer obtains transducing signal and code signal after signal is carried out denoising.
2. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 1 is characterized in that described each transducer or identifier unit be made up of the SAW (Surface Acoustic Wave) resonator and the passive device that separate.
3. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 2 is characterized in that described each transducer or identifier unit are to be linked to each other with antenna by SAW (Surface Acoustic Wave) resonator, delay line to constitute.
4. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 1 and 2 is characterized in that described each transducer or identifier unit are to be linked to each other with antenna and constituted by SAW (Surface Acoustic Wave) resonator, passive impedance coupling adaptation, delay line.
5. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 1 is characterized in that described each transducer or identifier unit are the single chip architectures that processes on a substrate.
6. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 1, the echo that it is characterized in that request signal is behind radio frequency amplifier, also connect fixedly a local oscillator and a frequency mixer, connect low pass filter, amplifier, A/D converter more successively, at last to inserting computer.
7. resonance encode type passive wireless acoustic surface wave array sensor system according to claim 6 is characterized in that also being connected to a frequency mixer at adjustable local oscillator output, and fixedly local oscillator is connected between two frequency mixers.
8. according to claim 1,6 or 7 described resonance encode type passive wireless acoustic surface wave array sensor systems, it is characterized in that described A/D changes it and replaced by the shaping circuit sum counter, the output that shaping circuit produces is as the input of timing, counter circuit, perhaps as clock signal, perhaps as gate-control signal, the output of counter is connected to computer at last.
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| CN100342221C (en) * | 2005-12-01 | 2007-10-10 | 上海交通大学 | Pure passive wireless automatic meter recording system using sound surface wave technology |
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| CN101894451B (en) * | 2009-05-21 | 2013-10-16 | 晨星软件研发(深圳)有限公司 | Passive remote control unit and remote control method |
| CN102185360A (en) * | 2011-02-25 | 2011-09-14 | 常州市盈能电气有限公司 | High-voltage charged display locking device |
| CN102403981B (en) * | 2011-11-09 | 2014-07-23 | 武汉烽火富华电气有限责任公司 | Resonance type surface acoustic wave passive wireless array sensing system and method thereof |
| CN103024938B (en) * | 2012-12-14 | 2015-06-24 | 桂林电子科技大学 | Encoding structure and identification method for passive wireless sensor network nodes |
| CN104639670B (en) * | 2015-02-10 | 2017-12-26 | 重庆大学 | The passive resonant sensor structure and addressing method of inquiry can wirelessly be addressed |
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| CN104965542B (en) * | 2015-07-08 | 2017-08-11 | 南京科睿博电气科技有限公司 | Passive wireless temperature measuring device containing manager |
| CN105608400B (en) * | 2016-01-08 | 2018-05-22 | 劭行（苏州）智能科技有限公司 | Surface acoustic wave wireless sensor reading device and implementation method |
| CN106656097A (en) * | 2016-12-30 | 2017-05-10 | 扬州大学 | Distributed parameter sensing method based on acoustic surface wave sensors |
| CN107024302B (en) * | 2017-04-10 | 2019-05-17 | 雅泰歌思（上海）通讯科技有限公司 | A kind of delay line type array of saw sensors |
| CN107192472A (en) * | 2017-08-02 | 2017-09-22 | 武汉泽塔电气科技有限公司 | A kind of SAW Temperature Sensors |
| CN110687699A (en) * | 2019-09-29 | 2020-01-14 | 深圳力策科技有限公司 | Manufacturing method of adjustable optical phase array and adjustable optical phase array |
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