CN116288685B

CN116288685B - Automatic growth and transfer system and method for two-dimensional material

Info

Publication number: CN116288685B
Application number: CN202310292282.6A
Authority: CN
Inventors: 王瑞; 莫琴
Original assignee: Wuhan Shiwei Photoelectric Technology Co ltd
Current assignee: Wuhan Shiwei Photoelectric Technology Co ltd
Priority date: 2023-03-23
Filing date: 2023-03-23
Publication date: 2023-08-22
Anticipated expiration: 2043-03-23
Also published as: CN116288685A

Abstract

The invention discloses a two-dimensional material automatic growth transfer system and a method, which relate to the technical field of crystal material growth, wherein the system comprises: a vacuum tube sealing machine; a high temperature plasma sintering device; quartz tube filled with raw material; a high temperature furnace; the tube taking device is used for transferring the quartz tube subjected to sintering tube sealing to a high-temperature furnace for heating growth; separating the adhesive tape; the first material taking robot is used for pouring the crystal materials which are grown in the quartz tube in the high-temperature furnace onto the separation adhesive tape; the first and second glue tearing driving devices are used for driving two ends of the separation adhesive tape to adhere or separate so as to tear the crystal material into a thin layer sample; and the transfer component is used for driving the target substrate to be contacted with the thin layer sample on the separation adhesive tape so as to transfer the thin layer sample onto the target substrate. The system disclosed by the invention can solve the technical problems of potential safety hazard, poor applicability and lower efficiency of the crystal material in a series of operation processes of tube sealing, packaging, growing and transferring.

Description

Automatic growth and transfer system and method for two-dimensional material

Technical Field

The invention relates to the technical field of crystal material growth, in particular to a two-dimensional material automatic growth and transfer system and a two-dimensional material automatic growth and transfer method.

Background

The crystal material determines the crystal performance, the crystal performance determines the crystal application, and along with the rapid increasing demands of advanced electronic materials, semiconductor material devices and application markets, a vacuum tube sealing process is required to be adopted for growth and preparation of high-quality and high-performance crystal materials.

The traditional tube sealing process is a manual rotary heater, a heat source for burning inflammable and explosive gases (such as hydrogen, oxygen, acetylene, methane and the like) is used for heating a tube to seal, and the gas is used for burning a high-temperature molten workpiece (i.e. the tube loaded with crystal materials) to further achieve the sealing purpose; in addition, the pipe fitting temperature after high-temperature combustion is extremely high, the pipe fitting must be manually detached one by one after an operator wears the protective tool so as to be transferred to a pipe furnace for CVT constant temperature, variable temperature and temperature control growth, and the transfer operation must be manually performed after the crystal material is grown, so that the crystal material is converted into a two-dimensional material and is attached to a substrate, and finally, the finished product of the electronic device is formed; the process flow has low efficiency and inconvenient operation, and is not beneficial to the mass production of two-dimensional material electronic devices.

Disclosure of Invention

In order to overcome the defects in the prior art, the invention aims to provide a two-dimensional material automatic growth and transfer system, which aims to solve the technical problems of potential safety hazard, poor applicability and lower efficiency in a series of operation processes of sealing, packaging, growing and transferring a traditional crystal material.

The invention adopts the following technical scheme to achieve the aim of the invention:

a two-dimensional material automated growth transfer system, the two-dimensional material automated growth transfer system comprising:

the vacuum tube sealing machine is provided with a vacuumizing tube mechanism and a plurality of tube interfaces which are vertically arranged, the left end part of the vacuum tube sealing machine is rotationally connected with the upper end of the first side frame, and the right end part of the vacuum tube sealing machine is rotationally connected with the upper end of the second side frame; the lower ends of the first side frame and the second side frame are fixed on the base;

the high-temperature plasma sintering device is connected between the first side frame and the second side frame in a sliding manner;

the quartz tubes are loaded with raw materials, and each quartz tube is screwed on the tube interfaces in a one-to-one correspondence manner;

the high-temperature furnace is arranged on the base and is used for heating the quartz tube placed in the high-temperature furnace;

The tube taking device is arranged on the base and used for clamping the quartz tube on the tube interface so as to transfer the quartz tube into the high-temperature furnace;

separating the adhesive tape;

the first material taking robot is used for taking the quartz tube out of the high-temperature furnace and pouring the grown crystal material in the quartz tube onto the separation rubber strip;

the first adhesive tearing driving device is connected with one end of the separation adhesive tape;

the second adhesive tearing driving device is connected with the other end of the separation adhesive tape; the second adhesive tearing driving device is used for being close to or far away from the first adhesive tearing driving device so as to drive the two ends of the separation adhesive tape to adhere or separate, and therefore the crystal material is torn into a thin-layer sample;

and the transfer assembly is used for driving the target substrate to be in contact with the thin layer sample on the separation adhesive tape so as to transfer the thin layer sample onto the target substrate.

Further, the two-dimensional material automatic growth transfer system further comprises a standing seat, a folding driving device and a glue collecting mechanism; wherein:

an annular chute and a transverse chute are formed in the vertical surface of the vertical seat, and the annular chute is arranged around the transverse chute; the first glue tearing driving device and the second glue tearing driving device are connected in the annular chute in a sliding manner, and the folding driving device is connected in the transverse chute in a sliding manner; the second glue tearing driving device is provided with a glue roller, one end of the separation glue strip is led out from the glue roller, the middle part of the separation glue strip is connected to the first glue tearing driving device, and the other end of the separation glue strip is wound on the glue collecting mechanism; the folding driving device is provided with a telescopic rod which is used for contacting with one side surface of the separation adhesive tape; the second glue tearing driving device is used for sliding along the annular chute so as to drive the separation glue strip to fold around the telescopic rod.

Further, the first adhesive tearing driving device is provided with a first sliding end and a first clamping end, and the second adhesive tearing driving device is provided with a second sliding end and a second clamping end; the first sliding end is slidably connected with the second sliding end in the annular sliding groove, the first clamping end is rotatably connected to the first sliding end along the horizontal axial direction, the second clamping end is rotatably connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape, and the first clamping end is used for clamping the middle part of the separation adhesive tape.

Further, the transfer assembly comprises a slide storage cabin, a second material taking robot, a slide jig, a lifting sliding block, a lifting guide rail, a heating table, a substrate storage cabin and a third material taking robot; wherein:

the slide jig is rotationally connected to the lifting slide block along the horizontal axis, and the lifting slide block is slidingly connected to the lifting guide rail along the vertical direction; the slide jig is positioned below the separation adhesive tape, and the slide jig is positioned above the heating table;

the second material taking robot is used for grabbing the carrier glass in the glass storage cabin and is fixed on the glass jig; a polydimethylsiloxane layer is arranged on the carrier glass;

The third material taking robot is used for grabbing a target substrate in the substrate storage cabin and is fixed on the heating table; the heating table is used for heating the target substrate.

Further, an inner bushing is sleeved on the pipe orifice of the quartz pipe, a sealing ring is arranged between the outer pipe wall of the quartz pipe and the inner bushing, a quick-release threaded pipe joint is sleeved on the inner bushing, and a gear part is arranged around the outer wall of the quick-release threaded pipe joint; the quartz tubes are screwed on the tube interfaces in a one-to-one correspondence manner through the quick-release threaded tube connectors;

the tube taking device comprises a lifting driving mechanism, a rotary driving mechanism and a connecting arm; the lifting driving mechanism is arranged on the base; the rotary driving mechanism is arranged on the movable part of the lifting driving mechanism; one end of the connecting arm is arranged on the movable part of the rotary driving mechanism, the other end of the connecting arm is provided with a plurality of transfer mechanisms, and the transfer mechanisms are arranged in one-to-one correspondence with the quartz tubes; the upper end of each transfer mechanism is provided with a driving gear which is used for being meshed with the gear parts of the quick-release threaded pipe joint in a one-to-one correspondence manner; the lower end of each transfer mechanism is provided with a first clamping jaw and a second clamping jaw, the first clamping jaws and the second clamping jaws are sequentially arranged at intervals along the vertical downward direction, and the first clamping jaws and the second clamping jaws are used for clamping the corresponding quartz tubes;

The high-temperature furnace comprises a high-temperature furnace body, a cover body, a fixed seat, a first rotary driving device and a second rotary driving device; the fixed seat is connected to the base, the high-temperature furnace body is rotatably connected to the fixed seat, the rotation central shaft of the high-temperature furnace body is horizontally arranged, the fixed part of the first rotary driving device is connected to the fixed seat, and the movable part of the first rotary driving device is connected to the high-temperature furnace body; the first rotary driving device is used for driving the high-temperature furnace body to rotate relative to the fixed seat;

a tube body jig is arranged in the high-temperature furnace body, and a plurality of tubular accommodating grooves for accommodating the quartz tubes are formed in the tube body jig; the cover body is hinged to the high-temperature furnace body, a hinged central shaft of the cover body is vertically arranged, a fixed part of the second rotary driving device is connected to the high-temperature furnace body, and a movable part of the second rotary driving device is connected to the cover body; the second rotary driving device is used for driving the cover body to cover the pipe body jig so as to press the quartz pipes into the corresponding tubular accommodating grooves.

Further, a first screw rod which is vertically arranged is arranged on the first side frame, and a second screw rod which is vertically arranged is arranged on the second side frame; one end of the first screw rod is connected with a first motor, and a first movable table is connected to the first screw rod in a sliding manner; one end of the second screw rod is connected with a second motor, and a second movable table is connected to the second screw rod in a sliding manner; one end of a third screw rod penetrates through the first movable table and is connected with a third motor, and the other end of the third screw rod is rotatably connected to the second movable table; a third movable table is connected to the third screw rod in a sliding manner; a fourth movable table is connected to the third movable table in a sliding manner along a first horizontal path, wherein the first horizontal path is perpendicular to the extending direction of the third screw rod;

the high-temperature plasma sintering device is arranged on the fourth movable table; the high-temperature plasma sintering device is provided with a shaft pin, two groups of clamping plates are hinged to the shaft pin, a high-temperature plasma emission welding gun is clamped between the two groups of clamping plates, and a locking bolt is arranged between the two groups of clamping plates; the high-temperature plasma PLC control platform is arranged on the first side plate and connected with the high-temperature plasma emission welding gun through a connecting pipe.

Correspondingly, the invention also provides a two-dimensional material automatic growth transfer method which is applied to the two-dimensional material automatic growth transfer system; the two-dimensional material automatic growth transfer method comprises the following steps:

vacuumizing the vacuum tube sealing machine; starting a vacuumizing pipe machine, slowly unscrewing a shunt vacuumizing control valve so as to prevent raw materials in the quartz tube from being extracted, slowly unscrewing a main flow vacuumizing control valve after the pressure is expressed to a negative pressure value of-1 bar, screwing the shunt vacuumizing control valve, checking the vacuumizing degree number on a panel of a molecular pump group, and screwing the main flow vacuumizing control valve after the target high-vacuum degree value is reached;

charging a protective gas; inserting an inflation tube of the inflation equipment into an inflation port of a vacuum tube sealing machine, slowly unscrewing an inflation port control valve, and rapidly closing the inflation port control valve when a pointer of a pressure gauge points to a negative pressure intermediate value of-0.6 bar;

sealing the quartz tube; installing a high-temperature plasma emission welding gun on the high-temperature plasma sintering device, unscrewing a regulating valve of the high-temperature plasma emission welding gun, unscrewing a plasma power switch, igniting the high-temperature plasma emission welding gun, and aligning the high-temperature plasma emission welding gun to the necking part of the quartz tube for sintering and tube sealing operation; when the tube walls of the quartz tubes are sintered and fused together, the tube sealing operation is completed, and the regulating valve of the high-temperature plasma emission welding gun is immediately screwed up to stop sintering;

Clamping the quartz tube sealed on the tube interface through the tube taking device so as to transfer the quartz tube into the high-temperature furnace;

starting the high-temperature furnace, and heating the quartz tube according to a preset temperature program curve so as to enable raw materials in the quartz tube to grow;

taking the quartz tube out of the high-temperature furnace through the first material taking robot, and pouring the grown crystal material in the quartz tube onto the separation rubber strip;

controlling the second glue tearing driving device to be close to the first glue tearing driving device, and controlling the second glue tearing driving device to be far away from the first glue tearing driving device so as to drive the two ends of the separation adhesive tape to be torn after being bonded, so that the crystal material is torn into a thin-layer sample;

the target substrate is driven into contact with the thin layer sample on the separation gel strip by the transfer assembly to transfer the thin layer sample onto the target substrate.

Further, the two-dimensional material automatic growth transfer system further comprises a standing seat, a folding driving device and a glue collecting mechanism; an annular chute and a transverse chute are formed in the vertical surface of the vertical seat, and the annular chute is arranged around the transverse chute; the first glue tearing driving device and the second glue tearing driving device are connected in the annular chute in a sliding manner, and the folding driving device is connected in the transverse chute in a sliding manner; the second glue tearing driving device is provided with a glue roller, one end of the separation glue strip is led out from the glue roller, the middle part of the separation glue strip is connected to the first glue tearing driving device, and the other end of the separation glue strip is wound on the glue collecting mechanism; the folding driving device is provided with a telescopic rod;

The control the second tears gluey drive arrangement and is close to first tearing gluey drive arrangement, the recontrolling the second tears gluey drive arrangement and keeps away from first tearing gluey drive arrangement, so as to drive tear after the both ends bonding of separation adhesive tape, thereby will the step of crystalline material tear into the thin layer sample, include:

the second glue tearing driving device is controlled to slide anticlockwise along the annular sliding groove, the telescopic rod is simultaneously led to extend out of the upper side of the separation adhesive tape, and the second glue tearing driving device is controlled to slide rightwards along the transverse sliding groove so as to drive the separation adhesive tape to fold by taking the telescopic rod as an axis until the upper side surface and the lower side surface of the crystal material are adhered with the separation adhesive tape;

and controlling the second glue tearing driving device to slide clockwise along the annular chute so as to tear the crystal material into a thin layer sample positioned on the left side of the telescopic rod.

Further, the first adhesive tearing driving device is provided with a first sliding end and a first clamping end, and the second adhesive tearing driving device is provided with a second sliding end and a second clamping end; the first sliding end and the second sliding end are in sliding connection with the annular chute, the first clamping end is rotationally connected to the first sliding end along the horizontal axial direction, the second clamping end is rotationally connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape, and the first clamping end is used for clamping the middle part of the separation adhesive tape;

The transfer assembly comprises a slide storage cabin, a second material taking robot, a slide jig, a lifting sliding block, a lifting guide rail, a heating table, a substrate storage cabin and a third material taking robot; the slide jig is rotationally connected to the lifting slide block along the horizontal axis, and the lifting slide block is slidingly connected to the lifting guide rail along the vertical direction; the slide jig is positioned below the separation adhesive tape, and the slide jig is positioned above the heating table; the slide storage cabin is internally stored with a carrier slide, and a polydimethylsiloxane layer is arranged on the carrier slide; the substrate storage cabin stores a target substrate;

the step of driving the target substrate into contact with the thin layer sample on the separation gel strip by the transfer assembly to transfer the thin layer sample onto the target substrate comprises the steps of:

rotating the first clamping end and the second clamping end so that the thin layer sample faces downwards;

the second material taking robot is used for grabbing a carrier slide in the slide storage cabin and fixing the carrier slide on the slide jig, and controlling the slide jig to rotate so that the polydimethylsiloxane layer faces upwards;

Controlling the lifting slide block to lift along the lifting guide rail so as to enable the polydimethylsiloxane layer to be attached to the thin-layer sample;

controlling the lifting slide block to descend along the lifting guide rail so as to enable the thin layer sample to be adhered and transferred onto the polydimethylsiloxane layer;

controlling the slide jig to rotate so that the polydimethylsiloxane layer faces downwards;

grabbing a target substrate in the substrate storage cabin through the third material taking robot, fixing the target substrate on the heating table, and controlling the lifting sliding block to descend along the lifting guide rail until the thin layer sample is attached to the target substrate;

heating the target substrate by the heating table to separate the thin layer sample from the polydimethylsiloxane layer;

and controlling the lifting sliding block to lift along the lifting guide rail, so that the separated thin layer sample is left on the target substrate.

Further, after the step of controlling the lifting slider to descend along the lifting rail to adhesively transfer the thin layer sample onto the polydimethylsiloxane layer, the method comprises:

controlling the first clamping end and the second clamping end to rotate 180 degrees;

And driving the glue collecting mechanism to wind and collect the separation adhesive tape.

Compared with the prior art, the invention has the beneficial effects that:

according to the two-dimensional material automatic growth transfer system provided by the invention, high-temperature plasma is used as a heat source of the sintered quartz tube, so that the vacuum tube sealing operation is performed, the safety risk existing in the traditional tube sealing mode can be effectively avoided, the occurrence of safety accidents is avoided, the tube sealing is more efficient and stable, and the environmental protection and energy saving effects are achieved; in addition, a tube taking device is arranged between the vacuum tube sealing machine and the high-temperature furnace, so that the disassembly and transfer operation of the quartz tubes after sintering tube sealing is realized in a full-automatic mode, and a plurality of quartz tubes loaded with raw materials can be quickly transferred into the high-temperature furnace for heating growth operation after the vacuum tube sealing is finished; after the raw materials grow into crystalline materials, the crystalline materials are transferred to a separation adhesive tape by using a first material taking robot, the crystalline materials are torn by matching a first adhesive tearing driving device with a second adhesive tearing driving device to obtain two-dimensional materials, and finally, a target substrate is driven by a transfer assembly to be automatically attached to the two-dimensional materials, so that the two-dimensional materials are separated from the separation adhesive tape and are attached to the target substrate, and the transfer of the two-dimensional materials is realized; the whole process does not need manual intervention, and the pipe sealing, packaging, growing and transferring processes of the two-dimensional materials are realized in an automatic mode, so that the working efficiency is greatly improved, the potential safety hazard is reduced, the automation and the intelligent degree of equipment are also improved, and the equipment foundation is provided for the mass production of the two-dimensional material electronic devices.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view showing a first state structure of a tube sealing growth part in an embodiment of an automatic two-dimensional material growth transfer system according to the present invention;

FIG. 2 is a schematic diagram showing a second state of a tube sealing growth part in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 3 is a schematic view showing a third state of a tube sealing growth part in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 4 is a schematic view showing a structure of a tube sealing growth part in a two-dimensional material automatic growth transfer system according to a fourth embodiment of the present invention;

FIG. 5 is a schematic view showing a structure of a tube sealing growth part in a fifth state in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 6 is a schematic view showing a structure of a tube sealing growth part in a sixth state in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 7 is a schematic view showing a seventh state of a tube sealing growth part in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 8 is a schematic diagram of the structure of a quartz tube in the two-dimensional material automatic growth transfer system of the present invention;

FIG. 9 is a schematic top view of the relative positions of the arcuate cavity and the second jaw in the two-dimensional material automatic growth transfer system of the present invention;

FIG. 10 is a schematic view showing a first state of a transfer portion of an embodiment of the two-dimensional material automatic growth transfer system of the present invention;

FIG. 11 is a schematic diagram showing a second state of a transfer portion of an embodiment of the two-dimensional material automatic growth transfer system of the present invention;

FIG. 12 is a schematic view showing a third state of a transfer portion of an embodiment of the two-dimensional material automatic growth transfer system of the present invention;

FIG. 13 is a schematic view showing a structure of a transfer portion in a fourth state in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 14 is a schematic view showing a structure of a transfer portion in a fifth state of an embodiment of the two-dimensional material automatic growth transfer system according to the present invention;

FIG. 15 is a schematic view showing a structure of a transfer portion in a sixth state in an embodiment of the two-dimensional material automatic growth transfer system according to the present invention.

Reference numerals illustrate:

Reference numerals	Name of the name	Reference numerals	Name of the name
				1	Vacuum tube sealing machine	29	Lifting guide rail
2	First side frame	30	Substrate storage compartment
				3	Second side frame	31	Third material taking robot
4	Base seat	32	Heating table
				5	High-temperature plasma sintering device	101	Vacuum tube mechanism
6	Quartz tube	102	Pipe joint
				7	Lifting driving mechanism	201	First screw rod
8	Rotary driving mechanism	202	First movable table
				9	Connecting arm	203	Third screw rod
10	Driving gear	204	Third movable table
				11	First clamping jaw	205	Fourth movable table
12	Second clamping jaw	206	High-temperature plasma PLC control table
				13	Fixing seat	301	Second screw rod
14	High temperature furnace body	302	Second movable table
				15	Pipe jig	601	Quick-release threaded pipe joint
16	Cover body	602	Inner lining
				17	Stand seat	603	Sealing ring
18	Separation adhesive tape	1501	Tubular accommodating groove
				19	First material taking robot	1502	Arc-shaped concave cavity
20	First adhesive tearing driving device	1701	Annular chute
				21	Second glue tearing driving device	1702	Transverse chute
22	Crystalline material	2201	Thin layer sample
				23	Folding driving device	2301	Telescopic rod
24	Glue collecting mechanism	2401	Driving roller
				25	Slide storage cabin	2501	Carrier glass
26	Second material taking robot	3001	Target substrate
				27	Slide jig	6011	Gear part
28	Lifting slideBlock and method for manufacturing the same

The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

It should be noted that, if a directional indication (such as up, down, left, right, front, and rear … …) is involved in the embodiment of the present invention, the directional indication is merely used to explain the relative positional relationship, movement condition, etc. between the components in a specific posture, and if the specific posture is changed, the directional indication is correspondingly changed.

In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, if "and/or" and/or "are used throughout, the meaning includes three parallel schemes, for example," a and/or B "including a scheme, or B scheme, or a scheme where a and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.

Referring to fig. 1 to 15, an embodiment of the present invention provides a two-dimensional material automatic growth transfer system including:

the vacuum tube sealing machine 1 is provided with a vacuumizing tube mechanism 101 and a plurality of tube interfaces 102 which are vertically arranged, the left end part of the vacuum tube sealing machine 1 is rotationally connected with the upper end of the first side frame 2, and the right end part of the vacuum tube sealing machine 1 is rotationally connected with the upper end of the second side frame 3; the lower ends of the first side frame 2 and the second side frame 3 are fixed on the base 4;

the high-temperature plasma sintering device 5 is connected between the first side frame 2 and the second side frame 3 in a sliding manner;

a plurality of quartz tubes 6 loaded with raw materials, each quartz tube 6 being screwed on the plurality of tube interfaces 102 in a one-to-one correspondence;

the high-temperature furnace is arranged on the base 4 and is used for heating the quartz tube 6 placed in the high-temperature furnace according to a preset temperature program curve so that the raw materials in the quartz tube 6 grow at a high temperature to form a crystal material 22; since different crystal materials 22 need to be grown at different temperatures and temperature zones, the high-temperature furnace can be correspondingly provided with a single temperature zone, a double temperature zone or a plurality of temperature zones in order to meet the dynamic and thermodynamic requirements of the growth of the different crystal materials 22;

The tube taking device is arranged on the base 4 and is used for clamping the quartz tube 6 on the tube interface 102 so as to transfer the quartz tube 6 into the high-temperature furnace; since the quartz tube 6 is generally connected to the tube joint 102 by means of threaded connection, the tube taking device can clamp the quartz tube 6 by means of a mechanical arm and other devices, and then rotate reversely to detach the quartz tube 6 from the tube joint 102;

a separation gel strip 18; specifically, a 3M tape may be used;

the first material taking robot 19, the first material taking robot 19 is used for taking the quartz tube 6 out of the high temperature furnace, pouring the grown crystal material 22 in the quartz tube 6 onto the separating adhesive tape 18, and sticking the crystal material 22Attached to the separation gel strip 18; wherein the crystalline material 22 includes, but is not limited to, moS ₂ Graphene, mica flakes;

the first adhesive tape tearing driving device 20 is connected with one end of the separation adhesive tape 18 in a clamping, winding, bonding and other modes;

a second adhesive tape tearing driving device 21 connected with the other end of the separation adhesive tape 18 in a clamping, winding, bonding and other modes; the second adhesive tape driving device 21 may be close to the first adhesive tape driving device 20 to drive two ends of the separation adhesive tape 18 to be folded in half, so that two opposite side surfaces of the crystal material 22 are adhered to the separation adhesive tape 18, and then the second adhesive tape driving device 21 is controlled to be rapidly far away from the first adhesive tape driving device 20, so that two adhered ends of the separation adhesive tape 18 are rapidly separated, that is, van der Waals force inside the crystal material 22 is broken through by using adhesive force of the separation adhesive tape 18, and the crystal material 22 is torn into a thin layer sample 2201; wherein the thin layer sample 2201 is a two-dimensional material with specific physical and chemical properties;

A transfer member to which the target substrate 3001 is fixed, the transfer member being for driving the target substrate 3001 into contact with the thin layer sample 2201 on the separation gel strip 18 so as to transfer the thin layer sample 2201 onto the target substrate 3001; the transfer assembly includes, but is not limited to, a power device and a transmission mechanism used in a matched manner, the target substrate 3001 can be pre-fixed on the transmission mechanism so as to be in contact with the thin layer sample 2201 on the separation adhesive tape 18 under the driving of the power device, and the thin layer sample 2201 can be separated from the separation adhesive tape 18 and attached to the target substrate 3001 by heating or the like; it is understood that the contact of the target substrate 3001 with the thin layer sample 2201 may be direct contact or may be transferred by a medium, which is not limited herein.

In a specific implementation process, after a plurality of quartz tubes 6 filled with raw materials are installed on a tube joint 102, the quartz tubes 6 can be vacuumized through a vacuumizing tube mechanism 101 so as to reduce or remove various harmful gases (including nitrogen, hydrogen, oxygen and the like) and moisture content in the quartz tubes 6 and provide an anhydrous and anaerobic vacuum environment for crystal growth; after the vacuumizing is finished, protective gas can be filled into the quartz tube 6 through an inflation device, so that the safety in the tube sealing operation process is further improved; then, the high-temperature plasma sintering device 5 positioned below the vacuum tube sealing machine 1 can be controlled to move to a preset position of the quartz tube 6 (the high-temperature plasma sintering device 5 can move in three-coordinate directions by means of a screw rod sliding block mechanism between the first side frame 2 and the second side frame 3) for sintering, so that necking operation and melting operation of the quartz tube 6 are sequentially completed. After the sintering and melting operation of the quartz tube 6 is completed, the subsequent operations of growth (heating in a high-temperature furnace) and transfer (transferring the two-dimensional material onto the target substrate 3001) can be performed.

Therefore, the two-dimensional material automatic growth transfer system provided by the embodiment adopts high-temperature plasma as a heat source of the sintered quartz tube 6, so that the vacuum tube sealing operation is carried out, the safety risk existing in the traditional tube sealing mode can be effectively avoided, the occurrence of safety accidents is avoided, the tube sealing is more efficient and stable, and the environmental protection and energy saving effects are achieved; in addition, by arranging a tube taking device between the vacuum tube sealing machine 1 and the high-temperature furnace, the disassembly and transfer operation of the quartz tubes 6 after sintering tube sealing is completed is realized in a full-automatic mode, so that a plurality of quartz tubes 6 loaded with raw materials can be quickly transferred into the high-temperature furnace for heating growth operation after the vacuum tube sealing is completed; after the raw materials grow into crystalline materials 22, the crystalline materials 22 are transferred to the separating adhesive tape 18 by using a first material taking robot 19, the crystalline materials 22 are torn by matching a first adhesive tearing driving device 20 with a second adhesive tearing driving device 21 to obtain two-dimensional materials, and finally, a target substrate 3001 is driven by a transfer component to be automatically attached to the two-dimensional materials, so that the two-dimensional materials are separated from the separating adhesive tape 18 and attached to the target substrate 3001, and the transfer of the two-dimensional materials is realized; the whole process does not need manual intervention, and the pipe sealing, packaging, growing and transferring processes of the two-dimensional materials are realized in an automatic mode, so that the working efficiency is greatly improved, the potential safety hazard is reduced, the automation and the intelligent degree of equipment are also improved, and the equipment foundation is provided for the mass production of the two-dimensional material electronic devices.

Optionally, referring to fig. 10 to 15, the two-dimensional material automatic growth transfer system further includes a stand 17, a folding driving device 23, and a glue receiving mechanism 24; wherein:

the vertical surface of the vertical seat 17 is provided with an annular chute 1701 and a transverse chute 1702, and the annular chute 1701 is arranged around the transverse chute 1702; the first glue driving device 20 and the second glue driving device 21 are connected in the annular chute 1701 in a sliding manner, and the folding driving device 23 is connected in the transverse chute 1702 in a sliding manner; the second adhesive tearing driving device 21 is provided with an adhesive roll, one end of the separation adhesive tape 18 is led out from the adhesive roll, the middle part of the separation adhesive tape 18 is connected to the first adhesive tearing driving device 20, and the other end of the separation adhesive tape 18 is wound on the adhesive collecting mechanism 24; the folding driving device 23 is provided with a telescopic rod 2301, and the telescopic rod 2301 is used for contacting with one side surface of the separation rubber strip 18; the second adhesive tape driving device 21 is used for sliding along the annular chute 1701 so as to drive the separation adhesive tape 18 to fold around the telescopic rod 2301.

Alternatively, referring to fig. 10 to 15, the first adhesive tearing driving device 20 has a first sliding end and a first clamping end, and the second adhesive tearing driving device 21 has a second sliding end and a second clamping end; the first sliding end and the second sliding end are slidably connected in the annular chute 1701, the first clamping end is rotatably connected to the first sliding end along the horizontal axial direction, the second clamping end is rotatably connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape 18, and the first clamping end is used for clamping the middle part of the separation adhesive tape 18.

Alternatively, referring to fig. 10 to 15, the transfer assembly includes a slide storage compartment 25, a second reclaiming robot 26, a slide jig 27, a lifting slider 28, a lifting rail 29, a heating stage 32, a substrate storage compartment 30, and a third reclaiming robot 31; wherein:

slide jig 27 is rotatably connected to lifting slide block 28 along the horizontal axis, lifting slide block 28 is slidably connected to lifting guide rail 29 along the vertical direction; slide jig 27 is located below separation gel strip 18, and slide jig 27 is located above heating table 32;

the second pick-out robot 26 is used to pick up the carrier slide 2501 in the slide storage compartment 25 and fix it on the slide jig 27; a polydimethylsiloxane layer is provided on the carrier slide 2501;

the third pick-up robot 31 is configured to pick up the target substrate 3001 in the substrate storage tank 30 and is fixed to the heating stage 32; the heating stage 32 is used for performing a heating operation on the target substrate 3001.

Illustratively, the first adhesive tape driving device 20 may be fixed to the left side of the annular chute 1701 in the initial state, and a plurality of rollers may be disposed on the first clamping end, so as to wind the separation adhesive tape 18 on the rollers; the second adhesive tape tearing driving device 21 may be located at the right side of the annular chute 1701 in the initial state, and a plurality of rollers may be disposed on the second clamping end, so as to wind the separation adhesive tape 18 on the rollers; the glue collecting mechanism 24 can be provided with a driving roller 2401 so as to wind the separation glue strip 18 on the driving roller 2401; in this way, the part of the separating adhesive tape 18 between the first adhesive tape tearing driving device 20 and the second adhesive tape tearing driving device 21 will keep the flat state shown in fig. 10, and the upper surface of the separating adhesive tape 18 is an adhesive surface, so that the first material taking robot 19 can pour the crystal material 22 growing in the quartz tube 6 to the upper surface of the separating adhesive tape 18 for adhesion and fixation; when the driving roller 2401 on the glue collecting mechanism 24 rotates, the separating glue strip 18 can be pulled to be continuously sent out from the glue roller; when the driving roller 2401 of the glue collecting mechanism 24 stops rotating, the separating glue strip 18 is still between the first and second glue driving devices 20 and 21.

The folding driving device 23 can horizontally slide along the transverse sliding groove 1702 at the position of the separation rubber strip 18, and the telescopic rod 2301 is positioned above the separation rubber strip 18 after extending out; when the first material taking robot 19 pours the grown crystal material 22 in the quartz tube 6 to the upper surface of the side (i.e. left side in the drawing) of the separating adhesive tape 18 near the first adhesive tape driving device 20 (corresponding to the state of fig. 10), the second adhesive tape driving device 21 slides in the counterclockwise direction in the drawing, and the folding driving device 23 slides in the right direction in the drawing so as to move the telescopic rod 2301 in place, so that the separating adhesive tape 18 can fold along with the sliding of the second adhesive tape driving device 21 by taking the telescopic rod 2301 as an axis until the second adhesive tape driving device 21 slides to the first adhesive tape driving device 20, at this time, the side of the separating adhesive tape 18 near the second adhesive tape driving device 21 is also adhered to the upper side of the crystal material 22, i.e. the upper and lower side surfaces of the crystal material 22 are adhered to the separating adhesive tape 18 (corresponding to the state of fig. 11); at this time, the second adhesive tape driving device 21 slides rapidly in the clockwise direction as shown in the drawing to drive the separating adhesive tape 18 to tear to two sides, and under the adhesive force of the separating adhesive tape 18, the crystalline material 22 is separated into a thin layer or a single layer of two-dimensional material.

After the crystalline material 22 is separated, the first and second clamping ends are rotated 180 ° in the same direction to change the two-dimensional material on the separating strip 18 downward, and the telescopic rod 2301 is retracted to avoid interference with the rotating separating strip 18. Then, the second material taking robot 26 grabs the carrier slide 2501 in the slide storage cabin 25, places the carrier slide 2501 on the slide jig 27, and makes a polydimethylsiloxane layer (PDMS) upward, and the slide jig 27 can automatically press and fix the edge of the carrier slide 2501 through a clamping jaw driven by an air cylinder; after the carrier slide 2501 is fixed, the lifting slide block 28 is driven by the power device to lift along the lifting guide rail 29 so as to drive the carrier slide 2501 on the slide jig 27 to lift until the polydimethylsiloxane layer is attached to the upper two-dimensional material (corresponding to the state of fig. 12); optionally, after the polydimethylsiloxane layer is attached to the two-dimensional material above, the attaching position can be pressed by a pressing mechanism with a cotton swab, so that the two-dimensional material is pressed on the polydimethylsiloxane layer; the lifting slide 28 is then driven to rapidly descend to release the two-dimensional material from the release tape 18 and adhere to the polydimethylsiloxane layer.

After the two-dimensional material is transferred onto the polydimethylsiloxane layer by the separation adhesive tape 18, the slide jig 27 is driven by a power device to rotate 180 degrees relative to the lifting slide block 28, so that the polydimethylsiloxane layer adhered with the two-dimensional material faces downwards (corresponding to the state of fig. 13); at this time, the third pick-up robot 31 picks up the target substrate 3001 in the substrate storage tank 30 and places it on the heating stage 32, and the heating stage 32 can suction-fix the target substrate 3001 thereon by the negative pressure device; after the target substrate 3001 is fixed, continuing to drive the lifting slide block 28 to descend along the lifting guide rail 29 until the two-dimensional material on the polydimethylsiloxane layer is attached to the lower target substrate 3001 (corresponding to the state of fig. 14); at this time, the heating stage 32 starts the heating operation (which may be implemented by a heating device built in the heating stage 32, the heating temperature may be set to 70 ℃, and the heating time may be set to 20 min), so as to cure the polydimethylsiloxane layer by heating, and at this time, the lifting slider 28 is driven to lift along the lifting rail 29, so that the polydimethylsiloxane layer is separated from the two-dimensional material, and the two-dimensional material remains on the target substrate 3001 (corresponding to the state of fig. 15), thereby implementing the process flow of converting the crystalline material 22 into the two-dimensional material and the transfer procedure of the two-dimensional material.

It will be appreciated that when the two-dimensional material is separated from the separator strip 18, the active roller 2401 on the take-up mechanism 24 can be rotated to effect the winding recovery of the length of separator strip 18 and pull a new length of separator strip 18 from the roll for subsequent transfer of other crystalline material 22. The two-dimensional materials are separated from the different types of crystal materials 22 in the other quartz tube 6, and can be attached to the same target substrate 3001 in the same manner, namely, superimposed on the surface of the previous two-dimensional material, so that an automatic stacking process of the two-dimensional materials is realized, and more types of two-dimensional material electronic devices can be manufactured.

Alternatively, referring to fig. 1 to 8, an inner bushing 602 is sleeved on the pipe orifice of the quartz pipe 6, a sealing ring 603 is arranged between the outer pipe wall of the quartz pipe 6 and the inner bushing 602, a quick-release threaded pipe joint 601 is sleeved on the inner bushing 602, and a gear part 6011 is arranged around the outer wall of the quick-release threaded pipe joint 601; the quartz tubes 6 are screwed on the tube interfaces 102 in a one-to-one correspondence manner through quick-release threaded tube joints 601;

the tube taking device comprises a lifting driving mechanism 7, a rotary driving mechanism 8 and a connecting arm 9; the lifting driving mechanism 7 is arranged on the base 4; the rotation driving mechanism 8 is arranged on the movable part of the lifting driving mechanism 7; one end of the connecting arm 9 is arranged on the movable part of the rotary driving mechanism 8, the other end of the connecting arm 9 is provided with a plurality of transfer mechanisms, and the plurality of transfer mechanisms are arranged in one-to-one correspondence with the plurality of quartz tubes 6; the upper end of each transfer mechanism is provided with a driving gear 10, and the driving gears 10 are used for being meshed with the gear parts 6011 of the quick-release threaded pipe joint 601 in a one-to-one correspondence manner; the lower end of each transfer mechanism is provided with a first clamping jaw 11 and a second clamping jaw 12, the first clamping jaw 11 and the second clamping jaw 12 are sequentially arranged at intervals along the vertical downward direction, and the first clamping jaw 11 and the second clamping jaw 12 are used for clamping the corresponding quartz tube 6;

The high-temperature furnace comprises a high-temperature furnace body 14, a cover body 16, a fixed seat 13, a first rotary driving device and a second rotary driving device; the fixed seat 13 is connected to the base 4, the high-temperature furnace body 14 is rotatably connected to the fixed seat 13, the rotation center shaft of the high-temperature furnace body 14 is horizontally arranged, the fixed part of the first rotary driving device is connected to the fixed seat 13, and the movable part of the first rotary driving device is connected to the high-temperature furnace body 14; the first rotary driving device is used for driving the high-temperature furnace body 14 to rotate relative to the fixed seat 13;

a tube body jig 15 is arranged in the high-temperature furnace body 14, and a plurality of tubular accommodating grooves 1501 for accommodating the quartz tubes 6 are formed in the tube body jig 15; the cover body 16 is hinged on the high-temperature furnace body 14, the hinged central shaft of the cover body 16 is vertically arranged, the fixed part of the second rotary driving device is connected on the high-temperature furnace body 14, and the movable part of the second rotary driving device is connected on the cover body 16; the second rotation driving device is used for driving the cover 16 to cover the tube fixture 15, so as to press the quartz tubes 6 into the corresponding tubular accommodating grooves 1501.

When the quartz tube 6 is installed, firstly, the sealing ring 603 and the inner bushing 602 are sleeved downwards from the tube orifice of the quartz tube 6 in sequence, then the quick-release threaded tube joint 601 is sleeved upwards from the bottom end of the quartz tube 6 until the quick-release threaded tube joint contacts with the inner bushing 602, and then the quartz tube 6 can be fixed on the vacuum tube sealing machine 1 by screwing the quick-release threaded tube joint 601 on the tube joint 102. The sealing ring 603 can avoid the air leakage and the air leakage at the joint of the quartz tube 6 through the sealing function.

After the quartz tubes 6 are all installed, the vacuumizing operation can be performed on the quartz tubes 6 through the vacuumizing tube mechanism 101 so as to reduce or remove various harmful gases (including nitrogen, hydrogen, oxygen and the like) and water vapor content in the quartz tubes 6 and provide a water-free and oxygen-free vacuum environment for crystal growth; after the vacuumizing is finished, protective gas can be filled into the quartz tube 6 through an inflation device, so that the safety in the tube sealing operation process is further improved; then, the high-temperature plasma sintering device 5 positioned below the vacuum tube sealing machine 1 can be controlled to move to a preset position of the quartz tube 6 (the high-temperature plasma sintering device 5 can move in three-coordinate directions by means of a screw rod sliding block mechanism between the first side frame 2 and the second side frame 3) for sintering, so that necking operation and melting operation of the quartz tube 6 are sequentially completed.

After the sintering and melting operation of the quartz tube 6 is completed, the lifting driving mechanism 7 drives the connecting arm 9 to ascend until the plurality of driving gears 10 and the gear parts 6011 on the plurality of corresponding quick-release threaded tube joints 601 are positioned at the same height position; the rotation driving mechanism 8 drives the connection arm 9 to rotate until the plurality of driving gears 10 are engaged with the corresponding gear portions 6011; the plurality of second clamping jaws 12 under the driving gear 10 clamp the lower portion of the corresponding quartz tube 6, while the plurality of first clamping jaws 11 under the driving gear 10 remain in an open state (corresponding to the state of fig. 1); in the case that the quartz tube 6 is fixed by the second clamping jaw 12, the plurality of driving gears 10 can be rotated simultaneously to drive the plurality of quick-release threaded tube joints 601 to rotate simultaneously in the unscrewing direction through the engagement transmission, so that the plurality of quick-release threaded tube joints 601 are separated from the tube joint 102 and drop down along the quartz tube 6, and the dropped quick-release threaded tube joints 601 pass through the opened first clamping jaw 11 and are received by the clamped second clamping jaw 12 (corresponding to the state of fig. 2); at this time, the first clamping jaw 11 clamps the upper parts of the corresponding plurality of quartz tubes 6, and the second clamping jaw 12 is opened to enable the quick-release threaded pipe joint 601 on the second clamping jaw 12 to drop to a recovery area (corresponding to the state of fig. 3) on the base 4 under the condition that the quartz tubes 6 are fixed at the current position, so that subsequent unified collection is facilitated. Since the quick-release threaded pipe joint 601 is detached, the quartz tube 6 and the tube interface 102 are not connected any more, and the rotary driving mechanism 8 drives the connecting arm 9 to rotate again, so that the plurality of quartz tubes 6 clamped by the first clamping jaw 11 move to the upper side of the high-temperature furnace on the right side in the drawing (corresponding to the state of fig. 4) at the same time; at this time, the lifting driving mechanism 7 drives the connecting arm 9 to descend, so that the plurality of quartz tubes 6 are inserted into the corresponding tubular accommodating grooves 1501 of the tube body jig 15 from top to bottom (corresponding to the states of fig. 5 and 6); after a plurality of quartz tubes 6 are inserted in place, the quartz tubes 6 can be heated by a high-temperature furnace according to a preset temperature program curve, so that raw materials in the quartz tubes 6 grow at high temperature to form a crystal material 22.

The simultaneous rotation of the plurality of driving gears 10 may be realized by a belt transmission manner, or may be realized by means of steering engines connected to the driving gears 10 in a one-to-one correspondence manner, which is not limited herein; it will be appreciated that the teeth of the two gears have some degree of self-adapting adjustability to each other when in contact at slower speeds, thus ensuring that multiple drive gears 10 mesh simultaneously with gear portion 6011. The lifting driving mechanism 7 can adopt a linear module driving mode, a linear motor driving mode and the like; the rotary drive mechanism 8 may be a motor as shown in conjunction with a gear drive. The sintering operation for the quartz tube 6 can be performed by a high-temperature plasma emission welding gun automatically controlled by a PLC on the high-temperature plasma sintering device 5.

Alternatively, referring to fig. 1 to 8, the diameter of the tubular accommodation groove 1501 is larger than the pipe diameter of the quartz pipe 6, and the diameter of the tubular accommodation groove 1501 is smaller than the diameter of the inner liner 602;

the second clamping jaw 12 is also used for clamping the corresponding inner bushing 602 and pulling the inner bushing 602 upwards from the quartz tube 6 pressed into the tubular accommodation groove 1501.

Alternatively, referring to fig. 1 to 9, the pipe jig 15 is provided with a plurality of arc-shaped cavities 1502, the arc-shaped cavities 1502 being located on the left and right sides of each of the tubular accommodation grooves 1501; each arc-shaped concave cavity 1502 is used for avoiding the corresponding second clamping jaw 12 in the open state; the upper side of the pipe jig 15 is used for being attached to the lower side of the first clamping jaw 11.

The high-temperature furnace body 14 is in a vertical placement state relative to the fixed seat 13 in an initial state, namely, the tubular accommodating grooves 1501 of the tube body jig 15 are all in a vertical state, and at the moment, the plurality of first clamping jaws 11 can clamp the plurality of quartz tubes 6 and simultaneously insert the plurality of quartz tubes into the tubular accommodating grooves 1501 from top to bottom; since the inner bushing 602 and the sealing ring 603 remain at the pipe orifice of the quartz tube 6 after the quick-release threaded pipe joint 601 is disassembled, and the inner bushing 602 can keep static relative to the quartz tube 6 within a certain axial acting force range under the damping action of the sealing ring 603, when the quartz tube 6 with the inner bushing 602 is inserted into the tubular accommodating groove 1501, after the lower side surface of the first clamping jaw 11 is contacted with the upper side surface of the tube body jig 15 (corresponding to the state of fig. 5), the quartz tube 6 does not move downwards any more, at this time, the first clamping jaw 11 can be slowly opened to enable the quartz tube 6 to continue to fall until the lower side surface of the inner bushing 602 is contacted with the upper side surface of the tube body jig 15 (corresponding to the state of fig. 6), namely, a limiting action is formed on the quartz tube 6 ingeniously through the abutting of the inner bushing 602 with a larger diameter and the tube body jig 15, so that the quartz tube 6 is prevented from continuing to fall; at this time, the quartz tube 6 is completely in place, the lifting driving mechanism 7 drives the first clamping jaw 11 and the second clamping jaw 12 to rise to a height position where the cover 16 is not interfered, the second rotary driving device drives the cover 16 to cover the tube body jig 15 so as to compress the plurality of quartz tubes 6, at this time, the inner liner 602 is not required to limit any more, the second clamping jaw 12 can be driven to clamp the inner liner 602, and the inner liner 602 is pulled out from the quartz tube 6 upwards under the driving of the lifting driving mechanism 7 so as to be recovered later, and the influence of the inner liner 602 on the heating operation of the quartz tube 6 is avoided.

If the raw materials in the quartz tube 6 need to grow vertically, the high-temperature furnace can maintain the existing state to perform the heating growth operation; if the raw materials in the quartz tubes 6 need to grow horizontally, the high-temperature furnace body 14 can be driven by the first rotary driving device to rotate 90 degrees relative to the fixed seat 13, so that the quartz tubes 6 are in a horizontal state (corresponding to the state of fig. 7), and then the heating growth operation is performed. This increases the applicability of the apparatus to the growth of crystalline material 22 of different characteristics.

It will be appreciated that the arcuate cavities 1502 on the left and right sides of each tubular receiving slot 1501 may be arranged as shown in fig. 9 such that the second clamping jaw 12 in the open position may pass from top to bottom through the pipe fixture 15 without interference.

Alternatively, referring to fig. 1 to 7, a first screw 201 is vertically disposed on the first side frame 2, and a second screw 301 is vertically disposed on the second side frame 3; one end of a first screw rod 201 is connected with a first motor, and a first movable table 202 is connected to the first screw rod 201 in a sliding manner; one end of a second screw rod 301 is connected with a second motor, and a second movable table 302 is connected to the second screw rod 301 in a sliding manner; one end of the third screw 203 passes through the first movable table 202 and is connected with a third motor, and the other end of the third screw 203 is rotatably connected to the second movable table 302; a third movable table 204 is connected to the third screw 203 in a sliding manner; a fourth movable table 205 is slidably connected to the third movable table 204 along a first horizontal path, wherein the first horizontal path is perpendicular to the extending direction of the third screw 203;

The high temperature plasma sintering device 5 is installed on the fourth movable table 205; the high-temperature plasma sintering device 5 is provided with a shaft pin, two groups of clamping plates are hinged on the shaft pin, a high-temperature plasma emission welding gun is clamped between the two groups of clamping plates, and a locking bolt is arranged between the two groups of clamping plates; the first side plate is provided with a high-temperature plasma PLC control console 206, and the high-temperature plasma PLC control console 206 is connected with a high-temperature plasma emission welding gun through a connecting pipe.

Through the cooperation of the plurality of screw rods and the movable table, the high-temperature plasma sintering device 5 can be flexibly controlled to move in the three-coordinate direction so as to accurately reach the target sintering position. The high-temperature plasma emission welding gun is detachably connected to the high-temperature plasma sintering device 5 through the cooperation of the two groups of clamping plates and the locking bolts, so that the high-temperature plasma emission welding gun is more convenient to disassemble, assemble and use.

Correspondingly, referring to fig. 1 to 15, the embodiment of the present invention further provides a two-dimensional material automatic growth transfer method, and the two-dimensional material automatic growth transfer method is applied to the two-dimensional material automatic growth transfer system in any of the above embodiments; the two-dimensional material automatic growth transfer method comprises the following steps:

vacuumizing the vacuum tube sealing machine 1; starting a vacuumizing tube machine, slowly unscrewing a shunt vacuumizing control valve so as to prevent raw materials in a quartz tube 6 from being extracted, slowly unscrewing a main flow vacuumizing control valve after the pressure is expressed to a negative pressure value of-1 bar, screwing the shunt vacuumizing control valve, checking the vacuumizing degree number on a panel of a molecular pump group, and screwing the main flow vacuumizing control valve after the target high-vacuum degree value is reached;

Charging a protective gas; inserting an inflation tube of the inflation equipment into an inflation port of the vacuum tube sealing machine 1, slowly unscrewing an inflation port control valve, and rapidly closing the inflation port control valve when a pointer of a pressure gauge points to a negative pressure intermediate value of-0.6 bar;

sealing the quartz tube 6; installing a high-temperature plasma emission welding gun on the high-temperature plasma sintering device 5, unscrewing a regulating valve of the high-temperature plasma emission welding gun, unscrewing a plasma power switch, igniting the high-temperature plasma emission welding gun, and aligning the high-temperature plasma emission welding gun to the necking part of the quartz tube 6 for sintering and tube sealing operation; when the pipe walls of the quartz pipe 6 are sintered and fused together, the pipe sealing operation is completed, and the regulating valve of the high-temperature plasma emission welding gun is immediately screwed up to stop sintering;

clamping the sealed quartz tube 6 on the tube interface 102 by a tube taking device to transfer the quartz tube 6 into a high-temperature furnace;

starting a high-temperature furnace, and heating the quartz tube 6 according to a preset temperature program curve to enable raw materials in the quartz tube 6 to grow;

taking out the quartz tube 6 from the high temperature furnace by the first material taking robot 19, and pouring the grown crystal material 22 in the quartz tube 6 onto the separation rubber strip 18 (corresponding to the state of fig. 10);

Controlling the second glue tearing driving device 21 to be close to the first glue tearing driving device 20, and controlling the second glue tearing driving device 21 to be far away from the first glue tearing driving device 20 so as to drive the two ends of the separation glue strip 18 to be torn after being bonded, so that the crystal material 22 is torn into a thin-layer sample 2201;

the target substrate 3001 is driven by the transfer assembly into contact with the thin layer sample 2201 on the separator strip 18 to transfer the thin layer sample 2201 onto the target substrate 3001.

Optionally, referring to fig. 10 to 15, the two-dimensional material automatic growth transfer system further includes a stand 17, a folding driving device 23, and a glue receiving mechanism 24; the vertical surface of the vertical seat 17 is provided with an annular chute 1701 and a transverse chute 1702, and the annular chute 1701 is arranged around the transverse chute 1702; the first glue driving device 20 and the second glue driving device 21 are connected in the annular chute 1701 in a sliding manner, and the folding driving device 23 is connected in the transverse chute 1702 in a sliding manner; the second adhesive tearing driving device 21 is provided with an adhesive roll, one end of the separation adhesive tape 18 is led out from the adhesive roll, the middle part of the separation adhesive tape 18 is connected to the first adhesive tearing driving device 20, and the other end of the separation adhesive tape 18 is wound on the adhesive collecting mechanism 24; the folding driving device 23 is provided with a telescopic rod 2301;

The step of controlling the second glue driving device 21 to be close to the first glue driving device 20 and controlling the second glue driving device 21 to be far away from the first glue driving device 20 to drive the two ends of the separation glue strip 18 to be torn after being adhered, so as to tear the crystal material 22 into the thin layer sample 2201 comprises the following steps:

the second glue driving device 21 is controlled to slide anticlockwise along the annular chute 1701, meanwhile, the telescopic rod 2301 extends out of the upper side of the separation glue strip 18, and the second glue driving device 21 is controlled to slide rightwards along the transverse chute 1702 so as to drive the separation glue strip 18 to fold by taking the telescopic rod 2301 as an axis until the upper side surface and the lower side surface of the crystal material 22 are adhered with the separation glue strip 18 (corresponding to the state of fig. 11);

the second glue drive 21 is controlled to slide clockwise along the circular chute 1701 to tear the crystalline material 22 into a thin layer of sample 2201 located to the left of the telescoping rod 2301.

Alternatively, referring to fig. 10 to 15, the first adhesive tearing driving device 20 has a first sliding end and a first clamping end, and the second adhesive tearing driving device 21 has a second sliding end and a second clamping end; the first sliding end and the second sliding end are slidably connected in the annular chute 1701, the first clamping end is rotationally connected to the first sliding end along the horizontal axial direction, the second clamping end is rotationally connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape 18, and the first clamping end is used for clamping the middle part of the separation adhesive tape 18;

The transfer assembly includes a slide storage compartment 25, a second reclaiming robot 26, a slide jig 27, a lifting slide 28, a lifting guide 29, a heating table 32, a substrate storage compartment 30, and a third reclaiming robot 31; slide jig 27 is rotatably connected to lifting slide block 28 along the horizontal axis, lifting slide block 28 is slidably connected to lifting guide rail 29 along the vertical direction; slide jig 27 is located below separation gel strip 18, and slide jig 27 is located above heating table 32; a carrier slide 2501 is stored in the slide storage chamber 25, and a polydimethylsiloxane layer is arranged on the carrier slide 2501; the substrate storage chamber 30 stores therein a target substrate 3001;

the step of driving the target substrate 3001 into contact with the thin layer sample 2201 on the separation gel strip 18 by the transfer assembly so that the thin layer sample 2201 is transferred onto the target substrate 3001 includes:

rotating the first clamping end and the second clamping end such that the thin layer sample 2201 faces downward;

the carrier slide 2501 in the slide storage compartment 25 is grasped by the second reclaiming robot 26 and fixed on the slide jig 27, and the slide jig 27 is controlled to rotate so that the polydimethylsiloxane layer faces upward;

controlling the lifting slide 28 to lift along the lifting guide rail 29 so as to enable the polydimethylsiloxane layer to be attached to the thin-layer sample 2201 (corresponding to the state of fig. 12);

Controlling the lifting slide 28 to descend along the lifting guide rail 29 so that the thin layer sample 2201 is adhered and transferred onto the polydimethylsiloxane layer;

the slide jig 27 is controlled to rotate so that the polydimethylsiloxane layer faces downward (corresponding to the state of fig. 13);

the target substrate 3001 in the substrate storage tank 30 is grasped by the third pick-up robot 31 and fixed on the heating table 32, and the lift slider 28 is controlled to descend along the lift rail 29 until the thin layer sample 2201 is attached to the target substrate 3001 (corresponding to the state of fig. 14);

performing a heating operation on the target substrate 3001 by the heating stage 32 to separate the thin layer sample 2201 from the polydimethylsiloxane layer;

the lift slider 28 is controlled to lift along the lift rail 29 so that the separated thin layer sample 2201 remains on the target substrate 3001 (corresponding to the state of fig. 15).

Alternatively, referring to fig. 10 to 15, after the step of controlling the lifting slider 28 to descend along the lifting rail 29 to adhesively transfer the thin layer sample 2201 onto the polydimethylsiloxane layer, it includes:

driving the glue collecting mechanism 24 to wind and collect the separation glue strips 18; to effect winding recovery of the length of separator strip 18 and pulling a new length of separator strip 18 from the glue roll for subsequent transfer operations of other crystalline material 22.

For a specific flow of the two-dimensional material automatic growth transfer method, reference may be made to the description related to the embodiments of the two-dimensional material automatic growth transfer system described above. The two-dimensional material automatic growth transfer method adopts all the technical schemes of all the embodiments, so that the two-dimensional material automatic growth transfer method has at least all the beneficial effects brought by the technical schemes of the embodiments, and is not described in detail herein.

It should be noted that, other contents of the two-dimensional material automatic growth and transfer system and method disclosed in the present invention can be referred to the prior art, and will not be described herein.

The foregoing description of the embodiments of the present invention should not be construed as limiting the scope of the invention, but rather should be understood to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the following description and drawings or as applied directly or indirectly to other related technical fields.

Claims

1. A two-dimensional material automatic growth transfer system, the two-dimensional material automatic growth transfer system comprising:

separating the adhesive tape;

a transfer assembly having a target substrate secured thereto, the transfer assembly for driving the target substrate into contact with the thin layer sample on the separation strip to transfer the thin layer sample to the target substrate;

The two-dimensional material automatic growth transfer system further comprises a vertical seat, a folding driving device and a glue collecting mechanism; wherein:

an annular chute and a transverse chute are formed in the vertical surface of the vertical seat, and the annular chute is arranged around the transverse chute; the first glue tearing driving device and the second glue tearing driving device are connected in the annular chute in a sliding manner, and the folding driving device is connected in the transverse chute in a sliding manner; the second glue tearing driving device is provided with a glue roller, one end of the separation glue strip is led out from the glue roller, the middle part of the separation glue strip is connected to the first glue tearing driving device, and the other end of the separation glue strip is wound on the glue collecting mechanism; the folding driving device is provided with a telescopic rod which is used for contacting with one side surface of the separation adhesive tape; the second glue tearing driving device is used for sliding along the annular chute so as to drive the separation glue strip to fold around the telescopic rod;

the first glue tearing driving device is provided with a first sliding end and a first clamping end, and the second glue tearing driving device is provided with a second sliding end and a second clamping end; the first sliding end is slidably connected with the second sliding end in the annular sliding groove, the first clamping end is rotatably connected to the first sliding end along the horizontal axial direction, the second clamping end is rotatably connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape, and the first clamping end is used for clamping the middle part of the separation adhesive tape.

2. The two-dimensional material automatic growth transfer system of claim 1, wherein the transfer assembly comprises a slide storage bin, a second reclaiming robot, a slide jig, a lifting slide block, a lifting rail, a heating table, a substrate storage bin, and a third reclaiming robot; wherein:

3. The two-dimensional material automatic growth transfer system according to claim 1, wherein an inner bushing is sleeved on the pipe orifice of the quartz pipe, a sealing ring is arranged between the outer pipe wall of the quartz pipe and the inner bushing, a quick-release threaded pipe joint is sleeved on the inner bushing, and a gear part is arranged around the outer wall of the quick-release threaded pipe joint; the quartz tubes are screwed on the tube interfaces in a one-to-one correspondence manner through the quick-release threaded tube connectors;

4. The two-dimensional material automatic growth and transfer system according to claim 1, wherein a first screw rod vertically arranged is arranged on the first side frame, and a second screw rod vertically arranged is arranged on the second side frame; one end of the first screw rod is connected with a first motor, and a first movable table is connected to the first screw rod in a sliding manner; one end of the second screw rod is connected with a second motor, and a second movable table is connected to the second screw rod in a sliding manner; one end of a third screw rod penetrates through the first movable table and is connected with a third motor, and the other end of the third screw rod is rotatably connected to the second movable table; a third movable table is connected to the third screw rod in a sliding manner; a fourth movable table is connected to the third movable table in a sliding manner along a first horizontal path, wherein the first horizontal path is perpendicular to the extending direction of the third screw rod;

5. A two-dimensional material automatic growth transfer method, characterized in that the two-dimensional material automatic growth transfer method is applied to the two-dimensional material automatic growth transfer system according to any one of claims 1 to 4; the two-dimensional material automatic growth transfer method comprises the following steps:

6. The method according to claim 5, wherein the two-dimensional material automatic growth and transfer system further comprises a stand, a folding driving device and a glue receiving mechanism; an annular chute and a transverse chute are formed in the vertical surface of the vertical seat, and the annular chute is arranged around the transverse chute; the first glue tearing driving device and the second glue tearing driving device are connected in the annular chute in a sliding manner, and the folding driving device is connected in the transverse chute in a sliding manner; the second glue tearing driving device is provided with a glue roller, one end of the separation glue strip is led out from the glue roller, the middle part of the separation glue strip is connected to the first glue tearing driving device, and the other end of the separation glue strip is wound on the glue collecting mechanism; the folding driving device is provided with a telescopic rod;

7. The method of claim 6, wherein the first adhesive-tearing drive device has a first sliding end and a first clamping end, and the second adhesive-tearing drive device has a second sliding end and a second clamping end; the first sliding end and the second sliding end are in sliding connection with the annular chute, the first clamping end is rotationally connected to the first sliding end along the horizontal axial direction, the second clamping end is rotationally connected to the second sliding end along the horizontal axial direction, the second clamping end is used for clamping one end of the separation adhesive tape, and the first clamping end is used for clamping the middle part of the separation adhesive tape;

8. The method of claim 7, wherein the step of controlling the lifting slider to descend along the lifting rail to adhesively transfer the thin layer sample to the polydimethylsiloxane layer comprises: