CN116242868A - Sample sharing positioning platform suitable for micro-area analysis - Google Patents
Sample sharing positioning platform suitable for micro-area analysis Download PDFInfo
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- CN116242868A CN116242868A CN202310128765.2A CN202310128765A CN116242868A CN 116242868 A CN116242868 A CN 116242868A CN 202310128765 A CN202310128765 A CN 202310128765A CN 116242868 A CN116242868 A CN 116242868A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/2204—Specimen supports therefor; Sample conveying means therefore
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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Abstract
The invention provides a sample sharing positioning platform suitable for micro-area analysis, and relates to the field of sample analysis. The sample sharing and positioning platform suitable for micro-area analysis comprises a workbench and a scanning electron microscope, wherein a coordinate reference shaft is arranged at the top of the workbench, and a limiting ring frame, a sample table, a screw rod, a positive and negative motor, a guide rod and a hydraulic cylinder are arranged between the coordinate reference shaft and the scanning electron microscope. The sample sharing and positioning platform suitable for micro-area analysis is characterized in that the sample platform is controlled to move to enable a detection coordinate point to coincide with an observation coordinate point, so that a view field in the previous detection can be moved to a detection light path of equipment such as a transmission electron microscope, a FIB (fiber-based) device, an optical microscope, a microscopic infrared device and the like on a second workbench, and the sample sharing and positioning platform is formed by parts such as a limiting ring frame, the sample platform, a screw rod, a positive and negative motor, a hydraulic cylinder, a touch control screen and the like, so that the detected view field is at the same position when a sample in the sample platform needs to be detected for multiple times, and the scientificity and the rigor of sample detection are improved.
Description
Technical Field
The invention relates to a positioning platform, in particular to a sample sharing positioning platform suitable for micro-area analysis, and belongs to the technical field of sample analysis.
Background
With the development of technology, various microbeam technologies are rapidly advanced, and microscopic research is becoming an indispensable task in the scientific research process, and chemical component analysis of selected micro-area substances under an optical microscope is called micro-area analysis by directly (in situ) analyzing the micro-area substances using various microbeam or probe technologies. Many micro-area analysis means can simultaneously perform morphology observation and structure measurement, and the spatial resolution of micro-area analysis is in the micron order.
In micro-area analysis, a researcher usually uses a transmission electron microscope, a FIB, a scanning electron microscope, an optical microscope (such as an organic lithology platform, microscopic infrared, microscopic laser raman and the like), different devices have different sample stages, and the sample stages are designed differently, so that the sample stages cannot be shared.
Disclosure of Invention
(one) solving the technical problems
The invention aims to provide a sample sharing positioning platform suitable for micro-area analysis, so as to solve the problems that in the prior art, different devices are provided with different sample platforms, and the sample platforms are different in design, so that the sample platforms cannot be shared, when a scientific research person needs to do multi-type micro-area analysis, the sample needs to be transferred from one device to another device for detection, the target view is required to be found again, and most of the time, the previously done view is difficult to find, and the scientificity, objectivity and accuracy of sample research are affected.
(II) technical scheme
In order to achieve the above purpose, the invention is realized by the following technical scheme: the utility model provides a sample sharing location platform suitable for micro-area analysis, includes workstation and scanning electron microscope, the workstation top is provided with the coordinate reference axle, be provided with spacing ring frame, sample platform, lead screw, positive and negative motor, guide bar and pneumatic cylinder between coordinate reference axle and the scanning electron microscope, control sample platform removes and makes detection coordinate point and observation coordinate point coincidence, can make the visual field when examining the time of last time remove to the second workstation in transmission electron microscope, FIB, optical microscope, microscopic infrared etc. equipment detection light path, can make the inside sample of sample platform need be detected the visual field in same position when examining many times, spacing ring frame both sides are provided with three-dimensional scanning camera and touch control screen respectively, make the inside sample of sample platform need be detected the visual field in same position when examining many times, improve the scientificity and the rigor to sample detection, three-dimensional scanning camera scans three-dimensional data information between coordinate reference axle, sample platform and the detection head, touch control screen control motor and pneumatic cylinder cooperation work, make positive and negative motor and pneumatic cylinder promote the sample platform to remove, spacing ring frame inside sample need be detected the visual field in same position when examining the time, the setting up end position is provided with the coordinate point, the coordinate device is provided with between the inside sample platform, the bottom of the workstation and the control window, the control device is provided with the three-dimensional control device, and the three-dimensional control point contrast.
Preferably, the sample tank has been seted up at sample platform top, a plurality of spacing bottom plates of sample platform bottom fixedly connected with, carry out spacing to the sample platform and make it can not restrict, spacing bottom plate sets up in L shape, and spacing bottom plate sets up to L shape, and the removal of sample platform is only in order to finely tune the sample position, and consequently the maximum radius that the sample platform needs to remove is less, can not make spacing bottom plate collision coordinate reference axle, the sample platform sets up in coordinate reference axle top, instruction unit is provided with detection function key, reset function key and location function key, clicks detection function key, and control sample platform removes and makes detection coordinate point and observation coordinate point coincidence, can make in the equipment detection light path such as transmission electron microscope, FIB, optical microscope, micro infrared when carrying out the detection in the time of the second workstation.
Preferably, the scanning electron microscope comprises a display screen, the display screen is installed in scanning electron microscope one end, fixedly connected with mounting panel between scanning electron microscope other end and the workstation makes the positive and negative motor of touch control screen control and pneumatic cylinder work, promotes the sample platform and removes, the display screen sets up in touch control screen top, and positive and negative motor and pneumatic cylinder promote the sample platform and remove, make the slide glass carry out the fine setting removal of controlling front and back in scanning electron microscope detects the head bottom, and the detection head of scanning electron microscope detects the suitable position of sample, acquires detection data.
Preferably, one end of the three-dimensional scanning camera penetrates through the limiting ring frame and is fixedly connected with the limiting ring frame, the sample table is sleeved on the outer side of the screw rod through the ball nut pair, the working positive and negative motor drives the screw rod to rotate clockwise or anticlockwise, the sample table which is arranged at the screw rod driving position in a threaded mode reciprocates, and the screw rod is fixedly connected to the output end of the positive and negative motor.
Preferably, the positive and negative motor has seted up the spacing groove, the guide bar runs through the spacing groove, and the guide bar runs through the spacing groove that positive and negative motor was seted up, and is spacing to positive and negative motor's removal, makes positive and negative motor can only carry out reciprocating motion in the guide bar outside, guide bar both ends all with spacing ring frame fixed connection.
Preferably, the pneumatic cylinder is fixedly connected with the spacing ring frame, fixedly connected with drive plate of pneumatic cylinder one end, fixedly connected with drive plate and transmission bent plate between pneumatic cylinder and the positive and negative motor, through the L shape setting of transmission bent plate, avoid the transmission between pneumatic cylinder and the positive and negative motor to influence the motion of sample platform, fixedly connected with transmission bent plate between drive plate and the positive and negative motor.
Preferably, fixedly connected with control cable between winding displacement case and the positive and negative motor, winding displacement case and three-dimensional scanning camera and pneumatic cylinder electric connection, winding displacement case one side fixedly connected with power cord, electric connection has control cable between positive and negative motor and the winding displacement incasement cable, and the control cable of crooked setting guarantees that positive and negative motor has sufficient space of motion, through power cord, winding displacement incasement cable, control cable cooperation, provides power and control command to the work of pneumatic cylinder and positive and negative motor, the power cord runs through spacing ring frame and with spacing ring frame fixed connection.
Preferably, fixedly connected with socket between winding displacement case one side and the spacing collar frame, spacing collar frame top fixedly connected with installs the bent plate, can be quick dismantle touch control screen as required, sample sharing location platform that parts such as spacing collar frame, sample platform, lead screw, positive and negative motor, pneumatic cylinder, touch control screen are constituteed can be quick dismantle, threaded connection has fixing bolt between installation bent plate and the touch control screen, makes fixing bolt remove and leaves installation bent plate and touch control screen, can make touch control screen lose fixedly.
Preferably, a plurality of equal fixedly connected with inserted bar in backup pad bottom, a plurality of mounting groove has been seted up at the workstation top, and a plurality of the inserted bar sets up respectively inside a plurality of mounting grooves to inserted bar and mounting groove location are installed the spacing ring frame to the workstation top, can make the central line of spacing ring frame and coordinate reference axle set up on same horizontal line, accomplish the initial location of spacing ring frame and sample platform, the equal fixedly connected with handle in spacing ring frame both sides, one of them handle top fixedly connected with two rubber sleeves, press two rubber sleeves inside with the power cord outside part, and rubber is made and is had the friction between rubber sleeve and the power cord of certain elasticity, carries out spacing to the power cord. The power line is limited on one side of the limiting ring frame, so that the safety of the power line in the process of holding the handle and carrying the limiting ring frame is ensured.
Preferably, an operation bolt is connected to one side of the workbench, an L-shaped groove is formed in the top of the workbench, the coordinate reference shaft is arranged in the L-shaped groove, the moved operation bolt pulls the coordinate reference shaft through a pull wire, so that the coordinate reference shaft moves into the L-shaped groove, the bulge at the top of the workbench disappears, a spring is fixedly connected between the bottom of the coordinate reference shaft and the workbench, a pull wire is fixedly connected between the coordinate reference shaft and the operation bolt, and after the pull wire releases the pulling of the coordinate reference shaft, the rebounded spring pushes the coordinate reference shaft, so that the top of the coordinate reference shaft moves to the top of the workbench.
The invention provides a sample sharing and positioning platform suitable for micro-area analysis, which has the following beneficial effects:
1. the sample sharing positioning platform suitable for micro-area analysis controls the movement of the sample platform to enable the detection coordinate point to coincide with the observation coordinate point, so that the view field during the previous detection can be moved to the detection light path of equipment such as a transmission electron microscope, a FIB, an optical microscope, a microscopic infrared ray and the like on the second workbench, the detected view field can be positioned at the same position when the samples in the sample platform need to be detected for multiple times, and the scientificity and the rigorousness of sample detection are improved. The sample sharing and positioning platform is formed by the parts such as the limiting ring frame, the sample table, the screw rod, the positive and negative motor, the hydraulic cylinder, the touch control screen and the like, so that the uniformity of detection of the same sample by a scanning electron microscope or a transmission electron microscope, an FIB (fiber-based) optical microscope, microscopic infrared and the like is improved, and the accuracy of detection and analysis of sample data is improved.
2. The sample sharing positioning platform suitable for micro-area analysis pushes the sample table to enable the detection coordinate point to move and coincide with the positioning coordinate point, and at the moment, the center lines of the limiting ring frame, the sample table and the coordinate reference shaft are arranged on the same horizontal line. At this time, the center point line of the sample platform moves between the equipment detection head and the coordinate reference shaft, new detection coordinate points, observation coordinate points and positioning coordinate points are established, only the coordinate reference shaft and the bottom center point of the sample platform are required to be positioned, the workload of establishing the detection coordinate points, the observation coordinate points and the positioning coordinate points by the three-dimensional scanning camera is reduced, and the cost input of using the three-dimensional scanning camera is reduced.
3. This sample sharing location platform suitable for micro-area analysis, spacing ring frame inserts the mounting groove inside through the inserted bar that the backup pad is fixed, can install the workstation top with spacing ring frame. And the mounting grooves are distributed on the top of the workbench by taking the coordinate reference shaft as a central shaft, and the inserted bars are annularly distributed by taking the central shafts of the limiting ring frame and the sample table. Therefore, the limiting ring frame is installed on the top of the workbench by positioning the inserting rod and the mounting groove, so that the central lines of the limiting ring frame and the coordinate reference shaft are arranged on the same horizontal line, and the initial positioning of the limiting ring frame and the sample table is completed.
4. This sample sharing location platform suitable for micro-area analysis presses two rubber sleeves inside with the outside part of power cord, and rubber is made and is had the rubber sleeve of certain elasticity and friction between the power cord, carries out spacingly to the power cord. The power line is limited on one side of the limiting ring frame, so that the safety of the power line in the process of holding the handle to carry the limiting ring frame is ensured, the touch control screen is quickly disassembled as required, and the sample sharing and positioning platform composed of the limiting ring frame, the sample table, the screw rod, the positive and negative motors, the hydraulic cylinder, the touch control screen and other parts can be quickly disassembled.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic view of the structure of the workbench of the invention;
FIG. 3 is a schematic view of the structure of the driving bending plate of the present invention;
FIG. 4 is a schematic view of the structure of the guide bar of the present invention;
FIG. 5 is a schematic view of the structure of the support plate of the present invention;
FIG. 6 is a schematic view of the structure of the retainer ring frame of the present invention;
FIG. 7 is a schematic view of a sample stage according to the present invention;
FIG. 8 is a schematic view of the structure of portion A of FIG. 7 according to the present invention;
FIG. 9 is a schematic view of the structure of the limiting base plate of the present invention;
FIG. 10 is a schematic view of the structure of the grip of the present invention;
FIG. 11 is a schematic view of the structure of the mounting plate of the present invention;
FIG. 12 is a schematic view of the coordinate axes of the present invention;
FIG. 13 is a schematic view of a pull wire according to the present invention;
FIG. 14 is a schematic diagram of a system architecture of a touch control screen of the present invention;
FIG. 15 is a schematic diagram illustrating a connection structure of an instruction unit according to the present invention.
In the figure: 1. a work table; 2. a mounting plate; 3. a limiting ring frame; 4. a sample stage; 5. a sample tank; 6. a limiting bottom plate; 7. a screw rod; 8. a forward and reverse motor; 9. a three-dimensional scanning camera; 10. a winding displacement box; 11. a power line; 12. a drive plate; 13. a transmission bending plate; 14. a hydraulic cylinder; 15. touching a control screen; 16. a limit groove; 17. installing a bending plate; 18. a grip; 19. a rubber sleeve; 20. a support plate; 21. a rod; 22. a mounting groove; 23. a coordinate reference axis; 24. a control cable; 25. scanning electron microscope; 26. a display screen; 27. a processor; 28. a comparison unit; 29. a storage device; 30. an instruction unit; 31. detecting a function key; 32. resetting a function key; 33. positioning a function key; 34. an operating bolt; 35. a pull wire; 36. a spring; 37. a fixing bolt; 38. a socket; 39. a guide rod.
Detailed Description
The embodiment of the invention provides a sample sharing and positioning platform suitable for micro-area analysis.
Referring to fig. 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 and 15, the electronic scanning device comprises a workbench 1 and a scanning electronic mirror 25, wherein the scanning electronic mirror 25 comprises a display screen 26, the display screen 26 is arranged at one end of the scanning electronic mirror 25, a mounting plate 2 is fixedly connected between the other end of the scanning electronic mirror 25 and the workbench 1, a three-dimensional scanning camera 9 scans three-dimensional data information between a coordinate reference shaft 23, a sample table 4 and a detection head, a processor 27 in the touch control screen 15 sets a point which is arranged at the bottom of the sample table 4 and between the coordinate reference shaft 23 and the detection head at the moment as a positioning coordinate point, a coordinate reference shaft 23 is arranged at the top of the workbench 1, a limiting ring frame 3, the sample table 4, a screw rod 7, a positive and negative motor 8, a guide rod 39 and a hydraulic cylinder 14 are arranged between the coordinate reference shaft 23 and the scanning electronic mirror 25, the top of the sample table 4 is provided with a sample groove 5, so that the view area during the previous detection is moved to the detection light path of equipment such as a transmission electron microscope, a FIB (fiber-based) optical microscope, a microscopic infrared ray and the like on the second workbench 1, the detected view area can be positioned at the same position when the samples in the sample table 4 need to be detected for multiple times, the scientificity and the rigorousness of the detection of the samples are improved, the bottom of the sample table 4 is fixedly connected with a plurality of limiting bottom plates 6, the limiting bottom plates 6 are arranged in an L shape, the sample table 4 is arranged at the top of a coordinate reference shaft 23, an instruction unit 30 is provided with a detection function key 31, a reset function key 32 and a positioning function key 33, two sides of the limiting ring frame 3 are respectively provided with a three-dimensional scanning camera 9 and a touch control screen 15, a display screen 26 is arranged at the top of the touch control screen 15, a flat cable box 10 is arranged in the limiting ring frame 3, a plurality of supporting plates 20 are arranged between the bottom of the limiting ring frame 3 and the workbench 1, the touch control screen 15 is internally provided with a processor 27, a comparison unit 28, a storage device 29 and an instruction unit 30, and a reset function key 32 is clicked to enable the touch control screen 15 to control the positive and negative motor 8 and the hydraulic cylinder 14 to work, so that the sample table 4 is pushed, and the detection coordinate point is moved to coincide with the positioning coordinate point.
Specifically, after the limiting ring frame 3 is mounted on the top of the workbench 1, the center points of the coordinate reference shaft 23, the sample table 4 and the detection head of the scanning electron microscope 25 are located on the same horizontal line, and the slide glass carrying the sample is placed in the sample groove 5 formed in the sample table 4, so that initial positioning can be completed. At this time, the touch control screen 15 and the three-dimensional scanning camera 9 are started to work, then the positioning function key 33 arranged on the touch control screen 15 is clicked, the positioning function key 33 controls the three-dimensional scanning camera 9 which works to scan the three-dimensional data information among the coordinate reference shaft 23, the sample stage 4 and the detection head, and the processor 27 in the touch control screen 15 sets the point which is arranged at the bottom of the sample stage 4 and between the coordinate reference shaft 23 and the detection head at this time as a positioning coordinate point, and conveys the coordinate point to the storage device 29 for internal storage, and at this time, the center lines of the limiting ring frame 3 and the sample stage 4 are arranged on the same horizontal line.
Then, a worker controls the positive and negative motor 8 and the hydraulic cylinder 14 to work cooperatively through the touch control screen 15, so that the positive and negative motor 8 and the hydraulic cylinder 14 push the sample table 4 to move, the slide glass is subjected to fine adjustment movement left and right and front and back at the bottom of the detection head of the scanning electron microscope 25, and the detection head of the scanning electron microscope 25 detects the proper position of a sample, so that detection data are obtained. At this time, the positioning function key 33 is clicked, so that the three-dimensional scanning camera 9 works to scan the three-dimensional data information between the coordinate reference axis 23, the sample stage 4 and the detection head, the point where the bottom of the sample stage 4 is disposed between the control cable 24 and the detection head is set as the detection coordinate point, and then the detection coordinate point is transferred to the storage device 29 for internal storage.
After the sample is detected, the worker controls to move the limiting ring frame 3 and then install the limiting ring frame on the second workbench 1 provided with equipment such as a transmission electron microscope, a FIB, an optical microscope, a microscopic infrared ray and the like, so that the limiting ring frame 3 and a coordinate reference shaft 23 installed on the second workbench 1 and the center point of the equipment detection head are arranged on the same horizontal line.
The positioning function key 33 is then clicked to control the three-dimensional scanning camera 9 and the processor 27 to cooperate with each other, taking the point between the coordinate reference axis 23 located on the second stage 1 at the bottom of the sample stage 4 and the apparatus detection head as the observation coordinate point. The observation coordinate point is positioned on a detection light path of equipment such as a transmission electron microscope, a FIB, an optical microscope, a microscopic infrared and the like on the second workbench 1. Since the relative position between the stop collar 3 and the sample stage 4 is unchanged, after the three-dimensional scanning camera 9 scans the space coordinates inside the stop collar 3, the detection coordinate point, the observation coordinate point and the positioning coordinate point can be simultaneously displayed inside the stop collar 3.
At this time, the detection function key 31 is clicked, so that the touch control screen 15 controls the positive and negative motor 8 and the hydraulic cylinder 14 to work, the sample table 4 is pushed to move, the sample table 4 is controlled to move to enable the detection coordinate point to coincide with the observation coordinate point, the vision field during the previous detection can be moved to the detection light path of the transmission electron microscope, the FIB, the optical microscope, the microscopic infrared and other equipment on the second working table 1, the detected vision field can be positioned at the same position when the samples in the sample table 4 need to be detected for multiple times, and the scientificity and the rigorousness of detecting the samples are improved. The sample sharing and positioning platform is formed by the limiting ring frame 3, the sample table 4, the screw rod 7, the positive and negative motor 8, the hydraulic cylinder 14, the touch control screen 15 and other parts, so that the uniformity of detection of the same sample through the scanning electron microscope 25 or the transmission electron microscope, the FIB, the optical microscope, the microscopic infrared and the like is improved, and the accuracy of detection and analysis of sample data is improved.
Clicking the reset function key 32 to make the touch control screen 15 control the positive and negative motor 8 and the hydraulic cylinder 14 to work, pushing the sample table 4 to make the detection coordinate point move and coincide with the positioning coordinate point, and setting the center lines of the limiting ring frame 3, the sample table 4 and the coordinate reference shaft 23 on the same horizontal line. In this way, the center point line of the sample table 4 moves between the equipment detection head and the coordinate reference shaft 23, new detection coordinate points, observation coordinate points and positioning coordinate points are established, only the positioning coordinate reference shaft 23 and the bottom center point of the sample table 4 are needed, the workload of establishing the detection coordinate points, the observation coordinate points and the positioning coordinate points by the three-dimensional scanning camera 9 is reduced, and the cost investment for using the three-dimensional scanning camera 9 is reduced.
Referring to fig. 3, fig. 4, fig. 7, fig. 8 and fig. 9 again, one end of the three-dimensional scanning camera 9 penetrates through the limiting ring frame 3 and is fixedly connected with the limiting ring frame 3, the sample table 4 is sleeved on the outer side of the screw rod 7 through a ball nut pair, the screw rod 7 is fixedly connected to the output end of the positive and negative motor 8, the positive and negative motor 8 is provided with a limiting groove 16, a guide rod 39 penetrates through the limiting groove 16, two ends of the guide rod 39 are fixedly connected with the limiting ring frame 3, the guide rod 39 penetrates through the limiting groove 16 provided by the positive and negative motor 8, the movement of the positive and negative motor 8 is limited, the positive and negative motor 8 can only reciprocate on the outer side of the guide rod 39, the hydraulic cylinder 14 is fixedly connected with the limiting ring frame 3, one end of the hydraulic cylinder 14 is fixedly connected with a transmission plate 12, the positive and negative motor 8 is pushed by the transmission plate 12 and the transmission bent plate 13, the positive and negative motor 8 reciprocates in the limiting of the limiting ring frame 3 under the limiting of the guide rod 39, the position of the sample table 4 is controlled, and the transmission plate 12 and the positive and negative motor 8 are fixedly connected with the transmission plate 13.
Specifically, the guide rod 39 fixed inside the limiting ring frame 3 penetrates through the limiting groove 16 formed in the positive and negative motor 8 to limit the movement of the positive and negative motor 8, so that the positive and negative motor 8 can only reciprocate outside the guide rod 39. And the transmission plate 12 and the transmission bent plate 13 are fixedly connected between the positive and negative motor 8 and the hydraulic cylinder 14, so that the hydraulic cylinder 14 works, the positive and negative motor 8 can be pushed by the transmission plate 12 and the transmission bent plate 13, the positive and negative motor 8 can reciprocate in the limiting ring frame 3 under the limit of the guide rod 39, and the position of the sample table 4 is controlled.
And the screw rod 7 fixed by the positive and negative motor 8 is in threaded connection with the sample table 4, so that when the positive and negative motor 8 works, the working positive and negative motor 8 drives the screw rod 7 to rotate clockwise or anticlockwise, and the rotating screw rod 7 drives the sample table 4 in threaded arrangement at the position to perform reciprocating motion. And a plurality of spacing bottom plates 6 are fixedly connected with in sample platform 4 bottom, carry out spacing to sample platform 4 and make it can not restrict, set up spacing bottom plate 6 to L shape, the removal of sample platform 4 is only in order to finely tune the sample position, therefore the biggest radius that sample platform 4 needs to remove is less, can not make spacing bottom plate 6 collide coordinate reference shaft 23.
A transmission plate 12 and a transmission bent plate 13 are fixedly connected between the hydraulic cylinder 14 and the positive and negative motor 8, and the L-shaped arrangement of the transmission bent plate 13 prevents the transmission between the hydraulic cylinder 14 and the positive and negative motor 8 from affecting the movement of the sample table 4.
Referring to fig. 3, 6, 7 and 11 again, a control cable 24 is fixedly connected between the flat cable box 10 and the reversible motor 8, the flat cable box 10 is electrically connected with the three-dimensional scanning camera 9 and the hydraulic cylinder 14, one side of the flat cable box 10 is fixedly connected with a power cable 11, the power cable 11 penetrates through the limiting ring frame 3 and is fixedly connected with the limiting ring frame 3, and power and control instructions are provided for the hydraulic cylinder 14 and the reversible motor 8 through the cooperation of the power cable 11, the cables inside the flat cable box 10 and the control cable 24. And the control cable 24 that the bending set up guarantees that positive and negative motor 8 has sufficient space of motion, fixedly connected with socket 38 between winding displacement case 10 one side and the spacing ring frame 3, spacing ring frame 3 top fixedly connected with installs bent plate 17, installs between bent plate 17 and the touch control screen 15 threaded connection has fixing bolt 37.
Specifically, the limiting ring frame 3 is arranged to be a hollow pipeline, so that the weight of a sample sharing positioning platform formed by the limiting ring frame 3, the sample table 4, the screw rod 7, the positive and negative motor 8, the hydraulic cylinder 14, the touch control screen 15 and other parts is reduced, and the movement is facilitated. The wire arranging box 10 is arranged in the limiting ring frame 3, the three-dimensional scanning camera 9 and the hydraulic cylinder 14 are electrically connected with the inner cables of the wire arranging box 10, the control cable 24 is electrically connected between the positive and negative motor 8 and the inner cables of the wire arranging box 10, and the power supply and control instructions are provided for the operation of the hydraulic cylinder 14 and the positive and negative motor 8 through the cooperation of the power supply wire 11, the inner cables of the wire arranging box 10 and the control cable 24. And the control cable 24 arranged in a bending way ensures that the positive and negative motor 8 has sufficient movement space.
Referring again to fig. 1, fig. 2, fig. 3, fig. 9 and fig. 13, the insert rods 21 are fixedly connected to the bottoms of the plurality of support plates 20, the plurality of mounting grooves 22 are formed in the top of the workbench 1, the plurality of insert rods 21 are respectively arranged in the plurality of mounting grooves 22, the limiting ring frame 3 is inserted into the mounting grooves 22 through the insert rods 21 fixed by the support plates 20, the limiting ring frame 3 is mounted on the top of the workbench 1 by positioning the insert rods 21 and the mounting grooves 22, the center lines of the limiting ring frame 3 and the coordinate reference shaft 23 can be arranged on the same horizontal line, the initial positioning of the limiting ring frame 3 and the sample table 4 is completed, the limiting ring frame 3 can be mounted on the top of the workbench 1, the two sides of the limiting ring frame 3 are fixedly connected with the handles 18, one of the two rubber sleeves 19 are fixedly connected with the top of the handles 18, the rubber sleeves 19 with certain elasticity are made of the rubber, the power wire 11 is rubbed, the power wire 11 is limited, one side of the workbench 1 is connected with the operating bolts 34, the top of the workbench 1 is provided with the L-shaped grooves, the coordinate reference shaft 23 is arranged in the L-shaped grooves, the initial positioning of the limiting ring frame 3 can be mounted on the top of the workbench 1, the initial positioning ring frame 3 and the center lines of the coordinate reference shaft 23 are arranged on the same horizontal line, the initial positioning frame is fixedly connected with the top of the workbench 1, the coordinate frame 1 by the coordinate reference shaft is connected with the slide 35, and the top of the slide frame 35 can be moved by the normal positioning frame, and the position of the slide is arranged on the top of the workbench 1.
Specifically, a plurality of mounting grooves 22 are formed in the top of the workbench 1, after one end of the control limiting ring frame 3 for fixing the three-dimensional scanning camera 9 is close to the mounting plate 2, the limiting ring frame 3 is inserted into the mounting grooves 22 through the inserted rod 21 fixed by the support plate 20, and then the limiting ring frame 3 can be mounted on the top of the workbench 1. The mounting grooves 22 are distributed on the top of the workbench 1 by taking the coordinate reference shaft 23 as a central shaft, and the inserting rods 21 are distributed annularly by taking the central shafts of the limiting ring frame 3 and the sample table 4. Therefore, the stop collar 3 is mounted on the top of the table 1 by positioning the insert rod 21 and the mounting groove 22, so that the center lines of the stop collar 3 and the coordinate reference shaft 23 are arranged on the same horizontal line, and the initial positioning of the stop collar 3 and the sample stage 4 is completed.
The two sides of the limiting ring frame 3 are fixedly connected with the handles 18, one handle 18 is fixedly connected with the two rubber sleeves 19, one part of the outer side of the power line 11 can be pressed into the two rubber sleeves 19, rubber is made into rubber sleeves 19 with certain elasticity and rubs with the power line 11, and the power line 11 is limited. The power line 11 is limited on one side of the limiting ring frame 3, so that the safety of the power line 11 in the process of holding the handle 18 to carry the limiting ring frame 3 is ensured.
The fixing bolt 37 is rotated, so that the fixing bolt 37 moves away from the mounting bent plate 17 and the touch control screen 15, the touch control screen 15 can lose fixation, then the touch control screen 15 is pulled to enable a plug of the touch control screen 15 to leave the inside of the socket 38, the disassembly of the touch control screen 15 can be completed, the touch control screen 15 can be quickly disassembled as required, and the sample sharing positioning platform formed by the parts such as the limiting ring frame 3, the sample table 4, the screw rod 7, the positive and negative motor 8, the hydraulic cylinder 14, the touch control screen 15 and the like can be quickly disassembled.
Then, the operation bolt 34 is rotated to make the operation bolt 34 rotate and move, the moved operation bolt 34 pulls the coordinate reference shaft 23 through the pull wire 35, so that the coordinate reference shaft 23 moves into the L-shaped groove, the bulge at the top of the workbench 1 disappears, and the slide glass can be normally placed at the top of the workbench 1 to perform sample detection work.
When the operation bolt 34 is rotated to release the pulling of the pulling wire 35 on the coordinate reference shaft 23, the spring 36 rebounded pushes the coordinate reference shaft 23 to move the top of the coordinate reference shaft 23 to the top of the table 1, and at this time, the coordinate reference shaft 23 cooperates with the three-dimensional scanning camera 9 to establish a coordinate point.
Claims (10)
1. The utility model provides a sample sharing location platform suitable for micro-area analysis, includes workstation (1) and scanning electron microscope (25), its characterized in that: the utility model discloses a scanning electronic microscope, including workstation (1), including workstation (3), sample platform (4), lead screw (7), positive and negative motor (8), guide bar (39) and pneumatic cylinder (14), workstation (1) top is provided with coordinate reference shaft (23), be provided with spacing link (3), sample platform (4), lead screw (7), positive and negative motor (8), guide bar (39) and pneumatic cylinder (14) between coordinate reference shaft (23) and workstation (25), spacing link (3) both sides are provided with three-dimensional scanning camera (9) and touch control screen (15) respectively, spacing link (3) inside is provided with winding displacement case (10), be provided with a plurality of backup pads (20) between spacing link (3) bottom and the workstation (1), touch control screen (15) inside is provided with treater (27), contrast unit (28), storage device (29) and instruction unit (30).
2. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: sample groove (5) have been seted up at sample platform (4) top, a plurality of spacing bottom plates (6) of sample platform (4) bottom fixedly connected with, spacing bottom plate (6) set up in L shape, sample platform (4) set up in coordinate reference shaft (23) top, instruction unit (30) are provided with detection function key (31), reset function key (32) and location function key (33).
3. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: the scanning electron microscope (25) comprises a display screen (26), the display screen (26) is arranged at one end of the scanning electron microscope (25), a mounting plate (2) is fixedly connected between the other end of the scanning electron microscope (25) and the workbench (1), and the display screen (26) is arranged at the top of the touch control screen (15).
4. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: one end of the three-dimensional scanning camera (9) penetrates through the limiting ring frame (3) and is fixedly connected with the limiting ring frame (3), the sample table (4) is sleeved on the outer side of the screw rod (7) through a ball nut pair, and the screw rod (7) is fixedly connected to the output end of the positive and negative motor (8).
5. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: the positive and negative motor (8) is provided with a limit groove (16), the guide rod (39) penetrates through the limit groove (16), and two ends of the guide rod (39) are fixedly connected with the limit ring frame (3).
6. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: the hydraulic cylinder (14) is fixedly connected with the limiting ring frame (3), one end of the hydraulic cylinder (14) is fixedly connected with the transmission plate (12), and a transmission bending plate (13) is fixedly connected between the transmission plate (12) and the positive and negative motor (8).
7. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: control cable (24) is fixedly connected between winding displacement case (10) and positive and negative motor (8), winding displacement case (10) and three-dimensional scanning camera (9) and pneumatic cylinder (14) electric connection, winding displacement case (10) one side fixedly connected with power cord (11), power cord (11) run through spacing ring frame (3) and with spacing ring frame (3) fixed connection.
8. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: a socket (38) is fixedly connected between one side of the flat cable box (10) and the limiting ring frame (3), an installation bent plate (17) is fixedly connected to the top of the limiting ring frame (3), and a fixing bolt (37) is connected between the installation bent plate (17) and the touch control screen (15) in a threaded mode.
9. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: a plurality of equal fixedly connected with inserted bar (21) in backup pad (20) bottom, a plurality of mounting groove (22) have been seted up at workstation (1) top, and a plurality of inserted bar (21) set up respectively in inside a plurality of mounting groove (22), spacing ring frame (3) both sides equal fixedly connected with handle (18), one of them handle (18) top fixedly connected with two rubber sleeve (19).
10. A sample sharing positioning platform suitable for micro-area analysis according to claim 1, wherein: an operation bolt (34) is connected to one side of the workbench (1), an L-shaped groove is formed in the top of the workbench (1), the coordinate reference shaft (23) is arranged inside the L-shaped groove, a spring (36) is fixedly connected between the bottom of the coordinate reference shaft (23) and the workbench (1), and a stay wire (35) is fixedly connected between the coordinate reference shaft (23) and the operation bolt (34).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310128765.2A CN116242868A (en) | 2023-02-17 | 2023-02-17 | Sample sharing positioning platform suitable for micro-area analysis |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310128765.2A CN116242868A (en) | 2023-02-17 | 2023-02-17 | Sample sharing positioning platform suitable for micro-area analysis |
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| Publication Number | Publication Date |
|---|---|
| CN116242868A true CN116242868A (en) | 2023-06-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310128765.2A Pending CN116242868A (en) | 2023-02-17 | 2023-02-17 | Sample sharing positioning platform suitable for micro-area analysis |
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| CN (1) | CN116242868A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117727610A (en) * | 2024-02-07 | 2024-03-19 | 国仪量子技术(合肥)股份有限公司 | Reset control method, device and system for sample stage scanning site and storage medium |
-
2023
- 2023-02-17 CN CN202310128765.2A patent/CN116242868A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117727610A (en) * | 2024-02-07 | 2024-03-19 | 国仪量子技术(合肥)股份有限公司 | Reset control method, device and system for sample stage scanning site and storage medium |
| CN117727610B (en) * | 2024-02-07 | 2024-05-03 | 国仪量子技术(合肥)股份有限公司 | Reset control method, device and system for sample stage scanning site and storage medium |
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