CN116190190B - Automatic impedance matching method, device, system, electronic equipment and storage medium - Google Patents
Automatic impedance matching method, device, system, electronic equipment and storage medium Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
- H01J37/32183—Matching circuits
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H7/00—Multiple-port networks comprising only passive electrical elements as network components
- H03H7/38—Impedance-matching networks
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
The application relates to the field of semiconductor manufacturing, in particular to an automatic impedance matching method, an automatic impedance matching device, an automatic impedance matching system, electronic equipment and a storage medium, which comprise the following steps: acquiring phase information U of load end Phase Amplitude information U MAG According to the phase information U Phase And amplitude information U MAG Calculating and obtaining impedance judgment information U rms The method comprises the steps of carrying out a first treatment on the surface of the When the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information is smaller than or equal to the matching voltage threshold value; the first adjustment command includes: only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information U rms Regulating to a minimum value; only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to enable the impedance judgment information U rms Regulating to minimum value, the method makes impedance judge information U by cyclic regulation rms A new minimum is generated until the matching voltage threshold is less than or equal to, thereby rapidly achieving impedance matching.
Description
Technical Field
The present invention relates to the field of semiconductor manufacturing, and in particular, to an automatic impedance matching method, apparatus, system, electronic device, and storage medium.
Background
Along with the development of science and technology and modern industry, the application of a radio frequency power supply is more and more widespread, and the application of the radio frequency power supply in the fields of vacuum coating, plasma equipment cleaning, semiconductor etching and the like, including the application of radio frequency discharge, radio frequency heating and the like, has the function of providing high-frequency energy for a reaction chamber at the rear end and obtaining active molecules after the input gas is plasmized. Because the gas in the reaction chamber has a severe impedance characteristic change before and after plasma treatment, if the impedance is mismatched, larger radio frequency power is reflected back to the radio frequency power supply from the chamber, and the radio frequency power supply is damaged. Because an impedance matching box is arranged between the radio frequency power supply and the reaction chamber for impedance matching, the power is fed into the reaction chamber with high efficiency.
The existing automatic impedance matching method generally performs impedance matching through modes such as directional coupling of an impedance matcher, specifically performs impedance matching by collecting the amplitude of incident voltage and reflected voltage of information and taking the amplitude of the reflection coefficient as a reference value regulated by an impedance matching network, but the regulation mode needs to constantly measure the change of impedance to realize impedance matching due to the fact that the real-time phase information of a load is not detected, so that the impedance matching can be completed through multiple iterations, and matching time is long and matching precision is low.
In view of the above problems, no effective technical solution is currently available.
Disclosure of Invention
The invention aims to provide an automatic impedance matching method, an automatic impedance matching device, an automatic impedance matching system, electronic equipment and a storage medium, and aims to solve the problems of large calculation amount and low efficiency of automatic impedance matching.
In a first aspect, the present application provides an automatic impedance matching method for completing impedance matching in an impedance matching box, the impedance matching box including a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group being composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 connected in parallel, the automatic impedance matching method including the steps of:
s1, acquiring phase information of a load endAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->；
S2, judging information at impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold;
the first adjustment command includes:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance information Regulating to a minimum value.
According to the automatic impedance matching method, the phase information of the load end in the impedance matching box is obtained in real timeAnd amplitude information->The impedance judgment information at the moment is adjusted to the minimum value by firstly adjusting the first adjustable capacitor C1 only, then selecting the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the type of the matching network, adjusting the impedance judgment information at the moment to the minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitor, and repeatedly adjusting the adjustable capacitor until the impedance judgment information is smaller than or equal to the matching voltage threshold value, wherein the matching mode continuously refreshes the impedance judgment information according to the matching mode by the adjusting method>Thereby rapidly determining the impedance determination informationThe impedance matching is realized by reducing the voltage to be less than or equal to the matching voltage threshold, and the mode can be used for adjusting different adjustable capacitors according to different matching network selections, so the adjusting mode can be suitable for different matchingA network.
Optionally, in step S2, when the matching network is Gama type, the first adjustment command is:
Only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the third adjustable capacitor C3 is adjusted to enable the impedance to judge informationRegulating to a minimum value.
Optionally, in step S2, when the matching network is Pi type, the first adjustment command is:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 is adjusted to enable the impedance to judge informationRegulating to a minimum value.
Optionally, the automatic impedance matching method provided in the present application, step S2 includes the following steps:
s21, judging information on impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold, or repeatedly executing the first adjustment command until the number of repetitions is greater than a preset number of cycles threshold.
According to the method, the impedance matching can be completed only by 2-3 times of circulation in the actual test process, so that the impedance matching is completed when the circulation times exceed the threshold value by setting the circulation times threshold value, and the situation that the matching is completed due to other factors but the circulation adjustment process is always performed is avoided, and the matching efficiency is affected.
Optionally, in step S1, the automatic impedance matching method provided in the present application determines impedance judgment informationThe calculation formula of (2) is as follows:
。
optionally, the application provides an automatic impedance matching method, phase informationAmplitude information for the output voltage measured based on a diode-balanced phase detector connected in an impedance matching box>Based on the output voltage measured by a diode amplitude detector connected in the impedance matching box.
According to the automatic impedance matching method, the phase information of the load end in the impedance matching box is obtained in real timeAnd amplitude information->The impedance judgment information at the moment is adjusted to the minimum value by firstly adjusting the first adjustable capacitor C1 only, then selecting the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the type of the matching network, adjusting the impedance judgment information at the moment to the minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitor, and repeatedly adjusting the adjustable capacitor until the impedance judgment information is smaller than or equal to the matching voltage threshold value, wherein the matching mode continuously refreshes the impedance judgment information through the adjusting method/>Thereby rapidly determining the impedance determination information The impedance matching is realized by reducing the voltage to be smaller than or equal to the matching voltage threshold, and different adjustable capacitors can be adjusted according to different matching networks, so that the adjusting mode can be suitable for different matching networks, and the matching efficiency is further ensured through the preset cycle number threshold.
In a second aspect, the present application further provides an automatic impedance matching device for completing impedance matching in an impedance matching box, the impedance matching box including a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group being composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel, the automatic impedance matching device including:
an acquisition module for acquiring phase information of the load endAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->；
An adjusting module for judging information on impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold;
the first adjustment command includes:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
Only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance informationRegulating to a minimum value.
The automatic impedance matching device provided by the application acquires the phase information of the load end in the impedance matching box in real timeAnd amplitude information->The impedance judgment information at the moment is adjusted to the minimum value by firstly adjusting the first adjustable capacitor C1 only, then selecting the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the type of the matching network, adjusting the impedance judgment information at the moment to the minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitor, repeatedly adjusting the adjustable capacitor until the impedance judgment information is smaller than or equal to the matching voltage threshold value, and continuously refreshing the impedance judgment information by the adjusting device>To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be smaller than or equal to the matching voltage threshold, and different adjustable capacitors can be adjusted according to different matching networks, so that the adjusting mode can be suitable for different matching networks, and the matching effect is further ensured by setting the cycle number threshold The rate.
In a third aspect, the present application also provides an automatic impedance matching system for completing impedance matching in an impedance matching box, comprising:
a reaction chamber for providing a reaction space for plasma activation;
a radio frequency power supply for providing energy for plasma activation;
the impedance matching box is used for completing the adjustment and change of impedance by adjusting the internal adjustable capacitor, and comprises a matching adjustment unit consisting of a parallel capacitor group and a third adjustable capacitor C3, wherein the parallel capacitor group consists of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel;
the real-time voltage detector is used for acquiring phase information of the load end in real timeAmplitude information +.>；
A loop matching unit for judging information in impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to a match voltage threshold, the first adjustment command comprising:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance informationRegulating to a minimum value;
the controller is electrically connected with the radio frequency power supply, the impedance matching box, the real-time voltage detector and the circulation matching unit;
The controller is used for acquiring phase information of the load end through the real-time voltage detectorAmplitude informationAnd is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->；
The controller is also used for judging information in impedance through the cyclic matching unitWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold.
The automatic impedance matching system provided by the application, the controller controls the real-time voltage detector to acquire the phase information of the load end in the impedance matching box in real timeAnd amplitude information->Then the control cycle matching unit adjusts the first adjustable capacitor C1 only to adjust the impedance judgment information to the minimum value, then selects the second adjustable capacitor C2 or the third adjustable capacitor C3 only to adjust according to the type of the matching network to adjust the impedance judgment information to the minimum value, and adjusts the adjustable capacitor in the adjustment process of the adjustable capacitorAcquiring impedance judgment information in real time, and repeatedly adjusting the adjustable capacitor until the impedance judgment information is smaller than or equal to a matching voltage threshold value, and continuously refreshing the impedance judgment information through the matching system>To thereby quickly add the impedance judgment information +. >The impedance matching is realized by reducing the voltage to be less than or equal to the matching voltage threshold value, and different adjustable capacitors can be adjusted according to different matching network selections, so that the adjusting mode can be suitable for different matching networks.
In a fourth aspect, the present application also provides an electronic device comprising a processor and a memory storing computer readable instructions which, when executed by the processor, perform the steps of the automatic impedance matching method as provided in the first aspect above: acquiring phase information of load endAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->The method comprises the steps of carrying out a first treatment on the surface of the In the impedance judgment information->When the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less thanOr equal to the match voltage threshold; the first adjustment command includes: only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value; only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value.
In a fifth aspect, the present application further provides a computer readable storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the automatic impedance matching method as provided in the first aspect above: acquiring phase information of load end Amplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->The method comprises the steps of carrying out a first treatment on the surface of the In the impedance judgment information->When the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold; the first adjustment command includes: only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value;only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value.
From the above, the automatic impedance matching method, device, system, electronic device and storage medium provided by the present application, where the matching method acquires the phase information of the load end in the impedance matching box in real timeAnd amplitude information->By adjusting only the first adjustable capacitor C1, the impedance determination information at this time is made +.>Adjusting to a minimum value, then selecting to adjust the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the type of the matching network, adjusting the impedance judgment information at the moment to the minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitor, and repeatedly adjusting the adjustable capacitor until the impedance judgment information is smaller than or equal to a matching voltage threshold value, wherein the matching mode continuously refreshes the impedance judgment information by the adjusting method >To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be smaller than or equal to the matching voltage threshold, and different adjustable capacitors can be adjusted according to different matching networks, so that the adjusting mode can be suitable for different matching networks, and the matching efficiency is further ensured by setting the cycle number threshold.
Additional features and advantages of the application will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the application. The objects and other advantages of the present application may be realized and attained by the structure particularly pointed out in the written description and drawings.
Drawings
Fig. 1 is a flowchart of steps of an automatic impedance matching method according to an embodiment of the present application.
Fig. 2 is a schematic structural diagram of a matching adjustment unit according to an embodiment of the present application.
Fig. 3 is a schematic diagram of a reflection coefficient changing with a capacitance value in a Gama-type matching network according to an embodiment of the present application.
Fig. 4 is a schematic diagram showing a change of reflection coefficient with capacitance in a Pi-type matching network according to an embodiment of the present application.
Fig. 5 is a schematic structural diagram of an automatic impedance matching device according to an embodiment of the present application.
Fig. 6 is a schematic structural diagram of an automatic impedance matching system according to an embodiment of the present application.
Fig. 7 is an electronic device provided in an embodiment of the present application.
Description of the reference numerals: 1. a radio frequency power supply; 2. an impedance matching box; 3. a reaction chamber; 4. a real-time voltage detector; 5. a controller; 6. a cyclic matching unit; 100. an acquisition module; 200. an adjustment module; 91. a processor; 92. a memory; 93. a communication bus.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are only some embodiments of the present application, not all embodiments. The components of the embodiments of the present application, which are generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present application without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. Meanwhile, in the description of the present application, the terms "first", "second", and the like are used only to distinguish the description, and are not to be construed as indicating or implying relative importance.
In the conventional impedance matching method, impedance matching is generally performed by means of directional coupling of an impedance matcher, specifically, by collecting the amplitude values of the incident voltage and the reflected voltage of information, and performing impedance matching by taking the amplitude value of the reflection coefficient as a reference value regulated by an impedance matching network, but the method has the disadvantages of long matching time and low matching precision due to the fact that the phase factor is not considered.
Referring to fig. 1 and 2, fig. 1 is a flowchart illustrating steps of an automatic impedance matching method provided in an embodiment of the present application, fig. 2 is a schematic structural diagram of a matching adjustment unit provided in an embodiment of the present application, and the automatic impedance matching method shown in fig. 1 is used for completing impedance matching in an impedance matching box 2, where the impedance matching box 2 includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 connected in parallel, and the automatic impedance matching method includes the following steps:
S1, acquiring phase information of a load endAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->；
S2, judging information at impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold;
the first adjustment command includes:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance informationRegulating to a minimum value.
Specifically, the adjustable capacitance is adjusted by adjusting the capacitance, and phase information is obtained during the adjustment of the capacitance of the adjustable capacitanceAmplitude information +.>Will correspondingly change, resulting in the calculated and acquired impedance judgment informationA change occurs.
Specifically, the impedance matching box 2 is provided with a matching adjustment unit, in this embodiment, the matching adjustment unit is suitable for performing impedance matching on the Pi-type matching network and the Gama-type (inverted-L-type) matching network, specifically, the matching adjustment unit includes a parallel capacitor group formed by connecting a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel, and a third adjustable capacitor C3 connected in series with the parallel capacitor group, where the parallel capacitor group further includes a first inductor L1, a first inductor The two ends of the inductor L1 are respectively connected with the first adjustable capacitor C1 and the second adjustable capacitor C2, and when the first adjustable capacitor C1, the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted, amplitude information of a load end is acquired in real timeAnd phase information->And is->And phase information->Outputting impedance judgment information in real time, specifically, phase information +.>The device is used for representing phase difference information between two input signals passing through two diodes in an impedance matching box, and specifically, the matching box further comprises a diode balance phase discriminator, specifically, the diode balance phase discriminator refers to a device capable of discriminating the phase difference of the input signals, and is a circuit for enabling the output voltage to have a definite relation with the phase difference between the two input signals; amplitude information->For characterizing the amplitude ratio information between two input signals passing through two diodes in an impedance matching box, in particular, the impedance matching box also comprises a diode amplitude detector, which is a device capable of detecting the peak value of an alternating signal, the input of the peak detection circuit being the detected signal, the output being ideally a stable voltage (peak value of the alternating signal), the diode amplitude detector having two diodes therein, the input signal applied to the two diodes, Measuring the voltage at the output of the diode amplitude detector, i.e. characterizing the amplitude ratio information of the two input signals, i.e. amplitude information +.>。
Specifically, referring to fig. 3, fig. 3 is a schematic diagram showing a change of a reflection coefficient with a capacitance value in a Gama-type matching network according to an embodiment of the present application, in the Gama-type matching network, the reflection coefficient is changed with a first adjustable capacitance C1 and a third adjustable capacitance C3, when the first adjustable capacitance C1 is constant, the reflection coefficient is changed with the third adjustable capacitance C3, and when the third adjustable capacitance C3 is adjusted to a certain position, there is a minimum value of the reflection coefficient, and at this time, by measuring phase informationAnd amplitude information->And calculated impedance judgment information +.>Is also a minimum value; when the third adjustable capacitor C3 is constant, the reflection coefficient changes along with the first adjustable capacitor C1, and when the first adjustable capacitor C1 is adjusted to a certain position, the reflection coefficient has a minimum value, and meanwhile, the impedance judges informationAlso, the value is extremely small, and thus it can be obtained that the impedance judgment information +.>A minimum value occurs and when the first adjustable capacitor C1 or the third adjustable capacitor C3 is cyclically adjusted, the impedance judgment information +.>The minimum value will be updated continuously, so in this scheme, the impedance judgment information can be made +_ by adjusting the first adjustable capacitor C1 or the third adjustable capacitor C3 >Gradually decreasing until impedance matching is completed.
Similarly, referring to fig. 4, fig. 4 is a schematic diagram showing a change of a reflection coefficient with a capacitance value in a Pi-type matching network according to an embodiment of the present application, in the Pi-type matching network, the reflection coefficient is changed with a first adjustable capacitance C1 and a second adjustable capacitance C2, when the first adjustable capacitance C1 is constant, the reflection coefficient is changed with the second adjustable capacitance C2, and when the second adjustable capacitance C2 is adjusted to a certain position, there is a minimum value of the reflection coefficient, and at this time, by measuring phase informationAnd amplitude information->And calculated impedance judgment information +.>Is also a minimum value; when the second adjustable capacitance C2 is constant, the reflection coefficient changes with the first adjustable capacitance C1, and when the first adjustable capacitance C1 is adjusted to a certain position, there is a minimum value of the reflection coefficient, while the impedance judgment information ∈ ->Also, the value is extremely small, and thus it can be obtained that the impedance judgment information +.>Minimum value can appear, and when the first adjustable capacitor C1 or the second adjustable capacitor C2 is adjusted in a circulating way, the impedance judgment informationThe minimum value will be updated continuously, so in this scheme, the impedance judgment information can be made +_ by adjusting the first adjustable capacitor C1 or the second adjustable capacitor C2 >Gradually decrease until completionAnd (5) impedance matching.
In the present embodiment, when the impedances are completely matched, the amplitude informationAnd phase information->All are zero, i.e. the output impedance judgment information +.>Also zero, in actual operation, the number of adjustments required to match the impedance is large, resulting in a long matching time, so it is preferable that in this embodiment, a matching voltage threshold is preset before matching, and the output impedance judgment information +.>When the impedance matching voltage threshold value is smaller than or equal to the matching voltage threshold value, impedance matching can be completed, therefore, the matching voltage threshold value is set on the premise that the impedance after matching cannot affect the subsequent links, and the adjustment times of the adjustable capacitor are reduced on the premise that the subsequent process is not affected by setting the matching voltage threshold value, so that the efficiency of impedance matching is improved.
Preferably, in some embodiments, when one of the first adjustable capacitor C1, the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted, when the output impedance judgment information is smaller than or equal to the matching voltage threshold value, no adjustment is needed for the other adjustable capacitors, so that the matching efficiency is improved.
According to the automatic impedance matching method, the phase information of the load end in the impedance matching box 2 is obtained in real timeAnd amplitude information->By adjusting only the first adjustable capacitor C1, the impedance determination information at this time is made +.>The impedance judgment information is obtained in real time in the process of adjusting the adjustable capacitance, and the impedance matching is completed until the impedance judgment information is smaller than or equal to a matching voltage threshold value, and the matching mode continuously refreshes the impedance judgment information through the adjustment method>Thereby rapidly determining the impedance determination informationThe impedance matching is realized by reducing the voltage to be less than or equal to the matching voltage threshold value, and different adjustable capacitors can be adjusted according to different matching network selections, so that the adjusting mode can be suitable for different matching networks.
In some preferred embodiments, in step S2, when the matching network is of Gama type, the first adjustment command is:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information Regulating to a minimum value;
only the third adjustable capacitor C3 is adjusted to enable the impedance to judge informationRegulating to a minimum value.
Specifically, in some embodiments, when the matching network to be impedance-matched is a Gama-type network (i.e., an inverted-L network), the second tunable capacitor C2 needs to be kept constant, and only the first tunable capacitor C1 and the third tunable capacitor C3 need to be adjusted.
Optionally, in some embodiments, when impedance matching is performed on a Gama-type network (i.e., an inverted-L network), the first tunable capacitance C1 and the second tunable capacitance C2 are kept constant,only the third adjustable capacitor C3 is adjusted to enable the impedance judgment information at the momentTo be a minimum value, the second adjustable capacitor C2 and the third adjustable capacitor C3 are kept constant, and only the first adjustable capacitor C1 is regulated to enable the impedance judgment information +.>With minimum value, the adjustment step is circulated until the impedance judgment information +.>Impedance matching can be completed when the matching voltage threshold is smaller than or equal to the matching voltage threshold.
In some preferred embodiments, in step S2, when the matching network is of Pi type, the first adjustment command is:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 is adjusted to enable the impedance to judge information Regulating to a minimum value.
Specifically, in some embodiments, when the matching network to be impedance-matched is a Pi-type network, the third tunable capacitor C3 needs to be kept constant, and only the first tunable capacitor C1 and the second tunable capacitor C2 need to be adjusted.
Optionally, in some embodiments, when impedance matching is performed on the Pi-type network, the first adjustable capacitor C1 and the third adjustable capacitor C3 are kept constant, and only the second adjustable capacitor C2 is adjusted, so that the impedance at this time determines informationTo be a minimum value, the second adjustable capacitor C2 and the third adjustable capacitor C3 are kept constant, and only the first adjustable capacitor C1 is regulated to enable the impedance judgment information +.>With minimum value, the adjustment step is circulated until the impedance judgment information +.>Impedance matching can be completed when the matching voltage threshold is smaller than or equal to the matching voltage threshold.
Preferably, in this embodiment, since the first adjustable capacitor C1 needs to be adjusted for both Gama-type and Pi-type networks, in this embodiment, the second adjustable capacitor C2 and the third adjustable capacitor C3 are kept constant, and the first adjustable capacitor C1 is adjusted to determine the impedance information at this timeThe second tunable capacitor C2 or the third tunable capacitor C3 is selected to be adjusted to be a minimum value according to whether the network to be impedance-matched is a Gama type network or a Pi type network.
In some preferred embodiments, step S2 comprises the steps of:
s21, judging information on impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold, or repeatedly executing the first adjustment command until the number of repetitions is greater than a preset number of cycles threshold.
Specifically, in the actual operation process, the impedance matching process only needs to be cycled for two to three times, but in some embodiments, the problem that the output impedance judgment information cannot be smaller than or equal to the matching threshold information all the time due to other factors such as electronic element faults and the like is unequal to the actual situation, and further the cycling process is caused to continuously cycle, so in this embodiment, preferably, a cycle number threshold is additionally set in addition to the matching voltage threshold, and when the actual cycle number exceeds the cycle number threshold, the impedance judgment information is still displayed to be greater than the matching voltage threshold, the impedance matching is completed by default.
In some preferred embodiments, in step S1, the impedance judgment informationThe calculation formula of (2) is as follows:
。
specifically, in the process of adjusting the adjustable capacitance, the phase information is output And amplitude informationCan correspondingly change, and in the adjusting process, the reflection coefficient needs to be reduced to a certain degree to realize impedance matching, in the embodiment, the phase information is +.>And amplitude information->As the reflection coefficient changes, therefore in this embodiment by impedance judgment information +.>Characterizing phase information->And amplitude information->Is determined as the change trend of the impedance judgment information +.>When the reflection coefficient is the minimum value, the reflection coefficient is also the minimum value.
In some preferred embodimentsIn an embodiment, the phase informationAmplitude information for the output voltage measured based on a diode-balanced phase detector connected in an impedance matching box>Based on the output voltage measured by a diode amplitude detector connected in the impedance matching box.
Specifically, in the present embodiment, the diode balance phase detector includes two diodes, and the voltage at the output terminal in the diode balance phase detector is measured as the phase informationFor characterizing the phase difference information between two input signals passing through two diodes in an impedance matching box, the diode amplitude detector comprises two diodes, and the voltage at the output end of the diode amplitude detector is measured as amplitude information +. >For characterizing the amplitude ratio information between two input signals passing through two diodes in an impedance matching box.
The automatic impedance matching method provided in this embodiment obtains the phase information of the load end in the impedance matching box 2 in real timeAnd amplitude information->By adjusting only the first adjustable capacitor C1, the impedance judgment information at the moment is obtainedThe impedance judgment information is adjusted to the minimum value, and then the impedance is obtained in real time in the process of adjusting the adjustable capacitance by selecting and adjusting only one of the second adjustable capacitance C2 or the third adjustable capacitance C3 according to the requirement of the matching networkJudging information, finishing impedance matching until the impedance judging information is smaller than or equal to a matching voltage threshold value, wherein the matching mode continuously refreshes the impedance judging information by the adjusting method>To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be smaller than or equal to the matching voltage threshold, and different adjustable capacitors can be adjusted according to different matching networks, so that the adjusting mode can be suitable for different matching networks, and the matching efficiency is further ensured by setting the cycle number threshold.
In a second aspect, referring to fig. 5, fig. 5 is a schematic structural diagram of an automatic impedance matching device provided in an embodiment of the present application, where the automatic impedance matching device shown in fig. 5 is configured to perform impedance matching in an impedance matching box 2, the impedance matching box 2 includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 connected in parallel, and the automatic impedance matching device includes:
an acquisition module 100 for acquiring phase information of a load sideAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->；
An adjusting module 200 for determining information in impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold;
the first adjustment command includes:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance informationRegulating to a minimum value.
The automatic impedance matching device provided in this embodiment acquires the phase information of the load end in the impedance matching box 2 in real time through the acquisition module 100 And amplitude information->Then, only the first adjustable capacitor C1 is adjusted by the adjusting module 200 to determine the impedance information +.>Adjusting to minimum value, then selecting one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the requirement of the matching network, adjusting the impedance judgment information to minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitors, completing impedance matching until the impedance judgment information is smaller than or equal to the matching voltage threshold value, and continuously refreshing the impedance judgment information by the adjusting device>To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be less than or equal to the matching voltage threshold value, and different adjustable capacitors can be adjusted according to different matching network selections, so that the adjusting mode can be suitable for different matching networks.
In a third aspect, referring to fig. 6, fig. 6 is a schematic structural diagram of an automatic impedance matching system provided in an embodiment of the present application, and the automatic impedance matching system shown in fig. 6 is configured to perform impedance matching in an impedance matching box 2, and includes:
a reaction chamber 3 for providing a reaction space for plasma activation;
A radio frequency power supply 1 for supplying energy for plasma activation;
the impedance matching box 2 is used for completing the adjustment and change of impedance by adjusting the internal adjustable capacitor, the impedance matching box 2 comprises a matching adjustment unit consisting of a parallel capacitor group and a third adjustable capacitor C3, and the parallel capacitor group consists of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel;
a real-time voltage detector 4 for acquiring the phase information of the load end in real timeAmplitude information +.>；
A loop matching unit 6 for determining information on impedanceWhen the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to a match voltage threshold, the first adjustment command comprising:
only the first adjustable capacitor C1 is adjusted to enable the impedance judgment informationRegulating to a minimum value;
only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to judge the impedance informationRegulating to a minimum value;
the controller 5 is electrically connected with the radio frequency power supply 1, the impedance matching box 2, the real-time voltage detector 4 and the circulation matching unit 6;
the controller 5 is used for acquiring phase information of the load end through the real-time voltage detector 4Amplitude informationAnd is based on phase information- >And amplitude information->Calculating and acquiring impedance judgment information->；
The controller 5 is also used for judging information at the impedance through the cyclic matching unit 6When the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold.
According to the automatic impedance matching system provided by the embodiment of the application, the controller 5 controls the real-time voltage detector 4 to acquire the phase information of the load end in the impedance matching box 2 in real timeAnd amplitude information->Then, the control loop matching unit 6 adjusts only the first adjustable capacitor C1 to make the impedance determination information +.>Adjusting to minimum value, then selecting one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the requirement of the matching network, adjusting the impedance judgment information to minimum value, acquiring the impedance judgment information in real time in the process of adjusting the adjustable capacitors, completing impedance matching until the impedance judgment information is smaller than or equal to a matching voltage threshold value, and continuously refreshing the impedance judgment information by the matching system>To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be less than or equal to the matching voltage threshold value, and different adjustable capacitors can be adjusted according to different matching network selections, so that the adjusting mode can be suitable for different matching networks.
In a fourth aspect, referring to fig. 7, fig. 7 is an electronic device provided in the present application, including: processor 91 and memory 92, the processor 91 and memory 92 being interconnected and in communication with each other by a communication bus 93 and/or other form of connection mechanism (not shown), the memory 92 storing computer readable instructions executable by the processor 91 for execution by the processor 91 when the electronic device is operating to perform any of the alternative implementations of the above embodiments to perform the functions of: acquiring phase information of load endAmplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->The method comprises the steps of carrying out a first treatment on the surface of the In the impedance judgment information->When the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold; the first adjustment command includes: only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value; only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value.
In a fifth aspect, the present application provides a computer readable storage medium having stored thereon a computer program which, when executed by the processor 91, performs a method in any of the alternative implementations of the above embodiments to implement the following functions: acquiring phase information of load end Amplitude information +.>And is based on phase information->And amplitude information->Calculating and acquiring impedance judgment information->The method comprises the steps of carrying out a first treatment on the surface of the In the impedance judgment information->When the impedance value is larger than the preset matching voltage threshold value, repeatedly executing the first adjusting command until the impedance judgment information +.>Less than or equal to the match voltage threshold; the first adjustment command includes: only the first adjustable capacitor C1 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value; only the second adjustable capacitor C2 or the third adjustable capacitor C3 is adjusted to enable the impedance judgment information +.>Regulating to a minimum value.
From the above, the automatic impedance matching method, device, system, electronic device and storage medium provided by the present application acquire the phase information of the load end in the impedance matching box 2 in real timeAnd amplitude information->By adjusting only the first adjustable capacitor C1, the impedance determination information at this time is made +.>Adjusting to minimum value, then selecting and adjusting only one of the second adjustable capacitor C2 or the third adjustable capacitor C3 according to the requirement of the matching network, adjusting the impedance judgment information to minimum value, and acquiring the impedance judgment information in real time in the adjustment process of the adjustable capacitor until the impedance judgment information is smaller than or equal to the matching voltage threshold value Namely, the impedance matching is completed by continuously refreshing the impedance judgment information +.>To thereby quickly add the impedance judgment information +.>The impedance matching is realized by reducing the voltage to be smaller than or equal to the matching voltage threshold, and different adjustable capacitors can be adjusted according to different matching networks, so that the adjusting mode can be suitable for different matching networks, and the matching efficiency is further ensured by setting the cycle number threshold.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, for example, the division of units is merely a logical function division, and there may be other manners of division in actual implementation, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted, or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form.
Further, the units described as separate units may or may not be physically separate, and units displayed as units may or may not be physical units, may be located in one place, or may be distributed over a plurality of network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.
Furthermore, functional modules in various embodiments of the present application may be integrated together to form a single portion, or each module may exist alone, or two or more modules may be integrated to form a single portion.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above is only an example of the present application, and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.
Claims (9)
1. An automatic impedance matching method for completing impedance matching in an impedance matching box, characterized in that the impedance matching box comprises a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel, the automatic impedance matching method comprises the following steps:
s1, acquiring phase information of a load endAmplitude information +.>And according to said phase information +.>And the amplitude information +.>Calculating and acquiring impedance judgment information->The calculation formula of the impedance judgment information is as follows:
；
s2, judging information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the matching voltage threshold;
the first adjustment command includes:
firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;
then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedAnd adjusting to a minimum value, wherein the matching network comprises a Gama type matching network or a Pi type matching network.
2. The automatic impedance matching method according to claim 1, wherein in step S2, when the matching network is Gama type, the first adjustment command is:
firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;
then adjusting only the third adjustable capacitor C3 to make the impedance judge informationRegulating to a minimum value.
3. An automatic impedance matching method according to claim 1, wherein in step S2, when the matching network is of Pi type, the first adjustment command is:
firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;
then only the second adjustable capacitor C2 is adjusted to enable the impedance to judge informationRegulating to a minimum value.
4. An automatic impedance matching method according to claim 1, wherein step S2 comprises the steps of:
s21, judging information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>And the first regulation command is smaller than or equal to the matching voltage threshold value, or is repeatedly executed until the repeated times are larger than a preset cycle times threshold value.
5. An automatic impedance matching method according to claim 1, wherein said phase informationFor balancing the output voltage measured by the phase detector based on the diodes connected in the impedance matching box, the amplitude information>Based on the output measured by a diode amplitude detector connected in the impedance matching boxA voltage.
6. An automatic impedance matching device for completing impedance matching in an impedance matching box, characterized in that the impedance matching box includes a matching adjustment unit composed of a parallel capacitor group and a third adjustable capacitor C3, the parallel capacitor group is composed of a first adjustable capacitor C1 and a second adjustable capacitor C2 in parallel, the automatic impedance matching device includes:
an acquisition module for acquiring phase information of the load endAmplitude information +.>And according to the phase informationAnd the amplitude information +.>Calculating and acquiring impedance judgment information->Said impedance judgment information->The calculation formula of (2) is as follows:
；
an adjusting module for determining information on the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the matching voltage threshold;
The first adjustment command includes:
firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;
then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedAnd adjusting to a minimum value, wherein the matching network comprises a Gama type matching network or a Pi type matching network.
7. An automatic impedance matching system for performing impedance matching in an impedance matching box, comprising:
a reaction chamber for providing a reaction space for plasma activation;
a radio frequency power supply for providing energy for the plasma activation;
wherein the automatic impedance matching system further comprises:
the impedance matching box is used for completing the adjustment and change of impedance by adjusting the internal adjustable capacitor, and comprises a matching adjustment unit consisting of a parallel capacitor group and a third adjustable capacitor C3, wherein the parallel capacitor group consists of a first adjustable capacitor C1 and a second adjustable capacitor C2 which are connected in parallel;
the real-time voltage detector is used for detecting the phase information of the load end in real timeAmplitude information +.>；
A loop matching unit for judging information in impedance When the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +.>Less than or equal to the match voltage threshold, the first adjustment command comprising:
firstly, only the first adjustable capacitor C1 is adjusted to enable the impedance to judge informationRegulating to a minimum value;
then, according to the requirement of the matching network, only the second adjustable capacitor C2 or the third adjustable capacitor C3 is selected to be adjusted, so that the impedance judgment information is obtainedThe matching network comprises a Gama type matching network or a Pi type matching network;
the controller is electrically connected with the radio frequency power supply, the impedance matching box, the real-time voltage detector and the circulation matching unit;
the controller is used for controlling the real-time voltage detector to acquire the phase information of the load end in real timeAmplitude information +.>And according to said phase information +.>And the amplitude information +.>Calculating and acquiring impedance judgment information->Said impedance judgment information->The calculation formula of (2) is as follows:
；
the controller is also used for controlling the cyclic matching unit to judge information in the impedanceWhen the impedance judgment information is larger than a preset matching voltage threshold value, repeatedly executing a first regulation command until the impedance judgment information +. >Less than or equal to the matching voltage threshold.
8. An electronic device comprising a processor and a memory storing computer readable instructions that, when executed by the processor, perform the steps of the method of any of claims 1-5.
9. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, performs the steps of the method according to any of claims 1-5.
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