CN116124243A - Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment - Google Patents

Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment Download PDF

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Publication number
CN116124243A
CN116124243A CN202111339578.6A CN202111339578A CN116124243A CN 116124243 A CN116124243 A CN 116124243A CN 202111339578 A CN202111339578 A CN 202111339578A CN 116124243 A CN116124243 A CN 116124243A
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China
Prior art keywords
gas
cylinder
interlocking
data
safety interlocking
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CN202111339578.6A
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Chinese (zh)
Inventor
梁賢石
金成昱
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Chengdu Gaozhen Technology Co ltd
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Chengdu Gaozhen Technology Co ltd
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Priority to CN202111339578.6A priority Critical patent/CN116124243A/en
Publication of CN116124243A publication Critical patent/CN116124243A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F22/00—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for
    • G01F22/02—Methods or apparatus for measuring volume of fluids or fluent solid material, not otherwise provided for involving measurement of pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
    • F17C13/028—Special adaptations of indicating, measuring, or monitoring equipment having the volume as the parameter
    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
    • G08B21/18—Status alarms
    • G08B21/182—Level alarms, e.g. alarms responsive to variables exceeding a threshold

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Emergency Alarm Devices (AREA)

Abstract

The invention discloses a method, a system and equipment for on-line monitoring and safety interlocking of a laser gas supply cylinder, wherein the method comprises the following steps: acquiring gas cylinder gas allowance detection data in real time; and analyzing and processing the acquired gas residual detection data, and carrying out alarm and/or safety interlocking control according to the processing result. According to the invention, the gas residual data of the gas cylinder in the gas holder system is uploaded to the remote monitoring system for on-line monitoring, and early warning/alarm information is sent to staff, so that the laser cannot work normally due to the fact that the gas cylinder is not replaced in time, and meanwhile, the labor is saved.

Description

Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment
Technical Field
The invention belongs to the technical field of laser equipment monitoring for projection lithography machines, and particularly relates to a method, a system and equipment for on-line monitoring and safety interlocking of a laser gas supply cylinder.
Background
The lasers adopted by the existing projection lithography machine, such as Cymer, giga Photon lasers and the like, generally use two sets of gas cylinders for gas supply, and the working process is as follows: one group of gas cylinders is used for supplying gas, and when the gas in the group of gas cylinders is used up, the gas is automatically switched to the other group of gas cylinders for supplying gas; in the process, the gas residual amounts of the two groups of gas cylinders are displayed on a photoetching platform in real time, and workers are required to go to the site to perform manual confirmation so as to replace the gas cylinders, thereby wasting a great amount of manpower and material resources; meanwhile, if the worker is careless, the gas cylinders are not replaced in time, so that the gas in the two groups of gas cylinders is exhausted, laser gas cannot be supplied, and the laser cannot work normally.
Disclosure of Invention
In order to solve the problem that the work of a laser is affected when the existing gas cylinder allowance needs to be manually confirmed on site to replace the gas cylinder, the invention provides an online monitoring and safety interlocking method for a laser gas supply gas cylinder.
The invention is realized by the following technical scheme:
the laser gas supply cylinder on-line monitoring and safety interlocking method comprises the following steps:
acquiring gas cylinder gas allowance detection data in real time;
and analyzing and processing the acquired gas residual detection data, and carrying out alarm and/or safety interlocking control according to the processing result.
Preferably, the step of acquiring the gas cylinder gas remaining amount detection data in real time specifically includes the following steps:
and acquiring the gas pressure value in the gas cylinder detected by the pressure sensor in the gas holder system in real time.
Preferably, the method of the present invention analyzes and processes the acquired gas remaining amount detection data, and performs alarm and/or safety interlock control steps according to the processing result, specifically includes:
and comparing the acquired gas residual detection data with a preset threshold value, and if the gas residual of at least one gas cylinder is judged to be insufficient, giving an alarm and sending an ordering signal to an automatic ordering system for ordering.
Preferably, the method of the present invention analyzes and processes the acquired gas remaining amount detection data, and performs alarm and/or safety interlock control steps according to the processing result, and specifically further includes:
if the gas residual amounts of all the gas cylinders in the gas holder system are insufficient, an interlocking signal is sent to an interlocking device for interlocking.
Preferably, the method for judging the deficiency of the gas allowance of the invention specifically comprises the following steps:
if the gas remaining amount detection data of the gas cylinder is less than or equal to the threshold value, the gas remaining amount of the gas cylinder is judged to be insufficient.
In a second aspect, the invention provides an online monitoring and safety interlocking system of a laser gas supply cylinder, which comprises a gateway and a fault monitoring control system;
the gateway is connected with a gas cylinder sensor in the gas holder system, and the gas cylinder sensor is used for collecting gas residual data of the gas cylinder and transmitting the gas residual data to the gateway;
the gateway uploads the acquired gas residual data of the gas cylinder to the fault monitoring control system;
the fault monitoring control system analyzes and processes the received data and sends control signals to other related systems/devices according to the processing result.
Preferably, the fault monitoring control system of the present invention analyzes and processes the acquired data specifically includes:
comparing the acquired data with a preset threshold value, and judging that the gas residual quantity of the gas cylinder is insufficient if the acquired gas residual quantity data is smaller than or equal to the threshold value;
if the gas residual quantity of at least one gas cylinder in the gas holder system is insufficient, alarming is carried out, and the ordering information is sent to the automatic ordering system for ordering.
Preferably, the fault monitoring control system of the present invention further specifically includes:
if the gas residual quantity of all the gas cylinders in the gas holder system is insufficient, alarming and sending ordering information to an automatic ordering system for ordering, and simultaneously sending an interlocking signal to an interlocking device for safety interlocking, and sending an unlocking signal to the interlocking device for unlocking until the gas residual quantity data of at least one gas cylinder in the gas holder system is greater than a threshold value.
In a third aspect, the invention proposes a computer device comprising a memory storing a computer program and a processor implementing the steps of the method of the invention when the processor executes the computer program.
In a fourth aspect, the invention proposes a computer-readable storage medium, on which a computer program is stored, which computer program, when being executed by a processor, carries out the steps of the method according to the invention.
The invention has the following advantages and beneficial effects:
the method and the system provided by the invention can realize the on-line monitoring of the gas supply cylinder of the laser for the lithography machine, and send out an early warning/alarm signal according to the monitoring result so as to remind relevant staff to replace the gas cylinder in time, prevent the situation that the laser cannot work normally due to the fact that the gas cylinder is not replaced in time, and improve the safety and reliability of equipment. Meanwhile, the invention can also automatically order the gas cylinders through monitoring signals.
The invention also controls the starting of the interlocking equipment by monitoring the allowance of 2 groups of gas cylinders, thereby realizing equipment interlocking and preventing the laser equipment from being wrong due to the fact that the gas cylinders are not replaced in time.
Drawings
The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention. In the drawings:
FIG. 1 is a schematic flow chart of the method of the present invention.
Fig. 2 is a schematic block diagram of a computer device of the present invention.
Fig. 3 is a system schematic block diagram of the present invention.
Detailed Description
For the purpose of making apparent the objects, technical solutions and advantages of the present invention, the present invention will be further described in detail with reference to the following examples and the accompanying drawings, wherein the exemplary embodiments of the present invention and the descriptions thereof are for illustrating the present invention only and are not to be construed as limiting the present invention.
Example 1
Aiming at the problems that the replacement of the gas supply cylinder of the existing laser device needs manual on-site confirmation, and the gas of the cylinder is used up and can not be supplied to the laser device due to human errors, the embodiment provides an on-line monitoring and safety interlocking method for the gas supply cylinder of the laser device.
As shown in fig. 1, the method of the present embodiment includes:
and 101, acquiring gas cylinder gas residual quantity detection data in real time.
In this embodiment, the pressure value V of the gas cylinder a is obtained in real time A And the pressure value V of the gas cylinder B B . The pressure value in the gas cylinder is positively correlated with the gas remaining in the gas cylinder, so this embodiment characterizes the gas remaining in the gas cylinder by its pressure value.
In the embodiment, the gateway acquires the pressure data of two groups of gas cylinders (gas cylinder A and gas cylinder B) in the gas holder system, and uploads the pressure data to the remote fault monitoring control system for processing, control and alarming.
And 102, analyzing and processing the acquired gas residual quantity detection data, and carrying out alarm and/or safety interlocking control according to the processing result.
Step 102 specifically includes:
the embodiment is based on the set pressure threshold V 0 Pressure threshold V in the present embodiment 0 The pressure value of the gas cylinder A and the pressure value of the gas cylinder B are respectively compared with a pressure threshold value;
if the pressure value of the gas cylinder A or/and the gas cylinder B is smaller than or equal to the pressure threshold value, judging that the gas residual quantity of the two groups of gas cylinders is insufficient, sending out warning/alarming information to remind relevant staff to replace the gas cylinders, and controlling an automatic ordering system to order. In this embodiment, the warning/alarm signal is sent out as long as the air remaining quantity in at least one group of air cylinders is monitored in real time, so that the staff is reminded to replace the corresponding air cylinders, the site confirmation is not needed, and meanwhile, the error work of the laser device caused by human errors is prevented.
Meanwhile, under the condition that the gas residual amounts of the two groups of gas cylinders are insufficient, the interlocking device is controlled to work for safety interlocking until the pressure value of any one gas cylinder is monitored to be larger than the pressure threshold value, and the interlocking device is controlled to be unlocked. In other words, the embodiment controls the interlocking device to perform safety interlocking under the condition that the gas residual quantity in the two groups of gas cylinders is monitored to be insufficient in real time, so that the reliability of the laser device is further ensured.
For example, the pressure value V of the gas cylinder A A And a pressure threshold V 0 Comparing if V A >V 0 No warning/alarm information is sent out; if V is A ≤V 0 Sending out warning/alarm information to remind a worker to replace the gas cylinder A in time and send out a signal to control an automatic ordering system to order;
the pressure value V of the gas cylinder B B And a pressure threshold V 0 Comparing if V B >V 0 No warning/alarm information is sent out; if V is B ≤V 0 And sending out warning/alarm information to remind a worker to replace the gas cylinder B in time and send out a signal to control the automatic ordering system to order.
If V is A ≤V 0 And V is B ≤V 0 And sending out warning/alarm information to remind a worker to replace the gas cylinder A and the gas cylinder B in time, sending out a signal to control the automatic ordering system to order, and sending out a control signal to control the interlocking device to carry out safety interlocking.
The embodiment also provides a computer device for executing the method of the embodiment.
As particularly shown in fig. 2, the computer device includes a processor, an internal memory, and a system bus; various device components, including internal memory and processors, are connected to the system bus. A processor is a piece of hardware used to execute computer program instructions by basic arithmetic and logical operations in a computer system. Internal memory is a physical device used to temporarily or permanently store computing programs or data (e.g., program state information). The system bus may be any of several types of bus structures including a memory bus or memory controller, a peripheral bus, and a local bus. The processor and the internal memory may communicate data via a system bus. The internal memory includes a Read Only Memory (ROM) or a flash memory (not shown), and a Random Access Memory (RAM), which generally refers to a main memory loaded with an operating system and computer programs.
Computer devices typically include an external storage device. The external storage device may be selected from a variety of computer readable media, which refers to any available media that can be accessed by a computer device, including both removable and fixed media. For example, computer-readable media includes, but is not limited to, flash memory (micro-SD card), CD-ROM, digital Versatile Disks (DVD) or other optical disk storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which can be used to store the desired information and which can be accessed by a computer device.
The computer device may be logically connected to one or more network terminals in a network environment. The network terminal may be a personal computer, server, router, smart phone, tablet computer, or other public network node. The computer device is connected to a network terminal through a network interface (local area network LAN interface). Local Area Networks (LANs) refer to computer networks of interconnected networks within a limited area, such as a home, school, computer laboratory, or office building using network media. WiFi and twisted pair wired ethernet are the two most common technologies used to construct local area networks.
It should be noted that other computer systems including more or fewer subsystems than computer devices may also be suitable for use with the invention.
As described in detail above, the computer apparatus suitable for the present embodiment can perform the specified operations of the on-line monitoring and safety interlock method. The computer device performs these operations in the form of software instructions that are executed by a processor in a computer-readable medium. The software instructions may be read into memory from a storage device or from another device via a lan interface. The software instructions stored in the memory cause the processor to perform the method of processing group member information described above. Furthermore, the invention may be implemented by means of hardware circuitry or by means of combination of hardware circuitry and software instructions. Thus, implementation of the present embodiments is not limited to any specific combination of hardware circuitry and software.
Example 2
The embodiment provides an online monitoring and safety interlocking system of a laser gas supply cylinder, which is shown in fig. 3 and comprises a gateway and a fault monitoring control system;
the gateway is connected with a gas cylinder pressure sensor in the gas holder system through a communication cable, the pressure sensor is used for detecting the pressure of the gas cylinder, the gas holder system of the embodiment comprises a gas cylinder A and a gas cylinder B, the gas cylinder A and the gas cylinder B are respectively provided with a pressure sensor for monitoring pressure data of the gateway, and the detected pressure value is transmitted to the gateway through the communication cable.
The gateway uploads the acquired gas cylinder pressure value to a fault monitoring control system for analysis and processing, and sends control signals to other related systems/devices, such as an automatic ordering system, an interlocking device, an alarm device and the like, according to the processing result.
The specific analysis processing process comprises the following steps:
the fault monitoring control system judges whether the gas cylinder needs to be replaced according to a preset pressure threshold value; if the gas cylinder needs to be replaced (namely, the pressure value of the gas cylinder A or/and the gas cylinder B is smaller than or equal to the pressure threshold value), warning/alarming is carried out, for example, warning/alarming information is sent to a mobile terminal of a relevant worker, or the warning/alarming information is displayed in real time, or a control signal is sent to control an alarming device to carry out alarming and the like; meanwhile, the fault monitoring control system sends information to the automatic ordering system to automatically order.
The fault monitoring control system judges whether interlocking control is needed according to a preset pressure threshold value; and if the pressure values of the two groups of gas cylinders, namely the gas cylinder A and the gas cylinder B, are smaller than or equal to the pressure threshold value, an interlocking signal is sent to the interlocking device for interlocking, and then, when the pressure value of at least one group of gas cylinder A is monitored to be larger than the pressure threshold value in real time, an unlocking signal is sent to the interlocking device for unlocking.
The foregoing description of the embodiments has been provided for the purpose of illustrating the general principles of the invention, and is not meant to limit the scope of the invention, but to limit the invention to the particular embodiments, and any modifications, equivalents, improvements, etc. that fall within the spirit and principles of the invention are intended to be included within the scope of the invention.

Claims (10)

1. The method for on-line monitoring and safety interlocking of the laser gas supply cylinder is characterized by comprising the following steps:
acquiring gas cylinder gas allowance detection data in real time;
and analyzing and processing the acquired gas residual detection data, and carrying out alarm and/or safety interlocking control according to the processing result.
2. The method for on-line monitoring and safety interlocking of laser gas supply cylinders according to claim 1, wherein the step of acquiring the cylinder gas remaining amount detection data in real time is specifically:
and acquiring the gas pressure value in the gas cylinder detected by the pressure sensor in the gas holder system in real time.
3. The method for on-line monitoring and safety interlocking of a laser gas supply cylinder according to claim 1, wherein the steps of analyzing the acquired gas remaining amount detection data and performing an alarm and/or safety interlocking control according to the processing result specifically include:
and comparing the acquired gas residual detection data with a preset threshold value, and if the gas residual of at least one gas cylinder is judged to be insufficient, giving an alarm and sending an ordering signal to an automatic ordering system for ordering.
4. The method for on-line monitoring and safety interlocking of a laser gas supply cylinder according to claim 3, wherein the steps of analyzing the acquired gas remaining amount detection data and performing an alarm and/or safety interlocking control according to the processing result specifically further comprise:
if the gas residual amounts of all the gas cylinders in the gas holder system are insufficient, an interlocking signal is sent to an interlocking device for interlocking.
5. The method for on-line monitoring and safety interlocking of laser gas supply cylinders according to claim 3, wherein the method for judging the insufficient gas allowance is specifically as follows:
if the gas remaining amount detection data of the gas cylinder is less than or equal to the threshold value, the gas remaining amount of the gas cylinder is judged to be insufficient.
6. The laser gas supply cylinder on-line monitoring and safety interlocking system is characterized by comprising a gateway and a fault monitoring control system;
the gateway is connected with a gas cylinder sensor in the gas holder system, and the gas cylinder sensor is used for collecting gas residual data of the gas cylinder and transmitting the gas residual data to the gateway;
the gateway uploads the acquired gas residual data of the gas cylinder to the fault monitoring control system;
the fault monitoring control system analyzes and processes the received data and sends control signals to other related systems/devices according to the processing result.
7. The system for on-line monitoring and safety interlocking of laser gas supply cylinders according to claim 6, wherein the fault monitoring control system performs analysis processing on the acquired data specifically comprising:
comparing the acquired data with a preset threshold value, and judging that the gas residual quantity of the gas cylinder is insufficient if the acquired gas residual quantity data is smaller than or equal to the threshold value;
if the gas residual quantity of at least one gas cylinder in the gas holder system is insufficient, alarming is carried out, and the ordering information is sent to the automatic ordering system for ordering.
8. The laser gas supply cylinder on-line monitoring and safety interlock system according to claim 7, wherein the fault monitoring control system performs analysis processing on the acquired data, and specifically further comprises:
if the gas residual quantity of all the gas cylinders in the gas holder system is insufficient, alarming and sending ordering information to an automatic ordering system for ordering, and simultaneously sending an interlocking signal to an interlocking device for safety interlocking, and sending an unlocking signal to the interlocking device for unlocking until the gas residual quantity data of at least one gas cylinder in the gas holder system is greater than a threshold value.
9. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that the processor implements the steps of the method of any of claims 1-5 when the computer program is executed.
10. A computer readable storage medium, on which a computer program is stored, characterized in that the computer program, when being executed by a processor, implements the steps of the method according to any of claims 1-5.
CN202111339578.6A 2021-11-12 2021-11-12 Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment Pending CN116124243A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111339578.6A CN116124243A (en) 2021-11-12 2021-11-12 Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111339578.6A CN116124243A (en) 2021-11-12 2021-11-12 Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment

Publications (1)

Publication Number Publication Date
CN116124243A true CN116124243A (en) 2023-05-16

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111339578.6A Pending CN116124243A (en) 2021-11-12 2021-11-12 Laser gas supply cylinder on-line monitoring and safety interlocking method, system and equipment

Country Status (1)

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CN (1) CN116124243A (en)

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