CN116087155A - Spectrum detection device - Google Patents

Spectrum detection device Download PDF

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Publication number
CN116087155A
CN116087155A CN202310062051.6A CN202310062051A CN116087155A CN 116087155 A CN116087155 A CN 116087155A CN 202310062051 A CN202310062051 A CN 202310062051A CN 116087155 A CN116087155 A CN 116087155A
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spot
signal
module
spectrum
light
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王振友
***
王碧霄
方广有
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Guangdong Dawan District Aerospace Information Research Institute
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Guangdong Dawan District Aerospace Information Research Institute
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
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  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention discloses a spectrum detection device which comprises a light source module, a spectrum signal transmission module, a light spot conversion module and a spectrum signal acquisition module, wherein the light source module is connected with the light spot conversion module; the light source module is used for outputting laser beams; the spectrum signal transmission module is used for converging the laser beam to the sample to be tested, and the sample to be tested is stimulated to output a signal beam to be tested; the spot conversion module is used for converting a spot-shaped spot signal formed by the signal beam to be detected into a linear spot signal and transmitting the linear spot signal to the spectrum signal acquisition module; the spectrum signal acquisition module comprises a detector and an upper computer, wherein the detector is used for converting a linear light spot signal into a data electric signal, and the upper computer is used for acquiring and processing the data electric signal. According to the technical scheme, the exposure time is prolonged, the spectrum signal acquisition with high signal-to-noise ratio is realized, the target information acquisition is more complete, and the problems that the single exposure time is short due to the fact that the detector is easy to saturate due to strong background noise and the noise ratio in the acquired signal is large due to the fact that multiple exposure is adopted are solved.

Description

Spectrum detection device
Technical Field
The invention relates to the technical field of spectrum detection, in particular to a spectrum detection device.
Background
Spectral detection techniques have been widely used in a variety of fields, such as food safety, medical drugs, chemical industry, and the like. The method has the advantages that the method can not influence the sample in the process of acquiring the spectrum signal, the structure and the property of substances in the sample to be detected can not change, and different substances can be accurately and qualitatively or quantitatively analyzed.
When an incident light beam interacts with a sample to be measured, a relevant spectral signal reflecting the properties of the sample, such as atomic emission light in LIBS (Laser-Induced Breakdown Spectroscopy ), raman scattered light in raman techniques or a fluorescent signal in fluorescence spectroscopy techniques, needs to be detected by a spectrometer. However, during the signal acquisition process, other useless background light such as blackbody radiation light, fluorescence in raman spectrum and the like are also detected by the detector together with the useful signal, so that the detector is very easy to reach saturation in a short time. In order to improve the signal-to-noise ratio of the useful spectral signal, it is often necessary to perform data acquisition for multiple short exposures, both increasing the readout time of the useful signal and increasing the readout noise.
Disclosure of Invention
The invention provides a spectrum detection device, which aims to solve the problems that the single exposure time is too short and the noise proportion in the acquired signal is larger when the complete target information is acquired by adopting multiple exposure because the detector is easy to saturate due to strong background noise and the traditional spectrum signal detection device uses a punctiform facula signal as a detection signal.
According to one aspect of the invention, a spectrum detection device is provided, wherein the spectrum detection device comprises a light source module, a spectrum signal transmission module, a light spot conversion module and a spectrum signal acquisition module;
the light source module is used for outputting laser beams;
the spectrum signal transmission module is used for converging the laser beams to a sample to be tested, and the sample to be tested is stimulated to output a signal beam to be tested;
the spot conversion module is used for converting a spot-shaped spot signal formed by the signal beam to be detected into a linear spot signal and transmitting the linear spot signal to the spectrum signal acquisition module;
the spectrum signal acquisition module comprises a detector and an upper computer, wherein the detector is used for converting the linear light spot signals into data electric signals, and the upper computer is used for acquiring and processing the data electric signals.
Optionally, the light spot conversion module comprises a light beam shaping unit and a cylindrical lens;
the beam shaping unit and the cylindrical lens are sequentially positioned on the light path of the signal beam to be detected;
the beam shaping unit is used for collimating or expanding the signal beam to be detected;
the cylindrical lens is used for converting the punctiform facula signals into linear facula signals.
Optionally, the light spot conversion module further comprises a slit.
Optionally, the slit is located at a side of the cylindrical lens away from the beam shaping unit.
Optionally, the slit is located at a side of the cylindrical lens close to the beam shaping unit.
Optionally, the light spot conversion unit further comprises a converging lens; the converging lens is positioned at one side of the slit close to the beam shaping unit.
Optionally, the light source module comprises a power supply, a laser driver and a laser head; the power supply is used for providing energy for the laser driver, and the laser head is used for outputting the laser beam.
Optionally, the spectrum detection device further comprises an optical fiber; the optical fiber comprises a single mode optical fiber or a multimode optical fiber.
Optionally, the spectrum signal transmission module comprises a raman spectrum signal transmission module;
the Raman spectrum signal transmission module is used for converging the laser beam to the sample to be detected, then collecting Raman scattered light and transmitting the Raman scattered light to the light spot conversion module.
Optionally, the spectrum signal acquisition module further comprises a raman spectrum light splitting unit; the Raman spectroscopy unit is used for spatially separating Raman scattered light with different wavelengths.
According to the technical scheme, the spot-shaped spot signals are converted into the linear spot signals through the spot conversion module, so that the spot signals can form a spectrum in a rectangular range on the detector, tens to hundreds of pixels can be occupied in the vertical direction, the rectangular range is larger than the narrower strip-shaped spectrum stripe range formed by the traditional spot signals on the detector, the photon number detected by a single pixel in the rectangular range is smaller than that of a single pixel in the traditional strip-shaped spectrum stripe by several times to hundreds of times, further longer exposure time can be allowed, spectrum signal acquisition with high signal-to-noise ratio is realized, the target information acquisition is more complete, the problem that the single exposure time is too short due to the fact that the traditional spectrum signal detection device uses the spot-shaped spot signals as detection signals is easy to saturate due to strong background noise is solved, and when the multiple exposure is adopted to acquire complete target information, the noise proportion in the acquired signal is larger.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the invention or to delineate the scope of the invention. Other features of the present invention will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a prior art interaction of a light beam with a substance;
FIG. 2 is a schematic diagram showing the projection of a spot-like light spot signal onto a detector after being split;
fig. 3 is a schematic structural diagram of a first spectrum detecting apparatus according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of a projection of a linear light spot signal on a detector after being split according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a second spectrum sensing device according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a third spectrum sensing device according to an embodiment of the present invention;
fig. 7 is a schematic structural diagram of a fourth spectrum detecting apparatus according to an embodiment of the present invention;
FIG. 8 is a schematic structural diagram of a fifth spectrum sensing device according to an embodiment of the present invention;
fig. 9 is a schematic structural diagram of a sixth spectrum sensing device according to an embodiment of the present invention.
Detailed Description
In order that those skilled in the art will better understand the present invention, a technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present invention without making any inventive effort, shall fall within the scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present invention and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the invention described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 1 is a schematic diagram of interaction between a light beam and a substance in the prior art, and as shown in fig. 1, when an incident light beam interacts with a sample to be measured, a relevant spectrum signal reflecting properties of the sample, such as atomic emission light in LIBS technology, raman scattered light in raman technology, or a fluorescence signal in fluorescence spectrum technology, needs to be detected by a spectrometer. However, during the signal acquisition process, other useless background light such as blackbody radiation light, fluorescence in raman spectrum and the like are also detected by the detector together with the useful signal, so that the detector is very easy to reach saturation in a short time. In order to improve the signal-to-noise ratio of the useful spectral signal, it is often necessary to perform data acquisition for multiple short exposures, both increasing the readout time of the useful signal and increasing the readout noise. It is therefore desirable to be able to extend the single exposure or acquisition time under equivalent experimental conditions.
Fig. 2 is a schematic view of a projection of a spot-like light spot signal onto a detector after being split, as shown in fig. 2, in which the collected signal beam is focused by a spot to the front end of a spectroscope 1 to form a spot-like light spot, and then the spot-like light spot is projected onto a two-dimensional photodetector 2, such as a CCD (Charge coupled Device ), CMOS (Complementary Metal Oxide Semiconductor, complementary metal oxide semiconductor), ICCD (interconnected CCD/ICCD), SPAD (single photon avalanche diode) array, etc., by the spectroscope 1. When the spectrum system detects weak light signals, the detector is easy to saturate due to strong background noise, so that the single exposure time is too short, multiple exposure is needed to acquire more complete target information, and the multiple exposure can lead the noise proportion in the acquired signals to be larger.
In order to solve the above-mentioned problems, a technical solution of an embodiment of the present invention provides a spectrum detection apparatus, and fig. 3 is a schematic structural diagram of a first spectrum detection apparatus provided in an embodiment of the present invention, as shown in fig. 3, where the spectrum detection apparatus includes: the device comprises a light source module 10, a spectrum signal transmission module 20, a light spot conversion module 30 and a spectrum signal acquisition module 40; the light source module 10 is used for outputting laser beams; the spectrum signal transmission module 20 is used for converging the laser beam to the sample 50 to be tested, and the sample 50 to be tested is stimulated to output a signal beam to be tested; the spot conversion module 30 is configured to convert a spot-like spot signal formed by the signal beam to be detected into a linear spot signal, and transmit the linear spot signal to the spectrum signal acquisition module 40; the spectrum signal acquisition module 40 comprises a detector 41 and an upper computer 42, the detector 41 is used for converting the linear light spot signals into data electric signals, and the upper computer 42 is used for acquiring and processing the data electric signals.
The spectrum detection device can be used for qualitative or quantitative analysis of substances, including but not limited to raman spectrum detection, and can also be used for detection and analysis of other characteristic spectrums according to actual requirements, and in specific implementation, detection and analysis of various spectrum signals can be realized by adjusting parameters of the light source module 10 and actual specifications of the detector 41. The light source module 10 includes, but is not limited to, a power supply for supplying power to the laser driver, a laser head for outputting a laser beam, and the like, and the plurality of components may be distributed or integrated in a specific implementation; the key performance indexes of the laser beam are as follows: the wavelength range is between 200nm and 1500 nm; line width is 0.01cm -1 -100cm -1 Between them; the laser beam can be continuous laser or pulse laser (pulse width is between 100fs-10ns, and repetition frequency is between 1Hz-80 MHz); the average power is in the range of 1. Mu.W-1W. The spectrum signal transmission module 20 includes optical elements such as lenses, dichroic mirrors and filters having focusing performance, and the specific optical element configuration and spatial arrangement of the plurality of elements can be set according to the requirement of actual focusing accuracy. In practice, single-mode or multi-mode optical fibers for connecting the light source module 10 and the spectrum signal transmission module 20 can be added according to practical research requirements and detection requirements, or no optical fibers are arranged, and the light source module and the spectrum signal transmission module can pass throughThe free space optical path transmits the laser beam. The spot signal conversion module 30 includes, but is not limited to, a beam shaping unit for collimating and expanding beams, and, for example, a cylindrical lens or a powell lens, etc., a system or element having characteristics of converting a spot-like spot into a linear spot, and a converging lens and slit for adjusting resolution and beam energy. The spectrum signal acquisition module 40 includes, but is not limited to, a detector 41 and an upper computer 42, and other modules or optical elements for light splitting can be set according to the actual spectrum detection requirement, for example, when the spectrum detection device is used for raman spectrum detection, a raman light splitting unit can be additionally arranged on the optical path between the detector 41 and the light spot conversion module 30, so that the space separation of raman light with different wavelengths can be realized. In practice, the sample 50 to be measured may be placed on a sample stage, which may be controlled by a multi-dimensional manual or stepper motor.
Specifically, in the actual spectrum detection process, according to the actual detection requirement, the light source module 10 emits a laser beam with a specific performance index, the spectrum signal transmission module 20 transmits the laser beam and converges the laser beam to the sample 50 to be detected, the sample 50 to be detected is stimulated to generate signal beams to be detected with different characteristics, such as reflected light, scattered light, raman light or fluorescence, on the surface of the sample, and the signal beams to be detected form a spot-like spot signal at the front end of the spot conversion module 30. The spot-like light spot signals are acted by the light spot conversion module 30 to form linear light spot signals, the linear light spot signals are projected on the detector 41 through elements such as a spectrometer, the detector 41 converts the linear light spot signals into data electric signals, and the upper computer 42 collects and processes the data electric signals.
Fig. 4 is a schematic projection view of a linear light spot signal provided by the embodiment of the present invention on a detector after being split, as shown in fig. 4, the linear light spot signal may form a rectangular range at a detector 41 through devices such as a spectrometer 1, and may occupy several tens to several hundreds of pixels in a vertical direction, and it may be understood that the dot light spot signal shown in fig. 2 is projected onto a two-dimensional photodetector 2 to form a narrower strip light spot, and the strip light spot only occupies one row or several rows of pixels in the vertical direction.
According to the technical scheme, the spot-shaped spot signals are converted into the linear spot signals through the spot conversion module, so that the spot signals can form a spectrum in a rectangular range on the detector, tens to hundreds of pixels can be occupied in the vertical direction, the rectangular range is larger than a narrower strip-shaped spectrum stripe range formed by the traditional spot signals on the detector, the photon number detected by a single pixel in the rectangular range is reduced by several times to hundreds of times compared with the photon number of a single pixel in the traditional strip-shaped spectrum stripe, the light energy density received by a single pixel corresponding to the target surface of the detector is reduced, the detector is not easy to saturate in a single exposure, longer single exposure time is allowed, spectrum signal acquisition with high signal to noise ratio is realized, the target information acquisition is more complete, the problem that the single exposure time is too short due to the fact that the traditional spot signals are easily saturated due to strong background noise of the detector is solved, and the problem that the specific gravity of the acquired target information is higher when the detector is subjected to multiple exposure is adopted.
Optionally, fig. 5 is a schematic structural diagram of a second spectrum detecting apparatus according to an embodiment of the present invention, and as shown in fig. 5, a light spot conversion module 30 includes a beam shaping unit 31 and a cylindrical lens 32; the beam shaping unit 31 and the cylindrical lens 32 are sequentially positioned on the optical path of the signal beam to be measured; the beam shaping unit 31 is used for collimating or expanding the signal beam to be detected; the cylindrical lens 32 is used to convert the spot-like light spot signal into a linear light spot signal.
The beam shaping unit 31 may be an optical element or system having collimating or beam expanding characteristics, and the actual composition and parameters are not limited herein.
Specifically, the to-be-measured sample 50 is stimulated to emit to-be-measured signal beams with different characteristics, and the to-be-measured signal beams are transmitted to the beam shaping unit 31, it can be understood that, because the to-be-measured signal beams are emitted from the surface of the to-be-measured sample 50 and include beams with various characteristics such as reflected light, scattered light, raman light or fluorescence, the to-be-measured signal beams are divergent before being acted by the beam shaping unit 31, the formed punctiform facula signal range is larger, if the conversion of the linear facula signal is performed on the basis, the resolution of the whole spectrum detection device and the reliability of the detection result can be influenced, and therefore, the divergent to-be-measured signal beams are output into a beam of collimated light through the action of the beam shaping unit 31, and the resolution and the reliability of the detection result are further improved. The beam shaping unit 31 outputs collimated light to the front end of the cylindrical lens 32, and the collimated light is converted into a linear light spot signal by the cylindrical lens 32 and then transmitted to the spectrum signal acquisition module 40 for signal conversion and acquisition analysis.
Optionally, the spot-converting module 30 further comprises a slit 33.
The setting position and the size of the slit 33 may be set according to the actual research requirement and the detection requirement, for example, 100 μm×3mm and 50 μm×3mm, and when the beam energy requirement is low but the spatial resolution requirement is high, a slit with a smaller size may be selected, otherwise, a slit with a larger size may be selected.
Specifically, in the actual spectrum detection process, there are different requirements for the beam energy of the linear light spot at the detector 41, that is, the light transmittance, the size and shape of the linear light spot, and the spatial resolution, the slit 33 is disposed on the optical path between the beam shaping unit 31 and the cylindrical lens 32, or on the optical path where the cylindrical lens 32 emits the linear light spot signal, and the beam energy, the spatial resolution, or the size and shape of the linear light spot are adjusted by selecting a slit with an appropriate size.
In an embodiment, fig. 6 is a schematic structural diagram of a third spectrum sensing device according to an embodiment of the present invention, and as shown in fig. 6, the slit 33 is located at a side of the cylindrical lens 32 away from the beam shaping unit 31.
Wherein the slit 33 is located at a side of the cylindrical lens 32 away from the beam shaping unit 31 for adjusting the spatial resolution and changing the characteristics of the linear spot, such as the size and intensity of the linear spot.
Specifically, the slit 33 is located on the side of the cylindrical lens 32 away from the beam shaping means 31, and the spot-like spot signal output by the beam shaping means 31 can be completely converted into a linear spot signal by the action of the cylindrical lens 32, and the energy loss is small. In the actual spectrum detection process, there are various research requirements, such as spatial resolution, size of the linear light spot, light intensity, etc., and the slit is disposed on the outgoing light path of the linear light spot, so that the size of the linear light spot can be restrained and the light intensity can be adjusted, and the spatial resolution can be further changed by changing the size of the slit 33.
In an embodiment, fig. 7 is a schematic structural diagram of a fourth spectrum sensing device according to an embodiment of the invention, and the slit 33 is located at one side of the cylindrical lens 32 near the beam shaping unit 31.
Wherein the slit 33 is located at a side of the cylindrical lens 32 near the beam shaping unit 31 for adjusting spatial resolution and changing characteristics of the spot like the size and intensity of the spot.
Specifically, compared to the slit 33 shown in fig. 6, which is located on the side of the cylindrical lens 32 away from the beam shaping unit 31, by changing the size and the size of the linear light spot and adjusting the light intensity and the spatial resolution, the slit 33 shown in fig. 7 is located on the side of the cylindrical lens 32 close to the beam shaping unit 31, so as to directly restrict the light beam shaped by the beam shaping unit 31, and further change the energy and the light spot size of the point-like light spot, so that the linear light spot with different sizes and energies can be obtained by the action of the cylindrical lens 32 on the point-like light spot signal. In practice, the size of the linear light spot is completely different from the energy of the light beam when the shaped light beam passes through two slits with the size of 100 μm×3mm and 50 μm×3mm respectively.
Optionally, fig. 8 is a schematic structural diagram of a fifth spectrum detecting apparatus according to an embodiment of the present invention, and as shown in fig. 8, a spot converting unit 30 according to an embodiment of the present invention further includes a converging lens 34; the converging lens 34 is located on the side of the slit 33 close to the beam shaping unit 31.
The converging lens 34 is used for converging the signal beam shaped by the beam shaping unit 31, and parameters of the converging lens may be set according to actual requirements, for example, when the requirement for spatial resolution is high, a converging lens with strong converging capability may be selected.
Specifically, in the actual detection process, the signal beam to be detected that exits from the surface of the sample after being shaped by the shaping unit 31 includes a portion of parallel light, the parallel light directly enters the slit 33 to cause a certain amount of energy loss, and the resolution is reduced, the converging lens 34 is disposed on the optical path between the beam shaping unit 31 and the slit 33, so that the beam shaped by the beam shaping unit 31 is incident to the converging lens 34, the converging lens 34 can converge the shaped signal beam to the slit 33, thereby improving the utilization rate and resolution of the beam, and by changing the parameters (such as focal length) of the converging lens 34, the requirements of different beam energies and resolutions can be satisfied.
Optionally, the spectrum detection device provided by the embodiment of the invention further comprises an optical fiber; the optical fiber includes a single mode optical fiber or a multimode optical fiber.
The optical fiber is connected with the light source module 10 and the spectrum signal transmission module 20, and is used for transmitting laser beams, and single-mode optical fibers or multi-mode optical fibers can be selected according to actual requirements in implementation.
Specifically, the optical fiber is connected with the light source module 10 and the spectrum signal transmission module 20, so that the laser beam emitted by the light source module can be transmitted to the spectrum signal transmission module 20 through the optical fiber, and then converged to the sample, and the beam utilization rate is improved.
It should be noted that, in the embodiment of the present invention, only the conversion of the spot signal into the linear spot signal is explained by the cylindrical lens 32, and in practical implementation, the cylindrical lens 32 may be replaced by, for example, a powell lens, and other optical elements having the function of converting the spot into the linear spot. An apparatus or system.
Optionally, fig. 9 is a schematic structural diagram of a sixth spectrum detecting apparatus according to an embodiment of the present invention, and as shown in fig. 9, a spectrum signal transmission module 20 includes a raman spectrum signal transmission module 21; the raman spectrum signal transmission module 21 is configured to collect the laser beam onto the sample 50 to be measured, collect raman scattered light, and transmit the raman scattered light to the spot conversion module 30.
The spectrum detection device shown in fig. 9 may be used for detecting raman spectrum signals, and the raman spectrum signal transmission module 21 includes, but is not limited to, optical devices such as a lens, a dichroic mirror, and a filter.
Specifically, the raman spectrum signal transmission module 21 converges the laser beam to the sample 50 to be measured, the sample 50 to be measured is stimulated to emit raman scattered light, and the raman spectrum signal transmission module 21 collects the raman scattered light and transmits the raman scattered light to the spot conversion module 30.
Optionally, with continued reference to fig. 9, the spectral signal acquisition module 40 further includes a raman spectral splitting unit 43; the raman spectroscopic unit 43 is for spatially separating raman scattered light of different wavelengths.
The raman spectroscopic unit 43 may be a transmissive or reflective grating, or a prismatic spectroscopic optical module.
In one embodiment, the light source module 10 includes power, laser driver, laser head, optical fiber, etc., which may be distributed or integrated. The key performance indexes of the laser beam are as follows: the wavelength range is 300nm-1100 nm; line width is 0.01cm -1 -100cm -1 Between them; with a continuous laser, the average power is in the range of 1. Mu.W-1W. The light source module 10 outputs a laser beam to the raman spectrum signal transmission module 20. The raman spectrum signal transmission module 20 focuses the laser beam through various optics (e.g., lenses, dichroic mirrors, filters, etc.) to a sample stage, which may be multi-dimensional manual or stepper motor controlled. The raman scattered light is then collected and transmitted to the spot conversion module 30. The spot conversion module 30 performs beam shaping treatment on the raman scattered light generated on the sample surface, and then the raman scattered light passes through the cylindrical lens 32 to convert the spotIs formed into a linear light spot, i.e. a linear raman scattered light beam, which then passes through the slit 33, and finally the raman scattered light signal is collected by the spectral signal detection module 40. The cylindrical lenses 32 used here were 20mm and 10mm long and high, respectively, with a focal length of about 18mm and a slit 33 with dimensions of 100 μm by 3mm. The spectrum signal detecting module 40 spatially distinguishes the raman light with different wavelengths through the raman spectroscopic unit 43, mainly through a transmission type or reflection type grating, or a prism spectroscopic optical module. After splitting the raman light, the raman spectrum is acquired by a subsequent detector 41, which has a number of options, here a CCD as detector. The host computer 42 is mainly used for collecting and analyzing data, and a desktop computer is selected. Under the same condition, corresponding to different exposure times, the saturation of the signals of the point-shaped light spot and the linear light spot acquired by the system is different, in one embodiment, the spectrum acquired by the point-shaped light spot on the CCD camera is saturated due to the exposure time of 2s, and the spectrum acquired by the linear light spot on the CCD camera is not saturated yet due to the exposure time of 20 s.
It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps described in the present invention may be performed in parallel, sequentially, or in a different order, so long as the desired results of the technical solution of the present invention are achieved, and the present invention is not limited herein.
The above embodiments do not limit the scope of the present invention. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of the present invention.

Claims (10)

1. The spectrum detection device is characterized by comprising a light source module, a spectrum signal transmission module, a light spot conversion module and a spectrum signal acquisition module;
the light source module is used for outputting laser beams;
the spectrum signal transmission module is used for converging the laser beams to a sample to be tested, and the sample to be tested is stimulated to output a signal beam to be tested;
the spot conversion module is used for converting a spot-shaped spot signal formed by the signal beam to be detected into a linear spot signal and transmitting the linear spot signal to the spectrum signal acquisition module;
the spectrum signal acquisition module comprises a detector and an upper computer, wherein the detector is used for converting the linear light spot signals into data electric signals, and the upper computer is used for acquiring and processing the data electric signals.
2. The spectral detection apparatus according to claim 1, wherein the spot-converting module comprises a beam-shaping unit and a cylindrical lens;
the beam shaping unit and the cylindrical lens are sequentially positioned on the light path of the signal beam to be detected;
the beam shaping unit is used for collimating or expanding the signal beam to be detected;
the cylindrical lens is used for converting the punctiform facula signals into linear facula signals.
3. The spectral detection device of claim 2, wherein the spot-converting module further comprises a slit.
4. A spectral detection apparatus according to claim 3, wherein the slit is located at a side of the cylindrical lens remote from the beam shaping unit.
5. A spectral detection apparatus according to claim 3, wherein the slit is located at a side of the cylindrical lens close to the beam shaping unit.
6. The spectral detection device of claim 5, wherein the spot-converting unit further comprises a converging lens; the converging lens is positioned at one side of the slit close to the beam shaping unit.
7. The spectroscopic probe device of claim 1, wherein the light source module comprises a power supply, a laser driver, and a laser head; the power supply is used for providing energy for the laser driver, and the laser head is used for outputting the laser beam.
8. The spectroscopic probe device of claim 7 further comprising an optical fiber; the optical fiber comprises a single mode optical fiber or a multimode optical fiber.
9. The spectral detection apparatus according to claim 1, wherein the spectral signal transmission module comprises a raman spectral signal transmission module;
the Raman spectrum signal transmission module is used for converging the laser beam to the sample to be detected, then collecting Raman scattered light and transmitting the Raman scattered light to the light spot conversion module.
10. The spectral detection apparatus according to claim 9, wherein the spectral signal acquisition module further comprises a raman spectral unit; the Raman spectroscopy unit is used for spatially separating Raman scattered light with different wavelengths.
CN202310062051.6A 2023-01-18 2023-01-18 Spectrum detection device Pending CN116087155A (en)

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