CN116047470B - Semi-solid laser radar and control method thereof - Google Patents

Semi-solid laser radar and control method thereof Download PDF

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Publication number
CN116047470B
CN116047470B CN202310042343.3A CN202310042343A CN116047470B CN 116047470 B CN116047470 B CN 116047470B CN 202310042343 A CN202310042343 A CN 202310042343A CN 116047470 B CN116047470 B CN 116047470B
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detection
micro
laser
mirror
mems micro
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CN116047470A (en
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袁志林
张石
李亚锋
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Shenzhen Yuwei Optical Technology Co ltd
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Shenzhen Yuwei Optical Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02ATECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A90/00Technologies having an indirect contribution to adaptation to climate change
    • Y02A90/10Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation

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  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention discloses a semi-solid laser radar and a control method thereof, wherein the semi-solid laser radar comprises a laser emitting device, an optical element, an MEMS micro-mirror assembly and a detection device; the emitting end of the laser emitting device emits detection laser outwards, and a collimating element is arranged at the emitting end and is used for collimating the detection laser emitted by the emitting end of the laser emitting device; the optical element is arranged on the light-emitting side of the collimating element and forms an included angle with the collimating element, and at least a reflecting area is formed on the optical element and is used for receiving the detection laser collimated by the collimating element and reflecting the detection laser to the object to be measured; the MEMS micro-mirror assembly comprises at least one MEMS micro-mirror unit which is movably arranged and is used for receiving and reflecting detection laser reflected by an object to be detected; the detection device is provided with a receiving end for receiving detection laser, a receiving lens component is arranged at the receiving end and used for converging the detection laser reflected by the MEMS micro-mirror component and sending the detection laser to the receiving end; thus, the method is easy to rapidly apply and industrialize, reduces the cost and improves the quality.

Description

Semi-solid laser radar and control method thereof
Technical Field
The invention relates to the technical field of laser radars, in particular to a semi-solid laser radar and a control method thereof.
Background
The laser radar is one of core sensing equipment in the automatic driving field, can sense the surrounding environment in real time, has centimeter-level resolution accuracy in long distance, and can meet the technical requirements of automatic driving sensing. The laser radar has been developed into a plurality of technical schemes and platforms through a plurality of technical iterations, and has different technical characteristics. In order to meet the development requirement of automatic driving, a semi-solid laser radar is developed in the industry, the transmitting and receiving optical system of the laser radar is kept motionless, and the spatial scanning of light beams can be realized only by controlling the rotation of the scanning element. The semi-solid laser radar has the advantages of both mechanical and solid scanning; however, the existing semi-solid laser has large overall dimension and low reliability.
Disclosure of Invention
The invention mainly aims to provide a semi-solid laser radar and a control method thereof, which aim to reduce the overall dimension of a product and optimize the reliability of the product on the premise of ensuring the test distance.
To achieve the above object, the present invention provides a semi-solid laser radar comprising:
the laser emission device is provided with an emission end for emitting detection laser outwards, and a collimation element is arranged at the emission end and is used for collimating the detection laser emitted from the emission end of the laser emission device;
the optical element is arranged on the light-emitting side of the collimating element and forms an included angle with the collimating element, and at least a reflecting area is formed on the optical element and is used for receiving the detection laser collimated by the collimating element and reflecting the detection laser to the object to be measured;
the MEMS micro-mirror assembly comprises at least one MEMS micro-mirror unit which is movably arranged, and the MEMS micro-mirror unit is used for receiving and reflecting detection laser reflected from a measured object; the method comprises the steps of,
the detection device is provided with a receiving end used for receiving detection laser, a receiving lens component is arranged at the receiving end and used for converging the detection laser reflected by the MEMS micro-mirror component and sending the detection laser to the receiving end.
Optionally, the optical element further has a transmissive region formed thereon;
the MEMS micro mirror unit is arranged on the light incident side of the optical element and is used for receiving the detection laser reflected by the optical element and reflecting the detection laser to the detected object and receiving the detection laser reflected by the detected object and reflecting the detection laser to the transmission area of the optical element;
the detection device is arranged on the light emitting side of the optical element, and the receiving end of the detection device is arranged towards the transmission area of the optical element and is used for receiving the transmitted detection laser from the transmission area of the optical element.
Optionally, the MEMS micro-mirror assembly includes a plurality of MEMS micro-mirror units, and the plurality of MEMS micro-mirror units are spliced in sequence, so that scanning centers of the MEMS micro-mirror units can be enclosed together to form a scanning area, and the scanning area is used for receiving and reflecting the reflected detection laser reflected from the measured object.
Optionally, the plurality of MEMS micro-mirror units include a central micro-mirror at a central position, and a plurality of peripheral micro-mirrors surrounding a peripheral side of the central micro-mirror;
the optical element is arranged on the central micro-mirror, and the reflecting area of the optical element is arranged corresponding to the light emitting side of the collimating element and is used for receiving the detection laser collimated by the collimating element and reflecting the detection laser to the measured object, and the scanning center of each peripheral micro-mirror is used for receiving and reflecting the reflected detection laser reflected by the measured object;
the receiving lens component is used for being respectively arranged corresponding to the plurality of the peripheral micromirrors so as to collect the detection laser reflected by the plurality of the peripheral micromirrors and send the detection laser to the receiving end.
Optionally, the receiving lens assembly includes a plurality of receiving lenses, the plurality of receiving lenses includes a central lens located at a central position, and a plurality of peripheral lenses surrounding a peripheral side of the central lens, the central lens corresponds to the central micromirror, and the plurality of peripheral lenses corresponds to the plurality of peripheral micromirrors one by one, so as to collect the detection laser reflected from the plurality of peripheral micromirrors and send the detection laser to the receiving end.
Optionally, a microelectromechanical driver is also included; wherein:
the micro-electromechanical driver comprises an electrothermal driver or an electrostatic driver; and/or the number of the groups of groups,
the MEMS micro-mirror assembly comprises a plurality of MEMS micro-mirror units which are assembled in sequence, a plurality of micro-electromechanical drivers are arranged correspondingly, and the micro-electromechanical drivers are used for being respectively and correspondingly electrically connected with the MEMS micro-mirror units so as to correspondingly drive the MEMS micro-mirror units to rotate.
The invention also provides a control method of the semi-solid laser radar, which comprises a laser emitting device, an optical element, an MEMS micro mirror assembly and a plurality of micro electromechanical drivers, wherein the MEMS micro mirror assembly comprises a plurality of MEMS micro mirror units, the MEMS micro mirror units comprise a center micro mirror at a center position and a plurality of peripheral micro mirrors surrounding the periphery of the center micro mirror, the optical element is arranged on the center micro mirror, and the micro electromechanical drivers are used for being respectively and correspondingly electrically connected with the MEMS micro mirror units;
the control method of the semi-solid laser radar comprises the following steps:
controlling the laser emitting device to be started;
acquiring the number parameter of the emitted pulses per second of the laser emitting device;
calculating the farthest detection distance of the semi-solid laser radar according to the pulse quantity parameter;
and adjusting the control strategy of each MEMS micro mirror unit according to the furthest detection distance and the standard detection distance.
Optionally, adjusting a control strategy of each MEMS micro-mirror unit according to the furthest detection distance and a standard detection distance, including:
when the farthest detection distance is larger than the standard detection distance, adjusting the opening position and the opening number of the MEMS micro mirror units;
and respectively controlling a plurality of micro-electromechanical drivers corresponding to the started MEMS micro-mirror units to start, and correspondingly enabling the corresponding MEMS micro-mirror units to rotate.
Optionally, when the furthest detection distance is greater than the standard detection distance, adjusting an on position and an on number of the MEMS micro-mirror unit includes:
controlling the central micromirror to be turned on;
calculating a detection distance difference value according to the farthest detection distance and the standard detection distance;
calculating the opening quantity parameter of the MEMS micro mirror unit according to the detection distance difference value;
and controlling the opening of the peripheral micro mirrors corresponding to the peripheral sides of the central micro mirrors according to the opening quantity parameters.
Optionally, adjusting a control strategy of each MEMS micro-mirror unit according to the furthest detection distance and a standard detection distance, including:
when the farthest detection distance is smaller than or equal to the standard detection distance, controlling the central micromirror to be turned on, and controlling one peripheral micromirror to be turned on;
the micro electromechanical drivers corresponding to the central micromirror and the turned-on peripheral micromirror are controlled to be turned on, respectively, so that the central micromirror and the turned-on peripheral micromirror are rotated.
In the technical scheme of the invention, the semi-solid laser radar comprises a laser emitting device, an optical element, an MEMS micro-mirror assembly and a detection device; the detection laser is emitted from an emitting end of the laser emitting device, collimated by a collimating element at the emitting end, and then emitted to a reflecting area of the optical element, the reflecting area of the optical element receives the detection laser collimated by the collimating element and reflects the detection laser to a detected object, after the detection laser reaches the detected object, the detection laser returns to the MEMS micro-mirror assembly through diffuse reflection and is received by the MEMS micro-mirror unit, meanwhile, the MEMS micro-mirror unit reflects the detection laser reflected by the detected object to the detection device, after the detection laser is converged by a receiving end of the detection device, photoelectric conversion of an optical signal is completed in the detection device, and a returned optical wave signal and an emitted optical wave signal are compared, so that the relative distance between a target and the semi-solid laser radar can be obtained, and the detection is completed; in the scheme, a Micro-electromechanical system (Micro-Electro Mechanical System, hereinafter referred to as MEMS) Micro mirror is based on a mature semiconductor processing technology, so that a miniaturized and integrated beam scanning mode can be realized; the MEMS micro-mirror unit is adopted, so that the rapid application and industrialization of the semi-solid laser radar are easy, and the MEMS micro-mirror unit is movably arranged, so that the MEMS micro-mirror unit can realize the rotation in the two-dimensional direction, a plurality of optical path rotating elements are not required, the number of optical elements is effectively reduced, the overall outline dimension of a product is reduced, and the cost is reduced; meanwhile, the MEMS micro mirror unit has the characteristics of easiness in control, high reliability and low power consumption, so that the quality of the semi-solid laser radar can be improved through a severe reliability test.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and other drawings may be obtained according to the structures shown in these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a semi-solid laser radar (MEMS micromirror unit) according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of the micromirror assembly of FIG. 1;
FIG. 3 is a schematic diagram of the receiving lens of FIG. 1;
FIG. 4 is a schematic view of the optical path of the receiving lens of FIG. 3;
fig. 5 is a flowchart of an embodiment of a control method of a semi-solid laser radar provided by the invention.
Description of the embodiments of the invention the reference numerals:
reference numerals Name of the name Reference numerals Name of the name
100 Semi-solid laser radar 41 MEMS micromirror unit
1 Laser emitting device 411 Center micromirror
11 Laser device 412 Peripheral micromirror
12 Optical fiber coupler 5 Detection device
13 Transmitting optical fiber array 51 Receiving fiber array
2 Collimation element 52 Detector for detecting a target object
3 Optical element 6 Receiving lens assembly
4 MEMS micromirror assembly 61 Receiving lens
The achievement of the objects, functional features and advantages of the present invention will be further described with reference to the accompanying drawings, in conjunction with the embodiments.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and rear … …) are included in the embodiments of the present invention, the directional indications are merely used to explain the relative positional relationship, movement conditions, etc. between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are correspondingly changed.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.
The laser radar is one of core sensing equipment in the automatic driving field, can sense the surrounding environment in real time, has centimeter-level resolution accuracy in long distance, and can meet the technical requirements of automatic driving sensing. The laser radar has been developed into a plurality of technical schemes and platforms through a plurality of technical iterations, and has different technical characteristics. In order to meet the development requirement of automatic driving, a semi-solid laser radar is developed in the industry, the transmitting and receiving optical system of the laser radar is kept motionless, and the spatial scanning of light beams can be realized only by controlling the rotation of the scanning element. The semi-solid laser radar has the advantages of both mechanical and solid scanning; however, the existing semi-solid laser has large overall dimension and low reliability.
In view of the above, the present invention provides a semi-solid laser radar and a control method thereof. FIGS. 1-4 illustrate embodiments of semi-solid lidar; fig. 5 is a flowchart of a control method of the semi-solid laser radar.
Referring to fig. 1, the semi-solid laser radar 100 includes a laser emitting device 1, an optical element 3, a MEMS micro-mirror assembly 4, and a detecting device 5; the laser emitting device 1 is provided with an emitting end for emitting detection laser outwards, and a collimating element 2 is arranged at the emitting end and is used for collimating the detection laser emitted from the emitting end of the laser emitting device 1; the optical element 3 is arranged on the light emitting side of the collimating element 2 and forms an included angle with the collimating element 2, and at least a reflecting area is formed on the optical element 3 and is used for receiving the detection laser collimated by the collimating element 2 and reflecting the detection laser to the object to be measured; the MEMS micro-mirror assembly 4 comprises at least one MEMS micro-mirror unit 41 movably arranged, wherein the MEMS micro-mirror unit 41 is used for receiving and reflecting detection laser reflected from an object to be detected; the detecting device 5 has a receiving end for receiving the detection laser light, and a receiving lens assembly 6 is disposed at the receiving end, and the receiving lens assembly 6 is used for converging the detection laser light reflected from the MEMS micro-mirror assembly 4 and sending the detection laser light to the receiving end.
In the technical scheme of the invention, the semi-solid laser radar 100 comprises a laser emitting device 1, an optical element 3, an MEMS micro-mirror assembly 4 and a detection device 5; the detection laser is emitted from the emitting end of the laser emitting device 1, collimated by the collimating element 2 at the emitting end, and then emitted to the reflecting area of the optical element 3, the reflecting area of the optical element 3 receives the detection laser collimated by the collimating element 2 and reflects the detection laser to the object to be detected, after the detection laser reaches the object to be detected, the detection laser returns to the MEMS micro-mirror assembly 4 through diffuse reflection and is received by the MEMS micro-mirror unit 41, meanwhile, the MEMS micro-mirror unit 41 reflects the detection laser reflected by the object to be detected to the detecting device 5, the detection laser is received by the receiving end of the detecting device 5 after being converged by the receiving lens assembly 6, photoelectric conversion of an optical signal is completed in the detecting device 5, and the returned optical wave signal and the emitted optical wave signal are compared, so that the relative distance between a target and the semi-solid laser radar 100 can be obtained, and thus the detection is completed; in the scheme, a Micro-electromechanical system (Micro-Electro Mechanical System, hereinafter referred to as MEMS) Micro mirror is based on a mature semiconductor processing technology, so that a miniaturized and integrated beam scanning mode can be realized; the MEMS micro-mirror unit 41 is adopted, so that the semi-solid laser radar 100 can be easily and rapidly applied and industrialized, and the MEMS micro-mirror unit 41 is movably arranged, so that the MEMS micro-mirror unit 41 can realize two-dimensional rotation by itself, a plurality of optical path rotating elements are not required, the number of optical elements 3 is effectively reduced, the overall outline dimension of a product is reduced, and the cost is reduced; meanwhile, since the MEMS micro-mirror unit 41 has the characteristics of easy control, high reliability and low power consumption, the quality of the semi-solid laser radar 100 can be improved through a severe reliability test.
The number of the MEMS micro mirror units 41 is not limited in the invention, and a user can adjust the MEMS micro mirror units according to actual use situations.
The invention is not limited to the specific form of the collimating element 2, and in this embodiment the collimating element 2 is provided as an emission lens.
With further reference to fig. 1, based on the embodiment of "the MEMS micro-mirror assembly 4 includes one of the MEMS micro-mirror units 41", the optical element 3 is further formed with a transmissive region; the MEMS micro-mirror unit 41 is disposed on the light incident side of the optical element 3, and is configured to receive the detection laser light reflected from the optical element 3 and reflect the detection laser light to the object to be measured, and to receive the detection laser light reflected from the object to be measured and reflect the detection laser light to the transmission region of the optical element 3; wherein, the detecting device 5 is arranged on the light emitting side of the optical element 3, and the receiving end of the detecting device is arranged towards the transmission area of the optical element 3 and is used for receiving the transmitted detection laser light from the transmission area of the optical element 3; that is, in this embodiment, the detection laser light is emitted from the emission end of the laser emission device 1, collimated by the collimating element 2 at the emission end, and is directed to the reflection area of the optical element 3, the reflection area of the optical element 3 receives the detection laser light collimated by the collimating element 2 and reflects to the MEMS micro-mirror unit 41, the MEMS micro-mirror unit 41 receives the detection laser light reflected by the optical element 3 and reflects to the object to be detected, and after reaching the object to be detected, the detection laser light returns to the MEMS micro-mirror unit 4 through diffuse reflection and is received by the MEMS micro-mirror unit 41, and at the same time, the MEMS micro-mirror unit 41 reflects the detection laser light reflected by the object to be detected to the detection device 5, and after converging by the receiving lens unit 6, the detection laser light is received by the receiving end of the detection device 5 and completes photoelectric conversion of the optical signal in the detection device 5, thereby completing detection.
Referring to fig. 2, in an embodiment, the MEMS micro-mirror assembly 4 includes a plurality of MEMS micro-mirror units 41, and the MEMS micro-mirror units 41 are sequentially spliced, so that scanning centers of the MEMS micro-mirror units 41 can be jointly enclosed to form a scanning area for receiving and reflecting the reflected detection laser reflected from the measured object; it should be noted that, when the detection distance is long, the receiving area of the MEMS micro-mirror units 41 is small, so that the detection requirement cannot be met, and therefore the receiving area of the detection laser needs to be increased.
Meanwhile, it should be noted that the present invention does not limit the splicing form of the MEMS micromirrors, and the MEMS micromirrors may be arranged in a square shape or may be round.
Specifically, the plurality of MEMS micro-mirror units 41 include a center micro-mirror 411 at a center position, and a plurality of peripheral micro-mirrors 412 surrounding a peripheral side of the center micro-mirror 411; the optical element 3 is disposed on the central micromirror 411, and a reflection area thereof is disposed corresponding to the light emitting side of the collimating element 2, for receiving the detection laser collimated by the collimating element 2 and reflecting the detection laser to the object to be measured, and a scanning center of each peripheral micromirror 412 is used for receiving and reflecting the reflected detection laser reflected from the object to be measured; the receiving lens assembly 6 is configured to be disposed corresponding to the plurality of the peripheral micromirrors 412, so as to collect the detection laser reflected from the plurality of the peripheral micromirrors 412 and send the detection laser to the receiving end; that is, in this embodiment, the detection laser light is emitted from the emitting end of the laser emitting device 1, collimated by the collimating element 2 at the emitting end, and then directed to the center micromirror 411, and reflected by the optical element 3 to the object to be detected, and after reaching the object to be detected, the detection laser light returns to the plurality of peripheral micromirrors 412 on the MEMS micromirror assembly 4 through diffuse reflection, is received by each of the peripheral micromirrors 412 and is reflected to the detecting device 5, and after being converged by the receiving lens assembly 6, the detection laser light is received by the receiving end of the detecting device 5, so that not only the detection laser light can complete photoelectric conversion of the optical signal in the detecting device 5, thereby completing detection; in addition, the receiving efficiency of the received optical signal can be improved, attenuation caused by the transmitting optical element 3 is reduced, and meanwhile, as each MEMS micro-mirror unit 41 can rotate in a two-dimensional direction, a plurality of optical elements 3 are not required to be cascaded, so that the number of the optical elements 3 is effectively reduced, the overall external dimension of a product is reduced, and the cost is reduced.
The invention does not limit the specific mode of the receiving lens assembly 6, the receiving lens assembly 6 can be a single lens, and lenses with different areas are adopted to converge the detection laser according to the long distance of the detection distance; when the detection distance is short, a single lens is adopted, and when the detection distance is long, a plurality of lenses are assembled to increase the receiving area.
Correspondingly, based on the embodiment that the MEMS micro-mirror assembly 4 includes a plurality of MEMS micro-mirror units 41", the receiving lens assembly 6 includes a plurality of receiving lenses 61, the plurality of receiving lenses 61 includes a central lens at a central position, and a plurality of peripheral lenses surrounding a peripheral side of the central lens, the central lens corresponds to the central micro-mirror 411, and the plurality of peripheral lenses corresponds to the plurality of peripheral micro-mirrors 412 one by one, so as to collect the detection laser light reflected from the plurality of peripheral micro-mirrors 412 and send the detection laser light to the receiving end; that is, the number of the MEMS micro-mirror units 41 and the receiving lenses 61 can be correspondingly adjusted according to the practical technical requirements of the semi-solid laser radar 100, so as to meet the ranging requirements of different application scenarios; further, referring to fig. 4, the detection laser light reflected from each MEMS micro-mirror unit 41 passes through the corresponding receiving lens 61 at the same incident angle, and can be finally focused at the same place and received by the detecting device 5.
In an embodiment, the semi-solid laser radar 100 further includes a micro-electromechanical driver, and the micro-electromechanical driver drives each of the MEMS micro-mirror units 41 of the MEMS micro-mirror assembly 4 to rotate, so that the control is simple and the rotation angle is accurate.
In the present invention, the micro electromechanical driver includes an electrothermal driver or an electrostatic driver; it should be noted that, the electrothermal driver converts electric energy into heat energy, and drives the electrothermal driver through mechanical displacement and force output caused by thermal expansion and thermal contraction, the electrothermal driver has low driving voltage, simple control, large driving force and output deformation, and is easy to be compatible with an integrated circuit, so that the semi-solid laser radar 100 is more stable; and the electrostatic actuator is stable in movement and large in movement interval.
In the present invention, the MEMS micro-mirror assembly 4 includes a plurality of MEMS micro-mirror units 41 assembled in sequence, and a plurality of micro-electromechanical drivers are correspondingly arranged, and the plurality of micro-electromechanical drivers are correspondingly and electrically connected to the plurality of MEMS micro-mirror units 41 respectively so as to correspondingly drive the plurality of MEMS micro-mirror units 41 to rotate; by providing a plurality of micro electromechanical drivers for driving a plurality of MEMS micro mirror units 41 to rotate correspondingly, the MEMS micro mirror device is simple to control and easy to operate.
It should be noted that the above two technical features may be alternatively or simultaneously set, and in this embodiment, the above two technical features are simultaneously set, that is, the microelectromechanical driver includes an electrothermal driver or an electrostatic driver; the MEMS micro-electromechanical drivers are provided in plurality and are respectively and correspondingly electrically connected to the MEMS micro-mirror units 41 to correspondingly drive the MEMS micro-mirror units 41 to rotate; thus, the micro-electromechanical driver is simple to control, has large driving force and output deformation, and is easy to be compatible with an integrated circuit, so that the semi-solid laser radar 100 is more stable.
In the present invention, the laser emitting device 1 includes a laser 11, an optical fiber coupler 12, and an emitting optical fiber array 13 that are connected by telecommunication, where the emitting optical fiber array 13 includes a plurality of emitting optical fibers that are arranged side by side, the optical fiber coupler 12 is disposed at a laser end of the laser 11, and is configured to couple laser emitted from the laser end and then send the coupled laser to the plurality of emitting optical fibers, so as to form the detection laser emitted from the plurality of emitting optical fibers, where the collimating element 2 is disposed at an emitting end of the plurality of emitting optical fibers, and the emitting end of the laser emitting device 1 includes an emitting end of the plurality of emitting optical fibers; it should be noted that, when the detection distance is far, a longer optical signal flight time is required, which means that the number of optical signals is smaller; to ensure that there are enough detection points within the detection field of the semi-solid laser radar 100, the input optical signal may be divided into multiple parts; in this scheme, the laser emitted from the laser 11 is coupled by the optical fiber coupler 12 and then sent to the plurality of emission optical fibers, so as to form the detection laser emitted from the plurality of emission optical fibers, so that, before splitting, the number of effective points in the detection field range is N, and after the optical signal is divided into N parts, the number of effective points in the detection field range is increased from N to N, so that the number of point numbers in the detection field range can be increased, and the detection requirement of the semi-solid laser radar 100 is met.
In the present invention, the detecting device 5 includes a receiving optical fiber array 51 and a detector 52 that are connected by telecommunication, the receiving optical fiber array 51 includes a plurality of receiving optical fibers arranged side by side, and receiving ends of the plurality of receiving optical fibers are disposed on an light emitting side of the receiving lens assembly 6, so as to respectively receive the detection laser beams converged and emitted from the receiving lens assembly 6, and send the detection laser beams to the detector 52, where a receiving end of the detecting device 5 includes receiving ends of the plurality of receiving optical fibers; it should be noted that, corresponding to the laser emitting device 1, the detecting device 5 also adopts array optical fibers for receiving, and the number of the receiving optical fibers corresponds to the number of the emitting optical fibers one by one; the receiving fiber array 51 may use a single mode fiber or a multimode fiber, and the receiving fiber array 51 has a larger receiving area and may receive more light energy. After being received by the receiving fiber array 51, the optical signal is transmitted to the detector 52 by the receiving fiber array 51, so as to complete photoelectric conversion of the optical signal.
It should be noted that the two technical features may be alternatively or simultaneously provided, and specifically, in this embodiment, the two technical features are simultaneously provided, that is, the laser emitting device 1 includes a laser 11, an optical fiber coupler 12 and an emitting optical fiber array 13 that are connected by electrical signals, the emitting optical fiber array 13 includes a plurality of emitting optical fibers that are arranged side by side, the optical fiber coupler 12 is disposed at a laser end of the laser 11, and is configured to couple laser emitted from the laser end and then send the coupled laser to the plurality of emitting optical fibers, so as to form the detection laser emitted from the plurality of emitting optical fibers, where the collimating element 2 is disposed at an emitting end of the plurality of emitting optical fibers, and the emitting end of the laser emitting device 1 includes an emitting end of the plurality of emitting optical fibers; the detecting device 5 includes a receiving optical fiber array 51 and a detector 52 that are connected by telecommunication, where the receiving optical fiber array 51 includes a plurality of receiving optical fibers arranged side by side, and receiving ends of the plurality of receiving optical fibers are disposed on an outgoing side of the receiving lens assembly 6, and are configured to respectively receive the detection laser beams converged and outgoing from the receiving lens assembly 6, and send the detection laser beams to the detector 52, where a receiving end of the detecting device 5 includes receiving ends of the plurality of receiving optical fibers; in this way, the requirement of the semi-solid laser radar 100 for emitting and receiving laser light can be satisfied.
The invention does not limit the type of the detector 52, and when the test distance is not far, an APD detector 52 array can be used; when the test distance is far, an array of detectors 52 with a larger gain factor, such as a SPAD array or photomultiplier array, is used.
In this embodiment, the laser light emitted from the laser 11 is coupled by the optical fiber coupler 12 and then sent to the plurality of emission optical fibers, so as to form the detection laser light emitted from the plurality of emission optical fibers, and the detection laser light is emitted to the emission lens; a plurality of the emitting optical fibers are distributed in one dimension or two dimensions in parallel, and the emitted light rays are parallelTransmitting, that is, the signal of each optical fiber is divergent, and after passing through the emission lens, each divergent optical signal is converted into a parallel optical signal, and each optical beam is distributed at a certain angle, is no longer parallel, and is directed to the reflection area of the optical element 3; the distance between two adjacent emitting fibers is
Figure SMS_1
The focal length of the emission lens is +.>
Figure SMS_2
Assuming that each emission optical fiber is distributed at equal intervals, an included angle between two adjacent light beams is θ after the light signals emitted by each emission optical fiber are collimated by the emission lens, wherein +_ is equal to->
Figure SMS_3
Meanwhile, in order to ensure the detection effect of the semi-solid laser radar 100, it is necessary to ensure that the angles of emission of the light beams of the plurality of emitting optical fibers are the same as the angles of reception of the light beams of the plurality of receiving optical fibers, and the distance between two adjacent receiving optical fibers is +.>
Figure SMS_4
' the focal length of the receiving lens 61 is +.>
Figure SMS_5
'assuming that the receiving optical fibers are all distributed at equal intervals, after the optical signals received by the receiving optical fibers are converged by the receiving lens 61, an included angle between two adjacent light beams is θ', wherein>
Figure SMS_6
Referring to fig. 5, the present invention further provides a control method of a semi-solid laser radar, where the semi-solid laser radar includes a laser emitting device, an optical element, a MEMS micro mirror assembly and a plurality of micro electromechanical drivers, the MEMS micro mirror assembly includes a plurality of MEMS micro mirror units, the MEMS micro mirror units include a central micro mirror located at a central position and a plurality of peripheral micro mirrors surrounding a peripheral side of the central micro mirror, the optical element is disposed on the central micro mirror, and the MEMS micro mirror units are respectively and correspondingly electrically connected to the MEMS micro mirror units;
the control method of the semi-solid laser radar comprises the following steps:
s10: controlling the laser emitting device to be started;
s20: acquiring the number parameter of the emitted pulses per second of the laser emitting device;
s30: calculating the farthest detection distance of the semi-solid laser radar according to the pulse quantity parameter;
s40: and adjusting the control strategy of each MEMS micro mirror unit according to the furthest detection distance and the standard detection distance.
In this embodiment, according to the pulse number parameter, calculating the farthest detection distance of the semi-solid laser radar; assuming that the laser emits pulses per second with parameters of
Figure SMS_7
The emission period is +.>
Figure SMS_8
On the premise of ensuring that adjacent pulse signal detection is not interfered, the furthest detection distance is d, wherein +.>
Figure SMS_9
After the furthest detection distance of the semi-solid laser radar is calculated, the control strategy of each MEMS micro-mirror unit is adjusted according to the furthest detection distance and the standard detection distance, so that the semi-solid laser radar can more accurately capture optical signals, and resource waste caused by starting all the MEMS micro-mirror units at any time is avoided.
Specifically, adjusting the control strategy S40 of each MEMS micro-mirror unit according to the furthest detection distance and the standard detection distance, including:
s401: when the farthest detection distance is larger than the standard detection distance, adjusting the opening position and the opening number of the MEMS micro mirror units;
s402: and respectively controlling a plurality of micro-electromechanical drivers corresponding to the started MEMS micro-mirror units to start, and correspondingly enabling the corresponding MEMS micro-mirror units to rotate.
Specifically, when the farthest detection distance is greater than the standard detection distance, adjusting the opening position and the opening number of the MEMS micro-mirror units S401 includes:
s4011: controlling the central micromirror to be turned on;
s4012: calculating a detection distance difference value according to the farthest detection distance and the standard detection distance;
s4013: calculating the opening quantity parameter of the MEMS micro mirror unit according to the detection distance difference value;
s4014: and controlling the opening of the peripheral micro mirrors corresponding to the peripheral sides of the central micro mirrors according to the opening quantity parameters.
In this embodiment, when the farthest detection distance is greater than the standard detection distance, the semi-solid laser radar performs remote detection, and calculates a detection distance difference value according to the farthest detection distance and the standard detection distance; calculating the opening quantity parameter of the MEMS micro mirror unit according to the detection distance difference value, controlling the central micro mirror to be opened, and controlling the peripheral micro mirror corresponding to the peripheral side of the central micro mirror to be opened according to the opening quantity parameter; the detection laser is emitted from an emitting end of the laser emitting device, is collimated by a collimating element at the emitting end, is emitted to the central micro-mirror, is reflected to a detected object by the optical element, returns to a plurality of peripheral micro-mirrors on the MEMS micro-mirror assembly after reaching the detected object through diffuse reflection, is received by each peripheral micro-mirror and is reflected to the detection device, and is received by a receiving end of the detection device after being converged by the receiving lens assembly, so that the detection laser can complete photoelectric conversion of an optical signal in the detection device, and detection is completed; moreover, the receiving efficiency of the received optical signal can be improved, and the attenuation caused by the transmitting optical element can be reduced; simultaneously, respectively controlling a plurality of micro electromechanical drivers corresponding to the opened MEMS micro mirror units to start, and correspondingly enabling the corresponding MEMS micro mirror units to rotate; because each MEMS micro mirror unit can rotate in two-dimensional directions, a plurality of optical elements are not required to be cascaded, the number of the optical elements is effectively reduced, the overall dimension of the product is reduced, and the cost is reduced.
Meanwhile, according to the furthest detection distance and the standard detection distance, a control strategy S40 of each MEMS micro-mirror unit is adjusted, including:
s401': when the farthest detection distance is smaller than or equal to the standard detection distance, controlling the central micromirror to be turned on, and controlling one peripheral micromirror to be turned on;
s402': the micro electromechanical drivers corresponding to the central micromirror and the turned-on peripheral micromirror are controlled to be turned on, respectively, so that the central micromirror and the turned-on peripheral micromirror are rotated.
In this embodiment, when the farthest detection distance is smaller than or equal to the standard detection distance, the semi-solid laser radar performs close detection, and controls the central micromirror to be turned on, and one of the peripheral micromirrors to be turned on; the detection laser is emitted from an emitting end of the laser emitting device, is collimated by a collimating element at the emitting end, and is emitted to a reflecting area of the optical element, the reflecting area of the optical element receives the detection laser collimated by the collimating element and is reflected to the center micro-mirror, the center micro-mirror receives the detection laser reflected by the optical element and is reflected to the detected object, the detection laser reaches the detected object, and then returns to the peripheral micro-mirror to be received by the peripheral micro-mirror after being diffusely reflected, meanwhile, the detection laser reflected by the detected object is reflected to the detection device, the detection laser is received by a receiving end of the detection device after being converged by a receiving lens assembly, and photoelectric conversion of an optical signal is completed in the detection device, so that detection is completed.
The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the invention, and all equivalent structural changes made by the specification and drawings of the present invention or direct/indirect application in other related technical fields are included in the scope of the present invention.

Claims (8)

1. A semi-solid lidar comprising:
the laser emission device is provided with an emission end for emitting detection laser outwards, and a collimation element is arranged at the emission end and is used for collimating the detection laser emitted from the emission end of the laser emission device;
the optical element is arranged on the light-emitting side of the collimating element and forms an included angle with the collimating element, and at least a reflecting area is formed on the optical element and is used for receiving the detection laser collimated by the collimating element and reflecting the detection laser to the object to be measured;
the MEMS micro-mirror assembly comprises at least one MEMS micro-mirror unit which is movably arranged, and the MEMS micro-mirror unit is used for receiving and reflecting detection laser reflected from a measured object; the method comprises the steps of,
the detection device is provided with a receiving end used for receiving detection laser, a receiving lens component is arranged at the receiving end and used for converging the detection laser reflected by the MEMS micro-mirror component and sending the detection laser to the receiving end;
the MEMS micro-mirror assembly comprises a plurality of MEMS micro-mirror units, and the MEMS micro-mirror units are spliced in sequence, so that the scanning centers of the MEMS micro-mirror units can be enclosed together to form a scanning area for receiving and reflecting the reflected detection laser reflected by the tested object;
the MEMS micro-mirror units comprise a central micro-mirror at a central position and a plurality of peripheral micro-mirrors surrounding the periphery of the central micro-mirror;
the optical element is arranged on the central micro-mirror, and the reflecting area of the optical element is arranged corresponding to the light emitting side of the collimating element and is used for receiving the detection laser collimated by the collimating element and reflecting the detection laser to the measured object, and the scanning center of each peripheral micro-mirror is used for receiving and reflecting the reflected detection laser reflected by the measured object;
the receiving lens component is used for being respectively arranged corresponding to the plurality of the peripheral micromirrors so as to collect the detection laser reflected by the plurality of the peripheral micromirrors and send the detection laser to the receiving end.
2. The semi-solid state lidar of claim 1, wherein the optical element further has a transmissive region formed thereon;
the MEMS micro mirror unit is arranged on the light incident side of the optical element and is used for receiving the detection laser reflected by the optical element and reflecting the detection laser to the detected object and receiving the detection laser reflected by the detected object and reflecting the detection laser to the transmission area of the optical element;
the detection device is arranged on the light emitting side of the optical element, and the receiving end of the detection device is arranged towards the transmission area of the optical element and is used for receiving the transmitted detection laser from the transmission area of the optical element.
3. The semi-solid lidar of claim 1, wherein the receiving lens assembly comprises a plurality of receiving lenses, the plurality of receiving lenses comprise a central lens at a central position and a plurality of peripheral lenses surrounding a peripheral side of the central lens, the central lens corresponds to the central micromirror, and the plurality of peripheral lenses correspond to the plurality of peripheral micromirrors one by one to collect the detection laser light reflected from the plurality of peripheral micromirrors and send the detection laser light to the receiving terminal.
4. The semi-solid state lidar of claim 1, further comprising a microelectromechanical driver; wherein:
the micro-electromechanical driver comprises an electrothermal driver or an electrostatic driver; and/or the number of the groups of groups,
the MEMS micro-mirror assembly comprises a plurality of MEMS micro-mirror units which are assembled in sequence, a plurality of micro-electromechanical drivers are arranged correspondingly, and the micro-electromechanical drivers are used for being respectively and correspondingly electrically connected with the MEMS micro-mirror units so as to correspondingly drive the MEMS micro-mirror units to rotate.
5. The control method of the semi-solid laser radar is characterized in that the semi-solid laser radar comprises a laser emitting device, an optical element, an MEMS micro mirror assembly and a plurality of micro electromechanical drivers, wherein the MEMS micro mirror assembly comprises a plurality of MEMS micro mirror units, the MEMS micro mirror units comprise a center micro mirror at a center position and a plurality of peripheral micro mirrors surrounding the periphery of the center micro mirror, the optical element is arranged on the center micro mirror, and the MEMS micro mirror units are respectively and correspondingly electrically connected with the MEMS micro mirror units;
the control method of the semi-solid laser radar comprises the following steps:
controlling the laser emitting device to be started;
acquiring the number parameter of the emitted pulses per second of the laser emitting device;
calculating the farthest detection distance of the semi-solid laser radar according to the pulse quantity parameter;
and adjusting the control strategy of each MEMS micro-mirror unit according to the farthest detection distance and the standard detection distance, wherein when the farthest detection distance is larger than the standard detection distance, the semi-solid laser radar performs long-distance detection, and when the farthest detection distance is smaller than or equal to the standard detection distance, the semi-solid laser radar performs short-distance detection.
6. The method of claim 5, wherein adjusting the control strategy of each MEMS micro-mirror unit according to the furthest detection distance and the standard detection distance comprises:
when the farthest detection distance is larger than the standard detection distance, adjusting the opening position and the opening number of the MEMS micro mirror units;
and respectively controlling a plurality of micro-electromechanical drivers corresponding to the started MEMS micro-mirror units to start, and correspondingly enabling the corresponding MEMS micro-mirror units to rotate.
7. The method of controlling a semi-solid laser radar according to claim 6, wherein adjusting the on position and the on number of the MEMS micro-mirror unit when the farthest detection distance is greater than the standard detection distance, comprises:
controlling the central micromirror to be turned on;
calculating a detection distance difference value according to the farthest detection distance and the standard detection distance;
calculating the opening quantity parameter of the MEMS micro mirror unit according to the detection distance difference value;
and controlling the opening of the peripheral micro mirrors corresponding to the peripheral sides of the central micro mirrors according to the opening quantity parameters.
8. The method of claim 5, wherein adjusting the control strategy of each MEMS micro-mirror unit according to the furthest detection distance and the standard detection distance comprises:
when the farthest detection distance is smaller than or equal to the standard detection distance, controlling the central micromirror to be turned on, and controlling one peripheral micromirror to be turned on;
the micro electromechanical drivers corresponding to the central micromirror and the turned-on peripheral micromirror are controlled to be turned on, respectively, so that the central micromirror and the turned-on peripheral micromirror are rotated.
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