CN116040960B - Stable inorganic frame structure photocatalysis TiO2Method for producing film - Google Patents
Stable inorganic frame structure photocatalysis TiO2Method for producing film Download PDFInfo
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- CN116040960B CN116040960B CN202211705818.4A CN202211705818A CN116040960B CN 116040960 B CN116040960 B CN 116040960B CN 202211705818 A CN202211705818 A CN 202211705818A CN 116040960 B CN116040960 B CN 116040960B
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- 230000001699 photocatalysis Effects 0.000 title claims abstract description 22
- 238000007146 photocatalysis Methods 0.000 title 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 29
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 28
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000001301 oxygen Substances 0.000 claims abstract description 25
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 25
- 229910010413 TiO 2 Inorganic materials 0.000 claims abstract description 22
- 239000004793 Polystyrene Substances 0.000 claims abstract description 17
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 15
- 239000002243 precursor Substances 0.000 claims abstract description 15
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000011521 glass Substances 0.000 claims abstract description 13
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 13
- 239000010936 titanium Substances 0.000 claims abstract description 13
- 229920002223 polystyrene Polymers 0.000 claims abstract description 11
- 238000002360 preparation method Methods 0.000 claims abstract description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000004005 microsphere Substances 0.000 claims abstract description 10
- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000012159 carrier gas Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 8
- 230000003014 reinforcing effect Effects 0.000 claims abstract description 6
- 229910052786 argon Inorganic materials 0.000 claims abstract description 5
- 238000006243 chemical reaction Methods 0.000 claims abstract description 5
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000001035 drying Methods 0.000 claims abstract description 4
- 238000011049 filling Methods 0.000 claims abstract description 4
- 238000005137 deposition process Methods 0.000 claims abstract description 3
- 238000007747 plating Methods 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims description 13
- 230000008021 deposition Effects 0.000 claims description 10
- 238000010926 purge Methods 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 7
- 238000001354 calcination Methods 0.000 claims description 2
- 238000004140 cleaning Methods 0.000 abstract description 5
- 239000011148 porous material Substances 0.000 abstract description 2
- DOIRQSBPFJWKBE-UHFFFAOYSA-N dibutyl phthalate Chemical compound CCCCOC(=O)C1=CC=CC=C1C(=O)OCCCC DOIRQSBPFJWKBE-UHFFFAOYSA-N 0.000 description 4
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229960002380 dibutyl phthalate Drugs 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 238000004659 sterilization and disinfection Methods 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000013385 inorganic framework Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001603 reducing effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000005348 self-cleaning glass Substances 0.000 description 1
- 239000010865 sewage Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
- C03C17/2456—Coating containing TiO2
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J21/00—Catalysts comprising the elements, oxides, or hydroxides of magnesium, boron, aluminium, carbon, silicon, titanium, zirconium, or hafnium
- B01J21/06—Silicon, titanium, zirconium or hafnium; Oxides or hydroxides thereof
- B01J21/063—Titanium; Oxides or hydroxides thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J35/00—Catalysts, in general, characterised by their form or physical properties
- B01J35/30—Catalysts, in general, characterised by their form or physical properties characterised by their physical properties
- B01J35/39—Photocatalytic properties
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/25—Oxides by deposition from the liquid phase
- C03C17/256—Coating containing TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/212—TiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/11—Deposition methods from solutions or suspensions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W10/00—Technologies for wastewater treatment
- Y02W10/30—Wastewater or sewage treatment systems using renewable energies
- Y02W10/37—Wastewater or sewage treatment systems using renewable energies using solar energy
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Catalysts (AREA)
Abstract
The invention relates to a preparation method of a stable inorganic frame structure photocatalytic TiO 2 film, which is characterized by comprising the following steps: (1) Preparing titanium oxide/PS precursor mixed sol by taking butyl titanate as a precursor and taking polystyrene microspheres as a film filling template; (2) Plating the precursor mixed sol on a glass substrate, and drying and heat-treating to obtain a porous frame microstructure titanium oxide film; (3) The method is characterized in that a titanium oxide film is used as a substrate, a TiO 2 structural reinforcing layer is deposited on the titanium oxide film, argon is used as a reaction carrier gas source in the deposition process, titanium isopropoxide or titanium tetradimethylamino is used as a titanium source, and oxygen or H 2 O is used as an oxygen source to perform plasma oxygen atomic layer deposition or thermal oxygen atomic layer deposition. The invention has the advantages that: the preparation process of the invention is easy to control, and the existence of the surface pore structure greatly increases the specific surface area and promotes the wettability of the surface of the film, so that the film has good photocatalytic performance, super-hydrophilicity and self-cleaning capability.
Description
Technical Field
The invention belongs to the field of preparation of artificial microstructure functional films, relates to preparation of a porous structure film, and in particular relates to a preparation method of a stable inorganic frame structure photocatalytic TiO 2 film.
Background
Titanium oxide has been widely studied for a long time with remarkable photocatalytic performance, a photocatalytic material receives free electrons which generate transition when irradiated by light, and photo-generated electrons or holes are combined with ions or molecules to generate active free radicals, so that the titanium oxide has oxidizing or reducing properties and can degrade macromolecular organic matters. The photocatalytic material is widely applied to the fields of self-cleaning of glass, sewage treatment, peculiar smell elimination, sterilization, disinfection and the like. The traditional titanium oxide self-cleaning film has relatively weak photocatalytic performance, so that the application field of the titanium oxide film is limited, the photocatalytic capability of the titanium oxide film is enhanced, and the titanium oxide self-cleaning film is particularly important to the enhancement of the self-cleaning performance of titanium oxide film glass and the expansion of the application field of titanium oxide coated glass.
Disclosure of Invention
The invention aims to make up the defects of the prior art and provides a preparation method of a stable inorganic frame structure photocatalytic TiO 2 film.
In order to achieve the above purpose, the technical scheme adopted by the invention is as follows:
The preparation method of the stable inorganic framework structure photocatalytic TiO 2 film is characterized by comprising the following steps:
(1) Preparing titanium oxide/PS precursor mixed sol by taking butyl titanate as a precursor and taking Polystyrene (PS) microspheres as a film filling template;
(2) Plating titanium oxide/PS precursor mixed sol on a glass substrate, drying the glass substrate, and then performing heat treatment and calcination to remove PS microsphere templates in the film body structure to obtain a porous frame microstructure titanium oxide film;
(3) And (3) taking the titanium oxide film prepared in the step (2) as a substrate, depositing a TiO 2 structural reinforcing layer on the titanium oxide film, and performing plasma atomic oxygen layer deposition or thermal atomic oxygen layer deposition by taking argon as a reaction carrier gas source, titanium isopropoxide or titanium tetradimethylamino as a titanium source and taking oxygen or H 2 O as an oxygen source in the deposition process.
Further, the temperature of the heat treatment is 400-650 ℃ and the time is 1-3 h.
Further, the temperature of the heat treatment is 550-600 ℃ and the time is 1-2 h.
Further, the diameter of the polystyrene microsphere is 250-700 nm.
Further, the vacuum degree of the deposition background of the atomic layer in the step (3) is 0.1-1.0 Pa, the flow rate of carrier gas is 100-200 sccm, the deposition temperature is 100-200 ℃, and the pulse cycle times are 100-1000 times; silicon source parameters: pulse for 30-60 ms, purge for 15-30 s; thermal atomic layer deposition parameters of oxygen source: pulse for 10-30 ms and purge for 20-35 s; plasma atomic layer deposition parameters of oxygen source: the power of the radio frequency power supply is 50-150W, the pulse is 1000-2000 ms, and the purging is performed for 30-50 s.
Further, the thickness of the TiO 2 structural reinforcing layer is 1-20 nm.
The invention takes butyl titanate as a precursor, takes Polystyrene (PS) microspheres as a film filling template to prepare titanium oxide/PS precursor mixed sol, coats the mixed sol on a substrate, dries coated glass, and is assisted with high-temperature treatment to remove the PS microsphere template in a film structure, thus obtaining an inorganic frame structure TiO 2 film; in order to maintain the stability of the frame structure prepared by S1 and the binding force of the film and the substrate, the frame TiO 2 film prepared by S1 is used as a film coating substrate, an atomic layer deposition TiO 2 structure enhancement layer is carried out, argon is used as a reaction carrier gas source, titanium isopropoxide or titanium tetradimethylamino is used as a titanium source, and oxygen or H 2 O is used as an oxygen source to carry out plasma oxygen atomic layer deposition or thermal oxygen atomic layer deposition.
Compared with the prior art, the invention has the following advantages:
1. The film with the porous frame structure is prepared by a template method, and simultaneously, the characteristics of uniform film formation and controllable film formation of atomic-level thickness of the ALD deposited film on the substrate with the special-shaped structure are utilized to achieve the aim of stabilizing the frame TiO 2 structure, and meanwhile, the binding force between the prepared film and the substrate is increased; the preparation process is easy to control and suitable for large-scale popularization;
2. the titanium oxide film greatly increases the specific surface area due to the existence of the surface pore structure, so that the film has good photocatalytic performance, and meanwhile, the existence of the surface microstructure promotes the wettability of the film surface, so that the film is super-hydrophilic. The ultra-small contact angle of the film to water is almost 0 degree, the potential of the titanium oxide film glass as self-cleaning glass performance is improved, and meanwhile, the application field of the titanium oxide coated glass can be expanded due to the excellent photocatalytic performance.
Drawings
FIG. 1 is a cross-sectional scan of a sample according to example 1 of the present invention;
FIG. 2 is a sample photocatalytic pattern according to example 1 of the present invention;
fig. 3 is a graph showing the contact angle test of the sample according to example 1 of the present invention.
Detailed Description
A preparation method of a stable inorganic frame structure photocatalytic TiO 2 film comprises the following specific implementation steps:
Example 1
(1) Mixing 20ml of butyl phthalate with 60ml of absolute ethyl alcohol uniformly, adding 5ml of acetylacetone, standing for 1h, then dripping 10ml of ionized water to hydrolyze the butyl phthalate, regulating the pH value of the solution to be 3.0, adding 2ml of N, N-dimethylformamide, stirring for 2h, and standing for 24h to obtain a precursor solution;
(2) Mixing 5ml of precursor liquid with 0.5ml of polystyrene microsphere emulsion with solid content of 5%, and uniformly stirring by ultrasonic to obtain precursor mixed sol; coating the precursor mixed sol in a spin coating mode, and spin coating for 500r/min for 5s; placing the spin-coated glass substrate in an environment of 120 ℃ for drying; the dried glass substrate is placed at 600 ℃ for heat treatment for 1h, so that the PS template is thermally cracked and removed, and a porous frame microstructure titanium oxide film is obtained;
(3) Depositing a TiO 2 structural reinforcing layer with the thickness of 10nm on a porous frame microstructure titanium oxide film substrate, taking argon as a reaction carrier gas source, titanium isopropoxide as a titanium source, and taking oxygen as an oxygen source to perform plasma oxygen atomic layer deposition;
The vacuum degree of the deposition background is 0.5Pa, the flow rate of carrier gas is 150sccm, the deposition temperature is 150 ℃, and the pulse cycle times are 500 times; titanium source parameters: pulse for 45ms, purge for 20s;
When oxygen is used as an oxygen source for plasma atomic layer deposition, the oxygen source plasma atomic layer deposition parameters are as follows: the RF power supply was pulsed for 1500ms at 50W for 40s.
Example 2
The same procedure as in example 1 was employed, except that: in the step (3), titanium tetradimethylamino is used as a titanium source, and H 2 O is used as an oxygen source to carry out thermal oxygen atomic layer deposition; thermal atomic layer deposition parameters of oxygen source: pulse 25ms, purge 25s.
Claims (6)
1. The preparation method of the inorganic frame structure photocatalytic TiO 2 film is characterized by comprising the following steps:
(1) Preparing titanium oxide/PS precursor mixed sol by taking butyl titanate as a precursor and taking polystyrene microspheres as a film filling template;
(2) Plating titanium oxide/PS precursor mixed sol on a glass substrate, drying the glass substrate, and then performing heat treatment and calcination to remove PS microsphere templates in the film body structure to obtain a porous frame microstructure titanium oxide film;
(3) And (3) taking the titanium oxide film prepared in the step (2) as a substrate, depositing a TiO 2 structural reinforcing layer on the titanium oxide film, and performing plasma atomic oxygen layer deposition or thermal atomic oxygen layer deposition by taking argon as a reaction carrier gas source, titanium isopropoxide or titanium tetradimethylamino as a titanium source and taking oxygen or H 2 O as an oxygen source in the deposition process.
2. The method for preparing the inorganic frame structure photocatalytic TiO 2 film according to claim 1, which is characterized in that: the temperature of the heat treatment is 400-650 ℃ and the time is 1-3 h.
3. The method for preparing the inorganic frame structure photocatalytic TiO 2 film according to claim 1, which is characterized in that: the temperature of the heat treatment is 550-600 ℃ and the time is 1-2 hours.
4. The method for preparing the inorganic frame structure photocatalytic TiO 2 film according to claim 1, which is characterized in that: the diameter of the polystyrene microsphere is 250-700 nm.
5. The method for preparing the inorganic frame structure photocatalytic TiO 2 film according to claim 1, which is characterized in that: the vacuum degree of the deposition background of the atomic layer in the step (3) is 0.1-1.0 Pa, the flow rate of carrier gas is 100-200 sccm, the deposition temperature is 100-200 ℃, and the pulse cycle times are 100-1000 times; titanium source parameters: pulse for 30-60 ms, purge for 15-30 s; thermal atomic layer deposition parameters of oxygen source: pulse for 10-30 ms and purge for 20-35 s; plasma atomic layer deposition parameters of oxygen source: the power of the radio frequency power supply is 50-150W, the pulse is 1000-2000 ms, and the purging is performed for 30-50 s.
6. The method for preparing the inorganic frame structure photocatalytic TiO 2 film according to claim 1, which is characterized in that: the thickness of the TiO 2 structural reinforcing layer is 1-20 nm.
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CN202211705818.4A CN116040960B (en) | 2022-12-29 | 2022-12-29 | Stable inorganic frame structure photocatalysis TiO2Method for producing film |
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CN110038590B (en) * | 2019-05-14 | 2020-06-30 | 中国科学院山西煤炭化学研究所 | Multi-interlayer composite catalyst and preparation method and application thereof |
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CN104167293A (en) * | 2014-08-08 | 2014-11-26 | 青岛科技大学 | Dye-sensitized solar cell photoanode and producing method thereof |
CN104888612A (en) * | 2015-05-25 | 2015-09-09 | 哈尔滨工业大学 | Method for carrying out compound photocatalyst modification on micro-filtration membrane by utilizing atomic layer deposition |
CN106630666A (en) * | 2016-12-21 | 2017-05-10 | 蚌埠玻璃工业设计研究院 | Preparation method of porous super-hydrophilic film with photocatalytic performance |
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