CN116026508A - Vibration isolation structure of micro-thrust measuring system - Google Patents
Vibration isolation structure of micro-thrust measuring system Download PDFInfo
- Publication number
- CN116026508A CN116026508A CN202310316865.8A CN202310316865A CN116026508A CN 116026508 A CN116026508 A CN 116026508A CN 202310316865 A CN202310316865 A CN 202310316865A CN 116026508 A CN116026508 A CN 116026508A
- Authority
- CN
- China
- Prior art keywords
- magnet
- closed shell
- face
- mounting groove
- annular part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002955 isolation Methods 0.000 title claims abstract description 54
- 238000005259 measurement Methods 0.000 claims abstract description 43
- 230000005484 gravity Effects 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims description 32
- 230000000295 complement effect Effects 0.000 claims description 24
- 238000009434 installation Methods 0.000 claims description 20
- 230000007246 mechanism Effects 0.000 claims description 15
- 230000035699 permeability Effects 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 4
- 229910000889 permalloy Inorganic materials 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 7
- 230000036544 posture Effects 0.000 abstract description 6
- 238000006073 displacement reaction Methods 0.000 abstract description 5
- 230000008859 change Effects 0.000 abstract description 2
- 238000013016 damping Methods 0.000 description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- 238000005086 pumping Methods 0.000 description 6
- 229910000831 Steel Inorganic materials 0.000 description 4
- 230000007717 exclusion Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 229920001967 Metal rubber Polymers 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- UQMRAFJOBWOFNS-UHFFFAOYSA-N butyl 2-(2,4-dichlorophenoxy)acetate Chemical compound CCCCOC(=O)COC1=CC=C(Cl)C=C1Cl UQMRAFJOBWOFNS-UHFFFAOYSA-N 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000005461 lubrication Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T90/00—Enabling technologies or technologies with a potential or indirect contribution to GHG emissions mitigation
Landscapes
- Vibration Prevention Devices (AREA)
Abstract
The embodiment of the invention discloses a vibration isolation structure of a micro-thrust measurement system, and relates to the technical field of micro-thrust measurement. The vibration isolation structure is provided with a first magnet with only the first end face exposed and a second magnet with only the second end face exposed, so that a first repulsive force is generated between the first magnet and the second magnet, and when the gravity of the thrust measuring device is overcome to suspend the thrust measuring device, the leakage amount of a formed magnetic field is small, and the measuring precision of the thrust measuring device is improved. The vibration isolation structure further comprises an adjusting device, so that the magnetic axis of the first magnet and the magnetic axis of the second magnet are collinear through adjusting the position of the thrust measuring device, the stability of the generated first repulsive force is guaranteed, the stability of the thrust measuring device is guaranteed, the displacement, the inclination and the change of the front and rear vacuum postures are avoided, and the measuring precision of the thrust measuring device is improved. Simultaneously, the stability of first mutual repulsion can also avoid first magnet and second magnet contact, reaches the effect of completely keeping apart.
Description
Technical Field
The invention relates to the technical field of micro-thrust measurement, in particular to a vibration isolation structure of a micro-thrust measurement system.
Background
The micro thrust measuring system is mainly used for measuring the thrust and impulse of various space electric thrusters such as an ion thruster, a Hall thruster, a pulse plasma thruster, a field emission thruster and the like. The electric thruster has high specific impulse but small thrust and large self weight, and thrust is generally measured by using a torsion pendulum and other thrust measuring devices (a torsion pendulum type thrust measuring system generally adopts a flexible pivot or a C-shaped tube as an elastic restoring element, and a cross beam is fixedly connected with one end of the flexible pivot, bears the thruster and senses the thrust to generate offset response).
The electric thruster must work in a vacuum environment, the diameter and length of the vacuum chamber are typically several meters, and the internal space is narrow. In the ground test, the electric thruster generally performs work such as ignition test in a vacuum cabin, and mechanical vibration of a vacuum pumping unit such as a mechanical pump, a Roots pump, a molecular pump or a condensation pump is transmitted to a thrust measuring system through a cabin wall of the vacuum cabin.
The current requirements on the precision of micro-thrust measurement are higher and higher, for example, for the tasks of gravitational wave detection and the like, the thrust measurement precision is required to reach 1 micro-newton or even below 1 micro-newton. In the thrust measurement process, mechanical vibration generated by the vacuumizing unit is transmitted to a thrust measurement system, so that the force below a few micro-newtons is extremely easy to be interfered by various mechanical vibration noises, and the random error of measurement is larger.
The traditional vibration isolation measure is to install vibration isolators. Vibration isolators are elastic elements connecting equipment and foundations for reducing and eliminating vibration forces transmitted from the foundations to the equipment or the foundations, and vibration isolation devices and methods such as metal rubber vibration isolators, gas spring vibration isolators, steel spring vibration isolators, tangential spring plate structure vibration isolators and the like are commonly used. In a vacuum environment, the rubber can be gradually deflated to generate tiny deformation, and the rubber is not suitable for being used as a vibration isolation device of a micro-thrust measurement system in the vacuum environment. The gas spring vibration isolator leaks air in vacuum and is not suitable for use in a vacuum environment. The steel spring vibration isolator and the tangential spring plate structure have certain vibration isolation effect, but the rigidity of the spring is larger because of supporting larger mass, and the vibration isolation effect on the micro-bovine force is not obvious.
Disclosure of Invention
Based on the above, it is necessary to provide a vibration isolation structure of a micro thrust measurement system, which aims to solve the technical problem that the existing vibration isolation measures are not good.
In order to solve the technical problems, the invention adopts the following technical scheme:
a vibration isolation structure of a micro thrust measurement system, comprising:
a first magnet having a first end face;
the first closed shell is provided with a first mounting groove, the first magnet is complementary to the first mounting groove and is connected with the first closed shell, so that the first end face is exposed out of the first closed shell, the first closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the first closed shell is made of a high-permeability material;
a second magnet having a second end face;
the second closed shell is provided with a second mounting groove, the second magnet is complementary to the second mounting groove and is connected with the second closed shell so that the second end face is exposed on the second closed shell, the second closed shell is fixedly connected with the thrust measuring device so that the second end face is opposite to the first end face, a first repulsive force is generated between the first magnet and the second magnet so as to overcome the gravity of the thrust measuring device to suspend the first magnet, the second closed shell is made of a high-permeability material, and the direction of the first repulsive force is collinear with the gravity direction; and
And the adjusting device is used for adjusting the position of the thrust measuring device so that the magnetic axis of the first magnet is collinear with the magnetic axis of the second magnet.
In some embodiments of one vibration isolation structure of the micro thrust measurement system, the first magnet and the second magnet are identical in shape, and a cross section perpendicular to the magnetic axis is square or circular.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, the high permeability material is permalloy; and/or
The first closed shell is provided with a first annular part, the first annular part is positioned at the notch of the first mounting groove and protrudes outwards towards one side of the second end face, the second closed shell is provided with a second annular part, the second annular part is positioned at the notch of the second mounting groove and protrudes outwards towards one side of the first end face, and one of the first annular part and the second annular part is annularly arranged on the other one.
In some embodiments of a vibration isolation structure of the micro thrust measurement system, the thrust measurement device is provided with a mounting space, the mounting space is located above the center of gravity of the thrust measurement device, the first magnet is accommodated in the mounting space through the first enclosure, and the second magnet is accommodated in the mounting space through the second enclosure.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, the adjustment device comprises a first adjustment mechanism comprising four first exclusive assemblies comprising a third magnet, a third enclosure, a fourth magnet, and a fourth enclosure;
the third magnet is provided with a third end face;
the third closed shell is provided with a third mounting groove, the third magnet is complementary to the third mounting groove and is connected with the third closed shell, so that the third end face is exposed on the third closed shell, the third closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the third closed shell is made of a high-permeability material;
the fourth magnet has a fourth end face;
the fourth closed shell is provided with a fourth mounting groove, the fourth magnet is complementary to the fourth mounting groove and is connected with the fourth closed shell, so that the fourth end face is exposed out of the fourth closed shell, a second repulsive force is generated between the third magnet and the fourth magnet, and the fourth closed shell is made of a high-permeability material;
the four fourth magnets are arranged around the gravity direction and fixedly connected with the thrust measuring device through the fourth closed shell, and the installation position of the fourth closed shell is located above the thrust measuring device along the gravity direction.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, four of the fourth enclosure shells are integrally connected; and/or
The third closed shell is provided with a third annular part, the third annular part is positioned at the notch of the third mounting groove and protrudes outwards towards one side of the fourth end face, the fourth closed shell is provided with a fourth annular part, the fourth annular part is positioned at the notch of the fourth mounting groove and protrudes outwards towards one side of the third end face, and one of the third annular part and the fourth annular part is annularly arranged on the other one.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, the adjustment device further comprises a second adjustment mechanism comprising four second mutually exclusive components including a fifth magnet, a fifth enclosure, a sixth magnet, and a sixth enclosure;
the fifth magnet has a fifth end face;
the fifth closed shell is provided with a fifth mounting groove, the fifth magnet is complementary to the fifth mounting groove and is connected with the fifth closed shell so that the fifth end face is exposed out of the fifth closed shell, the fifth closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the fifth closed shell is made of a high-permeability material;
the sixth magnet has a sixth end face;
the sixth closed shell is provided with a sixth mounting groove, the sixth magnet is complementary to the sixth mounting groove and is connected with the sixth closed shell, so that the sixth end face is exposed out of the sixth closed shell, a third repulsive force is generated between the fifth magnet and the sixth magnet, and the sixth closed shell is made of a high-permeability material;
the four sixth magnets are in one-to-one correspondence with the four fourth magnets and are arranged around the gravity direction, and are fixedly connected with the thrust measuring device through the sixth closed shell, and the installation position of the sixth closed shell is located below the thrust measuring device along the gravity direction.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, four of the sixth enclosure shells are integrally connected; and/or
The fifth sealing shell is provided with a fifth annular part, the fifth annular part is positioned at the notch of the fifth mounting groove and protrudes outwards towards one side of the sixth end face, the sixth sealing shell is provided with a sixth annular part, the sixth annular part is positioned at the notch of the sixth mounting groove and protrudes outwards towards one side of the fifth end face, and one of the fifth annular part and the sixth annular part is arranged in a surrounding mode.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, the adjustment device further comprises a third adjustment mechanism comprising two second mutually exclusive components comprising a seventh magnet, a seventh enclosure, an eighth magnet, and an eighth enclosure;
the seventh magnet has a seventh end face;
the seventh closed shell is provided with a seventh mounting groove, the seventh magnet is connected with the seventh closed shell in a complementary mode to the seventh mounting groove, so that the seventh end face is exposed out of the seventh closed shell, the seventh closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the seventh closed shell is made of a high-permeability material;
the eighth magnet has an eighth end face;
the eighth closed shell is provided with an eighth mounting groove, the eighth magnet is complementary to the eighth mounting groove and is connected with the eighth closed shell, so that the eighth end face is exposed out of the eighth closed shell, a fourth repulsive force is generated between the seventh magnet and the eighth magnet, and the eighth closed shell is made of a high-permeability material;
the two eighth magnets are positioned in a first plane, the gravity direction is perpendicular to the first plane, the two eighth magnets are fixedly connected with the thrust measuring device through the eighth closed shell, and the installation position of the eighth closed shell is positioned on one side of the thrust measuring device deviating from the gravity direction.
In some embodiments of one vibration isolation structure of the micro-thrust measurement system, one vibration isolation structure of the micro-thrust measurement system further comprises an electromagnetic damper; and/or
The seventh closed shell is provided with a seventh annular part, the seventh annular part is positioned at the notch of the seventh mounting groove and protrudes outwards towards one side of the eighth end face, the eighth closed shell is provided with an eighth annular part, the eighth annular part is positioned at the notch of the eighth mounting groove and protrudes outwards towards one side of the seventh end face, and one of the seventh annular part and the eighth annular part is arranged in a surrounding mode.
The implementation of the embodiment of the invention has the following beneficial effects:
the vibration isolation structure of the micro thrust measurement system has the characteristics of no magnetic field leakage or leakage quantity which can be ignored, high stability, no displacement, no inclination, unchanged posture before and after vacuum pumping and the like besides the characteristics of no contact and no friction of the traditional magnetic suspension technology, no need of supporting medium, applicability under various special conditions such as vacuum, ultra-clean, high temperature, low temperature and the like, long-term working without lubrication and maintenance, uniform stress distribution and the like. Specifically, the vibration isolation structure is provided with a first magnet with only the first end face exposed and a second magnet with only the second end face exposed, so that a first repulsive force is generated between the first magnet and the second magnet, and when the gravity of the thrust measuring device is overcome to enable the thrust measuring device to suspend, the leakage amount of the formed magnetic field is small, and the measuring precision of the thrust measuring device is improved. Further, the vibration isolation structure further comprises an adjusting device, so that the magnetic axis of the first magnet and the magnetic axis of the second magnet are collinear through adjusting the position of the thrust measuring device, stability of the generated first repulsive force is guaranteed, stability of the thrust measuring device is guaranteed, displacement, inclination and change of the front-back posture of vacuum pumping are avoided, and measuring accuracy of the thrust measuring device is improved. Simultaneously, the stability of first mutual repulsion can also avoid first magnet and second magnet contact, reaches the effect of completely keeping apart.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Wherein:
FIG. 1 is an axial view of one vibration isolation structure of a micro thrust measurement system in one embodiment;
FIG. 2 is an enlarged schematic view of the portion A in FIG. 1;
FIG. 3 is an enlarged schematic view of the portion B in FIG. 1;
fig. 4 is a front view of the vibration isolation structure of fig. 1;
FIG. 5 is a cross-sectional view taken along line C-C of FIG. 4;
FIG. 6 is an enlarged view of the portion D of FIG. 5;
FIG. 7 is an enlarged view of the portion E of FIG. 5;
fig. 8 is a bottom view of the vibration isolation structure of fig. 1.
Description of the embodiments
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present invention, it should be noted that, if the terms "upper", "lower", "inner", "outer", and the like indicate an azimuth or a positional relationship based on the azimuth or the positional relationship shown in the drawings, or the azimuth or the positional relationship in which the inventive product is conventionally put in use, it is merely for convenience of describing the present invention and simplifying the description, and it is not indicated or implied that the apparatus or element referred to must have a specific azimuth, be configured and operated in a specific azimuth, and thus it should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, if any, are used merely for distinguishing between descriptions and not for indicating or implying a relative importance.
It should be noted that the features of the embodiments of the present invention may be combined with each other without conflict.
The micro thrust measuring system is mainly used for measuring the thrust and impulse of various space electric thrusters such as an ion thruster, a Hall thruster, a pulse plasma thruster, a field emission thruster and the like. The electric thruster has high specific impulse but small thrust and large self weight, and thrust is generally measured by using a torsion pendulum and other thrust measuring devices (a torsion pendulum type thrust measuring system generally adopts a flexible pivot or a C-shaped tube as an elastic restoring element, and a cross beam is fixedly connected with one end of the flexible pivot, bears the thruster and senses the thrust to generate offset response).
The electric thruster must work in a vacuum environment, the diameter and length of the vacuum chamber are typically several meters, and the internal space is narrow. In the ground test, the electric thruster generally performs work such as ignition test in a vacuum cabin, and mechanical vibration of a vacuum pumping unit such as a mechanical pump, a Roots pump, a molecular pump or a condensation pump is transmitted to a thrust measuring system through a cabin wall of the vacuum cabin.
The current requirements on the precision of micro-thrust measurement are higher and higher, for example, for the tasks of gravitational wave detection and the like, the thrust measurement precision is required to reach 1 micro-newton or even below 1 micro-newton. In the thrust measurement process, mechanical vibration generated by the vacuumizing unit is transmitted to a thrust measurement system, so that the force below a few micro-newtons is extremely easy to be interfered by various mechanical vibration noises, and the random error of measurement is larger.
The traditional vibration isolation measure is to install vibration isolators. Vibration isolators are elastic elements connecting equipment and foundations for reducing and eliminating vibration forces transmitted from the foundations to the equipment or the foundations, and vibration isolation devices and methods such as metal rubber vibration isolators, gas spring vibration isolators, steel spring vibration isolators, tangential spring plate structure vibration isolators and the like are commonly used. In a vacuum environment, the rubber can be gradually deflated to generate tiny deformation, and the rubber is not suitable for being used as a vibration isolation device of a micro-thrust measurement system in the vacuum environment. The gas spring vibration isolator leaks air in vacuum and is not suitable for use in a vacuum environment. The steel spring vibration isolator and the tangential spring plate structure have certain vibration isolation effect, but the rigidity of the spring is larger because of supporting larger mass, and the vibration isolation effect on the micro-bovine force is not obvious.
The invention provides a vibration isolation structure of a micro thrust measurement system for solving the technical problems. Referring to fig. 1, 2, and 4 to 6, a vibration isolation structure provided by the present invention will be described. The vibration isolation structure includes a first magnet 10, a first enclosure 20, a second magnet 30, a second enclosure 40, and an adjusting device. Wherein the first magnet 10 has a first end face 11. The magnetic axis of the first magnet 10 is perpendicular to the first end face 11. The first closure shell 20 is provided with a first mounting groove. The first magnet 10 is connected with the first closed shell 20 in a way of being complementary to the first mounting groove, so that the first end face 11 is exposed to the first closed shell 20, and leakage of the magnetic field generated by the first magnet 10 is reduced. Further, the first enclosure 20 is connected to a vacuum chamber. The first enclosure 20 is made of a high permeability material. The second magnet 30 has a second end face 31. The magnetic axis of the second magnet 30 is perpendicular to the second end face 31. The second closure 40 is provided with a second mounting groove. The second magnet 30 is connected with the second closed shell 40 in a manner complementary to the second mounting groove, so that the second end face 31 is exposed to the second closed shell 40, and leakage of the magnetic field generated by the second magnet 30 is reduced. The second enclosure 40 is fixedly connected with the thrust measuring device 50, so that the second end face 31 is opposite to the first end face 11, and a first repulsive force is generated between the first magnet 10 and the second magnet 30 to overcome the gravity of the thrust measuring device 50 and suspend the thrust measuring device, wherein the first repulsive force is generated by the same magnetic poles at the first end face 11 and the second end face 31. The first enclosure 20 is movable relative to the vacuum chamber to adjust the position of the first magnet 10 and thus the position of the thrust measuring device 50 by the first repulsive force. The second enclosure 40 is made of a high permeability material to reduce the amount of leakage. The direction of the first repulsive force is collinear with the direction of gravity. In this embodiment, the direction of gravity is parallel to the direction indicated by arrow X in fig. 4. The adjustment device is used to adjust the position of the thrust measuring device 50 so that the magnetic axis of the first magnet 10 is collinear with the magnetic axis of the second magnet 30.
In summary, the implementation of the embodiment of the invention has the following beneficial effects: the vibration isolation structure of the micro thrust measurement system has the characteristics of no magnetic field leakage or leakage quantity which can be ignored, high stability, no displacement, no inclination, unchanged posture before and after vacuum pumping and the like besides the characteristics of no contact and no friction of the traditional magnetic suspension technology, no need of supporting medium, applicability under various special conditions such as vacuum, ultra-clean, high temperature, low temperature and the like, long-term working without lubrication and maintenance, uniform stress distribution and the like. Specifically, the vibration isolation structure has the first magnet 10 with only the first end face 11 exposed and the second magnet 30 with only the second end face 31 exposed, so that a first repulsive force is generated between the first magnet 10 and the second magnet 30, and when the first magnet and the second magnet 30 are suspended against the gravity of the thrust measuring device 50, the leakage amount of the formed magnetic field is small, so that the measurement accuracy of the thrust measuring device 50 is improved. Further, the vibration isolation structure further comprises an adjusting device, so that the magnetic axis of the first magnet 10 and the magnetic axis of the second magnet 30 are collinear by adjusting the position of the thrust measuring device 50, the stability of the generated first repulsive force is ensured, the stability of the thrust measuring device 50 is ensured, the changes of the displacement, inclination and vacuum pumping front and rear postures are avoided, and the measuring precision of the thrust measuring device 50 is improved. Meanwhile, the stabilization of the first repulsive force can also avoid the contact between the first magnet 10 and the second magnet 30, thereby achieving the effect of complete isolation.
In this embodiment, the first magnet 10 and the second magnet 30 have the same shape, and a cross section perpendicular to the magnetic axis is square. It is understood that in other embodiments, the cross-sections of the first magnet 10 and the second magnet 30 perpendicular to the magnetic axis may also be circular or other shapes.
In one embodiment, the first enclosure 20 is provided with a first annular portion, and the first annular portion is located in the notch of the first mounting groove and protrudes toward the second end face 31. I.e. the first annular part is arranged around the notch of the first mounting groove. The first annular portion is made of the same material as the first closed casing 20. The magnitude of the magnetic field leakage amount formed by the first magnet 10 can be further reduced by providing the first annular portion in this manner.
In one embodiment, the second enclosure 40 is provided with a second annular portion, and the second annular portion is located in the notch of the second mounting groove and protrudes towards the first end face 11. I.e. the second annular part is arranged around the notch of the second mounting groove. The second annular portion is made of the same material as the second closed casing 40. The size of the magnetic field leakage amount formed by the second magnet 30 can be further reduced by providing the second annular portion in this manner. One of the first annular portion and the second annular portion is provided around the other, and leakage of the magnetic field formed by the first magnet 10 and the second magnet 30 is further prevented.
In one embodiment, please combine fig. 1, 2, 4 and 5, the thrust measuring device 50 is provided with an installation space 100. The installation space 100 is located above the center of gravity of the thrust measuring device 50, and the first magnet 10 is accommodated in the installation space 100 through the first enclosure 20, and the second magnet 30 is accommodated in the installation space 100 through the second enclosure 40. By arranging the installation space 100, the position generated by the first repulsive force is located above the gravity center of the thrust measuring device 50, which is favorable for the stress balance of the thrust measuring device 50 and is easier to be in the balance position. In this embodiment, a fixing frame 21 is provided on the first enclosure 20 to facilitate connection with the vacuum chamber. The fixing frames 21 extend from the first closed shell 20 to two sides respectively, so that the first closed shell 20 is stressed more uniformly when being connected with the vacuum cabin through the fixing frames 21.
In one embodiment, please combine fig. 1, 2, 4, 5 and 6, the adjusting device includes a first adjusting mechanism 60. The first adjustment mechanism 60 includes four first mutually exclusive components. The first exclusive assembly includes a third magnet 61, a third enclosure 62, a fourth magnet 63, and a fourth enclosure 64. The third magnet 61 has a third end face 611. The magnetic axis of the third magnet 61 is perpendicular to the third end face 611. The third closing shell 62 is provided with a third mounting groove. The third magnet 61 is connected with the third closed shell 62 in a manner complementary to the third mounting groove, so that the third end surface 611 is exposed to the third closed shell 62, and the leakage amount of the magnetic field generated by the third magnet 61 is reduced. The third enclosure 62 is connected to a vacuum chamber, the third enclosure 62 being made of a high permeability material. The fourth magnet 63 has a fourth end face 631. The magnetic axis of the fourth magnet 63 is perpendicular to the fourth end face 631. The fourth closed shell 64 is provided with a fourth mounting groove, and the fourth magnet 63 is connected with the fourth closed shell 64 in a way of being complementary to the fourth mounting groove, so that the fourth end surface 631 is exposed on the fourth closed shell 64, and the leakage amount of the magnetic field generated by the fourth magnet 63 is reduced. A second repulsive force is generated between the third magnet 61 and the fourth magnet 63, wherein the second repulsive force is generated due to the same magnetic poles at the third end surface 611 and the fourth end surface 631. The third enclosure 62 is movable relative to the vacuum chamber to adjust the position of the third magnet 61 and thus the position of the thrust measuring device 50 by the second repulsive force. The fourth enclosure 64 is made of a high permeability material to reduce the amount of leakage. Further, four fourth magnets 63 are disposed around the gravitational direction and fixedly connected to the thrust measuring device 50 through fourth enclosure 64. The fourth enclosure 64 is mounted in a position above the thrust measuring device 50 in the direction of gravity. Thus, the mutual exclusion combination of the four groups of the third magnets 61 and the fourth magnets 63 can balance the generated second repulsive forces. Meanwhile, the first adjustment mechanism 60 is disposed close to the first magnet 10 and the second magnet 30 to mainly maintain the position between the first magnet 10 and the second magnet 30 unchanged.
In the present embodiment, the third magnet 61 and the fourth magnet 63 have the same shape, and a cross section perpendicular to the magnetic axis is square. It will be appreciated that in other embodiments, the cross-sections of the third and fourth magnets 61, 63 perpendicular to the magnetic axis may also be circular or other shapes.
In one embodiment, the third enclosure 62 is provided with a third annular portion, which is located in the notch of the third mounting groove and protrudes toward the fourth end surface 631. I.e. the third annular portion is arranged around the notch of the third mounting groove. The third annular portion is the same as the third closed casing 62. The size of the magnetic field leakage amount formed by the third magnet 61 can be further reduced by providing the third annular portion in this manner.
In one embodiment, the fourth enclosure 64 is provided with a fourth annular portion, which is located in the notch of the fourth mounting groove and protrudes toward the third end 611. Namely, the fourth annular portion is disposed around the notch of the fourth mounting groove. The fourth annular portion is the same as the fourth closed casing 64. The magnitude of the magnetic field leakage amount formed by the fourth magnet 63 can be further reduced by providing the fourth annular portion in this manner. One of the third annular portion and the fourth annular portion is provided so as to be looped around the other, and leakage of the magnetic field formed by the third magnet 61 and the fourth magnet 63 is further prevented.
In one embodiment, as shown in FIG. 1, four fourth enclosure shells 64 are integrally connected to facilitate the transfer of the second mutual exclusion force. In this embodiment, four fourth closing shells 64 are integrally connected and have a cross shape.
In one embodiment, please combine fig. 1, 3, 4, 5, 7 and 8, the adjusting device further includes a second adjusting mechanism 70. The second adjustment mechanism 70 includes four second mutually exclusive components. The second exclusive assembly includes a fifth magnet 71, a fifth enclosure 72, a sixth magnet 73, and a sixth enclosure 74. The fifth magnet 71 has a fifth end face 711. The magnetic axis of the fifth magnet 71 is perpendicular to the fifth end face 711. The fifth enclosure 72 is provided with a fifth mounting groove, and the fifth magnet 71 is connected with the fifth enclosure 72 in a manner complementary to the fifth mounting groove, so that the fifth end face 711 is exposed to the fifth enclosure 72, and the leakage amount of the magnetic field generated by the fifth magnet 71 is reduced. The fifth enclosure 72 is connected to a vacuum chamber, the fifth enclosure 72 being made of a high permeability material. The sixth magnet 73 has a sixth end face 731. The magnetic axis of the sixth magnet 73 is perpendicular to the sixth end face 731. The sixth enclosure 74 is provided with a sixth mounting groove, and the sixth magnet 73 is connected to the sixth enclosure 74 in a manner complementary to the sixth mounting groove so that the sixth end face 731 is exposed to the sixth enclosure 74, thereby reducing the leakage amount of the magnetic field generated by the sixth magnet 73. A third repulsive force is generated between the fifth magnet 71 and the sixth magnet 73, wherein the third repulsive force is generated due to the same magnetic poles at the fifth end face 711 and the sixth end face 731. The fifth enclosure 72 is movable relative to the vacuum chamber to adjust the position of the fifth magnet 71 and thus the position of the thrust measuring device 50 by the third repulsive force. The sixth enclosure 74 is made of a high permeability material to reduce the amount of leakage. The four sixth magnets 73 are arranged in one-to-one correspondence with the four fourth magnets 63 and around the gravity direction, and are fixedly connected with the thrust measuring device 50 through the sixth closed shell 74, and the installation position of the sixth closed shell 74 is located below the thrust measuring device 50 along the gravity direction. Thus, the mutual repulsive forces of the fifth magnets 71 and the sixth magnets 73 are balanced. Meanwhile, the second adjusting mechanism 70 is located below the thrust measuring device 50 along the gravity direction, so as to mainly keep the posture of the thrust measuring device 50 unchanged.
In one embodiment, as shown in FIG. 8, four sixth enclosure shells 74 are integrally connected to facilitate the transfer of the third mutual exclusion force. In this embodiment, four sixth closing shells 74 are integrally connected and have a cross shape.
In the present embodiment, the fifth magnet 71 and the sixth magnet 73 have the same shape, and a cross section perpendicular to the magnetic axis is square. It will be appreciated that in other embodiments, the cross-sections of the fifth and sixth magnets 71, 73 perpendicular to the magnetic axis may also be circular or other shapes.
In one embodiment, the fifth enclosure 72 is provided with a fifth annular portion, which is located in the notch of the fifth mounting groove and protrudes toward the sixth end face 731. I.e. the fifth ring-shaped part is arranged around the notch of the fifth mounting groove. The fifth annular portion is made of the same material as the fifth enclosure 72. The magnitude of the magnetic field leakage amount formed by the fifth magnet 71 can be further reduced by providing the fifth annular portion in this manner.
In one embodiment, the sixth enclosure 74 is provided with a sixth annular portion, which is located in the notch of the sixth mounting groove and protrudes toward the side of the fifth end face 711. That is, the sixth annular portion is disposed around the notch of the sixth mounting groove. The sixth annular portion is the same material as the sixth enclosure 74. The size of the magnetic field leakage amount formed by the sixth magnet 73 can be further reduced by providing the sixth annular portion in this manner. One of the fifth annular portion and the sixth annular portion is provided so as to be looped around the other, and leakage of the magnetic field formed by the fifth magnet 71 and the sixth magnet 73 is further prevented.
In one embodiment, please combine fig. 1, 3, 4, 5 and 8, the adjusting device further includes a third adjusting mechanism 80. The third adjustment mechanism 80 includes two second mutually exclusive components. The second mutually exclusive assembly includes a seventh magnet, a seventh enclosure 81, an eighth magnet, and an eighth enclosure 82. The seventh magnet has a seventh end face. The magnetic axis of the seventh magnet is perpendicular to the seventh end face. The seventh closed shell 81 is provided with a seventh mounting groove, and the seventh magnet is connected with the seventh closed shell 81 in a way of being complementary to the seventh mounting groove, so that the seventh end surface is exposed to the seventh closed shell 81, and the leakage amount of the magnetic field generated by the seventh magnet is reduced. The seventh enclosure 81 is connected to the vacuum chamber, the seventh enclosure 81 being made of a high permeability material. The eighth magnet has an eighth end face. The magnetic axis of the eighth magnet is perpendicular to the eighth end face. The eighth closed shell 82 is provided with an eighth mounting groove, and the eighth magnet is connected with the eighth closed shell 82 in a manner complementary to the eighth mounting groove, so that the eighth end face is exposed to the eighth closed shell 82, and the leakage amount of the magnetic field generated by the eighth magnet is reduced. A fourth repulsive force is generated between the seventh magnet and the eighth magnet, wherein the fourth repulsive force is generated due to the same magnetic poles at the seventh end face and at the eighth end face. The seventh enclosure 81 can be moved relative to the vacuum chamber to adjust the position of the seventh magnet, and thus the position of the thrust measuring device 50, by the fourth repulsive force. The eighth enclosure 82 is made of a high permeability material to reduce the amount of leakage. Two eighth magnets are located in the first plane. The gravity direction is perpendicular to the first plane, and the two eighth magnets are fixedly connected with the thrust measuring device 50 through the eighth closed shell 82, and the installation position of the eighth closed shell 82 is located at one side of the thrust measuring device 50 deviating from the gravity direction. Thus, the balance between the generated second repulsive forces is achieved through the mutual exclusion combination of the seventh magnet and the eighth magnet. Meanwhile, the installation position of the eighth closure shell 82 is located at a side of the thrust measuring device 50 deviated from the gravitational direction so that the thrust measuring device 50 cannot be twisted. In the present embodiment, the eighth enclosure 82 is provided to the thrust measuring device 50 through a connecting frame 83.
In this embodiment, the seventh magnet and the eighth magnet have the same shape, and a cross section perpendicular to the magnetic axis is square. It will be appreciated that in other embodiments, the seventh and eighth magnets may also be circular or other shaped in cross-section perpendicular to the magnetic axis.
In one embodiment, a seventh annular part is provided on the seventh enclosure 81, and the seventh annular part is located at the notch of the seventh installation groove and protrudes toward the eighth end face side. Namely, the seventh annular part is provided around the notch of the seventh mounting groove. The seventh annular part is made of the same material as the seventh closed casing 81. The size of the magnetic field leakage amount formed by the seventh magnet can be further reduced by providing the seventh annular part in this manner.
In one embodiment, the eighth enclosure 82 is provided with an eighth annular portion, and the eighth annular portion is located in the notch of the eighth installation groove and protrudes toward the seventh end surface side. Namely, the eighth annular portion is provided around the notch of the eighth mounting groove. The eighth annular portion is the same as the eighth enclosure 82. The size of the magnetic field leakage amount formed by the eighth magnet can be further reduced by providing the eighth annular portion in this manner. One of the seventh annular part and the eighth annular part is arranged around the other, so that leakage of a magnetic field formed by the seventh magnet and the eighth magnet is further prevented.
In one embodiment, please combine fig. 1, 3, 4, 7 and 8, a vibration isolation structure of the micro thrust measurement system further includes an electromagnetic damper 90 to generate a resistance to block the vibration movement of the thrust measurement device 50 when the vibration movement is performed. Specifically, the electromagnetic damper 90 includes a damping copper sheet 91 and a damping magnetic seat 92, the damping copper sheet 91 is disposed on the thrust measuring device 50 and extends along a direction parallel to the gravity, the damping magnetic seat 92 is fixedly connected with the vacuum chamber, the damping magnetic seat 92 is provided with an avoidance space 200, the damping magnetic seat 92 can generate a magnetic field in the avoidance space 200, and the damping copper sheet 91 is at least partially accommodated in the avoidance space 200. The thrust measuring device 50 can drive the damping copper sheet 91 to cut the magnetic field when in vibration movement so as to form a current loop on the damping copper sheet 91, so that electromagnetic resistance is generated between the damping copper sheet 91 and the magnetic field to block the damping copper sheet 91 from moving, and further block the thrust measuring device 50 from vibrating movement.
In this embodiment, the high permeability material is permalloy.
The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing disclosure is illustrative of the present invention and is not to be construed as limiting the scope of the invention, which is defined by the appended claims.
Claims (10)
1. A vibration isolation structure of a micro thrust measurement system, comprising:
a first magnet having a first end face;
the first closed shell is provided with a first mounting groove, the first magnet is complementary to the first mounting groove and is connected with the first closed shell, so that the first end face is exposed out of the first closed shell, the first closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the first closed shell is made of a high-permeability material;
a second magnet having a second end face;
the second closed shell is provided with a second mounting groove, the second magnet is complementary to the second mounting groove and is connected with the second closed shell so that the second end face is exposed on the second closed shell, the second closed shell is fixedly connected with the thrust measuring device so that the second end face is opposite to the first end face, a first repulsive force is generated between the first magnet and the second magnet so as to overcome the gravity of the thrust measuring device to suspend the first magnet, the second closed shell is made of a high-permeability material, and the direction of the first repulsive force is collinear with the gravity direction; and
And the adjusting device is used for adjusting the position of the thrust measuring device so that the magnetic axis of the first magnet is collinear with the magnetic axis of the second magnet.
2. The vibration isolation structure of the micro thrust measuring system according to claim 1, wherein the first magnet and the second magnet are identical in shape, and a cross section perpendicular to the magnetic axis is square or circular.
3. A vibration isolation structure of a micro-thrust measuring system according to claim 1, wherein the high magnetic permeability material is permalloy; and/or
The first closed shell is provided with a first annular part, the first annular part is positioned at the notch of the first mounting groove and protrudes outwards towards one side of the second end face, the second closed shell is provided with a second annular part, the second annular part is positioned at the notch of the second mounting groove and protrudes outwards towards one side of the first end face, and one of the first annular part and the second annular part is annularly arranged on the other one.
4. The vibration isolation structure of the micro thrust measuring system according to claim 1, wherein an installation space is provided on the thrust measuring device, the installation space is located above the center of gravity of the thrust measuring device, the first magnet is accommodated in the installation space through the first enclosure, and the second magnet is accommodated in the installation space through the second enclosure.
5. The vibration isolation structure of the micro thrust measurement system according to claim 4, wherein the adjustment device comprises a first adjustment mechanism comprising four first exclusive components including a third magnet, a third enclosure, a fourth magnet, and a fourth enclosure;
the third magnet is provided with a third end face;
the third closed shell is provided with a third mounting groove, the third magnet is complementary to the third mounting groove and is connected with the third closed shell, so that the third end face is exposed on the third closed shell, the third closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the third closed shell is made of a high-permeability material;
the fourth magnet has a fourth end face;
the fourth closed shell is provided with a fourth mounting groove, the fourth magnet is complementary to the fourth mounting groove and is connected with the fourth closed shell, so that the fourth end face is exposed out of the fourth closed shell, a second repulsive force is generated between the third magnet and the fourth magnet, and the fourth closed shell is made of a high-permeability material;
the four fourth magnets are arranged around the gravity direction and fixedly connected with the thrust measuring device through the fourth closed shell, and the installation position of the fourth closed shell is located above the thrust measuring device along the gravity direction.
6. The vibration isolation structure of the micro thrust measuring system according to claim 5, wherein four of the fourth closing shells are integrally connected; and/or
The third closed shell is provided with a third annular part, the third annular part is positioned at the notch of the third mounting groove and protrudes outwards towards one side of the fourth end face, the fourth closed shell is provided with a fourth annular part, the fourth annular part is positioned at the notch of the fourth mounting groove and protrudes outwards towards one side of the third end face, and one of the third annular part and the fourth annular part is annularly arranged on the other one.
7. The vibration isolation structure of the micro thrust measurement system according to claim 5, wherein the adjustment device further comprises a second adjustment mechanism comprising four second mutually exclusive components including a fifth magnet, a fifth enclosure, a sixth magnet, and a sixth enclosure;
the fifth magnet has a fifth end face;
the fifth closed shell is provided with a fifth mounting groove, the fifth magnet is complementary to the fifth mounting groove and is connected with the fifth closed shell so that the fifth end face is exposed out of the fifth closed shell, the fifth closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the fifth closed shell is made of a high-permeability material;
the sixth magnet has a sixth end face;
the sixth closed shell is provided with a sixth mounting groove, the sixth magnet is complementary to the sixth mounting groove and is connected with the sixth closed shell, so that the sixth end face is exposed out of the sixth closed shell, a third repulsive force is generated between the fifth magnet and the sixth magnet, and the sixth closed shell is made of a high-permeability material;
the four sixth magnets are in one-to-one correspondence with the four fourth magnets and are arranged around the gravity direction, and are fixedly connected with the thrust measuring device through the sixth closed shell, and the installation position of the sixth closed shell is located below the thrust measuring device along the gravity direction.
8. The vibration isolation structure of the micro thrust measuring system according to claim 7, wherein four of the sixth closed shells are integrally connected; and/or
The fifth sealing shell is provided with a fifth annular part, the fifth annular part is positioned at the notch of the fifth mounting groove and protrudes outwards towards one side of the sixth end face, the sixth sealing shell is provided with a sixth annular part, the sixth annular part is positioned at the notch of the sixth mounting groove and protrudes outwards towards one side of the fifth end face, and one of the fifth annular part and the sixth annular part is arranged in a surrounding mode.
9. The vibration isolation structure of the micro thrust measurement system according to claim 7, wherein the adjustment device further comprises a third adjustment mechanism, the third adjustment mechanism comprising two second mutually exclusive components, the second mutually exclusive components comprising a seventh magnet, a seventh enclosure, an eighth magnet, and an eighth enclosure;
the seventh magnet has a seventh end face;
the seventh closed shell is provided with a seventh mounting groove, the seventh magnet is connected with the seventh closed shell in a complementary mode to the seventh mounting groove, so that the seventh end face is exposed out of the seventh closed shell, the seventh closed shell is connected with the vacuum cabin and can move relative to the vacuum cabin, and the seventh closed shell is made of a high-permeability material;
the eighth magnet has an eighth end face;
the eighth closed shell is provided with an eighth mounting groove, the eighth magnet is complementary to the eighth mounting groove and is connected with the eighth closed shell, so that the eighth end face is exposed out of the eighth closed shell, a fourth repulsive force is generated between the seventh magnet and the eighth magnet, and the eighth closed shell is made of a high-permeability material;
the two eighth magnets are positioned in a first plane, the gravity direction is perpendicular to the first plane, the two eighth magnets are fixedly connected with the thrust measuring device through the eighth closed shell, and the installation position of the eighth closed shell is positioned on one side of the thrust measuring device deviating from the gravity direction.
10. A vibration isolation structure of a micro-thrust measurement system according to claim 9, wherein the vibration isolation structure of the micro-thrust measurement system further comprises an electromagnetic damper; and/or
The seventh closed shell is provided with a seventh annular part, the seventh annular part is positioned at the notch of the seventh mounting groove and protrudes outwards towards one side of the eighth end face, the eighth closed shell is provided with an eighth annular part, the eighth annular part is positioned at the notch of the eighth mounting groove and protrudes outwards towards one side of the seventh end face, and one of the seventh annular part and the eighth annular part is arranged in a surrounding mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310316865.8A CN116026508B (en) | 2023-03-29 | 2023-03-29 | Vibration isolation structure of micro-thrust measuring system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310316865.8A CN116026508B (en) | 2023-03-29 | 2023-03-29 | Vibration isolation structure of micro-thrust measuring system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN116026508A true CN116026508A (en) | 2023-04-28 |
| CN116026508B CN116026508B (en) | 2023-08-15 |
Family
ID=86089637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202310316865.8A Active CN116026508B (en) | 2023-03-29 | 2023-03-29 | Vibration isolation structure of micro-thrust measuring system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN116026508B (en) |
Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021000A (en) * | 1999-07-09 | 2001-01-23 | Nisshoku Corp | Base isolation supporting device |
| JP2001126977A (en) * | 1999-10-27 | 2001-05-11 | Nikon Corp | Stage system, aligner, and processing method for circuit device |
| JP2008208859A (en) * | 2007-02-23 | 2008-09-11 | Toshiba Corp | Vibration-proofing suspension |
| US20090020381A1 (en) * | 2007-07-17 | 2009-01-22 | Honeywell International, Inc. | Vibration isolators and isolation systems |
| CN102072790A (en) * | 2010-11-16 | 2011-05-25 | 北京航空航天大学 | Device for measuring micro impulse |
| CN102200689A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | Hybrid maglev gravity compensation apparatus |
| CN103511529A (en) * | 2013-10-09 | 2014-01-15 | 哈尔滨工程大学 | Rigidity-adjustable electromagnetic vibration isolator |
| CN104158431A (en) * | 2014-08-05 | 2014-11-19 | 中国空间技术研究院 | Electrostatic suspension type space-based super quiescent platform system |
| WO2015021820A1 (en) * | 2013-08-15 | 2015-02-19 | 华中科技大学 | Zero-rigidity magnetic suspension active vibration isolator and six-degrees-of-freedom vibration isolation system comprised thereof |
| CN107554542A (en) * | 2017-09-19 | 2018-01-09 | 华东交通大学 | A kind of permanent magnet suspension vibration and noise reducing device of railway car |
| CN110146208A (en) * | 2019-06-06 | 2019-08-20 | 北京航空航天大学 | A kind of device for measuring micro-thrust with on-line proving and locking function |
| CN213309258U (en) * | 2020-07-23 | 2021-06-01 | 九阳股份有限公司 | Food processing machine |
| CN112882119A (en) * | 2020-12-09 | 2021-06-01 | 四川航天计量测试研究所 | Micro mass measuring device and method in microgravity environment |
| CN214274318U (en) * | 2020-05-21 | 2021-09-24 | 槃实科技(深圳)有限公司 | Magnetic suspension vibration isolation system |
| CN113701934A (en) * | 2021-08-25 | 2021-11-26 | 北京航空航天大学 | Torsional pendulum type micro-thrust measuring device and method |
| CN114088279A (en) * | 2021-11-19 | 2022-02-25 | 北京航空航天大学 | Magnetic suspension-based micro thrust measuring device |
-
2023
- 2023-03-29 CN CN202310316865.8A patent/CN116026508B/en active Active
Patent Citations (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001021000A (en) * | 1999-07-09 | 2001-01-23 | Nisshoku Corp | Base isolation supporting device |
| JP2001126977A (en) * | 1999-10-27 | 2001-05-11 | Nikon Corp | Stage system, aligner, and processing method for circuit device |
| JP2008208859A (en) * | 2007-02-23 | 2008-09-11 | Toshiba Corp | Vibration-proofing suspension |
| US20090020381A1 (en) * | 2007-07-17 | 2009-01-22 | Honeywell International, Inc. | Vibration isolators and isolation systems |
| CN102200689A (en) * | 2010-03-23 | 2011-09-28 | 上海微电子装备有限公司 | Hybrid maglev gravity compensation apparatus |
| CN102072790A (en) * | 2010-11-16 | 2011-05-25 | 北京航空航天大学 | Device for measuring micro impulse |
| WO2015021820A1 (en) * | 2013-08-15 | 2015-02-19 | 华中科技大学 | Zero-rigidity magnetic suspension active vibration isolator and six-degrees-of-freedom vibration isolation system comprised thereof |
| CN103511529A (en) * | 2013-10-09 | 2014-01-15 | 哈尔滨工程大学 | Rigidity-adjustable electromagnetic vibration isolator |
| CN104158431A (en) * | 2014-08-05 | 2014-11-19 | 中国空间技术研究院 | Electrostatic suspension type space-based super quiescent platform system |
| CN107554542A (en) * | 2017-09-19 | 2018-01-09 | 华东交通大学 | A kind of permanent magnet suspension vibration and noise reducing device of railway car |
| CN110146208A (en) * | 2019-06-06 | 2019-08-20 | 北京航空航天大学 | A kind of device for measuring micro-thrust with on-line proving and locking function |
| CN214274318U (en) * | 2020-05-21 | 2021-09-24 | 槃实科技(深圳)有限公司 | Magnetic suspension vibration isolation system |
| CN213309258U (en) * | 2020-07-23 | 2021-06-01 | 九阳股份有限公司 | Food processing machine |
| CN112882119A (en) * | 2020-12-09 | 2021-06-01 | 四川航天计量测试研究所 | Micro mass measuring device and method in microgravity environment |
| CN113701934A (en) * | 2021-08-25 | 2021-11-26 | 北京航空航天大学 | Torsional pendulum type micro-thrust measuring device and method |
| CN114088279A (en) * | 2021-11-19 | 2022-02-25 | 北京航空航天大学 | Magnetic suspension-based micro thrust measuring device |
Non-Patent Citations (3)
| Title |
|---|
| W P WRIGHT等: "A magnetic coupling thrust stand for microthrust measurements", MEASUREMENT SCIENCE AND TECHNOLOGY, no. 1 * |
| 洪延姬;周伟静;王广宇;: "微推力测量方法及其关键问题分析", 航空学报, no. 10 * |
| 罗乐乐;窦志国;李南雷;: "基于扭摆测量***的微冲量测量方法", 机电产品开发与创新, no. 02 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN116026508B (en) | 2023-08-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5699269B2 (en) | Accelerometer and transducer | |
| CN105570630B (en) | A kind of magnetic current flowing deformation vibration-damping platform with quasi- zero stiffness | |
| US8902031B2 (en) | Guide having passive gravity compensation and a vertically movably mounted platform | |
| AU2013245501B2 (en) | Electrodynamic modal test impactor system and method | |
| JPH04268713A (en) | Supporting means and attitude control device with said means | |
| US7705493B2 (en) | Magnetic mirror air bearing for Michelson interferometer with lateral motion | |
| CN109707786B (en) | Electromagnetic type positive and negative rigidity parallel low-frequency vibration isolation device | |
| WO2014094689A2 (en) | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing | |
| US5474100A (en) | Electricity/air pressure converter | |
| CN113701934B (en) | Torsional pendulum type micro-thrust measuring device and method | |
| WO2014094687A2 (en) | Magnetically suspended and plane-drove vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a spherical air bearing | |
| JP2021519568A (en) | Electromechanical generator for converting mechanical vibration energy into electrical energy | |
| CN116026508B (en) | Vibration isolation structure of micro-thrust measuring system | |
| WO2019044722A1 (en) | Eddy current damper | |
| CN116400476A (en) | Moving coil type quick reflector based on flexible support | |
| JP2019531449A (en) | Horizontal motion vibration isolator | |
| US5918862A (en) | High damping pneumatic isolator | |
| CN113740929B (en) | Ground testing device and method for space inertial sensor | |
| US5883447A (en) | Vibration damping devices with active control and comprising movable weights excited by electromagnets along 2 or 3 axes | |
| EP4007136A1 (en) | Magnetic levitation stage device, and charged particle beam device or vacuum device in which magnetic levitation stage device is used | |
| CN114088279B (en) | Magnetic suspension-based micro-thrust measuring device | |
| US20220243782A1 (en) | Horizontally arranged six-degree-of-freedom constant-stiffness mechanism | |
| CN113565922A (en) | Integrated quasi-zero stiffness vibration isolation buffering element and vibration isolation buffering assembly | |
| CN107965541B (en) | Damping device, damping and visual angle adjustable instrument mounting table and instrument | |
| CN207945227U (en) | Damping device, the adjustable instrument mounting bracket of damping and visual angle and instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |