CN116026463A - Spectrometer - Google Patents
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- CN116026463A CN116026463A CN202310314969.5A CN202310314969A CN116026463A CN 116026463 A CN116026463 A CN 116026463A CN 202310314969 A CN202310314969 A CN 202310314969A CN 116026463 A CN116026463 A CN 116026463A
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Abstract
The disclosure relates to the technical field of spectrum analysis, in particular to a spectrometer, which comprises a spectrum selection chip, a detector and a spectrum reduction module. The spectrum selection chip is configured to dynamically modulate the first incident light based on a driving signal for controlling the spectrum selection chip to adjust to the first optical characteristic; the detector is matched with the spectrum selection chip, and is configured to receive the modulated first incident light and convert the modulated first incident light into a first electric signal; the spectral restoration module is configured to restore first spectral data of the first incident light according to the first electrical signal and a pre-calibrated first transfer function, the first transfer function representing a transfer function corresponding to the first optical characteristic. The spectrometer provided by the embodiment of the disclosure can obtain more spectrum selection states without redesigning the spectrometer, and ensures high efficiency and reliability and flexibility.
Description
Technical Field
The disclosure relates to the technical field of spectrum analysis, in particular to a spectrometer.
Background
Near infrared spectroscopy is an important type of non-contact spectroscopic analysis device. Based on the absorption characteristic analysis of different functional groups in the substances in the near infrared spectrum region, the near infrared spectrometer can realize the functions of rapid component determination, quality classification, authenticity identification, origin tracing and the like of the substances such as foods, textiles and the like. The traditional near infrared spectrometer is mainly desk-top equipment for laboratories, has excellent spectrum analysis performance, and is widely used in various spectrum inspection laboratories. However, the desk-top spectrum device has higher cost and larger volume, and limits the use of near infrared spectrum analysis in mobile measurement and in-situ detection scenes.
Based on the micro-nano preparation method, a dispersion type, a filtering type and a Fourier transform type spectrum technology route exists, so that the miniaturization of spectrum equipment can be realized, and the application scene of a near infrared spectrum technology is further expanded. However, these routes have respective bottlenecks, the dispersion type spectrometer splits the incident light based on the dispersion principle, and the light with different wavelengths irradiates different pixel points of the detector to realize detection of different wavelengths of the spectrum, and the dispersible type spectrometer needs a small incident slit or a longer propagation path to realize high spectral resolution, which can reduce the light entering amount or enlarge the volume; the filter type spectrometer realizes the detection of spectral energy through a plurality of wavelength selection units, and when the spectral resolution is higher, the more wavelength selection units are needed by the filter type spectrometer, the lower the total energy utilization rate is; the single spectrum measurement time of the Fourier transform spectrometer is the moving period of one moving mirror, and similarly, the response speed of the Fourier transform spectrometer is slower when the spectrum resolution is higher.
Under the contradictory background of small volume and high performance, a computational reconstruction spectrum measurement method is gradually developed in recent years, however, the existing spectrometer in the industry has the defect that once a certain design is unqualified, the performance of the spectrometer needs to be redesigned, the spectrometer is processed and the spectrometer is retested, which occupies a great deal of resources for research and development, and the cost is high by designing a spectrometer for a spectrum selection state, so that the existing spectrometer is not suitable for large-scale popularization, and the spectrum application requirement of the gradual amplification cannot be met.
Disclosure of Invention
In view of this, the disclosure provides a spectrometer, which can accurately restore the spectrum data of the incident light, can obtain more spectrum response states without redesigning the spectrometer, meets various spectrum detection requirements, and has higher flexibility while guaranteeing high efficiency and reliability.
The present disclosure provides a spectrometer comprising:
a spectral selection chip configured to dynamically modulate light of a first incident light based on a drive signal for controlling the spectral selection chip to adjust to a first optical characteristic;
the detector is matched with the spectrum selection chip, and is configured to receive modulated first incident light and convert the modulated first incident light into a first electric signal;
a spectral restoration module configured to restore first spectral data of the first incident light according to the first electrical signal and a pre-calibrated first transfer function, the first transfer function representing a transfer function corresponding to the first optical characteristic.
In one possible implementation, the spectrum selection chip includes a plurality of spectrum selection channels, each spectrum selection channel having a plurality of operating states, each of the operating states corresponding to one of the optical characteristics; the driving signal is used for controlling the working state selected by each spectrum selection channel in the spectrum selection chip;
each of the spectral selection channels is configured to adjust an operating state based on the drive signal, respectively.
In a possible implementation manner, each spectrum selection channel comprises a plurality of super-surface structural units, the working state of each spectrum selection channel is determined by the surface states of the plurality of super-surface structural units, and the driving signal is used for controlling the working state of the spectrum selection channel by driving the surface states of the super-surface structural units in the spectrum selection channel to change;
the plurality of super surface structure units in each of the spectral selection channels are configured to adjust a surface state based on the drive signal.
In a possible implementation manner, the spectrum selection chip is further configured to dynamically modulate light of a second incident light based on the driving signal, wherein the second incident light is derived from a standard light source, and the spectrum data of the second incident light is second spectrum data;
the detector is further configured to receive the modulated second incident light and to convert the modulated second incident light into a second electrical signal;
the spectrometer further comprises:
a calibration module configured to determine the first transfer function from the second spectral data, the second electrical signal, and the first optical characteristic.
In one possible implementation, the spectrometer further comprises: a data storage module configured to store a correspondence of the first optical characteristic and the first transfer function;
the spectral restoration module is further configured to obtain the first transfer function corresponding to the first optical characteristic from the data storage module.
In a possible implementation, in case the detector is a single-point detector, the detector comprises one pixel point, and all the spectrum selection channels of the spectrum selection chip correspond to the pixel point.
In a possible implementation manner, in a case that the detector is an array detector, the detector includes two or more pixel points, and each pixel point of the detector corresponds to a part of the spectrum selection channel of the spectrum selection chip.
In one possible implementation, the spectrometer further comprises: and the lens is matched with the spectrum selection chip and is configured to ensure that light of a target detection area is incident to the spectrum selection chip.
In one possible implementation, the spectrum selection chip is a transmission type spectrum selection chip or a reflection type spectrum selection chip.
According to the spectrometer provided by the embodiment of the disclosure, different optical characteristics can be obtained by adjusting the spectrum selection chip, different light modulation effects are generated on light incident on the spectrum selection chip, spectrum data of incident light can be accurately restored in real time by combining the spectrum reduction module, more spectrum selection states can be obtained without redesigning the spectrometer, so that various spectrum detection requirements are met, and high efficiency and reliability are guaranteed while the flexibility is higher.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the disclosure. Other features and aspects of the present disclosure will become apparent from the following detailed description of exemplary embodiments, which proceeds with reference to the accompanying drawings.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate exemplary embodiments, features and aspects of the present disclosure and together with the description, serve to explain the principles of the disclosure.
Fig. 1 shows a schematic structural diagram of a spectrometer provided according to an embodiment of the present disclosure.
Fig. 2 shows a schematic structural diagram of a transmission spectrometer provided according to an embodiment of the present disclosure.
Fig. 3 shows a schematic structural diagram of a reflection type spectrometer provided according to an embodiment of the present disclosure.
Fig. 4 shows a schematic structural diagram of a spectrum selection chip provided according to an embodiment of the present disclosure.
Fig. 5 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure.
Fig. 6 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure.
Fig. 7 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure.
Fig. 8 shows a flow diagram of a spectrometer calibration phase provided in accordance with an embodiment of the present disclosure.
Fig. 9 shows a flow diagram of a spectrometer detection phase provided in accordance with an embodiment of the present disclosure.
Detailed Description
Various exemplary embodiments, features and aspects of the disclosure will be described in detail below with reference to the drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Although various aspects of the embodiments are illustrated in the accompanying drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The word "exemplary" is used herein to mean "serving as an example, embodiment, or illustration. Any embodiment described herein as "exemplary" is not necessarily to be construed as preferred or advantageous over other embodiments.
In addition, numerous specific details are set forth in the following detailed description in order to provide a better understanding of the present disclosure. It will be understood by those skilled in the art that the present disclosure may be practiced without some of these specific details. In some instances, methods, means, elements, and circuits well known to those skilled in the art have not been described in detail in order not to obscure the present disclosure.
In order to facilitate understanding of the technical solutions provided by the embodiments of the present disclosure by those skilled in the art, a technical environment in which the technical solutions are implemented is described below.
Near infrared spectroscopy is an important type of non-contact spectroscopic analysis device. The traditional near infrared spectrometer mainly uses desk-top equipment for laboratories, which is widely used in various spectrum inspection laboratories, but the desk-top spectrum equipment has higher cost and larger volume, and limits the use of near infrared spectrum analysis in mobile measurement and in-situ detection scenes. At present, miniaturization of spectrum equipment can be realized based on a micro-nano preparation method, so that the application scene of a near infrared spectrum technology is further expanded, but a new bottleneck exists, for example, a small entrance slit or a longer propagation optical path is required for realizing high spectrum resolution of a dispersion type spectrometer, and the light quantity is reduced or the volume is increased; the filter spectrometer requires more wavelength selective units to achieve high spectral resolution, which reduces the overall energy utilization; the response speed of the fourier transform spectrometer becomes slow while achieving high spectral resolution.
Under the contradictory background of small volume and high performance, a computational reconstruction spectrum measurement method is gradually developed in recent years, but the current spectrometer in the industry has the defects that once a certain design is failed in test, the design, the processing and the performance of the spectrometer are required to be re-tested, which occupies a great deal of resources for research and development, and the cost is too high to design a spectrometer for a spectrum selection state, so that the spectrometer is not suitable for large-scale popularization.
The above reasons lead to the fact that the existing spectrometer cannot meet the requirement of increasingly amplified spectrum performance diversification, so that the research of the spectrometer with small volume, high performance and application flexibility is of great significance.
According to the spectrometer provided by the embodiment of the disclosure, different optical characteristics can be obtained by adjusting the spectrum selection chip, different light modulation effects are generated on light incident on the spectrum selection chip, spectrum data of incident light can be accurately restored in real time by combining the spectrum restoration module, more spectrum selection states can be obtained without redesigning the spectrometer, so that various spectrum detection requirements are met, and high efficiency and reliability are guaranteed.
Fig. 1 shows a schematic structural diagram of a spectrometer provided according to an embodiment of the present disclosure. As shown in fig. 1, the spectrometer 1 may include a spectrum selection chip 101, a detector 102, and a spectrum reduction module 103.
The spectrum selection chip 101 shown in fig. 1 may be configured to dynamically modulate light of the first incident light based on an externally input driving signal. The drive signal may be used to control the spectral selection chip to adjust to the first optical characteristic. The first incident light may be probe light to be analyzed by the spectrometer. The first optical characteristic may represent any one of optical characteristics. The first optical characteristic may include a reflection (may be expressed as reflectivity) or a transmission (may be expressed as transmissivity) of the detection light by the spectrum selection chip. Under control of the driving signal, the optical characteristics (i.e., reflectivity or transmissivity) of the spectrum selection chip may change, so that the spectrum selection chip can dynamically modulate the first incident light. For example, when the driving signal controls the spectrum selection chip to adjust to the first optical characteristic, the reflectivity of the spectrum selection chip to the detection light may become the reflectivity of the first optical characteristic or the transmissivity to the detection light may become the transmissivity of the first optical characteristic, thereby realizing dynamic optical modulation to the first incident light. Therefore, by adjusting the spectrum selection chip to different optical characteristics, different light modulation effects can be generated on the light incident on the spectrum selection chip, more spectrum response states can be obtained without redesigning the spectrometer, and thus new spectrum detection requirements are met, and the spectrum detection device has more flexibility.
The lens may be selectively configured for the spectrometer depending on the functional configuration of the spectral selection chip. If the spectrum selection chip can ensure that the detection light to be analyzed is incident to the spectrum selection chip so as to ensure effective execution of subsequent work, the configuration of a lens can be omitted for the spectrometer, so that the volume of the spectrometer can be reduced. If the receiving condition of the detection light to be analyzed by the spectrum selection chip cannot ensure the effective execution of the subsequent work, the spectrometer can further comprise a lens, wherein the lens is matched with the spectrum selection chip and is configured to ensure that the light of the target detection area is incident to the spectrum selection chip. According to the embodiment of the disclosure, the light of the target detection area is collected through the lens, and the detection light to be analyzed can be enabled to be incident to the spectrum selection chip according to the requirement, so that the ordered and efficient execution of the subsequent dynamic modulation is ensured.
The spectral selection chip 101 shown in fig. 1 may be a transmission type spectral selection chip or a reflection type spectral selection chip. According to different types of spectrum selection chips, different types of spectrometers can be obtained. In the embodiments of the present disclosure, a spectrometer obtained by selecting a chip according to a transmission type spectrum may be referred to as a transmission type spectrometer, and a spectrometer obtained by selecting a chip according to a reflection type spectrum may be referred to as a reflection type spectrometer.
Fig. 2 shows a schematic structural diagram of a transmission spectrometer provided according to an embodiment of the present disclosure. As shown in fig. 2, the transmission-type spectrometer may include a lighting lens 201, a transmission-type spectrum selection chip 202, and a near infrared detector 203, wherein the lighting lens 201 may include a convex lens and a concave lens; near infrared detector 203 is disposed in cooperation with transmissive spectral selection chip 202 (the manner of arrangement may be parallel to both as shown in fig. 2). Based on the transmission-type spectrometer shown in fig. 2, the detection light can be incident to the transmission-type spectrum selection chip 202 through the lighting lens 201 and then transmitted to the near infrared detector 203 through the transmission-type spectrum selection chip 202, so that the follow-up operation is ensured, wherein in the transmission process through the transmission-type spectrum selection chip 202, the transmission-type spectrum selection chip 202 performs dynamic light modulation on the detection light.
Fig. 3 shows a schematic structural diagram of a reflection type spectrometer provided according to an embodiment of the present disclosure. As shown in fig. 3, the reflection type spectrometer may include a lighting lens 201, a reflection type spectrum selection chip 302, and a near infrared detector 203, wherein the lighting lens 201 may include a convex lens and a concave lens; near infrared detector 203 is disposed in conjunction with reflective spectral selection chip 302 (the manner of disposition may be such that there is an angle between the two locations as shown in fig. 3). Based on the reflection-type spectrometer shown in fig. 3, the detection light can be incident to the reflection-type spectrum selection chip 302 through the lighting lens 201 and then reflected to the near infrared detector 203 through the reflection-type spectrum selection chip 302, so that the follow-up operation is ensured, wherein in the process of being reflected by the reflection-type spectrum selection chip 302, the reflection-type spectrum selection chip 302 dynamically modulates the detection light.
It should be noted that, although the lens structure and the arrangement of the spectrum selection chip and the detector are described by taking fig. 2 and 3 as examples, those skilled in the art will understand that the embodiments of the disclosure should not be limited thereto. In fact, the user can flexibly set the lens structure and the setting mode of the spectrum selection chip and the detector according to personal preference and/or practical application scene, so long as the sequential and accurate execution of the subsequent work can be ensured.
Through the reflection type spectrum selection chip and the transmission type spectrum selection chip provided by the embodiment of the disclosure, more spectrum selection states can be conveniently obtained; furthermore, the spectrometer can realize dynamic light modulation and recovery of spectrum signals without a small incident slit or a longer propagation path, and ensures high spectral resolution performance under high light input.
In one possible implementation, the spectral selection chip 101 shown in fig. 1 may include a plurality of spectral selection channels. Each spectral selection channel may have a plurality of operating states, each of which may correspond to an optical characteristic. The drive signals may be used to control the operating state of each spectral selection channel selection in the spectral selection chip 101 shown in fig. 1. Accordingly, each spectral selection channel may be configured to adjust its own operating state based on the drive signal, respectively.
Considering that each spectrum selection channel has a corresponding optical characteristic after its own operating state can be adjusted based on the driving signal, the optical characteristics of all spectrum selection channels constitute the optical characteristics of the spectrum selection chip 101 shown in fig. 1. Thus, the driving signal may be used to control the spectrum selection chip to adjust to the first optical characteristic by driving the operating state of the spectrum selection channel to change. Under the control of the driving signal, the working state of each spectrum selection channel of the spectrum selection chip can be changed, so that the first optical characteristic of the spectrum selection chip can be changed, and the spectrum selection chip can dynamically modulate the first incident light.
According to the spectrum selection channel with different working states, each working state corresponds to one optical characteristic, so that the working states of the spectrum selection channel are adjusted to obtain various different optical characteristics, dynamic modulation of light by the spectrum selection chip is guaranteed, and more spectrum selection states are conveniently obtained.
It should be noted that, the number of spectrum selection channels included in the spectrum selection chip 101 shown in fig. 1 may be set as required, which is not limited by the embodiment of the present disclosure.
In one possible implementation, each spectral selection channel may comprise a plurality of super-surface structural units, respectively, that is, an array combination of the plurality of super-surface structural units constitutes one spectral selection channel. The operating state of each spectrally selective channel may be determined by the surface states of a plurality of super surface structural units. The surface states of the super-surface structural unit can comprise geometric parameters such as size, shape and the like, and different surface states can directly influence the working state of the spectrum selection channel. The drive signal may be used to control the operating state of the spectral selection channel by driving a change in the surface state of the respective super-surface structural unit in the spectral selection channel, the plurality of super-surface structural units in each spectral selection channel being respectively configured to adjust the surface state based on the drive signal. Under the control of the driving signal, the surface state of each super-surface structural unit of each spectrum selection channel can be changed respectively, so that the working state of each spectrum selection channel can be changed, and therefore the optical characteristic of the spectrum selection chip can be changed (for example, the optical characteristic of the spectrum selection chip can be adjusted to the first optical characteristic based on the driving signal), and the spectrum selection chip can dynamically modulate the first incident light under the first optical characteristic.
According to the super-surface structure unit provided by the embodiment of the disclosure, the surface state of the super-surface structure unit can be changed under the action of a driving signal, light incident to the super-surface structure unit can be correspondingly modulated based on the surface state, and different combinations based on the super-surface structure unit are beneficial to obtaining more spectrum selection states subsequently.
Fig. 4 shows a schematic structural diagram of a spectrum selection chip provided according to an embodiment of the present disclosure. As shown in fig. 4, the spectral selection chip 101 may include 5*5 spectral selection channels 402, and each spectral selection channel 402 may include 9 partitions 403 (i.e., partition No. 1, partition No. 2, partition No. … …, partition No. 9), with each partition 403 representing a super surface structure unit. The partitions 1 to 9 respectively have different super-surface structures, and have a reflection or transmission selection tendency for light rays with different wavelengths. In this example, partitions 1 to 9 have a tendency to select (transmit or reflect) light in the range of 800nm to 1000nm, 1000nm to 1200nm, 1200nm to 1400nm, 1400nm to 1600nm, 1600nm to 1800nm, 1800nm to 2000nm, 2000nm to 2200nm, 2200nm to 2400nm, 2400nm to 2600nm, respectively, and a dynamically controllable spectral selection chip can achieve a variable tendency to select light in the range of 800 to 2600nm, with the advantage of a wide spectral detection range, while a smaller volume can be achieved with a spectral selection chip based on a super-surface structure.
In one example, partitions 1 through 9 shown in fig. 4 have independent dynamic regulation capabilities, which may be embodied as independent switching. That is, the driving signal can independently control the surface states of the super surface structure units so that when a certain super surface structure unit is driven, the super surface structure unit has the effect of an optical switch.
In yet another example, the dynamic regulation capability of partitions 1 through 9 shown in FIG. 4 may also be embodied as control of different status bits. That is, control of different status bits can be achieved by hierarchical control of the drive signals. Taking a transmission type spectrum selection chip as an example, the driving signal can be electrostatic force, and the surface state of the super-surface structure unit is controlled by changing parameters such as the size, the direction, the acting position and the like of the electrostatic force, so that the transmittance of the spectrum selection chip to incident light is gradually increased or gradually decreased, and the spectrum selection chip has optical characteristics in different states.
As shown in fig. 1, the detector 102 may be cooperatively disposed with the spectrum selection chip 101, so that the detection light to be analyzed in the target detection area can be reflected or transmitted to the detector after being modulated by the spectrum selection chip. The detector may be configured to receive the modulated first incident light and to convert the modulated first incident light into a first electrical signal.
The detector may comprise a plurality of pixel points. The detector may be configured to receive the modulated first incident light through the pixel and convert to output a corresponding first electrical signal. Each pixel of the detector may correspond to one or more spectrally selected channels of the spectrally selected chip, the corresponding number may generally depend on the number of pixels of the detector.
Fig. 5 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure. As shown in fig. 5, the spectrum selection chip 101 includes 5*5 spectrum selection channels 402, and the area array detector 520 includes 5*5 pixels 521 (a part of the pixels are blocked and not shown in fig. 5), where the number of pixels of the area array detector 520 is equal to the number of spectrum selection channels of the spectrum selection chip 101, and each spectrum selection channel 402 corresponds to one pixel 521. The number of the pixels of the detector, the number of the spectrum selection channels of the spectrum selection chip and the corresponding modes of the pixels and the spectrum selection channels can be set according to actual requirements, and the protection scope of the disclosure is not limited.
The detector may be a single point detector or an array detector. In the case of a single-point detector, the detector comprises one pixel, to which all spectral selection channels of the spectral selection chip may correspond.
Fig. 6 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure. As shown in fig. 6, the single-point detector 602 includes one pixel point, and all the spectrum selection channels of the spectrum selection chip 101 correspond to the pixel point. These spectrally selective channels are assigned respective operating states (array combinations of a plurality of super surface structural units), the operating state of each spectrally selective channel being controllable by means of a drive signal. These spectrally selective channels can constitute an equivalent entity that has a dynamic selection of transmission or reflection for different spectral wavelengths. The spectrum selection channels can have certain repeatability and can be set according to actual conditions. When the single-point detector is adopted, the light intensity of the incident light integrally modulated by the spectrum selection chip can be measured at different moments, so that the spectrum measurement based on time resolution is carried out, and the time resolution spectrum is obtained. For example, by using the corresponding manner of the spectrum selection chip 101 and the single-point detector 602 shown in fig. 6, the spectrometer detects the detection light of the target detection area, the light intensity data after the dynamic light modulation of the same equivalent whole can be obtained at time t1, the light intensity data after the dynamic light modulation of the same equivalent whole can be obtained at time t2, and so on, so that the spectrum measurement work based on time resolution can be performed.
Through the cooperation of the dynamically controllable spectrum selection channel and the single-point detector, the plurality of spectrum selection channels form an equivalent whole, the light transmission characteristic of the equivalent whole is controllable along with time, and a dynamic light transmission environment based on time resolution can be formed, so that the spectrometer has time resolution light modulation capability and obtains time resolution spectrum.
In the case that the detector is an array detector, the detector includes two or more pixels, each pixel of the detector corresponds to a portion of the spectrum selection channel of the spectrum selection chip. The array detector may comprise a linear array detector and an area array detector, and the two are similar in application principle, and the area array detector is taken as an example for illustration.
Fig. 7 illustrates a state diagram of dynamic regulation provided according to an embodiment of the present disclosure. As shown in fig. 7, 5*5 spectrum selection channels of the spectrum selection chip 101 correspond to 5*5 pixels of the area array detector 520 one by one. These spectrally selective channels are assigned respective operating states (array combinations of a plurality of super surface structural units), the operating state of each spectrally selective channel being controllable by means of a drive signal. Each spectrum selection channel can respectively form an equivalent whole body, each equivalent whole body respectively has dynamic selection tendency on transmission or reflection of different spectrum wavelengths, and the number of the equivalent whole bodies is equal to the number of pixel points of the detector. There is no repeatability between the multiple spectral channels. When the area array detector is adopted, the light intensity of the incident light modulated by the spectrum selection channel at the corresponding position of the spectrum selection chip at different moments can be measured through each pixel of the detector, so that the spectrum detection based on the time and space mixed resolution is carried out, and the time and space mixed resolution spectrum is obtained. For example, by using the corresponding mode of the spectrum selection chip 101 and the area array detector 520 shown in fig. 7, the spectrometer detects the detection light of the target detection area, the light intensity data after dynamic light modulation of the equivalent whole body with different spatial positions can be obtained at time t1, the light intensity data after dynamic light modulation of the equivalent whole body with different spatial positions can be obtained at time t2, and the spectrum measurement based on the time and space mixed resolution can be performed by analogy.
According to the embodiment of the disclosure, through the matched use of the dynamically controllable spectrum selection channel array detector, the spectrum selection channels form a plurality of equivalent integers, the light transmission characteristic of each equivalent integer can be independently controlled along with time, the space dimension is increased on the basis of the time dimension, and a dynamic light transmission environment based on time and space mixed resolution can be formed, so that the spectrometer has the light modulation capacity of time and space mixed resolution and flexible spectrum resolution capacity.
The spectral restoration module 103 shown in fig. 1 may be configured to restore first spectral data of the first incident light according to the first electrical signal and a pre-calibrated first transfer function. The first transfer function represents a transfer function corresponding to the first optical characteristic, which may be determined during a calibration phase of the spectrometer (see further below).
In one example, for probe light to be analyzed within a target detection region, a detection process of a spectrometer may include: the spectrometer can couple the radiation light of the target detection area to a light-passing hole with the diameter of 1mm through an external lighting lens, and the detection light passing through the light-passing hole irradiates a dynamically controllable spectrum selection chip; the spectrum selection chip can be dynamically modulated along with time, and the super-surface structure of the spectrum selection chip is driven and controlled to realize dynamic selection of transmission or reflection spectrum, namely, the spectrum selection chip can be modulated to have different optical characteristics at different moments and reflect or transmit the modulated detection light to the detector; each pixel point of the detector detects an electric signal which can reflect the intensity of light intensity according to the received modulated detection light, and the electric signal can be a wavelength-light intensity curve; and combining the optical characteristics of the spectrum selection chip and the corresponding transfer function obtained by pre-calibration, and recovering the spectrum data of the detection light based on the light intensity data obtained by the detector and based on time resolution or time and space mixed resolution.
According to the spectrometer provided by the embodiment of the disclosure, different optical characteristics can be obtained by adjusting the spectrum selection chip, different light modulation effects are generated on light incident on the spectrum selection chip, spectrum data of incident light can be accurately restored in real time by combining the spectrum restoration module, more spectrum selection states can be obtained without redesigning the spectrometer, so that various spectrum detection requirements are met, and high efficiency and reliability are guaranteed.
In one possible implementation, the spectrometer 1 shown in fig. 1 may further comprise a calibration module and a data storage module.
The calibration module may be configured to determine the first transfer function based on the second spectral data, the second electrical signal, and the first optical characteristic. The second spectral data, the second electrical signal, and the first optical characteristic are obtained by: the spectrum selection chip can dynamically modulate the second incident light based on the driving signal, and the spectrum selection chip in the modulating state has a first optical characteristic; the detector may receive the modulated second incident light and convert the modulated second incident light into a second electrical signal. The second incident light originates from standard light sources with different wavelengths, and the spectrum data of the second incident light is second spectrum data.
The data storage module may be configured to store a correspondence of the first optical characteristic with the first transfer function. The data storage module may comprise a charged erasable programmable read-only memory (Electrically Erasable Programmable Read Only Memory, EEPROM) in which a number of transfer functions corresponding to different spectral selection states may be stored, each spectral selection state being provided with a respective optical characteristic. The spectrum restoration module is further configured to acquire a first transfer function corresponding to the first optical characteristic from the data storage module, so that in an actual detection stage of the spectrometer, according to a required spectrum selection state, the corresponding transfer function can be acquired from the data storage module in real time, the spectrum restoration module can acquire the corresponding transfer function conveniently at any time, and a guarantee is provided for the spectrum restoration module to be capable of inverting the spectrum data of the incident light rapidly and accurately.
Fig. 8 shows a flow diagram of a spectrometer calibration phase provided in accordance with an embodiment of the present disclosure. As shown in fig. 8, the operation of the spectrometer during the calibration phase may include:
s801, under a preset dynamic spectrum selection state, measuring a standard light source with known wavelength and light intensity, and recording measurement data;
s802, adjusting the wavelength of the standard light source, repeating S801, and recording measurement data;
s803, calculating a transfer function corresponding to a preset dynamic spectrum selection state according to the wavelength and the light intensity of the standard light source and the recorded measurement data;
s804, storing the calculated transfer function to a data storage module, and completing calibration of a preset dynamic spectrum selection state.
The measurement data may be light intensity data based on time resolution or time and space mixed resolution. If a plurality of different spectrum selection states are actually needed, the working process can be repeated to obtain a corresponding transfer function.
The spectrometer provided by the embodiment of the disclosure can pre-calibrate a plurality of transfer functions under different optical characteristics by utilizing the standard light source and corresponding spectrum data and electric signals, lays a foundation for accurately reflecting the spectrum data of incident light by the spectrum reduction module, can meet more spectrum detection requirements by determining a plurality of different transfer functions in the calibration process, and remarkably improves the design and calibration flexibility of the spectrometer.
Fig. 9 shows a flow diagram of a spectrometer detection phase provided in accordance with an embodiment of the present disclosure. As shown in fig. 9, if the actually required spectrum selection state is the preset dynamic spectrum selection state, the working process of the spectrometer in the detection stage may include:
s901, aiming a wavelength calibration light source, and obtaining light intensity data according to detection of a detector in a dynamic spectrum selection state which is the same as a calibration condition;
s902, reconstructing a spectrum signal by utilizing a spectrum reduction module according to a transfer function obtained by calibration and light intensity data obtained by detection, wherein the spectrum signal can be a wavelength-intensity curve;
s903, comparing the reconstructed spectrum signal with the characteristic peak of the standard light source, and calculating the wavelength accuracy.
The spectrometer provided by the embodiment of the disclosure can have the advantages of a wide spectrum detection range of 800-2600nm, high light flux, small volume and high spectrum resolution through the spectrum selection chip, the detector and the spectrum reduction module, the spectrum detection width of thousands of nanometers enables the spectrometer to meet most near infrared applications, the high light flux improves the detection capability of the spectrometer on weak signals, the compact volume can enable application scenes to be expanded to small equipment terminals such as mobile phones, and the spectrum resolution can be lower than 5nm through a calculation reconstruction method.
It should be noted that the first optical characteristic and the second optical characteristic are mainly used to distinguish the optical characteristics of the spectrum selection chip in the detection stage and the calibration stage of the spectrometer, and the first optical characteristic and the second optical characteristic essentially refer to the optical characteristics of the spectrum selection chip, and may be determined according to specific situations when actually reading.
The foregoing description of the embodiments of the present disclosure has been presented for purposes of illustration and description, and is not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the various embodiments described. The terminology used herein was chosen in order to best explain the principles of the embodiments, the practical application, or the technical improvements in the marketplace, or to enable others of ordinary skill in the art to understand the embodiments disclosed herein.
Claims (9)
1. A spectrometer, comprising:
a spectral selection chip configured to dynamically modulate light of a first incident light based on a drive signal for controlling the spectral selection chip to adjust to a first optical characteristic;
the detector is matched with the spectrum selection chip, and is configured to receive modulated first incident light and convert the modulated first incident light into a first electric signal;
a spectral restoration module configured to restore first spectral data of the first incident light according to the first electrical signal and a pre-calibrated first transfer function, the first transfer function representing a transfer function corresponding to the first optical characteristic.
2. The spectrometer of claim 1, wherein the spectral selection chip comprises a plurality of spectral selection channels, each of the spectral selection channels having a plurality of operating states, each of the operating states corresponding to an optical characteristic; the driving signal is used for controlling the working state selected by each spectrum selection channel in the spectrum selection chip;
each of the spectral selection channels is configured to adjust an operating state based on the drive signal, respectively.
3. The spectrometer of claim 2, wherein each spectral selection channel comprises a plurality of super-surface structural units, and the operating state of each spectral selection channel is determined by the surface states of the plurality of super-surface structural units, and the driving signal is used for controlling the operating state of the spectral selection channel by driving the surface states of the respective super-surface structural units in the spectral selection channel to change;
the plurality of super surface structure units in each of the spectral selection channels are configured to adjust a surface state based on the drive signal.
4. The spectrometer of claim 1, wherein the spectral selection chip is further configured to dynamically modulate light of a second incident light based on the drive signal, wherein the second incident light originates from a standard light source, and wherein the spectral data of the second incident light is second spectral data;
the detector is further configured to receive the modulated second incident light and to convert the modulated second incident light into a second electrical signal;
the spectrometer further comprises:
the second electrical signal and the first optical characteristic determine the first transfer function.
5. The spectrometer of claim 4, wherein the spectrometer further comprises:
a data storage module configured to store a correspondence of the first optical characteristic and the first transfer function;
the spectral restoration module is further configured to obtain the first transfer function corresponding to the first optical characteristic from the data storage module.
6. The spectrometer of claim 2, wherein in the case where the detector is a single point detector, the detector comprises one pixel point, and all the spectrum selection channels of the spectrum selection chip correspond to the pixel point.
7. The spectrometer of claim 2, wherein in the case where the detector is an array detector, the detector comprises two or more pixels, each pixel of the detector corresponding to a portion of the spectral selection channels of the spectral selection chip.
8. The spectrometer of any of claims 1-7, further comprising:
and the lens is matched with the spectrum selection chip and is configured to ensure that light of a target detection area is incident to the spectrum selection chip.
9. The spectrometer of any of claims 1-7, wherein the spectral selection chip is a transmissive spectral selection chip or a reflective spectral selection chip.
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180195904A1 (en) * | 2015-06-30 | 2018-07-12 | Imec Vzw | Dedicated Transformation Spectroscopy |
CN110954513A (en) * | 2019-11-26 | 2020-04-03 | 吉林求是光谱数据科技有限公司 | Spectrum chip based on spectrum modulation method |
CN113795748A (en) * | 2019-04-04 | 2021-12-14 | 格林特罗皮斯姆公司 | Method for configuring a spectrometric device |
CN114739511A (en) * | 2022-03-23 | 2022-07-12 | 中北大学 | Snapshot type hyperspectral imaging chip structure based on spectrum modulation array |
CN115078266A (en) * | 2021-03-11 | 2022-09-20 | 上海与光彩芯科技有限公司 | Optical system and design method thereof |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20180195904A1 (en) * | 2015-06-30 | 2018-07-12 | Imec Vzw | Dedicated Transformation Spectroscopy |
CN113795748A (en) * | 2019-04-04 | 2021-12-14 | 格林特罗皮斯姆公司 | Method for configuring a spectrometric device |
CN110954513A (en) * | 2019-11-26 | 2020-04-03 | 吉林求是光谱数据科技有限公司 | Spectrum chip based on spectrum modulation method |
CN115078266A (en) * | 2021-03-11 | 2022-09-20 | 上海与光彩芯科技有限公司 | Optical system and design method thereof |
CN114739511A (en) * | 2022-03-23 | 2022-07-12 | 中北大学 | Snapshot type hyperspectral imaging chip structure based on spectrum modulation array |
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