CN116015074A - High-precision semiconductor test power supply multi-output control method and system - Google Patents
High-precision semiconductor test power supply multi-output control method and system Download PDFInfo
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Abstract
The application discloses a high-precision semiconductor test power supply multiplexing output control method and a system, wherein the method comprises the following steps: the method comprises the steps of performing voltage acquisition on a plurality of test electric signals to be output to obtain a voltage parameter deviation set, performing non-parameter test estimation on the voltage parameter deviation set and standard voltage parameters when the number of the test electric signals to be output is higher than a preset group control threshold value to obtain joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the joint probability density distribution of the voltage deviation, performing group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals, and performing time-sharing sequential compensation on the plurality of group-controlled standard deviation electric signals through an open-loop compensator.
Description
Technical Field
The application relates to the technical field of semiconductor test power supplies, in particular to a high-precision semiconductor test power supply multiplexing output control method and system.
Background
In modern semiconductor manufacturing processes, semiconductor test power supplies are often required to provide test voltages of different levels of multiplexing, and integrated circuit function and performance can be determined or evaluated by comparing the output response of the semiconductor with the expected output.
In the prior art, a single-output feedback mode is often adopted for multiplexing output of voltage signals of a semiconductor test power supply to perform feedback compensation on one main output voltage, and the auxiliary output voltages of other paths are regulated through the turn ratio relation of a transformer, so that the output following performance of the auxiliary output voltages of other paths is poor, and due to leakage inductance existing among transformer windings, when multiplexing voltage is output, the auxiliary windings can accumulate load influence among the windings, so that the cross regulation rate of multiplexing output voltages of the semiconductor test power supply is higher.
Disclosure of Invention
The technical problem to be solved by the application is to provide a high-precision semiconductor test power supply multi-output control method and system, so as to effectively reduce the cross adjustment rate of multi-output voltages.
In order to solve the technical problems, the application adopts the following technical scheme:
in a first aspect, the present application provides a method for controlling multiplexing output of a high-precision semiconductor test power supply, including the steps of:
Acquiring a plurality of test electrical signals to be output by the output end of the semiconductor test power supply;
performing voltage acquisition on the plurality of test electric signals to be output to obtain a voltage value set of the test electric signals, and comparing the voltage value set with standard voltage parameters to obtain a voltage parameter deviation set;
when the number of the test electric signals to be output is higher than a preset group control threshold, carrying out non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter to obtain the joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the joint probability density distribution of the voltage deviation, and carrying out group control compensation on a plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
when the number of the plurality of test electric signals to be output is lower than a preset group control threshold value, determining the discrete probability distribution of the voltage deviation according to the voltage parameter deviation set, determining the mathematical expected value of the voltage deviation according to the discrete probability distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the mathematical expected value of the voltage deviation and the standard voltage parameter, and performing group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
And carrying out voltage acquisition on the plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, determining the respective corresponding upper control time of the plurality of standard deviation electric signals according to the standard deviation voltage value set, carrying out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time through a preset open-loop compensator to obtain a plurality of corresponding compensation test power supply voltage signals, and outputting the plurality of compensation test power supply voltage signals as final multipath voltages of a semiconductor test power supply.
In some embodiments, determining a voltage bias control parameter matrix from the joint probability density distribution of voltage biases may include:
determining an edge probability density distribution of the test electrical signal according to the joint probability density distribution of the voltage deviation;
and determining a voltage deviation control parameter matrix according to the integral result of the product of the voltage value set of the test electric signal and the edge probability density of the test electric signal on a voltage value distribution domain.
In some embodiments, performing group control compensation on the plurality of test electrical signals to be output according to the voltage deviation control parameter matrix may include:
adding a group control compensator into a primary winding of a multi-output transformer in a semiconductor test power supply circuit;
And determining the control parameters of the group control compensator according to the voltage deviation control parameters, and performing group control compensation on a plurality of test electric signals to be output through the group control compensator.
In some embodiments, according to the up-control time, performing sequential time-sharing compensation on the plurality of standard deviation electric signals through a preset open-loop compensator may include:
sequencing the plurality of standard deviation electrical signals according to the upper control time corresponding to the plurality of standard deviation electrical signals to obtain a sequencing result;
comparing the standard deviation voltage value set with standard voltage parameters to obtain standard deviation voltage deviation, and dividing a plurality of standard deviation electric signals into a positive deviation electric signal group and a negative deviation electric signal group according to the positive and negative polarities of the standard deviation voltage deviation;
setting a forward open loop integral compensator, and performing sequential time-sharing compensation on the forward deviation electric signal groups through the forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals;
and setting a reverse open loop integral compensator, and performing sequential time-sharing compensation on the reverse deviation electric signal groups through the reverse open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals.
In some embodiments, acquiring the plurality of test electrical signals to be output by the semiconductor test power supply output terminal may include:
rectifying an alternating current power supply signal received by the input end of the semiconductor test power supply to obtain rectified pulsating direct current voltage, filtering the pulsating direct current voltage to obtain primary side voltage, and transforming the primary side voltage to obtain a plurality of test electric signals to be output by the output end of the semiconductor test power supply.
In some embodiments, after transforming the primary voltage, obtaining the plurality of test electrical signals to be output by the output end of the semiconductor test power supply may include:
transforming the primary side voltage signals through a multi-output transformer to obtain a plurality of secondary side voltage signals;
and adding a coupling inductor with the same turns ratio as that of the secondary winding of the multi-output transformer into the secondary winding of the multi-output transformer, and obtaining a plurality of corresponding test electric signals after reducing voltage fluctuation of the plurality of secondary voltage signals through the coupling inductor.
In some embodiments, the pulsating direct current voltage is filtered by a pi passive filter circuit.
In a second aspect, the present application provides a high precision semiconductor test power supply multiplexing control system, comprising:
The test electric signal acquisition module is used for acquiring a plurality of test electric signals to be output by the output end of the semiconductor test power supply;
the test electric signal acquisition processing module is used for carrying out voltage acquisition on a plurality of test electric signals to be output by the output end of the semiconductor test power supply to obtain a voltage value set of the test electric signals, and comparing the voltage value set with standard voltage parameters to obtain a voltage parameter deviation set;
the first group control compensation module is used for carrying out non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter when the number of the plurality of output test electric signals is higher than a preset group control threshold value, obtaining the joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter according to the joint probability density distribution of the voltage deviation, and carrying out group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter, so as to obtain a plurality of corresponding standard deviation electric signals;
the second group control compensation module is used for determining the discrete probability distribution of the voltage deviation according to the voltage parameter deviation set when the number of the plurality of output test electric signals is lower than a preset group control threshold value, determining the mathematical expected value of the voltage deviation according to the discrete probability distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the mathematical expected value of the voltage deviation and the standard voltage parameter, and performing group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
The sequential time-sharing compensation module is used for carrying out voltage acquisition on a plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set, carrying out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time through a preset open loop compensator to obtain a plurality of corresponding compensation test power supply voltages, and taking the plurality of compensation test power supply voltages as multiplexing output voltages of a semiconductor test power supply.
In some embodiments, the sequential time-sharing compensation module may include:
the upper control time determining submodule is used for carrying out voltage acquisition on a plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, and determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set;
the sequencing sub-module is used for sequencing the plurality of standard deviation electric signals according to the upper control time corresponding to the plurality of standard deviation electric signals to obtain a sequencing result;
the positive and negative deviation electric signal group dividing sub-module is used for comparing the standard deviation voltage value set with standard voltage parameters to obtain standard deviation voltage deviation, and dividing a plurality of standard deviation electric signals into a positive deviation electric signal group and a negative deviation electric signal group according to the positive and negative polarities of the standard deviation voltage deviation;
The forward open loop integral compensation sub-module is used for sequentially performing time-sharing compensation on the forward deviation electric signal groups through a preset forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals;
and the reverse integral compensation sub-module is used for carrying out sequential time-sharing compensation on the reverse deviation electric signal groups through a preset reverse open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals.
In a third aspect, the present application provides a computer readable storage medium storing a computer program which when executed by a processor implements the aforementioned high precision semiconductor test power supply multiplexing control method.
The technical scheme provided by the embodiment of the application has the following beneficial effects:
the method comprises the steps of acquiring voltages of a plurality of test electric signals to be output by a high-precision semiconductor test power supply to obtain a voltage value set of the test electric signals, and comparing the voltage value set with standard voltage parameters to obtain a voltage parameter deviation set; when the number of the test electric signals to be output is higher than a preset group control threshold, carrying out non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter to obtain the joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter according to the joint probability density distribution of the voltage deviation, and carrying out group control compensation on a plurality of test electric signals to be output according to the voltage deviation control parameter to obtain a plurality of corresponding standard deviation electric signals; the method comprises the steps of carrying out voltage acquisition on a plurality of standard deviation electric signals subjected to group control compensation to obtain a standard deviation voltage value set, determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set, carrying out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time through a preset open loop compensator to obtain a plurality of corresponding compensation test power supply voltage signals, and taking the plurality of compensation test power supply voltage signals as final multipath voltage output of a semiconductor test power supply.
Drawings
FIG. 1 is a schematic diagram of exemplary hardware and/or software of a high precision semiconductor test power supply according to some embodiments of the present application;
FIG. 2 is an exemplary flow chart of a high precision semiconductor test power supply multiplexing control method according to some embodiments of the present application;
FIG. 3 is an exemplary flow chart for acquiring a plurality of test electrical signals to be output at a high precision semiconductor test power supply output, according to some embodiments of the present application;
FIG. 4 is a schematic diagram of exemplary hardware and/or software of a high precision semiconductor test power supply multiplexing control system according to some embodiments of the application;
FIG. 5 is a schematic diagram of exemplary hardware and/or software of a sequential time-sharing compensation module shown in accordance with some embodiments of the present application.
Description of the embodiments
The technical problem to be solved by the application is to provide a high-precision semiconductor test power supply multi-output control method and system, which can reduce the cross adjustment rate of multi-output voltages when the high-precision semiconductor test power supply multi-output voltage is used, and can provide good voltage stabilizing performance.
Reference will now be made in detail to exemplary embodiments, examples of which are illustrated in the accompanying drawings.
FIG. 1 is a schematic diagram of exemplary hardware and/or software of a high-precision semiconductor test power supply 100 according to some embodiments of the present application, including: the main controller, the alternating current voltage source, the rectifying circuit, the filter circuit and the multi-output transformer are respectively described as follows:
the main controller is mainly used for communicating with the upper computer and controlling the semiconductor test power supply, the alternating voltage source is mainly used for providing alternating voltage signals, the rectifying circuit is mainly used for rectifying the alternating voltage signals to obtain pulsating direct current voltage, and the filtering circuit is mainly used for filtering the pulsating direct current voltage to obtain primary side voltage; the multi-output transformer is provided with a plurality of secondary windings and is mainly used for transforming primary voltage to obtain a plurality of test electric signals to be output.
Referring to fig. 2, which is an exemplary flowchart of a high precision semiconductor test power supply multiplexing control method according to some embodiments of the present application, the high precision semiconductor test power supply multiplexing control method 200 mainly includes the steps of:
in step 201, a plurality of test electrical signals to be output by the output end of the semiconductor test power supply are obtained.
In particular, when the method is implemented, an ac power signal received by an input end of a semiconductor test power supply can be rectified to obtain a rectified pulsating dc voltage, the pulsating dc voltage is filtered to obtain a primary side voltage, the primary side voltage is transformed to obtain a plurality of test electrical signals to be output by an output end of the semiconductor test power supply, and in some embodiments, the primary side voltage signal can be transformed by a multi-output transformer to obtain a plurality of secondary side voltage signals; the coupling inductance with the same turn ratio as the secondary winding of the multi-output transformer is added into the secondary winding of the multi-output transformer, after the voltage fluctuation of the plurality of secondary voltage signals is reduced through the coupling inductance, the voltage stabilizing precision of the plurality of secondary signals is improved, and a plurality of corresponding test electric signals are obtained, which are not described herein, wherein the multi-output transformer can be a flyback converter or other devices capable of realizing voltage transformation, and the method is not limited in detail.
In step 202, voltage collection is performed on the plurality of test electrical signals to be output to obtain a voltage value set of the test electrical signals, and the voltage value set is compared with a standard voltage parameter to obtain a voltage parameter deviation set.
In step 203, when the number of the test electrical signals to be output is higher than a preset group control threshold, non-parameter test estimation is performed on the voltage parameter deviation set and the standard voltage parameter to obtain a joint probability density distribution of the voltage deviation, a voltage deviation control parameter matrix is determined according to the joint probability density distribution of the voltage deviation, and group control compensation is performed on a plurality of test electrical signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electrical signals.
In step 204, when the number of the plurality of test electrical signals to be output is lower than a preset group control threshold, determining a discrete probability distribution of the voltage deviation according to the voltage parameter deviation set, determining a mathematical expectation value of the voltage deviation according to the discrete probability distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the mathematical expectation value of the voltage deviation and the standard voltage parameter, and performing group control compensation on the plurality of test electrical signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electrical signals.
In step 205, voltage collection is performed on the plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, upper control time corresponding to each of the plurality of standard deviation electric signals is determined according to the standard deviation voltage value set, sequential time-sharing compensation is performed on the plurality of standard deviation electric signals through a preset open loop compensator according to the upper control time to obtain a plurality of corresponding compensation test power supply voltage signals, and the plurality of compensation test power supply voltage signals are used as final multipath voltage output of a semiconductor test power supply.
Referring now to fig. 3, which is an exemplary flowchart for obtaining a plurality of electrical test signals to be output by a high-precision semiconductor test power supply output according to some embodiments of the present application, a process 300 for obtaining a plurality of electrical test signals to be output by a high-precision semiconductor test power supply output may include:
in step 301, after receiving a power-on command output by the host computer, the host controller controls the semiconductor test power supply to power up, and the input end of the semiconductor test power supply receives a 220V ac voltage signal.
In step 302, the 220V ac voltage is input to a rectifying circuit, for example, a single-phase bridge type uncontrollable rectifying circuit, to rectify the 220V ac voltage, thereby obtaining a pulsating dc voltage with an average rectified voltage of 200V.
In step 303, the 200V pulsating dc voltage is filtered by a magnetic amplifier, resulting in a smooth and stable 140V primary voltage.
It should be noted that in the prior art, the pulse voltage is filtered by using a passive filter circuit or a low-pass high-pass filter circuit, and the pulse direct current voltage is filtered by reverse magnetization of a magnetic amplifier in this embodiment, where the magnetic amplifier may be a closed magnetic circuit inductance with a magnetic core, the magnetic amplifier has a rectangular hysteresis loop, the ratio of the residual magnetization to the saturation magnetization is greater than 0.8, and the saturation characteristic of the magnetic amplifier is used to control the on and off time of the switch.
In step 304, the 140V primary side voltage is transformed by a multi-output transformer, for example, by a flyback transformer in continuous conduction mode (CCM, continuous Conduction Mode) (inductor current continuous mode) of the plurality of secondary sides, so as to obtain test electrical signal outputs corresponding to the plurality of secondary sides.
It should be noted that, in the process of transforming the primary voltage, the main controller may output a pulse-width modulation (PWM) pulse sequence according to a preset voltage parameter input by the upper computer, and the PWM pulse sequence may control the on/off of the flyback converter, so as to control the transformation gain.
In step 305, a plurality of test electrical signals to be output are obtained from the semiconductor test power supply output.
It should be noted that, in the above embodiment, the preset group control threshold may be input by the host computer, and in addition, the mathematical expectation value of the voltage deviation in the above embodiment may be determined by the following formula:
wherein the method comprises the steps of
Mathematical expectation representing the voltage deviation, +.>
Represents the nth element in the voltage parameter deviation set, < ->
Representing the number of elements in the voltage parameter deviation set, < ->
And representing the discrete probability distribution corresponding to the nth element in the voltage parameter deviation set.
When the number of the output test electric signals is higher than a preset group control threshold, the main controller takes the voltage parameter deviation set and the standard voltage parameter as voltage samples to carry out non-parameter test estimation to obtain the joint probability density distribution of the voltage deviation.
In particular, the joint probability density of the voltage deviation can be determined by the following formula:
wherein the method comprises the steps of
For the joint probability density of the voltage deviations, +.>
For an element in the voltage parameter deviation set, +.>
For the standard voltage parameter set in the upper computer, < >>
For the norm of the voltage deviation set over the linear vector space,
representing the range of values of the voltage deviation set.
It should be noted that, the non-parameter verification estimation in the above formula may be a kernel density estimation, and since the kernel density estimation method does not need to assume a feature probability distribution form, only enough samples are required, and the kernel density estimation method can be asymptotically converged to any probability density function, so that the main controller may perform non-parameter verification estimation on the voltage parameter deviation set and the standard voltage parameter by using the above formula as a kernel function, thereby obtaining a joint probability density of the voltage deviation, which is not described herein.
In addition, according to the joint probability density distribution of the voltage deviation, the edge probability density distribution of the test electric signal can be determined, and the product of the voltage value set of the test electric signal and the edge probability density is integrated on the distribution domain of the voltage value to obtain an integrated result, wherein the integrated result can be determined by the following formula:
wherein the method comprises the steps of
For the integration result, +.>
For an element in the voltage parameter deviation set, +.>
To test the edge probability density distribution of the electrical signal, +.>
As a function of continuous random variables on the abscissaAnd (5) differentiating. In particular, the upper and lower limits of the integration can be replaced by the maximum element and the minimum element in the voltage parameter deviation set, and the final integration result is not changed. />
From the integration result, a voltage deviation control parameter may be determined, which may be determined by:
wherein, the liquid crystal display device comprises a liquid crystal display device,
for the voltage deviation control parameter, T is the matrix transpose symbol, < >>
Is a proportional value of->
Is a closed-loop zero value>
Is a closed loop pole value, ">
For integration result +.>
For an element in the voltage parameter deviation set, +.>
For the standard voltage parameter set in the upper computer, < >>
Open-loop zero point of transfer function for mathematical model of multi-output transformer, >
The open loop zero pole of the multi-output transformer is set when the transformer is selected for the open loop pole of the transfer function of the mathematical model of the multi-output transformer.
When the number of the plurality of output test electric signals is lower than a preset group control threshold value, the voltage deviation control parameter determined according to the voltage deviation mathematical expected value and the standard voltage parameter can be determined by the formula, wherein the integral result is required to be replaced by the voltage deviation mathematical expected value.
In addition, in some embodiments, the group control of the plurality of test electrical signals according to the voltage deviation control parameter may be performed by:
adding a group control compensator into a primary winding of the multi-output transformer;
and determining control parameters of the group control compensator according to the voltage deviation control parameters, and performing group control compensation on the plurality of test electric signals through the group control compensator.
The group control compensator may be implemented by a compensation circuit, and the transfer function of the compensation circuit may be:
wherein the method comprises the steps of
For the transfer function of the group control compensator, +.>
For the open-loop amplification of the group control compensator, < >>
Open-loop zero for group control compensator, +.>
Open loop pole for group control compensator, +. >
Is a complex parameter under the Laplace transform.
The group control compensator can be used for improving the control type of the multi-output transformer, reducing the dead-head of the multi-output transformer and compensating the phase lag existing in the poles by zero points by adding a pair of open-loop zero poles at the same position on the root locus diagram of the multi-output transformer, wherein the positions of the zero poles are determined by elements in the voltage deviation control parameter, and the slope of the compensated multi-output transformer in a high frequency band is improved by adding a pole at the original point of the group control compensator.
In addition, the group control compensator can also control the on-off of a switch in the primary winding by controlling the duty ratio of a PWM pulse sequence output by the main controller, and can perform group control compensation on a plurality of test electric signals induced in the secondary winding by controlling the on-off of the switch to obtain a plurality of standard deviation signals; in particular, the group control compensator may be a PWM pulse controller or other device capable of controlling the duty cycle of the voltage, where the duty cycle of the PWM pulse controller itself is determined by the first element in the voltage deviation control parameter, which is not described herein.
By arranging the group control compensator to perform group control compensation on a plurality of test electric signals output by the output end of the semiconductor test power supply, the feedback quantity required by the multi-output test power supply is reduced, and the multi-channel voltage output compensation method of the semiconductor test power supply with low cost and small volume is realized.
In addition, in some embodiments, voltage acquisition is performed on the plurality of standard deviation electrical signals after group control, and after the standard deviation voltage value set is obtained, the method further includes:
and setting a judging condition, and respectively judging whether a plurality of standard deviation electric signals in the standard deviation voltage value set are added into the sequential time-sharing compensation by the main controller.
The determination condition may be represented by the following formula:
the decision condition may be expressed as that a sample variance of the standard deviation voltage value and the power supply standard voltage parameter is smaller than a mean square error of the standard deviation voltage value set, wherein,
represents the nth element in the standard deviation voltage value set, ">
Represents the standard deviation electrical signal voltage value of the decision, +.>
And n is the number of elements of the standard deviation voltage value set for the standard voltage parameter set in the upper computer.
When the standard deviation electric signal meets the judging condition, the standard deviation electric signal is multiplexed by the semiconductor test power supply, and when the standard deviation electric signal does not meet the judging condition, the standard deviation electric signal needs to be sequentially compensated in a time-sharing mode by an open loop compensator.
In addition, as a preferred embodiment, the up-control time may be determined by the following equation:
wherein, the liquid crystal display device comprises a liquid crystal display device,
the upper control time corresponding to the standard deviation electric signals respectively, < >>
For the control period of the preset open-loop compensator in the master controller, +.>
Represents the nth element in the standard deviation voltage value set, ">
Represents the standard deviation electrical signal voltage value of the decision, +.>
And n is the number of elements of the standard deviation voltage value set for the standard voltage parameter set in the upper computer.
In addition, in some embodiments, an open-loop compensator is provided, and according to the upper control time, sequential time-sharing compensation of the plurality of standard deviation electric signals by the open-loop compensator can be implemented in the following manner, namely:
sequencing the plurality of standard deviation electrical signals according to the upper control time corresponding to the plurality of standard deviation electrical signals to obtain a sequencing result; it should be noted that the sorting result can determine the order from big to small by the upper control time, and then the sorting result can determine the compensating order of the open loop compensator order time-sharing compensation;
dividing the plurality of standard deviation electric signals into a positive deviation electric signal group and an inverse deviation electric signal group according to the standard deviation voltage value deviation set, wherein the standard deviation voltage value corresponding to the positive deviation electric signal is smaller than zero, and the standard deviation voltage value corresponding to the inverse deviation electric signal is larger than zero;
Setting a forward open loop integral compensator, and performing sequential time-sharing compensation on the forward deviation electric signal groups through the forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals;
and setting a reverse open loop integral compensator, and performing sequential time-sharing compensation on the reverse deviation electric signal groups through the reverse open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals.
It should be noted that, in some embodiments, the implementation of the sequential time-sharing compensation of the positive deviation electric signal group by the forward open loop integral compensator may be as follows:
and a constant forward voltage is input to an RC (Resistor-capacitor) operational amplifier integrating circuit which is connected in parallel with a secondary winding of the transformer and corresponds to the positive deviation electric signal through the forward open loop compensator, the integration time of the RC operational amplifier integrating circuit is determined by upper control time, the output of the RC operational amplifier integrating circuit is linearly related to the integration time, and finally, a step voltage signal with the same deviation as the standard deviation voltage value is generated at the secondary winding, so that the mutual influence between loads at an output end is reduced, and the compensation of the standard deviation voltage is realized.
Similarly, the reverse open loop compensator can compensate the standard deviation voltage by inputting a constant reverse voltage into the RC operational amplifier integrating circuit, thereby generating a reverse step signal.
In specific implementation, the forward open-loop compensator and the reverse open-loop compensator may be a constant voltage source with a change-over switch or other constant power sources capable of applying voltage to the RC operational amplifier integrating circuit, and for example, an energy storage capacitor may be disposed in the RC operational amplifier integrating circuit to avoid voltage drop of the RC operational amplifier circuit, which is not described herein again.
In addition, the control period of the open loop compensator can be preset in the main controller, in one control period, the same positive deviation signal or reverse deviation signal is only subjected to time-sharing compensation once according to the sequence of the sequencing result, the energy lost by the energy storage capacitor in the RC operational amplifier circuit can be supplemented through the time-sharing compensation of the open loop compensator, and the number of compensators of the multiplexed semiconductor test power supply is reduced through the time-sharing multiplexing of the open loop compensator, so that the volume and maintenance cost of the test power supply are reduced, the mutual influence among loads at the output end of the test power supply is reduced, and the cross adjustment rate of the output of the test power supply is reduced.
The host controller may be a programmable array logic (FPGA, field Programmable Gate Array) chip or other devices capable of implementing control, the host computer may be a computer connected to a semiconductor test power supply, and parameters preset in the host controller may be input by a user keyboard, which will not be described herein.
Additionally, as shown in fig. 4, which is a schematic diagram of exemplary hardware and/or software of a high-precision semiconductor test power supply multiplexing control system according to some embodiments of the present application, the high-precision semiconductor test power supply multiplexing control system 400 may include: the test electric signal acquisition module 401, the test electric signal acquisition processing module 402, the first group control compensation module 403, the second group control compensation module 404 and the sequential time-sharing compensation module 405 are respectively described as follows:
the test electric signal acquisition module 401 is mainly used for acquiring a plurality of test electric signals to be output by the output end of the semiconductor test power supply;
the test electric signal acquisition processing module 402 is mainly used for carrying out voltage acquisition on a plurality of test electric signals to be output by the output end of the semiconductor test power supply to obtain a voltage value set of the test electric signals, and comparing the voltage value set with a standard voltage parameter to obtain a voltage parameter deviation set;
The first group control compensation module 403 is mainly configured to perform non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter when the number of the plurality of output test electrical signals is higher than a preset group control threshold, obtain a joint probability density distribution of voltage deviation, determine a voltage deviation control parameter according to the joint probability density distribution of voltage deviation, and perform group control compensation on the plurality of test electrical signals to be output according to the voltage deviation control parameter, so as to obtain a plurality of corresponding standard deviation electrical signals;
the second group control compensation module 404 is mainly configured to determine a discrete probability distribution of the voltage deviation according to the voltage parameter deviation set when the number of the plurality of output test electrical signals is lower than a preset group control threshold, determine a mathematical expectation of the voltage deviation according to the discrete probability distribution of the voltage deviation, determine a voltage deviation control parameter matrix according to the mathematical expectation of the voltage deviation and the standard voltage parameter, and perform group control compensation on the plurality of test electrical signals to be output according to the voltage deviation control parameter matrix, so as to obtain a plurality of corresponding standard deviation electrical signals;
the sequential time-sharing compensation module 405 is mainly configured to perform voltage acquisition on a plurality of standard deviation electrical signals after group control to obtain a standard deviation voltage value set, determine an upper control time corresponding to the plurality of standard deviation electrical signals according to the standard deviation voltage value set, perform sequential time-sharing compensation on the plurality of standard deviation electrical signals according to the upper control time through a preset open loop compensator to obtain a plurality of corresponding compensation test power supply voltages, and use the plurality of compensation test power supply voltages as multiple output voltages of a semiconductor test power supply.
In some embodiments, as shown in fig. 5, which is a schematic diagram of exemplary hardware and/or software of the sequential time-sharing compensation module 405, the sequential time-sharing compensation module 405 may include: the up-control time determining submodule 4051, the sorting submodule 4052, the positive and negative deviation electric signal group dividing submodule 4053, the forward open loop integral compensation submodule 4054 and the reverse integral compensation submodule 4055 are respectively described as follows:
the upper control time determining submodule 4051 is mainly used for carrying out voltage acquisition on a plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, and determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set;
the sequencing sub-module 4052 is mainly configured to sequence the plurality of standard deviation electrical signals according to the upper control time corresponding to the plurality of standard deviation electrical signals, so as to obtain a sequencing result;
the positive and negative deviation electric signal group dividing submodule 4053 is mainly used for comparing the standard deviation voltage value set with standard voltage parameters to obtain standard deviation voltage deviation, and dividing a plurality of standard deviation electric signals into a positive deviation electric signal group and a negative deviation electric signal group according to the positive and negative polarities of the standard deviation voltage deviation;
The forward open loop integral compensation sub-module 4054 is mainly configured to perform sequential time-sharing compensation on the forward deviation electric signal group through a preset forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the plurality of standard deviation electric signals;
the backward integration compensation sub-module 4055 is mainly configured to perform sequential time-sharing compensation on the backward deviation electric signal group through a preset backward open loop integration compensator according to the sorting result and the upper control time corresponding to the multiple standard deviation electric signals.
In addition, the application also discloses a computer readable storage medium which stores a computer program, and the computer program realizes the high-precision semiconductor test power supply multiplexing output control method when being executed by a processor.
The computer-readable medium or machine-readable medium of the present application may be a tangible medium that can contain, or store a program for use by or in connection with an instruction execution system, apparatus, or device that implements semiconductor test supply voltage multiplexing control, the computer-readable medium may be a machine-readable signal medium or machine-readable storage medium, and the computer-readable medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatuses, or devices, or any suitable combination of the foregoing. More specific examples of a machine-readable storage medium would include an electrical connection based on one or more wires, a portable computer diskette, a hard disk, a random access memory, a read-only memory, an erasable programmable read-only memory or flash memory, an optical fiber, a portable compact disc read-only memory, an optical storage device, a magnetic storage device, or any suitable combination of the foregoing.
In summary, in the process of multiplexing output of the semiconductor test power supply voltage, voltage acquisition is performed on a plurality of test electric signals to be output at the output end of the semiconductor test power supply, when the number of the test electric signals to be output is higher than a preset group control threshold value, non-parameter inspection estimation is performed on a voltage parameter deviation set and the standard voltage parameter, so that joint probability density distribution of the voltage deviation is obtained, edge probability density distribution of the voltage deviation is determined according to the joint probability density distribution of the voltage deviation, and group control compensation is performed on the plurality of test electric signals to be output according to the edge probability density; when the number of the test electric signals to be output is smaller than a preset group control threshold value, group control compensation is carried out on a plurality of test electric signals to be output according to the discrete probability density distribution of voltage deviation, voltage acquisition is carried out on a plurality of standard deviation electric signals obtained after the group control compensation to obtain a standard deviation voltage value set, the upper control time corresponding to the plurality of standard deviation electric signals is determined according to the standard deviation voltage value set, an open-loop compensator is arranged, the open-loop compensator carries out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time to obtain a plurality of corresponding compensation test power voltage signals, the plurality of compensation test power voltage signals are used as final multipath voltage output of a semiconductor test power supply, non-parameter test estimation is carried out on the plurality of test electric signals through collecting test electric signal samples, then group control compensation is carried out according to an estimation result, and then the open-loop compensator carries out a time-sharing sequential compensation method on the plurality of standard deviation electric signals after the group control is arranged.
While preferred embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the application.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present application without departing from the spirit or scope of the invention. Thus, if such modifications and variations of the present application fall within the scope of the claims and the equivalents thereof, the present application is intended to cover such modifications and variations.
Claims (10)
1. A high-precision semiconductor test power supply multiplexing output control method is characterized by comprising the following steps:
acquiring a plurality of test electrical signals to be output by the output end of the semiconductor test power supply;
performing voltage acquisition on the plurality of test electric signals to be output to obtain a voltage value set of the test electric signals, and comparing the voltage value set with standard voltage parameters to obtain a voltage parameter deviation set;
when the number of the test electric signals to be output is higher than a preset group control threshold, carrying out non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter to obtain the joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the joint probability density distribution of the voltage deviation, and carrying out group control compensation on a plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
When the number of the plurality of test electric signals to be output is lower than a preset group control threshold value, determining the discrete probability distribution of the voltage deviation according to the voltage parameter deviation set, determining the mathematical expected value of the voltage deviation according to the discrete probability distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the mathematical expected value of the voltage deviation and the standard voltage parameter, and performing group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
and carrying out voltage acquisition on the plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, determining the respective corresponding upper control time of the plurality of standard deviation electric signals according to the standard deviation voltage value set, carrying out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time through a preset open-loop compensator to obtain a plurality of corresponding compensation test power supply voltage signals, and outputting the plurality of compensation test power supply voltage signals as final multipath voltages of a semiconductor test power supply.
2. The method of claim 1, wherein determining a voltage bias control parameter matrix from the joint probability density distribution of voltage biases comprises:
Determining an edge probability density distribution of the test electrical signal according to the joint probability density distribution of the voltage deviation;
and determining a voltage deviation control parameter matrix according to the integral result of the product of the voltage value set of the test electric signal and the edge probability density of the test electric signal on a voltage value distribution domain.
3. The method of claim 1, wherein group-control compensating the plurality of test electrical signals to be output according to the voltage deviation control parameter matrix comprises:
adding a group control compensator into a primary winding of a multi-output transformer in a semiconductor test power supply circuit;
and determining the control parameters of the group control compensator according to the voltage deviation control parameters, and performing group control compensation on a plurality of test electric signals to be output through the group control compensator.
4. The method of claim 1, wherein sequentially time-sharing compensating the plurality of standard deviation electrical signals by a preset open loop compensator according to the up-control time comprises:
sequencing the plurality of standard deviation electrical signals according to the upper control time corresponding to the plurality of standard deviation electrical signals to obtain a sequencing result;
comparing the standard deviation voltage value set with standard voltage parameters to obtain standard deviation voltage deviation, and dividing a plurality of standard deviation electric signals into a positive deviation electric signal group and a negative deviation electric signal group according to the positive and negative polarities of the standard deviation voltage deviation;
Setting a forward open loop integral compensator, and performing sequential time-sharing compensation on the forward deviation electric signal groups through the forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals;
and setting a reverse open loop integral compensator, and performing sequential time-sharing compensation on the reverse deviation electric signal groups through the reverse open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals.
5. The method of claim 1, wherein obtaining a plurality of test electrical signals to be output by the semiconductor test power supply output comprises:
rectifying an alternating current power supply signal received by the input end of the semiconductor test power supply to obtain rectified pulsating direct current voltage, filtering the pulsating direct current voltage to obtain primary side voltage, and transforming the primary side voltage to obtain a plurality of test electric signals to be output by the output end of the semiconductor test power supply.
6. The method of claim 5, wherein transforming the primary voltage to obtain a plurality of test electrical signals to be output by the semiconductor test power supply output terminal comprises:
Transforming the primary side voltage signals through a multi-output transformer to obtain a plurality of secondary side voltage signals;
and adding a coupling inductor with the same turns ratio as that of the secondary winding of the multi-output transformer into the secondary winding of the multi-output transformer, and obtaining a plurality of corresponding test electric signals after reducing voltage fluctuation of the plurality of secondary voltage signals through the coupling inductor.
7. The method of claim 5, wherein the pulsating direct current voltage is filtered by a pi-type passive filter circuit.
8. A high precision semiconductor test power supply multiplexing output control system, comprising:
the test electric signal acquisition module is used for acquiring a plurality of test electric signals to be output by the output end of the semiconductor test power supply;
the test electric signal acquisition processing module is used for carrying out voltage acquisition on a plurality of test electric signals to be output by the output end of the semiconductor test power supply to obtain a voltage value set of the test electric signals, and comparing the voltage value set with standard voltage parameters to obtain a voltage parameter deviation set;
the first group control compensation module is used for carrying out non-parameter test estimation on the voltage parameter deviation set and the standard voltage parameter when the number of the plurality of output test electric signals is higher than a preset group control threshold value, obtaining the joint probability density distribution of the voltage deviation, determining a voltage deviation control parameter according to the joint probability density distribution of the voltage deviation, and carrying out group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter, so as to obtain a plurality of corresponding standard deviation electric signals;
The second group control compensation module is used for determining the discrete probability distribution of the voltage deviation according to the voltage parameter deviation set when the number of the plurality of output test electric signals is lower than a preset group control threshold value, determining the mathematical expected value of the voltage deviation according to the discrete probability distribution of the voltage deviation, determining a voltage deviation control parameter matrix according to the mathematical expected value of the voltage deviation and the standard voltage parameter, and performing group control compensation on the plurality of test electric signals to be output according to the voltage deviation control parameter matrix to obtain a plurality of corresponding standard deviation electric signals;
the sequential time-sharing compensation module is used for carrying out voltage acquisition on a plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set, carrying out sequential time-sharing compensation on the plurality of standard deviation electric signals according to the upper control time through a preset open loop compensator to obtain a plurality of corresponding compensation test power supply voltages, and taking the plurality of compensation test power supply voltages as multiplexing output voltages of a semiconductor test power supply.
9. The system of claim 8, wherein the sequential time-sharing compensation module comprises:
The upper control time determining submodule is used for carrying out voltage acquisition on a plurality of standard deviation electric signals after group control to obtain a standard deviation voltage value set, and determining upper control time corresponding to the plurality of standard deviation electric signals according to the standard deviation voltage value set;
the sequencing sub-module is used for sequencing the plurality of standard deviation electric signals according to the upper control time corresponding to the plurality of standard deviation electric signals to obtain a sequencing result;
the positive and negative deviation electric signal group dividing sub-module is used for comparing the standard deviation voltage value set with standard voltage parameters to obtain standard deviation voltage deviation, and dividing a plurality of standard deviation electric signals into a positive deviation electric signal group and a negative deviation electric signal group according to the positive and negative polarities of the standard deviation voltage deviation;
the forward open loop integral compensation sub-module is used for sequentially performing time-sharing compensation on the forward deviation electric signal groups through a preset forward open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals;
and the reverse integral compensation sub-module is used for carrying out sequential time-sharing compensation on the reverse deviation electric signal groups through a preset reverse open loop integral compensator according to the upper control time corresponding to the sequencing result and the standard deviation electric signals.
10. A computer-readable storage medium storing a computer program, wherein the computer program when executed by a processor implements the high-precision semiconductor test power supply multiplexing control method according to any one of claims 1 to 7.
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